KR102116661B1 - A Connector System For Test Apparatus - Google Patents

Abstract

The present invention is provided in a test apparatus comprising a support unit on which a semiconductor wafer is placed, a base unit on which a probe card and a top plate are mounted, spaced apart from the support and provided with a plurality of contact terminals on an upper side thereof; A plurality of connector assemblies inserted into the upper plate, a first driving ring rotatably provided on the upper plate, and a first driving ring provided on the upper plate and connected to the first driving ring on one side It relates to a connector system for a test device consisting of a driving means for rotating, and an operation means for approaching or separating the connector assembly with a probe card by rotation of the first driving ring.

Description

A connector system for a test device {A Connector System For Test Apparatus}

The present invention relates to a connector system of a test apparatus in which a semiconductor or the like is tested.

The wafer is inspected for the amount and defect by measuring the electrical characteristics of each semiconductor chip formed before entering the cutting step for the package process using a test device. Such a test apparatus includes a support on which a semiconductor wafer is placed, a base unit spaced apart from the support and mounted with an upper plate on the lower side, and a probe card and an upper plate mounted on the lower side of the upper plate and having a probe portion and a printed circuit board. And a tester connected to a base unit and a connector for detachably coupling the probe card. The test signal generated from the tester is transmitted to the probe card through the contact plates of the top plate mounted on the base unit, the female connector connected to the top plate, and the male connector connected to the printed circuit board of the probe card. do. Then, one side is connected to the printed circuit board formed on the probe card, and the other side transmits a test signal to the semiconductor chip by a probe that comes into contact with the pad of the semiconductor chip. Is transferred to the semiconductor chip to inspect the quantity and defect of the semiconductor chip.

1 is a schematic diagram of a semiconductor test apparatus equipped with a probe card and an upper plate. The semiconductor test apparatus is provided with a support 11 on which a semiconductor substrate 10 on which a plurality of chips (not shown) is formed, and a predetermined distance from the upper road of the support 11, and a probe card 12 and an upper part on the lower side The base unit 14 on which the plate 13 is mounted, one side is connected to the printed circuit board 12a of the probe card 12, and the other side is in electrical contact with a chip pad (not shown) on the semiconductor substrate 10. The probes 12b, the connectors 30 and 40 for detachably coupling the top plate 13 and the probe card 12, and the base unit 15 are connected to the electrical characteristics of the semiconductor chip (not shown). And a tester 16 for inspection. Since the support 11 and the base unit 15 can be moved in close proximity to each other, the probe 12b is brought into close contact with the semiconductor substrate 10 to measure the electrical characteristics of the semiconductor chip, and contacts the terminal pads of the semiconductor chip. can do.

FIG. 2 is a plan view showing the probe card 12, with the probe portion (12b in FIG. 1) formed in the central region of the printed circuit board 12a omitted. Referring to FIG. 2, the printed circuit board 12a of the probe card 12 has a circular plate shape and a plurality of connecting portions 20 are disposed on the plate surface. These connecting portions 21 are divided into four quadrants of the printed circuit board 12a, and spaced a predetermined distance from the central origin O of the printed circuit board 12a in each quadrant, respectively. have. The connecting portion 20 is formed in a long rectangle and a plurality of contact pins (not shown) are connected to the connecting portion 20 so as to be in contact with the probes formed in the probe portion (12b of FIG. 1). It is formed on the surface of the printed circuit board 12a along both sides of the long sides facing each other. A plurality of fixing holes 21 formed at a predetermined depth from the plate surface along the longitudinal direction are formed in the central region of the connecting portion 20 formed in a rectangle.

3 is a perspective view showing a male connector of a connector that connects a probe card and an upper plate, and the body 31 of the male connector 30 is formed in a rectangular shape as shown in the connecting portion (20 in FIG. 1). On the lower surface of the male connector 30 and the body 31, which is in contact with the surface of the connecting portion (20 of FIG. 1), a plurality of fixing pins fixed to the fixing holes (22 of FIG. 2) of the connecting portion (21 of FIG. 2) ( 33) are formed, the male connector 30, the upper region of the body 31 is formed with a male coupling portion 32 protruding a predetermined height from the upper surface of the male connector 30 body 31 is formed. A plurality of first connection contact terminals 34 are formed on both sides of the long axis of the male coupling portion 32 along the length direction of the male connector 30, and the first connection contact terminal 34 has a long side with a long side. It is made of a conductive metal material. The first connection contact terminal 34 is formed to extend from the upper surface of the male coupling part 32 to the lower surface of the male connector body 31 through the body 31 of the male connector, and the connection part (20 of FIG. 2) ) In contact with contact pins (not shown) formed to serve to transmit an electrical signal to the top plate (13 in FIG. 1).

Figure 4 is a perspective view showing a female connector of the connector for coupling the probe card and the top plate, the female connector 40 is mounted on one side of the upper plate (13 in FIG. 1), the other side of the probe card (12 in FIG. A male coupling portion 42 is formed in a predetermined space so that the male coupling portion (32 of FIG. 3) of the male connector mounted on) can be inserted and coupled. The female coupling portion 42 is formed in a rectangular shape in accordance with the shape of the male coupling portion (32 in FIG. 3), and the first connection contact terminal formed on the outer surface of the male coupling portion (32 in FIG. 3) on the inner surface ( A plurality of second connection contact terminals 43 that are connected to each other corresponding to 34) of FIG. 3 are formed along the longitudinal direction. The second connection contact terminal 43 is also formed of a rectangular conductive metal piece having a long side, and transmits an electrical signal transmitted from the chip of the semiconductor substrate (10 of FIG. 1) from the first connection contact terminal (34 of FIG. 3). Take and serve as a tester (16 in FIG. 1). Therefore, as the female connector (40 in FIG. 4) connected to the top plate (13 in FIG. 1) and the male connector (30 in FIG. 3) connected to the printed circuit board (12 in FIG. 2) of the probe card 12 are engaged, The test signal transmitted by the probe unit 12b is transmitted to the tester (16 in FIG. 1) through the probe card 12 and the upper plate (13 in FIG. 1).

As disclosed in the Republic of Korea Publication No. 10-2007-0066692, the cam mechanism, such that the second connection contact terminal 43 of the female connector 40 is pressed to the first connection contact terminal 34 as described in It is equipped and operated to be a non-insertion input connector.

Since the connector system of the test apparatus according to the prior art is protruding, the male connector 30 provided in the probe card 12 is protruded, and is inserted into and connected to the female connector 40 provided in the top plate 40. Since the volume should be in contact with each other, there is a problem in that the number of the first connection contact terminal 34 and the second connection contact terminal 43 cannot be sufficiently increased in a limited space.

Republic of Korea Patent Publication No. 10-2005-0087566 Patent Publication

The present invention has been proposed to solve the above problems, since it is not a structure in which a connector is inserted, it is possible to form more contacts in the same area, and repeatedly and reliably in a structure in which a connector is coupled and a contact is simple. An object of the present invention is to provide a connector system for a test device.

For the above object, the present invention is a test apparatus comprising a support unit on which a semiconductor wafer is placed, a base unit on which a probe card and a top plate are mounted, spaced apart from the support and provided with a plurality of contact terminals on the lower side. Provided; A plurality of connector assemblies inserted into the upper plate, a first driving ring rotatably provided on the upper plate, and a first driving ring provided on the upper plate and connected to the first driving ring on one side Provided is a connector system for a test apparatus comprising a driving means for rotating, and an operating means for approaching or separating a connector assembly with a probe card by rotation of the first driving ring.

In the above, further comprising a coupling means for coupling the probe card and the top plate; The coupling means is characterized in that the probe card and the top plate are engaged before the connector assembly approaches the probe card, and the probe card and the top plate are disengaged before the connector assembly is spaced from the probe card.

In the above, the operation means is provided in the first driving ring in a plurality along the circumferential direction, the first guide groove portion having a first inclined portion extending obliquely with a circumferential direction and an angle, and spaced upward from the upper plate and provided on the upper plate Being a supporting member, a sliding member positioned between the upper plate and the supporting member and having a third guide pin inserted into the first guide groove, and having an inclined portion formed in the operating member and vertically inclined A first guide portion, and a fourth guide pin provided in the connector assembly and inserted into the first guide portion; According to the rotation of the first driving ring, the operating member moves in the radial direction by the third guide pin inserted in the first guide groove, and the connector assembly moves in the vertical direction by the fourth guide pin inserted in the first guide part. Characterized in that.

In the above, the upper plate is further provided with a second driving ring which is connected to the first driving ring and rotates integrally with the first driving ring; The coupling means is provided in plural along the circumferential direction on the second driving ring and has a second guide groove portion having a second inclined portion extending obliquely with a circumferential direction and an angle, and protruding toward the upper plate portion of the probe card and spaced apart in the circumferential direction It is provided in plurality and is provided with a second guide pin in which a second guide hole is formed in a radial direction, and one side is inserted into the second guide groove and is made of a fixing pin provided on an upper plate so as to extend in a radial direction; When the second driving ring rotates, the fixing pin inserted in the second guide groove moves forward and backward toward the second guide pin, and the fixing pin is inserted into the second guide hole while the upper plate and the probe card are engaged, and the fixing pin It is characterized in that the upper plate and the probe card are separated from the second guide hole while retracting.

In the above, the first inclined portion formed in the first driving ring and the second inclined portion formed in the second driving ring are formed to have a phase difference, so that the coupling means is operated before the connector assembly approaches the probe card by operation of the operating means. The probe card is coupled to the top plate, and the connector assembly is characterized in that the probe card and the top plate are disengaged before being spaced apart from the probe card.

In the above, the upper plate is spaced along the circumferential direction, a plurality of connector installation holes are formed, and an upper plate main body part having a plurality of connecting holes extending in a circumferential direction by forming an arc shape on the radially outer side of the connector installation hole, and the upper plate body It is provided with a concentric circle at the bottom of the part and has an outer ring portion and an inner ring portion on a ring having a radial gap, and an inner side connected to the inner ring end portion and an outer side connected to the outer ring end portion and provided at the same position as the connector installation hole. It is made of a lower plate portion formed with a plurality of connector mounting holes to come; The first driving ring is rotatably provided on the upper surface of the upper plate main body portion in the radially outer side of the connector installation hole, and the second driving ring is radially disposed between the outer ring portion and the inner ring portion in the vertical direction. It is located between and provided to be rotatable, and the first driving ring and the second driving ring are connected to both sides of the connecting member passing through the connecting hole in the vertical direction and are characterized in that they rotate integrally.

In the above, the lower plate portion has a fixed pin guide hole extending in the radial direction and the fixing pin is slidably inserted, and a second guide pin hole extending in the vertical direction and inserting the second guide pin and communicating with the fixing pin guide hole. Is formed; The fixing pin is characterized in that the upper plate and the probe card are coupled while being inserted into the second guide hole of the second guide pin inserted in the second guide pin hole by moving inward in the radial direction as the second driving ring rotates.

In the above, the upper surface of the upper plate is spaced in the circumferential direction and is located on the outside of the first drive ring in the radial direction and further includes a plurality of support rollers that contact the first drive ring on the outer diameter side to support the first drive ring. It is characterized by.

In the above, the driving means, one side is rotatably fixed to the upper plate on the outside of the first driving ring in the radial direction, and the other side is one or more fluid operated reciprocating cylinders rotatably fixed to the first driving ring; The first driving ring is reciprocated by the reciprocating operation of the driving means.

According to the connector system 1000 for a test apparatus according to the present invention, since the connector is not inserted, it is possible to form more contacts in the same area. This release process can be reliably and repeatedly performed, and there is an effect that the operation means and the operation of the coupling means are simple structures.

1 is a schematic diagram of a semiconductor test apparatus equipped with a probe card and an upper plate,
2 is a plan view showing a probe card,
Figure 3 is a perspective view showing the male connector of the connector for coupling the probe card and the top plate,
Figure 4 is a perspective view showing the female connector of the connector for coupling the probe card and the top plate,
5 is a perspective view showing an upper plate and a probe card constituting the connector system of the test apparatus of the present invention,
6 is a bottom perspective view showing the top plate,
7 is a perspective view of the upper plate shown in FIG. 6,
Figure 8 is an enlarged view of part A of Figure 6,
9 is a perspective view showing a probe card,
10 is an enlarged view of part A of FIG. 9,
11 is a perspective view showing a connector assembly provided in the connector system of the present invention,
12 is an enlarged view of a part of FIG. 11,
13 is a partially exploded perspective view showing a connector subassembly provided in the connector assembly of FIG. 11,
14 is a perspective view showing an upper plate main body,
15 is a bottom perspective view showing the upper plate main body;
16 is a plan view showing a first driving ring provided on the upper plate,
17 is a perspective view showing a second driving ring provided on the upper plate,
18 and 19 are some perspective views illustrating a structure in which the connector assembly is coupled to the upper plate main body,
20 is a partial perspective view showing a state in which the connector assembly is coupled to the upper plate main body;
21 to 23 are cross-sectional perspective views illustrating the operation of the connector system of the test apparatus according to the present invention,
24 is a partial plan view of the first driving ring and the second driving ring shown to explain the operation of the first driving ring and the second driving ring.
25 is a cross-sectional perspective view illustrating a modified example of the operation means ,
FIG. 26 is a perspective view showing the rotation support pin illustrated in FIG . 25 .

Hereinafter, a connector system for a test apparatus according to the present invention will be described in detail with reference to the drawings.

5 is a perspective view showing an upper plate and a probe card constituting the connector system of the test apparatus of the present invention, FIG. 6 is a bottom perspective view showing the upper plate, and FIG. 7 is a perspective view of the upper plate shown in FIG. 8 is an enlarged view of part A of FIG. 6, FIG. 9 is a perspective view showing a probe card, FIG. 10 is an enlarged view of part A of FIG. 9, and FIG. 11 is a connector assembly provided in the connector system of the present invention. One perspective view, FIG. 12 is an enlarged view of a part of FIG. 11, FIG. 13 is an exploded perspective view of a part of the connector subassembly provided in the connector assembly of FIG. 11, and FIG. 14 is a perspective view of the top plate body part , FIG. 15 is a bottom perspective view showing the upper plate main body, FIG. 16 is a plan view showing a first driving ring provided in the upper plate, and FIG. 17 is a perspective view showing a second driving ring provided in the upper plate, 18 and 19 are some perspective views illustrating a structure in which the connector assembly is coupled to the upper plate main body, and FIG. 20 is a partial perspective views showing a state in which the connector assembly is coupled to the upper plate main body, and FIG. 21. 23 is a cross-sectional perspective view illustrating a driving of a connector system of a test apparatus according to the present invention, and FIG. 24 is a first driving ring illustrated to explain the operation of the first driving ring and the second driving ring. A partial plan view of a second driving ring, and FIG. 25 is a cross-sectional perspective view illustrating a modified example of driving of the connector system of the test apparatus according to the present invention, and FIG. 26 shows a rotation support pin illustrated in FIG. 25 It is an enlarged perspective view. In the drawings, the illustration of the configuration not related to the present invention is omitted.

In FIG. 9, the contact terminals 1207 are provided in a plurality of arrangements between the second guide pins 1203, but only the arrangement between the two second guide pins 1203 is shown, and the remaining between the second guide pins 1203 is shown. The illustration of the arrangement is omitted.

Hereinafter, for convenience of description, the vertical direction of FIG. 1 will be described in the vertical direction.

The connector system 1000 for a test apparatus according to the present invention includes a support on which a semiconductor wafer is placed, a probe card 1200 and a top plate that are spaced apart from the support and are provided with a plurality of contact terminals 1205 on the lower surface. It is provided and operated in a test apparatus consisting of a base unit to which the 1100 is mounted. The top plate 1100 and the probe card 1200 are positioned facing each other.

The connector system 1000 for the test apparatus includes a plurality of connector assemblies 1200 inserted into the top plate 1100 and a first driving ring 1190 rotatably provided in the top plate 1100, It is provided on the top plate 1100, one side is connected to the first driving ring 1190 driving means for rotating the first driving ring 1190, and the connector assembly by the rotation of the first driving ring 1190 It consists of an operating means to approach (1120) to the probe card 1200 or spaced apart from the probe card 1200. The connector assembly 1120 approaches the probe card 1200, and a connector pin 1126 provided in the connector assembly 1120 contacts the contact terminal 1207.

The top plate 1100 will be described.

5, 6, 7, 7, 8, 14, 15, the top plate 1100 includes a top plate portion 1110 and a plurality of connector assemblies provided in the top plate portion 1110 ( 1120), and the driving means is installed and provided on the upper plate portion 1110.

The upper plate portion 1110 constituting the upper plate 1100 includes an upper plate body portion 1111, an outer ring portion 1113, an inner ring portion 1115, and a lower plate portion 1117.

The upper plate main body portion 1111 is illustrated in a rectangular plate shape, but is not limited thereto and may have various shapes as necessary. A plurality of connector installation holes 1111a spaced apart from each other along the circumferential direction and penetrated in the vertical direction are formed in the upper plate body part 1111. A plurality of connecting holes 1111b forming an arc shape on the radially outer side of the connector installation hole 1111a, extending in the circumferential direction, and spaced from each other in the circumferential direction are formed. The connecting hole 1111b is formed through a vertical direction. A plurality of support roller mounting holes 1111c are spaced apart from each other in the circumferential direction on the outer side in the radial direction of the connecting hole, and are formed through the vertical direction. Between the connector installation holes 1111a, one or more support member mounting holes 1111d are formed through the vertical direction. A second pin hole 1111e that is opened upward in the radially inner and outer sides of the connector installation hole 1111a is formed. The second pin hole 1111e is formed by being spaced in the radial direction from the inner end and the outer end of the connector installation hole 1111a.

A support roller 1170 is installed in the support roller mounting hole 1111c. The support roller 1170 is provided to be positioned on the top of the top plate 1100. The support roller 1170 is located outside the first driving ring 1190 and contacts the first driving ring 1190 from an outer diameter side to support the first driving ring 1190.

The outer ring portion 1113 and the inner ring portion 1115 are provided extending downwardly to the lower portion of the upper plate main body portion 1111 and are formed to form concentric circles and have a gap in a radial direction. The inner ring portion 1115 is provided concentrically in the radially inner side of the outer ring portion 1113.

In the above, the virtual circle of the plurality of connector installation holes 1111a, the virtual circle of the plurality of connection holes 1111b, the virtual circle of the plurality of support roller mounting holes 1111c, and the outer ring portion 1113 , The inner ring portion 1115 and the first driving ring 1190 and the second driving ring 1140 described below form concentric circles.

The lower plate portion 1117 has an annular plate shape, and an inner side is connected to an end portion of the inner ring portion 1115 and an outer side is connected to an end portion of the outer ring portion 1113. A plurality of connector mounting holes 1117a are formed in the lower plate portion 1117 so as to be in the same position as the connector installation holes 1111a. Between the connector mounting holes 1117a, a second guide pin hole 1117b into which the second guide pin 1203 provided protruding upwardly into the probe card 1200 is inserted is formed downwardly.

The connector assembly 1120 is positioned to be movably inserted up and down in the connector installation hole 1111a and the connector mounting hole 1117a of the upper plate portion 1111, and the connector pin 1126 provided in the connector assembly 1120 ) Is provided downwardly.

The probe card 1200 will be described.

As shown in FIGS. 5, 9 and 10, the probe card 1200 is provided to be spaced apart from each other along the circumferential direction of the card body portion 1201, which is a circular plate shape, and protrudes upward. It consists of a plurality of second guide pin 1203. Between the second guide pins 1203, a contact terminal arrangement including a plurality of contact terminals 1207 is provided. The contact terminal 1207 is provided to be exposed upward.

A second guide hole 1203a penetrated in the radial direction is formed in the second guide pin 1203. The card body portion 1201 is formed by opening one or more first guide pin holes 1205 for each arrangement in the radially inner and outer sides of the contact terminal arrangement.

The connector assembly will be described.

6, 7, 7, 8, 11, 12 and 13, the connector assembly 1120 is inserted into the top plate 1100 is provided in plurality. 6, 8, and 11, detailed illustrations of the connector pins 1126 provided in the connector assembly 1120 are omitted.

The connector assembly 1120 includes an assembly main body 1121 pierced in the vertical direction, a plurality of rod-shaped coupling members 1123 fixed at a lower portion of the assembly main body 1121 and spaced apart from each other, and A plurality of cables inserted into the assembly body portion 1121 is connected and coupled to the first circuit panel 1124 on one or more plates fixed to the coupling member 1123 and the first circuit panel 1124 It is composed of one or more connector subassemblies 1126 and guide members 1125 coupled to ends of the coupling members 1123 and penetrated in the vertical direction.

The guide member 1125 is located at the end of the coupling member 1123, the first guide pin 1127 is inserted into the end of the coupling member 1123 after the guide member 1125, and the guide member 1125 is coupled. It is provided coupled to (1123). The guide member 1125 is formed in a substantially rectangular shape, has a structure penetrating in the vertical direction, and the first guide pin 1127 is inserted into four corners of the guide member 1125 while screwing at the end of the coupling member 1123 do. The first guide pin 1127 is provided to protrude from the guide member 1125. The first guide pin 1127 is provided with a portion in which a cross-sectional area, such as a screw head, is increased in the middle portion, and a guide member 1125 is caught in the portion, so that the guide member 1125 is coupled to the coupling member 1123 It is provided.

Four guide pins 1121a are projected to both sides of the assembly main body 1121. The fourth guide pin 1121a is provided at a position spaced downwardly from the top of the assembly body portion 1121. When the connector assembly 1120 is installed on the top plate 1100 along the circumferential direction, the fourth guide pin 1121a of either connector assembly 1120 is provided to protrude toward the adjacent connector assembly 1120. The radially inner end portion and the outer end portion of the assembly body portion 1121 have inward and outwardly protruding structures, respectively, and a first pin hole 1121c penetrated in the vertical direction is formed in this portion. The pin is inserted into the first pin hole 1121c, the downward projecting portion is slidably inserted into the second pin hole 1111e, and the connector assembly 1120 is provided to be movable in the vertical direction.

As shown in FIG. 13, the connector subassembly 1126 is inserted into both the slit of the pin body portion 1126-1 having a plurality of slits on both sides, and the pin body portion of the pin body portion 1126-1. It consists of a plurality of connector pins (1126-3) coupled to (1126-1).

The connector pin 1126-3 includes a pin body 1126-3a extending in the vertical direction as a conductor, and a first pin protrusion 1126-3d protruding laterally from one end of the pin body 1126-3a. , Located between the first pin protrusion (1126-3d) and the elastic deformation portion (1126-3c), the elastic deformation portion (1126-3c) extended by bending at least three times at the other end of the pin body (1126-3a) It consists of a second pin protrusion (1126-3b) protruding in the protruding direction of the first pin protrusion (1126-3d). When the connector pin 1126-3 is inserted into and coupled to the slit of the pin body 1126-1, the first pin protrusions 1126-3d are provided to face each other, and the second pin protrusions 1126-3b It passes through the slit and is inserted into the pin body portion 1126-1. And a part of the elastic deformation portion 1126-3c protrudes from the pin body portion 1126-1. When the connector subassembly 1126 is coupled to the first circuit panel 1124, the first circuit panel 1124 is inserted and coupled between the connector pins 1126-3 on both sides. Contact terminals are provided on both sides of the first circuit panel 1124, and the first protrusions are brought into contact with the contact terminals on both sides.

The operating member will be described.

The connector assembly 1120 is provided with an operating member 1122. The operation member 1122 has a substantially 'U' shape, and the assembly main body 1121 is inserted into the operation member 1122. On both sides of the operation member 1122, a first guide portion 1122a into which the fourth guide pin 1121a is inserted is concavely formed. The first guide portion 1122a may be formed in a through shape. The first guide portion 1122a is formed to be inclined in the vertical direction and is formed to have a length in a direction in which the assembly body portion 1121 is inserted into the operation member 1122.

When the connector assembly 1120 is continuously inserted into the connector installation hole 1111a and the connector mounting hole 1117a of the top plate portion 1110 of the top plate 1100, the operation member 1122 is the top plate portion 1110 ) Is located in contact with the top surface. The operation member 1122 is located between the connector installation hole 1111a. When the connector assembly 1120 is installed on the top plate 1100, the operation member 1122 forms a radially inwardly opened 'U' shape, and the assembly body portion 1121 is an operation member 1122 from the radially inner side. ). A portion of the outer diameter side end of the operation member 1122 is spaced upward from the upper surface of the upper plate portion 1110, and extends outwardly past the connector installation hole 1111a. In addition, a third guide pin 1122b protruding downward from the lower surface is provided in the portion of the operation member 1122 extending outward.

The upper plate 1100 is provided with a support member 1150 spaced apart from the upper portion of the upper plate body portion 1111. The support member 1150 is positioned between the connector installation holes 1111a and is provided in plural. Between the connector installation holes 1111a, one or more support member mounting holes 1111d are formed by opening upward, and a screw 1151 is fastened to the support member mounting holes 1111d to provide a support member 1150. The support member 1150 is formed in a plate shape and may be formed in a form in which the width decreases as it is inward in the radial direction when installed.

The upper surface of the operation member 1122 is provided in contact with the lower surface of the support member 1150 provided on both sides of the connector assembly 1120. The operation member 1122 is provided to be slidable in the radial direction between the lower surface of the support member 1150 and the upper surface of the upper plate main body portion 1111.

A modification example of the operation member will be described.

Both sides of the connector assembly 1120 slidably inserted into the connector mounting hole 1117a may be rotatably coupled to the connector mounting hole 1117a by a rotation shaft provided at a radially inner end of the operation member 1122. By forming concave grooves on both sides of the connector assembly 1120, through the radially inner end of the operation member 1122 to form a through hole formed laterally, inserting the pressing pin 1128 into the through hole and allowing the connector to be inserted into the groove The assembly 1120 may be rotatably coupled to the operation member 1122. A guide roller 1122a-1 protruding radially outward is provided on the radially outer side of the operating member 1122. The rotation axis of the guide roller 1122a-1 is directed in the radial direction. Between the operating member 1122, a rotating support pin 1122a-1 is installed on the upper plate main body portion 1111. The rotating support pin 1122a-1 forms a bent shape as shown in FIG. 26. Both sides of the rotation support pin (1122a-1) is rotatably coupled to the neighboring operating member (1122). On both sides of the circumferential direction of the operation member 1122, a rotation support portion 1121a-1 in which the rotation support pins 1122a-1 are rotatably inserted is formed concavely. 26, reference numeral 1122a-1a shows a coupling hole, and a coupling screw (not shown) is inserted into the coupling hole 1122a-1a so that a rotation support pin 1122a-1 is provided on an upper portion of the upper body portion 1111. Can be installed.

In the radial direction, the rotation support pin 1122a-1 is coupled to the operation member 1122 rotatably between the pressure pin 1128 and the guide roller 1122a-1.

The first driving ring and the second driving ring will be described.

As shown in FIGS. 7, 16 and 18 to 24, the first driving ring 1190 is rotatably provided on the upper surface of the upper plate main body part 1111. The first driving ring 1190 is ring-shaped, and the inner diameter is located in the radially inner side of the third guide pin 1122b and is formed to be spaced apart in the radially outer side than the outer end of the connector installation hole 1111a. The outer diameter of the first driving ring 1190 is formed to have a size that is located outside the radial direction than the connecting hole 1111b. The first guide ring 1191 is formed on the first driving ring 1190, and the first guide groove 1191 may be formed to penetrate through the vertical direction. The first guide grooves 1191 are spaced apart in the circumferential direction and formed in plural. The first guide groove 1191 includes a first guide portion 1191a extending in a circumferential direction and a first inclined portion 1191b extending inward with circumferential reflection and inclination. A plurality of first coupling holes 1193 spaced in the circumferential direction and penetrated in the vertical direction are formed inside the first guide groove portion 1191. The third guide pin 1122b of the operation member 1122 is inserted into the first guide groove 1191. When the first driving ring 1190 rotates, the third guide pin 1122b inserted into the first guide groove 1191 contacts the first inclined portion 1191b, and the operation member 1122 is moved in the radial direction.

17, 21 to 24, the connector system 1000 for a test apparatus according to the present invention has a second driving ring (1140). The second driving ring 1140 is located between the outer ring portion 1113 and the inner ring portion 1115 in the radial direction, and is positioned between the upper plate body portion 1111 and the lower plate portion 1117 in the vertical direction to be rotatable. do. The second driving ring 1140 has a ring shape, and a plurality of second guide grooves 1141 formed of a second guide portion 1141a and a second inclined portion 1141b along a circumferential direction is formed. The second guide groove 1141 is repeatedly formed along a circumferential direction. The second guide portion 1141a is formed along the circumferential direction, and the second inclined portion 1141b is formed to be inwardly inclined with an circumferential direction and an angle. A plurality of second coupling holes spaced apart in the circumferential direction and opened upward are formed on the upper surface of the second driving ring 1140. The second guide groove is formed toward the inner diameter.

The first driving ring 1190 and the second driving ring 1140 penetrate the connecting hole 111b in the vertical direction and are connected to both sides of the connecting member 1001 to rotate integrally. One side of the connecting member 1001 is inserted into the first coupling hole 1193 and the other side is coupled to the second coupling hole.

The operation means will be described.

The operation means for moving the connector assembly 1120 in the vertical direction will be described. The operation means is provided with a plurality of first driving rings 1190 along the circumferential direction and has a first guide groove 1191 having a first inclined portion 1191b extending obliquely with a circumferential direction and an angle, and the upper plate ( Spaced upward from 1100), the support member 1150 provided on the upper plate 1100 and the upper plate 1100 and the support member 1150 are slidably positioned and inserted into the first guide groove 1191 It is provided in the operation member 1122 having a third guide pin (1122b), the first guide portion (1122a) formed on the operation member (1122) and having an inclined portion in the vertical direction, and the connector assembly (1120) It is made of a fourth guide pin 1121a inserted into the first guide portion 1122a. According to the rotation of the first driving ring 1190, the operation member 1122 moves in the radial direction by the third guide pin 1122b inserted in the first guide groove 1191, and the first guide portion 1122a The connector assembly 1120 is moved in the vertical direction by the inserted fourth guide pin 1121a.

The deformation of the operating means will be described.

The operating means is provided on one side of the first driving ring 1190 and is in contact with the first guide surface portion (1191-1) and the guide surface portion (1191-1) that the guide roller (1122a-1) contacts A guide roller (1122a-1) provided on the operating member (1122), located at a radially inner end of the operating member (1122), presses to rotatably couple the connector assembly (1120) and the operating member (1122) to each other A pin 1128 and a rotation support pin 1122a-1 provided on the upper plate main body part 1111 and positioned between the operating members 1122 in a circumferential direction so that both sides are rotatably coupled to the operating members 1122. . The first guide surface portion 1191-1 is formed with a first guide protrusion portion 1191b-1 protruding periodically. When the first driving ring 1190 is rotated by the driving means, the guide roller 1122a-1 rotates in contact with the first guide surface portion 1191-1 and the operating member (1) is driven by the first guide protrusion 1191b-1. 1122) rotates the rotation support pin (1122a-1) to the center of rotation, the connector assembly (1120) rotatably coupled to the pressure pin (1128) moves upward, and the first guide protrusion (1191b-1) is engaged. When released, it moves downward.

The driving means will be described.

One or more fluid-operated reciprocating cylinders, wherein one side of the driving means is rotatably fixed to the upper plate from the outside of the first drive ring 1190 in the radial direction, and the other side is rotatably fixed to the first drive ring 1190. It may be made of (1130). The fluid-operated reciprocating cylinder 1130 is provided to be connected to the first driving ring 1190 at a position to apply an external force of a circumferential component. Due to the reciprocating operation of the driving means, the first driving ring 1190 rotates forward and backward, and the second driving ring 1140 integrally rotating with the first driving ring 1190 rotates forward and backward.

The coupling means will be described.

The connector system 1000 for a test apparatus according to the present invention is provided with coupling means for coupling the top plate 1100 and the probe card 1200. The coupling means is formed on the second driving ring 1140 and has a second guide groove 1141 having a second inclined portion 1141b, and protrudes toward the upper plate portion 1100 on the probe card 1200 in the circumferential direction. A plurality of spaced apart and provided with a second guide pin 1203 in which a second guide hole 1203a is formed in a radial direction, and an upper plate 1100 so that one side is inserted into the second guide groove portion 1141 and extends in a radial direction. It is made of a fixing pin (1160) provided in. The fixing pin 1160 is provided on the upper plate 1100 to be movable in the radial direction.

The lower plate portion 1110 constituting the upper plate portion 1110 extends in a radial direction, and the fixing pin guide hole 1117-1 in which the fixing pin 1160 is slidably inserted, and is extended in the vertical direction to the second A guide pin 1203 is inserted and a second guide pin hole 1117b in communication with the fixing pin guide hole 1117-1 is formed.

When the second driving ring 1140 rotates forward and backward, the fixing pin 1160 inserted into the second guide groove 1141 moves forward and backward toward the second guide pin 1203. When the second driving ring 1140 rotates in one direction, the fixing pin 1160 moves inward in the radial direction to the second guide hole 1203a of the second guide pin 1203 inserted into the second guide pin hole 1117b. As it is inserted, the top plate 1100 and the probe card 1200 are combined. And when rotated in the opposite direction, the fixing pin 1160 is retracted while being separated from the second guide hole 1203a, and the top plate 1100 and the probe card 1200 are separated.

As shown in FIG. 24, when the first driving ring 1190 and the second driving ring 1140 are installed, the first inclined portion 1191b and the second inclined portion 1141b have a phase difference from each other.

When the first driving ring 1190 and the second driving ring 1140 are rotated to one side (A direction in FIG. 24), the fixing pin 1160 is first positioned on the second inclined portion 1141b to fix the pin 1160 ) Is radially inwardly advancing and inserted into the second guide hole 1203a of the second guide pin 1203 so that the top plate 1100 and the probe card 1200 are coupled. And with a time difference, the third guide pin 1122b is located on the first inclined portion 1191b, so that the connector assembly 1120 is moved downward, so that the connector pin 1126-3 is the contact terminal 1207 of the probe card 1200. You come into contact with.

When the first driving ring 1190 and the second driving ring 1140 rotate to the other side (B direction in FIG. 24), the fixing pin 1160 is first released from the second inclined portion 1141b, and thus the fixing pin 1160 The radially outward retreat is disengaged from the second guide hole 1203a of the second guide pin 1203 so that the coupling between the top plate 1100 and the probe card 1200 is released. Then, with a time difference, the third guide pin 1122b deviates from the first inclined portion 1191b, and the connector assembly 1120 is moved upward, so that the connector pin 1126-3 and the contact terminal 1207 of the probe card 1200 Is released.

1000: connector system for test apparatus 1100: top plate
1200: probe card

Claims (10)

It is provided in a test apparatus comprising a support unit on which a semiconductor wafer is placed, a base unit on which a probe card and a top plate are mounted, which are spaced apart from the support and provided with a plurality of contact terminals on an upper surface thereof; A plurality of connector assemblies inserted into the upper plate, a first driving ring rotatably provided on the upper plate, and a first driving ring provided on the upper plate and connected to the first driving ring on one side It consists of a driving means for rotating, and an operation means for approaching or separating the connector assembly with the probe card by rotation of the first driving ring;
Further comprising coupling means for coupling the probe card and the top plate; The coupling means engages the probe card and the top plate before the connector assembly approaches the probe card, and releases the engagement of the probe card and the top plate before the connector assembly is spaced from the probe card;
The operation means is provided on the first driving ring in a plurality along the circumferential direction, the first guide groove portion having a first inclined portion extending obliquely with a circumferential direction and an angle, and the upper plate spaced upward from the upper plate is provided on the upper plate A support member, a sliding member slidably positioned between the top plate and the support member, and having a third guide pin inserted into the first guide groove, and a part formed on the working member and having a portion inclined vertically. It is composed of a first guide portion and a fourth guide pin provided in the connector assembly and inserted into the first guide portion; According to the rotation of the first driving ring, the operating member moves in the radial direction by the third guide pin inserted in the first guide groove, and the connector assembly moves in the vertical direction by the fourth guide pin inserted in the first guide part. Connector system for a test device, characterized in that. It is provided in a test apparatus comprising a support unit on which a semiconductor wafer is placed, a base unit on which a probe card and a top plate are mounted, which are spaced apart from the support and provided with a plurality of contact terminals on an upper surface thereof; A plurality of connector assemblies inserted into the upper plate, a first driving ring rotatably provided on the upper plate, and a first driving ring provided on the upper plate and connected to the first driving ring on one side It consists of a driving means for rotating, and an operation means for approaching or separating the connector assembly with the probe card by rotation of the first driving ring;
Further comprising coupling means for coupling the probe card and the top plate; The coupling means engages the probe card and the top plate before the connector assembly approaches the probe card, and releases the engagement of the probe card and the top plate before the connector assembly is spaced from the probe card;
The actuating means is provided on one side of the first driving ring, the first guiding surface portion contacting the guiding roller, the guiding roller contacting the guiding surface portion and provided on the actuating member, and located at the radially inner end of the actuating member It consists of a pressing pin for rotatably coupling the connector assembly and the actuating member to each other, and is provided between the actuating members in the circumferential direction, and both sides are rotatably coupled to the actuating member so as to be rotatable. 1 The guide system is a connector system for a test apparatus, characterized in that the first guide protrusion is protruded periodically. delete According to claim 1, The upper plate is further provided with a second driving ring connected to the first driving ring integrally rotating with the first driving ring; The coupling means is provided in plural along the circumferential direction on the second driving ring and has a second guide groove portion having a second inclined portion extending obliquely with a circumferential direction and an angle, and protruding toward the upper plate portion of the probe card and spaced apart in the circumferential direction It is provided in plurality and is provided with a second guide pin in which a second guide hole is formed in a radial direction, and one side is inserted into the second guide groove and is made of a fixing pin provided on an upper plate so as to extend in a radial direction; When the second driving ring rotates, the fixing pin inserted in the second guide groove moves forward and backward toward the second guide pin, and the fixing pin is inserted into the second guide hole while the upper plate and the probe card are engaged, and the fixing pin A connector system for a test device, characterized in that the upper plate and the probe card are separated from the second guide hole while retracting. The method according to claim 4, wherein the first inclined portion formed in the first driving ring and the second inclined portion formed in the second driving ring are formed to have a phase difference, so that the connector means the connector assembly is operated by the operation of the actuating means to the probe card. A connector system for a test device characterized in that the probe card and the top plate are engaged before approaching, and the probe card and the top plate are disengaged before the connector assembly is spaced from the probe card. According to claim 5, The upper plate is spaced along the circumferential direction, a plurality of connector installation holes are formed, and an upper plate main body part having a plurality of connecting holes extending in a circumferential direction by forming an arc shape on the radially outer side of the connector installation hole. , The outer ring portion and the inner ring portion having a concentric circle formed in the lower portion of the upper plate main body portion having a gap in the radial direction, the inner side is connected to the end of the inner ring portion and the outer side is connected to the end of the outer ring portion, and the connector is installed It consists of a lower plate portion formed with a plurality of connector mounting holes to come in the same position as the ball; The first driving ring is rotatably provided on the upper surface of the upper plate main body portion in the radially outer side of the connector installation hole, and the second driving ring is radially disposed between the outer ring portion and the inner ring portion in the vertical direction. Located between the rotatably provided, the first driving ring and the second driving ring is connected to both sides of the connecting member through the connecting hole in the vertical direction, the connector system for a test device, characterized in that rotating integrally. The method of claim 6, wherein the lower plate portion extends in the radial direction, the fixing pin guide hole for slidingly inserting the fixing pin, and extending in the vertical direction, the second guide pin is inserted and communicating with the fixing pin guide hole. 2 guide pin holes are formed; The fixing pin is a test device characterized in that the upper plate and the probe card are coupled while being inserted into the second guide hole of the second guide pin inserted into the second guide pin hole by moving inward in the radial direction as the second driving ring rotates. For connector systems. According to claim 1, The upper surface of the upper plate is spaced in the circumferential direction and is located on the outside of the first driving ring in the radial direction, the plurality of support rollers supporting the first driving ring in contact with the first driving ring on the outer diameter side Connector system for a test device, characterized in that it further comprises. The one or more fluid operated reciprocating cylinders of claim 1, wherein the driving means is rotatably fixed to the upper plate on one side of the first driving ring in the radial direction, and the other side is rotatably fixed to the first driving ring. Is; The connector system for a test apparatus, characterized in that the first driving ring is rotated in the reverse direction by the reciprocating operation of the driving means. delete

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