KR102046132B1 - Apparatus for transferring substrates - Google Patents

Abstract

The present invention provides a substrate transfer apparatus. Accordingly, the substrate transfer apparatus is easy for transfer of a substrate and transfer of an overall following process and can more statically and stably perform overall loading, transferring and processing of the overall apparatus. The substrate transfer apparatus includes a main body unit, a first substrate staying unit, a first pick-up module, a second substrate staying unit and a second pick-up module.

Description

Apparatus for transferring substrates

The present invention relates to a substrate transfer apparatus, and more particularly, a substrate transfer apparatus capable of loading, transferring, and processing a substrate, and handling a large amount of substrates more stably and statically, thereby improving an on-site working environment. It is about.

Most technologies for transferring substrates (such as circuit boards) have been concentrated in the areas of initial input and processing, and the speed of transfer between processes and prevention of dropping during transfer. However, most of these substrates are not handled in small quantities, but are handled to be rapidly loaded and processed in large quantities. Therefore, there is a problem in that stable and static handling is difficult in the processing of the substrate transfer and transfer process. Therefore, there is a disadvantage that it is not easy to be able to perform the handling of the substrate more stably.

Korean Patent Registration No. 10-1332318

It is an object of the present invention to provide a substrate transfer device capable of carrying out loading, transfer and processing of substrates, and handling a large amount of substrates more stably and statically, thereby improving field work environment.

The present invention provides a substrate transfer apparatus, comprising: a main body portion (10) for handling a large amount of substrates;

A first substrate retention part 20 provided in the main body part 10 so that the substrate transferred from the previous process remains; A first pickup module 30 for picking up and transporting the substrate of the first substrate stayer 20; The substrate picked up by the first substrate staying part 20 is transported and stayed by the first pickup module 30, and is provided on the main body part 10 to lift the stayed substrate in a vertical direction. A second substrate retention portion 40; And a second pickup module 50 for picking up the substrate lifted by the second substrate holding part 40 and transferring the substrate to a later process, wherein the main body part 10 is inserted into the container 110 at a lower portion thereof. A plurality of pillars 15 may be provided, and the receptor 110 may correspond to the first accommodating part 111 having a longitudinally cut shape and the first accommodating part 111. A second accommodating part 112 for advancing or reversing the first accommodating part 111 is provided through the 113 and the first accommodating part 111 and the second accommodating part 112 are mutually provided. A corresponding hemispherical hollow groove is formed, pressurized to the inside of the pillar 15, the receptor 110 is provided with a fixing module 120 for generating a fixing force between the upper and lower in the height direction, the fixed module ( 120, the upper fixing body 121 provided above in the height direction of the container 110, and the height of the container (110) The lower fixture 123 is provided at the bottom on the top, and the suspension fixture 122 is provided between the upper fixture 121 and the lower fixture 123 in the height direction of the receptor 110 is provided The upper fixture 121, the suspension fixture 122, and the lower fixture 123 are interlocked with each other by a fastening means 124, and the upper fixture 121 is connected to the receptor ( A first central body part 1211 provided to surround and bind 110, a first-first flow body part 1212 provided on one side of the first central body part 1211, and the first central body part A second flow body portion 1213 provided on the other side of the 1211 is provided, and the suspension fixture 122 is provided with a second central body portion 1221 so as to be surrounded by the container 110 and bound. And a 2-1 floating body portion 1222 provided at one side of the second central body portion 1221 and the other side of the second central body portion 1221. The 2-2 fluid body part 1223 is provided, The lower fixed body 123, the third central body portion (1231) and the third central body portion is provided so as to be bound by the container 110, 3-1 flow body portion 1232 provided on one side of the (1231), and 3-2 flow body portion (1233) provided on the other side of the third central body portion (1231), The 1-1 moving body portion 1212 and the 2-2 moving body portion 1223 are interlocked through the first fastening means 1241, and the 2-1 moving body portion 1222 and the third 2 flow body portion 1233 is interlocked through the second fastening means 1242, the first central body portion 1211, the second central body portion 1221 and the third central body portion 1231 is Interlocked with each other by the interlocking bar 125, the second central body portion 1221 is to hold the first central body portion 1211 and the second central body portion 1221 via the interlocking bar 125. To transfer or push the substrate transfer device The ball.

According to the present invention, it is possible to provide a substrate transfer apparatus capable of carrying out loading, transfer, and processing of a substrate, and handling a large amount of substrates more stably and statically, thereby improving an on-site working environment.

1 to 3 are views showing a substrate transfer apparatus according to an embodiment of the present invention.
4 to 11 are views showing the components of the substrate transfer apparatus according to FIG.
12 to 16 illustrate configurations for installing the main body portion, the bottom panel portion, and other portions of the components according to FIGS. 1 to 11.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 to 3 are views illustrating a substrate transfer apparatus according to an embodiment of the present invention. 4 to 11 are diagrams illustrating the components of the substrate transfer apparatus according to FIG. 1. 1 to 11, a substrate transfer apparatus, comprising: a main body portion 10 for handling a large amount of substrates; A first substrate retention part 20 provided in the main body part 10 so that the substrate transferred from the previous process remains; A first pickup module 30 for picking up and transporting the substrate of the first substrate stayer 20; The substrate picked up by the first substrate staying part 20 is transported and stayed by the first pickup module 30, and is provided on the main body part 10 to lift the stayed substrate in a vertical direction. A second substrate retention portion 40; And a second pickup module 50 for picking up the substrate lifted by the second substrate stayer 40 and transferring the substrate to a later process.

The main body 10 is provided with a plurality of pillars 15 to be inserted into the receptor 110 in the lower portion. The receptor 110 is formed in a longitudinally cut first accommodating portion 111 and the first accommodating portion 111 in correspondence with the bar (bar) shaped body 113 through the first A second accommodating part 112 is provided to move the accommodating part 111 forward or backward. The first accommodating portion 111 and the second accommodating portion 112 are formed with a hemispherical hollow groove corresponding to each other, pressurized into the pillar 15, the receptor 110 is upward and upward in the height direction Fixing module 120 for generating a fixing force between the down is provided.

The fixing module 120 has an upper fixing body 121 provided upward in the height direction of the container 110, and a lower fixing body 123 provided at a lower end in the height direction of the container 110; A stop fixture 122 is provided between the upper fixture 121 and the lower fixture 123 in the height direction of the receptor 110. The upper fixture 121, the suspension fixture 122, and the lower fixture 123 are coupled to each other by the fastening means 124.

The upper stationary body 121 includes a first central body part 1211 provided to surround the receptor 110 and a first-first flow body part provided on one side of the first central body part 1211. 1212 and a 1-2 flow body portion 1213 provided on the other side of the first central body portion 1211 are provided.

The suspension fixture 122 has a second central body portion 1221 provided to surround and bound the receptor 110 and a 2-1 fluid body portion provided on one side of the second central body portion 1221. 1222 and the second-2 fluid body portion 1223 provided on the other side of the second central body portion 1221 are provided. The lower fixing body 123 is provided with a third central body part 1231 provided to be bound by the receptor 110 and a 3-1 fluid body part provided at one side of the third central body part 1231. 1232 and the third-2 fluid body 1233 provided on the other side of the third central body part 1231 are provided.

The first-first flow body part 1212 and the second-second flow body part 1223 are interlocked through the first fastening means 1241, and the second-first flow body part 1222 and the second body are arranged. 3-2 the floating body portion 1233 is interlocked through the second fastening means 1242. The first central body part 1211, the second central body part 1221, and the third central body part 1231 are interlocked with each other by an interlocking bar 125, and the second central body part 1221 is provided. The first central body part 1211 and the second central body part 1221 are operated to pull or push through the interlocking bar 125.

The first-first flow body portion 1212 is provided with a first guide portion 1212a which is moved up or down in the first-first flow body portion 1212 between the upper and lower, the first guide portion ( One end of the first fastening means 1241 is engaged with 1212a).

The 2-1 flow body portion 1222 is provided with a second guide portion 1212b which is moved up or down in the 2-1 flow body portion 1222 between the upper and lower, the second guide portion One end of the second fastening means 1242 is coupled to 1212b.

The first-first flow body part 1212 is rotatably provided in a forward rotation or a reverse rotation manner in the first central body part 1211, and the second fastening means 1241 through the second fastening means 1241. 2 The binding force with the floating body portion 1223 can be adjusted. The 2-1 flow body portion 1222 is provided to be rotatable in the forward or reverse rotation manner in the second central body portion 1221, the third through the second fastening means (1242) 2 It is possible to adjust the binding force with the floating body portion (1233).

The first-first flow body portion 1212 and the second-first flow body portion 1222 are rotatably provided in the Y-axis direction, respectively, the first-second flow body portion 1213 and the second. The -2 flow body part 1223 and the 3-2 flow body part 1233 are rotatably provided in the X-axis direction, respectively. The first central body portion 1211, the second central body portion 1221, and the third central body portion 1231 are provided with a plurality of projection protrusions T, respectively. The first fastening means 1241 and the second fastening means 1242 are guided between at least one pair of projection protrusions T, respectively.

The receptor 110 is provided with a plurality of hemispherical first protrusions 111a in the first accommodating portion 111, and a plurality of hemispherical second protrusions 112a in the second accommodating portion 112. 15 is interlocked with the upper body portion 121a, the upper body portion 121a and the built-in rod 121e, and the upper body portion 121a is upward and downward through the built-in rod 121e. It includes a lower body portion 121b to flow.

Between the upper body portion 121a and the lower body portion 121b, a first compartment 121c and a second compartment 121d are provided on an outer circumferential surface of the built-in rod 121e, and the built-in rod ( 121e is a first partition area SP1, a second partition area SP2, and a third partition area SP3 from the top to the bottom of the first partition 121c and the second partition 121d. Is formed.

The first protrusion 111a of the first accommodating part 111 and the second protrusion 112a of the second accommodating part 112 respectively correspond to the first partition area SP1 to the third partition area ( SP3) is inserted and mounted. The upper body part 121a is downward when the first protrusion 111a and the second protrusion 112a are mounted in the first partition area SP1 to the third partition area SP3, respectively. It flows and presses the 1st protrusion 111a and the 2nd protrusion 112a, respectively.

The first protrusion 111a and the second protrusion 112a are provided to be retractable from the inside, and protrude from each other or protrude later. The bottom panel unit 126 is provided below the container 1110. The bottom panel portion 126 includes a first bottom panel portion 1261 to which the first receptor 1101 is mounted, and a second receptor 1102 among the receptors 110 to be mounted. The second bottom panel portion 1262 is provided in the first bottom panel portion 1261 which is forward or backward.

When at least a portion of the second bottom panel part 1262 is accommodated therein, the first bottom panel part 1261 may press the receiving area of the second bottom panel part 1262 from the top to the bottom thereof. The first raising and lowering pressure portion 1261a flowing to the inner side of the bottom panel portion 1261 is provided.

The second bottom panel portion 1262 is a second rising / lowering portion 1262a that is lifted or lowered from the second bottom panel portion 1262 to correct a height with the pressurized first raising / lowering portion 1261a. ) Is provided, the first container 1101 is provided in the first elevating pressing unit (1261a), the second container 1102 is provided in the second elevating pressing unit (1262a). The first elevating pressure portion 1261a is provided with a pair of first reinforcement bodies 127 for pressing the first receptor 1101 therebetween, and the second elevating pressure portion 1262a includes A pair of second reinforcements 128 are provided to press the second receptor 1102 therebetween.

The first reinforcement 127 generates rotational force in one direction while being in contact with the outside of the first receptacle 1101 to generate a fixed force on the first receptacle 1101, and the second reinforcement 128 While generating a rotational force in one direction while being in contact with the outside of the second receptor 1102 generates a fixed force to the second receptor 1102, the first receptor 1101 is the first reinforcement 127 The first region L1 is in contact with the cross-sectional polygonal shape. The second receptor 1102 has a second region L2 in contact with the first reinforcement 127 having a cross-sectional reference polygonal shape.

The first reinforcement 1271 may be reciprocated in a predetermined range from the first base part 1271 and the first base part 1271 to be slid in the first lifting and lowering part 1261a. A first contact part 1272 is provided on the outer side of the first receptor 1101 to apply a rotational force. The first contact part 1272 has a polygonal shape in surface contact with the first area L1. The second reinforcement 1281 is reciprocated in a predetermined range from the second base portion 1281 and the second base portion 1281 flowing in a sliding manner in the second elevating pressure portion 1262a. A second contact portion 1282 is provided on the outside of the second receptor 1102 to apply a rotational force. The second contact portion 1282 has a polygonal shape in surface contact with the second region L2.

12 to 16 illustrate configurations for installing the main body portion, the bottom panel portion, and other portions of the components according to FIGS. 1 to 11. The elastic support 400 includes an upper plate 410, a case 420, and an upper plate support 430. At this time, the elastic support 400 may be formed of two or more. The upper plate 410 is formed in a flat plate shape, is in close contact with the wheel 340, and is supported by the upper plate support part 430.

The case 420 is spaced apart from the lower side of the upper plate 410 and forms an inner space for installing the upper plate support part 430. The upper plate supporter 430 is installed in the inner space of the case 420, and an upper portion thereof is exposed to the upper side of the case 420 to support the upper plate 410 using elastic force. In the elastic support 400 having the above-described configuration, the case 420 is installed on the lower surface of the rotation frame 362 facing the wheel 340, and the rotation frame 362 is in the direction of the wheel 340. As the closer to the upper plate 410 is supported by the upper plate support portion 430 to form an elastic force is in close contact with the wheel 340 to brake the wheel 340. On the other hand, the fastening means 124 may be provided with a material containing an elastomer, rubber, cloth, metal and the like, the thickness thereof may be thin or thick.

The upper plate support part 430 includes a first support part 431 and a plurality of second support parts 432a, 432b, 432c, and 432d. The first support part 431 supports the center of the top plate 410, and supplies the filling liquid to the plurality of second support parts 432a, 432b, 432c, and 432d in the inner space as the top plate 410 descends. . The second support parts 432a, 432b, 432c, and 432d are respectively installed at the lower sides of the corners of the upper plate 410, and support the edges of the upper plate 410 by using an elastic force while being moved upward and downward, and the upper plate 410. As the) is lowered, movement in the vertical direction is braked by the filling liquid supplied from the first support part 431. The upper plate support portion 430 having the above-described configuration efficiently supports the upper plate 410 using elastic force by using the first support portion 431 and the plurality of second support portions 432a, 432b, 432c, and 432d. can do.

On the other hand, the fastening means 124 may be provided including a material such as elastomer, rubber, metal, cloth. The thickness can also vary depending on the strength required.

The first support part 431 includes a first pivotal fastening part 4311, a first connecting ball 4312, a first support bar 4313, a filling liquid tank 4314, and a connection pipe 4315. As shown in FIG. 14, the first pivot fastening part 4311 is installed at the center portion of the lower surface of the upper plate 410, and forms a spherical inner space to connect the first connection balls 4312. The first connecting ball 4312 is formed in a spherical shape corresponding to the shape of the internal space of the first pivot fastening portion 4311, is installed to be rotatable in the internal space of the first pivot fastening portion 4311, and the first Supported by a support bar 4313.

The first support bar 4313 extends from a lower portion of the first connecting ball 4312 to an inner space of the filling liquid tank 4314 in a downward direction to support the first connecting ball 4312, and the upper plate 410. As it descends, it descends together and compresses the filling liquid contained in the filling liquid tank 4314 in the downward direction.

Filling tank 4314 is formed in a cylindrical shape is installed in the inner space of the case 420, the filling liquid is received in the sealed inner space, the lower portion of the first support bar 4313 is inserted into the inner space When the upper plate 410 is lowered, as the lower portion of the first support bar 4313 descends from the upper side of the inner space, the filling liquid is compressed to be supplied to the second support part 432 through the connecting pipe 4315.

At this time, the first support bar 4313 is a rubber corresponding to the shape of the inner space of the filling liquid tank 4314 so that the filling liquid contained in the filling space of the filling liquid tank 4314 can be compressed in the same way as the syringe driving method. Packing material P may be formed on the lower side. The connecting pipe 4315 extends from the lower portion of the filling liquid tank 4314 to the respective second supporting portions 432a, 432b, 432c, and 432d to form a passage through which the filling liquid flows.

Hereinafter, the second support part 432 will be described. The second support part 432 includes a second pivotal fastening part 4321, a second connecting ball 4322, a second support bar 4323, an elastic support part 4324, and a lift adjusting part 4325. As shown in FIG. 14, the second pivot fastening part 4321 is installed at a corner of the lower side of the upper plate 410, and forms a spherical inner space to connect the second connection balls 4322.

The second connecting ball 4322 is formed in a spherical shape corresponding to the shape of the internal space of the second pivotal fastening part 4321, and is installed to be rotatable in the internal space of the second pivotal fastening part 4321. Supported by support bars 4323.

The second support bar 4323 extends from the lower portion of the second connection ball 4322 to the inner space of the case 420 in a downward direction to support the second connection ball 4322, and to the elastic support part 4324. Is supported. The elastic support part 4324 is provided below the second support bar 4323 to support the second support bar 4323 in the inner space of the case 420 by using an elastic force.

The elevating adjustment part 4325 is formed in the shape of a circular tube that forms the through hole 4325h in the vertical direction, and the second support bar 4323 is inserted into the through hole 4325h, and the upper plate 410 is lowered. In this case, as the filling liquid is supplied to the internal space through the connecting pipe 4315 and expanded, the size of the through hole 4325h is reduced so that the second support bar 4323 is not moved. The lifting control unit 4325 is formed of a hard material so that the outer wall 4325o is formed of a hard material so that the filling liquid can be expanded into the inner space where the through hole 4325h is located, and the second support bar ( The inner side 4325i facing the 4323 may be formed of a material that can expand or contract.

The upper plate support part 430 having the above-described configuration supports the upper plate 310 by using the first support part 431 and the plurality of second support parts 432a, 432b, 432c, and 432d, and forms an elastic force. By using a plurality of second supports 432a, 432b, 432c, and 432d, each corner of the top plate 310 is basically supported, and the upper plate 310 has elastic force of each of the second supports 432a, 432b, 432c, and 432d. When the first support 431 is lowered by lowering the pressure, the filling solution contained in the first support 431 is compressed and supplied to each of the second support parts 432a, 432b, 432c, and 432d, which are being lowered together. Due to expansion due to the supply of the filling liquid, the lowering of each of the second supporting parts 432a, 432b, 432c, and 432d is prevented, so that the lowering of the upper plate 310 is gradually increased. That is, the upper plate 310 is initially supported using only the elastic force of each of the second support parts 432a, 432b, 432c, and 432d, but is supplied from the first support part 431 as the first support part 431 descends together. The downward driving of the upper plate 310 is reduced by adding up to a resistance value generated by the adhesion force due to the filling liquid.

 Height adjustment frame 200, the upper frame 210, the first support bar 220, the upper link 230, the intermediate frame 240, the second support bar 250, the third support bar 260, A lower link 270, a lower frame and a fourth support bar 290. The upper frame 210 forms an inclined surface 212 so that the lower surface gradually increases from one side to the other side, and the first support bar 220 extends from the inclined surface 212. At this time, the upper frame 210 forms the inclined surface 212, so that the upper link 230 is supported by the inclined surface 212 to maintain a constant angle, the intermediate frame 240 and will be described later Each inclined surface formed on the lower frame 280 also serves to play the same role.

In one embodiment, the upper frame 210 is formed to correspond to the shape of the upper link 230 on the lower inclined surface 212 so that one side of the upper link 230 can be inserted and fastened as shown in FIG. 1 Insertion holes 211 may be formed. The first support bar 220 extends downward from the lower surface of the upper frame 210, and the bolt B and the nut N allow the upper link 230 to slide in the rotational direction and the vertical direction. The first sliding hole 221 is formed to extend in the vertical direction so as to be connected and installed by a fastening means.

In one embodiment, when the upper side of the fourth support bar 290 is in close contact, the first support bar 220 may be provided with an elastic body 222 to absorb the impact using the elastic force. The upper link 230 is connected to one side of the first sliding hole 221 so as to be rotated and vertically slidably moved, and the other side thereof is pivoted to the second sliding hole 251 of the second support bar 250. It is connected to enable sliding up and down. In this case, the upper link 230 is supported on each inclined surface of the upper frame 210 or the intermediate frame 240 to form an inclination angle as shown in FIG. 6 or to be connected to or installed in FIG. 9C. As it is fastened to each insertion hole of the upper frame 210 or the intermediate frame 240 may be connected to the upper frame 210 and the intermediate frame 240 in the vertical direction.

Hereinafter, the lower link 270, which will be described later, also performs the same function as the upper link 230. The intermediate frame 240 forms an inclined surface 243 so that the upper side thereof gradually increases from one side to the other side corresponding to the lower inclined surface 212 of the upper frame 210, and the lower side is symmetrical with the upper side. The inclined surface 244 is formed to gradually decrease from one side to the other side.

In one embodiment, the intermediate frame 240, the other side of the upper link 230 forms a second insertion hole 241 in the upper inclined surface 243 so that the other side can be inserted and fastened, and the lower link 270 The third insertion hole 242 may be formed in the lower inclined surface 244 so that the other side is inserted and fastened. The second support bar 250 is formed to extend in an upward direction from an upper surface of the intermediate frame 240, and a second sliding hole 251 is formed to extend in a vertical length direction so that the other side of the upper link 230 rotates. And it is installed to be connected to the vertical sliding movement.

The third support bar 260 extends downward from the lower surface of the intermediate frame 240, and the third sliding hole 261 extends in the vertical length direction. The lower link 270 is connected to one side of the fourth sliding hole so as to be rotatable and vertically slidably moved, and the other side of the lower link 270 is installed to be rotatable and up and down to the third sliding hole 261.

Here, the fourth sliding hole corresponds to the symmetrical structure with the first sliding hole 221 and is not illustrated in the drawings for the purpose of overlapping the description. The lower frame 280 forms an inclined surface 281 so that the upper side is gradually lowered from one side to the other side so that the upper side is symmetrical with the lower side of the upper frame 210.

In one embodiment, the lower frame 280 may form a fourth insertion hole (not shown) in the upper inclined surface 281 so that one side of the lower link 270 may be inserted and fastened. The fourth support bar 290 is formed extending from the upper surface of the lower frame 280 in the upper direction, the fourth sliding hole is formed extending in the vertical length direction so that the lower link 270 is rotated one side and the vertical sliding movement It is installed so that the connection is possible.

As shown in FIG. 9, when the upper link 230 and the lower link 270 are both folded, the height adjusting frame 200 having the configuration as described above has the lowest overall height, and the upper link 230 ) If only the entire height is formed in the middle height, and if the upper link 230 and the lower link 270 are both unfolded, the overall height is formed the highest, the user can adjust the height according to the height of the frame 200 Each configuration of can be folded or expanded.

Although the present invention has been described with reference to the embodiments shown in the drawings, this is merely exemplary, and it will be understood by those skilled in the art that various modifications and equivalent other embodiments are possible. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

10: main body
20: first substrate retention portion
30: second substrate retention portion
50: second pickup module
110: receptor

Claims (1)

As a substrate transfer device,
A main body portion 10 for handling a large amount of substrates;
A first substrate retention part 20 provided in the main body part 10 so that the substrate transferred from the previous process remains;
A first pickup module 30 for picking up and transporting the substrate of the first substrate stayer 20;
The substrate picked up from the first substrate staying part 20 is transported and stayed by the first pickup module 30, and is provided in the main body part 10 to lift the stayed substrate in a vertical direction. A second substrate retention portion 40;
And a second pickup module 50 for picking up the substrate lifted by the second substrate holding part 40 and transferring it to a later process.
The main body portion 10 is provided with a plurality of pillars 15, the pillar 15 is provided with a receptor 110 is inserted and mounted to prevent vibration,
The receptor 110,
Advance the first accommodating part 111 through the first accommodating part 111 and the first accommodating part 111, which are cut in the longitudinal direction, through the bar shape 113. Or a second receiving part 112 for reversing,
The first accommodating part 111 and the second accommodating part 112 have a hemispherical hollow groove corresponding to each other, and press the pillar 15 inward,
The receptor 110 is provided with a fixing module 120 for generating a fixing force between the upper and lower in the height direction,
The fixed module 120,
An upper fixing body 121 provided upward on an outer circumferential surface height direction of the container 110;
A lower fixture 123 provided at a lower end in a height direction of the receptor 110,
A stop fixture 122 is provided between the upper fixture 121 and the lower fixture 123 in the height direction of the receptor 110,
The upper fixture 121, the suspension fixture 122 and the lower fixture 123 are interlocked with each other by the fastening means 124, and bound to each other,
The upper fixture 121,
A first central body part 1211 provided to surround the receptor 110 and bound;
A first-first flow body part 1212 provided at one side of the first central body part 1211,
A 1-2 flow body part 1213 is provided on the other side of the first central body portion 1211,
The suspension fixture 122,
A second central body portion 1221 provided to be bound by the container 110 and bound;
2-1 the floating body portion 1222 provided on one side of the second central body portion 1221 and
The second-2 fluid body part 1223 provided on the other side of the second central body portion 1221 is provided,
The lower fixture 123,
A third central body part 1231 provided to be bound by the container 110 and bound;
A 3-1 floating body part 1232 provided at one side of the third central body part 1231,
3-2 the flow body portion (1233) is provided on the other side of the third central body portion (1231),
The first-first flow body 1212 and the second-second flow body 1223 are interlocked through first fastening means 1241,
The 2-1 flow body portion 1222 and the 3-2 flow body portion 1233 are interlocked through the second fastening means 1242,
The first central body part 1211, the second central body part 1221, and the third central body part 1231 are interlocked with each other by an interlocking bar 125.
The second central body portion 1221 is operable to pull or push the first central body portion 1211 and the second central body portion 1221 via the interlocking bar (125).

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