KR102006348B1 - 고분자 박막 구조체 및 유기막의 깊이 방향의 분석 방법 - Google Patents

고분자 박막 구조체 및 유기막의 깊이 방향의 분석 방법 Download PDF

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Publication number
KR102006348B1
KR102006348B1 KR1020147013036A KR20147013036A KR102006348B1 KR 102006348 B1 KR102006348 B1 KR 102006348B1 KR 1020147013036 A KR1020147013036 A KR 1020147013036A KR 20147013036 A KR20147013036 A KR 20147013036A KR 102006348 B1 KR102006348 B1 KR 102006348B1
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KR
South Korea
Prior art keywords
polymer
thin film
depth direction
film structure
stable isotope
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KR1020147013036A
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English (en)
Korean (ko)
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KR20140090207A (ko
Inventor
미나 마츠오
유키 노하라
Original Assignee
닛산 가가쿠 가부시키가이샤
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Publication of KR20140090207A publication Critical patent/KR20140090207A/ko
Application granted granted Critical
Publication of KR102006348B1 publication Critical patent/KR102006348B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2255—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident ion beams, e.g. proton beams
    • G01N23/2258—Measuring secondary ion emission, e.g. secondary ion mass spectrometry [SIMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/61—Specific applications or type of materials thin films, coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/633—Specific applications or type of materials thickness, density, surface weight (unit area)

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Molecular Biology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
KR1020147013036A 2011-10-21 2012-10-19 고분자 박막 구조체 및 유기막의 깊이 방향의 분석 방법 KR102006348B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2011231655 2011-10-21
JPJP-P-2011-231655 2011-10-21
JPJP-P-2011-231663 2011-10-21
JP2011231663 2011-10-21
PCT/JP2012/077109 WO2013058364A1 (ja) 2011-10-21 2012-10-19 高分子薄膜構造体及び有機膜の深さ方向の分析方法

Publications (2)

Publication Number Publication Date
KR20140090207A KR20140090207A (ko) 2014-07-16
KR102006348B1 true KR102006348B1 (ko) 2019-08-01

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ID=48141007

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147013036A KR102006348B1 (ko) 2011-10-21 2012-10-19 고분자 박막 구조체 및 유기막의 깊이 방향의 분석 방법

Country Status (4)

Country Link
JP (1) JP6281283B2 (zh)
KR (1) KR102006348B1 (zh)
TW (1) TWI640769B (zh)
WO (1) WO2013058364A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3587482A1 (en) * 2018-06-25 2020-01-01 INTA, Instituto Nacional de Technica Aeroespacial Isotopically labelled materials for degradation detection
CN115235861A (zh) * 2022-08-25 2022-10-25 胜科纳米(苏州)股份有限公司 一种用于飞行时间二次离子质谱分析的超薄有机膜层的制样及分析方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008032685A (ja) * 2006-06-29 2008-02-14 Canon Inc 表面解析方法および表面解析装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06249805A (ja) * 1993-03-01 1994-09-09 Nissin Electric Co Ltd 表面分析方法
JP2004219261A (ja) 2003-01-15 2004-08-05 Fuji Photo Film Co Ltd 薄膜の解析方法
EP1688246B1 (en) * 2003-11-27 2015-09-16 Mitsubishi Plastics, Inc. Gas barrier film
JP3790539B2 (ja) * 2003-11-27 2006-06-28 三菱樹脂株式会社 ガスバリア性フィルム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008032685A (ja) * 2006-06-29 2008-02-14 Canon Inc 表面解析方法および表面解析装置

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
‘Carbon-13 Labeled Polymers: An Alternative Tracer for Depth Profiling of Polymer Films and Multilayers...’, S. E. Harton 등, Anal. Chem. V.78(10),3452~3460(2006.05.15.)*
‘Carbon-13 Labeling for Quantitative Analysis of Molecular Movement in Heterogeneous Organic Materials...’, Shane E. Harton 등, Anal. Chem. v.79(14),5358-5363(2007.7.15)*

Also Published As

Publication number Publication date
KR20140090207A (ko) 2014-07-16
JP6281283B2 (ja) 2018-02-21
WO2013058364A1 (ja) 2013-04-25
TW201331579A (zh) 2013-08-01
JPWO2013058364A1 (ja) 2015-04-02
TWI640769B (zh) 2018-11-11

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