KR102003527B1 - Method and device for depositing oleds - Google Patents

Abstract

The present invention firstly relates to a method for depositing an organic starting material as a layer on a substrate (18), wherein the organic starting material is introduced into the carrier gas flow in the form of suspended particles, Is supplied to the evaporator 5 as a predetermined mass flow rate and the evaporator 5 includes evaporation bodies 6 to 10 having large surfaces and the evaporation bodies are arranged in the vicinity of the surface of the evaporation bodies 6 to 10 Or the suspended particles contacting the surface of the substrate 18 are heated to the evaporation temperature at which they evaporate and the resulting vapor flows into the process chamber 17 from the carrier gas flow rate, Condensate on the surface to form a layer. In order to equalize the vapor inflow to the process chamber in accordance with the present invention, at least one stage of the deposition process, particularly at the beginning of the deposition process, for the generation of the carrier gas flow rate saturated with the vapor of the vaporized organic starting material to the process chamber, It is proposed that the mass flow rate of the suspended particles toward the evaporator 5 is higher than the evaporation rate of the suspended particles in the evaporator 5. The invention also relates to an apparatus for depositing an organic starting material as a layer on a substrate.

Description

[0001] METHOD AND DEVICE FOR DEPOSITING OLEDS [0002]

The present invention relates to a method for depositing an organic starting material as a layer on a substrate wherein the organic starting material is introduced into the carrier gas flow in the form of suspended particles and the resulting aerosol is characterized by a controlled mass flow rate of the organic material Wherein the evaporation body is heated to an evaporation temperature at which evaporation of the suspended particles which flow into or near the surface of the evaporation body evaporates, The resulting vapor enters the process chamber from the carrier gas flow rate, where the vapor condenses on the surface of the substrate to form a layer.

In addition, the invention also relates to a device for depositing an organic starting material as a layer on a substrate, said device comprising a controlled mass flow rate of the starting material in the form of suspended particles being transferred towards the evaporator in the carrier gas flow rate And a process chamber for receiving the substrate, wherein the vapor generated by the evaporator is supplied via a vapor supply line, the evaporator comprising open porous evaporation bodies having an inlet channel formed as a blind bore And the evaporation body can be heated to the evaporation temperature to evaporate the suspended particles.

A general method or apparatus is described in US 7,238,389. The powdery solids are introduced into the carrier gas flow by the aerosol generator. The aerosol particles are transported to the evaporator as suspended particles in the carrier gas flow rate. The evaporator consists of a solid foam which is heated to the evaporation temperature. Through the surface contact of the pore walls of the solid foam with the suspended particles, the suspended particles are supplied with the heat of evaporation, whereby the suspended particles are converted into vapor form. The vapor thus produced is transported by the carrier gas flow rate into the process chamber in which the substrate coated with the organic starting material is located. The organic starting materials used in the method according to the invention, as described in the US publication and in the device according to the invention, are organic light emitting materials, so that OLEDs such as those described, for example, in US 4,769,292 and US 4,885,211 can be produced.

US 2006/0115585 A1 describes an apparatus for depositing organic layers on a substrate, including a heating unit for heating organic materials, thereby forming an aerosol in the carrier gas. The solid aerosol is guided through a nozzle containing micro-pores, including a pulse heating unit capable of heating organic particles. The diameter of the fine pores is at most 100 μm.

DE 10057491 A1 describes an apparatus for generating aerosols through the injection of droplets into a hot gas volume and for evaporating droplets of water through heat absorption.

WO 2006/100058 describes a heating unit capable of converting a starting material, which is not in a gaseous state, into a gas phase, in which case the heating member has cavities including an inner surface.

US 2006/0169201 A1 describes a general apparatus comprising a plurality of evaporating bodies which are arranged in the flow direction with channels extending in the flow direction with a honeycomb cross section. Through these channels, the flow rate of the carrier gas carrying the particles to be vaporized is perfused. In accordance with the linear extension of the channels having a honeycomb cross-section, a plurality of particles pass through the evaporation bodies without contacting the walls of the channels.

The use of solid foams composed of tungsten, rhenium, tantalum, niobium, molybdenum or carbon or coated materials to evaporate organic starting materials is described in US 2009/0039175 A1 or US 6,037,241. Wherein the solid foam is heated to an evaporation temperature at which the organic starting material is evaporated, particularly by energization of the current.

In addition, DE 10 2006 026 576 A1 discloses a solid evaporator in which an aerosol is produced through the eddy current of the powder by an ultrasonic stimulator. Solid evaporators in which a large amount of the starting material to be evaporated is kept at the evaporation temperature continuously have a high risk of decomposing, especially at high temperatures, the organic starting materials to be evaporated, although this provides a constant evaporation rate. To prevent this problem, US 2009/0061090 A1 or US 2010/0015324 A1 proposes a rechargeable vaporization vessel in an evaporator.

US 7,288,286 B2 describes a screw conveyor for introducing powdery organic starting materials stored in a storage vessel into a gas flow rate for transferring powdered suspension particles to an evaporator.

An alternative method for producing powdered suspended particles is described in US 5,820,678. This US publication describes a brush wheel that pulverizes solids formed from crushed powder into powder particles in the micrometer diameter range. The powder particles are supplied to the evaporator by a gas flow rate.

In addition, aerosol generators for introducing liquid starting materials, particularly organic starting materials, into the carrier gas flow rate for MOCVD processes in the form of droplets are also known. Related devices are described in US 2005/0227004, US 2006/0115585 and US 5,204,314. The starting materials used for conventional MOCVD are usually liquid at room or elevated temperatures, whereas the organic starting materials used to prepare the OLED are always solid at temperatures below 200 ° C.

In the case of known aerosol generators, there is some dependence on the rate of vapor production relative to the rate of suspension particle formation in the aerosol generator. As an aerosol generator, the rate of aerosol formation over time is determined according to the shape of the brushes, for example, if a brush device is used in which particles are crushed from the solid powders pressed, for example, by moving, especially rotating brushes. Other known aerosol generators include transport units for the starting material to be atomized within the carrier gas flow rate, and the transport output of these transport units fluctuates over time.

If liquid starting materials are used, nozzles can be used for aerosol formation. Even in this case, the variation of the aerosol generation rate over time can not be prevented in principle.

It is therefore an object of the present invention to direct measures to equalize the vapor inflow to the process chamber.

This problem is solved by the invention as indicated in the claims.

First, and practically, it is proposed that the vapor produced in the carrier gas flow rate from the steam generator to the process chamber has a saturated vapor pressure. To achieve this, measures are taken to ensure that there is an excess of evaporated starting material in the evaporator during the entire deposition process. At one or more stages of the deposition process, preferably the mass flow rate of the organic starting material towards the evaporator at its beginning, is saturated with the vapor of the evaporated organic starting material in the evaporator to produce a carrier gas flow rate towards the process chamber, I.e. the mass of suspended particles directed to the evaporator per unit of time is greater than the mass of the starting material which is converted into vapor per hour in the evaporator. Through this, within the enrichment phase, the storage mass of unvaporized organic starting material is concentrated in the evaporator. Concentration is preferably carried out in the cavity volume of the solid foam used as the evaporation body. To this end, an open porous foam body is used as the evaporation body, and the pore size of the foam body is much larger than the size of the suspended particles. The standard size for the diameter of suspended particles is about 100 mu m. The average dimension with respect to the width of the pore openings is about 1 mm. The pore width may be in the range of 0.5 mm to 3 mm. The cross-sectional area of the pores should preferably be greater than 1 mm < 2 >. The pores are nonlinearly and strongly curved so that the carrier gas flow rate through the pores is deflected a few times and the particles delivered in the carrier gas flow rate adhere to the pore walls. The solid foam used may comprise a pore volume of at least 90% of its total volume. Preferably, the evaporation of the aerosol is carried out with steps having different transport speeds of the evaporator conveying the suspended particles. In the concentration stage, more of the mass of organic starting material is fed to the evaporator than the mass of the organic starting material evaporated at the same time in the evaporator. This leads to the formation of the storage mass already mentioned earlier in the pore volume of the evaporation body. In the depletion phase following the concentration stage, the feed rate of the organic starting material fed into the evaporator is reduced, so that less material is fed to the evaporator as suspended particles than the material evaporated in the evaporator at the same time. As a result, the storage mass is extinguished during the depletion phase. In order to ensure that the vapor-saturated carrier gas flow rate is evacuated from the evaporator during the entire deposition process, the depletion step is carried out before the storage mass is completely consumed, by switching to a concentration step, Lt; / RTI >

The apparatus according to the present invention may comprise an aerosol generator holding the rate of production of suspended particles varying over time. In this case, the suspended particles may be powdery or liquid. The aerosol generator includes a storage vessel in which an organic starting material is stored. The aerosol generator also includes a dosing feeder capable of regulating the rate of production of suspended particles. According to the present invention, the evaporator can be improved to the extent that the evaporation body is multi-member. The inlet channel in the porous evaporative body and from the prior art, e.g. from US 2009/0039175 A1, is formed by the through bore of the first evaporator body in accordance with the invention. The one or more first evaporation bodies of this type may be arranged in a row. One end of the ends of the through bore is closed by a second evaporation body which substantially retains the same conditions as the first evaporation body. This prevents the unevaporated suspended particles from being transported through the evaporator. The gas flow rate that flows into the inlet channel and conveys the suspended particles may be introduced into the porous volume of the first evaporation body through the walls of the inlet channel. A partial flow rate may be introduced into the second evaporation body through the bottom of the inlet channel. Preferably, the two evaporation bodies are arranged in such a manner that, in the flow direction, the gas exiting the first evaporation body must pass through the second evaporation body as well. The second evaporation body may be formed of multiple members. Accordingly, a plurality of second evaporation bodies are preferably formed which completely fill the transverse area of the evaporator. In the flow direction, preferably, the plurality of second evaporation bodies are connected to a third evaporation body having substantially the same physical properties as the other evaporation bodies. The third evaporation body may have the same shape as the first evaporation body, whereby the outlet channel is formed by the third evaporation body. The third evaporation body may also be formed of multiple members. The first evaporation body and the third evaporation body include through bores. The through bores may be positioned in a straight line with respect to each other. The through bores may have the same diameter. In addition, the diameters of the through bores may be different. Thus, the bores may be stepped in the form of steps within the evaporation bodies. In addition, the evaporation bodies may be disposed inside the evaporator so that internal cavities closed in the inflow direction as well as the inflow direction are formed. In addition, one evaporation body of the evaporation bodies extends only over a length located in the size of the pore diameter, whereby the evaporation body of this type functions as a diffuser. The outlet channel is preferably formed by the through bore of the third evaporator body. The bottom of the outlet channel is formed by a second evaporation body. Accordingly, the gas passing through the second evaporator body, which is integral or two-piece, can partially flow into the pore volume of the third evaporator body, or partly into the outlet channel. The free volume is extended downstream of the third evaporation body in the flow downstream direction, the cross-section of this free volume can optionally be reduced, its free volume passing into the vapor supply line, Is introduced into the process chamber with the vapor of the organic starting material carried by the carrier gas itself. In this position, the vapor supply line is through a gas distributor holding the shape of the shower head. The gas outlet surface of the gas distributor is oriented in the direction of the susceptor, and the substrate to be coated is seated on the susceptor. Through the plurality of gas outlet openings arranged in a sieve shape on the gas outlet surface, a carrier gas for transferring the vapor is introduced into the process chamber. The susceptor is preferably cooled, so that the vapor can condense on the substrate. The process is started at a total pressure condition starting in the range between 0.1 and 100 mbar, preferably in the range between 0.1 and 10 mbar. The process chamber is connected to a vacuum pump for generating the negative pressure. The evaporation bodies formed by the solid foam are placed in the housing of the evaporator in such a way that the excess aerosol supplied does not flow through the evaporation bodies. Rather, the aerosol units are moved on the surface of the pores to form a reservoir at the surface. This ensures that suspended particles are not present in the downstream gas flow downstream of the evaporation bodies despite the formation of a saturated vapor pressure. In order to heat the evaporation bodies to a temperature of evaporation, for example between 300 ° C and 400 ° C, the evaporator housing may be surrounded by a heating element. Preferably, the evaporation body (s) is comprised of an electrically conductive material, whereby an electric current for heating the evaporation body can be conducted through the evaporation body. Since the evaporation rate is determined non-linearly with the evaporation temperature, a temperature control unit is provided to keep the temperature of the evaporation bodies constant. In the case of variants, whether made of glass-like carbon and coated with either metal, ceramic, glass or quartz, in the case of an open porous foam body, the surfaces of the cell walls are coated with a reflective material, in particular gold.

Layers or layer structures can be deposited by an apparatus according to the invention, as described in detail in US 7,238,389 B2, which was originally cited, and in the originally mentioned document. Therefore, the disclosure content of the above publications is referred to throughout.

Embodiments of the invention are described below with reference to the accompanying drawings.

1 is a schematic configuration diagram of a coating apparatus.
Fig. 2 is a cross-sectional view taken along line II-II in Fig. 1. Fig.
3 is a cross-sectional view taken along line III-III in Fig.
4 is a sectional view taken along the cutting line III of the second embodiment.
5 is a cross-sectional view of a second embodiment of an evaporator;
6 is a cross-sectional view taken along line VI-VI in Fig.
7 is a cross-sectional view taken along line VII-VII in FIG.
8 is a cross-sectional view taken along line VIII-VIII in FIG.

An inert carrier gas, such as nitrogen, hydrogen or rare gas, is introduced into the carrier gas feed line 1 through a mass flow control device, not shown, from an unillustrated gas source. The carrier gas supply line can be heated so that the heated carrier gas can be introduced into the aerosol generator 3 by the carrier gas supply line.

An organic starting material is stored in the storage container (2). The organic starting material is an organic luminescent material that emits light by application of a voltage, and the luminescent layers may be deposited on the substrate 18 with the organic luminescent material.

The aerosol generator 3 may be a brush wheel diffuser, but may also be a screw arrangement as described, for example, in US 7,501,152 B2 or US 7,288,285 B2. With this type of aerosol generator, the constituents of the powder can be introduced into the carrier gas flow as suspended particles. The time-dependent mass inflow rate of suspended particles entering the carrier gas flow, in other words, the rate of aerosol generation, can vary.

The aerosol generator is connected to the evaporator 5 via an aerosol supply line 4. Through the aerosol feed line, the suspended particles are guided into the evaporator 5 by the carrier gas flow rate.

The evaporator 5 shown in Figs. 1 to 3 includes a housing 11 and a heating unit 12 surrounding the housing 11. As shown in Fig. Inside the housing is a multi-member evaporation body (6-10) formed by a solid foam. The solid foam is heated to the evaporation temperature by the heating section 12, thereby evaporating the organic suspended particles in contact with the solid surface.

The steam thus formed is guided into the reactor housing 15 by the carrier gas through the steam supply line 13. The gas distributor 16 and the vapor supply line 13 are arranged in the wall portions of the vapor supply line 13 or in the wall portions of the gas distributor 16 disposed in the reactor housing 15 to prevent condensation of the vapor And heated. The steam supply line 13 may comprise, for example, a heating sleeve 14.

The gas distributor 16 disposed inside the reactor housing 15 retains the shape of the shower head. This relates to a disc-shaped hollow body including a gas outlet surface directed to the process chamber 17, the gas outlet surface comprising a plurality of gas outlet openings arranged in a sieve shape, The carrier gas flow is introduced into the process chamber 17.

The gas outlet surface of the gas distributor 16 forms the lid of the process chamber 17 while the susceptor 19 on which the substrate 18 to be coated is placed on its surface, Thereby forming the bottom of the chamber 17.

The susceptor 19 includes an unillustrated cooling unit capable of cooling the surface of the susceptor so that the substrate 18 is maintained at a temperature at which vapor of the organic starting material can condense on the substrate surface .

In the schematic drawings, the valves and additional gas lines used to clean the process chamber are not shown. The vacuum pump 20, which can similarly maintain the process chamber 17 and the evaporation chamber of the evaporator 5 at a low pressure, is schematically shown.

According to a variant shown only in the cross-sectional view in Fig. 4, the evaporation bodies 6 to 10 arranged in the evaporator 5 are composed of an electrically conductive material. This relates to an open porous solid foam comprising a pore volume of about 97% of the total volume. The evaporation bodies include electrical contacts 21 and 22 so that each current through the evaporation bodies 6-10 can be energized to heat the evaporation bodies 6-10 with the evaporation temperature . The evaporation bodies 6 to 10 may be made of graphite or metal. If the evaporation bodies are made of a nonconductive material, such as a ceramic material, the evaporation bodies 6 to 10 are connected to the heating sleeve 12 shown in Figs. 1 to 3, which surrounds the tubular housing of the evaporator 5 .

Inside the tubular evaporator housing 11 is located a first tubular evaporator body 6 which includes a through bore 6 '. The through bore 6 'is in line with the aerosol supply line 4 so that the flow rate of the aerosol entering the evaporator 5 from the aerosol supply line 4 flows into the cavity of the first evaporator body 6 . The inlet channel 6 'is surrounded by the porous wall of the evaporation body 6. The pore size of the evaporation body 6 is larger than the suspended particle size so that the suspended particles can flow into the evaporation body 6 from the gas flow rate as shown by arrows in the figure. The suspended particles in contact with the hot surfaces of the pores of the evaporation body 6 partially evaporate. In addition, the suspended particles are partially stored in the pores of the evaporation body 6, only to the extent that the aerosol is supplied in excess. The gas flow rate to the suspension particle flow rate flows into the second evaporation body 7 which is directly connected to the first evaporation body 6 and flows out of the through-hole opening 6 'or from the volume of the first evaporation body 6 . The three disk-shaped second evaporating bodies (7, 8, 9) are arranged in the flow direction. The second evaporation bodies 7, 8, 9 completely fill the cross-sectional area of the tubular housing 11. The second evaporation bodies are placed in contact with each other. Downstream of the second evaporator body 9 is located a third evaporator body 10 which retains the shape of a tube as the first evaporator body 6. The third evaporating body includes a through opening 10 'which is in line with the through opening 6' of the first evaporating body 6 but is separate from the second evaporating bodies 7, 8 and 9, This through opening forms an outlet channel. Downstream of the third evaporating body 10, there is a free volume which is switched to the steam supply line 13.

The evaporation bodies 6 to 10 are made of the same material, and the non-evaporated suspended particles can be temporarily stored as a storage mass.

The following inventive method is implemented by the described apparatus. The substrate 18, which may consist of glass and is seated on the susceptor 19, is coated with an organic starting material. To this end, in the concentration step an aerosol mass flow towards the evaporator 5 is first produced by the aerosol generator 3, which is saturated with the vapor and passed through the vapor supply line 13 to the process chamber 17, Is higher than the evaporation rate inside the evaporator (5) for producing the carrier gas flow rate to the evaporator (5). As a result of the excessive supply of suspended particles, a storage mass is formed inside the pores of the evaporation bodies 6 - 10. The magnitude of the storage mass of the unevaporated starting material increases during the concentration step.

Following the concentration step, a depletion step is carried out which is distinguished from the concentration step only by the production rate of the aerosol generator 3 substantially. The aerosol generator 3 produces a mass flow rate of the suspended particles towards the evaporator 5 during the depletion phase, which is the evaporation rate inside the evaporator 5 to produce the vapor-saturated initial gas flow rate, Which is lower than the mass evaporated per unit of time. The storage mass decreases during the course of the depletion phase. Nevertheless, the vapor pressure of the organic starting material evaporated inside the gas flow rate directed towards the process chamber 17 remains unchanged. The gas flow rate is continuously saturated with the evaporated organic starting material. The vapor can condense on the substrate. In addition, the vapor may be chemically reacted in the process chamber or on the substrate.

The conversion from the depletion stage to the enrichment stage is carried out when there is still a storage mass inside the evaporator 5. During the coating process, the interconversion between the depletion stage and the enrichment stage can be carried out several times.

5 to 8 show a second embodiment of an evaporator 5 such as may be used in the apparatus shown in Fig. The aerosol supply line 4 is still extended a few millimeters in the interior of the tubular housing 11 and in this case is engaged and secured in the through opening 6 "of the first evaporator body 6. The evaporator body 6 is of a choice The free space 24 is separated from the side wall portion of the housing 11 by the free space 24 along the free space 24. The free space 24 is used substantially as a heat insulating portion.

A through-hole opening 6 'having a small diameter is connected to a second through-hole 6' having a diameter of about twice the diameter.

Downstream of the evaporation body 6 is located an additional evaporation body 23 which likewise includes a through opening 23 '. The through openings 23 'are in line with the through openings 6' of the evaporation body 6.

Downstream of the evaporation body 23 is positioned a diffusion 7 which fills the cross-section of the tubular housing 11 completely. The diffusion section 7 is substantially also a vaporization body because the diffusion section 7 is made of the same material as that constituting the remaining evaporation bodies 6, 23, 10, 8 and 9, Because it is made up of an open-cell foam body as already described. The thickness of the diffusion portion 7, that is, the length measured in the flow direction is the size of the width of the opening of the pores of the diffusion portion 7.

An additional evaporating body 10 is connected downstream to the diffuser 7 which includes a first through opening 7 'having the same diameter as the through openings 6' and 23 '. The through-opening 7 'is connected to a further through-opening 7' 'which is reduced in diameter in the direction of flow. The bottom of the through-opening 7' 'is closed so that the through-opening has a blind opening, to be. The bottom of the blind opening 7 "is defined by a vaporizing body 8 which completely fills the diameter of the tubular housing 11. The vaporizing body 7 and the vaporizing body 8 cooperate with the vaporizing body 10 Forms a closed inner cavity 7 ', 7 ".

In the evaporation body 8, the evaporation body 9 formed to be substantially identical to the evaporation body 8 is connected.

All of the evaporation bodies 6, 23, 7, 10, 8, 9 are arranged in series in contact with each other. Free space 25 is located after the final evaporation body 9 in the flow direction. This free space is switched to the steam supply line 13. Through the aerosol supply line 4, the carrier gas flow carrying the suspended particles flows into the through openings 6 ', 23'. The suspended particles reach the wall portions of the through openings 6 ', 23' together with the gas flow, in other words the open cell evaporation bodies 6 and 23. The suspension particles having a relatively high mass and a high velocity, in other words those having a relatively high pulse, can reach the evaporation body 7. The evaporating body functions as a diffuser and brakes the carrier gas flow rate and thus the suspended particles delivered in this carrier gas flow rate. The suspension particles flow into the evaporation body 10 or 8 in the cavity portion and evaporate by heat absorption in the evaporation body only at the point where the suspension particles reach into the cavities 7 ', 7 ".

The evaporation body described above may be an open porous foam body of glass-like carbon, or it may be made of glass-like carbon. The foam body may be coated with a metal or ceramic. In addition, the foam body can be composed of glass or quartz. According to a particularly preferred embodiment, the surface of the foam body has a low light emissivity. The emissivity is preferably within the infrared range of less than 0.2 (200 to 400 < 0 > C conditions). Preferably, a low surface emissivity is achieved through the gold coating of the cell walls.

All disclosed features are (by themselves) the key to the invention. Accordingly, for the purpose of accommodating together the features of the priority documents attached to the claims of this application (copies of the preliminary application), the disclosure content of the priority documents is incorporated into the disclosure of the present application Included together. The dependent claims characterize the improvements of the prior art inventions, independently of their equivalents, in particular to carry out partial applications based on the claims.

1: Carrier gas supply line
2: container for organic starting materials
3: Aerosol generator
4: aerosol supply line
5: Evaporator
6: evaporation body
6 ': through opening
6 ": through opening
7: evaporation body
7 ': through opening
7 ": through opening
8: Evaporating body
9: evaporation body
10: evaporation body
10 ': through opening
11: tubular housing
12:
13: steam supply line
14:
15: reactor housing
16: Gas distributor (shower head)
17: Process chamber
18: substrate
19: susceptor
20: Vacuum pump
21: Electrical contact
22: Electrical contact
23: evaporation body
23 ': Through-opening
24: free space
25: free space

Claims (17)

A method for depositing an organic starting material as a layer on a substrate (18)
The organic starting material is introduced into the carrier gas flow in the form of suspended particles and the resulting aerosol is fed to the evaporator 5 as a predetermined mass flow rate of the organic material and the evaporator 5 is fed to the evaporation body 6 to 10), and the evaporating body is heated to an evaporating temperature at which evaporation of suspended particles coming into or near the surface of the evaporating bodies (6 to 10) evaporates, From the carrier gas flow into the process chamber 17 where the vapor forms a layer on the surface of the substrate 18 and condenses,
In one or more stages of the deposition process, the mass flow rate of the suspended particles towards the evaporator 5 is controlled by the amount of suspended particles in the evaporator 5, in order to produce a carrier gas flow rate that is saturated with the vapor of the evaporated organic starting material to the process chamber. Lt; RTI ID = 0.0 > evaporation rate,
The mass flow rate of the organic starting material towards the evaporator 5 in the alternately executed steps of the deposition process is such that the mass flow rate of the organic starting material towards the evaporator 5 in the enrichment phase The mass flow rate of the organic starting material is higher than the mass flow rate of the vapor produced by evaporation of the organic starting material and in the depletion phase the mass flow rate of the organic starting material towards the evaporator 5 is produced by evaporation of the organic starting material at the same time And the transition from the depletion stage to the enrichment stage during the deposition process is carried out before the storage mass of the concentrated organic starting material in the evaporator during the concentration stage is completely evaporated felled,
A method for depositing an organic starting material. The method according to claim 1,
The size of the suspended particles is smaller than the pore size of the evaporation bodies 6 to 10 including an open porous foam body,
A method for depositing an organic starting material. delete 3. The method according to claim 1 or 2,
In which inert gas or rare gas preheated as carrier gas is used,
A method for depositing an organic starting material. 3. The method according to claim 1 or 2,
The evaporation is carried out under conditions of total pressure ranging between 0.1 and 100 mbar,
A method for depositing an organic starting material. 3. The method of claim 2,
The open porous foam body may be composed of glassy carbon or may be composed of glassy carbon and coated with a metal or ceramic or may be composed of a metal, ceramic, glass or quartz, and /
A method for depositing an organic starting material. 3. The method of claim 2,
Said open porous foam body having a pore width greater than 0.5 mm,
A method for depositing an organic starting material. An apparatus for depositing an organic starting material as a layer on a substrate (18)
The apparatus comprises an evaporator 5 via an aerosol generator 3 and a vapor supply line 13 for generating a controlled mass flow rate of the starting material in the form of suspended particles delivered to the evaporator 5 in the carrier gas flow rate, And a process chamber (17) for receiving the substrate (18), wherein the vapor produced by the evaporator (5) is supplied, wherein the evaporator (5) comprises open porous evaporation bodies (6-10), and the evaporation bodies (6-10) can be heated to the evaporation temperature to evaporate the suspended particles, and the evaporation bodies (6-10) can prevent the passage of the non-evaporated suspended particles Comprises a first evaporating body (6) forming an inlet channel (6 ') with a through bore and a second evaporating body (7) forming a closed end (7') of the inlet channel (6 '
Wherein said evaporation bodies (6-10) are open porous foam bodies having a pore cross section above 1 mm < 2 > and a pore volume of 90%
An apparatus for depositing an organic starting material. 9. The method of claim 8,
A plurality of evaporating bodies (6-10) arranged in series in the flow direction are provided, at least one first evaporating body (6) forming an inlet channel with the same or different diameter through bores, The evaporating body (7,8, 9) is arranged downstream of the at least one first evaporating body (6) in the flow direction while completely filling the flow cross-section of the evaporator (5)
An apparatus for depositing an organic starting material. 10. The method according to claim 8 or 9,
There is provided a third evaporation body 10 which forms an outlet channel 10'which is in line with the inlet channel 6'in which the closed end 9'is connected to the one or more second evaporation bodies & (7, 8, 9)
An apparatus for depositing an organic starting material. 10. The method according to claim 8 or 9,
The steam supply line (13) passes into a gas distributor (16) disposed in a reactor housing (15), the gas outlet surface of the gas distributor comprising a plurality of gas outlet openings arranged in a sieve- The gas outlet surface is located opposite to a susceptor 19 that is cooled while supporting the substrate 18,
An apparatus for depositing an organic starting material. 10. The method according to claim 8 or 9,
The evaporator 5 includes a heating portion 12 or the evaporation bodies 6 to 10 are made of an electrically conductive material which can be electrically heated by a current conducted through the evaporation bodies 6 to 10 Configured,
An apparatus for depositing an organic starting material. The method according to claim 1,
One or more of the steps of the deposition process may include the beginning of the deposition process.
A method for depositing an organic starting material. 5. The method of claim 4,
Wherein the inert gas comprises nitrogen and hydrogen, and the rare gas comprises argon.
A method for depositing an organic starting material. 6. The method of claim 5,
Wherein said evaporation is carried out under conditions of total pressure ranging between 0.1 and 10 mbar,
A method for depositing an organic starting material. The method according to claim 6,
Wherein the metal comprises tantalum, molybdenum, tungsten, rhenium, or niobium, wherein the ceramic comprises silicon carbide or boron nitride, and wherein the further metal comprises gold,
A method for depositing an organic starting material. 8. The method of claim 7,
Said open porous foam body having a pore width greater than 1 mm,
A method for depositing an organic starting material.

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