JP6085595B2 - OLED deposition method and apparatus - Google Patents

Description

  In the present invention, an organic starting material is introduced into a carrier gas in the form of suspended particles, and the aerosol generated in this way is fed to the evaporator as a metered mass stream of organic material, the evaporator having a large surface. The evaporation body is heated to an evaporation temperature at which floating particles entering near the surface of the evaporation body or in contact with the surface of the evaporation body evaporate. The present invention relates to a method for depositing organic starting materials as a layer on a substrate, wherein the vapor is transported into a process chamber in which vapor condenses on the surface of the substrate to form a layer.

  The invention further relates to an aerosol generator for generating a metered mass flow of starting material in the form of suspended particles conveyed to an evaporator in a carrier gas stream, wherein the evaporator is a bag cavity. Generated from the aerosol generator and the evaporator, having an open pore evaporation body provided with an inflow channel formed as the evaporation body, which can be heated to an evaporation temperature to evaporate the suspended particles An organic starting material deposition apparatus as a layer on a substrate, comprising: a process chamber for receiving a substrate to which steam is supplied via a vapor supply line.

  U.S. Pat. No. 7,238,389 B2 describes a method of this type or a device of this type. An aerosol generator introduces powdered solids into the carrier gas stream. The aerosol particles generated at this time are conveyed to the evaporator as suspended particles in the carrier gas flow. The evaporator is composed of a solid foam, which is heated to the evaporation temperature. When the suspended particles come into surface contact with the pore walls of the solid foam, evaporation heat is supplied to the suspended particles, whereby the suspended particles are converted into a vapor shape. The vapor generated in this way is supplied into the process chamber by a carrier gas flow, a substrate is present in the process chamber, and the substrate is deposited with an organic starting material. The organic starting materials described in this document that are also used in the method according to the invention in the device according to the invention are organic luminescent materials, so that they are described, for example, in US Pat. No. 4,769,292 and US Pat. No. 4,885,211. In addition, OLEDs can be manufactured.

  U.S. Patent Publication No. 2006/0115585 A1 / describes an apparatus for depositing an organic layer on a substrate with a heating device for heating the organic material, thereby forming an aerosol in a carrier gas. The solid aerosol is introduced through a nozzle having fine pores, and the nozzle has a pulsation heating device, and the organic particles can be heated by the pulsation heating device. The micropore has a diameter of 100 μm or less.

  German Patent Publication No. 10057491A1 describes an apparatus in which an aerosol is generated by injecting a droplet into a hot gas volume and the droplet is evaporated by receiving heat.

  International Patent Publication No. 2006 / 100058A2 describes a heating device by which a non-gaseous starting material can be transferred to the gas phase, in which case the heating body is provided with a hollow space having an inner surface.

  US 2006/0169201 A1 describes a device of this type having a plurality of evaporation bodies arranged one after the other in the flow direction, the evaporation bodies having a honeycomb cross section and extending in the flow direction. have. In this channel a carrier gas stream carrying the particles to be evaporated flows. Due to the linear extension of the channel with a honeycomb cross section, a large number of particles pass through the evaporation body without contacting the inner wall of the channel.

  US 2009/0039175 A1 or US 6037241 also use solid foams, in particular of tungsten, rhenium, tantalum, niobium, molybdenum or carbon or coated materials, for the evaporation of organic starting materials. Describe what to do. In this case, the solid foam is heated to the evaporation temperature at which the organic starting material evaporates by passing an electric current.

  Furthermore, from DE 102006026576 A1, a solid evaporator is known in which an aerosol is generated by rolling up a powder with an ultrasonic vibrator. A solid evaporator in which a large amount of starting material to be evaporated is kept at the evaporation temperature at all times provides a continuous evaporation rate. However, there is a high risk that the organic starting material to be evaporated will decompose at high temperatures. In order to solve this problem, US 2009/0061090 A1 or US 2010/0015324 A1 propose an evaporating vessel which can be refilled in an evaporator.

  U.S. Pat. No. 7,288,286 B2 describes a screw conveyor for feeding powdered organic starting material stored in a storage vessel into a gas stream that carries powdered suspended particles to an evaporator.

  An alternative method for generating powdered suspended particles is described in US Pat. No. 5,820,678. Here, a brush wheel is described which scrapes powder particles in the diameter range of μm from a solid formed from compacted powder. The powder particles are supplied to the evaporator by gas flow.

  In addition, aerosol generators are known in which liquid starting materials for MOCVD processes, in particular organic starting materials, are supplied in the form of droplets into a carrier gas stream. Apparatus in this regard is described in US Patent Publication No. 2005 / 0227004A1, US 2006 / 0115585A1 and US Pat. No. 5,204,314. The starting materials used for conventional MOCVD are generally liquid at room temperature or elevated temperature, while the organic starting materials used for the manufacture of OLEDs are generally solid at temperatures below 200 ° C.

  In known aerosol generators, a relationship is established between the evaporation rate and the rate of airborne particle generation in the aerosol generator. When an aerosol generator is used, for example, a brush device in which particles are scraped from a compacted solid powder with a moving, especially rotating brush, the rate of aerosol formation depends on the form of the brush. Other known aerosol generators have a transport device for the starting material to be sprayed into the carrier gas stream whose transport power varies in time.

  If a liquid starting material is used, a nozzle can be used for aerosol formation. Again, temporal variations in the aerosol generation rate are basically not preventable.

US Pat. No. 7,238,389B2 U.S. Pat. No. 4,769,292 U.S. Pat. No. 4,885,211 US Patent Publication No. 2006 / 0115585A1 German Patent Publication No. 10057491A1 International Patent Publication No. 2006 / 100058A2 US Patent Publication No. 2006 / 0169201A1 US Patent Publication No. 2009 / 0039175A1 US Pat. No. 6,037,241 German Patent Publication No. 102006026576A1 US Patent Publication No. 2009 / 0061090A1 US Patent Publication No. 2010 / 0015324A1 U.S. Pat. No. 7,288,286 B2 US Pat. No. 5,820,678 US Patent Publication No. 2005 / 0227004A1 US Pat. No. 5,204,314 US Pat. No. 7,501,152B2 U.S. Pat. No. 7,288,285 B2

  Accordingly, an object of the present invention is to provide a means for keeping the steam supply flow rate to the process chamber constant.

This problem is solved by the present invention described in the claims.

First and essentially, it is proposed that the generated vapor in the carrier gas from the evaporator to the process chamber has a saturated vapor pressure. To achieve this, means are used in which there is an excess of unevaporated starting material in the evaporator during the entire deposition process. In order to generate a carrier gas stream saturated with the vapor of the evaporated organic starting material to the process chamber, it is supplied to the evaporator within at least one stage of the deposition process, preferably within the start of the deposition process. The mass flow rate of suspended particles, i.e. the mass of suspended particles supplied to the evaporator per unit time, is made larger than the evaporation rate in the evaporator, i.e. the mass of starting material converted to vapor per unit time in the evaporator. . This increases the accumulated mass of unevaporated organic starting material in the evaporator during the concentration process. Concentration is preferably performed in the cavity volume of the solid foam used as the evaporation body. For this purpose, an open pore foam whose pore size is clearly larger than the size of the suspended particles is used as the evaporation body. A typical dimension for the diameter of the suspended particles is about 100 μm. The average dimension for the width of the pore opening is about 1 mm. The pore width may be in the range of 0.5 mm-3 mm. Sectional area of the pores is preferably larger than 1 mm ^2. Since the pores are bent and elongated greatly in a non-linear manner, the carrier gas flow passing through the pores is turned many times, and the particles transported in the pores collide with the pore walls. The solid foam used may have a pore volume greater than 90% of the total volume. The evaporation of the aerosol is preferably carried out in a process with various feed rates of suspended particles to the evaporator. Within the concentration process, a mass of organic starting material is supplied to the evaporator per unit time that is greater than the mass evaporated in the evaporator at the same time. This causes the accumulation mass as described above to be formed inside the pore volume of the evaporation body. During the dilution process following the concentration process, the rate of organic starting material feed into the evaporator is reduced, so that less material is evaporated to the evaporator as suspended particles than is evaporated in the evaporator at the same time. Supplied. As a result, the accumulated mass is consumed in the dilution process. To ensure that the vapor-saturated carrier gas stream exits the evaporator for the entire deposition process time, the dilution process should be switched to the enrichment process before the accumulated mass is consumed. , I.e. by raising the supply of material.

  The apparatus according to the present invention may have an aerosol generator in which the generation rate of suspended particles varies with time. In this case, the suspended particles may be in the form of powder or liquid. The aerosol generator has a storage container in which organic starting materials are stored. Further, the aerosol generator has a meter, and the rate of generation of suspended particles can be adjusted by the meter. According to the invention, the evaporator is improved so that the evaporation body consists of a plurality of parts. An inflow channel in the pore evaporation body, known from the prior art, for example from US 2009/0039175 A1, is formed according to the invention by a through-bore in the first evaporation body. One or more such first evaporation bodies may be arranged in series with each other. One end of the through bore is closed by a second evaporation body having substantially the same properties as the first evaporation body. This prevents the non-evaporated suspended particles from being transported through the evaporator. A gas flow carrying suspended particles introduced into the inflow channel can enter the pore volume of the first evaporation body through the walls of the inflow channel. The partial flow can enter the second evaporation body via the bottom of the inflow channel. It is preferable that both the evaporation bodies are arranged one after the other in the flow direction so that the gas emitted from the first evaporation body has to enter the second evaporation body. The second evaporation body may be formed from a plurality of parts. Thus, a plurality of second evaporation bodies are preferably formed that completely fill the evaporator cross section. In the flow direction, preferably a plurality of second evaporation bodies may be followed by a third evaporation body having substantially the same material as the other evaporation bodies. The third evaporation body may have the same shape as the first evaporation body, whereby an outflow channel is formed by the third evaporation body. The third evaporation body may also be formed from a plurality of parts. The first evaporation body and the third evaporation body have through-holes. The through-holes may be arranged concentrically with each other. The through holes may have the same diameter. However, the diameters of the through holes may be designed to be different from each other. That is, a step may be provided in the inner hole inside the evaporation main body. Furthermore, the evaporation body may be arranged in the evaporator so as to form a closed internal cavity not only in the inflow direction but also in the outflow direction. Furthermore, one of the evaporation bodies may extend only as long as the size of the pore diameter, whereby such an evaporation body acts as a diffuser. The outflow channel is preferably formed by a through bore in the third evaporation body. The bottom of the outflow channel is formed by a second evaporation body. Thus, the gas flowing in the second evaporation body, which may consist of one part or two parts, can flow partly in the pore volume of the third evaporation body and partly in the outflow channel It is. In the downstream direction, free space extends behind the third evaporation body, the cross-sectional area of the free space may optionally be reduced, and the free space enters the steam supply line and passes through the steam supply line The carrier gas flows into the process chamber with the organic starting material vapor carried by the carrier gas. At that position, the steam supply line enters the gas distributor, which has the shape of a showerhead. The gas outlet surface of the gas distributor faces the susceptor, and the substrate to be deposited is placed on the susceptor. The carrier gas carrying the vapor flows into the process chamber through a number of gas outflow openings arranged in a sieve shape in the gas outflow surface. The susceptor is preferably cooled so that the vapor can condense on the substrate. The process is carried out at a total pressure in the range of 0.1-100 mbar, preferably in the range of 0.1-10 mbar. In order to generate this low pressure, the process chamber is coupled with a vacuum pump. The evaporation body formed by the solid foam is arranged in the evaporator housing so that excess supplied aerosol does not flow through the evaporation body. The aerosol alone moves rather on the surface of the pores and accumulates there. This ensures that no suspended particles are present in the downstream gas flow despite the formation of a saturated vapor pressure downstream of the evaporation body. In order to heat the evaporation body to an evaporation temperature, for example to a temperature between 300 ° C and 400 ° C, the evaporator housing may be surrounded by a heater. However, it is preferred that the one or more evaporation bodies are made of a conductive material, so that an electric current for heating the evaporation bodies can flow in the evaporation bodies. Since the evaporation rate is not proportional to the evaporation temperature, a temperature control device is provided to keep the temperature of the evaporation main body constant. In one variant, in the open pore foam, which may be made of glassy carbon, metal, ceramic, glass or quartz, or which may be coated, the surface of the pore walls is a highly reflective material, especially gold. Designed to be coated with.

  With the apparatus of the present invention, a layer or layer structure can be deposited as described in detail in US Pat. No. 7,238,389 B2 cited at the outset or references cited therein. Therefore, all the disclosure contents of these documents are referred to.

  Embodiments of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 shows a schematic configuration diagram of a film forming apparatus. FIG. 2 shows a cross-sectional view taken along line II-II in FIG. FIG. 3 shows a cross-sectional view taken along line III-III in FIG. FIG. 4 shows a cross-sectional view of the second embodiment along line III-III. FIG. 5 shows a cross-sectional view of a second embodiment of the evaporator. FIG. 6 shows a cross-sectional view taken along line VI-VI in FIG. FIG. 7 shows a cross-sectional view taken along line VII-VII in FIG. FIG. 8 shows a cross-sectional view along line VIII-VIII in FIG.

  From a gas source not shown, an inert carrier gas, such as nitrogen, hydrogen or a noble gas, is introduced into the carrier gas supply line 1 via a mass flow controller which is also not shown. The carrier gas supply line may be heated so that the heated carrier gas can pass through the carrier gas supply line and flow into the aerosol generator 3.

  An organic starting material is stored in the storage container 2. The organic starting material is an organic material that emits light when voltage is applied, and a light emitting layer can be deposited on the substrate 18 using the organic light emitting material.

  The aerosol generator 3 may be a brush wheel grinder, for example as described in US Pat. No. 7,501,152B2 or US Pat. No. 7,288,285B2, but may also be a helical device. With such an aerosol generator, the powder component can be introduced into the carrier gas stream as suspended particles. The mass transfer rate of the suspended particles in the carrier gas stream, ie the aerosol generation rate, can vary.

  The aerosol generator is coupled to the evaporator 5 via an aerosol supply line 4. Through the aerosol supply line, suspended particles are introduced into the evaporator 5 by a carrier gas stream.

  The evaporator 5 shown in FIGS. 1 to 3 includes a housing 11 and a heater 12 surrounding the housing 11. Inside the housing is a multi-part evaporation body 6-10 made of solid foam. The solid foam is raised to the evaporation temperature by the heater 12, whereby the organic suspended particles in contact with the solid surface are evaporated.

  The steam thus formed is introduced into the reactor housing 15 by the carrier gas via the steam supply line 13. In order to avoid condensation of the vapor on the wall of the vapor supply line 13 or on the wall of the gas distributor located in the reactor housing 15, the gas distributor 16 and the vapor supply line 13 are heated. The steam supply line 13 may have a heating sleeve 14, for example.

  The gas distributor 16 disposed inside the reactor housing 15 has a showerhead shape. The gas distributor 16 is a disk-shaped hollow body having a gas outflow surface facing the process chamber 17, and the gas outflow surface has a number of gas outflow openings arranged in a sieve shape. A carrier gas stream carrying the gas flows into the process chamber 17.

  While the gas outlet surface of the gas distributor 16 forms the ceiling of the process chamber 17, the susceptor 19 on which the substrate 18 to be deposited is placed on the surface of the susceptor 19 facing the gas distributor 16 is provided. The bottom of the process chamber 17 is formed.

  The susceptor 19 has a cooling device (not shown), the surface of which can be cooled by the cooling device, so that the substrate 18 can be maintained at a temperature at which the vapor of the organic starting material can condense on the substrate surface. .

  The diagram does not show the valves and other gas lines used to purge the process chamber. Similarly, the vacuum pump 20 is shown only schematically and the vacuum chamber can hold the process chamber 17 and the evaporation chamber of the evaporator 5 at a low pressure.

  In the modification shown only in the sectional view in FIG. 4, the evaporation body 6-10 arranged in the evaporator 5 is made of a conductive material. The evaporation body 6-10 is an open pore solid foam having a pore volume of about 97% of the total volume. The evaporation body has electrical contacts 21, 22, which can respectively conduct currents in the evaporation body 6-10, which heats the evaporation body 6-10 to the evaporation temperature. The evaporation body 6-10 may be made of graphite or metal. If the evaporation body is made of a non-conductive material, for example a ceramic material, the evaporation body 6-10 is heated by a heating sleeve 12 not shown in FIGS. 1-3, which surrounds the tubular housing of the evaporator 5. .

  A first tubular evaporation body 6 is present inside the tubular evaporator housing 11, and the tubular evaporation body 6 has a through-hole 6 '. The through-hole 6 ′ is concentric with the aerosol supply line 4, whereby the aerosol flow that has flowed from the aerosol line 4 into the evaporator 5 flows into the hollow space of the first evaporator body 6. This inflow channel 6 ′ is surrounded by the pore walls of the evaporation body 6. The pore size of the evaporation main body 6 is larger than the floating particle size, so that the floating particles can be introduced from the gas flow into the evaporation main body 6 as indicated by arrows in the figure. Part of the suspended particles that have come into contact with the hot surfaces of the pores of the evaporation body 6 evaporate. However, some of the suspended particles accumulate in the pores of the evaporation body 6 as long as the aerosol is supplied in excess. The gas flow or suspended particle flow flows out of the volume of the through-opening 6 ′ or the first evaporation body 6 and flows directly into the second evaporation body 7 following the evaporation body 6. The three disc-shaped second evaporation bodies 7, 8, 9 are arranged one after the other in the flow direction. The second evaporation bodies 7, 8, 9 completely fill the cross section of the tubular housing 11. The second evaporation bodies 7, 8, 9 are located in contact with each other. Similar to the first evaporation body 6, a third evaporation body 10 having a pipe shape exists on the downstream side of the second evaporation body denoted by reference numeral 9. The third evaporation body 10 has a through-hole 10 ′ concentric with the through-opening 6 ′ of the first evaporation body 6 but separated by the second evaporation bodies 7, 8, 9. 10 'forms an outflow channel. A free volume exists behind the third evaporation body 10, and the free volume moves to the steam supply line 13.

  The evaporation body 6-10 is made of the same material and is capable of intermediate storage as suspended mass of suspended particles that have not been evaporated.

  With the above apparatus, the following method according to the invention is carried out. A substrate 18, which may be made of glass, placed on the susceptor 19 is deposited with an organic starting material. For this purpose, in order to generate a vapor-saturated carrier gas flow from the aerosol generator 3 to the process chamber 17 first via the vapor supply line 13 in the concentration process, An aerosol mass flow to the evaporator 5 is generated that is greater than the evaporation rate at. As a result of this excessive supply of suspended particles, a built-up mass is formed inside the pores of the evaporation body 6-10. The amount of accumulated mass of unevaporated starting material increases during the concentration process.

  The enrichment process is followed by a dilution process, which is essentially different from the enrichment process only in the generation rate of the aerosol generator 3. The aerosol generator 3 is an evaporator that is smaller than the evaporation rate inside the evaporator 5, i.e. the mass evaporated per unit time, for generating a vapor-saturated starting gas stream during the dilution process. Generate a mass flow rate of suspended particles to 5. During the dilution process, the accumulated mass decreases. Nevertheless, the vapor pressure of the evaporated organic starting material inside the gas stream introduced into the process chamber 17 does not change. This gas stream is always saturated with evaporated organic starting material. The vapor can condense on the substrate. However, the vapor can react chemically in the process chamber or on the substrate.

While the interior of the evaporator 5 Note the accumulation mass is present, it is switched to the concentrating process from diluted process. During the film forming process, the process may be switched between the dilution process and the enrichment process many times.

  FIGS. 5-8 show a second embodiment of the evaporator 5 that can be used in the apparatus shown in FIG. The aerosol supply line 4 extends a few millimeters further inside the tubular housing 11 and here enters into the through-opening 6 ″ of the first evaporation body 6. The evaporation body 6 is spaced from the side wall of the housing 11 by a free space 24 provided as an option. The free space 24 essentially acts as an insulation.

  A through-opening 6 "having a small diameter is followed by a second through-opening 6 'having a diameter approximately twice as large.

  On the downstream side of the evaporation main body 6, another evaporation main body 23 having a through-opening 23 'is present. The through opening 23 ′ is concentric with the through opening 6 ′ of the evaporation body 6.

  A diffuser 7 that completely fills the cross section of the tubular housing 11 is present downstream of the evaporation body 23. Since the diffuser 7 is composed of the same material as the other evaporation bodies 6, 23, 10, 8 and 9, i.e. the open pore foam as described above, this diffuser 7 is essentially the evaporation body as well. . The thickness of the diffuser 7, that is, its length measured in the flow direction, is as large as the open width of the pores of the diffuser 7.

  Another evaporation body 10 continues downstream of the diffuser 7, and the evaporation body 10 has a first through-opening 7 'having the same diameter as the through-openings 6' and 23 '. In the flow direction, this through-opening 7 ′ is followed by another through-opening 7 ″ having a small diameter. Since the bottom of the through-opening 7 ″ is closed, the through-opening 7 ″ is a bag opening. The bottom of the bag opening 7 ″ is formed by an evaporation body 8 that completely fills the diameter of the tubular housing 11. The evaporating body 7 and the evaporating body 8 together with the evaporating body 10 form internal cavities 7 ′ and 7 ″ that are closed on the entire surface.

  The evaporating body 8 is followed by an evaporating body 9 formed substantially the same as the evaporating body 8.

  All the evaporation bodies 6, 23, 7, 10, 8, 9 are arranged in series with each other in a contact arrangement. A free space 25 exists behind the last evaporation body 9 in the flow direction. The free space moves to the steam supply line 13. Via the aerosol supply line 4, a carrier gas stream carrying the suspended particles is introduced into the through openings 6 ', 23'. Airborne particles arrive with the gas flow in the walls of the through openings 6 ′, 23 ′, ie in the open pore evaporation bodies 6 and 23. Airborne particles having a relatively high mass and high velocity, i.e. airborne particles having a relatively large momentum, can reach the evaporation body 7. The evaporation body 7 acts as a diffuser and damps the carrier gas flow and thus the suspended particles carried in the carrier gas flow. As long as the suspended particles reach the inner holes 7 ', 7' ', the suspended particles enter the evaporation bodies 10 or 8 and evaporate by receiving heat therein.

  The evaporation body may be an open pore foam made of glassy carbon or glassy carbon. The foam may be coated with metal or ceramic. However, the foam may be composed of glass or quartz. In another preferred form, the surface of the foam has a weak light emissivity. The light emissivity is in the infrared range (200-400 ° C.) and is particularly less than 0.2. Weak surface emissivity is preferably achieved by the pore walls being coated with gold.

  All disclosed features (in themselves) have inventive step. Accordingly, the disclosure content of the attached / attached priority materials (copies of prior applications) is also intended to incorporate the features of these materials within the scope of the claims of this application, all of which are disclosed in this application. Is included. The dependent claims show, in particular, their inventive inventive variations within the text, which can be freely selected, in order to allow partial applications on the basis of these claims.

DESCRIPTION OF SYMBOLS 1 Carrier gas supply line 2 Container for organic starting materials 3 Aerosol generator 4 Aerosol supply line 5 Evaporator 6 Evaporating body 6 'Through opening 6''Through opening 7 Evaporating body 7' Through opening 7 '' Through opening 8 Evaporating body 9 Evaporation body 10 Evaporation body 10 'Through opening 11 Tubular housing 12 Heater 13 Steam supply line 14 Heater 15 Reactor housing 16 Gas distributor (shower head)
17 Process chamber 18 Substrate 19 Susceptor 20 Vacuum pump 21 Electrical contact 22 Electrical contact 23 Evaporating body 23 'Through opening 24 Free space 25 Free space

Claims (18)

The organic starting material is introduced into the carrier gas in the form of suspended particles, and the aerosol generated in this way is fed to the evaporator (5) as a predetermined mass flow of organic material, the evaporator (5) being finely divided. It has an evaporation body (6-10) composed of a solid foam including pores, and the evaporation body (6-10) is a floating particle or evaporation body (6-10) near the surface of the evaporation body (6-10). ) Is heated to an evaporation temperature at which the suspended particles that have entered the pores in contact with the surface of the substrate evaporate, and the vapor thus generated is transferred into the process chamber (17) by the carrier gas flow. In the method of depositing an organic starting material as a layer on the substrate (18), wherein the vapor condenses on the surface of the substrate (18) in (17) to form a layer.
In the deposition process, the temperature of the evaporation body (6-10) is kept constant during the deposition process to generate a carrier gas stream saturated with vapor of the evaporated organic starting material to the process chamber. in the mass flow rate of the organic starting material to the evaporator (5) is greater than the mass flow rate of the steam generated by evaporation of the organic starting material at the same time, and in the dilution in the process, the evaporator (5 mass flow rate of the organic starting material to) is smaller than the mass flow rate of the steam generated by evaporation of the organic starting material at the same time,
Switching from the diluting process to the concentrating process before the accumulated mass of organic starting material increased in the evaporator during the concentrating process is completely evaporated in the diluting process;
A method for depositing an organic starting material as a layer on a substrate (18), characterized in that The deposition method according to claim 1, wherein the size of the suspended particles is smaller than the pore size of the evaporation main body (6-10) composed of the solid foam . As a carrier gas, A process according to claim 1 or 2, characterized in that the pre-heated inert gas is used. As a carrier gas, A process according to claim 1 or 2, characterized in that the pre-heated the nitrogen, hydrogen or rare gas scan is used. As a carrier gas, A process according to claim 1 or 2, characterized in that pre-heated was an argon is used. In the process chamber, the process, A process according to any one of claims 1 to 5, characterized in that takes place in the total pressure in the range of 0.1-100m bar. Within the process chamber, the process is 0 . A process according to any one of claims 1 to 5, characterized in that takes place in the total pressure in the range of 1-10Mbar. The individual foam, A process according to any one of claims 1 to 7, characterized in that consists of vitreous carbon or glassy carbon. A process according to claim 8 wherein the individual foam, meta luma other, wherein the benzalkonium be coated with a cell Rami' click. The individual foam, A process according to any one of claims 1 to 7, characterized in that consists of glass or quartz. The deposition method according to claim 8 or 10 , wherein the solid foam is coated with gold . The individual foam, A process according to any one of claims 1 to 11, characterized in having pore sizes have pore widths than 0.5 mm. The individual foam, A process according to any one of claims 1 to 11, characterized in that it has pores of 1 mm larger pore width. Carrier gas flow in the evaporator (5) aerosol generator for generating the mass flow of the starting materials in the form of suspended particles is conveyed to a (3),
A first evaporating body (6) forming an inflow channel (6 ') through which a mass flow of the starting material flows in through a through-bore, and the inflow channel (6 for blocking the passage of unevaporated suspended particles) ′) A second evaporation body (7) forming the closed end (7 ′), wherein the inflow channel (6 ′) and the second evaporation body (7) form a bag cavity ( 6-10), an evaporator (5) capable of heating the evaporation body (6-10) to the evaporation temperature in order to evaporate the suspended particles;
Evaporator (5) vapor generated from is subjected fed via the steam supply line (13), a process chamber for receiving a substrate (18) (17),
With
The evaporator body (6-10) includes pores of 1 mm ² larger pore cross-sectional area, Ru solid foam der having a pore volume which accounts for at least 90% of the total volume,
Organic starting deposition apparatus substances as a layer on a substrate (18), wherein a call. One or more first evaporation bodies (6) having through-holes of the same diameter or different diameters form an inflow channel (6 ') and the flow of the one or more first evaporation bodies (6) One or more second evaporation bodies (7, 8, 9) are arranged behind the direction so as to completely fill the flow section of the evaporator (5), in series in the flow direction deposition apparatus according to claim 14, characterized in that it comprises a plurality of evaporation body placed in (6-10). Inflow channel (6 ') the closed end of the concentric outflow channel (10') (9 ') is formed by one or more of the second evaporator body (7,8,9), said outflow 16. Deposition device according to claim 14 or 15 , characterized in that it comprises a third evaporation body (10) forming a channel (10 '). Steam supply line (13), seen write enters the reactor housing (15) disposed gas distributor in (16) inside,
Gas distributor gas exit surface (16) is located opposite the and the substrate (18) you support cooling susceptor (19) having a plurality of gas outflow openings arranged in cribriform The
Deposition apparatus according to any one of claims 14 to 16, characterized and this. The evaporator (5) has a heater, or evaporation body (6-10) is composed of a conductive material, the conductive material is that it is a possible electrical heating by current introduced into the evaporation body (6-10) in ,
Deposition apparatus according to any one of claims 14 to 17, characterized in.

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