KR101959775B1 - Optical apparatus, processing apparatus, and article manufacturing method - Google Patents

Optical apparatus, processing apparatus, and article manufacturing method Download PDF

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KR101959775B1
KR101959775B1 KR1020150159566A KR20150159566A KR101959775B1 KR 101959775 B1 KR101959775 B1 KR 101959775B1 KR 1020150159566 A KR1020150159566 A KR 1020150159566A KR 20150159566 A KR20150159566 A KR 20150159566A KR 101959775 B1 KR101959775 B1 KR 101959775B1
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South Korea
Prior art keywords
reflecting
reflection
light
reflecting surface
light reflected
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KR1020150159566A
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Korean (ko)
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KR20160057341A (en
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마사하루 쿠메
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캐논 가부시끼가이샤
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0813—Configuration of resonator
    • H01S3/0817—Configuration of resonator having 5 reflectors, e.g. W-shaped resonators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms

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  • Physics & Mathematics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Engineering (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

The optical device includes a rotatable reflective member having a first reflective surface and a second reflective surface, and a second reflective surface that sequentially reflects light reflected from the first reflective surface on a plurality of reflective surfaces provided therein, And an adjustment device for changing the rotation angle of the reflection member to adjust an optical path of the light reflected and emitted from the second reflection surface.

Figure R1020150159566

Description

[0001] OPTICAL APPARATUS, PROCESSING APPARATUS, AND ARTICLE MANUFACTURING METHOD [0002]

The present invention relates to an optical device, a processing device, and a method of manufacturing an article.

A light beam parallel shift mechanism in a conventional laser processing apparatus is disclosed in, for example, Japanese Patent No. 4386137 and Japanese Patent Application Laid-Open No. 11-121119. In Japanese Patent No. 4386137, the transparent member is rotated to shift the light beam in parallel. In Japanese Patent Application Laid-Open No. 2011-121119, the light beams are parallel-shifted by using two synchronized angle variable mirrors.

However, in the light beam parallel shift mechanism of Japanese Patent No. 4386137, since the parallel shift amount of the light beam is determined by the rotation angle and length of the transparent member, inertia at the time of rotation becomes large, and therefore it is difficult to perform desired light beam shift at high speed. For example, suppose a case where the amount of parallelism of light beam shift of 5.3 mm is performed at a rotation angle of +/- 10 degrees of a transparent member (quartz glass n = 1.45) in the manner of Japanese Patent No. 4386137. In this case, the actual size of the transparent member is about 95 mm x 16 mm x 13 mm. As a result, the inertia is as large as 33,000 g · mm 2 , and it is difficult to perform parallel shift at high speed.

The technique disclosed in Japanese Patent Application Laid-Open No. 2011-121119 solves the problem of increasing the inertia of the rotating body. However, since it is difficult to precisely synchronize the two mirror rotating mechanisms at high speed operation, the angle of the emitted light beam is not constant, and it is difficult to shift the light beam in parallel.

The present invention provides, for example, an apparatus that is advantageous in terms of the speed of light path adjustment.

An optical device according to an aspect of the present invention is provided. The optical device includes a rotatable reflective member having a first reflective surface and a second reflective surface, and a second reflective surface that reflects light reflected from the first reflective surface sequentially from a plurality of reflective surfaces provided therein, An optical system for causing the light to be incident on the reflecting surface and an adjusting device for changing the rotational angle of the reflecting member to adjust the optical path of the light reflected and emitted from the second reflecting surface.

Further features of the present invention will become apparent from the following description of embodiments (with reference to the accompanying drawings).

Fig. 1 is a diagram showing a configuration of an optical device according to the first embodiment.
2 is a graph showing the relationship between the light beam shift amount and the rotation angle of the mirror member in the first embodiment.
3 is a graph showing the influence of the thickness of the mirror member on the light beam shift amount in the first embodiment.
4 is a diagram showing a configuration of an optical device according to the second embodiment.
5 is a diagram showing a configuration of an optical device according to the third embodiment.
Fig. 6 is a diagram showing a configuration of an optical device according to the fourth embodiment.
7 is a view showing a configuration of a machining apparatus according to the fifth embodiment.
8 illustrates an example of an angle varying mechanism of a mirror member according to an embodiment.

Hereinafter, various embodiments, features and aspects of the present invention will be described in detail with reference to the drawings.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The following embodiments are not intended to limit the scope of the appended claims, and all of the combinations of the features described in the embodiments are not necessarily essential to the solution of the present invention.

≪ Embodiment 1 >

Fig. 1 shows a configuration of an optical device according to the first embodiment. The optical device according to the present embodiment is capable of controlling the optical path of emitted light, for example, enabling parallel shift of light beams. The light beam parallel shift mechanism according to the present embodiment (more generally, adjustment of the optical path, typically a mechanism for translating or translating the optical path) includes a mirror member (not shown) for reflecting the light beam 51 from the light source 50 2) (also referred to as a reflecting member). In the following description, it is exemplified that each reflection surface can be regarded as a plane and a translational or translational movement of the optical path is performed. The mirror member 2 has a first reflecting surface 2a made of glass and receiving the light beam 51 from the light source 50 and a second reflecting surface 2b opposite to the first reflecting surface 2a. The first reflection surface 2a and the second reflection surface 2b may each be coated with a highly reflective mirror coating. The mirror member 2 may be of a prism type, and the first reflecting surface 2a and the second reflecting surface 2b may be independent constituent elements. Here, the configuration in which the first reflection surface and the second reflection surface are opposite to each other or is a separated surface on the prism and is an independent surface is compared with the case where the first reflection surface and the second reflection surface are the same (flat surface) It is advantageous for relief.

The mirror member 2 is formed so as to change the angle with respect to the light beam 51 so as to control the optical path of the light emitted from the optical device. Fig. 8 shows an example of an angle varying mechanism of the mirror member 2. Fig. As shown in Fig. 8, the mirror member 2 is supported in the axial direction by an output shaft 1a of the galvanometer motor 1. [ The control unit 60 (adjusting device) outputs a driving signal to the galvanometer motor 1. [ A rotary drive unit (not shown) in the galvanomotor 1 rotates the mirror member 2 through the output shaft 1a by a drive amount corresponding to the input drive signal. Thus, the mirror member 2 is rotatable. Here, the mirror member 2 is inclined by about 45 DEG with respect to the light beam 51 from the light source 50. [

The light beam parallel shift mechanism according to the present embodiment is a mechanism in which light incident on the mirror member 2 and reflected by the mirror member 2 is successively reflected from the reflecting surface even number of times and is incident on the mirror member 2 again And an optical system 80. The optical system 80 according to the present embodiment has four mirrors 3, 4, 5, 6 fixedly arranged so as to be symmetrical with respect to the light beam 51, for example. The light reflected by the first reflecting surface 2a of the mirror member 2 is sequentially reflected by the mirrors 3, 4, 5 and 6 to be incident on the second reflecting surface 2b. Finally, the light reflected by the second reflecting surface 2b is emitted in substantially the same direction as the light beam 51. [

The angle of the outgoing light does not change even when the angle of rotation of the mirror member 2 is changed. Therefore, by adjusting the rotation angle of the mirror member 2 by the control unit 60, it is possible to adjust the optical path of the light reflected by the reflecting surface of the mirror member 2 and emitted.

Next, the relationship between the parallel light beam shift amount and the angle change of the mirror member 2 will be described. Assume that the thickness of the mirror member 2 is assumed to be zero. 2 shows the relationship between the amount of light beam shift and the angle change of the mirror member 2 when the outer circumferential distance L of the tetragonal shape formed by the four mirrors 3, 4, 5 and 6 is 300 mm and the outer circumferential distance is 400 mm, .

This light beam parallel shift amount? S is expressed by the following equation.

? S = L 占 tan (2 占?? G) (1)

Here,? G is an angular variation of the mirror member 2.

Equation (1) shows that a larger light beam parallel shift amount can be realized with a smaller angle change of the mirror member 2 as L becomes longer. By making L longer, fast variable optical beam shift can be performed.

Next, consider the case where the actual length of the mirror member 2 is taken into consideration. Fig. 3 shows the difference in the amount of parallel light beam shift between the case where the thickness of the mirror member 2 is assumed to be 0 and the case where the actual thickness is considered. 3, when the thickness of the mirror member 2 is small relative to L, the difference from the amount of shift when the thickness of the mirror member 2 is zero is small, and the light beam shift amount is approximately expressed by Equation (1) . The required width W of the reflecting surface of the mirror member 2 is expressed by the following equation.

W = (D + Smax) / sin (45 +? G)

Here, D is the width of the incident light beam to the shift mechanism, and Smax is the maximum shift amount.

According to the configuration of the present embodiment, when the thickness of the mirror member 2 is 2 mm (inertia = 89 g · mm 2 ) and L = 300 mm, as a result of the design for realizing parallel light beam shift of 5.3 mm, The shift to the control can be realized within the range. Therefore, the speed can be greatly increased as compared with the prior art.

As described above, according to the present embodiment, with the use of the mirror member 2 and the four mirrors 3, 4, 5, and 6 which are angularly variable to receive the light from the light source 50, Mechanism can be realized.

≪ Embodiment 2 >

4 is a diagram showing the configuration of an optical device according to the second embodiment. As shown in Fig. 4, the mirror member 7 that reflects the light beam 51 from the light source 50 may have the same configuration as the mirror member 2 according to the first embodiment. That is, the mirror member 7 includes a first reflecting surface 7a made of, for example, glass and receiving a light beam 51 from the light source 50, and a second reflecting surface 7b opposite to the first reflecting surface 7a do. The first reflection surface 7a and the second reflection surface 7b may each be coated with a highly reflective mirror coating. The mirror member 7 may be of a prism type, and the first reflecting surface 7a and the second reflecting surface 7b may be independent constituent elements. The mirror member 7 is formed so as to be able to vary the angle as the mirror member 2 according to the first embodiment. Here, the mirror member 7 is inclined at an angle of about 45 with respect to the light beam 51 from the light source 50.

The optical system 90 according to the present embodiment has two mirrors 8 and 9 fixedly arranged so that the optical path forms a triangle as shown in Fig. The light reflected by the first reflecting surface 7a of the mirror member 7 is sequentially reflected by these mirrors 8 and 9 and is led to the second reflecting surface 7b of the mirror member 7 . Finally, the light reflected by the second reflection surface 7b is emitted in one direction, for example, orthogonal to the light beam 51. [ In this configuration, the parallel shift of the light beam according to the equation (1) can be realized by rotating the mirror member 7 by the angle? G in the galvanometer motor.

As described above, according to the present embodiment, it is possible to realize a high-speed light beam parallel shift mechanism in a configuration using an angle-variable mirror member 7 and two mirrors 8 and 9 that receive light from the light source 50 have.

≪ Third Embodiment >

Fig. 5 shows a configuration of the optical device according to the third embodiment. The mirror member 10 that reflects the light beam 51 from the light source 50 is formed so as to be able to vary the angle as the mirror member 2 according to the first embodiment. Here, the mirror member 10 is inclined at an angle of about 45 with respect to the light beam 51 from the light source 50.

The optical system 100 according to the present embodiment has two mirrors 11 and 12 fixedly arranged on the lower side of the mirror member 10 as shown in Fig. Light reflected by the first reflection area 10b on the first surface 10a of the mirror member 10 on the light source 50 side is sequentially reflected by the mirrors 11 and 12 And is reflected to the second reflection region 10c on the first surface 10a of the mirror member 10. [ The light reflected by the second reflection region 10c is emitted in a direction in which the light beam 51 is inverted by, for example, 180 degrees. In this configuration, the parallel shift of the light beam according to Equation (1) can be realized by rotating the mirror member 10 by? G in the galvanometer motor.

As described above, according to this embodiment, it is possible to realize a high-speed light beam parallel shift mechanism in a configuration using an angle-variable mirror member 10 and two mirrors 11 and 12 that receive light from the light source 50 have.

<Fourth Embodiment>

6 shows a configuration of an optical device according to the fourth embodiment. This configuration is a combination of the configurations shown in the first embodiment (Fig. 1) and includes a first optical device 61 that receives the light beam 51 from the light source 50, and a second optical device 61 that receives the light beam 51 from the first optical device 61 And a second optical device 62 that receives the emerging light of the second optical device 62.

The first optical device 61 has an angle-variable mirror member 13 that reflects the light beam 51 from the light source 50. This corresponds to the mirror member 2 according to the first embodiment. The first optical device 61 also includes mirrors 14-1, 14-2, 14-3, and 14-4 corresponding to the mirrors 3, 4, 5, and 6 according to the first embodiment .

The second optical device 62 has an angle-variable mirror member 15 that reflects the light beam 51 from the light source 50. This corresponds to the mirror member 2 according to the first embodiment. The second optical device 62 includes mirrors 16-1, 16-2, 16-3, and 16-4 corresponding to the mirrors 3, 4, 5, and 6 of the first embodiment, respectively.

The rotation axis of the mirror member 13 of the first optical device 61 and the rotation axis of the mirror member 15 of the second optical device 62 are opposed to each other and arranged so as to be orthogonal to each other, for example.

In the first optical device 61, the incident light reflected by the first reflecting surface of the mirror member 13 is sequentially reflected by the mirrors 14-1, 14-2, 14-3, and 14-4 And is led to the second reflecting surface on the opposite side of the first reflecting surface of the mirror member 13. The light reflected by the second reflecting surface is incident on the mirror member 15 of the second optical device 62. In the second optical device 62, the incident light reflected by the first reflection surface of the mirror member 15 is sequentially reflected by the mirrors 16-1, 16-2, 16-3, and 16-4 And is led to the second reflecting surface on the opposite side of the first reflecting surface of the mirror member 15. Finally, the light reflected by the second reflecting surface of the mirror member 15 is emitted in substantially the same direction as the light beam 51. [

As shown in FIG. 6, the mirrors are formed by the plane formed by the optical path reflecting light in the first optical device 61 and the optical path in which the mirrors reflect light in the second optical device 62 May be employed. Thus, when the parallel shift mechanisms of the light beams are arranged so as to cross each other, miniaturization of the optical device can be realized.

In this example, the light beam parallel shift mechanisms of the first embodiment (Fig. 1) are arranged so that the shift directions are orthogonal to each other. However, in the case of combining the two light beam parallel shift mechanisms selected in the first to third embodiments, similarly, the light beam parallel shift can be freely performed in the two-dimensional plane.

According to the various embodiments described above, the optical device includes a rotatable mirror member and an optical system that receives the light reflected by the mirror member and emits the light in a predetermined direction. The optical system sequentially reflects light evenly from the reflecting surface to re-enter the mirror member. The re-incident light is reflected by the mirror member and emitted in a predetermined direction. According to the study by the inventor of the present invention, the present invention can not be applied to an optical system that reflects an odd number of times, not an even number of times.

<Fifth Embodiment>

Hereinafter, an example of a processing apparatus having an optical element for guiding light emitted from the optical device shown in the fourth embodiment to an object will be described. Fig. 7 shows a configuration of a laser machining apparatus according to the fifth embodiment. The laser machining apparatus according to the present embodiment is provided with the light beam parallel shift mechanism 17 shown in the fourth embodiment at the rear end of the laser light source 71. At the rear end of the light beam parallel shift mechanism 17, the light beam expanding units 18 and 19 are arranged so that the light beam shift amount / light beam system is enlarged to a required amount. A converging lens 22 is disposed at the rear end of the light beam expanding system, and the condensed laser beam is irradiated to the object 23 disposed on the focal plane. The angle of the mirrors 20 and 21 provided between the light beam expander 19 and the condenser lens 22 can be adjusted so as to lead the light beam to a desired position on the object 23. [

In this configuration, the light beam parallel shift mechanism 17 freely changes the angle of the laser beam irradiated on the object 23 by parallel shifting the light beam. As a result, taper hole machining or cutting with an oblique section can be performed.

[Embodiment of article manufacturing method]

The processing apparatus according to the embodiment described above can be used in a method of manufacturing an article. The article manufacturing method may include a step of processing an object using the processing apparatus and a step of processing the object processed in the step. The processing may include at least one of processing, conveying, inspecting, sorting, assembling (cooperating force), and packaging different from the above processing, for example. The article manufacturing method according to the present embodiment is superior to the conventional method in at least one of the performance, quality, productivity, and production cost of the article.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. The scope of the following claims is to be accorded the broadest interpretation so as to encompass all modifications and equivalent structures and functions.

Claims (12)

A first reflecting member rotatable about a first axis and having a first reflecting surface and a second reflecting surface;
A first reflecting surface that reflects light reflected from the first reflecting surface of the first reflecting member in a sequential manner and directs the light to be incident on the second reflecting surface of the first reflecting member; 1 optical system;
A first adjusting device for changing the rotation angle of the first reflecting member to adjust an optical path of the light reflected and emitted from the second reflecting surface of the first reflecting member;
A second reflective member rotatable about a second axis and having a third reflective surface and a fourth reflective surface;
And a second plurality of reflection surfaces that sequentially reflect light reflected from the third reflection surface of the second reflection member and that directs the light to be incident on the fourth reflection surface of the second reflection member, Optical system; And
And a second adjusting device for changing the rotational angle of the second reflecting member to adjust an optical path of the light reflected and emitted from the fourth reflecting surface of the second reflecting member,
The third reflecting surface reflects the light reflected by the second reflecting surface of the first reflecting member,
And the first axis and the second axis are opposed to each other.
The method according to claim 1,
The second reflecting surface of the first reflecting member is on the opposite side of the first reflecting surface of the first reflecting member,
And the fourth reflecting surface of the second reflecting member is on the opposite side of the third reflecting surface of the second reflecting member.
The method according to claim 1,
The first reflecting surface of the first reflecting member and the second reflecting surface of the first reflecting member, the third reflecting surface and the fourth reflecting surface of the second reflecting member, the first plurality of reflecting surfaces of the first optical system, The second plurality of reflecting surfaces of the second optical system are planar, and the first adjusting device and the second adjusting device translate the optical path.
The method according to claim 1,
Wherein the first plurality of reflection surfaces are four reflection surfaces and the second plurality of reflection surfaces are four reflection surfaces.
The method according to claim 1,
Wherein the first plurality of reflection surfaces are two reflection surfaces and the second plurality of reflection surfaces are two reflection surfaces.
delete delete The method according to claim 1,
Wherein the plane formed by the optical path in the first optical system and the plane formed by the optical path in the second optical system intersect with each other.
The method according to claim 1,
Wherein the first optical system reflects light reflected from the first reflection surface of the first reflection member in an even number of times and directs the light to be incident on the second reflection surface of the first reflection member, And the second reflecting member reflects the light reflected from the third reflecting surface of the second reflecting member in an even number of times and directs the light to be incident on the fourth reflecting surface of the second reflecting member.
A processing device having a light source and an optical device,
A first reflecting member rotatable about a first axis and having a first reflecting surface and a second reflecting surface;
And a first plurality of reflection surfaces that sequentially reflect light from the light source reflected by the first reflection surface of the first reflection member so that the light is incident on the second reflection surface of the first reflection member A first optical system oriented;
A first adjusting device for changing the rotation angle of the first reflecting member to adjust an optical path of the light reflected and emitted from the second reflecting surface of the first reflecting member;
A second reflective member rotatable about a second axis and having a third reflective surface and a fourth reflective surface;
And a second plurality of reflection surfaces that sequentially reflect light reflected from the third reflection surface of the second reflection member and that directs the light to be incident on the fourth reflection surface of the second reflection member, Optical system; And
And a second adjusting device for changing the rotational angle of the second reflecting member to adjust an optical path of the light reflected and emitted from the fourth reflecting surface of the second reflecting member,
The third reflecting surface reflects the light reflected by the second reflecting surface of the first reflecting member,
And the first axis and the second axis are opposed to each other.
11. The method of claim 10,
Further comprising an optical element for guiding the light emitted from said optical device to an object.
A method of manufacturing an article,
Processing the object by using a processing apparatus; And
And processing the processed object to manufacture the article,
Wherein the processing device includes a light source and an optical device,
A first reflecting member rotatable about a first axis and having a first reflecting surface and a second reflecting surface;
And a first plurality of reflection surfaces that sequentially reflect light from the light source reflected by the first reflection surface of the first reflection member so that the light is incident on the second reflection surface of the first reflection member A first optical system oriented;
A first adjusting device for changing the rotation angle of the first reflecting member to adjust an optical path of the light reflected and emitted from the second reflecting surface of the first reflecting member;
A second reflective member rotatable about a second axis and having a third reflective surface and a fourth reflective surface;
And a second plurality of reflection surfaces for sequentially reflecting the light reflected from the third reflection surface of the second reflection member and for guiding the light to be incident on the fourth reflection surface of the second reflection member, Optical system; And
And a second adjusting device for changing the rotational angle of the second reflecting member to adjust an optical path of the light reflected and emitted from the fourth reflecting surface of the second reflecting member,
The third reflecting surface reflects the light reflected by the second reflecting surface of the first reflecting member,
Wherein the first axis and the second axis are opposed to each other.
KR1020150159566A 2014-11-13 2015-11-13 Optical apparatus, processing apparatus, and article manufacturing method KR101959775B1 (en)

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JP6851751B2 (en) * 2016-08-30 2021-03-31 キヤノン株式会社 Optical equipment, processing equipment, and article manufacturing methods
BE1026484B1 (en) * 2018-07-24 2020-02-25 Laser Eng Applications Optical method and device for providing two offset laser beams
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