JPH11125783A - Optical scan system, optical molding device using the system laser marker and laser beam machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enlarge the scan angle of reflected light beams per a unit time without increasing heat generation in a motor by constituting first and second turning part constituting a polarizing means with respectively turnable first reflection member and at least a fixed second reflection member. SOLUTION: Laser beams are emitted from a laser light source 1 in the Y axial direction of a coordinate system, and made incident on a scan mirror 11 at an incident angle 45 deg.. At this time, the laser beams A are reflected in the X axial direction by the scan mirror 11, and the laser beams A reflected in the X axial direction are reflected in the Y axial direction by a reflection mirror 12. The laser beams A reflected in the Y axial direction are reflected again in the X axial direction by the scan mirror 11 to scan a target surface 8. In such a case, the reflected light beams are turned by 4θ by turning the scan mirror 11 by a (θ) degree. Thus, the scan angle of the reflected light beams per a unit time is enlarged without increasing the heat generation in the motor even when the same motor is used.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning optical system and an optical shaping apparatus, a laser marker, and a laser processing machine using the same, and more particularly, to a motor for the deflecting means by appropriately configuring each element of the deflecting means. Thus, the reflected light of the laser beam can be largely changed with respect to the rotation angle of the motor without increasing the heat generation of the motor.

[0002]

2. Description of the Related Art Conventionally, various optical shaping apparatuses have been proposed in which a three-dimensional model is formed by two-dimensionally scanning a scanned surface (target surface) formed of a photocurable resin with a light spot.

FIG. 5 is a perspective view of a main part of a conventional optical forming apparatus of this kind.

In FIG. 1, reference numeral 51 denotes a laser light source, which comprises, for example, a semiconductor laser, a CO ₂ laser, a second harmonic type laser or the like. 52 is a folding mirror which bends the optical path. Reference numeral 53 denotes an imaging lens (focus lens) which forms a laser beam (light flux) based on image information (eg, CAD data) on a surface to be scanned (target surface) described later.

Reference numeral 50 denotes a deflecting means which can deflect two-dimensionally in two orthogonal directions. The deflecting means 50 deflects the laser light in a first direction. And a Y-axis scanning unit 56 that deflects in a second direction perpendicular to the direction of X, and the X-axis scanning unit 54 and the Y-axis scanning unit 56 each oscillate (rotate) about an arbitrary position. Has a mirror.

The scan mirrors for the X axis and the Y axis are attached to the corresponding motors, respectively, and are oscillated by the corresponding servo amplifiers 55 and 57 for the X axis and the Y axis.

Reference numeral 58 denotes a target surface as a surface to be scanned, which is formed of a photocurable resin, and the photocurable resin is cured by irradiating the photocurable resin with a laser beam.
By stacking layers of resin, a three-dimensional model is formed. Reference numeral 59 denotes a laser power supply, and reference numeral 60 denotes a logic interface.

In FIG. 1, a laser beam based on CAD data emitted from a laser light source 51 is reflected by a return mirror 52.
And the X-axis scanning unit 54
The target surface 58 through the Y-axis scanning unit 56
A two-dimensional scan is performed in the axial direction and the Y-axis direction, and a trajectory is drawn on the target surface 58 to form a three-dimensional model.

As described above, in the optical molding apparatus, a photocurable resin is provided on the target surface, the resin is cured by irradiating the photocurable resin with a laser beam, and the resin layers are stacked to form a three-dimensional model. Can be shaped.

The time required for forming a three-dimensional model in this type of optical forming apparatus is determined by the output of the laser beam, the characteristics of the photocurable resin, the alignment of the imaging lens, the scanning time of the X-axis scanning unit and the Y-axis scanning unit. Etc. are determined.

[0011]

The stereolithography apparatus is also called "rapid prototyping", and can be used in a short time.
This is a device for producing a three-dimensional model from AD data. The performance of the optical molding apparatus is substantially determined by processing accuracy, molding time, resin material, and the like. In particular, the molding time is X-axis scanning,
Since it is determined by the scanning time of the Y-axis scanning unit, it is a bottleneck (prohibition of progress) in increasing the modeling throughput of the three-dimensional model.

FIG. 6 is a schematic diagram of a main part of an optical system around the Y-axis scanning unit 56 shown in FIG. As shown in the figure, in order to change the direction of the reflected light beam A reflected by the Y-axis scan mirror 61 by, for example, 2θ, the scan mirror 61 is rotated by a motor by an angle θ around an arbitrary position O. It is necessary to rotate (vibrate).

In order to reduce the scanning time of the X-axis scanning unit 54 and the Y-axis scanning unit 56, it is necessary to increase the rotation speed of the motor.

However, increasing the rotation speed of the motor (increase of the rotation angle) in the same time increases the amount of heat generated by the motor, which causes a problem such as heat dissipation, which is not preferable.

According to the present invention, a first reflecting member capable of rotating (vibrating) each of a first rotating portion and a second rotating portion constituting a deflecting means in order to solve the above problems, By using one fixed second reflecting member, the reflected light beam (optical axis) of the laser light can be largely changed with respect to the rotation angle of the motor. It is possible to increase the scanning angle of the reflected light beam per unit time without increasing the amount of heat generated in the above, and to shorten the scanning time of the first rotating unit and the second rotating unit. An object of the present invention is to provide a scanning optical system, an optical shaping apparatus using the same, a laser marker, and a laser processing machine.

[0016]

A scanning optical system according to the present invention comprises:
(1-1) After deflecting the laser light emitted from the light source means through the deflecting means capable of two-dimensionally deflecting in two directions orthogonal to each other by the imaging means, the laser light is imaged on the surface to be scanned, and In a scanning optical system that scans a scanning surface two-dimensionally, the deflecting unit includes a first rotating unit that deflects a laser beam in a first direction, and a first rotating unit that is deflected by the first rotating unit. A second rotating portion that deflects in a second direction perpendicular to the direction of
The first and second rotating parts each have a first reflecting member that vibrates about an arbitrary position and a fixed second reflecting member, and each of the rotating parts has an incident laser beam. Is reflected by the first reflecting member, the reflected laser light is reflected by the second reflecting member, and the reflected laser light is again reflected by the first reflecting member.
The light is reflected by the reflecting member.

(1-2) The laser light emitted from the light source means is deflected by the image forming means through the deflecting means which can deflect two-dimensionally in two directions orthogonal to each other, and then is imaged on the surface to be scanned. A scanning optical system for two-dimensionally scanning the surface to be scanned, wherein the deflecting means deflects the laser beam in a first direction; A second rotating portion that deflects in a second direction perpendicular to the first direction, wherein the first rotating portion and the second rotating portion each oscillate about an arbitrary position. A first reflecting member, and a plurality of fixed second reflecting members, each of the rotating portions reflecting incident laser light on the first reflecting member, and transmitting the reflected laser light. The laser beam is sequentially reflected by the plurality of second reflecting members, and the reflected laser light is again reflected by the first reflecting member. Optical system.

(1-3) After the laser light emitted from the light source means is deflected by the image forming means through the deflecting means which can deflect two-dimensionally in two directions orthogonal to each other, the image is formed on the surface to be scanned. A scanning optical system for two-dimensionally scanning the surface to be scanned, wherein the deflecting means deflects the laser beam in a first direction; A second rotating portion that deflects in a second direction perpendicular to the first direction, wherein the first rotating portion and the second rotating portion each oscillate about an arbitrary position. A first reflecting member, and a plurality of fixed second reflecting members, each of the rotating portions reflecting incident laser light on the surface of the first reflecting member, and Light is sequentially reflected by the plurality of second reflecting members, and the reflected laser light is reflected by the back surface of the first reflecting member. It is.

The stereolithography apparatus of the present invention comprises: (2) the above (1-1), (1-
2) and (1-3), wherein the scanning optical system according to any one of (1) to (3) is used for an optical shaping apparatus.

The laser marker according to the present invention comprises:
A scanning optical system according to any one of (1-2) and (1-3) is used as a laser marker.

The laser beam machine according to the present invention is characterized in that (4) the above (1-1),
A scanning optical system according to any one of (1-2) and (1-3) is used for a laser beam machine.

[0022]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a perspective view of a main part of a first embodiment when the present invention is used in an optical molding apparatus.

In FIG. 1, reference numeral 1 denotes light source means (laser light source).
And comprises, for example, a semiconductor laser, a CO ₂ laser, a second harmonic type laser or the like. Reference numeral 2 denotes a folding mirror that bends the optical path. Reference numeral 3 denotes an imaging lens (focal lens) which forms a laser beam (light flux) based on image information (for example, CAD data) on a surface to be scanned, which will be described later.

Reference numeral 20 denotes a deflecting means which can deflect the laser light emitted from the light source means 1 two-dimensionally in two directions orthogonal to each other, and X as a first rotating portion for deflecting the laser light in the first direction. An X-axis scanning unit 4; a Y-axis scanning unit 6 as a second rotating unit that deflects in a second direction perpendicular to the first direction deflected by the X-axis scanning unit 4; Each of the axis scanning unit 4 and the Y-axis scanning unit 6 has a scan mirror as a first reflection member that vibrates (rotates) about an arbitrary position, and a fixed reflection mirror as a second reflection member. ing.

The X-axis and Y-axis scan mirrors are respectively attached to the corresponding motors, and are oscillated by the corresponding X-axis and Y-axis servo amplifiers 5 and 7, respectively.

Reference numeral 8 denotes a target surface as a surface to be scanned, which is formed of a photocurable resin, and the photocurable resin is cured by irradiating the photocurable resin with a laser beam.
By stacking layers of resin, a three-dimensional model is formed. 9 is a laser power supply and 10 is a logic interface.

In this embodiment, the laser beam based on the CAD data emitted from the laser light source 1 is reflected by the folding mirror 2 and is focused by the imaging lens 3 via the X-axis scanning unit 4 and the Y-axis scanning unit 6 on the target surface 8. The target surface 8 is two-dimensionally scanned in the X-axis direction and the Y-axis direction, and a trajectory is drawn on the target surface 8 to form a three-dimensional model.

Next, an X-axis scanning section (first rotating section) 4 and a Y-axis scanning section (second rotating section) according to the present embodiment.
The optical function of No. 6 will be described. Since the basic optical functions of the X-axis scanning unit and the X-axis scanning unit are the same,
Here, the Y-axis scanning unit will be described as an example.

FIG. 2 is a schematic view of a main part of an optical system around the Y-axis scanning section.

In the figure, the Y-axis scanning unit reflects the laser light emitted from the laser light source 1 on the scan mirror 11, reflects the reflected light on the reflective mirror 12, and reflects the reflected light on the scan mirror 11 again. The target surface 8 is irradiated.

At this time, in this embodiment, the scan mirror 1
By rotating 1 by θ degrees, the direction of the reflected light beam is changed by 4θ. This means that the target surface 8 is scanned at twice the scanning angle as compared with the conventional optical shaping apparatus shown in FIG.

Here, it is assumed that the laser light emitted from the laser light source 1 is incident on the scan mirror 11 at an incident angle of 45 degrees.

As shown in FIG. 2, laser light is emitted from the laser light source 1 in the direction of the Y axis of the coordinate system, and is incident on the scan mirror 11 at an incident angle of 45 degrees. Here the scan mirror 11
As a result, the laser light A is reflected in the X-axis direction. The laser light A reflected in the X-axis direction is reflected by the reflection mirror 12 in the Y-axis direction. The laser beam A reflected in the Y-axis direction is again reflected in the X-axis direction by the scan mirror 11, and
The target surface 8 is scanned.

Next, consider the case where the laser beam emitted from the laser light source 1 is incident on the scan mirror 11 at an incident angle (45 + θ) (the scan mirror 11 rotates θ ° from the original position).

As shown in FIG. 2, laser light is emitted from the laser light source 1 in the Y-axis direction of the coordinate system, and the incident angle (45 + θ)
Incident on the scan mirror 11 in degrees. Here, the laser beam B is reflected by the scan mirror 11 in a direction shifted by 2θ from the X-axis direction at a reflection angle (45 + θ) degrees. The reflected light B is incident on the reflection mirror 12 at an incident angle (45 + 2θ) degrees, and is reflected at a reflection angle (45 + 2θ) degrees in a direction shifted by 2θ from the Y-axis direction. Further, the reflected light B again enters the scan mirror 11 at an incident angle (45 + 3θ) degrees, is reflected at a reflection angle (45 + 3θ) degrees in a direction shifted by 4θ from the X-axis direction, and scans the target surface 8. Note that (45-
θ), (45−2θ), and (45−3θ) indicate values obtained by subtracting the incident angle from 90 °.

As described above, in this embodiment, the direction of the reflected light beam can be changed by 4θ by rotating the scan mirror 11 by θ degrees as described above. Thus, even if the same motor is used, the scanning angle of the reflected light beam per unit time can be increased without increasing the amount of heat generated by the motor, and the X-axis scanning unit 4 and the Y-axis scanning unit 6
Can be shortened.

The reflection mirror 12 is connected to the scan mirror 11
In synchronization with the scanning mirror 11. According to this, the direction of the reflected light beam can be further largely changed.

FIG. 3 is a schematic view of a main part of an optical system around a Y-axis scanning unit according to a second embodiment when the present invention is used in an optical shaping apparatus. In the figure, the same elements as those shown in FIG. 2 are denoted by the same reference numerals.

The present embodiment is different from the first embodiment in that the first rotating section (X-axis scanning section) and the second rotating section (Y-axis scanning section) are each oscillated about an arbitrary position. A (turning) first reflecting member (scanning mirror) and a plurality of fixed second reflecting members (reflecting mirrors);
In addition, a reflecting mirror is also provided on the back surface of the first reflecting member. Other configurations and optical functions are substantially the same as those of the first embodiment, and thus the same effects are obtained.

In this embodiment, the basic optical functions of the X-axis scanning section (first rotating section) and the Y-axis scanning section (second rotating section) are the same as in the first embodiment. Therefore, the optical operation of the Y-axis scanning unit will be described here.

That is, in the figure, reference numeral 21 denotes a scan mirror as a first reflecting member.
Are provided with reflection mirrors on the front side and the back side, respectively. Reference numerals 22a, 22b, and 22c denote first, second, and third fixed reflecting mirrors as second reflecting members, respectively, and the reflecting mirrors 22a, 22b, and 22c are orthogonal to each other.

The Y-axis scanning unit in FIG. 3 is a laser beam (light beam) based on CAD data emitted from the laser light source 1.
Is reflected by the reflection mirror on the front surface side of the scan mirror 21, and the reflected light is reflected by the first, second, and third reflection mirrors 22.
The light is sequentially reflected at a, 22b, and 22c, and the reflected light is reflected by the reflection mirror on the back surface side of the scan mirror 11, and is irradiated on the target surface 8.

At this time, in this embodiment, the scan mirror 2
By rotating 1 by θ degrees, the direction of the reflected light beam is changed by 4θ. This means that the target surface is scanned at twice the scanning angle as compared with the conventional optical shaping apparatus shown in FIG.

Here, it is assumed that the laser light emitted from the laser light source 1 is incident on the scan mirror 21 at an incident angle of 45 degrees.

Laser light is emitted from the laser light source 1 in the direction of the Y-axis of the coordinate system as shown in FIG. Here the scan mirror 21
As a result, the laser light A is reflected in the X-axis direction. The laser beam A reflected in the X-axis direction is finally reflected in the -Y-axis direction by passing through the first, second, and third reflection mirrors 22a, 22b, and 22c. The laser light A reflected in the −Y-axis direction is reflected in the −X-axis direction by the reflection mirror on the back surface side of the scan mirror 21, and scans the target surface.

Next, consider a case where the laser light emitted from the laser light source 1 is incident on the scan mirror 21 at an incident angle (45 + θ) degrees (the scan mirror 21 rotates θ ° from the original position).

Laser light is emitted from the laser light source 1 in the direction of the Y axis of the coordinate system as shown in FIG.
Incident on the surface of the scan mirror 21 in degrees. Here, the laser beam B is reflected by the scan mirror 21 at a reflection angle (45+
θ) degrees and is reflected in a direction shifted by 2θ from the X-axis direction. This reflected light B is reflected by the first, second, and third reflection mirrors 22a, 22a.
2b and 22c are respectively incident at an incident angle (45 + 2θ) degrees,
The first, second, and third reflection mirrors 22a, 22b, 22
The light is reflected three times at c, and finally reflected in a direction shifted by 2θ from the −Y-axis direction at a reflection angle (45 + 2θ) degrees. Further, the reflected light B is incident on the back surface of the scan mirror 21 at an incident angle (4
(5 + 3θ) degrees and -X at a reflection angle (45 + 3θ) degrees
Reflected in a direction shifted by 4θ from the axial direction, the target surface 8
Is scanned. In the drawing, (45-θ), (45-2)
θ) and (45−3θ) indicate values obtained by subtracting the incident angle from 90 °.

As described above, in the present embodiment, the direction of the reflected light beam can be changed by 4θ by rotating the scan mirror 21 by θ degrees as described above. Thus, even if the same motor is used, the scanning angle of the reflected light beam per unit time can be increased without increasing the amount of heat generated by the motor, and the X-axis scanning unit 4 and the Y-axis scanning unit 6
Can be shortened.

In the first and second embodiments, the number of the second reflecting members (reflecting mirrors) is increased so that the laser light from the laser light source is reflected by the first reflecting members (scan mirrors). If it is configured to increase the number of times, the rotation angle of the motor can be further reduced, so that even if the same motor is used, scanning of the reflected light beam per unit time without further increasing the amount of heat generated by the motor. The corner can be large.

In each of the above embodiments, the case where the present invention is applied to the optical shaping apparatus is shown. However, the present invention is applied to the laser marker and the laser processing machine shown in FIG. can do.

[0051]

According to the present invention, the first rotating unit (X-axis scanning unit) and the second rotating unit (Y
The axis scanning unit) includes a first reflecting member that can rotate (vibrate), and at least one fixed second reflecting member, so that a reflected light beam of a laser beam ( (Optical axis) can be largely swung, so that even if the same motor is used, the scanning angle of the reflected light beam per unit time can be increased without increasing the amount of heat generated by the motor. Optical system capable of reducing the scanning time of the scanning unit and the Y-axis scanning unit, and an optical shaping apparatus, a laser marker, and a laser processing machine using the same.

[Brief description of the drawings]

FIG. 1 is a perspective view of a main part of a first embodiment when the present invention is applied to an optical shaping apparatus.

FIG. 2 is a schematic diagram of a main part of an optical system of a main part according to the first embodiment of the present invention.

FIG. 3 is a schematic diagram of a main part of an optical system of a main part according to a second embodiment of the present invention.

FIG. 4 is a perspective view of a main part when the present invention is applied to a laser marker.

FIG. 5 is a perspective view of a main part of a conventional stereolithography apparatus.

FIG. 6 is a schematic diagram of a main part of an optical system of a main part shown in FIG. 5;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Laser light source 2 Folding mirror 3 Imaging lens (focal lens) 4 First rotating part (X-axis scanning part) 5 X-axis servo amplifier 6 Second rotating part (Y-axis scanning part) 7 Y-axis servo amplifier 8 Scanned surface (target surface) 9 Laser power supply 10 Logic interface 11, 21 First reflection member (scan mirror) 12 Second reflection member (reflection mirror) 22a, 22b, 22c Second reflection member (reflection mirror)

Claims (6)

[Claims] 1. A laser light emitted from a light source means is deflected by an image forming means through a deflecting means capable of two-dimensionally deflecting in two directions orthogonal to each other, and then imaged on a surface to be scanned. In a scanning optical system that scans a scanning surface two-dimensionally, the deflecting unit includes a first rotating unit that deflects a laser beam in a first direction, and a first rotating unit that is deflected by the first rotating unit. A second rotating portion that deflects in a second direction perpendicular to the direction of the first and second rotating portions. The first rotating portion and the second rotating portion each oscillate about an arbitrary position. And a fixed second reflecting member, wherein each of the rotating portions reflects incident laser light on the first reflecting member, and reflects the reflected laser light on the second reflecting member. A scanning optical system, wherein the laser light is reflected by a member, and the reflected laser light is reflected again by the first reflecting member. 2. A laser light emitted from a light source means is deflected by an image forming means through a deflecting means capable of two-dimensionally deflecting in two directions orthogonal to each other, and then imaged on a surface to be scanned. In a scanning optical system that scans a scanning surface two-dimensionally, the deflecting unit includes a first rotating unit that deflects a laser beam in a first direction, and a first rotating unit that is deflected by the first rotating unit. A second rotating portion that deflects in a second direction perpendicular to the direction of the first and second rotating portions. The first rotating portion and the second rotating portion each oscillate about an arbitrary position. And a plurality of fixed second reflecting members, wherein each of the rotating portions reflects incident laser light on the first reflecting member, and reflects the reflected laser light on the plurality of second reflecting members. The scanning is characterized in that the laser light is sequentially reflected by a second reflection member, and the reflected laser light is reflected again by the first reflection member. Optical system. 3. The laser light emitted from the light source means is deflected by a deflecting means capable of two-dimensionally deflecting in two directions orthogonal to each other by an imaging means, and then imaged on a surface to be scanned. In a scanning optical system that scans a scanning surface two-dimensionally, the deflecting unit includes a first rotating unit that deflects a laser beam in a first direction, and a first rotating unit that is deflected by the first rotating unit. A second rotating portion that deflects in a second direction perpendicular to the direction of the first and second rotating portions. The first rotating portion and the second rotating portion each oscillate about an arbitrary position. A reflecting member and a plurality of fixed second reflecting members, each of the rotating portions reflecting incident laser light on the surface of the first reflecting member, and transmitting the reflected laser light to the first reflecting member. The laser beam is sequentially reflected by a plurality of second reflecting members, and the reflected laser light is reflected by the back surface of the first reflecting member. Scanning optics. 4. An optical shaping apparatus using the scanning optical system according to claim 1 in an optical shaping apparatus. 5. A laser marker using the scanning optical system according to claim 1 as a laser marker. 6. A laser beam machine wherein the scanning optical system according to claim 1 is used for a laser beam machine.