JP2020073966A - Optical device and processor - Google Patents

Abstract

To provide an optical device capable of facilitating adjustment of optical path.SOLUTION: The optical device includes: a rotatable reflection member; an optical system for guiding a beam of light which is reflected on a reflection plane of the reflection member to re-enter the reflection member after being sequentially reflected on reflection planes even times; and an adjustment section that changes rotation angle of the reflection member to adjust the optical path of the light beam re-entering the reflection member after being reflected on the reflection plane of the reflection member.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an optical device and a processing device.

  A beam parallel shift mechanism in a conventional laser processing apparatus is disclosed in Patent Documents 1 and 2, for example. In patent document 1, a transparent member is rotated and a light beam is parallel-shifted. In Patent Document 2, two synchronized angle variable mirrors are used to parallel shift the light rays.

Japanese Patent No. 4386137 (paragraph 0023, FIG. 2) JP, 2011-121119, A (paragraph 0008, Drawing 8).

However, in the light beam shift mechanism of Patent Document 1, since the parallel shift amount of the light beam is determined by the rotation angle and length of the transparent member, inertia during rotation becomes large, and it is difficult to perform the desired light beam shift at high speed. Is. As an example, consider the case of performing the light beam parallel shift amount of 5.3 mm with the rotation angle of ± 10 degrees of the transparent member (quartz glass n = 1.45) in the method of Patent Document 1. In this case, the realistic design size of the transparent member is about 95 mm × 16 mm × 13 mm. As a result, the inertia becomes large at about 33000 g · mm ^2, and it is difficult to perform parallel shift at high speed.

  Further, the technique of Patent Document 2 solves the problem that the inertia of the rotating body becomes large, but it is difficult to accurately synchronize the two mirror rotating mechanisms during high-speed operation, and therefore the angle of the emitted light beam is It is not constant and it is difficult to shift light rays in parallel.

  It is an exemplary object of the present invention to provide a device that is advantageous for speeding up the adjustment of the optical path.

  According to one aspect of the present invention, a rotatable reflecting member, an optical system that sequentially reflects the light reflected by the reflecting surface of the reflecting member at the reflecting surface at an even number of times to re-enter the reflecting member, There is provided an optical device including: an adjusting unit that adjusts an optical path of light that is reflected by the reflection surface of the reflection member by the re-incidence and is emitted by changing the rotation angle of the reflection member.

  According to the present invention, an apparatus that is advantageous for speeding up the adjustment of the optical path is provided.

FIG. 3 is a diagram showing a configuration of an optical device according to the first embodiment. The graph which shows the relationship between the rotation angle of a mirror member in 1st Embodiment, and a light beam shift amount. The graph which shows the influence to the light ray shift amount of the thickness of the mirror member in 1st Embodiment. The figure which shows the structure of the optical device which concerns on 2nd Embodiment. The figure which shows the structure of the optical device which concerns on 3rd Embodiment. The figure which shows the structure of the optical device which concerns on 4th Embodiment. The figure which shows the structure of the processing apparatus which concerns on 5th Embodiment. FIG. 6 is a diagram illustrating an example of a mirror member angle varying mechanism in the embodiment.

  Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the drawings. It should be noted that the present invention is not limited to the following embodiments, but merely shows specific examples advantageous for carrying out the present invention. In addition, not all combinations of features described in the following embodiments are essential for solving the problems of the present invention.

<First Embodiment>
FIG. 1 is a diagram showing the configuration of the optical device according to the first embodiment. The optical device according to the present embodiment can control the optical path of emitted light, and can perform parallel shift of light rays, for example. The light beam parallel shift mechanism (more generally, a mechanism for adjusting an optical path, typically a translation or a translational movement of the optical path) is a mirror member 2 (reflector) that reflects a light beam 51 from a light source 50. (Also referred to as a member). In the following description, the case where each reflecting surface can be regarded as a flat surface and the optical path is translated or translated is illustrated. The mirror member 2 is made of, for example, glass and has a first reflecting surface 2a that receives a light ray 51 from the light source 50 and a second reflecting surface 2b on the opposite side. Each of the first reflecting surface 2a and the second reflecting surface 2b may be coated with a high reflecting mirror. The mirror member 2 may be formed in a prism shape, or the first reflecting surface 2a and the second reflecting surface 2b may be independent of each other. Here, the configuration in which the first reflecting surface and the second reflecting surface are opposite to each other, different surfaces on the prism, or independent surfaces are the same (flat) surface. Compared to a certain case, it is advantageous in reducing the influence of heat from incident light.

  Further, the mirror member 2 is configured to be variable in angle so as to control the optical path of the light emitted from the optical device. FIG. 8 shows an example of the angle changing mechanism of the mirror member 2. As shown in the figure, the mirror member 2 is pivotally supported by the output shaft 1 a of the galvano motor 1. The control unit 60 (adjustment unit) outputs a drive signal to the galvano motor 1, and a rotation drive unit (not shown) in the galvano motor 1 mirrors the output shaft 1a with a drive amount corresponding to the input drive signal. The member 2 is rotated. In this way, the mirror member 2 is configured to be rotatable. Here, the mirror member 2 is tilted at about 45 degrees with respect to the light beam 51 from the light source 50.

  The light beam parallel shift mechanism of the present embodiment has an optical system 80 that sequentially reflects the light incident on the mirror member 2 and reflected by the mirror member 2 on a plurality of reflecting surfaces at an even number of times to re-enter the mirror member 2. .. The optical system 80 in the present embodiment includes, for example, four mirrors 3, 4, 5, 6 fixedly arranged so as to be symmetrical with respect to the light ray 51. The light reflected by the first reflecting surface 2a of the mirror member 2 is sequentially reflected by these mirrors 3, 4, 5, 6 and guided to the second reflecting surface 2b of the mirror member 2. The light finally reflected by the second reflecting surface 2b is emitted in substantially the same direction as the light ray 51.

  The angle of the emitted light does not change even if the rotation angle of the mirror member 2 is changed. Therefore, by adjusting the rotation angle of the mirror member 2 by the control unit 60, the optical path of the light reflected by the reflecting surface of the mirror member 2 and emitted can be adjusted.

  Next, the relationship between the parallel light beam shift amount and the angle change of the mirror member 2 will be described. First, consider a case where the thickness of the mirror member 2 is assumed to be zero. FIG. 2 shows the relationship between the angle change and the light beam shift amount of the mirror member 2 when the outer peripheral distance L of the quadrangle formed by the four mirrors 3, 4, 5, 6 is set to 300 mm and 400 mm. ..

  This ray parallel shift amount ΔS is expressed by the following equation.

ΔS = L × tan (2 × Δθg) (Equation 1)
However, Δθg represents the angle change amount of the mirror member 2.

  Formula 1 shows that the longer L is, the larger the beam parallel shift amount can be realized with a smaller angle change of the mirror member 2, and the longer L enables a faster variable beam shift.

  Next, consider a case where the actual thickness of the mirror member 2 is taken into consideration. FIG. 3 shows the difference in the light beam parallel shift amount when the thickness of the mirror member 2 is assumed to be 0 and when the actual thickness is taken into consideration. According to FIG. 3, when the thickness of the mirror member 2 is smaller than L, the difference from the shift amount when the mirror thickness is set to 0 is small, and approximately matches Equation 1. The required width W of the reflecting surface of the mirror member 2 is given by the following equation.

W = (D + Smax) / sin (45 + θg) ... (Equation 2)
However, D represents the incident ray width to the shift mechanism, and Smax represents the maximum shift amount.

According to the configuration of the present embodiment, as a result of the design for realizing the light beam parallel shift of 5.3 mm, when the thickness of the mirror member 2 is 2 mm (inertia = 89 g · mm ² ) and L = 300 mm, ± The result is that it can be realized by controlling within 0.5 degree. Therefore, the speed can be significantly increased as compared with the conventional technique.

  As described above, according to the present embodiment, the high-speed beam parallel shift mechanism is configured by using the variable angle mirror member 2 that receives the light from the light source 50 and the four mirrors 3, 4, 5, and 6. Can be realized.

<Second Embodiment>
FIG. 4 is a diagram showing the configuration of the optical device according to the second embodiment. As shown in FIG. 4, the mirror member 7 that reflects the light ray 51 from the light source 50 may have the same configuration as the mirror member 2 in the first embodiment. That is, the mirror member 7 is made of, for example, glass and has a first reflecting surface 7a for receiving the light ray 51 from the light source 50 and a second reflecting surface 7b on the opposite side. Each of the first reflective surface 7a and the second reflective surface 7b may be coated with a highly reflective mirror. The mirror member 7 may be formed in a prism shape, or the first reflection surface 7a and the second reflection surface 7b may be independent of each other. Further, the mirror member 7 is configured so that the angle can be changed similarly to the mirror member 2 of the first embodiment. Here, the mirror member 7 is tilted at about 45 degrees with respect to the light ray 51 from the light source 50.

  As shown in FIG. 4, the optical system 90 in this embodiment includes two mirrors 8 and 9 fixedly arranged so that the optical path draws a triangle. The light reflected by the first reflecting surface 7a of the mirror member 7 is sequentially reflected by these mirrors 8 and 9 and guided to the second reflecting surface 7b of the mirror member 7. The light finally reflected by the second reflecting surface 7b is emitted laterally, for example, in a direction orthogonal to the light ray 51. In this configuration, by rotating the mirror member 7 by Δθg with a galvano motor, it is possible to realize the parallel shift of the light rays according to Expression 1.

  As described above, according to the present embodiment, it is possible to realize a high-speed beam parallel shift mechanism with the configuration using the angle-adjustable mirror member 7 that receives light from the light source 50 and the two mirrors 8 and 9. You can

<Third Embodiment>
FIG. 5 is a diagram showing the configuration of the optical device according to the third embodiment. The mirror member 10 that reflects the light ray 51 from the light source 50 is configured to have a variable angle, like the mirror member 2 of the first embodiment. Here, the mirror member 10 is inclined at about 45 degrees with respect to the light ray 51 from the light source 50.

  As shown in FIG. 5, the optical system 100 in this embodiment includes two mirrors 11 and 12 fixedly arranged below the mirror member 10. The light reflected by the first reflection area 10b on the first surface 10a of the mirror member 10, which is the surface on the light source 50 side, is sequentially reflected by these mirrors 11 and 12, and the first light of the mirror member 10 is removed. It is guided to the second reflection area 10c on the surface 10a. The light reflected by the second reflection region 10c is emitted in a direction inverted by 180 degrees with respect to the light ray 51, for example. In this configuration, by rotating the mirror member 10 by Δθg with a galvano motor, it is possible to realize parallel shift of the light rays according to Expression 1.

  As described above, according to the present embodiment, it is possible to realize a high-speed light beam parallel shift mechanism with a configuration that uses the variable angle mirror member 10 that receives light from the light source 50 and the two mirrors 11 and 12. You can

<Fourth Embodiment>
FIG. 6 is a diagram showing the configuration of the optical device according to the fourth embodiment. This configuration is a combination of the configurations shown in the first embodiment (FIG. 1), and includes a first optical device 61 that receives a light beam 51 from a light source 50 and a light emitted from the first optical device 61. A second optical device 62 for receiving.

  The first optical device 61 has a variable angle mirror member 13 that reflects a light ray 51 from the light source 50. This corresponds to the mirror member 2 of the first embodiment. Further, the first optical device 61 has mirrors 14-1, 14-2, 14-3, 14-4 corresponding to the mirrors 3, 4, 5, 6 of the first embodiment, respectively.

  The second optical device 62 has a variable angle mirror member 15 that reflects the light ray 51 from the light source 50. This corresponds to the mirror member 2 of the first embodiment. Further, the second optical device 62 has mirrors 16-1, 16-2, 16-3, 16-4 corresponding to the mirrors 3, 4, 5, 6 of the first embodiment, respectively.

  The rotation axis of the mirror member 13 of the first optical device 61 and the rotation axis of the mirror member 15 of the second optical device 62 are non-parallel to each other and are arranged, for example, orthogonally.

  In the first optical device 61, the incident light reflected by the first reflecting surface of the mirror member 13 is sequentially reflected by these mirrors 14-1, 14-2, 14-3, 14-4, and the mirror member The light is guided to the second reflecting surface of 13 opposite to the first reflecting surface. The light reflected by the second reflecting surface enters the mirror member 15 of the second optical device 62. In the second optical device 62, the incident light reflected by the first reflecting surface of the mirror member 15 is sequentially reflected by the mirrors 16-1, 16-2, 16-3, 16-4, and the incident light of the mirror member 15 is changed. It is guided to the second reflecting surface opposite to the first reflecting surface. The light finally reflected by the second reflecting surface of the mirror member 15 is emitted in substantially the same direction as the light ray 51.

  Further, as shown in FIG. 6, a plane formed by an optical path involving reflection by each mirror of the first optical device 61 and a plane formed by an optical path involving reflection by each mirror of the second optical device 62 intersect. Such an arrangement may be adopted. In this way, by arranging the parallel shift mechanisms of the light beams so as to intersect with each other, the optical device can be downsized.

  In the above example, an example in which the light beam parallel shift mechanisms of the first embodiment (FIG. 1) are arranged so that their shift directions are orthogonal to each other has been shown. However, even if two ray parallel shift mechanisms selected from any of the first to third embodiments are combined, the ray parallel shift can be freely performed in the two-dimensional plane in the same manner.

  According to various embodiments described above, the optical device includes a rotatable mirror member and an optical system that receives light reflected by the mirror member and emits the light in a predetermined direction. The optical system sequentially reflects the light evenly on the reflection surface and re-enters the mirror member. The re-incident light is reflected by the mirror member to be emitted in a predetermined direction. According to a study made by the present inventor, the present invention does not hold true in a configuration in which this optical system reflects an odd number of times rather than an even number of times.

<Fifth Embodiment>
Hereinafter, an example of a processing device including an optical element that guides light emitted from the optical device shown in the fourth embodiment to an object will be described. FIG. 7 is a diagram of the configuration of the laser processing apparatus according to the fifth embodiment. The laser processing apparatus according to the present embodiment includes the beam parallel shift mechanism 17 shown in the fourth embodiment after the laser light source 71. The beam expanding systems 18 and 19 are arranged in the subsequent stage, whereby the beam shifting amount and the beam system are expanded to a necessary amount. Further, a condenser lens 22 is arranged in the latter stage of the beam expanding system, and a laser beam is condensed and irradiated onto the object 23 arranged on the focal plane. Further, the angles of the mirrors 20 and 21 provided between the light beam expanding system 19 and the condenser lens 22 can be adjusted so as to guide the light beam to a target position on the object 23.

  In this configuration, by parallel-shifting the light rays by the light-ray parallel shift mechanism 17, the angle of the laser light beam with which the object 23 is irradiated can be freely changed. As a result, it is possible to perform tapered hole processing and cutting having an oblique cross section.

<Embodiment of Manufacturing Method of Article>
The processing device according to the embodiment described above can be used in a method for manufacturing an article. The manufacturing method of the article may include a step of processing an object (object) using the processing device, and a step of processing the object processed in the step. The processing may include, for example, at least one of processing, transportation, inspection, sorting, assembly (assembly), and packaging different from the processing. The article manufacturing method of the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article as compared with the conventional method.

1: Galvano motor, 2: Mirror member, 2a: First reflecting surface, 2b: Second reflecting surface, 3, 4, 5, 6: Mirror, 80: Optical system

Claims (21)

A rotatable reflecting member,
An optical system in which the light reflected by the reflecting surface of the reflecting member is reflected at an even number of times on the reflecting surface and sequentially re-enters the reflecting member,
An adjusting unit that adjusts the optical path of the light reflected and reflected by the reflection surface of the reflection member by the re-incident by changing the rotation angle of the reflection member,
An optical device comprising:   The optical device according to claim 1, wherein the reflecting surface of the reflecting member and the reflecting surface of the optical system are flat surfaces, and the adjusting unit translates the optical path.   In the even-numbered reflection, the light reflected by the first reflecting surface of the reflecting member is sequentially reflected by the four reflecting surfaces and is incident on the second reflecting surface of the reflecting member opposite to the first reflecting surface. The optical device according to claim 1, wherein   In the even-numbered reflection, the light reflected by the first reflecting surface of the reflecting member is sequentially reflected by the two reflecting surfaces and is incident on the second reflecting surface of the reflecting member opposite to the first reflecting surface. The optical device according to claim 1, wherein   In the even-numbered reflection, the light reflected by the first area on the reflection surface of the reflection member is sequentially reflected by the two reflection surfaces and is incident on the second area on the reflection surface of the reflection member. The optical device according to claim 1. A first optical device as the optical device according to any one of claims 1 to 5,
A second optical device as the optical device according to any one of claims 1 to 5, wherein the light emitted from the first optical device is arranged to enter the reflecting member. A second optical device,
An optical device comprising:   The optical device according to claim 6, wherein a rotation axis of the reflection member of the first optical device and a rotation axis of the reflection member of the second optical device are not parallel to each other.   The first optical device and the first optical device are arranged so that a plane formed by the optical paths involving the even number of reflections in the first optical device and a plane formed by the optical paths involving the even number of reflections in the second optical device intersect. Optical device according to claim 6 or 7, characterized in that two optical devices are arranged.   A processing apparatus comprising the optical device according to any one of claims 1 to 8.   The processing apparatus according to claim 9, further comprising an optical element that guides light emitted from the optical device to an object. A rotatable reflecting member including a first reflecting surface and a second reflecting surface;
An optical system in which the light reflected by the first reflecting surface is sequentially reflected by a plurality of reflecting surfaces and is incident on the second reflecting surface;
An adjusting unit that adjusts the optical path of the light reflected and emitted by the second reflecting surface by changing the rotation angle of the reflecting member;
An optical device comprising:   The optical device according to claim 11, wherein the first reflective surface and the second reflective surface are opposite to each other.   The optical device according to claim 11, wherein the first and second reflecting surfaces of the reflecting member and the plurality of reflecting surfaces of the optical system are flat surfaces, and the adjusting unit translates the optical path. apparatus.   The optical device according to claim 11, wherein the plurality of reflecting surfaces are four reflecting surfaces.   The optical device according to claim 11, wherein the plurality of reflecting surfaces are two reflecting surfaces. A rotatable second reflecting member on which the light reflected and emitted by the second reflecting surface is incident;
A second optical system that sequentially reflects the light reflected by the reflecting surface of the second reflecting member by a plurality of reflecting surfaces and makes the light incident on the reflecting surface of the second reflecting member;
A second adjusting unit that adjusts an optical path of light emitted from the second reflecting member by changing a rotation angle of the second reflecting member;
The optical device according to claim 11, comprising:   The optical device according to claim 16, wherein a rotation axis of the reflection member including the first and second reflection surfaces and a rotation axis of the second reflection member are not parallel to each other.   A plane formed by an optical path in the optical system in which the light reflected by the first reflecting surface is sequentially reflected by the plurality of reflecting surfaces and is incident on the second reflecting surface, and a plane formed by an optical path in the second optical system. The optical device according to claim 16, wherein and intersect.   The optical device according to claim 11, wherein the optical system sequentially reflects the light reflected by the first reflecting surface an even number of times and reflects the light by the second reflecting surface. A processing device including an optical device,
The optical device is
A rotatable reflecting member including a first reflecting surface and a second reflecting surface;
An optical system in which the light reflected by the first reflecting surface is sequentially reflected by a plurality of reflecting surfaces and is incident on the second reflecting surface;
An adjusting unit that adjusts the optical path of the light reflected and emitted by the second reflecting surface by changing the rotation angle of the reflecting member;
A processing device comprising:   The processing apparatus according to claim 20, further comprising an optical element that guides light emitted from the optical device to an object.

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