JP2016103007A - Optical device and processor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical device capable of facilitating adjustment of optical path.SOLUTION: The optical device includes: a rotatable reflection member; an optical system for guiding a beam of light which is reflected on a reflection plane of the reflection member to re-enter the reflection member after being sequentially reflected on reflection planes even times; and an adjustment section that changes rotation angle of the reflection member to adjust the optical path of the light beam re-entering the reflection member after being reflected on the reflection plane of the reflection member.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an optical apparatus and a processing apparatus.

  For example, Patent Documents 1 and 2 disclose a beam parallel shift mechanism in a conventional laser processing apparatus. In Patent Document 1, the transparent member is rotated to shift the light rays in parallel. In Patent Document 2, the light is parallel-shifted using two synchronized angle variable mirrors.

Japanese Patent No. 4386137 (paragraph 0023, FIG. 2) Japanese Patent Laying-Open No. 2011-121119 (paragraph 0008, FIG. 8)

However, in the light beam shift mechanism of Patent Document 1, since the parallel light shift amount is determined by the rotation angle and length of the transparent member, the inertia during rotation becomes large and it is difficult to perform the desired light beam shift at high speed. It is. As an example, consider a case in which the beam parallel shift amount is 5.3 mm with the rotation angle of ± 10 degrees of the transparent member (quartz glass n = 1.45) in the method of Patent Document 1. In this case, the actual size of the transparent member is about 95 mm × 16 mm × 13 mm. As a result, the inertia becomes as large as about 33000 g · mm ^2, and it is difficult to perform parallel shift at high speed.

  The technique of Patent Document 2 solves the problem of increasing the inertia of the rotating body, but it is difficult to accurately synchronize the two mirror rotating mechanisms during high-speed operation. It is not constant and it is difficult to shift the rays in parallel.

  An object of the present invention is to provide an apparatus advantageous for speeding up the adjustment of an optical path.

  According to one aspect of the present invention, a rotatable reflecting member, an optical system that sequentially reflects light reflected by the reflecting surface of the reflecting member an even number of times on the reflecting surface and re-enters the reflecting member, and There is provided an optical device comprising: an adjustment unit that adjusts an optical path of light that is reflected by the reflection surface of the reflection member and re-emitted by changing the rotation angle of the reflection member.

  According to the present invention, an apparatus advantageous in speeding up the adjustment of the optical path is provided.

The figure which shows the structure of the optical apparatus which concerns on 1st Embodiment. The graph which shows the relationship between the rotation angle of the mirror member in 1st Embodiment, and the amount of light beam shifts. The graph which shows the influence on the light beam shift amount of the thickness of the mirror member in 1st Embodiment. The figure which shows the structure of the optical apparatus which concerns on 2nd Embodiment. The figure which shows the structure of the optical apparatus which concerns on 3rd Embodiment. The figure which shows the structure of the optical apparatus which concerns on 4th Embodiment. The figure which shows the structure of the processing apparatus which concerns on 5th Embodiment. The figure explaining the example of the angle variable mechanism of the mirror member in embodiment.

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited to the following embodiment, It shows only the specific example advantageous for implementation of this invention. Moreover, not all combinations of features described in the following embodiments are indispensable for solving the problems of the present invention.

<First Embodiment>
FIG. 1 is a diagram illustrating a configuration of an optical device according to the first embodiment. The optical device according to the present embodiment can control the optical path of the emitted light, and can, for example, shift the light rays in parallel. The beam parallel shift mechanism (more generally, a mechanism that adjusts the optical path, typically translation or translation of the optical path) of the present embodiment is a mirror member 2 that reflects the light beam 51 from the light source 50 (reflection). Also referred to as a member). In the following description, the case where each reflecting surface can be regarded as a flat surface and the optical path is translated or translated is illustrated. The mirror member 2 is made of glass, for example, and includes a first reflecting surface 2a that receives the light beam 51 from the light source 50 and a second reflecting surface 2b on the opposite side. Each of the first reflection surface 2a and the second reflection surface 2b may be coated with a high reflection mirror. The mirror member 2 may be configured in a prism shape, or the first reflecting surface 2a and the second reflecting surface 2b may be independent from each other. Here, the configuration in which the first reflecting surface and the second reflecting surface face each other, are separate surfaces on the prism, or are independent surfaces is the same (flat) surface. Compared to a certain case, it is advantageous in reducing the influence of heat received from incident light.

  The mirror member 2 is configured to be variable in angle so as to control the optical path of the light emitted from the optical device. In FIG. 8, the example of the angle variable mechanism of the mirror member 2 is shown. As shown in the figure, the mirror member 2 is pivotally supported on the output shaft 1 a of the galvano motor 1. The control unit 60 (adjustment unit) outputs a drive signal to the galvano motor 1, and a rotation drive unit (not shown) in the galvano motor 1 is mirrored via the output shaft 1a with a drive amount corresponding to the input drive signal. The member 2 is rotated. In this way, the mirror member 2 is configured to be rotatable. Here, the mirror member 2 is inclined at approximately 45 degrees with respect to the light beam 51 from the light source 50.

  The beam parallel shift mechanism of the present embodiment includes an optical system 80 that sequentially reflects light incident on the mirror member 2 and reflected by the mirror member 2 evenly on a plurality of reflecting surfaces and re-enters the mirror member 2. . The optical system 80 in this embodiment includes, for example, four mirrors 3, 4, 5, and 6 that are fixedly arranged so as to be symmetric with respect to the light beam 51. The light reflected by the first reflecting surface 2 a of the mirror member 2 is sequentially reflected by these mirrors 3, 4, 5, 6 and guided to the second reflecting surface 2 b of the mirror member 2. The light finally reflected by the second reflecting surface 2 b is emitted in the same direction as the light beam 51.

  The angle of the emitted light does not change even if the rotation angle of the mirror member 2 is changed. Therefore, by adjusting the rotation angle of the mirror member 2 by the control unit 60, it is possible to adjust the optical path of the light reflected and emitted from the reflecting surface of the mirror member 2.

  Next, the relationship between the parallel light beam shift amount and the angle change of the mirror member 2 will be described. First, consider the case where the thickness of the mirror member 2 is assumed to be zero. FIG. 2 shows the relationship between the change in the angle of the mirror member 2 and the amount of light shift when the outer peripheral distance L of the quadrangle formed by the four mirrors 3, 4, 5, 6 is 300 mm and 400 mm. .

  This ray parallel shift amount ΔS is expressed by the following equation.

ΔS = L × tan (2 × Δθg) (Formula 1)
However, Δθg represents the angle change amount of the mirror member 2.

  Equation 1 shows that as L is lengthened, a larger amount of light parallel shift can be realized with a smaller angle change of the mirror member 2, and by increasing L, high speed variable light beam shift is possible.

  Next, consider the case where the actual thickness of the mirror member 2 is taken into consideration. FIG. 3 shows the difference in the amount of light parallel shift between the case where the thickness of the mirror member 2 is assumed to be 0 and the case where the actual thickness is considered. According to FIG. 3, when the thickness of the mirror member 2 is small with respect to L, the difference from the shift amount when the mirror thickness is set to 0 is very small, and approximately matches Equation 1. The required width W of the reflecting surface of the mirror member 2 is expressed by the following equation.

W = (D + Smax) / sin (45 + θg) (Equation 2)
However, D represents the incident light width to the shift mechanism, and Smax represents the maximum shift amount.

According to the configuration of the present embodiment, when the thickness of the mirror member 2 is 2 mm (inertia = 89 g · mm ² ) and L = 300 mm as a result of the design for realizing the beam parallel shift of 5.3 mm, ± The result that it was realizable by control within 0.5 degree was obtained. Therefore, the speed can be greatly increased compared to the conventional technique.

  As described above, according to the present embodiment, a high-speed beam parallel shift mechanism with the configuration using the variable-angle mirror member 2 that receives the light from the light source 50 and the four mirrors 3, 4, 5, and 6. Can be realized.

Second Embodiment
FIG. 4 is a diagram illustrating a configuration of an optical device according to the second embodiment. As shown in FIG. 4, the mirror member 7 that reflects the light beam 51 from the light source 50 may have the same configuration as the mirror member 2 in the first embodiment. That is, the mirror member 7 is made of, for example, glass, and includes a first reflecting surface 7a that receives the light beam 51 from the light source 50 and a second reflecting surface 7b on the opposite side. Each of the first reflection surface 7a and the second reflection surface 7b may be coated with a high reflection mirror. The mirror member 7 may be configured in a prism shape, or the first reflecting surface 7a and the second reflecting surface 7b may be independent from each other. Further, the mirror member 7 is configured to be variable in angle as in the mirror member 2 of the first embodiment. Here, the mirror member 7 is inclined at approximately 45 degrees with respect to the light beam 51 from the light source 50.

  As shown in FIG. 4, the optical system 90 in the present embodiment includes two mirrors 8 and 9 that are fixedly arranged so that the optical path draws a triangle. The light reflected by the first reflecting surface 7 a of the mirror member 7 is sequentially reflected by these mirrors 8 and 9 and guided to the second reflecting surface 7 b of the mirror member 7. The light finally reflected by the second reflecting surface 7b is emitted sideways with respect to the light beam 51, for example, in a direction orthogonal thereto. In this configuration, the mirror member 7 can be rotated by Δθg with a galvano motor to realize the parallel shift of the light beam according to Equation 1.

  As described above, according to the present embodiment, a high-speed beam parallel shift mechanism is realized with the configuration using the variable-angle mirror member 7 that receives light from the light source 50 and the two mirrors 8 and 9. Can do.

<Third Embodiment>
FIG. 5 is a diagram illustrating a configuration of an optical device according to the third embodiment. The mirror member 10 that reflects the light beam 51 from the light source 50 is configured to be variable in angle as in the mirror member 2 of the first embodiment. Here, the mirror member 10 is inclined at approximately 45 degrees with respect to the light beam 51 from the light source 50.

  The optical system 100 in the present embodiment includes two mirrors 11 and 12 fixedly disposed below the mirror member 10 as shown in FIG. The light reflected by the first reflection region 10b on the first surface 10a which is the surface on the light source 50 side of the mirror member 10 is sequentially reflected by these mirrors 11 and 12, and the first reflection of the mirror member 10 is performed. It is led to the second reflection region 10c on the surface 10a. The light reflected by the second reflection region 10 c is emitted in a direction inverted by 180 degrees with respect to the light beam 51, for example. In this configuration, the mirror member 10 can be rotated by Δθg with a galvano motor to realize the parallel shift of the light beam according to Equation 1.

  As described above, according to the present embodiment, a high-speed beam parallel shift mechanism is realized by the configuration using the variable angle mirror member 10 that receives light from the light source 50 and the two mirrors 11 and 12. Can do.

<Fourth embodiment>
FIG. 6 is a diagram illustrating a configuration of an optical device according to the fourth embodiment. This configuration is a combination of the configurations shown in the first embodiment (FIG. 1). The first optical device 61 that receives the light beam 51 from the light source 50 and the light emitted from the first optical device 61 are combined. Receiving second optical device 62.

  The first optical device 61 includes a mirror member 13 having a variable angle that reflects the light beam 51 from the light source 50. This corresponds to the mirror member 2 of the first embodiment. The first optical device 61 includes mirrors 14-1, 14-2, 14-3, and 14-4 corresponding to the mirrors 3, 4, 5, and 6 of the first embodiment, respectively.

  The second optical device 62 includes a mirror member 15 having a variable angle that reflects the light beam 51 from the light source 50. This corresponds to the mirror member 2 of the first embodiment. The second optical device 62 includes mirrors 16-1, 16-2, 16-3, and 16-4 corresponding to the mirrors 3, 4, 5, and 6 of the first embodiment, respectively.

  The rotation axis of the mirror member 13 of the first optical device 61 and the rotation axis of the mirror member 15 of the second optical device 62 are non-parallel, for example, arranged so as to be orthogonal.

  In the first optical device 61, the incident light reflected by the first reflecting surface of the mirror member 13 is sequentially reflected by these mirrors 14-1, 14-2, 14-3, 14-4, and the mirror member. 13 is led to the second reflecting surface opposite to the first reflecting surface. The light reflected by the second reflecting surface enters the mirror member 15 of the second optical device 62. In the second optical device 62, incident light reflected by the first reflecting surface of the mirror member 15 is sequentially reflected by the mirrors 16-1, 16-2, 16-3 and 16-4, and The light is guided to the second reflecting surface opposite to the first reflecting surface. The light finally reflected by the second reflecting surface of the mirror member 15 is emitted in substantially the same direction as the light beam 51.

  Also, as shown in FIG. 6, the plane formed by the optical path accompanied by the reflection at each mirror of the first optical device 61 and the plane formed by the optical path accompanied by the reflection at each mirror of the second optical device 62 intersect. Such an arrangement may be adopted. Thus, the optical device can be miniaturized by arranging the parallel shift mechanisms of the light beams so as to intersect each other.

  In the above example, the example in which the beam parallel shift mechanisms of the first embodiment (FIG. 1) are arranged so that the shift directions are orthogonal to each other is shown. However, even if two beam parallel shift mechanisms selected from any one of the first to third embodiments are combined, the beam parallel shift can be freely performed in a two-dimensional plane.

  According to the various embodiments described above, the optical device includes a rotatable mirror member and an optical system that receives light reflected by the mirror member and emits the light in a predetermined direction. The optical system sequentially reflects an even number of times on the reflecting surface and re-enters the mirror member. The re-incident light is reflected by the mirror member, so that the light is emitted in a predetermined direction. According to the study of the present inventor, the present invention does not hold in a configuration in which this optical system reflects light an odd number of times instead of an even number of times.

<Fifth Embodiment>
Hereinafter, an example of a processing apparatus including an optical element that guides light emitted from the optical apparatus shown in the fourth embodiment to an object will be described. FIG. 7 is a diagram of a configuration of a laser processing apparatus according to the fifth embodiment. The laser processing apparatus in the present embodiment includes the beam parallel shift mechanism 17 shown in the fourth embodiment at the subsequent stage of the laser light source 71. In the subsequent stage, the light beam expansion systems 18 and 19 are arranged, thereby expanding the light beam shift amount / light beam system to a necessary amount. Further, a condensing lens 22 is disposed at the subsequent stage of the light beam expanding system, and a laser beam is condensed and applied to the object 23 disposed on the focal plane. Further, the angles of the mirrors 20 and 21 provided between the light beam expanding system 19 and the condenser lens 22 can be adjusted so as to guide the light beam to the target position on the object 23.

  In this configuration, the angle of the laser beam applied to the object 23 can be freely varied by shifting the beam parallel by the beam parallel shift mechanism 17. As a result, taper hole processing and cutting with an oblique cross section can be performed.

<Embodiment related to article manufacturing method>
The processing apparatus according to the embodiment described above can be used in a method for manufacturing an article. The manufacturing method of the article may include a process of processing an object (target object) using the processing apparatus, and a process of processing the object processed in the process. The process may include, for example, at least one of processing different from the processing, conveyance, inspection, selection, assembly (assembly), and packaging. The article manufacturing method of the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article as compared with the conventional method.

1: Galvano motor, 2: Mirror member, 2a: First reflecting surface, 2b: Second reflecting surface, 3, 4, 5, 6: Mirror, 80: Optical system

Claims (21)

A rotatable reflective member;
An optical system that sequentially reflects the light reflected by the reflecting surface of the reflecting member an even number of times on the reflecting surface and re-enters the reflecting member;
An adjustment unit that adjusts an optical path of light that is reflected by the reflection surface of the reflection member by the re-incidence by changing the rotation angle of the reflection member; and
An optical device comprising:   The optical apparatus according to claim 1, wherein the reflection surface of the reflection member and the reflection surface of the optical system are flat surfaces, and the adjustment unit translates the optical path.   In the even-numbered reflection, the light reflected by the first reflecting surface of the reflecting member is sequentially reflected by the four reflecting surfaces and incident on the second reflecting surface on the opposite side of the reflecting member from the first reflecting surface. The optical device according to claim 1, wherein:   In the even number of reflections, the light reflected by the first reflecting surface of the reflecting member is sequentially reflected by two reflecting surfaces and incident on the second reflecting surface opposite to the first reflecting surface of the reflecting member. The optical device according to claim 1, wherein:   In the even-numbered reflection, the light reflected by the first region on the reflecting surface of the reflecting member is sequentially reflected by two reflecting surfaces and is incident on the second region on the reflecting surface of the reflecting member. The optical device according to claim 1. A first optical device as the optical device according to any one of claims 1 to 5,
A second optical device as an optical device according to any one of claims 1 to 5, wherein the light emitted from the first optical device is arranged so as to enter the reflecting member. A second optical device;
An optical device comprising:   The optical apparatus according to claim 6, wherein a rotation axis of the reflection member of the first optical apparatus and a rotation axis of the reflection member of the second optical apparatus are nonparallel.   The first optical device and the first optical device and the second optical device so that a plane formed by the even-numbered reflection optical path in the first optical device intersects with a plane formed by the even-numbered reflection optical path in the second optical device. The optical device according to claim 6, wherein two optical devices are arranged.   A processing apparatus comprising the optical device according to claim 1.   The processing apparatus according to claim 9, further comprising an optical element that guides light emitted from the optical apparatus to an object. A rotatable reflecting member including a first reflecting surface and a second reflecting surface;
An optical system for sequentially reflecting the light reflected by the first reflecting surface by a plurality of reflecting surfaces and causing the light to enter the second reflecting surface;
An adjustment unit that adjusts an optical path of light reflected and emitted from the second reflection surface by changing a rotation angle of the reflection member;
An optical device comprising:   The optical apparatus according to claim 11, wherein the first reflection surface and the second reflection surface are opposite to each other.   The optical system according to claim 11, wherein the first and second reflection surfaces of the reflection member and the plurality of reflection surfaces of the optical system are flat surfaces, and the adjustment unit translates the optical path. apparatus.   The optical device according to claim 11, wherein the plurality of reflecting surfaces are four reflecting surfaces.   The optical device according to claim 11, wherein the plurality of reflecting surfaces are two reflecting surfaces. A rotatable second reflecting member on which the light reflected and emitted from the second reflecting surface is incident;
A second optical system that sequentially reflects the light reflected by the reflecting surface of the second reflecting member by a plurality of reflecting surfaces and enters the reflecting surface of the second reflecting member;
A second adjusting unit that adjusts an optical path of light emitted from the second reflecting member by changing a rotation angle of the second reflecting member;
The optical device according to claim 11, comprising:   The optical apparatus according to claim 16, wherein a rotation axis of the reflection member including the first and second reflection surfaces is not parallel to a rotation axis of the second reflection member.   A plane formed by an optical path in the optical system for sequentially reflecting the light reflected by the first reflecting surface on the plurality of reflecting surfaces and entering the second reflecting surface, and a plane formed by an optical path in the second optical system The optical device according to claim 16, wherein and intersect each other.   The optical apparatus according to claim 11, wherein the optical system sequentially reflects the light reflected by the first reflecting surface an even number of times and reflects the light to the second reflecting surface. A processing device including an optical device,
The optical device comprises:
A rotatable reflecting member including a first reflecting surface and a second reflecting surface;
An optical system for sequentially reflecting the light reflected by the first reflecting surface by a plurality of reflecting surfaces and causing the light to enter the second reflecting surface;
An adjustment unit that adjusts an optical path of light reflected and emitted from the second reflection surface by changing a rotation angle of the reflection member;
The processing apparatus characterized by including.   21. The processing apparatus according to claim 20, further comprising an optical element that guides light emitted from the optical apparatus to an object.

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