KR101959756B1 - Light emitting device and lightihng device having the same - Google Patents

Abstract

The embodiments relate to a light emitting device and a light emitting device having the same.
A light emitting device according to an embodiment includes: a substrate having a plurality of convex portions; A first semiconductor layer on the substrate; A plurality of pits exposing an upper portion of each convex portion in the first semiconductor layer; A metal compound disposed in each of the pits and contacting the side surface of the pit and the convex portion; A first conductive semiconductor layer on the metal compound and the first semiconductor layer; An active layer on the first conductive semiconductor layer; And a second conductive semiconductor layer on the active layer.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light emitting device,

The embodiment relates to a light emitting device and a lighting device having the same.

III-V nitride semiconductors (group III-V nitride semiconductors) are widely recognized as key materials for light emitting devices such as light emitting diodes (LEDs) and laser diodes (LD) due to their physical and chemical properties. The III-V group nitride semiconductors are usually made of a semiconductor material having a composition formula of In _x Al _y Ga _{1 -x- y} N (0? X? 1, 0? _Y? 1, 0? _X + y?

BACKGROUND ART Light emitting diodes (LEDs) are a kind of semiconductor devices that convert the electric power to infrared rays or light using the characteristics of compound semiconductors, exchange signals, or use as a light source.

 LEDs or LDs using such nitride semiconductor materials are widely used in light emitting devices for obtaining light, and they have been applied as light sources for various products such as a key pad light emitting portion of a cellular phone, a display device, an electric sign board, and a lighting device.

An embodiment provides a light-emitting device including silicon oxide between a convex portion of a substrate and a compound semiconductor layer.

Embodiments provide a foot and a device comprising silicon oxide within a pit corresponding to a convex portion of the substrate.

An embodiment provides a lighting apparatus having a light emitting element.

A light emitting device according to an embodiment includes: a substrate having a plurality of convex portions; A first semiconductor layer on the substrate; A plurality of pits exposing an upper portion of each convex portion in the first semiconductor layer; A metal compound disposed in each of the pits and contacting the side surface of the pit and the convex portion; A first conductive semiconductor layer on the metal compound and the first semiconductor layer; An active layer on the first conductive semiconductor layer; And a second conductive semiconductor layer on the active layer.

The embodiment can reduce defects in the active layer.

The embodiment can provide a device resistant to ESD (elecrosatic discharge).

Embodiments can minimize light absorption within a semiconductor and generate diffuse reflection to improve light extraction efficiency.

Embodiments can provide a light emitting device that cuts off a potential generated on a convex portion of a substrate, thereby improving electrical reliability.

1 is a side sectional view of a light emitting device according to a first embodiment.
2 is a partially enlarged view of Fig.
3 is a plan view of the light emitting device of FIG.
FIGS. 4 to 6 are views showing a manufacturing process of the light emitting device of FIG.
7 is a side sectional view of the light emitting device according to the second embodiment.
8 is a side sectional view of the light emitting device according to the third embodiment.
9 is a view showing an example in which electrodes are arranged in the light emitting element of Fig.
10 is a view in which electrodes and a light extracting structure are arranged in the light emitting device of FIG.
11 is another view in which electrodes are vertically arranged in the light emitting device of FIG.
12 is a perspective view showing a light emitting device package having the light emitting element of FIG.
13 is a side sectional view of the light emitting device package of Fig.
14 is a view illustrating a display device having a light emitting device or a light emitting device package according to the embodiment.
15 is a view showing another example of a display device having a light emitting device or a light emitting device package according to the embodiment.
16 is a view illustrating a light emitting device having the light emitting device or the light emitting device package according to the embodiment.

In the description of the embodiments, it is to be understood that each layer (film), region, pattern or structure may be formed "on" or "under" a substrate, each layer The terms " on " and " under " include both being formed "directly" or "indirectly" Also, the criteria for top, bottom, or bottom of each layer will be described with reference to the drawings. The thickness and size of each layer in the drawings are exaggerated, omitted, or schematically shown for convenience and clarity of explanation. Also, the size of each component does not entirely reflect the actual size.

Hereinafter, the present invention will be described with reference to the accompanying drawings.

FIG. 1 is a perspective view of a light emitting device according to a first embodiment, FIG. 2 is a partially enlarged view of a convex region of the substrate of FIG. 1, and FIG. 3 is a plan view of the light emitting device of FIG.

1 to 3, the light emitting device 100 includes a substrate 111 having a plurality of convex portions 113; A first semiconductor layer 121, a metal compound 123, a second semiconductor layer 131, a first conductivity type semiconductor layer 133, an active layer 135, and a second conductivity type semiconductor layer 137.

The substrate 111 may use a light-transmitting, insulating or conductive substrate, e.g., sapphire (Al ₂ O _3), SiC, Si, GaAs, GaN, ZnO, Si, GaP, InP, Ge, Ga ₂ O ₃ of At least one can be used. The thickness (T2) of the substrate 111 may range from 120 to 500 mu m and the refractive index may be 2.4 or less, for example, 2 or less. Here, the sapphire substrate, which is a light-transmissive material, has a hexagonal-rhombo-symmetric crystal structure with a lattice constant of 13.001 Å in the c-axis direction and 4.765 Å in the a-axis direction, C (0001) plane, A (1120) plane, R (1102) plane, and the like. The C-plane of the sapphire substrate is relatively easy to grow the nitride film, and is stable at high temperatures, and thus is mainly used as a substrate for nitride growth.

The adjacent sides of the substrate 111 may have the same or different lengths, and adjacent sides may have a length of 0.3 mm x 0.3 mm or more, or a size having a large area such as 1 mm x 1 mm or more. The substrate 111 may be formed in a polygonal shape such as a quadrangular shape or a hexagonal shape when viewed from above, but is not limited thereto.

The substrate 111 includes a plurality of convex portions 113. The plurality of convex portions 113 protrude from the substrate 111 toward the active layer 135 and may have a hemispherical shape, a convex dome lens shape, or a convex lens shape in a three-dimensional shape. The other shape of the convex portion 113 may include a polygonal shape, which is a three-dimensional structure, but is not limited thereto.

As shown in FIG. 3, the plurality of convex portions 113 are arranged separately from each other, and may be arranged in a lattice shape, a matrix shape, or a stripe shape as viewed from above. The interval T1 between the plurality of convex portions 113 may be formed at regular intervals, irregular intervals, or random intervals, but the invention is not limited thereto.

The plurality of convex portions 113 may change the critical angle of incident light to improve light extraction efficiency.

The ratio of the width D1 of the convex portion 113 to the width G1 of the concave portion 112 between the convex portion 113 may be about 1: 1 to 4: 2, and the convex portion 113 And the width G1 of the concave region 112 may be in the range of 1: 1 to 1: 1/3. The width D1 of the convex portion 113 includes a range of 3 占 퐉 占 0 占 퐉 and the width G1 of the concave portion 112 is narrower than the width D1 of the convex portion 113, And the height H1 of the convex portion 113 may be in the range of 0.8 mu m to 2.5 mu m.

A first semiconductor layer 121 is formed on the substrate 111. The first semiconductor layer 121 may be formed using a Group II to VI compound semiconductor. The first semiconductor layer 121 may be formed of at least one layer or a plurality of layers using Group II to VI compound semiconductors. For example, the first semiconductor layer 121 may be a semiconductor layer using, for example, a Group III-V compound semiconductor such as Al _x In _y Ga _(1-xy) N composition formula (0? X? 1, 0? , 0? X + y? 1), and may include at least one of GaN, InN, AlN, InGaN, AlGaN, InAlGaN and AlInN.

The first semiconductor layer 121 may be formed of an undoped semiconductor layer which is not doped with impurities, and the undoped semiconductor layer may be formed of a low conductivity layer having lower conductivity than the n-type semiconductor layer .

The first semiconductor layer 121 is grown mainly through the growth surface 0001 of the substrate 111 and is grown through the inclined growth surface 1-101 when dislocations are generated by the lattice constant. Also, since the convex portion 113 is inclined or curved, the first semiconductor layer 121 is not normally grown. Accordingly, when the first semiconductor layer 121 is grown to a predetermined thickness, the first semiconductor layer 121 is grown from the periphery of the convex portion 113, and the pits 13 are formed on the convex portion 113 at this time. The upper surface of the pit 13 is formed in a hexagonal shape, and the side end face has a V-shape. The thickness of the first semiconductor layer 121 may be greater than the height H1 of the convex portion 113 and may be in the range of 2 탆 to 3 탆. The first semiconductor layer 121 is formed such that the pit 13 has a thickness not exceeding one third of the height H1 of each of the convex portions 113 .

A potential is generated in the first semiconductor layer 121 by a lattice defect with the substrate 111. The potential is a vertical potential 11 that advances in a vertical direction, (12). The vertical potential 11 and the horizontal potential 12 are generated by the difference of the lattice constant and can be damaged by the constant voltage discharge if not blocked.

Here, the horizontal potentials 11 in the first semiconductor layer 121 collect on the convex portion 113 and propagate to other layers as a potential set. Further, a potential at the apex of the convex portion 113 may be further generated and propagated to other layers. For this, in the embodiment, the metal compound 123 is formed in the pit 13 of the first semiconductor layer 121. The convex portion 113 and the side surface of the pit 13 are in contact with each other in the metal compound 123.

The bottom width D3 of the pit 13 or the exposed width D3 of the convex portion 113 is in a range of 0.5 탆 to 1 탆 and the metal compound 123 is formed in the pit 13, The width D2 of the lower portion of the first substrate W2 may be greater than the width of the lower portion of the substrate W2. The metal compound 123 is filled in the pit 13, and the upper surface thereof may be formed as a concave surface.

The metal compound 123 covers the side surface of the pit 13 where the vertex of the convex portion 113 and the horizontal potentials 12 are gathered to prevent the potential from propagating to other layers as the semiconductor layer grows, And improve electrical reliability and internal quantum efficiency. The metal compound 123 may have a thinner area corresponding to the apex of the convex 113 and a thicker area as the apex is farther from the apex. The metal compound 123 is formed lower than the upper surface of the first semiconductor layer 121.

The metal compound 123 may be silicon nitride or silicon oxide, and the silicon nitride may be Si _X N _Y for example, It includes SiN or Si ₃ N _4, and said silicon oxide comprises SiOx, for example, SiO _2.

The metal compound 123 has a refractive index difference between the material of the substrate 111 and the nitride semiconductor layer, thereby improving external quantum efficiency. At least one region of the region between the metal compound 123 and the convex portion 113 may be further filled with a medium such as air.

Here, the dislocation density of the upper surface of the first semiconductor layer 121 is reduced by 50% or more than the dislocation density of the lower surface. Accordingly, the potential propagated from the first semiconductor layer 121 to the active layer 135 is reduced, and the internal quantum efficiency can be improved. Further, the metal compound 123 is formed in a region substantially in contact with the substrate 111, so that the metal compound 123 is more effective than a structure that blocks dislocation between semiconductor layers. The reason for this is that when the potential is interrupted between the semiconductor layers, the light emitting device is subjected to a planarization process, thereby increasing the thickness of the light emitting device and increasing the electrical resistance. The metal compound 123 is formed in the pit 13 disposed in the region between the second semiconductor layer 131 and the substrate 111 so that the electric potential generated on the substrate 111 becomes the convex portion 113 To the second semiconductor layer 131 through the region of the first semiconductor layer 131 and the second semiconductor layer 131. The potential can be substantially 100% blocked on the region corresponding to the convex portion 113.

The second semiconductor layer 131 is formed on the first semiconductor layer 121 and the metal compound 123 and the second semiconductor layer 131 covers the bent portion of the pit 13, The lower surface may be a concave-convex structure, and the upper surface thereof may be formed as a flat surface.

The second semiconductor layer 131 may be a layer formed by adding an impurity of the first conductivity type, or may be an undoped semiconductor layer. For example, the second semiconductor layer 131 may be a semiconductor layer using a Group III-V compound semiconductor, for example, an Al _x In _y Ga _(1-xy) N composition formula (0? X? 1, 0? , 0? X + y? 1), and may include at least one of GaN, InN, AlN, InGaN, AlGaN, InAlGaN and AlInN. The second semiconductor layer 131 may be formed of a first conductivity type semiconductor layer, for example, an n-type semiconductor layer, but is not limited thereto.

The light emitting structure 130 may be formed on the second semiconductor layer 131. The light emitting structure 130 includes a group III-V compound semiconductor, for example, In _x Al _y Ga _{1 -x- y} N (0? X? 1, 0? _Y? 1, 0? _X + ), And can emit a predetermined peak wavelength within a wavelength range from the ultraviolet band to the visible light band.

The light emitting structure 130 includes a first conductive semiconductor layer 133, a second conductive semiconductor layer 137, and a second conductive semiconductor layer 133 between the first conductive semiconductor layer 133 and the second conductive semiconductor layer 137 And an active layer 135 formed thereon.

The first conductive semiconductor layer 133 may be formed on the second semiconductor layer 131. The first conductive semiconductor layer 133 may be made of any one of compound semiconductors such as Group III-V compound semiconductor doped with the first conductive dopant such as GaN, InN, AlN, InGaN, AlGaN, InAlGaN and AlInN have. The first conductive semiconductor layer 133 may be formed of a material having a compositional formula of In _x Al _y Ga _1-xy N (0? X? 1, 0? _Y? 1, 0? _X + y? Type semiconductor layer, and the first conductivity type dopant is an N type dopant including Si, Ge, Sn, Se, and Te.

A superlattice structure in which different semiconductor layers are alternately stacked may be formed between the first conductive type semiconductor layer 133 and the second semiconductor layer 131. Such a superlattice structure may reduce lattice defects . Each layer of the superlattice structure may be stacked to a thickness of several A or more.

A first conductive clad layer may be formed between the first conductive semiconductor layer 133 and the active layer 135. The first conductive clad layer may be formed of a GaN-based semiconductor, and the bandgap thereof may be formed to be equal to or larger than a bandgap of the active layer 135. The first conductive type cladding layer serves to constrain the carrier.

The active layer 135 is formed on the first conductive semiconductor layer 133. The active layer 135 selectively includes a single quantum well, a multiple quantum well (MQW), a quantum wire structure, or a quantum dot structure, and includes a well layer and a barrier layer period. The well layer comprises a composition formula of _{In x Al y Ga 1 -x- y} N (0≤x≤1, 0≤y≤1, 0≤x + y≤1), and wherein the barrier layer is In _x Al _y It may include a composition formula of _{Ga 1 -x- y N (0≤x≤1,} 0≤y≤1, 0≤x + y≤1). The period of the well layer / barrier layer may be one or more cycles using a lamination structure of InGaN / GaN, GaN / AlGaN, InGaN / InGaN, InGaN / InGaN, InGaN / InAlGaN and GaN / InAlGaN. The barrier layer may be formed of a semiconductor material having a band gap higher than a band gap of the well layer.

The second conductive semiconductor layer 137 is formed on the active layer 135. The second conductive semiconductor layer 137 may be formed of any one of compound semiconductors such as GaN, InN, AlN, InGaN, AlGaN, InAlGaN, and AlInN doped with a second conductive dopant. The second conductivity type semiconductor layer 137 may be formed of a semiconductor having a composition formula of In _x Al _y Ga _{1 -x- y} N (0? X? 1, 0? _Y? 1, 0? _X + And the second conductive dopant may include Mg, Zn, Ca, Sr, and Ba as a p-type dopant.

The second conductive semiconductor layer 137 may include a superlattice structure, and the superlattice structure may include an InGaN / GaN superlattice structure or an AlGaN / GaN superlattice structure. The superlattice structure of the second conductivity type semiconductor layer 137 may protect the active layer 135 by diffusing a current contained in the voltage abnormally.

The first conductive semiconductor layer 133 may be a p-type semiconductor layer, and the second conductive semiconductor layer 137 may be an n-type semiconductor layer. A third conductive type semiconductor layer having a polarity opposite to the second conductive type may be formed on the second conductive type semiconductor layer 137.

The light emitting device 100 may be defined as a light emitting structure 130 including the first conductive semiconductor layer 133, the active layer 135, and the second conductive semiconductor layer 137, ) May be implemented by any one of an np junction structure, a pn junction structure, an npn junction structure, and a pnp junction structure. Here, p is a p-type semiconductor layer, and n is an n-type semiconductor layer, and the - includes a structure in which the p-type semiconductor layer and the n-type semiconductor layer are in direct contact or indirect contact. Hereinafter, for convenience of explanation, the uppermost layer of the light emitting structure 130 will be described as the second conductivity type semiconductor layer 137.

The first conductive semiconductor layer 133 and the second conductive semiconductor layer 137 may be electrically connected to each other to supply power.

FIGS. 4 to 6 are views showing a manufacturing process of the light emitting device of FIG. Although the following manufacturing processes are shown as individual elements for ease of explanation, individual elements can be described as being manufactured through a processing process described below. Further, the present invention is not limited to the production process of the individual elements described below, and can be manufactured in an additional process or a fewer process in a specific process of each process.

Referring to FIG. 4, the substrate 111 may be loaded in a growth apparatus, and may be formed in a layer or pattern shape by selectively using compound semiconductors of Groups II to VI elements thereon. The substrate 111 is used as a growth substrate.

The substrate 111 may be a transparent substrate, an insulating substrate, or a conductive substrate. The substrate 111 may be a sapphire substrate (Al ₂ O ₃ ), GaN, SiC, ZnO, Si, GaP, InP, Ga ₂ O ₃ , GaAs, and the like. A plurality of convex portions 113 are formed on the substrate 111. The plurality of convex portions 113 are formed by etching a predetermined mask pattern on the upper surface of the substrate 111, (113) can be formed.

A first semiconductor layer 121 is grown on the substrate 111. Since the substrate 111 and the first semiconductor layer 121 have different lattice constants, a strain is generated due to a difference in lattice constant. The strain is generated at the potentials (11, 12) in the first semiconductor layer (121). The first semiconductor layer 121 is grown on the flat surface 0001 of the substrate 111 and the growth temperature is controlled to adjust the size of the pits 13 on the convex portion 113. [

Referring to FIG. 5, a metal compound 123 is formed in the pit 13. The metal compound 123 may be performed in the same chamber. The formation temperature of the metal compound 123 is in a range of 900 to 1100 degrees, and a silicon (Si) precursor is supplied in an ammonia (NH3) atmosphere. The silicon (Si) precursor may be SiH ₄ , Si ₂ H _6, or DTBSi (ditertiary butyl silane). The metal compound 123 is preferentially formed in the pit 123 and therefore is formed on the side surface of the pit 123 and the upper surface of the convex portion 113. At this time, the metal compound 123 may be completely or only filled in the pit 13. Thereafter, the supply of the silicon (Si) precursor is stopped. The metal compound 123 may include voids in the process of being formed in the pit 13. The light absorption generated inside the semiconductor through the gap is minimized, and the diffused reflection is generated to improve the light output.

6, a second semiconductor layer 131 is formed on the first semiconductor layer 121 and the metal compound 123, and the second semiconductor layer 131 is formed on the first semiconductor layer 121, Or may be formed of other compound semiconductors. The second semiconductor layer 131 may be grown while filling the pits 13 by adjusting a vertical growth rate and a horizontal growth rate. The growth rate may be controlled by the flow rate, pressure, and growth temperature of the precursor, and the growth temperature may be 1000 ° C or more. As another example, the upper surface of the second semiconductor layer 131 may be formed to be bent in a region corresponding to the pit 13, but the present invention is not limited thereto.

A light emitting structure 130 including a first conductive semiconductor layer 133, an active layer 135, and a second conductive semiconductor layer 137 is formed on the second semiconductor layer 131. The light emitting structure 130 may have three or more semiconductor layers having the above-described layer structure, but the present invention is not limited thereto. At least one of the first and second conductive semiconductor layers 133 and 137 or a layer adjacent thereto may include a superlattice structure having at least one of an AlGaN / GaN / InGaN layer and an AlGaN / GaN / InGaN layer, It is not limited thereto.

The metal compound 123 is formed on a part of the pit 13 of the first semiconductor layer 121 formed on the convex portion 113 of the substrate 111 so that the convex portion 113 of the substrate 111, It is possible to effectively block the electric potential that is propagated to the other layer through the region of FIG.

7 is a side sectional view showing a light emitting device according to the second embodiment. In describing the second embodiment, the same configuration as that of the first embodiment will be described with reference to the description of the first embodiment.

7, a buffer layer 120 is disposed between the first semiconductor layer 121 and the substrate 111, and the buffer layer 120 is formed between the substrate 111 and the first semiconductor layer 121 Lt; RTI ID = 0.0 > a < / RTI > Accordingly, the potential propagated to the first semiconductor layer 121 can be reduced. The buffer layer 120 may have a thickness of several nm or less. The material of the buffer layer 120 may be, for example, In _x Al _y Ga _{1 -x- y} N (0? X? 1, 0? _Y? y ≤ 1), but the present invention is not limited thereto. Here, the buffer layer 120 may not grow on the curved portion when the convex portion 113 has a hemispherical shape.

The second semiconductor layer 132 disposed between the first semiconductor layer 121 and the first conductive semiconductor layer 133 may have a superlattice structure having a plurality of layers. The second semiconductor layer 132 is alternately repeated in at least two layers having different refractive indices or different thicknesses. Accordingly, the potential that is propagated to the first conductivity type semiconductor layer 133 can be blocked by the superlattice structure of the second semiconductor layer 132. The internal quantum efficiency of the light emitting device can be improved. The first layer and the second layer include a compound semiconductor having a composition formula of In _x Al _y Ga _{1 -x- y} N (0? X? 1, 0? _Y? 1, 0? _X + y? The present invention is not limited thereto.

8 is a side sectional view showing a light emitting device according to the third embodiment. In describing the third embodiment, the same configuration as that of the first embodiment will be described with reference to the description of the first embodiment.

Referring to FIG. 8, a buffer layer 120 and a first semiconductor layer 121 are formed on a substrate 111 of a light emitting device. A portion 21 of the buffer layer 120 is formed on the convex portion 113 of the substrate 111 and a portion 21 of the buffer layer 120 is formed in a vertex area of the convex portion 113, And may be formed to have a thickness smaller than the thickness of the buffer layer 120.

A portion (21) of the buffer layer (120) is in contact with the metal compound (123). A portion (21) of the buffer layer (120) may be embedded in the metal compound (123). The metal compound 123 contacts the side surfaces of the convex portion 113, the portion 21 of the buffer layer 120 and the pit 13 to form the metal compound 123 in the region of the convex portion 113 So that the potential can be effectively blocked.

9 is a view showing an example in which electrodes are arranged in the light emitting element of Fig.

9, the light emitting device 101 includes a substrate 111, first and second semiconductor layers 121 and 131, a metal compound 123, a light emitting structure 130, and a current diffusion layer 141, a first electrode 142 on the first conductive semiconductor layer 133, and a second electrode 143 on the electrode layer 141.

The electrode layer 141 may be formed as a transparent current diffusion layer on the upper surface of the second conductive type semiconductor layer 137. The material of the electrode layer 141 may be indium tin oxide (ITO), indium zinc oxide (IZO), indium zinc tin oxide IZO (indium gallium zinc oxide), IGTO (indium gallium tin oxide), AZO (aluminum zinc oxide), ATO (antimony tin oxide), GZO (gallium zinc oxide), ZnO, IrOx , RuOx, NiO, and the like, and may be formed of at least one layer. The electrode layer 141 may be formed of a reflective electrode layer, for example, Al, Ag, Pd, Rh, Pt, Ir, or an alloy of two or more thereof.

The second electrode 145 may be formed on the second conductive semiconductor layer 137 and / or the electrode layer 141, and may include an electrode pad. The second electrode 145 may further have a current diffusion pattern of an arm structure or a finger structure. The second electrode 145 may be made of a metal having the characteristics of an ohmic contact, an adhesive layer, and a bonding layer, but is not limited thereto.

The second electrode 151 may be formed to be 40% or less, for example, 20% or less of the upper surface area of the second conductive type semiconductor layer 137, but the present invention is not limited thereto.

The first electrode 143 is formed on the first conductive semiconductor layer 133. The first electrode 143 and the second electrode 135 may be formed of one selected from the group consisting of Ti, Ru, Rh, Ir, Mg, Zn, Al, In, Ta, Pd, Co, Ni, Si, Can be selected from among the optional alloys.

An insulating layer may further be formed on the surface of the light emitting structure 130. The insulating layer may prevent a short between layers of the light emitting structure 130 and prevent moisture penetration.

10 is a view showing another example of electrode arrangement of the first light emitting element. The description of some components in Fig. 10 will be made with reference to the description of Fig.

Referring to FIG. 10, in the light emitting device 102, an electrode layer 141 is disposed under the light emitting structure 130. The electrode layer 141 may be formed of a reflective electrode layer using a metal. The first electrode 143 and the second electrode 145 protrude downward and can be connected to a connection member such as a bump and mounted on the substrate.

The thickness T3 of the substrate 111 may be in the range of 30 mu m to 70 mu m, but is not limited thereto. The substrate 111 includes a plurality of protrusions 113 and a plurality of protrusions 114 at lower and upper portions thereof. The protrusions 113 disposed at the lower portion and the protrusions 114 disposed at the upper portion may be disposed on the same center or may be shifted so as to lie on different centers. The protrusion 114 may have a hemispherical shape or a polygonal shape, and such a structure may be disposed in the light extraction direction to increase the light extraction efficiency.

11 is a side sectional view in which a vertical electrode is arranged in the light emitting device of FIG.

Referring to FIG. 11, the light emitting device 103 includes a first electrode 151 on a top of a light emitting structure 130 and a second electrode 150 on a bottom. A semiconductor layer 131 may be disposed on the light emitting structure 130 and the first electrode 151 and a first electrode 151 may be disposed on the semiconductor layer 131.

The substrate 111 and the semiconductor layer 121 of FIG. 1 disposed on the semiconductor layer 131 are removed by a physical and chemical method. The semiconductor layer 131 includes a conductive semiconductor layer such as an n-type semiconductor layer.

Here, the substrate of FIG. 1 is removed. The growth substrate may be removed by a physical method (e.g., laser lift off) and / or chemical methods (such as wet etching), and the first semiconductor layer may be removed to expose the second semiconductor layer 131 I will. The first electrode 151 is formed on the second semiconductor layer 131 by performing the isolation etching in the direction in which the substrate is removed. Accordingly, a light emitting device having a vertical electrode structure having the first electrode 151 and the second electrode 150 below the light emitting structure 130 can be manufactured.

The first electrodes 151 may be formed in different regions and may have an arm pattern or a bridge pattern, but the present invention is not limited thereto. A portion of the first electrode 151 may be used as a pad.

And the metal compound 123 is disposed on the semiconductor layer 131 so as to be spaced apart from each other. The metal compound 123 protrudes further than the upper surface of the semiconductor layer 131.

The second electrode 150 is disposed under the light emitting structure 130, that is, under the second conductive type semiconductor layer 137.

The second electrode 150 may include a plurality of conductive layers and may include an ohmic contact layer 153, a reflective layer 155, a bonding layer 157, and a conductive support member 159.

The ohmic contact layer 153 may be a low conductive material such as ITO, IZO, IZTO, IAZO, IGZO, IGTO, AZO, or ATO or a metal such as Ni or Ag. A reflective layer 155 is formed under the ohmic contact layer 153 and the reflective layer 155 is formed of Ag, Ni, Al, Rh, Pd, Ir, Ru, Mg, Zn, Pt, Au, And at least one layer made of a material selected from the group consisting of. The reflective layer 155 may be in contact with the second conductive semiconductor layer 137 and may be in ohmic contact with a metal or ohmic contact with a conductive material such as ITO.

A bonding layer 157 is formed under the reflective layer 155 and the bonding layer 157 may be used as a barrier metal or a bonding metal. The material may be Ti, Au, Sn, Ni, Cr, Ga, In, Bi, Cu, Ag, and Ta and an optional alloy.

A conductive support member 159 is formed under the bonding layer 157. The conductive support member 159 may be a metal or a carrier substrate and may be formed of a metal such as copper-copper, gold- (Ni-nickel), molybdenum (Mo), copper-tungsten (Cu-W), and carrier wafers (e.g., Si, Ge, GaAs, ZnO, SiC and the like). As another example, the support member 159 may be embodied as a conductive sheet.

The upper surface of the semiconductor layer 131 may be formed with a light extraction structure such as a roughness. An insulating layer may be formed on the surface of the semiconductor layer 131-135, and a light extraction structure such as a roughness may be formed on the insulating layer.

FIG. 12 is a perspective view of a light emitting device package having the above-described light emitting device, and FIG. 13 is a side sectional view of the light emitting device of FIG.

12 and 13, the light emitting device package 600 includes a body 610 having a concave portion 660, a first lead frame 621 having a first cavity 625, a second cavity 635, A connecting frame 646, light emitting elements 671 and 672, connecting members 603 to 606, a molding member 651 and a paste member 681 and 682 having a first lead frame 631 and a second lead frame 631. For the description of the embodiment, the light emitting device package 600 may have a length of 3 mm-12 mm in the first direction, a length of 3 mm-12 mm in the second direction orthogonal to the first direction, and a thickness of 800 m And a plurality of light emitting devices 671 and 672 are disposed inside the light emitting display device 100. However, the present invention is not limited thereto.

The body 610 may include at least one of an insulating material, a conductive material, and a metallic material. The body 610 may include at least one of a resin material such as polyphthalamide (PPA), a silicon (Si), a metal material, a photo sensitive glass (PSG), a sapphire (Al ₂ O ₃ ), a printed circuit board Can be formed. For example, the body 610 may be made of a resin material such as polyphthalamide (PPA).

As another example, when the body 610 is formed of a conductive material, an insulating film (not shown) is further formed on the surface of the body 610 to electrically short the conductive body 610 to the other lead frame Can be prevented.

The shape of the body 610 may be triangular, rectangular, polygonal, circular, or curved when viewed from above. The body 610 includes a plurality of side portions 611 to 614 and at least one of the plurality of side portions 611 to 614 may be disposed perpendicular or inclined with respect to a lower surface of the body 610. The first side surface portion 611 and the second side surface portion 612 are opposite to each other and the third side surface portion 613 and the second side surface portion 612 The fourth side portions 614 are opposite to each other. The length of each of the first side surface portion 611 and the second side surface portion 612 may be different from the length of the third side surface portion 613 and the fourth side surface portion 614, The length of the side portion 612 (e.g., the short side length) may be shorter than the length of the third side portion 613 and the fourth side portion 614. [ The length of the first side surface portion 611 or the second side surface portion 612 may be a distance between the third side surface portion 613 and the fourth side surface portion 614 and the longitudinal direction may be a distance between the second and third cavities 625, 635, respectively.

The first lead frame 621 and the second lead frame 631 may be disposed on the lower surface of the body 610 and mounted on the circuit board. As another example, the first lead frame 621 and the second lead frame 631 may be disposed on one side of the body 610 and mounted on a circuit board. The thicknesses of the first lead frame 621 and the second lead frame 631 may be 0.2 mm ± 0.05 mm. The first and second lead frames 621 and 631 function as leads for supplying power.

The body 610 includes a concave portion 660 and the concave portion 660 is open at an upper side and comprises a side and a bottom 616. The concave portion 660 may be formed in the form of a concave cup structure, a cavity structure, or a recess structure from the top surface 615 of the body 610, but the present invention is not limited thereto. The side surface of the concave portion 660 may be perpendicular or inclined to the bottom 616 thereof. The shape of the concave portion 660 viewed from above may be a circular shape, an elliptical shape, a polygonal shape (e.g., a rectangle), or a polygonal shape having a curved corner.

The first lead frame 621 is disposed below the first region of the concave portion 660 and partially disposed on the bottom 616 of the concave portion 660, A concave first cavity 625 is disposed to have a lower depth than the bottom 616. The first cavity 625 may have a concave shape such as a cup shape or a recess shape from the bottom 616 of the concave portion 660 in the bottom direction of the body 610.

The side surface and the bottom 622 of the first cavity 625 are formed by the first lead frame 621 and the peripheral side surface of the first cavity 625 is formed by the bottom 622 of the first cavity 625 Or may be bent vertically. The opposite sides of the first cavity 625 may be inclined at the same angle or may be inclined at different angles.

The second lead frame 631 is disposed in a second region spaced apart from the first region of the concave portion 660 and partially disposed on the bottom 616 of the concave portion 660, A concave second cavity 635 is formed to have a lower depth than the bottom 616 of the concave portion 660. The second cavity 635 may have a concave shape such as a cup shape or a recess shape from the upper surface of the second lead frame 631 in the bottom direction of the body 610. The bottom surface 632 and the side surface of the second cavity 635 are formed by the second lead frame 631 and the side surface of the second cavity 635 is formed by the bottom surface 632 of the second cavity 635. [ Or may be bent vertically. Two opposite sides of the side surface of the second cavity 635 may be inclined at the same angle or may be inclined at different angles.

The first cavity 625 and the second cavity 635 may have the same shape as viewed from above, or may be formed symmetrically with respect to each other, but the present invention is not limited thereto.

Each of the center portions of the first lead frame 621 and the second lead frame 631 is exposed to the lower portion of the body 610 and may be disposed on the same plane as the lower surface of the body 610, have.

The first lead frame 621 includes a first lead portion 623 and the first lead portion 623 is disposed at a lower portion of the body 610 and has a third side portion 613 . The second lead frame 631 includes a second lead portion 633 and the second lead portion 633 is disposed at a lower portion of the body 610 and includes a third side portion 613 To the fourth side surface portion 614 opposite to the first side surface portion 614.

The first lead frame 621, the second lead frame 631 and the connection frame 646 may be made of a metal material such as titanium (Ti), copper (Cu), nickel (Ni), gold (Au) And may include at least one of chromium (Cr), tantalum (Ta), platinum (Pt), tin (Sn), silver (Ag), and phosphorous (P). The first and second lead frames 621 and 631 may have the same thickness, but the present invention is not limited thereto.

The bottom shapes of the first cavity 625 and the second cavity 635 may be circular or elliptical shapes having a rectangular shape, a square shape, or a curved shape.

A connection frame 646 is disposed on the bottom 616 of the concave portion 660 and the connection frame 646 is disposed between the first lead frame 621 and the second lead frame 631, It is used as a connection terminal. The connection frame 646 may be removed and the first and second light emitting devices 671 and 672 may be connected to the first lead frame 621 and the second lead frame 631 And can be electrically connected.

A first light emitting device 671 is disposed in the first cavity 625 of the first lead frame 621 and a second light emitting device 671 is disposed in the second cavity 635 of the second lead frame 631 672 may be disposed.

The first and second light emitting devices 671 and 672 can selectively emit light in a visible light band to an ultraviolet light band. For example, a red LED chip, a blue LED chip, a green LED chip, a yellow green LED chip, Can be selected. The first and second light emitting devices 671 and 672 include compound semiconductor light emitting devices of group II-VII elements or group III-V elements.

The first light emitting device 671 is connected to the first connection frame 621 and the connection frame 646 by connecting members 603 and 604. The second light emitting device 672 is connected to the second connection frame 631 and the connection frame 646 by connecting members 605 and 606. The connecting members 603-606 may be realized by a wire.

The protection element may be disposed on a part of the first lead frame 621 or the second lead frame 631. The protection device may be implemented with a thyristor, a zener diode, or a TVS (Transient Voltage Suppression), and the zener diode protects the light emitting device from electrostatic discharge (ESD). The protection element may be connected in parallel to the connection circuit of the first light emitting element 671 and the second light emitting element 672 to protect the light emitting elements 671 and 672.

Molding members 651 may be formed in the concave portion 660, the first cavity 625, and the second cavity 635. The molding member 651 includes a light transmitting resin material such as silicone or epoxy, and may be formed as a single layer or a multi-layer.

The first paste member 681 is disposed between the first light emitting device 671 and the bottom 622 of the first cavity 625 to bond and electrically connect the first light emitting device 671 and the first light emitting device 671. The second paste member 682 is disposed between the second light emitting device 672 and the bottom 632 of the second cavity 635 to bond and electrically connect the second paste member 682 to each other.

The first and second paste members 681 and 682 include an insulating adhesive, and include, for example, epoxy. In addition, the epoxy may include a filler, but the present invention is not limited thereto.

The molding member 651 may include a phosphor for converting the wavelength of light emitted onto the light emitting devices 671 and 672. The phosphor may include one of the first cavity 625 and the second cavity 635 May be added to the molding member 651 formed in one or all of the regions, but the present invention is not limited thereto. The phosphor excites a part of the light emitted from the light emitting elements 671 and 672 to emit light of a different wavelength. The phosphor may be selectively formed from YAG, TAG, Silicate, Nitride, and Oxy-nitride based materials. The phosphor may include at least one of a red phosphor, a yellow phosphor, and a green phosphor, but the present invention is not limited thereto. The surface of the molding member 651 may be formed in a flat shape, a concave shape, a convex shape, or the like. For example, the surface of the molding member 651 may be formed as a concave curved surface, It can be an exit plane.

The circumference of the concave portion 660 may be formed to be inclined with respect to the bottom 616 of the concave portion 660. The periphery of the concave portion 660 is formed in a stepped structure, so that the molding member 651 can be prevented from overflowing.

The upper surface of the molding member 651 may be formed as a concave, convex or flat surface. Further, the upper surface of the molding member 651 may be formed as a rough uneven surface, but the present invention is not limited thereto.

A fluorescent sheet may be disposed on the light emitting device 600 or may be coated on the light emitting devices 671 and 672 so as to bond the phosphor layers. This is an example for preventing the pupil of the light emitting device of Fig. 1 from disappearing.

Although the package of the embodiment has been shown and described in the form of a top view, it has the effect of improving the heat dissipation characteristics, conductivity, and reflection characteristics as described above by implementing it in a side view manner. The light emitting device of the top view type or the side view type, After packaging, a lens may be formed on or adhered to the resin layer, but the present invention is not limited thereto.

<Lighting system>

The light emitting device or the light emitting device package according to the embodiment can be applied to a light unit. The light unit includes a structure in which a plurality of light emitting devices or light emitting device packages are arrayed, and includes the display device shown in Figs. 14 and 15 and the illuminating device shown in Fig. 16, and includes a lighting lamp, a traffic light, a vehicle headlight, And the like.

14 is an exploded perspective view of the display device according to the embodiment.

14, a display device 1000 according to an embodiment includes a light guide plate 1041, a light emitting module 1031 for providing light to the light guide plate 1041, and a reflection member 1022 An optical sheet 1051 on the light guide plate 1041, a display panel 1061 on the optical sheet 1051, the light guide plate 1041, a light emitting module 1031, and a reflection member 1022 But is not limited to, a bottom cover 1011.

The bottom cover 1011, the reflective sheet 1022, the light guide plate 1041, and the optical sheet 1051 can be defined as a light unit 1050.

The light guide plate 1041 serves to diffuse light into a surface light source. The light guide plate 1041 may be made of a transparent material such as acrylic resin such as PMMA (polymethyl methacrylate), polyethylene terephthalate (PET), polycarbonate (PC), cycloolefin copolymer (COC), and polyethylene naphthalate Resin. &Lt; / RTI &gt;

The light emitting module 1031 provides light to at least one side of the light guide plate 1041, and ultimately acts as a light source of the display device.

The light emitting module 1031 may include at least one light source, and may provide light directly or indirectly from one side of the light guide plate 1041. The light emitting module 1031 includes a substrate 1033 and a light emitting device package 30 according to the embodiment described above and the light emitting device package 1035 may be arrayed on the substrate 1033 at a predetermined interval have.

The substrate 1033 may be a printed circuit board (PCB) including a circuit pattern (not shown). However, the substrate 1033 may include not only a general PCB, but also a metal core PCB (MCPCB), a flexible PCB (FPCB), and the like. When the light emitting device package 1035 is mounted on the side surface of the bottom cover 1011 or on the heat radiation plate, the substrate 1033 may be removed. Here, a part of the heat radiating plate may be in contact with the upper surface of the bottom cover 1011.

The plurality of light emitting device packages 1035 may be mounted on the substrate 1033 such that the light emitting surface of the light emitting device package 1035 is spaced apart from the light guiding plate 1041 by a predetermined distance. The light emitting device package 1035 may directly or indirectly provide light to the light-incident portion on one side of the light guide plate 1041, but the present invention is not limited thereto. The light guide plate 1041 can be removed when the amount of reflected light is large.

The reflective member 1022 may be disposed under the light guide plate 1041. The reflection member 1022 reflects the light incident on the lower surface of the light guide plate 1041 so as to face upward, thereby improving the brightness of the light unit 1050. The reflective member 1022 may be formed of, for example, PET, PC, or PVC resin, but is not limited thereto. The reflective member 1022 may be an upper surface of the bottom cover 1011, but is not limited thereto.

The bottom cover 1011 may house the light guide plate 1041, the light emitting module 1031, the reflective member 1022, and the like. To this end, the bottom cover 1011 may be provided with a housing portion 1012 having a box-like shape with an opened upper surface, but the present invention is not limited thereto. The bottom cover 1011 may be coupled to the top cover, but is not limited thereto.

The bottom cover 1011 may be formed of a metal material or a resin material, and may be manufactured using a process such as press molding or extrusion molding. In addition, the bottom cover 1011 may include a metal or a non-metal material having good thermal conductivity, but the present invention is not limited thereto.

The display panel 1061 is, for example, an LCD panel, including first and second transparent substrates facing each other, and a liquid crystal layer interposed between the first and second substrates. A polarizing plate may be attached to at least one surface of the display panel 1061, but the present invention is not limited thereto. The display panel 1061 displays information by light passing through the optical sheet 1051. Such a display device 1000 can be applied to various types of portable terminals, monitors of notebook computers, monitors of laptop computers, televisions, and the like.

The optical sheet 1051 is disposed between the display panel 1061 and the light guide plate 1041 and includes at least one light-transmitting sheet. The optical sheet 1051 may include at least one of a sheet such as a diffusion sheet, a horizontal and vertical prism sheet, and a brightness enhancement sheet. The diffusion sheet diffuses incident light, and the horizontal and / or vertical prism sheet condenses incident light into a display area. The brightness enhancing sheet improves the brightness by reusing the lost light. A protective sheet may be disposed on the display panel 1061, but the present invention is not limited thereto.

Here, the optical path of the light emitting module 1031 may include the light guide plate 1041 and the optical sheet 1051 as an optical member, but the present invention is not limited thereto.

15 is a view showing a display device according to the embodiment.

15, the display device 1100 includes a bottom cover 1152, a substrate 1120 on which the above-described light emitting device package 1124 is arrayed, an optical member 1154, and a display panel 1155 .

The substrate 1120 and the light emitting device package 1124 may be defined as a light emitting module 1060. The bottom cover 1152, at least one light emitting module 1060, and the optical member 1154 may be defined as a light unit 1150.

The bottom cover 1152 may include a receiving portion 1153, but the present invention is not limited thereto.

Here, the optical member 1154 may include at least one of a lens, a light guide plate, a diffusion sheet, a horizontal and vertical prism sheet, and a brightness enhancement sheet. The light guide plate may be made of a PC material or a PMMA (poly methy methacrylate) material, and such a light guide plate may be removed. The diffusion sheet diffuses incident light, and the horizontal and vertical prism sheets condense incident light into a display area. The brightness enhancing sheet enhances brightness by reusing the lost light.

The optical member 1154 is disposed on the light emitting module 1060, and performs surface light source, diffusion, and light condensation of the light emitted from the light emitting module 1060.

16 is an exploded perspective view of a lighting apparatus having a light emitting element according to an embodiment.

16, the lighting apparatus according to the embodiment includes a cover 2100, a light source module 2200, a heat discharger 2400, a power supply unit 2600, an inner case 2700, and a socket 2800 . Further, the illumination device according to the embodiment may further include at least one of the member 2300 and the holder 2500. The light source module 2200 may include a light emitting device according to an embodiment of the present invention.

For example, the cover 2100 may have a shape of a bulb or a hemisphere, and may be provided in a shape in which the hollow is hollow and a part is opened. The cover 2100 may be optically coupled to the light source module 2200. For example, the cover 2100 may diffuse, scatter, or excite light provided from the light source module 2200. The cover 2100 may be a kind of optical member. The cover 2100 may be coupled to the heat discharging body 2400. The cover 2100 may have an engaging portion that engages with the heat discharging body 2400.

The inner surface of the cover 2100 may be coated with a milky white paint. Milky white paints may contain a diffusing agent to diffuse light. The surface roughness of the inner surface of the cover 2100 may be larger than the surface roughness of the outer surface of the cover 2100. This is for sufficiently diffusing and diffusing the light from the light source module 2200 and emitting it to the outside.

The cover 2100 may be made of glass, plastic, polypropylene (PP), polyethylene (PE), polycarbonate (PC), or the like. Here, polycarbonate is excellent in light resistance, heat resistance and strength. The cover 2100 may be transparent so that the light source module 2200 is visible from the outside, and may be opaque. The cover 2100 may be formed by blow molding.

The light source module 2200 may be disposed on one side of the heat discharging body 2400. Accordingly, heat from the light source module 2200 is conducted to the heat discharger 2400. The light source module 2200 may include a light source unit 2210, a connection plate 2230, and a connector 2250.

The member 2300 is disposed on the upper surface of the heat discharging body 2400 and has guide grooves 2310 through which the plurality of light source portions 2210 and the connector 2250 are inserted. The guide groove 2310 corresponds to the substrate of the light source unit 2210 and the connector 2250.

The surface of the member 2300 may be coated or coated with a light reflecting material. For example, the surface of the member 2300 may be coated or coated with a white paint. The member 2300 reflects the light reflected by the inner surface of the cover 2100 toward the cover 2100 in the direction toward the light source module 2200. Therefore, the light efficiency of the illumination device according to the embodiment can be improved.

The member 2300 may be made of an insulating material, for example. The connection plate 2230 of the light source module 2200 may include an electrically conductive material. Therefore, electrical contact can be made between the heat discharging body 2400 and the connecting plate 2230. The member 2300 may be formed of an insulating material to prevent an electrical short circuit between the connection plate 2230 and the heat discharging body 2400. The heat discharger 2400 receives heat from the light source module 2200 and heat from the power supply unit 2600 to dissipate heat.

The holder 2500 blocks the receiving groove 2719 of the insulating portion 2710 of the inner case 2700. Therefore, the power supply unit 2600 housed in the insulating portion 2710 of the inner case 2700 is sealed. The holder 2500 has a guide protrusion 2510. The guide protrusion 2510 may have a hole through which the protrusion 2610 of the power supply unit 2600 passes.

The power supply unit 2600 processes or converts an electrical signal provided from the outside and provides the electrical signal to the light source module 2200. The power supply unit 2600 is housed in the receiving groove 2719 of the inner case 2700 and is sealed inside the inner case 2700 by the holder 2500.

The power supply unit 2600 may include a protrusion 2610, a guide 2630, a base 2650, and an extension 2670.

The guide portion 2630 has a shape protruding outward from one side of the base 2650. The guide portion 2630 may be inserted into the holder 2500. A plurality of components may be disposed on one side of the base 2650. The plurality of components include, for example, a DC converter for converting AC power supplied from an external power source into DC power, a driving chip for controlling driving of the light source module 2200, an ESD (ElectroStatic discharge) protective device, and the like, but the present invention is not limited thereto.

The extension portion 2670 has a shape protruding outward from the other side of the base 2650. The extension portion 2670 is inserted into the connection portion 2750 of the inner case 2700 and receives an external electrical signal. For example, the extension portion 2670 may be provided to be equal to or smaller than the width of the connection portion 2750 of the inner case 2700. One end of each of the positive wire and the negative wire is electrically connected to the extension portion 2670 and the other end of the positive wire and the negative wire are electrically connected to the socket 2800 .

The inner case 2700 may include a molding part together with the power supply part 2600. The molding part is a hardened portion of the molding liquid so that the power supply unit 2600 can be fixed inside the inner case 2700.

The features, structures, effects and the like described in the embodiments are included in at least one embodiment of the present invention and are not necessarily limited to one embodiment. Further, the features, structures, effects, and the like illustrated in the embodiments can be combined and modified by other persons having ordinary skill in the art to which the embodiments belong. Therefore, it should be understood that the present invention is not limited to these combinations and modifications.

13: PIT 100, 101-103: Light emitting element
111: substrate 113: convex portion
121: first semiconductor layer 123: silicon oxide
131: second semiconductor layer 133: first conductivity type semiconductor layer
135: active layer 137: second conductivity type semiconductor layer
130: light emitting structure 141: electrode layer
142, 143:

Claims (11)

A substrate having a plurality of convex portions;
A first semiconductor layer on the substrate;
A plurality of pits exposing an upper portion of each convex portion in the first semiconductor layer;
A metal compound disposed in each of the pits and contacting the side surface of the pit and the convex portion;
A first conductive semiconductor layer on the metal compound and the first semiconductor layer;
An active layer on the first conductive semiconductor layer; And
And a second conductive semiconductor layer on the active layer,
A plurality of protrusions formed on a lower surface of the substrate,
A gap between at least one of the plurality of convex portions and the metal compound,
Wherein the first semiconductor layer includes a thickness greater than a height of the convex portion,
Wherein the first semiconductor layer has a top surface dislocation density lower than a dislocation density. The method according to claim 1,
Wherein the metal compound comprises silicon nitride or silicon oxide,
And a buffer layer between the substrate and the first semiconductor layer,
And a part of the buffer layer is disposed in a part between the metal compound and the convex portion. The method according to claim 1,
The upper surface of the metal compound is disposed lower than the upper surface of the first semiconductor layer,
And a second semiconductor layer between the first semiconductor layer and the first conductivity type semiconductor layer,
And a part of the second semiconductor layer is disposed in the pit. delete delete delete The method according to claim 1,
Wherein a top surface dislocation density of the first semiconductor layer is reduced by 50% or more from a bottom dislocation density. delete delete delete 8. A lighting device comprising the light-emitting element according to any one of claims 1 to 7.

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