KR101783514B1 - 검출 장치, 리소그래피 장치 및 물품의 제조 방법 - Google Patents

검출 장치, 리소그래피 장치 및 물품의 제조 방법 Download PDF

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Publication number
KR101783514B1
KR101783514B1 KR1020140130019A KR20140130019A KR101783514B1 KR 101783514 B1 KR101783514 B1 KR 101783514B1 KR 1020140130019 A KR1020140130019 A KR 1020140130019A KR 20140130019 A KR20140130019 A KR 20140130019A KR 101783514 B1 KR101783514 B1 KR 101783514B1
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KR
South Korea
Prior art keywords
light
substrate
mark
scope
optical member
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KR1020140130019A
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English (en)
Korean (ko)
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KR20150041579A (ko
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아키오 아카마츠
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캐논 가부시끼가이샤
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020140130019A 2013-10-08 2014-09-29 검출 장치, 리소그래피 장치 및 물품의 제조 방법 Active KR101783514B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013211430A JP6228420B2 (ja) 2013-10-08 2013-10-08 検出装置、リソグラフィ装置、および物品の製造方法
JPJP-P-2013-211430 2013-10-08

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020170015116A Division KR101828739B1 (ko) 2013-10-08 2017-02-02 검출 장치, 리소그래피 장치 및 물품의 제조 방법

Publications (2)

Publication Number Publication Date
KR20150041579A KR20150041579A (ko) 2015-04-16
KR101783514B1 true KR101783514B1 (ko) 2017-09-29

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ID=52791741

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KR1020140130019A Active KR101783514B1 (ko) 2013-10-08 2014-09-29 검출 장치, 리소그래피 장치 및 물품의 제조 방법
KR1020170015116A Active KR101828739B1 (ko) 2013-10-08 2017-02-02 검출 장치, 리소그래피 장치 및 물품의 제조 방법

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KR1020170015116A Active KR101828739B1 (ko) 2013-10-08 2017-02-02 검출 장치, 리소그래피 장치 및 물품의 제조 방법

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JP (1) JP6228420B2 (enExample)
KR (2) KR101783514B1 (enExample)
CN (1) CN104516214B (enExample)
TW (1) TWI557517B (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6926596B2 (ja) * 2017-03-31 2021-08-25 ウシオ電機株式会社 露光装置および露光方法
US20220100109A1 (en) * 2018-12-20 2022-03-31 Asml Holding N.V. Apparatus for and method of simultaneously acquiring parallel alignment marks

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040002172A1 (en) 2002-06-26 2004-01-01 Doo-Hoon Goo Methods and apparatus for aligning a wafer in which multiple light beams are used to scan alignment marks
US20120099107A1 (en) 2010-10-25 2012-04-26 Samsung Electronics Co., Ltd. Workpiece Alignment Device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0721586B2 (ja) * 1985-09-30 1995-03-08 株式会社ニコン 像形成光学装置
JPS62262426A (ja) * 1986-05-09 1987-11-14 Canon Inc 露光装置
US5148214A (en) * 1986-05-09 1992-09-15 Canon Kabushiki Kaisha Alignment and exposure apparatus
JP3074579B2 (ja) * 1992-01-31 2000-08-07 キヤノン株式会社 位置ずれ補正方法
US7388663B2 (en) * 2004-10-28 2008-06-17 Asml Netherlands B.V. Optical position assessment apparatus and method
KR20080101865A (ko) * 2006-02-16 2008-11-21 가부시키가이샤 니콘 노광 장치, 노광 방법 및 디바이스 제조 방법
SG182983A1 (en) * 2006-08-31 2012-08-30 Nikon Corp Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
CN101526750B (zh) * 2009-01-13 2011-06-29 上海微电子装备有限公司 用于光刻设备的对准系统及应用其的光刻设备
CN101950132A (zh) * 2010-08-17 2011-01-19 中国科学院光电技术研究所 纳米光刻掩模硅片间隙测量及调平装置
CN102141738B (zh) * 2011-04-02 2012-09-19 中国科学院光电技术研究所 一种用于投影光刻纳米量级自动调焦系统
JP5713961B2 (ja) * 2011-06-21 2015-05-07 キヤノン株式会社 位置検出装置、インプリント装置及び位置検出方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040002172A1 (en) 2002-06-26 2004-01-01 Doo-Hoon Goo Methods and apparatus for aligning a wafer in which multiple light beams are used to scan alignment marks
US20120099107A1 (en) 2010-10-25 2012-04-26 Samsung Electronics Co., Ltd. Workpiece Alignment Device

Also Published As

Publication number Publication date
JP6228420B2 (ja) 2017-11-08
CN104516214B (zh) 2017-04-26
TW201514634A (zh) 2015-04-16
KR20150041579A (ko) 2015-04-16
KR20170016421A (ko) 2017-02-13
KR101828739B1 (ko) 2018-02-12
TWI557517B (zh) 2016-11-11
JP2015076491A (ja) 2015-04-20
CN104516214A (zh) 2015-04-15

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