KR101691889B1 - Wire saw cutting machine - Google Patents

Wire saw cutting machine Download PDF

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Publication number
KR101691889B1
KR101691889B1 KR1020150186857A KR20150186857A KR101691889B1 KR 101691889 B1 KR101691889 B1 KR 101691889B1 KR 1020150186857 A KR1020150186857 A KR 1020150186857A KR 20150186857 A KR20150186857 A KR 20150186857A KR 101691889 B1 KR101691889 B1 KR 101691889B1
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KR
South Korea
Prior art keywords
bracket
roller assembly
guide
saw
wire
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Application number
KR1020150186857A
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Korean (ko)
Inventor
최대용
이양호
Original Assignee
(주) 디에스테크노
최대용
이양호
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Publication of KR101691889B1 publication Critical patent/KR101691889B1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/0007—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00 using saw wires
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/799—Apparatus for disconnecting

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The present invention relates to a cutting machine using a wire saw and includes a main body 10 provided with a front table 11 on which a jig J on which a workpiece P is placed is installed; A roller assembly 20 which is installed on the front table 11 so as to be able to move up and down and includes a plurality of guide rollers rotatably mounted on the front table 11 for rotating the saw wires W for cutting the workpiece P, Wow; A roller assembly lifting and lowering driving part (30) for lifting and lowering the roller assembly (20) on the front table (11); First and second bobbins (40) (50) for feeding and recovering the sawwheel (W) via the roller assembly (20); First and second bobbin rotation driving units 60 and 70 for rotating the first and second bobbins 40 and 50; The first and second guides 40 and 40 are installed between the first bobbin 40 and the roller assembly 20 and between the second bobbin 50 and the roller assembly 20 to guide the feed path of the saw wire W in a three- Portions 80 and 90; The first and second tension applying units 100 and 100 are installed on both sides of the side wall 12 of the front table 11 and are provided with tension to apply the tension to the saw wire W passing through the first and second guide units 80 and 90 ) 110; First and second traverses 120 and 130 for raising and lowering the feeding path position of the saw wire W so that the saw wire W can be wound and unwound evenly on the first and second bobbins 40 and 50; .

Description

{Cutting machine using wire saw}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting machine using a wire saw, and more particularly to a cutting machine using a wire saw that precisely cuts a workpiece made of a hard material such as quartz or stone.

For example, a silicon wafer for manufacturing a semiconductor or a solar cell is manufactured by cutting a workpiece such as an ingot having a purity close to 100% to a thin thickness. As a method of cutting such a workpiece with a thin wafer, a silicon carbide or a boron carbide slurry saw is dropped on a wire wound on a roller, and the wire is transferred while being guided by four bar type guide rollers, Thereby cutting the workpiece. Four wire-type guide rollers are rotatably mounted on a flat plate bracket that is basically erected in a vertical direction, and a roller driving unit for rotating the guide rollers is provided on the rear side of the flat plate bracket. . A prior art related to this is disclosed in Patent Publication No. 10-2012-0055256 under the name of tension control device of wire saw machine.

In the above apparatus, the four guide rollers are extended forward and the roller driving unit is directly fixed to the flat plate bracket. Therefore, the vibrations generated during the operation of the roller driving unit are directly transmitted to the flat plate bracket, Shaped guide roller extending to the front side, the wire saw for cutting is shaken or oscillated, and the machining accuracy of the workpiece is lowered.

SUMMARY OF THE INVENTION The present invention has been made in order to satisfy the above-mentioned needs, and it is an object of the present invention to minimize vibration applied by four guide rollers rotatably supported on a flat plate bracket, So that the machining accuracy of the workpiece can be increased by using the wire saw.

According to an aspect of the present invention, there is provided a cutting machine using a wire saw,
A main body 10 provided with a front table 11 on which a jig J on which a workpiece P is placed is installed; And a plurality of guide rollers installed on the front table 11 so as to be able to move up and down so that the saw wires W for cutting the workpiece P are wound at regular intervals and rotated, 20); A roller assembly lifting and lowering driving part (30) for lifting and lowering the roller assembly (20) on the front table (11); First and second bobbins (40) (50) for feeding and recovering the saw wire (W) via the roller assembly (20); First and second bobbin rotation driving units 60 and 70 for rotating the first and second bobbins 40 and 50; A first bobbin 40 and a roller assembly 20 installed between the first bobbin 40 and the roller assembly 20 and between the second bobbin 50 and the roller assembly 20 to guide the feed path of the saw wire W three- 2 guide sections 80, 90; The first and second guide portions 80 and 90 are provided on both sides of the side wall 12 of the front table 11 and are provided with a first and a second tension applied to the saw wire W passing through the first and second guide portions 80 and 90 100, 110; The first and second traverses 120 and 130 for raising and lowering the feeding path position of the saw wire W so that the saw wire W can be wound and unwound uniformly on the first and second bobbins 40 and 50 A cutting machine using a wire saw comprising:
The roller assembly 20 includes a flat plate bracket 21 mounted on the front table 11 so as to be able to move up and down; A pair of first and second guide rollers 22 and 23 rotatably installed on upper and lower sides of the flat plate bracket 21; A cubic bracket 24 provided on the rear side of the flat plate bracket 21 and having a hexahedron shape; A bearing bracket 25 extending to the rear side of the flat plate bracket 21 and supporting a rotation axis of the first and second guide rollers 22 and 23; First and second pulleys 26 and 26 'installed on the rotating shafts of the second guide rollers 23 on the rear side of the bearing bracket 25; A drive motor 27 supported on the rear side of the cubic bracket 24 and provided with a drive pulley 27a; First and second belts 28 and 28 'connecting the drive pulley 27a and the first and second pulleys 26 and 26', respectively; And second and third tension adjusting portions (29, 29 ') for independently controlling the tension of the first belt (28) and the second belt (28');
The first and second tension adjusting portions 29 and 29 include elevating brackets 29a supported by the cubic bracket blade 24a formed on the rear side of the cubic bracket 24 so as to be able to move up and down, A tension roller 29b rotatably supported on the first and second belts 28 and 28 'and supporting the first and second belts 28 and 28' inside the first and second belts 28 and 28 ' And a lifting / lowering bolt (29c) installed between the bracket blade (24a) and the lifting bracket (28a) and lifting the lifting bracket (29a)
The assembly lifting and lowering driving unit 30 includes a pair of fixing blocks 31a and 31b for fixing and supporting the flat plate bracket 21 and formed with sliding grooves and fixed vertically on the front table 11 And a pair of guide rails 32a and 32b slidably supporting each of the fixed blocks 31a and 31b, wherein the cross section of the guide rails 32a and 32b is rectangular;
The first and second tension applying units 100 and 110 include first and second levers 101 and 111 rotatably and axially coupled to the small portion of the side wall 12, And a tension roller 102 (112) which is provided at the end of the first and second guide portions (101) 111 and presses the wire saw W passing through the first and second guide portions 80 and 90 by its own weight .

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According to the present invention, since the cubic bracket is used, which is separately connected to the rear side of the flat plate bracket, the vibrations generated in the driving motor can be prevented from being directly transmitted to the flat plate bracket, , It is possible to prevent vibration from being generated in the first and second guide rollers while the two guide rollers are rotated.

In addition, by adopting the first and second tension adjusting parts independently controlling the tension of the first and second belts, the tension of the first and second belts can be adjusted between the driving pulley and the first and second pulleys, Vibration and vibrations generated from the first and second belts can be further minimized to be applied to the first and second guide rollers, and the frictional force between the drive pulley, the first and second pulleys and the first and second belts can be optimized . Accordingly, even if a large resistance is applied to the wire saw in the process of rotating the first and second pulleys in opposite directions or cutting the workpiece, it is possible to prevent the first and second pulleys from being idle with respect to the first and second belts And the machining accuracy of the workpiece can be further enhanced.

By using the first and second guide portions and the first and second traverses, it is possible to smoothly supply or recover the saw wire (W) reaching hundreds of meters without twisting the first and second bobbins (40) and (50).

1 is a front view of a cutting machine using a wire saw according to the present invention,
Fig. 2 is a plan view of the cutting machine using the wire saw shown in Fig. 1,
3 is a top plan view of the roller assembly of FIG. 2,
Figure 4 is a rear view of the roller assembly of Figure 3,
Figure 5 is a side view of the roller assembly of Figure 4,
FIG. 6 is a diagram for explaining the configuration by extracting the roller assembly lifting and guiding portion of FIG. 1;
Fig. 7 is a side view of the lifting and lowering drive portion of Fig. 5,
FIG. 8 is a view for explaining the configuration of the first and second bobbin and first and second bobbin rotation driving units of FIG. 2,
FIG. 9 is a view for explaining the first and second guide portions and the first and second tension applying portions of FIGS. 1 and 2;
FIG. 10 is an enlarged view of the first and second direction changing roller assemblies of the first and second guide portions of FIG. 9,
Fig. 11 is a diagram for explaining a configuration by extracting the traverse of Fig. 1 and Fig. 2; Fig.
12 is a view for explaining that the traverse of Fig. 11 is provided inside the side wall. Fig.

Hereinafter, a cutting machine using a wire saw according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a front view of a cutting machine using a wire saw according to the present invention, and FIG. 2 is a plan view of a cutting machine using the wire saw of FIG.

As shown in the drawing, a cutting machine using wire saw according to the present invention includes a main body 10 having a front table 11 on which a jig J on which a workpiece P is placed is installed; A roller assembly 20 which is installed on the front table 11 so as to be able to move up and down and includes a plurality of guide rollers rotatably mounted on the front table 11 for rotating the saw wires W for cutting the workpiece P, Wow; A roller assembly lifting and lowering driving part (30) for lifting and lowering the roller assembly (20) on the front table (11); First and second bobbins (40) (50) for feeding and recovering the sawwheel (W) via the roller assembly (20); First and second bobbin rotation driving units 60 and 70 for rotating the first and second bobbins 40 and 50; The first and second guides 40 and 40 are installed between the first bobbin 40 and the roller assembly 20 and between the second bobbin 50 and the roller assembly 20 to guide the feed path of the saw wire W in a three- Portions 80 and 90; The first and second tension applying units 100 and 100 are installed on both sides of the side wall 12 of the front table 11 and are provided with tension to apply the tension to the saw wire W passing through the first and second guide units 80 and 90 ) 110; First and second traverses 120 and 130 for raising and lowering the feeding path position of the saw wire W so that the saw wire W can be wound and unwound evenly on the first and second bobbins 40 and 50; .

The main body 10 includes a front table 11 on which the jig J is installed, a side wall 12 extending to the top side, a rear table 13 located on the rear side, And a leveler 14.

FIG. 3 is a top plan view of the roller assembly of FIG. 2, FIG. 4 is a rear view of the roller assembly of FIG. 3, and FIG. 5 is a side view of the roller assembly of FIG.

The roller assembly 20 is for cutting a workpiece P, for example, a silicon ingot, a stoneware or the like, which is seated on the jig J of the front table 11. [ The roller assembly 20 includes, as shown in the figure, a flat plate bracket 21 which is installed on the front table 11 so as to be able to move up and down; A pair of first guide rollers 22 rotatably installed on the upper side of the flat plate bracket 21; A pair of second guide rollers 23 rotatably installed on the lower side of the flat plate bracket 21; A cubic bracket 24 provided on the rear side of the flat plate bracket 21 and having a hexahedron shape; A bearing bracket 25 extending to the rear side of the flat plate bracket 21 and supporting the rotation axis of the first and second guide rollers 22 and 23; First and second pulleys 26 and 26 'installed on the rotating shafts of the second guide rollers 23 on the rear side of the bearing bracket 25; A drive motor 27 supported on the rear side of the cubic bracket 24 and provided with a drive pulley 27a; First and second belts 28 and 28 'connecting the drive pulley 27a and the first and second pulleys 26 and 26'; And first and second tension adjusting portions 29 and 29 'for adjusting the tension of the first and second belts 28 and 28.

The first guide roller 22 and the second guide roller 23 have a rod shape as a whole and are arranged in a rectangular shape on the upper and lower sides of the flat plate bracket 21. As shown in FIG. 3, first and second guide grooves 22a and 23a are formed on the surfaces of the first guide roller 22 and the second guide roller 23 at regular intervals, The wire saw W is transported while being wound around the four first and second guide grooves 22a and 23a as shown in Fig. At this time, the number of the wound wire pieces is determined according to the number of the first and second guide grooves 22a, 23a, and wound by 10 to 30 lines. Here, the saw wire W passing through the second guide rollers 23a and 23b cuts the workpiece P.

The cubic bracket 24 is formed independently of the flat plate bracket 21 and installed on the rear side of the flat plate bracket 21, and has a generally cubic shape. The vibration generated in the drive motor 27 is absorbed by the cubic bracket 24 and vibration applied to the flat plate bracket 21 is minimized do.

The bearing bracket 25 is fixed to the upper rear side of the flat plate bracket 21 and supports the rotation axes of the first guide roller 22 and the second guide roller 23. At this time, the width D1 of the bearing bracket 25 is large enough to substantially match the width D2 of the first and second guide rollers 22 and 23, Even if a force biased to the first and second guide rollers 22 and 23 is continuously applied by the wire saw W because the rotating shaft is supported by the bearing bracket 25 of the first width D1, The rollers 22 and 23 can be prevented from generating vibration due to the biased force.

The first and second pulleys 26 and 26 'are axially coupled to the rotating shaft of the second guide roller 23 from the rear side of the bearing bracket 25, respectively.

The first and second belts 28 and 28 'are connected to the drive pulley 27a of the drive motor 27 which is supported by the cubic bracket 24 at the rear side of the flat plate bracket 21, And simultaneously rotates the first and second pulleys 26 and 26 'when the drive pulley 27a is rotated.

The first tension adjuster 29 adjusts the tension of the first belt 28 and the second tension adjuster 29 'adjusts the tension of the second belt 28'. The first and second tension adjusting portions 29 and 29 'are provided with a lifting bracket 29a supported by the cubic bracket blade 24a formed on the rear side of the cubic bracket 24 so as to be able to ascend and descend, A tension roller 29b which rotatably supports the first and second belts 28 and 28 'inside the first and second belts 28 and 28' and a cushion bracket blade 24a And a lift control bolt 29c which is installed between the lift bracket 29a and the lift bracket 29a. The first and second tension adjusting portions 29 and 29 'rotate the lifting and lowering adjusting bolt 29c in the forward and reverse directions to move the lifting and lowering bracket 29a up and down, The roller 29b adjusts the tension of the first and second belts 28 and 28 'by lifting the first and second belts 28 and 28'.

The first and second tension adjusting portions 29 and 29 'can independently adjust the tension of the first belt 28 and the second belt 28'. The vibration generated in the drive motor 27 and the vibrations generated in the first and second belts 28 and 28 'can be minimized to be applied to the first and second guide rollers 22 and 23 At the same time, the frictional force between the drive pulley 27a and the first and second pulleys 26, 26 'and the first and second belts 28, 28'

For example, in the hot season, as the first and second belts 28 and 28 'are stretched, a large amount of vibration is generated in the first and second belts 28 and 28' The second and third pulleys 26 and 26 'have a smaller frictional force between the first and second pulleys 26 and 26. In this case, the first and second tension adjusting parts 29 and 29' So that the friction generated between the drive pulley 27a and the first and second pulleys 26 and 26 'is optimized. Even if a large resistance is applied to the wire saw W in the process of rotating the first and second pulleys 26 and 26 'in opposite directions or cutting the workpiece P, the first and second pulleys 26 and 26' ) 26 'can be prevented from being idle with respect to the first and second belts 28, 28', and the machining accuracy of the workpiece can be increased

When the drive motor 27 rotates the drive pulley 27a in the forward and reverse directions by the structure of the roller assembly 20 described above, the first and second pulleys 28 and 28 ' The first and second guide rollers 26 and 26 are rotated together so that the saw wire W is conveyed while being wound around the first and second guide rollers 22 and 23 in a rectangular shape, So that the workpiece P on which the saw wire W is mounted on the jig J is cut.

FIG. 6 is a view for explaining the configuration of the roller assembly lifting and driving portion of FIG. 1, and FIG. 7 is a side view of the lifting and lowering driving portion of FIG.

The assembly lifting and lowering driving portion 30 is for lifting the roller assembly 20 so that the workpiece P seated on the jig J of the front table 11 can be cut. The assembly elevating and lowering driving unit 30 includes a pair of fixing blocks 31a and 31b for fixing and supporting the flat plate bracket 21 and formed with a sliding groove and a pair of fixing blocks 31a and 31b fixed on the front table 11 in a vertical direction, A pair of guide rails 32a and 32b for slidably supporting the respective flat plates 31a and 31b and a pair of guide rails 32a and 32b supported vertically on the front table 11 for screwing and lifting the flat plate bracket 21 33b, screw sprockets 34a, 34b connected to the rotating shafts of the screws 33a, 33b, The guide rails 32a and 32b have a rectangular cross section and are fixed to a pair of fixed sprockets 34a and 34b. Since the blocks 31a and 31b are fixed to the flat plate bracket 21, the pair of the fixing blocks 31a and 31b is fogged up and down along the guide rails 32a and 32b, It is self-evident.

The screws 33a and 33b are screwed to the fixing blocks 31a and 31b by using a pair of screws and the screw driving unit 35 is connected to the driving sprocket of the gear adjusting motor 35a. And chains 35c and 35d for connecting the kit 35b and the pair of screw sprockets 34a and 34b. However, the screw may be formed by fixing a screw block to be screwed to the center of the flat plate bracket 21, and the screw driving unit may be directly connected to the screw located at the center of the flat plate bracket 21 with a chain to be.

The screw sprocket 34a and 34b connected to the drive sprocket 35a and the chains 35c and 35d when the screw sprocket 35 rotates the sprocket 35a in the forward and reverse directions, The screws 33a and 33b axially coupled to the screw sprockets 34a and 34b are rotated in the normal and reverse directions and the fixing blocks 31a and 31b fixed to both sides of the flat plate bracket 21 are raised and lowered . The lift position of the saw wire W can be varied to the side of the workpiece P on the front table 11.

The guide rails 32a and 32b are provided on both sides of the flat plate bracket 21 so that the roller assemblies 20 can be lifted up and down precisely. The screws 33a and 33b receive the driving force by the chains 35c and 34b which are prevented from slipping.

FIG. 8 is a view for explaining the configuration of the first and second bobbin and first and second bobbin rotation driving units of FIG. 2; FIG.

The first and second bobbins 40 and 50 feed or wind the saw wire W passing through the first and second guide rollers 22 and 23 of the roller assembly 20. The first and second bobbins 40 and 50 are installed on one side and the other side of the rear table 13, as shown in FIGS. The first and second bobbins 40 and 50 are wound around the other bobbin when the saw wire W is supplied from one bobbin. At this time, the saw wire W wound on the first and second bobbins 40 and 50 is very thin to a length of about 100 to 200 .mu.m and a length of about 400 to 500 m.

The first and second bobbin rotation driving units 60 and 70 are installed on the rear table 13 to rotate the first and second bobbins 40 and 50 and are implemented as a geared motor.

FIG. 9 is a view for explaining the first and second guide portions and the first and second tension applying portions of FIGS. 1 and 2. FIG. 10 is a cross- Fig.

The first and second guide portions 80 and 90 are disposed on the front and rear sides of the first and second bobbins 40 and 50 of the rear table 13 in such a manner that the wire saw W passing through the roller assembly 20 of the front table 11, To guide the movement path to the moving path. The first guide portion 80 is disposed on one side of the side wall 12 of the main body 10 and the second guide portion 90 is disposed on the other side of the side wall 12 of the main body 10.

The first guide portion 80 includes a plurality of first sub guide rollers 81 provided at one side of the side wall 12, a first extension rail 82 extending to the front side of the front table 11, And a first direction changing roller assembly 83 which is installed on the extension rail 82 and changes and guides the feeding direction of the wire saw W from the side wall 12 to the front table 11 side.

The first sub guide rollers 81 are provided with an appropriate number so that the wire saw W can be smoothly conveyed from one side of the side wall 12, and four of them are illustrated in the present embodiment.

The first direction changing roller assembly 83 includes a first bracket 83a capable of being displaced in the first extension rail 82 and a first bracket blade 83b extending to the upper side of the first bracket 83a, A first horizontal guide roller 83c rotatably mounted on the first bracket 83a in a horizontal direction and a first vertical guide roller 83d rotatably mounted on the first bracket blade 83b in a vertical direction, . With this structure, since the rotation direction of the first horizontal guide roller 83c and the first vertical guide roller 83d is at right angles, the movement path of the wire saw W can be changed to a perpendicular direction.

The second guide portion 90 includes a plurality of second sub guide rollers 91 provided on the other side of the side wall 12, a second extension rail 92 extending to the other front side of the front table 11, And a second direction changing roller assembly 93 installed on the extension rail 92 for changing and guiding the feeding direction of the wire saw W from the side wall 12 side to the front table 11 side.

The second sub-guide rollers 91 are provided with an appropriate number so that the wire saws W can be smoothly transported from the other side of the side wall 12, and four are provided in the present embodiment.

The second direction changing roller assembly 93 includes a second bracket 93a capable of changing its position in the second extension rail 92 and a second bracket blade 93b extending to the upper side of the second bracket 93a, A second horizontal guide roller 93c rotatably mounted on the second bracket 93a in the horizontal direction and a second vertical guide roller 93d rotatably mounted on the second bracket blade 93b in the vertical direction, . With this structure, since the rotation directions of the second horizontal guide roller 93c and the second vertical guide roller 93d are at right angles, the movement path of the wire saw W can be changed to the perpendicular direction.

The first and second tension applying units 100 and 110 are installed on both sides of the side wall 12 and apply tension to the saw wire W passing through the first and second guide units 80 and 90, To be transported in a tight state. The first and second tension applying units 100 and 110 include first and second levers 101 and 111 rotatably and axially coupled to the small portion of the side wall 12, And a tension roller 102 (112) which is provided at the end of the first guide portion (111) and presses the wire saw (W) passing through the first and second guide portions (80, 90) by its own weight.

Fig. 11 is a view for explaining the construction extracted from the traverse of Figs. 1 and 2, and Fig. 12 is a view for explaining that the traverse of Fig. 11 is provided inside the side wall.

The first and second traverses 120 and 130 move up and down the position of the saw wire W so that the saw wire W can be wound and unwound evenly on the first and second bobbins 40 and 50, To prevent twisting phenomenon. The first and second traverses 120 and 130 include first and second upper bracket blades 121 and 131 installed on the upper side inside the side wall 12 of the front table 11, First and second lower bracket blades 122 and 132 installed on the lower side of the bracket blades 121 and 131 and first and second lower bracket blades 121 and 131, First and second sub guide rails 123 and 133 installed between the first and second sub guide rails 123 and 133 and the first and second sub guide rails 123 and 133 installed between the first and second sub guide rails 123 and 133, First and second subscrews 125 and 135 screwed to the first and second lift blocks 124 and 134 and the first and second lift blocks 124 and 134, And a vertical groove 12a formed in the side wall 12 of the main body, which is supported by the first and second lift blocks 124 and 134. The first and second servo motors 126, First and second sub tables 127 and 137 which are located outside the side wall 12 through the first and second sub tables 127 and 137 and first and second bobbins 40 and 50 (W) to the wire And a first and second traverse roller assemblies 128 and 138 configured with rollers 128a and 138a.

The first and second servomotors 126 and 136 are connected to the first and second subscrews 125 and 125 so that the first and second bobbins 40 and 50 supply or withdraw the wire saw W, The first and second sub-tables 127 and 127 are supported by the first and second lift blocks 124 and 134, respectively, (W) via the first and second traverse roller assemblies (128, 138) on the first and second traverse roller assemblies (137). Accordingly, the saw wire W can be wound or unwound evenly on the first and second bobbins 40 and 50.

As described above, according to the present invention, the saw wire W loosened or wound by the first and second bobbins 40 and 50 is passed through the first and second traverses 120 and 130, The workpieces P placed on the jig F of the front table 13 are cut while the workpieces W are wound on the first and second guide rollers 22 and 23 The driving motor 27 of the roller assembly 20 changes the direction of rotation of the second guide roller 23 at an appropriate time point so that the saw wire can be repeatedly recycled.

As described above, according to the present invention, cubic bracket 24, which is in the form of a hexahedron separately coupled to the rear of the flat plate bracket 21, is used to prevent the vibration generated in the drive motor 27 from being directly transmitted to the flat plate bracket 21 So that it is possible to prevent the first and second guide rollers 22 and 23 from vibrating during the rotation of the first and second guide rollers 22 and 23 having the rod shape . Accordingly, it is possible to prevent the wire saw which is wound on the first and second guide rollers from being shaken or from being vibrated, thereby increasing the machining accuracy of the workpiece.

In addition, by employing the first and second tension adjusting portions 29 and 29 'for independently controlling the tension of the first belt 28 and the second belt 28', the driving pulley 27a, The tension of the first and second belts 28 and 28 'can be adjusted between the first and second belts 28 and 28' The driving pulley 27a and the first and second pulleys 26 and 26 'and the first and second pulleys 26 and 26' The frictional force between the first and second belts 28, 28 'can be optimally adjusted. Even if a large resistance is applied to the wire saw W in the process of rotating the first and second pulleys 26 and 26 'in opposite directions or cutting the workpiece P, the first and second pulleys 26 and 26' Can be prevented from being idle with respect to the first and second belts 28 and 28 ', and the machining accuracy of the workpiece can be further enhanced.

By using the first and second guide portions 80 and 90 and the first and second traverses 120 and 130, the saw wire W reaching hundreds of meters can be guided to the first and second bobbins 40 and 50 It can be smoothly supplied or recovered without being twisted.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.

10 ... main body 11 ... front table
12 ... side wall 13 ... rear table
14 ... Leveler 20 ... Roller assembly
21 ... plate bracket 22, 23 .... first and second guide rollers
22a, 23a .... first and second guide grooves 24 ... cubic bracket
24a ... Kubik bracket wing 25 ... bearing bracket
26, 26 '... first and second pulleys 27 ... drive motor
28, 28 '... first and second belts 29, 29' ... first and second tension adjusting parts
29a ... lifting bracket 29b ... tension roller
29c ... ascending / descending bolt 30 ... roller assembly lifting /
31a, 31b ... fixed blocks 32a, 32b ... guide rails
33a, 33b ... Screws 34a, 34b ... Screw sprackets
35 ... screw driver 40, 50 ... 1st and 2nd bobbins
60, 70 ... first and second bobbin rotation driving portions 80, 90 ... first and second guide portions
81, 91 .. First and second sub guide rollers 82, 92 ... First and second extension rails
83, 93 ... First and second direction changing roller assemblies 83a, 93a ... First and second brackets
83b, 93b ... First and second bracket blades 83c, 93c ... First and second horizontal guide rollers
83d, 93d ... first and second vertical guide rollers 100, 110 ... first and second tension applying members
101, 111 ... First and second levers 102, 112 ... First and second tension rollers
120, 130 ... 1st and 2nd traverses 121, 131 ... 1st and 2nd upper bracket blades
122, 132 ... first and second lower bracket wings 123, 133 ... first and second sub guide rails
124, 134 ... First and second lift blocks 125, 135 ... First and second subscrews
126, 136 ... First and second servomotors 127, 137 ... First and second sub-cables
128, 138 ... 1st and 2nd traverse roller assemblies

Claims (5)

A main body 10 provided with a front table 11 on which a jig J on which a workpiece P is placed is installed; And a plurality of guide rollers installed on the front table 11 so as to be able to move up and down so that the saw wires W for cutting the workpiece P are wound at regular intervals and rotated, 20); A roller assembly lifting and lowering driving part (30) for lifting and lowering the roller assembly (20) on the front table (11); First and second bobbins (40) (50) for feeding and recovering the saw wire (W) via the roller assembly (20); First and second bobbin rotation driving units 60 and 70 for rotating the first and second bobbins 40 and 50; A first bobbin 40 and a roller assembly 20 installed between the first bobbin 40 and the roller assembly 20 and between the second bobbin 50 and the roller assembly 20 to guide the feed path of the saw wire W three- 2 guide sections 80, 90; The first and second guide portions 80 and 90 are provided on both sides of the side wall 12 of the front table 11 and are provided with a first and a second tension applied to the saw wire W passing through the first and second guide portions 80 and 90 100, 110; The first and second traverses 120 and 130 for raising and lowering the feeding path position of the saw wire W so that the saw wire W can be wound and unwound uniformly on the first and second bobbins 40 and 50 A cutting machine using a wire saw comprising:
The roller assembly 20 includes a flat plate bracket 21 mounted on the front table 11 so as to be able to move up and down; A pair of first and second guide rollers 22 and 23 rotatably installed on upper and lower sides of the flat plate bracket 21; A cubic bracket 24 provided on the rear side of the flat plate bracket 21 and having a hexahedron shape; A bearing bracket 25 extending to the rear side of the flat plate bracket 21 and supporting a rotation axis of the first and second guide rollers 22 and 23; First and second pulleys 26 and 26 'installed on the rotating shafts of the second guide rollers 23 on the rear side of the bearing bracket 25; A drive motor 27 supported on the rear side of the cubic bracket 24 and provided with a drive pulley 27a; First and second belts 28 and 28 'connecting the drive pulley 27a and the first and second pulleys 26 and 26', respectively; And second and third tension adjusting portions (29, 29 ') for independently controlling the tension of the first belt (28) and the second belt (28');
The first and second tension adjusting portions 29 and 29 include elevating brackets 29a supported by the cubic bracket blade 24a formed on the rear side of the cubic bracket 24 so as to be able to move up and down, A tension roller 29b rotatably supported on the first and second belts 28 and 28 'and supporting the first and second belts 28 and 28' inside the first and second belts 28 and 28 ' And a lifting / lowering bolt (29c) installed between the bracket blade (24a) and the lifting bracket (28a) and lifting the lifting bracket (29a)
The roller assembly lifting and lowering driving unit 30 includes a pair of fixing blocks 31a and 31b for fixing and supporting the flat plate bracket 21 and formed with sliding grooves and a pair of fixing blocks 31a and 31b fixed on the front table 11 in a vertical direction And a pair of guide rails 32a and 32b slidably supporting each of the fixed blocks 31a and 31b, wherein the cross section of the guide rails 32a and 32b is rectangular;
The first and second tension applying units 100 and 110 include first and second levers 101 and 111 rotatably and axially coupled to the small portion of the side wall 12, And a tension roller 102 (112) which is provided at the end of the first and second guide portions (101) 111 and presses the wire saw W passing through the first and second guide portions 80 and 90 by its own weight Features cutting machine using wire saw. delete delete delete delete
KR1020150186857A 2015-12-17 2015-12-24 Wire saw cutting machine KR101691889B1 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101918176B1 (en) * 2017-03-27 2018-11-13 김학만 A Wire saw machine that cuts two ingots into a rectangular shape by simultaneous cutting method
KR102005676B1 (en) * 2018-06-05 2019-07-30 두산중공업 주식회사 Nozzle cutting device in reactor vessel
CN117415619A (en) * 2023-12-19 2024-01-19 山东茂盛管业有限公司 Plastic sleeve steel heat-insulating pipe end sawing and planing integrated machine and sawing and planing method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH053710U (en) * 1991-07-02 1993-01-22 三菱重工業株式会社 Tension pulley support mechanism
JPH1086142A (en) * 1996-09-12 1998-04-07 Nippei Toyama Corp Working method and apparatus by wire-saw
KR100831747B1 (en) * 2006-11-10 2008-05-23 삼정엔지니어링 (주) Wire saw machine and work machining method using thereof
JP2012101310A (en) * 2010-11-09 2012-05-31 Yasunaga Corp Wire saw device, and method for manufacturing wafer using the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH053710U (en) * 1991-07-02 1993-01-22 三菱重工業株式会社 Tension pulley support mechanism
JPH1086142A (en) * 1996-09-12 1998-04-07 Nippei Toyama Corp Working method and apparatus by wire-saw
KR100831747B1 (en) * 2006-11-10 2008-05-23 삼정엔지니어링 (주) Wire saw machine and work machining method using thereof
JP2012101310A (en) * 2010-11-09 2012-05-31 Yasunaga Corp Wire saw device, and method for manufacturing wafer using the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101918176B1 (en) * 2017-03-27 2018-11-13 김학만 A Wire saw machine that cuts two ingots into a rectangular shape by simultaneous cutting method
KR102005676B1 (en) * 2018-06-05 2019-07-30 두산중공업 주식회사 Nozzle cutting device in reactor vessel
CN117415619A (en) * 2023-12-19 2024-01-19 山东茂盛管业有限公司 Plastic sleeve steel heat-insulating pipe end sawing and planing integrated machine and sawing and planing method
CN117415619B (en) * 2023-12-19 2024-02-13 山东茂盛管业有限公司 Plastic sleeve steel heat-insulating pipe end sawing and planing integrated machine and sawing and planing method

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