KR101691889B1 - Wire saw cutting machine - Google Patents
Wire saw cutting machine Download PDFInfo
- Publication number
- KR101691889B1 KR101691889B1 KR1020150186857A KR20150186857A KR101691889B1 KR 101691889 B1 KR101691889 B1 KR 101691889B1 KR 1020150186857 A KR1020150186857 A KR 1020150186857A KR 20150186857 A KR20150186857 A KR 20150186857A KR 101691889 B1 KR101691889 B1 KR 101691889B1
- Authority
- KR
- South Korea
- Prior art keywords
- bracket
- roller assembly
- guide
- saw
- wire
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
- B23D57/0007—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00 using saw wires
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/799—Apparatus for disconnecting
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention relates to a cutting machine using a wire saw and includes a main body 10 provided with a front table 11 on which a jig J on which a workpiece P is placed is installed; A roller assembly 20 which is installed on the front table 11 so as to be able to move up and down and includes a plurality of guide rollers rotatably mounted on the front table 11 for rotating the saw wires W for cutting the workpiece P, Wow; A roller assembly lifting and lowering driving part (30) for lifting and lowering the roller assembly (20) on the front table (11); First and second bobbins (40) (50) for feeding and recovering the sawwheel (W) via the roller assembly (20); First and second bobbin rotation driving units 60 and 70 for rotating the first and second bobbins 40 and 50; The first and second guides 40 and 40 are installed between the first bobbin 40 and the roller assembly 20 and between the second bobbin 50 and the roller assembly 20 to guide the feed path of the saw wire W in a three- Portions 80 and 90; The first and second tension applying units 100 and 100 are installed on both sides of the side wall 12 of the front table 11 and are provided with tension to apply the tension to the saw wire W passing through the first and second guide units 80 and 90 ) 110; First and second traverses 120 and 130 for raising and lowering the feeding path position of the saw wire W so that the saw wire W can be wound and unwound evenly on the first and second bobbins 40 and 50; .
Description
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting machine using a wire saw, and more particularly to a cutting machine using a wire saw that precisely cuts a workpiece made of a hard material such as quartz or stone.
For example, a silicon wafer for manufacturing a semiconductor or a solar cell is manufactured by cutting a workpiece such as an ingot having a purity close to 100% to a thin thickness. As a method of cutting such a workpiece with a thin wafer, a silicon carbide or a boron carbide slurry saw is dropped on a wire wound on a roller, and the wire is transferred while being guided by four bar type guide rollers, Thereby cutting the workpiece. Four wire-type guide rollers are rotatably mounted on a flat plate bracket that is basically erected in a vertical direction, and a roller driving unit for rotating the guide rollers is provided on the rear side of the flat plate bracket. . A prior art related to this is disclosed in Patent Publication No. 10-2012-0055256 under the name of tension control device of wire saw machine.
In the above apparatus, the four guide rollers are extended forward and the roller driving unit is directly fixed to the flat plate bracket. Therefore, the vibrations generated during the operation of the roller driving unit are directly transmitted to the flat plate bracket, Shaped guide roller extending to the front side, the wire saw for cutting is shaken or oscillated, and the machining accuracy of the workpiece is lowered.
SUMMARY OF THE INVENTION The present invention has been made in order to satisfy the above-mentioned needs, and it is an object of the present invention to minimize vibration applied by four guide rollers rotatably supported on a flat plate bracket, So that the machining accuracy of the workpiece can be increased by using the wire saw.
According to an aspect of the present invention, there is provided a cutting machine using a wire saw,
A
The
The first and second
The assembly lifting and lowering
The first and second
delete
delete
delete
delete
According to the present invention, since the cubic bracket is used, which is separately connected to the rear side of the flat plate bracket, the vibrations generated in the driving motor can be prevented from being directly transmitted to the flat plate bracket, , It is possible to prevent vibration from being generated in the first and second guide rollers while the two guide rollers are rotated.
In addition, by adopting the first and second tension adjusting parts independently controlling the tension of the first and second belts, the tension of the first and second belts can be adjusted between the driving pulley and the first and second pulleys, Vibration and vibrations generated from the first and second belts can be further minimized to be applied to the first and second guide rollers, and the frictional force between the drive pulley, the first and second pulleys and the first and second belts can be optimized . Accordingly, even if a large resistance is applied to the wire saw in the process of rotating the first and second pulleys in opposite directions or cutting the workpiece, it is possible to prevent the first and second pulleys from being idle with respect to the first and second belts And the machining accuracy of the workpiece can be further enhanced.
By using the first and second guide portions and the first and second traverses, it is possible to smoothly supply or recover the saw wire (W) reaching hundreds of meters without twisting the first and second bobbins (40) and (50).
1 is a front view of a cutting machine using a wire saw according to the present invention,
Fig. 2 is a plan view of the cutting machine using the wire saw shown in Fig. 1,
3 is a top plan view of the roller assembly of FIG. 2,
Figure 4 is a rear view of the roller assembly of Figure 3,
Figure 5 is a side view of the roller assembly of Figure 4,
FIG. 6 is a diagram for explaining the configuration by extracting the roller assembly lifting and guiding portion of FIG. 1;
Fig. 7 is a side view of the lifting and lowering drive portion of Fig. 5,
FIG. 8 is a view for explaining the configuration of the first and second bobbin and first and second bobbin rotation driving units of FIG. 2,
FIG. 9 is a view for explaining the first and second guide portions and the first and second tension applying portions of FIGS. 1 and 2;
FIG. 10 is an enlarged view of the first and second direction changing roller assemblies of the first and second guide portions of FIG. 9,
Fig. 11 is a diagram for explaining a configuration by extracting the traverse of Fig. 1 and Fig. 2; Fig.
12 is a view for explaining that the traverse of Fig. 11 is provided inside the side wall. Fig.
Hereinafter, a cutting machine using a wire saw according to the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a front view of a cutting machine using a wire saw according to the present invention, and FIG. 2 is a plan view of a cutting machine using the wire saw of FIG.
As shown in the drawing, a cutting machine using wire saw according to the present invention includes a
The
FIG. 3 is a top plan view of the roller assembly of FIG. 2, FIG. 4 is a rear view of the roller assembly of FIG. 3, and FIG. 5 is a side view of the roller assembly of FIG.
The
The
The
The
The first and
The first and
The first tension adjuster 29 adjusts the tension of the
The first and second
For example, in the hot season, as the first and
When the
FIG. 6 is a view for explaining the configuration of the roller assembly lifting and driving portion of FIG. 1, and FIG. 7 is a side view of the lifting and lowering driving portion of FIG.
The assembly lifting and lowering
The
The
The guide rails 32a and 32b are provided on both sides of the
FIG. 8 is a view for explaining the configuration of the first and second bobbin and first and second bobbin rotation driving units of FIG. 2; FIG.
The first and
The first and second bobbin
FIG. 9 is a view for explaining the first and second guide portions and the first and second tension applying portions of FIGS. 1 and 2. FIG. 10 is a cross- Fig.
The first and
The
The first
The first direction changing
The
The second
The second direction changing
The first and second
Fig. 11 is a view for explaining the construction extracted from the traverse of Figs. 1 and 2, and Fig. 12 is a view for explaining that the traverse of Fig. 11 is provided inside the side wall.
The first and
The first and
As described above, according to the present invention, the saw wire W loosened or wound by the first and
As described above, according to the present invention,
In addition, by employing the first and second
By using the first and
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.
10 ...
12 ...
14 ...
21 ...
22a, 23a .... first and
24a ...
26, 26 '... first and
28, 28 '... first and
29a ... lifting
29c ... ascending / descending
31a, 31b ... fixed
33a, 33b ...
35 ...
60, 70 ... first and second bobbin
81, 91 .. First and second
83, 93 ... First and second direction changing
83b, 93b ... First and
83d, 93d ... first and second
101, 111 ... First and
120, 130 ... 1st and
122, 132 ... first and second
124, 134 ... First and second lift blocks 125, 135 ... First and second subscrews
126, 136 ... First and
128, 138 ... 1st and 2nd traverse roller assemblies
Claims (5)
The roller assembly 20 includes a flat plate bracket 21 mounted on the front table 11 so as to be able to move up and down; A pair of first and second guide rollers 22 and 23 rotatably installed on upper and lower sides of the flat plate bracket 21; A cubic bracket 24 provided on the rear side of the flat plate bracket 21 and having a hexahedron shape; A bearing bracket 25 extending to the rear side of the flat plate bracket 21 and supporting a rotation axis of the first and second guide rollers 22 and 23; First and second pulleys 26 and 26 'installed on the rotating shafts of the second guide rollers 23 on the rear side of the bearing bracket 25; A drive motor 27 supported on the rear side of the cubic bracket 24 and provided with a drive pulley 27a; First and second belts 28 and 28 'connecting the drive pulley 27a and the first and second pulleys 26 and 26', respectively; And second and third tension adjusting portions (29, 29 ') for independently controlling the tension of the first belt (28) and the second belt (28');
The first and second tension adjusting portions 29 and 29 include elevating brackets 29a supported by the cubic bracket blade 24a formed on the rear side of the cubic bracket 24 so as to be able to move up and down, A tension roller 29b rotatably supported on the first and second belts 28 and 28 'and supporting the first and second belts 28 and 28' inside the first and second belts 28 and 28 ' And a lifting / lowering bolt (29c) installed between the bracket blade (24a) and the lifting bracket (28a) and lifting the lifting bracket (29a)
The roller assembly lifting and lowering driving unit 30 includes a pair of fixing blocks 31a and 31b for fixing and supporting the flat plate bracket 21 and formed with sliding grooves and a pair of fixing blocks 31a and 31b fixed on the front table 11 in a vertical direction And a pair of guide rails 32a and 32b slidably supporting each of the fixed blocks 31a and 31b, wherein the cross section of the guide rails 32a and 32b is rectangular;
The first and second tension applying units 100 and 110 include first and second levers 101 and 111 rotatably and axially coupled to the small portion of the side wall 12, And a tension roller 102 (112) which is provided at the end of the first and second guide portions (101) 111 and presses the wire saw W passing through the first and second guide portions 80 and 90 by its own weight Features cutting machine using wire saw.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150181109 | 2015-12-17 | ||
KR20150181109 | 2015-12-17 |
Publications (1)
Publication Number | Publication Date |
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KR101691889B1 true KR101691889B1 (en) | 2017-01-17 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020150186857A KR101691889B1 (en) | 2015-12-17 | 2015-12-24 | Wire saw cutting machine |
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KR (1) | KR101691889B1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101918176B1 (en) * | 2017-03-27 | 2018-11-13 | 김학만 | A Wire saw machine that cuts two ingots into a rectangular shape by simultaneous cutting method |
KR102005676B1 (en) * | 2018-06-05 | 2019-07-30 | 두산중공업 주식회사 | Nozzle cutting device in reactor vessel |
CN117415619A (en) * | 2023-12-19 | 2024-01-19 | 山东茂盛管业有限公司 | Plastic sleeve steel heat-insulating pipe end sawing and planing integrated machine and sawing and planing method |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH053710U (en) * | 1991-07-02 | 1993-01-22 | 三菱重工業株式会社 | Tension pulley support mechanism |
JPH1086142A (en) * | 1996-09-12 | 1998-04-07 | Nippei Toyama Corp | Working method and apparatus by wire-saw |
KR100831747B1 (en) * | 2006-11-10 | 2008-05-23 | 삼정엔지니어링 (주) | Wire saw machine and work machining method using thereof |
JP2012101310A (en) * | 2010-11-09 | 2012-05-31 | Yasunaga Corp | Wire saw device, and method for manufacturing wafer using the same |
-
2015
- 2015-12-24 KR KR1020150186857A patent/KR101691889B1/en active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH053710U (en) * | 1991-07-02 | 1993-01-22 | 三菱重工業株式会社 | Tension pulley support mechanism |
JPH1086142A (en) * | 1996-09-12 | 1998-04-07 | Nippei Toyama Corp | Working method and apparatus by wire-saw |
KR100831747B1 (en) * | 2006-11-10 | 2008-05-23 | 삼정엔지니어링 (주) | Wire saw machine and work machining method using thereof |
JP2012101310A (en) * | 2010-11-09 | 2012-05-31 | Yasunaga Corp | Wire saw device, and method for manufacturing wafer using the same |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101918176B1 (en) * | 2017-03-27 | 2018-11-13 | 김학만 | A Wire saw machine that cuts two ingots into a rectangular shape by simultaneous cutting method |
KR102005676B1 (en) * | 2018-06-05 | 2019-07-30 | 두산중공업 주식회사 | Nozzle cutting device in reactor vessel |
CN117415619A (en) * | 2023-12-19 | 2024-01-19 | 山东茂盛管业有限公司 | Plastic sleeve steel heat-insulating pipe end sawing and planing integrated machine and sawing and planing method |
CN117415619B (en) * | 2023-12-19 | 2024-02-13 | 山东茂盛管业有限公司 | Plastic sleeve steel heat-insulating pipe end sawing and planing integrated machine and sawing and planing method |
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