JPH11151655A - Endless wire saw with fixed abrasive grain - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately cut a work piece, by making a pair of groove-attached tension rollers; forming a groove, having a pitch same as that of a wire row on a peripheral surface, with the work piece nipped, move toward the wire row, and pressedly abut on and add tension to the wire row. SOLUTION: A tension unit 44, for imparting given tension to a wire row 28, is installed between group rollers 24A and 24B. The tension unit 44 has a pair of groove-attached tension rollers 46 and 46, forming many parallel grooves having a pitch same as that of the wire row 28 on a peripheral surface. Both the end parts of the rollers 46 and 46 are turnably supported on a pair of bearing brackets 48 and 48. The brackets 48 and 48 can be moved slidably on a pair of guide rails 52 and 52 formed on supporting frames 50 and 50. This movement makes the rollers 46 and 46 pressedly abut on the wire row 28, to impart high tension to the wire row 28, thereby accurately cutting a work piece.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an endless wire saw with fixed abrasive grains, and more particularly to an endless wire saw with fixed abrasive grains for cutting hard brittle materials such as silicon, glass and ceramic.

[0002]

2. Description of the Related Art Endless wire saws with fixed abrasives are known as:
This is a wire saw that forms a wire row by winding an endless wire with fixed abrasive grains of a book around a plurality of groove rollers. In order to cut a high-precision wafer with this endless wire saw with fixed abrasives, it is necessary to cut the ingot while the wire row is stretched with high tension.
And in the conventional endless wire saw with fixed abrasive,
By applying a dead weight of a predetermined load to the dancer roller, tension is applied to the wire with fixed abrasive grains.

[0003]

However, when tension is applied to the wire with fixed abrasive by the conventional method, the tension of the wire with fixed abrasive that constitutes the wire row that actually contributes to the cutting of the ingot is sufficiently obtained. However, there is a disadvantage that high-precision cutting cannot be performed. The present invention has been made in view of such circumstances, and an object of the present invention is to provide an endless wire saw with fixed abrasives that can cut a workpiece with high accuracy.

[0004]

The invention according to claim 1 is
In order to achieve the above object, a wire row formed by being wound around a plurality of groove rollers is formed by one endless fixed abrasive wire, and the groove row is driven by rotating the groove roller. In the endless wire saw with fixed abrasive grains, which simultaneously cuts the workpiece into a large number of wafers by pressing the workpiece against the traveling wire row, the symmetrical position with the workpiece interposed therebetween. And a pair of grooved tension rollers having grooves formed at the same pitch as the wire row on the peripheral surface, and the pair of grooved tension rollers are moved toward the wire row, and pressed against the wire row. And a pressing means for bringing the pair of grooved tension rollers into contact with the wire row by the pressing means to apply tension to the wire row. Characterized in that it pressure.

According to the present invention, a tension is applied to a wire row by pressing a pair of grooved tension rollers against the wire row. Further, in order to achieve the above object, the invention according to claim 3 forms a wire row formed by being wound around a plurality of groove rollers with one endless fixed abrasive wire. In the endless wire saw with fixed abrasives, which rotates the groove roller to travel the wire row and presses the workpiece against the traveling wire row, thereby cutting the workpiece into a number of wafers simultaneously. In addition, at least one of the groove rollers is movably supported, and a tension is applied to the wire row by varying an axial distance between the groove rollers.

According to the present invention, tension is applied to the wire array by varying the distance between the shafts of the groove rollers.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an endless wire saw with fixed abrasive grains according to the present invention will be described below in detail with reference to the accompanying drawings. FIGS. 1, 2, and 3 are a front view, a side view, and a plan view, respectively, of a first embodiment of an endless wire saw with fixed abrasive grains according to the present invention (FIG. 3 is a plan view of only a cutting unit). .

As shown in FIG. 1, the endless wire saw with fixed abrasives mainly includes a cutting unit 12 for cutting the ingot In and a work feed unit 14 for feeding the ingot In. First, the configuration of the cutting unit 12 will be described. Anti-vibration table 1
A pair of spindle brackets 20A, 20B is provided on a gantry 18 horizontally set via 6, 16,.
The sets are vertically erected at predetermined intervals. The spindle brackets 20A and 20B are provided with a pair of spindle units 22A and 22B, respectively, so as to face each other.

The pair of spindle units 22A, 2A
Groove rollers 24A and 24B each having a spiral groove formed on the outer periphery are rotatably supported by 2B. The wire row 28 to be cut is formed by the groove roller 24.
It is formed by sequentially winding the wire 26 with the fixed abrasive in the grooves A and 24B. The groove roller 24
In front of A, 24B (left side in FIG. 2), fixed abrasive wire 26 wound around groove rollers 24A, 24B.
Rollers 30L, 30L, 30 for guiding the grooves from one end of the groove rollers 24A, 24B to the other end.
R and 30R are installed. This guide roller 30
L, 30L, 30R, 30R are the groove rollers 2
One set is provided at each end of 4A and 24B, and is rotatably supported by a frame (not shown) installed on the gantry 18. The groove roller 24
A, the wire 26 with fixed abrasives drawn out from one end of 24B, the guide rollers 30L, 30L, 30R, 3
By being sequentially wound around 0R, it is guided by the other ends of the groove rollers 24A and 24B. Then, the fixed abrasive grain-attached wire 26 guided to the other end is endlessly formed by joining both ends of the wire 26 by laser welding or the like.

A tension unit 44 for applying a predetermined tension to the wire array 28 is provided between the groove rollers 24A and 24B. The tension unit 44 includes a pair of grooved tension rollers 4 having a plurality of parallel grooves formed on the peripheral surface thereof at the same pitch as the wire row 28.
6 and 46, the grooved tension roller 4
By pressing the 6, 46 against the wire row 28,
A tension is applied to the wire row 28. Specifically, the configuration is as follows.

The pair of grooved tension rollers 46, 4
Reference numeral 6 is provided below the wire row 28, and is disposed at a symmetrical position with respect to the ingot In. Both ends of the grooved tension rollers 46, 46 are rotatably supported by a pair of bearing brackets 48, 48, and the bearing brackets 48, 48
A pair of guide rails 52, 52 laid on 0, 50
It is slidably supported above.

The support frames 50, 50 are vertically erected on the gantry 18, and one of the support frames 50 has a guide rail 5 at the center as shown in FIG.
A screw rod 54 is provided along 2 and 52. Both ends of the screw rod 54 are rotatably supported by bearing members 56, and an output shaft of a pressing motor 58 is connected to the upper end. The bearing bracket 4
A nut portion 48a (see FIG. 3) that is screwed to the screw rod 54 is formed on one of the screw rods 8 and 48. As a result, when the pressing motor 58 is driven, the screw rod 54 is By rotating, the bearing brackets 48 move up and down.

The tension unit 44 constructed as described above drives the pressing motor 58 to raise the bearing brackets 48, 48, so that the grooved tension rollers 46, 46 are pressed by the wire row 28 and Row 2
8 is tensioned. At this time, each fixed abrasive wire 26 constituting the wire row 28 runs along the grooves of the grooved tension rollers 46, 46.

The tension is applied to the wire row 28 as described above. The traveling is performed by rotating one of the groove rollers 24A at a high speed. That is, the drive is performed by rotating one groove roller 24A at a high speed by the drive motor 60. As shown in FIG. 2, the transmission of the rotational force from the drive motor 60 to the groove roller 24A is performed by a belt 62,
The rotation of the driving motor 60 is transmitted to the groove roller 24A by connecting the spindle pulley 64 connected to one end of the motor A and the motor pulley 66 connected to the output shaft of the driving motor 60 with the belt 62.

The cutting unit 12 is configured as described above. Next, the configuration of the cutting and feeding unit 14 will be described. As shown in FIGS. 1 and 2, on the gantry 18,
The column 68 is set up vertically. The column 68 has a pair of guide rails 70, 70 laid vertically to the wire row 28. A work feed table 72 is slidably supported on the guide rails 70 via sliders 74, 74.

A screw rod 76 is provided on the column 68 along the guide rails 70, 70.
The screw rod 76 is rotatably supported at both ends thereof by bearings formed integrally with the column 68. The output shaft of a work feed motor 78 installed on the top of the column 68 is connected to the upper end of the screw rod 76.
By driving the work feed motor 78, the screw rod 76 rotates. A nut member 72a screwed with the screw rod 76 is fixed to the work feed table 72. As a result, the screw rod 76 is rotated by the work feed motor 78, so that the work feed table 72 is rotated. Moves up and down.

At the lower end of the work feed table 72, a tilting unit 80 is provided. An ingot In, which is a workpiece, is mounted on a work holding portion of the tilting unit 80. Note that the tilting unit 64 can hold the mounted ingot In at a predetermined angle in the horizontal and vertical directions with respect to the wire row 28 and hold the mounted ingot. The orientation is adjusted.

The mounting of the ingot In to the tilting unit 64 is performed via a mounting block M, and the ingot In adhered to the mounting block M via the slice base S is held on the work of the tilting unit 64. Attach it by fixing it to the part with screws. The operation of the endless wire saw with fixed abrasive grains 10 according to the first embodiment configured as described above is as follows.

First, the operator operates the groove roller 24.
The tension of the wire row 28 stretched between A and 24B is measured with a tension gauge. And from the measurement,
It is determined whether or not it is stretched with the tension required for cutting, and the following operation is performed. If the measured value of the tension gauge matches the required tension, the operation proceeds to the next operation.

If the measured value of the tension gauge is lower than the required tension, the tension unit 44
The pressing motor 58 is driven to drive the grooved tension roller 4.
6 and 46 are raised and pressed against the wire row 28. When the necessary tension is obtained, the lifting of the grooved tension rollers 46, 46 is stopped. Thereby, tension necessary for cutting is applied to the wire row 28.

On the other hand, if the measured value of the tension gauge is higher than the required tension, the pressing motor 58 of the tension unit 44 is driven to lower the grooved tension rollers 46, 46. When the necessary tension is obtained, the lowering of the grooved tension rollers 46, 46 is stopped. As a result, an optimal tension is applied to the wire row 28 for cutting.

After the optimum tension is applied to the wire row 28 as described above, the operator mounts the ingot In on the tilting unit 80 of the work feed table 72. That is, first, the ingot In is bonded to the mounting block M via the slice base S, and the ingot I bonded to the mounting block M is attached.
n is mounted on the work mounting portion of the tilting unit 64. After mounting, the ingot In is inclined by a predetermined angle with respect to the wire row 28 by the tilting unit 80 so that the ingot In is cut in a predetermined crystal orientation.

Next, the drive motor 60 is driven to rotate the groove roller 24A at a high speed, thereby causing the wire array 28 to run at a high speed. In this case, since the fixed abrasive grain-attached wire W is formed in an endless shape, the wire W goes around a fixed traveling path. Next, the work feed motor 78 is driven to feed the work feed table 72 toward the wire row 28 at a constant feed amount. As a result, the ingot In is pressed against the high-speed running wire array 28.

The ingot pressed against the wire row 28 is ground at a contact portion with the wire row 28 into fixed abrasive grains fixed to the peripheral surface of the wire W with fixed abrasive grains. Cut into wafers. At the time of this cutting, the contact portion between the ingot In and the wire row 28 includes:
Coolant is supplied from a nozzle (not shown). The supplied coolant is collected by a drain pan (not shown) installed below the wire row 28 and discarded.

As described above, in the endless wire saw 10 of the present embodiment, the tension required for cutting can be arbitrarily set, so that a highly accurate wafer can be cut. Further, since the wire 12 with the fixed abrasive grains constituting the wire row 28 runs in the grooves formed in the grooved tension rollers 46, 46, not only the vertical vibration but also the horizontal vibration can be prevented. Can be. For this reason,
Even if the fixed abrasive wire 26 is clogged,
The fixed-abrasive wire 26 does not run away, and a highly accurate wafer can be cut.

In this embodiment, as means for pressing the grooved tension rollers 46, 46 against the wire row 28, the bearing brackets 48, 48 provided with the grooved tension rollers 46, 46 are moved up and down by a feed screw. Although the method is adopted, the pressing method is not limited to this. For example, the grooved tension rollers 46, 46 may be pressed against the wire row 28 by a mechanism as shown in FIG. In the figure, only one side of the grooved tension roller is shown for convenience.)

That is, the grooved tension roller 46 is rotatably supported at the tip of the swingable arm 84, and the arm 84 is swung up and down. Press. The means for swinging the arm 84 is such that the drive arm 88 is fixed to the rotating shaft 86 fixed to the base end of the arm 84,
The rod of the hydraulic cylinder 90 is connected to the tip of the drive arm 88 by a pin, and the rod of the hydraulic cylinder 90 is swung by moving forward and backward.

The wire array 20 is pressed by swinging the grooved tension roller 46 upward, and the pressing force is released by swinging it downward. It is also effective to provide a means for fixing the grooved tension rollers 46, 46 so that they do not move because they receive a high load. For example, after the position is set, it is effective to fix the bearing bracket 48 to the support frame 50 with a disc brake, screws, or the like.

In the endless wire saw 10 with fixed abrasive grains of the present embodiment, the shape of the wire 26 with fixed abrasive grains is not particularly limited.
Since a high tension is applied to 6, it is effective to use a deformed wire in order to obtain a structure that can withstand this. As shown in FIG. 6, the deformed wire W has a tapered surface T fitted on the groove 46a of the grooved tension roller 46 on both sides.
Are formed in a sector-shaped section, and the abrasive grains G are fixed only on the upper surface (arc surface).

[0030] Since such In the fixed abrasive with the wire W of the configuration, it is possible to increase the cross-sectional area than the fixed abrasive grain with wire W ₁ of circular cross-section having the same width D,
Wire rigidity is improved. Then, by improving the wire rigidity, a high tension can be applied to the wire, and as a result, high-precision cutting can be performed even with the same kerf loss.

In the wire with fixed abrasive grains W having such a configuration, since the wire with fixed abrasive grains W fits into the groove 46a of the tension roller 46 with grooves, the deflection of the wire can be effectively reduced. Can be prevented. Further, since the abrasive grains G are fixed only on the upper surface of the wire, wear of grooves such as a grooved tension roller, a groove roller, and a guide roller can be suppressed. In this regard, as shown in the figure, in the case of the wire W with fixed abrasive grains having a circular cross section, the same effect can be obtained by fixing the abrasive grains only on the upper surface of the wire.

Next, a second embodiment of the endless wire saw with fixed abrasive grains according to the present invention will be described. In the endless wire saw 10 with fixed abrasive grains of the first embodiment described above, the interval between the pair of grooved tension rollers 46, 46 was always kept constant. However, wire row 2
8. The tension applied to the tension rollers 8 is
6, the grooved tension rollers 46, 46 are always used to increase the tension of the cut portion.
Is preferably located near the ingot In.

Therefore, in the endless wire saw 100 with fixed abrasive grains according to the second embodiment, the tension unit 4
The interval between the four grooved tension rollers 46, 46 can be varied according to the cutting length of the ingot In. Specifically, the configuration is as follows. The endless wire saw 10 with fixed abrasive grains according to the first embodiment described above.
The same members as are denoted by the same reference numerals, and description thereof will be omitted.

As shown in FIGS. 7 and 8, a pair of grooved tension rollers 46, 46 are rotatably supported at both ends by a pair of bearing units 102, 102, respectively. The bearing units 102, 102 are a pair of guide rails 1 installed along both sides of the wire row 28.
04 and 104 are slidably supported. The pair of guide rails 104 are connected to the wire row 2.
8, the elevators 106, 106 are laid on the elevators 106, 106, which vertically move with respect to the wire row 28. The mechanism for elevating the elevating table 106 is the same as the mechanism for elevating the bearing brackets 48 of the first embodiment. Therefore, the description of the mechanism is omitted.

At the center of the lift tables 106, 106,
The posts 108, 108 are erected vertically. Springs 110, 110 are fixed to both sides of the column 108, and the other ends of the springs 110, 110 are fixed to the bearing units 102, 102, respectively. The pair of grooved tension rollers 46, 46 are urged in a direction approaching each other by the springs 110, 110, and are pressed in a direction away from each other against the urging force of the springs 110, 110, so that The spacing increases. The adjustment of the interval is performed by the following mechanism.

A pair of disc-shaped guide plates 112, 112 are removably attached at regular intervals to the tilting unit 80 to which the ingot In is attached. The guide plate 112 is formed to have a slightly larger diameter than the ingot In, and the ingot In is formed by the pair of guide plates 112 and 11.
Attached between the two. And the attached ingot In is arrange | positioned coaxially with the guide plates 112,112.

Guide rollers 114, 114 are arranged at both ends of the grooved tension rollers 46, 46 at the same intervals as the guide plates 112, 112.
The guide plates 112, 112
It moves up and down between 14, 114. Here, since the pair of grooved tension rollers 46, 46 are urged toward each other by springs 110, 110, the guide plates 112, 112 are vertically held by the guide rollers 114, 114. Move. When the guide plates 112, 112 move up and down while being nipped by the guide rollers 114, 114, the intervals between the grooved tension rollers 46, 46 are adjusted as follows.

That is, the guide plates 112, 1
12 is formed in the shape of a disk, the distance from the initial contact to the center is expanded by being pushed by the guide plates 112, 112, and the distance is increased by the urging force of the springs 110, 110 after the center is reached. Narrows. The expansion and contraction of the interval between the grooved tension rollers 46 corresponds to the cutting length between the ingot In and the wire row 28. The longer the cutting length, the wider the interval, and the shorter, the shorter the interval. Therefore, the grooved tension roller 46,
46 can always be located near the ingot In.

The operation of the second embodiment of the endless wire saw with fixed abrasives according to the present invention, constructed as described above, is as follows. First, the operator measures the tension of the wire array 28 stretched between the groove rollers 24A and 24B using a tension gauge. Then, from the measured value, it is determined whether or not it is stretched with the tension required for cutting, and the following operation is performed.

If the measured value of the tension gauge matches the required tension, the operation proceeds to the next operation. If the measured value of the tension gauge is lower than the required tension, the lifting rollers 106 are raised to raise the grooved tension rollers 46, 46 and press the grooved tension rollers 46, 46 against the wire rows 28. Let it. When the necessary tension is obtained, the lift 10
Stop climbing 6. Thereby, tension necessary for cutting is applied to the wire row 28.

On the other hand, when the measured value of the tension gauge is higher than the required tension, the lifting table 106 is lowered to lower the grooved tension rollers 46, 46. Then, when the necessary tension is obtained, the lowering of the elevator 106 is stopped. Thereby, the wire row 28
Is subjected to an optimal tension for cutting. Next, the operator mounts the ingot In on the tilting unit 80 of the work feed table 72 and mounts the guide plates 112, 112.

Next, the drive motor 60 is driven to rotate the groove roller 24A at a high speed, thereby causing the wire array 28 to run at a high speed. When the running of the wire array 28 is stabilized, the work feed motor 78 is driven to feed the work feed table 72 toward the wire array 28 at a constant feed amount. As a result, the cutting of the ingot In is started.
6 is adjusted as follows.

As shown in FIG. 9A, before the start of cutting, the pair of grooved tension rollers 46, 46
It is urged in a direction approaching each other by the urging forces of 10, 110 and is kept at a constant interval. When the ingot In descends, as shown in FIGS. 9B to 9D, the guide plate 112 moves the pair of grooved tension rollers 4.
The gap between the grooved tension rollers 46, 46 is enlarged or reduced.

Since the guide plate 112 is formed in the same circular shape as the cut surface of the ingot In, as shown in FIG.
The intervals of the ingots 6 and 46 are enlarged or reduced according to the cutting length of the ingot In. Therefore, the grooved tension roller 4
6, 46 can always be located in the vicinity of the ingot In, thereby effectively applying tension to the wire row 28.

As described above, according to the endless wire saw with fixed abrasive grains 100 of the present embodiment, the interval between the pair of grooved tension rollers 46, 46 is made variable according to the cutting length of the ingot In, so that an effective effect is obtained. Wire row 28
Can be tensioned. The mechanism for varying the interval between the grooved tension rollers 46, 46 is not limited to the mechanism described in the present embodiment.
The following mechanism may be used.

As shown in FIG. 10, one elevator 106
On the top, a pair of screw rods 15
0 and 150 are rotatably supported. This screw rod 1
Reference numerals 50 and 150 are respectively connected to output shafts of moving motors 152 and 152 provided at both ends of the elevating table 106, and are rotated by driving the moving motors 152 and 152. Nut members 154 and 154 are screwed into the screw rods 150 and 150, respectively.
2 is fixed. Therefore, the grooved tension rollers 46, 46 are connected to the moving motors 152, 152.
The distance is changed by driving the.

In this case, the driving of the moving motor 152 is controlled by a control device (not shown). Then, the control device determines that the grooved tension rollers 46 are ingot I.
n so as to expand and contract according to the cutting length of n.
2 and 152 are controlled. Thereby, similarly to the above-described second embodiment, the grooved tension roller 46,
46 can always be located near the side of the ingot In.

In the case of this embodiment, the tension roller 46 with grooves is replaced by a cylinder instead of the feed screw.
46 may be moved. That is, the guide rail 10
A pair of cylinders is arranged along 4, and the bearing unit 102 is connected to the tip of the rod. Then, by expanding and contracting the rod, the grooved tension roller 46,
Move 46. With this, the same effect can be obtained.

Further, in the endless wire saws 10 and 100 with fixed abrasive grains according to the present embodiment, the tension rollers 46 and 46 with grooves are merely rotatably supported, but as shown in FIG. 160 and 160 may be connected and rotated in synchronization with the rotation of the groove roller 24A. As described above, by rotating the grooved tension rollers 46 in synchronization with the rotation of the groove roller 24A, the grooved tension rollers 46, 46 are rotated.
46 can be prevented, and the life can be extended. In particular, it is effective when guiding the wire 26 with fixed abrasive grains to which the surrounding abrasive grains are fixed.

In order to prevent the wear of the grooved tension rollers 46, 46, the grooved tension rollers 46, 46 are required.
It is also effective to coat the peripheral surface of 46 with a substance having the same quality and hardness as the abrasive grains fixed to the surface of the fixed abrasive-coated wire 26. For example, when diamond is used for the abrasive fixed to the peripheral surface of the fixed abrasive wire 26, the surface of the grooved tension rollers 46, 46 is coated with diamond, and GC abrasive (silicon carbide abrasive) is applied. If used, the surfaces of the grooved tension rollers 46, 46 are coated with SiC.

Next, a third embodiment of the endless wire saw with fixed abrasive grains according to the present invention will be described. Third
Endless wire saw 200 with fixed abrasive grains according to the embodiment
By changing the distance between the shafts of the groove rollers,
Adjust the tension applied to the wire row. Specifically, the configuration is as follows. The same members as those of the above-described endless wire saw with fixed abrasives 10 of the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

As shown in FIG. 12, one of a pair of spindle brackets 202A and 202B erected on the gantry 18 is slidably supported in the X direction in the figure. That is, a slider 204 is fixed to a lower portion of one spindle bracket 202B, and the slider 204 is slidably supported on a guide rail 206 laid on the gantry 18.

The spindle bracket 202B includes:
An interval adjusting bolt 208 is rotatably supported.
A nut member 210 is screwed into the gap adjusting bolt 208, and the nut member 210 is fixed to a bracket 212 erected on the gantry 18. The spindle bracket 202 moves in the X direction in the figure by turning the gap adjusting bolt 208.

The operation of the endless wire saw with fixed abrasive grains 200 according to the third embodiment configured as described above is as follows. First, the operator operates the groove roller 24.
The tension of the wire row 28 stretched between A and 24B is measured with a tension gauge. And from the measurement,
It is determined whether or not it is stretched with the tension required for cutting, and the following operation is performed.

If the measured value of the tension gauge matches the required tension, the operation proceeds to the next operation. If the measured value of the tension gauge is lower than the required tension, the center distance X between the groove rollers 24A and 24B is increased. That is, the spacing adjustment bolt 20
Turn 8 to move the spindle bracket 202B rightward in the figure. When the necessary tension is obtained, the rotation of the gap adjusting bolt 208 is stopped. This allows
A tension necessary for cutting is applied to the wire row 28.

On the other hand, if the measured value of the tension gauge is higher than the required tension,
Axial distance X between A and 24B is reduced. That is, the spacing adjustment bolt 208 is turned to rotate the spindle bracket 202.
B is moved to the left in the figure. When the necessary tension is reached, the rotation of the interval adjusting bolt 208 is stopped.
As a result, an optimal tension is applied to the wire row 28 for cutting.

After the optimum tension is applied to the wire array 28 as described above, the operator mounts the ingot In on the tilting unit 80 of the work feed table 72 and starts cutting. Thus, in the endless wire saw 200 of the present embodiment, the tension required for cutting can be arbitrarily set, so that a highly accurate wafer can be cut.

In the present embodiment, the operator manually rotates the interval adjusting bolt 208 so that
Although the spindle bracket 202B is configured to move, the spindle bracket 202B may be automatically rotated by a motor or the like. Further, the mechanism for moving the spindle bracket 208B is not limited to the feed screw described above, and a hydraulic cylinder or the like may be used.

Further, in this embodiment, by moving only one of the spindle brackets 208B,
Although the distance between the groove rollers 24A, 24B is variable, the distance between the groove rollers 24A, 24B may be variable by moving both spindle brackets 208B. In addition, the first
In the endless wire saw with fixed abrasive grains according to the second embodiment, the wire row 28 is formed by winding the wire 26 with fixed abrasive grains around the two groove rollers 24A and 24B. The number of groove rollers forming 28 is not limited to this,
For example, a wire with fixed abrasive may be wound around three groove rollers arranged so as to form a triangle, and a wire row may be formed. Alternatively, the fixed abrasive may be fixed to four groove rollers arranged so as to form a square. The attached wire may be wound around to form a wire row.

In the present embodiment, the groove rollers 24A and 24B are arranged horizontally to form a horizontal wire row. However, the groove rollers 24A and 24B are arranged vertically to form a vertical wire row. It may be.

[0061]

As described above, according to the present invention,
Since a high tension can be applied to the wire row, the workpiece can be cut with high accuracy.

[Brief description of the drawings]

FIG. 1 is a front view of an endless wire saw with fixed abrasive grains according to a first embodiment.

FIG. 2 is a side view of the endless wire saw with fixed abrasive grains according to the first embodiment.

FIG. 3 is a plan view showing a part of the endless wire saw with fixed abrasive grains according to the first embodiment.

FIG. 4 is a side sectional view showing a configuration of a tension unit.

FIG. 5 is a side sectional view of another mechanism for pressing a grooved tension roller against a wire row.

FIG. 6 is a sectional view showing a configuration of a deformed wire.

FIG. 7 is a plan view showing a part of an endless wire saw with fixed abrasive grains according to a second embodiment.

FIG. 8 is a side sectional view showing a configuration of the tension unit.

FIG. 9 is a diagram illustrating the operation of the endless wire saw with fixed abrasive grains according to the second embodiment.

FIG. 10 is a plan view of another mechanism for moving the grooved tension roller.

FIG. 11 is a plan view showing a part of an endless wire saw with fixed abrasive grains according to another embodiment.

FIG. 12 is a side view of an endless wire saw with fixed abrasive grains according to a third embodiment.

[Explanation of symbols]

10, 100, 200: Endless wire saw with fixed abrasive 20A, 20B: Spindle bracket 24A, 24B: Groove roller 26: Wire with fixed abrasive 28: Wire row 30R, 30L: Guide roller 44: Tension unit 46: Tension with groove Roller 68 ... Column 72 ... Work feed table 80 ... Tilting unit 202A, 202B ... Spindle bracket 204 ... Slider 208 ... Spacing adjustment bolt In ... Ingot

Claims (3)

[Claims] 1. A wire row formed by being wound around a plurality of groove rollers is formed by one endless wire with fixed abrasive, and the groove roller is rotationally driven to travel the wire row. In addition, by pressing the workpiece against the traveling wire row, in an endless wire saw with fixed abrasive grains that simultaneously cuts the workpiece into multiple wafers, the workpiece is disposed at a symmetrical position across the workpiece. A pair of grooved tension rollers having grooves formed at the same pitch as the wire row on the peripheral surface; and a pressure for moving the pair of grooved tension rollers toward the wire row and pressing and contacting the wire row. Means,
An endless wire saw with fixed abrasive grains, wherein tension is applied to the wire row by pressing the pair of grooved tension rollers against the wire row by the pressing means. 2. An apparatus according to claim 1, further comprising an interval adjusting means for moving said pair of grooved tension rollers along said wire row, wherein said interval adjusting means adjusts said pair of grooved tension rollers in accordance with a cutting length of said workpiece. The endless wire saw with fixed abrasive grains according to claim 1, wherein the interval is variable. 3. A wire row formed by being wound around a plurality of groove rollers is formed by one endless wire with fixed abrasive grains, and the groove roller is rotationally driven to travel the wire row. With an endless wire saw with fixed abrasive grains that simultaneously cuts the workpiece into a large number of wafers by pressing the workpiece against the traveling wire row, at least one of the groove rollers is movable. An endless wire saw with fixed abrasive grains, wherein a tension is applied to the wire row by supporting and varying an axial distance between the groove rollers.