JPH1142548A - Fixed abrasive grain wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fixed abrasive grain wire saw which can accurately cut a work piece. SOLUTION: Grooved tension rollers 32A, 32B formed with many grooves by a pitch identical to a groove roller 18 in a peripheral surface are pressed into contact with a lower part of a wire train 20. In this way, high tension is given to the wire train 20, and vibration is suppressed. Since a fixed wire with abrasive grain formed with the wire train 20 is traveled to run in a groove formed in the grooved tension roller 32A, 32B, the wire is prevented from vibrating in a horizontal direction. Accordingly, an ingot can be highly accurately cut.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fixed abrasive wire saw, and more particularly to a fixed abrasive wire saw for cutting hard brittle materials such as silicon, glass and ceramic.

[0002]

2. Description of the Related Art In a wire saw, a running wire is wound around a plurality of groove rollers to form a wire row, and a workpiece is pressed against the wire row to cut the workpiece into a large number of wafers. Device. In order to cut the workpiece with high accuracy in this wire saw, it is necessary to cut the workpiece while keeping the row of wires formed between the groove rollers at a constant pitch. For this purpose, it is necessary to cut the workpiece by stretching the wire row with high tension.

[0003] The tension of a wire row formed between the groove rollers is correlated with the distance between the groove rollers, and the tension generally decreases as the distance increases. Therefore, the distance between the groove rollers is preferably set to a minimum distance that can cut the workpiece. However, in order to be able to cut workpieces having various diameters with one wire saw, it is necessary to secure a certain distance between the groove rollers. In this case, when cutting a small-diameter work, there is a problem that vibration occurs in the wire and cutting accuracy is reduced.

In the case of cutting a cylindrical workpiece such as a silicon ingot, the cutting length (the length of contact between the workpiece and the wire) changes as the cutting progresses. In addition, there is a problem that the degree of bending of the wire changes depending on the cut portion, and the cutting accuracy is reduced. In order to solve such problems, Japanese Patent Publication No. 6-839
53 is provided with a pair of guide rollers for supporting the wire row between groove rollers forming the wire row, and by varying the distance between the guide rollers according to the diameter of the workpiece, always at a constant tension. 2. Description of the Related Art A wire saw capable of cutting a workpiece has been proposed.

[0005]

However, the wire saw disclosed in Japanese Patent Publication No. 6-83953 supports a row of wires with guide rollers having a flat surface. There is a problem as follows. That is, the fixed-abrasive wire saw cuts the workpiece with a wire (fixed-abrasive wire) having abrasive grains directly adhered to the surface. Clogging occurs. When the wire with fixed abrasive grains is clogged, a phenomenon occurs in which the wire with fixed abrasive grains vibrates (rumbles).

[0006] Even if the wire row formed of such wires with fixed abrasive grains is supported by the guide rollers, the wires with fixed abrasive grains vibrate in the horizontal direction on the guide rollers, thereby cutting the workpiece accurately. It is not possible. The present invention has been made in view of such circumstances, and has as its object to provide a fixed abrasive wire saw capable of cutting a workpiece with high accuracy.

[0007]

According to the present invention, in order to achieve the above object, a wire with fixed abrasive grains having abrasive grains fixed on a surface thereof is wound around a plurality of groove rollers to form a wire row. By pressing the workpiece while running the wire row, in a fixed abrasive wire saw that cuts the workpiece into many wafers, the wire is pressed against the wire row between the groove rollers, and the wire is A pair of grooved tension rollers, which are slidably supported along the rows and have grooves formed on the peripheral surface at the same pitch as the wire rows, and the pair of grooved tension rollers are moved to adjust the distance therebetween. Interval adjusting means that is variable according to the cutting length of the workpiece, wherein the workpiece is pressed against a wire row between the pair of grooved tension rollers to cut the workpiece. And butterflies.

According to the present invention, the wire row is supported by the pair of grooved tension rollers disposed between the groove rollers. Since the pair of grooved tension rollers is pressed against the wire array, a high tension is applied to the wire array formed therebetween. Also, since the wire row runs in the groove formed in the grooved tension roller, even if the wire with fixed abrasive is clogged, the wire with fixed abrasive does not vibrate in the horizontal direction. Therefore,
The workpiece can be cut with high precision.

[0009]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a fixed abrasive wire saw according to the present invention.
The fixed-abrasive wire saw forms a row of wires using wires with fixed abrasive grains having abrasive grains fixed to the surface, and runs the row of wires at high speed to cut the ingot into a number of wafers. Specifically, the configuration is as follows.

[0010] As shown in FIG.
Are wound around a pair of wire reels 14A, 14B, and reciprocate between the pair of wire reels 14A, 14B while being guided by a plurality of guide rollers 16, 16,. The pair of wire reels 14A, 14A
B, three groove rollers 18, 18, 1
8, a horizontal wire row 20 is formed.

The wire running paths formed on both sides of the wire row 20 have traverse devices 22A and 22A, respectively.
B, and dancer rollers 24A and 24B are provided. The traverse devices 22A and 22B are provided with a wire reel 14A,
The fixed abrasive 12 is guided at a constant pitch from 14B, and the dancer rollers 24A and 24B apply a constant tension to the traveling fixed abrasive 12.

Motors 26A and 26B are connected to the pair of wire reels 14A and 14B, respectively.
By driving this motor, the wire with fixed abrasives 12 travels between the pair of wire reels 14A and 14B. A work feed table 28 that moves vertically with respect to the wire row 20 is installed above the wire row 20. An ingot 30 to be processed is provided with a slice base S under the work feed table 28.
Is held through.

Below the wire array 20, a pair of grooved tension rollers 32A and 32B are arranged. The grooved tension rollers 32A and 32B are pressed against the lower part of the wire row 20 to make contact with the groove roller 1A.
A predetermined tension is applied to the wire row 20 formed between the wires 8. The grooved tension rollers 32A, 32B
As shown in FIGS. 2 and 3, a large number of grooves are formed on the outer peripheral surface at the same pitch as the groove rollers 18 (wire rows 20), and fixed inside the grooves to form the wire rows 20. The running of the wire with abrasive grains 12 prevents the fixed abrasive grains with wire 12 from vibrating in the lateral direction.

The pair of grooved tension rollers 32A,
32B has a pair of bearings 34A,
4A, 34B and 34B rotatably supported. Each bearing 34A, 34B is fixed on a slider 36A, 36B, and the slider 36A, 36B
0, a pair of guide rails 38, 38 installed on both sides.
It is slidably supported above. The pair of guide rails 38, 38 are laid on a pair of bases 40, 40 arranged along the wire row 20, and the bases 40, 40 are supported by a body frame of a wire saw (not shown). ing.

The pair of grooved tension rollers 32A and 32B supported as described above are provided with the sliders 36A and 3A.
By moving the guide rails 38 on the guide rails 38, 38, the distance therebetween is varied. The pair of guide rails 3
In columns 8 and 38, columns 42 and 42 are vertically erected at their central portions. Springs 44A and 44B are fixed to both sides of the column 42, and the other ends of the springs 44A and 44B are respectively connected to the bearings 34A and 34A.
34B.

The pair of grooved tension rollers 32A,
The springs 32A are urged by the springs 44A and 44B in a direction approaching each other, and are pressed in a direction away from each other against the urging force, thereby widening the interval.
Then, by releasing the pressing force, the interval is reduced. As described above, the interval between the pair of grooved tension rollers 32A and 32B can be freely changed, and the interval adjustment is performed by the following mechanism.

As shown in FIGS. 2 and 4, a pair of disc-shaped guide plates 4 is provided above the wire row 20.
6, 46 are arranged. The pair of guide plates 46, 46 are respectively provided on the work feed table 2.
The work feed table 8 is removably attached to both sides of the work feed table 8 at regular intervals, and moves up and down with the movement of the work feed table 28.

The ingot 30 is mounted between the guide plates 46, 46.
The ingot 30 and the guide plates 46, 46 are coaxial with each other. As shown in FIG. 4, the guide plate 46 is formed to have a slightly larger diameter than the ingot 30. The pair of grooved tension rollers 32A,
As shown in FIGS. 2 and 3, a pair of guide rollers 48A, 48A, 48B, 48B are rotatably supported at both ends of the 32B. This pair of guide rollers 4
8A, 48A (48B, 48B) are arranged at the same intervals as the guide plates 46, 46. When the guide plates 46, 46 descend, they come into contact with the descending guide plates 46, 46. The guide plates 46, 46 are provided with guide rollers 48A,
Move up and down between 48B.

Here, the pair of grooved tension rollers 32A, 32B are provided with springs 44A, 44B, respectively.
, The guide plates 46 are always urged in the directions approaching each other.
In the state of being pinched by 8B, it moves up and down between them. The guide plate 46 is connected to the guide roller 48.
The vertical movement of the grooved tension rollers 32A and 32B is adjusted as follows by moving up and down while being sandwiched between A and 48B.

That is, since the guide plate 46 is formed in a disk shape, the guide plate 46 is pushed and spread by the guide plate 46 at the time of contact, and the interval is widened. 44A,
The spacing is reduced by the biasing force of 44B. The expansion and contraction of the interval between the grooved tension rollers 32A and 32B corresponds to the cutting length of the ingot 30 and the wire row 20.
As the cutting length increases, the interval increases, and as the cutting length decreases, the interval decreases. Therefore, the grooved tension roller 32
A and 32B are always located near the ingot 30.

The operation of the embodiment of the fixed abrasive wire saw according to the present invention configured as described above is as follows.
First, the ingot 30 to be cut is attached to the work feed table 28 via the slice base S.
Next, the guide plates 46 are attached to the work feed table 28. At this time, a guide plate 46 having a diameter slightly larger than the diameter of the ingot 30 to be cut is attached.

Next, the motors 26A and 26B connected to the wire reels 14A and 14B are driven to move the wire 12 with the fixed abrasive. Then, when the running is stabilized, the work feed table 28 is lowered toward the wire row 20, and the wire row 2 running on the ingot 30 is moved.
Press to zero. The contact portion of the ingot 30 pressed against the wire row 20 is ground by the fixed abrasive wire 12 constituting the wire row 20, thereby being cut into a wafer.

The wire row 20 is provided with a pair of grooved tension rollers 32A and 32B, and the ingot 30 is provided between the pair of grooved tension rollers 32A and 32B. Is pressed against. The pair of grooved tension rollers 32A, 32
Since B is pressed against the wire row 20, a high tension is applied to the wire row 20 therebetween. Therefore,
The fixed abrasive grain-forming wire 12 forming the wire row 20 does not generate vibrations or the like, so that stable high-precision cutting can be performed at the end.

The pair of grooved tension rollers 3
2A and 32B are the wire rows 20 near the ingot 30.
, The higher the tension can be applied to the wire row 20, the more the grooved tension rollers 32A, 32
B is adjusted by the guide plate 46 as follows, and is always positioned near the ingot 30 so that
I support.

That is, before the start of cutting, as shown in FIG. 5A, the work feed table 28 is urged in a direction approaching each other by the urging force of the springs 44A and 44B, and is held at a constant interval. As it descends,
As shown in FIGS. 5B to 5D, a guide plate 46 provided on the work feed table 28 pushes and expands the space therebetween, thereby expanding and contracting the space.

Since the guide plate 46 is formed in the same circular shape as the cut surface of the ingot 30, as shown in FIG.
The interval between A and 32B is always expanded or contracted according to the cutting length of the ingot 30. Therefore, the pair of grooved tension rollers 32A and 32B can always support the wire row 20 at the most effective position for supporting the wire row 20, that is, near the side of the ingot 30. .

As described above, according to the grooved tension roller fixed abrasive wire saw of the present embodiment, the ingot 30 is cut while the grooved tension rollers 32A and 32B support the wire line 20, so that the wire line 20 is always cut. The ingot 30 can be cut while giving high tension to the ingot 30. The grooved tension rollers 32 </ b> A and 32 </ b> B are always positioned near the side of the ingot 30 while keeping the wire row 2.
Since 0 is supported, tension can be effectively applied to the wire row 20.

Further, the fixed abrasive grain-forming wire 12 constituting the wire array 20 is provided with grooved tension rollers 32A, 32B.
Therefore, not only the vertical vibration but also the horizontal vibration can be prevented. Therefore, even if the wire with fixed abrasive grains 12 is clogged, the wire with fixed abrasive grains 12 does not violate, and the ingot 30 can be cut accurately.

Next, a description will be given of a second embodiment of the fixed abrasive wire saw according to the present invention. The fixed abrasive wire saw according to the second embodiment includes a grooved tension roller 32.
A and 32B interval adjusting mechanisms are different from those of the first embodiment. That is, in the second embodiment, a pair of grooved tension rollers 32A, 32B
Adjust the spacing of Specifically, the configuration is as follows.

Incidentally, except for the interval adjusting mechanism,
Since it is the same as the fixed abrasive wire saw of the first embodiment described above, the same members are denoted by the same reference numerals and description thereof will be omitted. As shown in FIGS. 6 and 7, one of the guide rails 38 provided on both sides of the wire row 20 has a guide rail 38 on its side.
The base 50 is arranged along. This base 50
Are supported by a body frame of a fixed abrasive wire saw (not shown), and bearing portions 50A, 50A are provided at both ends and a center thereof.
B, 50C are formed.

The bearing 50 formed on the base 50
A, 50B, and 50C rotatably support ball screws 52A, 52B disposed along the guide rail 38, respectively. The ball screws 52A and 52B are connected to motors 54 provided at both ends of the base 50, respectively.
A, 54B connected to the rotating shaft
A and 54B rotate by driving.

Nut members 56A and 56B are screwed into the ball screws 52A and 52B, respectively. The nut members 56A and 56B
A, a slider 36A slidably supporting 32B,
36B is connected via connecting members 58A and 58B. The gap adjusting mechanism for the grooved tension rollers 32A and 32B is configured as described above, and includes a ball screw 52A,
By driving the motors 54A and 54B connected to 52B, the sliders 36A and 36B move to change the distance between the pair of grooved tension rollers 32A and 32B.

The motors 54A and 54B are driven based on a drive signal output from the control device 60. A program is input to the control device 60 in advance so that the grooved tension rollers 32A and 32B expand and contract in accordance with the cutting length of the ingot 30. The operation of the second embodiment of the fixed abrasive wire saw according to the present invention configured as described above is as follows.

The fixed abrasive wire saw of the second embodiment also cuts the ingot 30 by pressing the ingot 30 against the traveling wire row 20 in the same manner as in the first embodiment. Then, the ingot 30 is cut into a wafer by being pressed against the wire row 20 formed between the pair of grooved tension rollers 32A and 32B.

Here, the interval between the pair of grooved tension rollers 32A and 32B is adjusted in accordance with a program previously input to the control device 60, and the ingot 30 is always ingot similarly to the above-described first embodiment. (See FIGS. 5A to 5D). The movement of the grooved tension rollers 32A and 32B is as follows.
The motors 54A, 54B are driven to drive the ball screws 52A,
2B by rotating the ball screw 52B.
A, 52B is rotated so that the nut members 56A,
56B is moved, so that the nut members 56A, 56B
, The grooved tension rollers 32A and 32B connected to the second roller move.

As described above, also in the fixed abrasive wire saw of the second embodiment, similarly to the first embodiment, the wire with the grooved tension rollers 32A and 32B is always located near the ingot 30. By supporting the rows 20, stable cutting of the ingot 30 without vibration becomes possible. In the above-described second embodiment, the grooved tension rollers 32A and 32B are moved by the feed screw. However, the grooved tension rollers 32A and 32B may be moved by using a cylinder. Good.

That is, a pair of cylinders is arranged along the guide rail 38, and the slider 36
A and 36B are connected. The grooved tension rollers 32A and 32B are moved along the guide rail 38 by extending and contracting the rod. With this, the same effect can be obtained. Next, a third embodiment of the fixed abrasive wire saw according to the present invention will be described. The same members as those in the above-described first and second embodiments are denoted by the same reference numerals, and description thereof will be omitted.

As in the first and second embodiments described above, it is necessary to support the wire row 20 formed between the groove rollers 18 with a pair of grooved tension rollers 32A and 32B to apply tension. This is extremely effective in suppressing vibration of the wire 12 with fixed abrasive. However, in the fixed abrasive wire saw, since the abrasive grains are directly fixed to the wire to be guided, the grooved tension rollers 32A, 32A
B becomes a problem.

In consideration of this point, in the fixed abrasive wire saw according to the third embodiment, as shown in FIGS. 8 and 9, the motors 70A, 7B are provided with the grooved tension rollers 32A, 32B.
0B, and the grooved tension roller 32 is synchronized with the rotation of the groove roller 18 by the motors 70A and 70B.
A and 32B are rotating. This motor 70A, 70
B is connected to one end of each of the grooved tension rollers 32A and 32B, and is installed on the sliders 36A and 36B.

As described above, the grooved tension rollers 32A and 32B supporting the wire row 20 are
By rotating in synchronism with the rotation of, the wear of the grooved tension rollers 32A and 32B can be prevented, and the life can be extended. In particular, it is effective when guiding the wire with fixed abrasive grains 12 to which the surrounding abrasive grains are fixed.

The same effect can be obtained by rotating the grooved tension rollers 32A, 32B in synchronization with the rotation of the wire reels 14A, 14B in addition to the synchronization with the rotation of the groove roller 18. Further, in order to prevent wear of the grooved tension rollers 32A, 32B, the peripheral surface of the grooved tension rollers 32A, 32B is made of a material having the same quality and hardness as the abrasive grains fixed to the surface of the fixed abrasive wire 12. It is also effective to coat with. For example, when diamond is used as the abrasive fixed to the peripheral surface of the wire 12 with the fixed abrasive, the tension roller 3 having the groove with the diamond is used.
When the surfaces of 2A and 32B are coated and GC abrasive grains (silicon carbide abrasive) are used, the surfaces of the grooved tension rollers 32A and 32B are coated with SiC.

[0042]

As described above, according to the present invention,
By supporting the wire row by a pair of grooved tension rollers disposed between the groove rollers, a high tension can be applied to the wire row. Further, since the fixed abrasive grains forming the wire row travel in the grooves formed in the grooved tension rollers, they do not vibrate in the horizontal direction even if clogging occurs. Therefore, the workpiece can be cut with high precision.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram of an embodiment of a fixed abrasive wire saw according to the present invention.

FIG. 2 is a perspective view showing a main part of the first embodiment of the fixed abrasive wire saw according to the present invention.

FIG. 3 is a plan view showing a main part of the first embodiment of the fixed abrasive wire saw according to the present invention.

FIG. 4 is a side view showing a main part of the first embodiment of the fixed abrasive wire saw according to the present invention.

FIG. 5 is an explanatory view illustrating the operation of the embodiment of the fixed abrasive wire saw according to the present invention.

FIG. 6 is a perspective view showing a main part of a second embodiment of the fixed abrasive wire saw according to the present invention.

FIG. 7 is a plan view showing a main part of a second embodiment of the fixed abrasive wire saw according to the present invention.

FIG. 8 is a perspective view showing a main part of a third embodiment of the fixed abrasive wire saw according to the present invention.

FIG. 9 is a plan view showing a main part of a third embodiment of the fixed abrasive wire saw according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Fixed abrasive wire saw 12 ... Wire with fixed abrasive 18 ... Groove roller 20 ... Wire row 30 ... Ingot 32A, 32B ... Tension roller with groove 44A, 44B ... Spring 46 ... Guide plate

Claims (4)

[Claims] 1. A wire with fixed abrasive grains having abrasive grains fixed on the surface is wound around a plurality of groove rollers to form a wire row, and the workpiece is pressed against the wire row while traveling. In a fixed abrasive wire saw for cutting the workpiece into a number of wafers, while being pressed against the wire row between the groove rollers, slidably supported along the wire row,
A pair of grooved tension rollers having grooves formed at the same pitch as the wire row on the peripheral surface; and moving the pair of grooved tension rollers to vary an interval according to a cutting length of the workpiece. A fixed-abrasive wire saw, comprising: a gap adjusting unit, wherein the workpiece is pressed against a wire row between the pair of grooved tension rollers to cut the workpiece. 2. The gap adjusting means includes: an urging means for urging the pair of grooved tension rollers in a direction approaching each other; and a pair of grooved tension rollers for sandwiching between the pair of grooved tension rollers. And a guide plate that moves while being pushed, by pushing and expanding between the pair of grooved tension rollers at the periphery of the guide plate,
2. The fixed abrasive wire saw according to claim 1, wherein an interval between the pair of grooved tension rollers is variable. 3. The fixed abrasive wire saw according to claim 1, wherein a motor is connected to each of the pair of grooved tension rollers, and the grooved tension rollers are rotated in synchronization with the rotation of the groove rollers. . 4. The surface of the tension roller with grooves is coated with a substance having the same quality and hardness as the abrasive grains fixed to the surface of the wire with fixed abrasive grains. Fixed abrasive wire saw.