KR101638844B1 - Kiln apparatus for firing electriceramic products be capable of improving productivity and yields - Google Patents

Kiln apparatus for firing electriceramic products be capable of improving productivity and yields Download PDF

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Publication number
KR101638844B1
KR101638844B1 KR1020150099523A KR20150099523A KR101638844B1 KR 101638844 B1 KR101638844 B1 KR 101638844B1 KR 1020150099523 A KR1020150099523 A KR 1020150099523A KR 20150099523 A KR20150099523 A KR 20150099523A KR 101638844 B1 KR101638844 B1 KR 101638844B1
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Prior art keywords
furnace
firing
atmospheric gas
ceramic electronic
electronic component
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KR1020150099523A
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Korean (ko)
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조우철
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우성에스이 주식회사
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/3077—Arrangements for treating electronic components, e.g. semiconductors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/3005—Details, accessories, or equipment peculiar to furnaces of these types arrangements for circulating gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00—Supports, screens, or the like for the charge within the furnace
    • F27D5/0031—Treatment baskets for ceramic articles

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic electronic component firing furnace device capable of improving productivity and yield in a roller conveyor firing furnace for firing ceramic electronic components such as ceramic capacitors (MLCC) Sagger 10 having a net-like grain structure is laminated in three to four stages and aligned in two rows so as to be fed and fed into the firing furnace 2 and the atmosphere inside the firing furnace 2 It is possible to simultaneously supply a large amount of the ceramic ceramic electronic component molding 14 such as a multilayer ceramic capacitor (MLCC) by supplying the gas supply from both the downward atmospheric gas discharge port 32 and the left and right atmospheric gas discharge ports 26a, It improves product yield and productivity by minimizing defects while firing.

Figure R1020150099523

Description

FIELD OF THE INVENTION [0001] The present invention relates to a ceramic electronic device firing furnace, and more particularly, to a ceramic electronic device firing furnace device capable of improving productivity and yield.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic electronic component baking furnace, and more particularly, to an improvement of a ceramic electronic component baking furnace device capable of improving the productivity and yield of ceramic electronic components such as multilayer ceramic capacitors (MLCC).

Generally, a ceramic electronic component such as a multilayer ceramic capacitor (MLCC) is required to be subjected to a baking process using a baking furnace as one of the procedures for obtaining the finished product.

The firing of the ceramic electronic component in the firing furnace is carried out in various atmospheres such as an atmospheric atmosphere, an oxygen gas atmosphere, an oxygen partial pressure adjusted atmosphere, and a carbon dioxide gas atmosphere depending on the kind and property of the product, For several tens of minutes to several tens of hours. The material to be calcined may be a battery material in the case of a secondary battery and a ceramic catalyst in the case of a ceramic capacitor (MLCC).

There are various kinds of firing furnaces for firing, and these days, high-quality firing through high-precision temperature control, short-time firing, energy saving, excellent response in response to firing conditions requiring special atmosphere, And a sintering furnace with an excellent productivity is required, and a sintering furnace corresponding to the sintering furnace is used.

Electronic parts such as ceramic capacitors (MLCC) are finely cut in a chip state. Such chip-shaped molded articles are to be supplied to the firing furnace in a side-by-side manner so as not to be stacked on each other due to their characteristics.

It is difficult to increase the productivity and the yield in the firing furnace by feeding the electronic component material of the chip type to be fired into the firing furnace in a single layer state in which the fired material is placed in a container made of a refractory material.

Patent Registration No. 10-0971119 entitled "Material Alignment System"

Accordingly, it is an object of the present invention to provide a multilayer ceramic electronic device and a method of manufacturing the same, which can increase productivity and yield while maximizing productivity by minimizing defects while stacking ceramic electronic components such as a multilayer ceramic capacitor (MLCC) And to provide a ceramic electronic component firing furnace device.

According to the present invention, there is provided a ceramic electronic component firing furnace capable of improving productivity and yield in a roller conveyor-type firing furnace for firing ceramic electronic components including a ceramic capacitor (MLCC), wherein the fired ceramic electronic component molding (10) having a net-like grain structure for containing the ceramic ceramic electronic component shaped articles (14) in order to deposit and fuse the ceramic crucible (14) into the firing furnace (2) 10 has a net 12 formed in a window portion provided in a lattice-like frame portion 11 to maintain air permeability and heat uniformity and a protrusion 12a serving as a spacer is provided at a corner of the lattice- In order to optimize the productivity and the yield, three consecutive stages 10 of the mesh netting structure are stacked and arranged in two rows on the rollers 20 of the roller conveyor,

The left and right atmospheric gas outlets 26a and 26b are provided in the left and right side walls of the furnace for the calcination and cracking of the oxidizing atmosphere in the furnace tunnel furnace 6 of the firing furnace 2, ) Of the cage 10, which is disposed at the lower part of the inside of the furnace body and is discharged in a direction of the clearance of the cage 10 in which the left and right atmospheric gas (MG) (12).

In the present invention, the left and right atmospheric gas outlets 26a and 26b are formed to be two to three in the upper and lower directions according to the number of stages of the stages 10 to 3 to 4 stages, .

In the present invention, the left atmospheric gas discharge port 26a having two or three discharge nozzles is connected to the left discharge chamber 24a connected to the left atmospheric gas supply pipe 22a, And the right side atmospheric gas outlet 26b having a nozzle is connected to the right side supply chamber 24b connected to the right atmospheric gas supply pipe 22b.

The present invention relates to a ceramic sintered ceramic electronic component, which comprises a sintered ceramic sintered body having a sintered ceramic sintered body and a sintered ceramic sintered body, And simultaneously supplying the mixture from the lower discharge port and the left and right discharge ports, it is possible to minimize the defects while firing a large amount of the ceramic electronic component molding such as a multilayer ceramic capacitor (MLCC), thereby improving the yield and productivity.

1 is a schematic plan view of a roller conveyor type firing furnace for firing ceramic electronic components according to an embodiment of the present invention;
2 is a schematic side view of a roller conveyor type firing furnace for firing ceramic electronic components according to an embodiment of the present invention;
Fig. 3 is a sag composition view of a mesh netting structure for multi-stage stacking of a fired ceramic electronic part molding according to an embodiment of the present invention; Fig.
Fig. 4 is a side view showing a multi-stage lamination of the sieves of the net-like barbed structure shown in Fig. 3,
Fig. 5 is a view showing the installation of an atmospheric gas discharge port both located laterally and downwardly inside the furnace tunnel according to the present invention. Fig.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a schematic plan view of a roller conveyor type firing furnace for firing ceramic electronic components according to an embodiment of the present invention, and FIG. 2 is a schematic view of a roller conveyor type firing furnace for firing ceramic electronic components according to an embodiment of the present invention. Fig.

As shown in FIGS. 1 and 2, the firing furnace 2 of the present invention for firing ceramic electronic components such as a multilayer ceramic capacitor (MLCC) is a roller conveyor type such as a roller hearth kiln, Adopt a firing furnace.

The roller conveyor type firing furnace 2 has a charging portion 4 for charging a ceramic electronic component molded article and a discharge portion 8 for discharging the fired ceramic electronic component molding. And a rotor passage (6) is provided between the discharge portions (8).

The Rocha tunnel furnace 6 is a refractory material tunnel structure having three regions of a preheating portion, a firing portion and a cooling portion. Hundreds and thousands of rollers are installed on the furnace in the width direction so as to be able to rotate closely . In addition, a high temperature of several hundreds to several thousands of degrees Celsius must be maintained inside the Roberts tunnel 6 of the firing furnace 2, and a large number of burners are arrayed for this purpose.

The furnace tunnel portion 6 of the firing furnace 2 is formed in the form of a module made of a refractory material and a light insulating material or a ceramic fiber. The modules are connected to each other by several to several tens of firing furnaces, do.

A sagger (also referred to as a setter) in the form of a refractory plate is used as a container for containing a ceramic electronic part molding such as a ceramic capacitor as a non-volatile material. Particularly in the present invention, in order to improve the productivity of the ceramic electronic part, And a sagger 10 of a multi-layer stacked net-like image forming structure as shown in FIG.

FIG. 3 is a schematic view of a cage 10 having a mesh netting structure for multi-layered lamination of a ceramic electronic component formed article 14 according to an embodiment of the present invention. The cage 10 has good air permeability, A plurality of windows are provided by the structure of the planar lattice type skeletal frame 11 so as to maintain the cracks so that the ceramic electronic component molding 14 is placed at the window position, (12) are formed to form a net-like grain structure.

In order to increase the productivity of ceramic electronic components, the present invention is characterized in that multi-stage cages 10 of a net-like trough structure for containing a ceramic electronic component molded article 14 are stacked in a multi- Respectively, at the four corners of the base plate 10a.

As shown in the side view of FIG. 4, four stacking indentations 10a formed at the four corners of the grid-like skeleton portion 11 in the multi-stage stacking of the cages 10 of the mesh- 5) MG acts as a spacer for providing a space for penetration from the side, and the netting 12 formed in the window of the setagent 10 is formed so that the atmospheric gas (MG in Fig. 5) It is a structure that allows multi-tier infiltration easily.

The sagger 10 is made of a heat-resistant material having excellent heat resistance, corrosion resistance and thermal shock resistance because it is exposed to a severe thermal environment. Although the sagger 10 is stacked in multiple stages according to the present invention, And the net 12 of the window constituting the lattice type skeleton portion 11 can provide vertical and horizontal air permeability as well as uniform heat distribution.

The cages 10 according to the present invention are stacked in three to four stages and put into the firing furnace 2, more preferably three stages, because of the trade-off between the guarantee of the temperature accuracy and the productivity increase.

Ceramic electronic components such as ceramic capacitors (MLCC) have greatly different defect rates depending on the temperature of the actual product and the rate of temperature change during the process.

That is, in the case of the firing process for manufacturing the ceramic capacitor (MLCC), whether or not the product is defective is determined with respect to the temperature distribution change of 3 to 4 ° C, it is very important to maintain the temperature distribution inside the furnace uniformly . If a product defect occurs once, it is necessary to dispose the entire product around the product, not the individual product.

In the case of firing atmospheric fired electronic component molding 14 such as a ceramic capacitor MLCC in the firing furnace 2, the temporal and spatial dispersion of the atmosphere in the firing furnace serves as an important process parameter for determining the characteristics of the ceramic fired body, In order to control this, control and change of the structure and process conditions of the firing furnace should be considered. The oxygen present in the sintered ceramic electronic component molding 14 or in the sagger 10 on which the ceramic electronic component molding 14 is loaded is discharged while the reducing atmosphere is sintered, It becomes more difficult to construct properly.

Therefore, it is required to strictly control the atmosphere in the furnace according to the firing temperature when firing the molded electronic component 14 such as a ceramic capacitor (MLCC). In order to separately control the atmosphere in each region of the firing furnace, (6) The N2 displacement chamber is installed at the inlet of the Rochester Tunnel (6). In the N2-substituted chamber, the N2 shower is applied to the ceramic electronic component molding before the ceramic ceramic electronic component molding is injected into the inner passage of the furnace tunnel 6.

Also, in the case of manufacturing a ceramic capacitor (MLCC) in which the internal electrode is made of nickel (Ni) as in the present invention, nickel is oxidized at a certain high temperature (about 400 ° C) And a uniformly distributed on-chip distribution (uniform heat) is applied to all of the ceramic electronic component formed articles 14 charged into the firing furnace 2, Be made available.

5, an atmospheric gas MG composed of nitrogen (N2), oxygen, and hydrogen (H2) is introduced into the lateral atmosphere gas discharge ports 26a, 26b and the downward atmospheric gas discharge port 32 ) Into the rotor of the rotor tunnel (6).

Fig. 5 is an installation configuration diagram of the atmospheric gas discharge ports 26a, 26b, 32 both located in the right and left chamber inside the furnace body of the furnace tunnel 6 of the firing furnace 2 according to the present invention.

Referring to FIG. 5, hundreds to thousands of rollers 20 constituting a roller conveyor are rotatably installed on the furnace tunnel 6 of the firing furnace 2 according to the present invention. The cages 10 arranged in rows are laid in a laminated structure and three to four stages of cages 10 having a mesh-shaped ceramic structure containing the ceramic electronic component formed article 14 are stacked and transported.

In the present invention, the atmospheric gas (MG) is discharged into the ceramic electronic component molding (14) placed on the cellar (10) through the clearance between the cells (10) stacked three to four times by the support stone Left and right side atmospheric gas outlets 26a and 26b are provided on the left and right side wall portions of the interior of the furnace body and at the same time the sheds 10 A downward atmospheric gas discharge port 32 is provided in a lower portion of the furnace interior for discharging the atmospheric gas MG to the molded ceramic electronic component article 14 placed on the furnace.

The two left and right atmospheric gas outlets 26a and 26b are preferably formed so that two discharge nozzles are formed in the upper and lower directions so as to direct the clearance between the consortia 10 in the case of the three- In the case of the stack 10, it is preferable that three discharge nozzles are formed vertically so as to direct the clearance between the consoles 10.

The atmospheric gas MG directed to the left and right atmospheric gas outlets 26a and 26b flows through the left and right atmospheric gas supply pipes 22a and 22b and the left and right supply chambers 24a and 24b to the left and right atmospheric gas outlets 26a and 26b, respectively.

A plurality of the downward atmosphere gas discharge openings 32 are arranged so as to be able to direct both left and right widths of the cages 10 arranged in two rows and the atmospheric gas MG directed to the downward atmospheric gas discharge openings 32 is formed Is supplied to the downward atmospheric gas discharge port (32) through the atmospheric gas supply pipe (28) and the downward feed chamber (30).

Therefore, the atmospheric gas (MG) is simultaneously injected from the lower side to the upper side and from the left side to the core part and from the right side to the core part simultaneously through the left and right atmospheric gas outlets 26a, 26b and the downside atmospheric gas outlet port 32, Is uniformly sprayed on the filamentary ceramic electronic component molding (14) stacked on the net (12) of the window portion of the cage (10) stacked in three to four stages inside, It is possible to uniformly distribute the heat with little temperature variation in the vertical direction.

In Fig. 5, an exhaust port is formed on the inside of the furnace interior, and reference numeral 34 "is a temperature sensor.

According to the present invention, it is possible to minimize defects while firing a large amount of a ceramic electronic component molded article such as a multilayer ceramic capacitor (MLCC), thereby improving the yield and productivity.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments. Therefore, the scope of the present invention should not be limited by the described embodiments, but should be determined by the scope of claims and equivalents thereof.

The present invention can be used for firing a ceramic capacitor molding in a firing furnace.

(2) - firing furnace (4) - input part
(6) to Rochester tunnel (8) - discharge section
(10) - a sagger (10a)
(11) - lattice-shaped skeleton part (12)
(14) - Injection molded ceramic electronic parts (20) - Rollers
(22a) and (22b) - Left and right side atmosphere gas supply pipes
(24a) and (24b) - left and right discharge chambers
(26a) (26b) - Left and right atmospheric gas outlets
(28) - Downstream atmosphere gas supply pipe
(30) -lower feed chamber (32) -lower atmosphere gas outlet

Claims (3)

A ceramic electronic component baking furnace device capable of improving productivity and yield in a roller conveyor type baking furnace for baking a ceramic electronic component including a ceramic capacitor (MLCC)
The roller conveyor type firing furnace 2 is provided with a rotor tunnel 6 between the charging part 4 and the discharge part 8 and a plurality of rollers 20 are tightly rotated A roller conveyor is installed so as to enable transfer of the refractory cage 10 of the multistage stacked mesh netting structure containing the fired ceramic electronic part molding 14,
An N2 substitution chamber for applying N2 shower to the ceramic ceramic electronic component molding 14 before being introduced into the internal passage of the Roche tunnel 6 is provided at the inlet of the Roche tunnel 6 of the roller conveyor type firing furnace 2 Respectively,
On the rollers 20 of the roller conveyor in the rotor channel 6 of the roller conveyor type firing furnace 2 are arranged a plurality of rollers 20 of a mesh image tape structure for containing the fired ceramic electronic component molding 14 for optimization of productivity and yield. The refractory cages 10 are stacked in three layers and arranged in two rows so that the rolls are fed,
Each of the refractory cages 10 arranged in three layers and arranged in two rows is provided with a netting 12 on a window portion provided in the grid-like frame portion 11 to maintain air permeability and uniform heat in the vertical direction and vertical direction, And at the corners of the lattice type skeleton portion 11, a support stone portion 10a serving as a spacer is formed,
The left and right atmospheric gas outlets 26a and 26b are provided in the left and right side walls of the furnace for furnace-free atmosphere firing and an even distribution of heat in the furnace tunnel furnace 6 of the firing furnace 2, And a temperature sensor (34) for detecting a temperature change rate is installed inside the furnace body,
Each of the left and right atmospheric gas outlets 26a and 26b is constructed so as to have two upper and lower discharge nozzles directed to a gap formed in accordance with the number of stacking stages in the three-stage stacked refractory seals 10, The atmospheric gas (MG) can be injected in a direction toward the clearance between the inner image seals (10) stacked in three layers,
The downward atmospheric gas outlets 32 are arranged in such a manner that the downward atmospheric gas outlets 32 are arranged so as to extend in both left and right directions so that both of the left and right widths of the refractory outlets 10 arranged in two rows can be oriented, So as to be able to be injected in the upper longitudinal direction from below the netting 12 of the refractory cages 10 of the arranged multi-layer laminated structure,
Wherein the left and right atmospheric gas (MG) and the downward atmospheric gas (MG) are simultaneously injected from the left to the deep portion and from the right to the deep portion and from the lower portion to the upper portion. Device. delete delete
KR1020150099523A 2015-07-14 2015-07-14 Kiln apparatus for firing electriceramic products be capable of improving productivity and yields KR101638844B1 (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107263700A (en) * 2017-06-26 2017-10-20 安徽省含山民生瓷业有限责任公司 A kind of structure improved ceramic conveying tray
KR102305983B1 (en) 2021-04-14 2021-09-28 주식회사 디알테크 Multiple stacking plate for sinteringelectric parts
KR20220085162A (en) 2020-12-15 2022-06-22 주식회사 디알테크 Plate for sinteringelectric parts
WO2022131871A1 (en) * 2020-12-18 2022-06-23 주식회사 포스코 Vertical type apparatus for firing cathode material of secondary battery

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050045099A (en) * 2003-11-10 2005-05-17 삼성전기주식회사 A tunnel type continuous sintering furnace
JP2006046865A (en) * 2004-08-06 2006-02-16 Ibiden Co Ltd Kiln, and method for firing ceramic
KR100971119B1 (en) 2009-06-22 2010-07-20 주식회사 솔로몬메카닉스 Material-arranging-system
KR20110074716A (en) * 2009-12-25 2011-07-01 아사히 가라스 가부시키가이샤 Storage container for plate-like body
KR20130102232A (en) * 2012-03-07 2013-09-17 김진홍 Multi holes type of ceramics setter

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050045099A (en) * 2003-11-10 2005-05-17 삼성전기주식회사 A tunnel type continuous sintering furnace
JP2006046865A (en) * 2004-08-06 2006-02-16 Ibiden Co Ltd Kiln, and method for firing ceramic
KR100971119B1 (en) 2009-06-22 2010-07-20 주식회사 솔로몬메카닉스 Material-arranging-system
KR20110074716A (en) * 2009-12-25 2011-07-01 아사히 가라스 가부시키가이샤 Storage container for plate-like body
KR20130102232A (en) * 2012-03-07 2013-09-17 김진홍 Multi holes type of ceramics setter

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107263700A (en) * 2017-06-26 2017-10-20 安徽省含山民生瓷业有限责任公司 A kind of structure improved ceramic conveying tray
KR20220085162A (en) 2020-12-15 2022-06-22 주식회사 디알테크 Plate for sinteringelectric parts
WO2022131871A1 (en) * 2020-12-18 2022-06-23 주식회사 포스코 Vertical type apparatus for firing cathode material of secondary battery
KR102305983B1 (en) 2021-04-14 2021-09-28 주식회사 디알테크 Multiple stacking plate for sinteringelectric parts

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