KR101625948B1 - Ultrasonic vibration and laser-induced backside wet etching drilling apparatus - Google Patents

Ultrasonic vibration and laser-induced backside wet etching drilling apparatus Download PDF

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Publication number
KR101625948B1
KR101625948B1 KR1020140149311A KR20140149311A KR101625948B1 KR 101625948 B1 KR101625948 B1 KR 101625948B1 KR 1020140149311 A KR1020140149311 A KR 1020140149311A KR 20140149311 A KR20140149311 A KR 20140149311A KR 101625948 B1 KR101625948 B1 KR 101625948B1
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South Korea
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glass
metal ion
fixing
jig
laser
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KR1020140149311A
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Korean (ko)
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KR20160050666A (en
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박민수
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서울과학기술대학교 산학협력단
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Abstract

The present invention relates to a glass forming apparatus using ultrasonic vibration and laser wet back etching, and more particularly, to a glass forming apparatus using a laser beam and a metal ion electrolyte on the back surface of a glass, And it is an object of the present invention to enable smooth removal of shape debris and bubbles generated during laser machining, thereby preventing a shape edge cracking phenomenon. The present invention configured for this purpose comprises a solution reservoir for storing a metal ion electrolyte that melts momentarily through a heating reaction with a laser beam and rapidly expands while melting the lower surface of the glass as an object to be processed; A glass fixing jig for allowing only the lower surface of the glass to be submerged in the metal ion electrolyte stored in the solution reservoir; A jig fixing arm for supporting the glass fixing jig to allow the lower surface of the glass to flood on the metal ion electrolyte stored in the solution reservoir; An ultrasonic vibrator installed at a lower side of the solution reservoir to impart ultrasonic vibration to the metal ion electrolyte; And a laser module for irradiating a laser beam onto the upper surface of the glass fixed through the jig fixing arm and the glass fixing jig so as to process the shape from the lower part of the glass to the upper part through the reaction with the metal ion electrolyte .

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an ultrasonic vibration and laser-induced backside wet etching drilling apparatus,

The present invention relates to a laser processing method using a laser, and more particularly, to a laser processing method and a laser processing method for laser processing a laser beam, The present invention relates to a glass forming apparatus using ultrasonic vibration and a laser wet backside etching method capable of improving shape accuracy through easy removal of debris or air bubbles.

In general, it is well known that glass is widely used in displays, biochips, communication, and optical equipment because it exhibits chemical, physical, and optical characteristics different from those of common metals.

However, since the above-mentioned glass is a material having a very high hardness, it is very difficult to form a precise shape by general general purpose processing. The microfabrication methods of glass studied to date include chemical etching, ultrasonic machining, electrolytic discharge machining, and laser machining.

On the other hand, as described above, since laser processing among the micro-processing methods of glass is performed by irradiating light of a specific wavelength, a tool is unnecessary, which is faster than other processing techniques. In this way, many of the laser processing methods using laser are using short pulse ultraviolet laser.

As described above, the ultra-short pulse width enables nonlinear optical absorption even in a medium having almost no linear absorption such as glass, and enables efficient transmission of energy to a narrow region. Therefore, It is advantageous that it can be improved.

Therefore, the micro-machining method of glass using the short-pulse short-wavelength laser as described above has a problem that the productivity is deteriorated because the shape precision is good but the machining amount is very small and the speed is slowed. .

Laser-induced backside wet etching (LIBWE), an indirect process, has been proposed to solve the problems described above. Research has shown that using such a laser wet backside visualization technique can be done even when the pulse width is long and the energy density per hour is low. This is because the laser beam is absorbed by the glass and is not processed directly but is processed by the force that explodes the liquid on the rear surface of the glass.

On the other hand, the above-mentioned laser wet rear etching technique is a method in which a laser beam penetrates a glass as a workpiece and reacts with a light absorbing solution (or a metal ion solution) on the back surface of the glass to cause an explosion. These laser wet back etching processes have many advantages in that they can solve the problem of material damage or light absorption rate due to direct processing heat.

However, there is a problem in that precision due to processing of the shape is lowered due to debris and bubbles generated when the shape of the hole or the like is processed through the laser wet rear etching technique according to the related art as described above.

In addition, when the shape of a hole or the like is processed through the laser wet rear etching technique according to the related art as described above, there is a problem that the accuracy of the shape processing is lowered due to the re-solidification of the debris.

1. Korean Registered Patent No. 10-0693942 (Published in Mar. 12, 2007) 2. Korean Registered Patent No. 10-0710854 (published by Mar. 23, 2007) 3. Korean Patent No. 10-0729966 (published by Jun. 19, 2007) 4. Korean Patent Publication No. 2011-0001948 (2011.01.06 released)

The present invention has been conceived in order to solve all the problems of the prior art. It is an object of the present invention to provide an apparatus and a method for forming a metal ion by using an ultrasonic wave in which a laser beam and a metal ion electrolyte on the back surface of a glass are indirectly processed through reaction, The present invention has been made in view of the above problems, and it is an object of the present invention to provide an apparatus for processing glass using ultrasonic vibration and laser wet backside etching so as to smoothly remove bubbles and shape contaminants.

Another object of the present invention is to improve the precision of the glass shape by preventing the edge rupture of the shape by allowing the removal of the shape debris and bubbles generated during the laser machining through the ultrasonic wave smoothly The purpose is to make it possible.

In addition, another object of the present invention is to provide a laser processing apparatus capable of smoothly removing bubbles and debris through an ultrasonic wave exciter in laser processing, thereby minimizing energy loss due to unnecessary processing, And an object of the present invention is to enable effective shaping of glass.

The present invention configured to achieve the above-described object is as follows. That is, the apparatus for processing glass using ultrasonic vibration and laser wet backside etching according to the present invention is characterized in that a metal ion electrolyte for melting a lower surface of glass, which is an object to be processed, is rapidly stored while being vaporized instantaneously through a heating reaction with a laser beam Solution reservoir; A glass fixing jig for allowing only the lower surface of the glass to be submerged in the metal ion electrolyte stored in the solution reservoir; A jig fixing arm for supporting the glass fixing jig to allow the lower surface of the glass to flood on the metal ion electrolyte stored in the solution reservoir; An ultrasonic vibrator installed at a lower side of the solution reservoir to impart ultrasonic vibration to the metal ion electrolyte; And a laser module for irradiating a laser beam onto the upper surface of the glass fixed through the jig fixing arm and the glass fixing jig so as to process the shape from the lower part of the glass to the upper part through the reaction with the metal ion electrolyte .

In the constitution according to the present invention constituted as described above, the material of the solution reservoir is preferably made of stainless steel or aluminum to prevent corrosion by the metal ion electrolyte stored.

The glass fixing jig constituting the present invention is a glass fixing jig which is made up of a glass mounting groove on which a glass is placed and a water immersion groove formed on the center of the glass mounting groove so as to penetrate the metal ion electrolyte stored in the solution tank, And a lower fixing jig having a plurality of lower fixing grooves formed at predetermined intervals on the rim. An upper fixing jig having a beam transmission groove formed vertically through which a laser beam can be irradiated to the center of the water immersion groove, and a plurality of upper fixing grooves formed at predetermined intervals on the rim corresponding to the lower fixing groove; And a fastening means for fastening the glass on the glass mounting groove between the lower fixing jig and the upper fixing jig, which is fastened on the lower fixing groove formed on the rim of the lower fixing jig and the upper fixing jig, .

The lower fixing jig constituting the above-described glass fixing jig may be made of aluminum (Al), and the upper fixing jig constituting the glass fixing jig may be made of acrylic.

In the configuration according to the present invention, the oscillation frequency of the ultrasonic vibrator may be in a range of 20 to 40 kHz.

In addition, in the structure according to the present invention, the scanning speed of the scan head may be scanned at a speed of 50 to 2,000 mm / s when the laser beam is irradiated to the surface of the glass through the laser module.

In the configuration according to the present invention as described above, the solution reservoir may be installed and fixed on a fixing table having a predetermined height formed through the frame.

In addition, in the structure of the present invention as described above, the jig fixing arm may be fixed to the upper portion of the fixing table on both sides of the solution reservoir through a vibration pad.

Another aspect of the present invention is to provide a method of processing a shape of a glass to be processed by a laser wet rear etching method, the method comprising the steps of: (a) Arranging the electrolyte to be immersed in the electrolyte; (b) irradiating a laser beam onto the upper surface of the glass to be processed, the lower surface of which is arranged so as to be immersed in the metal ion electrolyte in the step (a); (c) applying ultrasound vibration to the metal ion electrolyte while irradiating a laser beam on the glass to be processed in the step (b); And (d) removing bubbles and debris from the lower surface of the glass, which is melted by the heating reaction of the laser beam and the metal ion electrolyte, through the ultrasonic vibration in the step (c) And a step of controlling the display device.

According to the technology of the present invention, since the shape of the laser beam and the metal ion electrolyte on the back side of the glass are indirectly processed through the reaction, by using the ultrasonic wave to have the metal ion electrolyte, the shape remnants and bubbles generated during the laser processing are smoothly removed So that it is possible to prevent the edge of the shape from being broken.

In addition, the technology according to the present invention enables smooth removal of shape debris and bubbles through ultrasound through the ultrasonic wave excitation of the metal ion electrolyte during the processing of glass using a laser, so that the shape edge breakage can be prevented Thereby improving the accuracy of the glass shape.

In addition, the technology according to the present invention enables smooth removal of bubbles and debris through ultrasonic wave excitation during laser machining, thereby minimizing energy loss due to unnecessary processing, thereby enabling effective glass-shaped So that an effect of enabling machining can be achieved.

FIG. 1 is a cross-sectional view showing a glass processing apparatus using ultrasonic vibration and laser wet back etching according to the present invention. FIG.
FIG. 2 is a sectional view showing a glass fixing jig constituting a glass processing apparatus using ultrasonic vibration and laser wet rear etching according to the present invention. FIG.
3 is an explanatory view for explaining processing of glass shape in laser machining of a glass machining apparatus using ultrasonic vibration and laser wet back etching according to the present invention.
4 is a block diagram illustrating a glass shaping process using ultrasonic vibration and laser wet backside etching according to the present invention.
FIG. 5 is an enlarged view showing enlarged and compared glass shapes processed by a glass processing apparatus using ultrasonic vibration and laser wet rear etching according to the present invention. FIG.

Hereinafter, a glass processing apparatus using ultrasonic vibration and laser wet back etching according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a cross-sectional view showing a glass forming apparatus using ultrasonic vibration and laser wet rear etching according to the present invention. FIG. 2 is a sectional view of a glass forming apparatus using ultrasonic vibration and laser wet back etching according to the present invention. FIG. 3 is an explanatory diagram for explaining the processing of glass in laser processing of a glass processing apparatus using ultrasonic vibration and laser wet rear etching according to the present invention. FIG.

First, according to the present invention, a metal ion electrolyte is heated by a reaction between a laser beam and a metal ion electrolyte, so that the metal ion electrolyte has a high thermal energy, thereby rapidly expanding through instantaneous vaporization, Is a technology that uses a laser wet back etching technique that allows the fabrication of a wafer.

As described above, in the process of melting the glass surface while rapidly expanding through the instantaneous vaporization of the metal ion electrolyte having a high thermal energy, in the present invention, the ultrasonic vibration is applied to the metal ion electrolyte, Bubbles and debris are removed to prevent cracking of the machined edges. Hereinafter, the technique according to the present invention will be described in more detail.

1 to 3, the glass processing apparatus 100 using the ultrasonic vibration and the laser wet back etching according to the present invention includes a solution reservoir 110 in which a metal ion electrolyte 112 is stored, a solution reservoir 110 A glass fixing jig 120 for allowing only the lower surface of the glass 10 to be floated to the metal ion electrolyte 112 stored in the solution reservoir 110 and a metal ion electrolyte An ultrasonic wave exciter 140 installed on a lower side of the solution reservoir 110 to apply ultrasonic vibration to the metal ion electrolyte 112 and a jig The upper surface of the glass 10 fixed through the fixing arm 130 and the glass fixing jig 120 is irradiated with a laser beam to react with the metal ion electrolyte 112, And a laser module 150 for processing It is made up of the castle.

1 and 2, the solution reservoir 110 constituting the glass forming apparatus 100 using the ultrasonic vibration and the laser wet backside etching as described above is mounted on a fixing table 160). The jig fixing arm 130 constituting the present invention is fixed to the upper surface of the fixing table 160 on both sides of the solution reservoir 110 through the vibration pad 132.

As described above, the jig fixing arm 130, which is fixed to the upper surface of the fixing table 160 on both sides of the solution storage tank 110 through the vibration pad 132, is transferred from the fixing table 160 through the vibration pad 132 Thereby preventing the ultrasonic vibration from being transmitted to the glass 10 through the jig fixing arm 130. Thus, since no vibration is transmitted to the glass 10 to be processed, the laser beam can be accurately irradiated to the target position.

Meanwhile, in the glass forming process using the glass forming apparatus 100 using the ultrasonic vibration and the laser wet rear etching according to the present invention, the glass 10 is fixed on the glass fixing jig 120 So that the glass fixing jig 120 is fixed to the jig fixing arm 130. At this time, the glass fixing jig 120 fixed to the jig fixing arm 130 is submerged so that the lower surface of the glass 10 can be locked on the metal ion electrolyte 112 stored in the solution water tank 110.

Next, after the glass fixing jig 120 is fixed to the jig fixing arm 130 so that the lower surface of the glass 10 can be submerged on the metal ion electrolyte 112, the laser module 150 Ultrasonic vibration of the metal ion electrolyte 112 can be performed by having the ultrasonic wave exciter 140 under the solution reservoir 110 while irradiating a laser beam to a portion to be processed on the shape of the upper surface of the glass 10 .

3 (a) and 3 (b), when the laser beam is irradiated to the portion to be processed in the shape of the upper surface of the glass 10 as described above and the ultrasonic vibrator 140 is provided in the solution reservoir 110, The laser beam passes through the glass 10 without being absorbed by the glass 10 and is reacted in the metal ion electrolyte 112 on the rear surface of the glass 10 so that the shape can be processed.

In other words, when the laser beam irradiated on the upper surface of the glass 10 is brought into contact with the metal ion electrolyte 112 on the rear surface of the glass 10 by the laser module 150, the laser module 150 is partially heated rapidly to have a high thermal energy do. At this time, the metal ion electrolyte 112 having a high thermal energy is instantaneously vaporized and expands abruptly to melt the surface of the lower part of the glass 10 so that the shape can be processed.

As described above, the bubble and shock wave generated when the metal ion electrolyte 112 having a high thermal energy is instantaneously vaporized and rapidly expanded to melt the surface of the lower part of the glass 10, The etching process is smoothly performed. However, if the generated bubbles or residue are not smoothly discharged, the bubbles generated by the generated bubbles cause a cracking of the edge of the shape and a re-solidification phenomenon of the residue, thereby lowering the processing accuracy.

Accordingly, in the present invention, the ultrasound oscillation of the metal ion electrolyte 112 can be performed by the action of the ultrasonic wave exciter 140 while irradiating the laser beam with the metal ion electrolyte 112 stored in the solution reservoir 110, It is possible to easily remove bubbles generated during the melting process of the substrate 10 and to smoothly discharge the process residue generated in the molten portion, thereby improving the processing accuracy.

As described above, according to the present invention, the solution reservoir 110 is provided through the ultrasonic wave exciter 140 while irradiating the laser beam on the upper surface of the glass 10, so that the reaction between the laser beam and the metal ion electrolyte So that the bubbles generated during the melting process of the lower surface of the glass (10) can be removed and the debris can be smoothly discharged.

Each component constituting the glass forming apparatus 100 using the ultrasonic vibration and the laser wet rear etching according to the present invention will be described in detail as follows. 1 and 2, the solution reservoir 110 constituting the present invention is for storing the metal ion electrolyte 112. The solution reservoir 110 includes a fixed reservoir (Not shown).

The metal ion electrolyte 112 stored on the solution reservoir 110 constituted as described above is a solution mixed with a light absorbing solution or a metal powder absorbing a laser beam and the metal ion electrolyte 112 is heated with a laser beam Vaporizes momentarily through the reaction and rapidly expands, and melts the lower surface of the glass as the object to be processed, thereby processing the shape.

In other words, when the laser beam meets the metal ion electrolyte 112, which is a light absorbing solution on the lower surface of the glass 10, the metal ion electrolyte 112 is locally heated, and as a result, the metal ion electrolyte 112) instantaneously vaporizes and rapidly expands to melt the glass surface. At this time, the generated bubbles and shock waves physically remove the molten glass 10 to smooth the etching process.

On the other hand, as the above-mentioned process repeatedly occurs, a considerably large amount of bubbles coalesce and gradually develop, and the larger bubbles become obstructed as the processing progresses. Accordingly, in the present invention, bubble growth is prevented through the use of ultrasonic waves for deep shape processing, thereby facilitating the glass etching process.

In order to prevent the solution reservoir 110 from being corroded by the metal ion electrolyte 112 stored in the solution reservoir 110, the solution reservoir 110 is made of stainless steel or aluminum.

1 and 2, the glass fixing jig 120 constituting the present invention is used for fixing the glass 10. The glass fixing jig 120 is used for storing water in the solution reservoir 110, So that only the lower surface of the glass is immersed in the metal ion electrolyte 112.

The glass fixing jig 120 as described above includes a glass mounting groove 122a through which the glass 10 is mounted and a metal ion electrolyte 122 formed through the glass mounting groove 122a and passing through the glass mounting groove 122a, A lower fixing jig 122 provided with a water immersion groove 122b for flooding the lower surface of the glass and a plurality of lower fixing grooves 122c formed at predetermined intervals on the rim, A plurality of upper fixing grooves 124b formed at predetermined intervals on the rim corresponding to the beam transmitting grooves 124a and the lower fixing grooves 122c formed so as to vertically penetrate the laser beam so that the laser beam can be radiated to the center, The upper fixing jig 124 and the lower fixing jig 122 and the upper fixing jig 124 are formed with the lower fixing groove 122c and the upper fixing groove 124b, So that the lower fixing jig 122 and the upper fixing jig 124 And a fastening means 126 for fixing the glass 10 on the glass receiving grooves 122a between the glass receiving grooves 122a. At this time, the fastening means 126 is a normal bolt and nut.

The lower fixing jig 122 constituting the glass fixing jig 120 is made of aluminum (Al) in the construction of the glass fixing jig 120 as described above, The material of the upper fixing jig 124 is made of acrylic.

The glass fixing jig 120 constructed as described above is mounted on the upper surface of the lower fixing jig 122 in a state where the glass 10 is seated on the glass mounting groove 122a of the lower fixing jig 122, 124 and tightened by fastening means 126 made of bolts and nuts through the lower fixing groove 122c and the upper fixing groove 124b. At this time, the upper and lower central portions of the glass 10 fixed by the glass fixing jig 120 are fixed to the lower fixing jig 122 and the upper fixing jig 124 by the water immersion hole 122c and the beam transmitting grooves 124a ), Which is exposed to the outside air.

Next, the jig fixing arm 130 constituting the present invention is for supporting the glass fixing jig 120 to which the glass 10 is seated and fixed. The jig fixing arm 130 is shown in Figs. 1 to 3 The lower surface of the glass 10 is immersed on the metal ion electrolyte 112 stored in the solution reservoir 110 by supporting the glass fixing jig 120 as shown in FIG.

The jig fixing arm 130 configured as described above is fixed to the fixing table 160 on which the solution reservoir 110 is installed and fixed through the vibration pad 132. That is, the jig fixing arm 130 is installed and fixed on the fixing table 160 on both sides of the solution reservoir 110 through the vibration pad 132. Both ends of the glass fixing jig 120 are coupled and fixed to both ends of the jig fixing arm 130 installed as described above.

As described above, the glass fixing jig 120, which is fixedly coupled to both ends of the jig fixing arm 130, is immersed in the metal ion electrolyte 112 stored in the solution water tank 110, So that the lower surface of the glass 10 fixed by the electrode 120 is immersed in the metal ion electrolyte 112.

The vibration damping pad 132 prevents the ultrasonic vibration of the ultrasonic wave vibrator 140 from being transmitted to the jig fixing arm 130 described above on the upper surface of the fixing table 160 on both sides of the solution water tank 110. [ And fixing the rear end of each of the jig fixing arms 130 through the upper portion to prevent the ultrasonic vibration from being transmitted to the glass 10, thereby preventing the glass 10 from shaking upon irradiation of the laser beam.

Therefore, as described above, the jig fixing arm 130 is fixed on the upper surface of the fixing table 160 through the vibration pad 132, so that the vibration of the ultrasonic wave can be prevented from being transmitted to the glass 10, So that stable inspection can be performed, and the accuracy of machining of the shape can be improved.

The ultrasonic oscillator 140 constituting the present invention is for making the metal ion electrolyte 112 stored in the solution reservoir 110 and storing it. And is configured to apply ultrasonic vibration to the metal ion electrolyte 112, as shown in FIG.

As described above, the ultrasonic wave exciter 140 installed on the lower side of the solution reservoir 110 to impart the ultrasonic vibration to the metal ion electrolyte 112 has the metal ion electrolyte 112 to generate the laser beam and the metal ion electrolyte 112), it is possible to prevent the bubbles generated in the process of melting on the lower surface of the glass 10 from being bundled together, and also to smooth the discharge of the residue, do.

In other words, the ultrasonic vibrator 140 constituting the present invention can prevent a considerable amount of bubbles from being bundled together while the melting process is repeatedly generated, thereby improving the processing accuracy of the shape. (140) prevents the growth of bubbles through the use of ultrasonic waves for deep processing of the shape, and prevents the re-solidification by smooth discharge of the machining residue generated in the melted portion, thereby improving the accuracy of machining the shape.

On the other hand, the vibration frequency of the ultrasonic vibrator 140 as described above is excited in a range of 20 to 40 kHz.

Next, the laser module 150 constituting the present invention is for irradiating a laser beam on the upper surface of the glass 10, and the laser module 150, as shown in FIGS. 1 and 3, A laser beam is irradiated onto the upper surface of the glass 10 fixed through the glass fixing jig 120 and the glass fixing jig 120 to form a shape from the lower portion to the upper portion of the glass 10 through the reaction with the metal ion electrolyte 112 .

When the laser beam of the laser module 150 as described above is irradiated on the upper surface of the glass 10, the laser passes through the glass 10 as it is and passes through the glass 10, And reacts with the electrolyte 112 to indirectly shape the glass 10.

The scan speed of the scan head constituting the laser module 150 upon irradiation of the laser beam onto the surface of the glass 10 through the laser module 150 configured as described above is scanned at a speed of 50 to 2,000 mm / s Lt; / RTI >

FIG. 4 is a block diagram illustrating a glass shaping method using ultrasonic vibration and laser wet backside etching according to the present invention.

As shown in FIG. 4, it can be seen that the processing of the glass shape of the technique according to the present invention is performed through the following process. That is, the glass processing method using the ultrasonic vibration and the laser wet rear etching according to the present invention includes the steps of (a) arranging the lower surface of the glass 10 so as to be submerged in the metal ion electrolyte 112, (b) (S110) a step of irradiating a laser beam onto the upper surface of the part to be processed of the glass (10) arranged so that the lower surface is immersed in the metal ion electrolyte (112), (c) (S120) of applying ultrasound vibration to the metal ion electrolyte 112 in the course of irradiation and (d) a step of irradiating ultrasonic vibration to the lower surface of the glass 10, which is melted by the heating reaction of the laser beam and the metal ion electrolyte 112, And a process (S130) of causing the shape to be processed to be processed from the lower surface of the glass 10 to the upper portion while the bubbles and the residue are removed.

In other words, the glass forming process using the ultrasonic vibration and the laser wet rear etching according to the present invention is a process in which the lower surface of the glass 10 is immersed on the metal ion electrolyte 112, Ultrasonic vibration is applied to the metal ion electrolyte 112 while being irradiated on the upper surface.

When ultrasonic vibration is applied to the metal ion electrolyte 112 while the laser beam is irradiated on the upper surface of the glass 10 as described above, the laser beam is irradiated on the lower surface of the glass 10 by the reaction between the laser beam and the metal ion electrolyte 112 The bubbles generated during the melting of the lower surface of the glass 10 are removed to prevent the growth of the bubbles, and the molten residue can be smoothly discharged, thereby preventing the re-solidification of the residue.

Accordingly, as described above, the bubbles generated during melting of the lower surface of the glass 10 are removed through the ultrasonic vibration to prevent the growth of bubbles, and the molten residue can be discharged smoothly, thereby preventing the re-solidification of the residue Thereby improving the processing precision of the glass shape to be processed.

5 is an enlarged view showing enlarged and compared glass shapes processed by a glass processing apparatus using ultrasonic vibration and laser wet rear etching according to the present invention.

As shown in FIG. 5, the shape of the glass is improved by increasing the scanning speed under the application of ultrasonic waves in the glass processing by the apparatus and method of glass processing using the ultrasonic vibration and the laser wet rear etching according to the present invention. Since it was confirmed that the workability is improved by the use of the ultrasonic wave in this way, the experiment was performed by increasing the reference speed to 50 mm / s or more. At this time, the laser module 150 used in the present invention uses a 1064 nm long wavelength laser, which is relatively inexpensive equipment.

That is, the machining shape can be obtained at a scan speed of 100 to 250 mm / s at a machining time of 7 minutes or less. However, at 300 mm / s, it takes 12 minutes or more, ), The circular shape of the intended size was often not completely processed.

6 (a) and 6 (b) and 6 (c) and 6 (d), it can be seen that as the scan speed increases, the machining energy is injected to improve the shape of the inlet and outlet, The shape of the part has been greatly improved. Table 1 shows the diameter and roundness of the shape shown in Fig. 6, respectively. Roundness was calculated in ㎛ units using minimum circumscribed circle method. At the scan speed of 250mm / s, the entrance part was not greatly improved in diameter and roundness, but the exit part was greatly improved as compared with 200mm / s. When a wet backside etch technique was performed while adding ultrasonic waves, a relatively clear through-hole shape was obtained at a scan speed of 250 mm / s.

On the other hand, the intended scan diameter in the machining program is 130 占 퐉, and the spot size of the laser beam is 60 to 70 占 퐉 in diameter, so that a through-hole shape having a diameter of 200 占 퐉 is finally targeted. In the actual processing result inlet, the diameter was measured to be about 228 占 퐉 and the outlet diameter to about 237 占 퐉 in (d) of the outlet in Fig. 6 (c). The size of the entrance was obtained close to the target, but the inlet and outlet were smaller than the outlet.

As described above, the reason why the exit is larger is because the laser is focused on the entrance portion, so that the farther from the entrance, the larger the size of the focus, and the taper appears to have occurred. Comparing the previous experimental results with the overall shape, it can be seen that not only the excessive cracks but also the recoat layer and the shape debris are reduced, and it is processed much cleaner than before. As a result, it was confirmed that micro-machining of the glass 10 is possible even in a laser having a near line wavelength.

Fig. 6 (a) 6 (b) 6 (c) 6 (d) 6 (e) 6 (f) diameter 231 197 228 237 181 121 Roundness 42 49 58 20 49 15

As a result, in order to improve the processing cost and the acidity in processing the microstructure of the glass, the present invention uses a 1064 nm long wavelength laser, which is relatively inexpensive equipment for the laser wet rear etching. Through this study, we investigated the processing pattern according to the pulse width and the speed of galvano scan in order to find the condition that the possible fast and good shape can be obtained by aiming at the penetration processing of the fine shape having the size of about 200 μm in diameter. Although the laser wet backside visualization method was performed in the same way as the existing method, the standard conditions were determined, but the processing residue and the bubble discharge were not smooth during the fine shape processing, Respectively.

First, the laser wet rear etching was performed in the same manner as in the previous method, but the processing residue and bubbles were not smoothly discharged during the machining process. And confirmed the problem. Therefore, in order to smooth the removal of bubbles and debris, which is a cause of lowering the shape accuracy, we applied the ultrasonic wave to compare the shape improvement effect. The ultrasonic waves applied to the present invention can prevent the irregular large explosion due to the bubbles from being easily removed even in narrow gaps due to the fine vibration of the solution,

In addition, it is possible to smoothly discharge the scum generated in the inside of the shape, thereby making it possible to perform micro-machining with a more accurate shape. As a result, it has been confirmed that the productivity of glass processing technology using infrared laser can be improved at high speed and low cost.

The present invention is not limited to the above-described embodiments, and various modifications may be made within the scope of the technical idea of the present invention.

10. Glass
100. Glass shaping apparatus 110. Solution reservoir
112. Metal ion electrolyte 120. Glass fixing jig
122. Lower fixing jig 122a. Glass seat
122b. Immersion grooves 122c. Lower fixing groove
124. Upper fixing jig 124a. Beam-transmitting groove
124b. Upper fixing groove 126. fastening means
130. Jig fixing arm 132. Antivibration pad
140. Ultrasonic Shaker 150. Laser Module
160. Fixture

Claims (10)

A solution storage tank in which a metal ion electrolyte is evaporated to instantaneously vaporize through a heating reaction with a laser beam to swell rapidly and melt a lower surface of the glass as an object to be processed;
A water immersion groove formed vertically through the center of the glass mounting groove for allowing the glass to be seated and immersed in the metal ion electrolyte stored in the solution reservoir; A lower fixing jig provided with a plurality of lower fixing grooves formed through the upper and lower fixing grooves, a beam transmission groove formed vertically through the center so as to allow the laser beam to be irradiated to the center in correspondence with the immersion groove, An upper fixing jig having a plurality of upper fixing grooves formed through the lower fixing jig and a lower fixing jig formed on the lower fixing jig and an upper fixing groove formed on an edge of the upper fixing jig, And fixing means for fixing the glass on the glass mounting groove between the upper fixing jigs, The metal ion in the electrolyte solution reservoir storing water glass jig fixed to the lower side of the glass to be submerged;
A jig fixing arm for supporting the glass fixing jig to immerse the lower surface of the glass on the metal ion electrolyte stored in the solution reservoir;
An ultrasonic vibrator installed at a lower side of the solution reservoir to impart ultrasonic vibration to the metal ion electrolyte; And
And a laser module for irradiating a laser beam onto the upper surface of the glass fixed through the jig fixing arm and the glass fixing jig to process the shape from the lower part of the glass to the upper part through reaction with the metal ion electrolyte A device for processing glass by ultrasonic vibration and laser wet back etching. [2] The apparatus according to claim 1, wherein the material of the solution reservoir is made of stainless steel or aluminum to prevent corrosion by a metal ion electrolyte stored in the solution reservoir. delete The apparatus according to claim 1, wherein the lower fixing jig constituting the glass fixing jig is made of aluminum (Al). [2] The apparatus according to claim 1, wherein the upper fixing jig constituting the glass fixing jig is made of acrylic material. The apparatus according to claim 1, wherein the vibration frequency of the ultrasonic vibrator is in a range of 20 to 40 kHz. The method according to claim 1, wherein the scan speed of the scan head is scanned at a speed of 50 to 2,000 mm / s when the laser beam is irradiated to the surface of the glass through the laser module. A glass forming apparatus using the same. The method as claimed in any one of claims 1, 2 and 4 to 7, wherein the solution reservoir is installed and fixed on a fixing table having a predetermined height formed through a frame. A glass shaping apparatus using a glass. [9] The apparatus of claim 8, wherein the jig fixing arms are fixed to upper portions of the fixing table on both sides of the solution reservoir through vibration damping pads. delete
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