KR101596873B1 - Apparatus for treating hazardous gas and powdery byproduct - Google Patents

Abstract

Provided is a treatment apparatus for harmful gas and fine byproducts, operated by a wet-type treatment method using steam to treat harmful gas and fine byproducts. To this end, the treatment apparatus comprises: an inlet pipe introducing harmful gas containing a fluoro-based compound; a heating chamber coupled to the inlet pipe and including a heating unit therein so as to heat the harmful gas supplied from the inlet pipe; a spray unit supplying moisture into the heating chamber; a wet-type chamber coupled to a lower part of the heating chamber and filled with washing liquid therein, so as to dissolve the harmful gas and the moisture which have passed through the heating chamber; and a post-treatment pipe coupled to the wet-type chamber and spraying the washing liquid onto the harmful gas which has passed through the wet-type chamber so as to discharge the gas after elimination of granular materials therefrom.

Description

TECHNICAL FIELD [0001] The present invention relates to an apparatus for treating hazardous gases and fine byproducts,

The present invention relates to an apparatus for treating harmful gas and micro-by-products, and more particularly, to an apparatus for treating harmful gas and micro-byproducts which treats harmful gas and powdery micro-by-products using steam.

Air pollution is intensifying. The exhaust gas generated in various industrial facilities and manufacturing facilities contains harmful substances, and air pollution is intensified. Gases containing harmful substances must be disposed of through appropriate treatment methods or they may be released into the air and cause serious contamination.

The exhaust gas may be treated in one or more ways, accompanied by a chemical, physical treatment process. The gas can be treated by various treatment methods such as using a filter, using an electric force, using a catalytic reaction, a combustion, a thermal reaction, or using a plasma. In particular, a wet treatment method in which a gas is dissolved in water is known as a method capable of treating a gas containing harmful substances more cleanly and safely.

However, in the conventional wet processing method, water, a cleaning liquid, or the like is simply brought into contact with a gas, so that there is a problem that the treatment efficiency is greatly reduced or difficult to be applied depending on the components of the noxious gas. For example, in the case of a process gas used in a manufacturing process of a specific product, an oxidation process at a high temperature is required, so that it has been difficult to smoothly process it by a conventional wet process process. In addition, there is a problem that it is difficult to efficiently collect and process powdery fine byproducts that are generated together by the reaction of the process gas in the production process. Accordingly, there is a demand for development of a technology capable of processing them more safely and efficiently.

Korean Patent Publication No. 10-2004-0031132, (Apr. 13, 2004)

Disclosure of Invention Technical Problem [8] Accordingly, the present invention has been made in order to solve the above problems, and it is an object of the present invention to provide a device for treating harmful gases and micro-byproducts which treats noxious gases and powdery fine byproducts using steam.

The technical problem of the present invention is not limited to the above-mentioned problems, and other technical problems not mentioned can be clearly understood by those skilled in the art from the following description.

The apparatus for treating harmful gas and micro-byproducts according to the present invention comprises: an inflow pipe into which noxious gas containing a fluorine compound flows; A heating chamber connected to the inflow pipe and including a heating unit therein for heating the noxious gas supplied from the inflow pipe; An injection unit for supplying water into the heating chamber; A wet chamber connected to a lower portion of the heating chamber and filled with a cleaning liquid to dissolve the noxious gas and moisture passing through the heating chamber; And a post-treatment pipe connected to the wet chamber and spraying a cleaning liquid to the noxious gas passed through the wet chamber to remove particulate matter and discharge the particulate matter to the outside.

Wherein the post-treatment pipe has a double pipe structure including an inner pipe directly connecting the wet chamber to the outside and an outer pipe enclosing the outer pipe from the outside and having a plurality of blocking plates stacked on the inner pipe, A part of the inner cylinder may be opened to communicate with the outer cylinder so that the blocking plate is exposed.

The blocking plate may be formed in a direction perpendicular to the moving direction of the noxious gas, and may be formed with a guide wing for guiding the noxious gas to the outer tube at an outlet of the hole.

The guide vane may extend radially from the center of the blocking plate.

And the post-treatment pipe may include an injection nozzle that penetrates the outer cylinder and the inner cylinder and injects the cleaning liquid into the inner cylinder.

The post-treatment pipe may be formed with a discharge hole communicating between the outer cylinder and the wet chamber.

Wherein the wet chamber further comprises at least one blocking wall which blocks the heating chamber and the post-treatment pipe and forms a plurality of holes of the perforated plate structure, wherein the outlet of the hole is provided with a guide A guide wing can be formed.

The blocking wall may be installed in the upper portion of the inside of the wet chamber and at least partly be immersed in the cleaning liquid filled in the wet chamber.

According to the present invention, it is possible to treat noxious gas and fine by-products very safely and effectively by a wet treatment method using steam. In particular, by using a wet treatment method using steam and a pyrolysis method, noxious gas containing a fluorine compound can be treated with high efficiency. In addition, powdery micro-by-products discharged together with harmful gas can be collected and treated very effectively by a wet process using steam. In addition, it is possible to simplify the equipment by omitting expensive high-temperature processing facilities and additional equipment by allowing the temperature to reach a temperature capable of decomposing harmful substances in a short time. Thereby greatly improving the treatment performance of harmful gas and fine byproducts with a small amount of energy.

1 is a perspective view of an apparatus for treating harmful gas and micro-byproducts according to an embodiment of the present invention.
2 is a cross-sectional view showing the internal structure of the processing apparatus of FIG.
Fig. 3 is an enlarged cross-sectional view of a part of the heating chamber of the processing apparatus of Fig. 2;
Fig. 4 is an enlarged cross-sectional view of a portion of the wet chamber of the processing apparatus of Fig. 2;
5 is an enlarged cross-sectional view showing a part of a post-treatment pipe of the treatment apparatus of Fig.
FIG. 6 is an enlarged cross-sectional view of a shielding plate installed in the post-treatment pipe of FIG. 5;

Brief Description of the Drawings The advantages and features of the present invention and methods for accomplishing the same will become more apparent by referring to the embodiments described hereinafter in detail with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. To fully explain the scope of the invention to a person skilled in the art, and the invention is only defined by the claims. Like reference numerals refer to like elements throughout the specification.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which exemplary embodiments of the invention are shown. 2 is a cross-sectional view showing the internal structure of the processing apparatus of Fig. 1; Fig.

1 and 2, an apparatus 1 for treating noxious gas and micro-byproducts according to an embodiment of the present invention includes an inflow pipe 130, an inflow pipe 130 (see FIG. 2) into which noxious gas A spraying unit 120 connected to the heating chamber 100 and supplying moisture to the inside of the heating chamber 100 and a cleaning unit 100 connected to the lower part of the heating chamber 100, B and a wet chamber 200 connected to the wet chamber 200 and spraying the cleaning liquid B to the noxious gas passing through the wet chamber 200 to remove the particulate matter and discharge it to the outside, 300). The noxious gas A containing the fluorine compound is introduced through the inflow pipe 130 and the inflowing noxious gas A is supplied to the heating chamber 100 connected to the inflow pipe 130. At this time, the water supplied from the injection unit 120 is evaporated in the heating chamber 100 to generate steam, and the harmful gas A and steam are combined. If desired, water in the form of steam (steam) may be provided directly from the injection unit 120.

That is, the apparatus 1 for treating noxious gas and micro-byproducts according to an embodiment of the present invention supplies steam (steam) to the noxious gas A to convert it into a gas containing steam. The pollutants of the harmful gas (A) are dissolved in the steam and processed beforehand. Particulate or powdery byproducts flowing in the harmful gas are also collected in the steam and pretreated. As a result, it is possible to create a condition in which the minute byproducts contained in the harmful gas and the harmful gas can be easily dissolved together with steam in the cleaning liquid (B) or the like. In addition, the steam distributed around the heating unit 110 of the heating chamber 100 can generate a high-temperature decomposition gas (H ₂ , O _2, etc.) by thermal decomposition to raise the temperature inside the chamber more quickly . In this way, both the harmful gas and the powdery fine by-products can be treated at a very high efficiency by using a combination of the thermal decomposition method as well as the wet treatment method in which the pollutant is dissolved in the cleaning liquid (B).

Hereinafter, description will be made on the basis of the case where moisture is evaporated in the heating chamber 100 to generate steam. However, steam may be directly supplied into the heating chamber 100 as required, as described above. That is, the moisture supplied from the injection unit 120 into the heating chamber 100 does not preclude the case where it is directly provided in the form of a high-temperature steam (steam).

In addition, the apparatus 1 for treating harmful gas and micro-byproducts according to the embodiment of the present invention can change the flow of gas flexibly by using a blocking wall (see 210 in FIG. 2) and a blocking plate (see 310 in FIG. 2) . That is, by providing the blocking wall 210 and the blocking plate 310 on the gas flow path made up of different chambers, conduits, etc., the fluid flow is changed and the gas is allowed to contact and dissolve more smoothly with the cleaning liquid B, To separate particulate matter in the air. This makes it possible to treat both the harmful gas and the powdery fine by-products very efficiently and effectively.

As shown in FIGS. 1 and 2, the apparatus 1 for treating harmful gas and micro-byproducts is formed in such a manner that a heating chamber 100, a wet chamber 200, and a post-treatment pipe 300 are interconnected. The noxious gas A containing contaminants such as fluorine-based compounds and fine byproducts is supplied to the heating chamber 100 through the inlet pipe 130 as shown in FIG. 2 and is introduced into the heating chamber 100 in the heating chamber 100 ), And is sequentially processed while passing through the post-treatment pipe 300 in the wet chamber 200 again. After passing through the post-treatment pipe 300, the pollutants are treated and the purified gas C is discharged. Hereinafter, the structure and operation of each component, the process of treating noxious gas, and the like will be described in more detail with reference to the respective drawings of FIG. 1 to FIG.

Fig. 3 is an enlarged cross-sectional view of a part of the heating chamber of the processing apparatus of Fig. 2;

The inlet pipe 130 is connected to the top of the heating chamber 100 as shown in FIGS. One or more than one inlet pipe 130 may be formed and a plurality of the inlet pipes 130 may be connected in parallel with the heating chamber 100 as shown. The inlet pipe 130 may be made of a single pipe as shown, but need not be limited thereto. If necessary, a plurality of ducts may be integrated into one manifold to form a manifold-like inlet pipe 130. The inlet pipe 130 is formed in various forms that can introduce the noxious gas A into the heating chamber 100.

One end of the inflow pipe 130 is connected to the heating chamber 100 and the other end is connected to a manufacturing facility that generates the noxious gas A. [ For example, an inflow pipe 130 may be connected to a semiconductor manufacturing facility, a liquid crystal manufacturing facility, a solar cell manufacturing facility, and an LED manufacturing facility to treat noxious gas and powdery (or particulate) . The noxious gas generated in such a manufacturing facility includes a process gas used for an etching and a deposition process and a micro-by-product generated by a process gas reaction, and in particular, a fluorine compound is contained in the process gas. The inflow pipe 130 inflows the noxious gas to the heating chamber 100.

The heating chamber 100 is connected to the inlet pipe 130 and includes a heating unit 110 therein. The heating chamber 100 may have various structures in which a space is formed in a hollow shape. That is, the heating chamber 100 need not be limited to a cylindrical structure or the like. The heating unit 110 and the like can be easily installed therein and the heating chamber 100 can be formed in various forms in which a flow path of the gas can be formed. The heating chamber 100 heats and decomposes the noxious gas A supplied from the inflow pipe 130.

A heating unit 110 is installed in a space inside the heating chamber 100. The heating unit 110 is composed of a heater in which a hot wire is inserted. A power supply line may be connected to one side of the heating unit 110 to supply power and to heat the heating unit 110. The heating unit 110 may include a structure for amplifying heat such as a heat accumulator or a reflector. The heating unit 110 may be heated to several hundred degrees Celsius to more than one degree Celsius in proportion to the amount of power supplied. The heating unit 110 may be formed in the form of a bar with a built-in heating wire to increase the heating area. However, the shape of the heating unit 110 is not limited to this, and the heating unit 110 of a more suitable shape can be constructed in correspondence with the shape and structure of the heating chamber 100. A plurality of the heating units 110 may be disposed at positions adjacent to the inflow pipe 130.

At the center of the interior of the heating chamber 100, an injection unit 120 is formed. The injection unit 120 supplies moisture into the heating chamber 100 to generate steam. 2 and 3, steam (not shown) may be generated in the heating chamber 100 by supplying water B 'into the heating chamber 100 provided with the heating unit 110 . The steam is formed by vaporization of moisture (B ') supplied into the heating chamber 100 by heat and is distributed throughout the heating chamber 100 and combined with the introduced noxious gas (A). In addition, the steam is thermally decomposed in the vicinity of the heating unit 110 to generate high-temperature decomposition gas. The contaminants of the noxious gas (A) are collected in the steam and processed in a form that is easily dissolved in the cleaning liquid (B), and the temperature of the heating chamber (100) rises quickly. The heating chamber 100 in which the temperature is raised supplies reactive energy to the supplied noxious gas (A), and the fluorine compound contained in the noxious gas (A) is oxidized at a high temperature to be decomposed. In this way, steam is generated in the heating chamber 100, and a rapid temperature rise occurs, and the fluorine-based compound is processed through the pre-treatment of the contaminants and the high-temperature decomposition.

The injection unit 120 is formed in the form of a bar or a pipe including a plurality of injection ports 122. The injection unit 120 is connected to a supply pipe 121 for supplying raw water and can spray the raw water supplied in powder form. If necessary, a plurality of the injection units 120 may be formed. The injection unit 120 may be formed to extend into the heating chamber 100 and supply water B 'more uniformly into the heating chamber 100 through the plurality of injection holes 122. However, the shape of the injection unit 120 need not be so limited, and the shape of the injection unit 120 can be modified in various forms in which the moisture in the heating chamber 100 is easily supplied.

Fig. 4 is an enlarged cross-sectional view of a portion of the wet chamber of the processing apparatus of Fig. 2;

The wet chamber 200 is connected to the lower portion of the heating chamber 100 as shown in FIG. As shown in FIGS. 2 and 4, the inside of the wet chamber 200 is filled with the cleaning liquid B. As shown in FIG. The cleaning liquid (B) may be water or a liquid other than water. The cleaning liquid (B) may be water or a mixture of water and another material. In this case, explanation will be made on the basis of the cleaning liquid (B) composed of water. In this case, the contaminants that have been infiltrated into the steam by the same amount of the steam and the cleaning liquid (B) It is possible to obtain an advantage that it is more easily dissolved in the solution. However, the present invention is not limited thereto, and various cleaning liquids (B) may be formed by using a mixture which is easy to treat contaminants, if necessary.

The noxious gas A and the water B 'which have passed through the heating chamber 100 are dissolved in the cleaning liquid B in the wet chamber 200 and treated. As described above, steam is generated from the moisture (B '), and the steam and the noxious gas (A) are combined with each other, so that contaminants containing micro-byproducts are trapped in the steam, and the steam containing the contaminants is returned to the wet chamber (B) inside the cleaning liquid (B). Through this process, the contaminants can be easily dissolved in the cleaning liquid (B). The wet chamber 200 may be formed in various forms in which a space for accommodating the cleaning liquid B is formed and may have a larger area to support the heating chamber 100 and the after-treatment pipe 300 and the like. The wet chamber 200 is interconnected with the heating chamber 100 and the post-treatment tube 300 via at least two different connectors 201, 202 as shown in FIG. The wet chamber 200 may be formed in various forms in consideration of the overall structure of the processing apparatus, the structure of the place where the processing apparatus is installed, the structure of the processing facility, and the like.

The wet chamber 200 includes at least one blocking wall 210 that cuts off between the heating chamber 100 and the after-treatment pipe 300 and forms a plurality of holes of a perforated plate structure. As shown in FIG. 4, a plurality of holes 211 are formed in the blocking wall 210 and guide vanes 212 are formed at the exit of the holes 211. The outlet of the hole 211 refers to a part where the noxious gas A passes through the hole 211. The guide wing 212 is formed in each hole 211 and is bent to one side to guide the noxious gas A in the direction toward the cleaning liquid B. [

The guide wing 212 may be integrally formed with the blocking wall 210 by deforming a part of the blocking wall 210 or may be separately formed and coupled to the blocking wall 210. The guide vane 212 may be deflected at least once, and the direction in which it is deflected may be reversed when deflected more than once. The flow direction of the noxious gas A can be easily switched to the direction of the cleaning liquid B while minimizing the reduction of the flow rate of the noxious gas A by changing the curved shape of the guide vane 212. [ The size, shape, refraction direction of the guide wing 212, size, shape, position, arrangement state and the like of the holes 211 can be appropriately changed if necessary.

The blocking wall 210 extends downward from the upper inside of the wet chamber 200 as shown in FIG. The blocking wall 210 is installed in the upper part of the inside of the wet chamber 200 and extends downward so that at least a part of the blocking wall 210 is kept immersed in the cleaning liquid B filled in the wet chamber 200. 4, the noxious gas A passes through the holes 211 and moves between the blocking walls 210 so that the flow direction is repeated by the guide vanes 212 located at the outlet of the holes 211 . The guide wing 212 is bent in the direction in which the cleaning liquid B is positioned to repeatedly induce the contact between the noxious gas A and the cleaning liquid B. [ It is possible to repeatedly change the flow direction of the noxious gas (A) by repeatedly arranging the plurality of blocking walls (210). This makes it possible to increase the contact frequency between the harmful gas A and the cleaning liquid B to dissolve the pollutant contained in the noxious gas A more effectively in the cleaning liquid B.

FIG. 5 is an enlarged cross-sectional view of a portion of a post-treatment pipe of the treatment apparatus of FIG. 2, and FIG. 6 is an enlarged cross-sectional view of a cut-off plate provided in the post-treatment pipe of FIG.

The post-treatment pipe 300 is formed in the shape of a double pipe as shown in FIGS. 2 and 5. The post-treatment pipe 300 includes an inner pipe 301 for directly connecting the wet chamber 200 to the outside as shown in FIG. 2, and an outer pipe 302 enclosing the outer portion of the inner pipe 301, Structure. The inner cylinder 301 has a discharge port 301a formed at an upper end thereof to discharge the purified gas C through the discharge port 301a. An injection nozzle 320 for injecting a cleaning liquid B into the inner cylinder 301 is formed at one side of the post-processing tube 300 through the outer cylinder 302 and the inner cylinder 301 and the injection nozzle 320 is connected to a supply pipe 321, and injects the cleaning liquid into the inner cylinder 301. Therefore, as shown in FIGS. 2 and 5, the cleaning liquid B is sprayed again onto the noxious gas A passed through the wet chamber 200 to remove the particulate matter, and the purified gas C is introduced into the post- 300).

The inner tube 301 of the post-processing tube 300 is provided with a plurality of blocking plates 310 which are overlapped with each other as shown in FIG. 2 and FIG. A part of the inner cylinder 301 is opened to expose the blocking plate 310 and the inner cylinder 301 and the outer cylinder 302 are communicated with each other through the opening 301b in which the inner cylinder 301 is opened. As shown in FIG. 6, the blocking plate 310 has a plurality of holes 311 formed therein and is disposed in a direction perpendicular to the moving direction of the noxious gas. A guide vane 312 for guiding the noxious gas to the outer cylinder 302 is formed at the exit of the hole 311. Accordingly, the flow direction of the noxious gas A is changed again by the blocking plate 310, so that the particulate matter remaining in the noxious gas can be separated into the outer cylinder 302 through the opening 301b.

As shown in FIG. 6, a plurality of blocking plates 310 are arranged in a stacked manner with a predetermined spacing in the horizontal direction. The blocking plate 310 overlaps with each other along the flow direction of the noxious gas so that the flow direction of the noxious gas can be repeatedly changed using the holes 311 and the guide vanes 312. The noxious gas passes through the hole 311 and travels along the guide vane 312, decelerating, and in particular, the relatively heavy particulate matter D remaining in the noxious gas is separated by gravity. That is, the direction of the noxious gas is changed by the guide vane 312 to be directed to the outer cylinder 302 side, and the particulate matter D falls due to its own weight and is discharged to the lower side of the outer cylinder 302. As shown in FIG. 5, a discharge hole 302a communicating between the outer cylinder 302 and the wet chamber 200 is formed under the outer cylinder 302 to allow the falling particulate matter D to flow into the wet chamber 200 Can be discharged.

Thus, the particulate matter D remaining in the cleaning liquid B without being dissolved can be treated by the discharge structure including the blocking plate 310 formed in the post-treatment pipe 300. The refraction direction of the guide wing 312 of the blocking plate 310 can be adjusted by considering the position of the opening 301b and the position of the hole 311 and the purified gas from which the particulate matter D has been removed is raised The direction of refraction of the guide vane 312 can be formed to be between the upper hole 311 and the opening 301b between the overlapping barrier plates 310 so as to facilitate discharge through the air flow. The size, shape, position, arrangement state of the holes 311 formed in the blocking plate 310 and the size, shape, refraction direction, etc. of the guide vanes 312 can be appropriately adjusted in various forms as needed.

As described above, the wet processing structure including the heating chamber 100, the wet chamber 200, and the post-treatment tube 300 can be used to treat noxious gas and fine byproducts very safely and effectively. The overall process of the apparatus will be described with reference to FIG.

First, the noxious gas (A) flows through the inflow pipe (130). The noxious gas A is supplied into the heating chamber 100 and the water B 'injected by the injection unit 120 is heated by the heating unit 110 and converted into steam in the heating chamber 100 . The steam combines with the noxious gas (A) supplied to the heating chamber (100) to collect the contaminants contained in the noxious gas (A) in advance.

That is, as described above, contaminants of the noxious gas (A) including minute byproducts are collected in steam (steam) and processed in advance. Contaminants which are liable to be dissolved in water or particulate matter which is liable to adhere to vapor droplets are easily trapped in the steam and can be pretreated. Also, the steam around the heating unit 110 generates a decomposed gas at a high temperature by thermal decomposition and raises the temperature of the chamber, so that the temperature of the heating chamber 100 rapidly increases. Therefore, the fluorine-based compound contained in the noxious gas A is thermally decomposed and treated in accordance with the temperature rise of the heating chamber 100.

The noxious gas (A) containing steam is transferred to the wet chamber (200) below the heating chamber (100) and dissolved in the cleaning liquid (B). That is, contaminants that have been pretreated in a state that they are easily dissolved by steam are dissolved in the cleaning liquid B filled in the wet chamber 200 and collected in the water. Contaminants which have not been preliminarily processed by some of the steam are also subjected to the dissolution treatment in contact with the cleaning liquid B by the action of the blocking wall 210. The blocking wall 210 promotes the dissolution of the pollutant by repeatedly moving the noxious gas A toward the cleaning liquid B using a hole (see 211 in Fig. 4) and a guide vane (see 212 in Fig. 4) . As a result, most of the pollutants of the noxious gas (A) are dissolved in the cleaning liquid (B) and treated.

The noxious gas (A) which has passed through the wet chamber (200) is finally treated again while passing through the post-treatment pipe (300). That is, the particulate matter remaining in the noxious gas (A) can be washed again by the cleaning liquid (B) injected by the injection nozzle (320) in the post-treatment pipe (300). In addition, the blocking plate 310 may be installed on the inner tube 301 of the post-processing pipe 300 having a double pipe structure to separate the particulate matter by its own weight by the action of the blocking plate 310. The blocking plate 310 guides the noxious gas A to the outer cylinder 302 by using the hole (see 311 in FIG. 6) and the guide vane (see 312 in FIG. 6) Can be dropped and processed by its own weight.

By the combined action of the heating chamber 100, the wet chamber 200, the post-treatment tube 300, the blocking wall 210, and the blocking plate 310, the noxious gas A containing the fluorine- By-products and the like can be treated very safely and effectively. The purified gas (C) from which the contaminants have been removed is safely discharged to the top of the after-treatment pipe (300).

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken in conjunction with the present invention. You will understand. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive.

1: Hazardous gas and fine byproduct treatment device
100: heating chamber 110: heating unit
120: injection unit 121, 321: supply pipe
122: jetting port 130: inlet pipe
200: wet chamber 201, 202: connection port
210: blocking wall 211, 311: hole
212, 312: guide wing 300: post-treatment pipe
301: inner cylinder 301a: outlet
301b: opening 302:
302a: Exhaust hole 303: Backflow prevention plate
310: blocking plate 320: injection nozzle
A: noxious gas B: cleaning liquid
B ': water C: purified gas
D: particulate matter

Claims (8)

An inflow pipe into which noxious gas containing a fluorine-based compound flows;
A heating chamber connected to the inflow pipe and including a heating unit therein for heating the noxious gas supplied from the inflow pipe;
An injection unit for supplying water into the heating chamber;
A wet chamber connected to a lower portion of the heating chamber and filled with a cleaning liquid to dissolve the noxious gas and moisture passing through the heating chamber; And
And a post-treatment pipe connected to the wet chamber and spraying a cleaning liquid to the noxious gas passed through the wet chamber to remove particulate matter and discharge the particulate matter to the outside,
Wherein the post-treatment pipe has a double pipe structure including an inner pipe directly connecting the wet chamber to the outside, and an outer pipe sealed from the outside to surround the outer pipe,
Wherein a plurality of blocking plates overlapping each other are provided in the inner cylinder, and a part of the inner cylinder is opened so that the blocking plate is exposed to communicate with the outer cylinder. delete The method according to claim 1,
The blocking plate has a perforated plate structure in which a plurality of holes are perforated, and is disposed in a direction perpendicular to the moving direction of the noxious gas,
And an outlet of the hole is provided with a guide blade for guiding the noxious gas to the outer tube. The method of claim 3,
Wherein the guide wing extends radially from a center of the blocking plate. The method according to claim 1,
Wherein the post-treatment pipe includes an injection nozzle that penetrates the outer cylinder and the inner cylinder to inject a cleaning liquid into the inner cylinder. The method according to claim 1,
Wherein the post-treatment pipe has an exhaust hole communicating between the outer cylinder and the wet chamber. An inflow pipe into which noxious gas containing a fluorine-based compound flows;
A heating chamber connected to the inflow pipe and including a heating unit therein for heating the noxious gas supplied from the inflow pipe;
An injection unit for supplying water into the heating chamber;
A wet chamber connected to a lower portion of the heating chamber and filled with a cleaning liquid to dissolve the noxious gas and moisture passing through the heating chamber; And
And a post-treatment pipe connected to the wet chamber and spraying a cleaning liquid to the noxious gas passed through the wet chamber to remove particulate matter and discharge the particulate matter to the outside,
Wherein the wet chamber further comprises at least one blocking wall that cuts off between the heating chamber and the post-treatment tube and forms a perforated plate structure having a plurality of holes,
And a guide vane is formed at an exit of the hole to guide the noxious gas toward the cleaning liquid. 8. The method of claim 7,
Wherein the blocking wall is installed in the upper portion of the inside of the wet chamber and at least part of which is submerged in the cleaning liquid filled in the wet chamber.

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