KR102262643B1 - Heat exchanger and exhaust gas treatment device using said heat exchanger - Google Patents

Abstract

Provided are a heat exchanger capable of securing a sufficient heat transfer area and easily performing internal cleaning and maintenance, and an exhaust gas treatment apparatus using the same. That is, in the heat exchanger 10 of the present invention, the internal space of the body casing 16 having a double tube structure is spirally formed over the entire axial direction, and the hydrothermal fluid flow path 18 and the heat dissipation fluid are adjacent to each other in the axial direction. A heat transfer plate (22) partitioned by a flow path (20) is provided. A heat-receiving fluid outlet 18b and a heat-dissipating fluid inlet 20a are opened at the upper end of the body casing 16 , and a space communicating with the heat-receiving fluid outlet 18b and the heat-dissipating fluid inlet 20a at the upper portion of the body casing 16 . A head box 24 partitioning the . Then, on the upper end surface of the main body casing 16, the heat receiving fluid outlet 18b and the heat dissipating fluid inlet 20a are connected on the inclined surfaces 26b and 26c in which the top portion 26a is common, and provided to the top portion 26a. A guide member 26 for guiding the heated fluid to the hydrothermal fluid outlet 18b and the heat radiation fluid inlet 20a is mounted.

Description

HEAT EXCHANGER AND EXHAUST GAS TREATMENT DEVICE USING SAID HEAT EXCHANGER

The present invention mainly relates to a heat exchanger suitable for a thermal decomposition treatment process of exhaust gas, and an exhaust gas treatment apparatus using the same.

The heat exchanger has at least two flow paths divided from each other by a heat transfer plate, and at the same time allowing a low-temperature hydrothermal fluid (gas or liquid, hereinafter the same) to flow through one flow path, By passing a high-temperature heat-radiating fluid through the other flow path, heat transfer (heat transfer) is performed between the heat-dissipating fluid and the heat-receiving fluid.

Such a heat exchanger is used in various industrial processes using heat, for example, in Patent Document 1, a heat exchanger is installed in an exhaust gas removal device, and combustion or thermal decomposition in a removal processing unit of the exhaust gas removal device is used. Disclosed is a technique for exchanging heat between a high-temperature gas generated by the gas and an inert gas introduced into a pipe leading to the detoxification unit.

According to such a technique, the temperature of the gas discharged|emitted from a removal processing part can be reduced, and the cooling burden of exhaust gas can be reduced. In addition, since the temperature of the inert gas introduced into the pipe leading to the detoxification processing unit can be increased, it is possible to suppress the formation and adhesion of solids due to the decrease in the temperature of the exhaust gas in the pipe. Accordingly, it is possible to make it unnecessary to install a heater to the pipe, and it is possible to achieve cost reduction.

Patent Document 1: Japanese Patent Laid-Open No. 2006-275421

However, the conventional heat exchanger and the exhaust gas treatment apparatus using the same have the following problems.

That is, in the conventional heat exchanger used in this type of device, one of the flow path of the heat dissipation fluid or the flow path of the heat receiving fluid is generally curved in order to secure a contact area (in other words, "heat transfer area") between the heat dissipation fluid and the heat receiving fluid. It is configured to be meandering, and at the same time configured to distribute into a plurality of tubules with the other side in parallel. Therefore, when the heat dissipation fluid and heat-receiving fluid flowing through these flow passages contain some kind of dust, for example, semiconductor exhaust gas, in the corner portion of one of the flow passages configured to be serpentine, the direction of the flow of the fluid is When inverting, a centrifugal force or the like acts on the fluid, so that dust or the like is separated from the fluid and deposited on the corner of the flow path. In addition, in the other one of the flow passages configured to be distributed into a plurality of parallel tubules, the flow rate drops when distributed to the plurality of tubules, and thus, in this case as well, dust is deposited as described above. As a result, heat transfer efficiency is remarkably lowered, and the pressure loss when the fluid flows through the flow path increases, reducing or clogging the flow rate, and there may be a problem in that the load on the vacuum pump (or blower) increases.

When such a problem occurs, the operation of the heat exchanger (and the device using the heat exchanger) is stopped and the inside is cleaned, but it is extremely difficult to clean the corners of the tortuous flow passages or the dust accumulated in the customs. It is a work that takes

Further, as described above, in order to increase the heat transfer area between the heat dissipating fluid and the heat-receiving fluid, if the flow path of these fluids is made to be greatly serpentine or distributed in a tubule, the heat exchanger inevitably becomes large. As such, when the heat exchanger becomes large, the heat dissipation area exposed to the surface increases, and there is also a problem that the heat exchange efficiency is substantially reduced.

Accordingly, the main object of the present invention is to provide a high-efficiency heat exchanger that can secure a sufficient heat transfer area despite its compactness and can easily perform internal cleaning and maintenance. Another object of the present invention is to provide an exhaust gas treatment apparatus capable of efficiently thermally decomposing (removing) large-capacity exhaust gas using such a heat exchanger.

In order to achieve the above object, the present invention, for example, as shown in Figures 1 to 3, the heat exchanger 10 was configured as follows.

That is, the main body casing 16 of the double-tube structure consisting of the outer tube 12 and the inner tube 14, the axes of which are erected in the vertical direction, and the outer tube 12 and the inner tube 14 ) is formed in a spiral over the entire axial direction of the body casing 16, and at the same time, a hydrothermal fluid flow path 18 and a heat radiation fluid flow path adjacent to each other in the axial direction of the body casing 16 ( 20) divided by a heat transfer plate 22. At the lower end of the main body casing 16, a hydrothermal fluid inlet 18a connected to the hydrothermal fluid flow path 18 and a heat radiation fluid outlet 20b connected to the heat dissipation fluid flow path 20 are opened, and at the same time, the main body At the upper end of the casing 16 , a hydrothermal fluid outlet 18b connected to the hydrothermal fluid flow path 18 and a heat radiation fluid inlet 20a connected to the heat dissipation fluid flow path 20 are provided.

The present invention exhibits, for example, the following actions.

Since the hydrothermal fluid flow path 18 and the heat radiation fluid flow path 20 are adjacent in the axial direction of the body casing 16 and are spirally formed over the entire axial direction of the body casing 16, the heat transfer plate 22 is It is possible to maximize the contact area, that is, the heat transfer area, between the heat-receiving fluid on the low-temperature side and the heat-dissipating fluid on the high-temperature side, in contact through the

In addition, instead of the hydrothermal fluid flow path 18 and the heat radiation fluid flow path 20 being meandering (that is, having an abrupt corner portion such that the flow path reverses), the outer periphery of the inner pipe 14 is spirally formed. Because of the shape of turning, and because the heat-receiving fluid and the heat-dissipating fluid always flow at a high speed in the flow path of approximately the same shape without branching, it is difficult to accumulate the above dust in the flow path. It can be washed relatively simply by flowing an internal cleaning fluid such as cleaning air.

Further, since the heat radiation fluid and the heat receiving fluid contacting through the heat transfer plate 22 flow back, the heat exchange efficiency is further improved, and the device can be made compact. In addition, only by supplying the above-mentioned internal cleaning fluid to each of the heat-receiving fluid outlet 18b and the heat-dissipating fluid inlet 20a provided at the upper end of the body casing 16, the internal cleaning fluid flows down due to gravity or the like. , it is possible to simply clean the inside of the heat exchanger 10 .

In the present invention, for example, as shown in Figs. 1 and 2, it is preferable to add the following configuration.

That is, while attaching a head box 24 defining a space communicating the heat receiving fluid outlet 18b and the heat dissipating fluid inlet 20a to the upper portion of the main body casing 16, The heat-receiving fluid outlet 18b and the heat-dissipating fluid inlet 20a are connected on the inclined surfaces 26b and 26c in which the top portion 26a is common to the top surface, and the fluid applied to the top portion 26a is subjected to the heat reception. It is preferable to mount a guide member 26 for guiding the fluid outlet 18b and the heat dissipation fluid inlet 20a.

In this case, the hydrothermal fluid flow path 18 and the heat radiation fluid flow path 20 are formed by simply spraying and supplying a fluid for cleaning the inside of the heat exchanger such as washing water toward the top portion 26a of the guide member 26 . It becomes possible to automatically supply a fluid for internal cleaning to each.

Further, in the present invention, in addition to each of the above structures, for example, as shown in FIG. 4 , at least the heat radiation fluid flow path 20 among the water heat fluid flow path 18 and the heat radiation fluid flow path 20 . ) It is preferable to install a purge gas supply means 50 for injecting a purge gas toward the bottom of the inner space in the.

Here, the purge gas refers to particles such as dust accumulated in the heat radiation fluid flow path 20 (and the hydrothermal fluid flow path 18) toward the heat radiation fluid outlet 20b (and the hydrothermal fluid inlet 18a) and blows away. It is a gas for cleaning (flushing). It is particularly suitable to use an inert gas such as nitrogen gas as the purge gas.

Further, the exhaust gas processing apparatus according to the second invention is an apparatus using the above-described heat exchanger 10, and, for example, as shown in FIG. 1, the exhaust gas processing apparatus is configured as follows.

That is, the reaction tower 32 provided with the heat exchanger 10 and the heating means 30 for heating the exhaust gas E to be treated that has flowed through the hydrothermal fluid flow passage 18 of the heat exchanger 10 . ), and a wet inlet scrubber 34 that liquid-cleans the exhaust gas E to be treated introduced into the reaction tower 32 or the exhaust gas after thermal decomposition in the reaction tower 32 ( E) is provided with at least one of the wet outlet scrubbers 36 for liquid cleaning.

Further, the exhaust gas processing apparatus according to the third invention is an apparatus using the above-described heat exchanger 10, and for example, as shown in FIG. 3, the exhaust gas processing apparatus is configured as follows.

That is, the reaction tower 32 composed of the heat exchanger 10 and the heating means 30 for heating the exhaust gas E to be treated that has passed through the hydrothermal fluid flow path 18 of the heat exchanger 10 . ) is provided. Exhaust gas (E) in at least either in the heat exchanger 10 in the heat-receiving fluid flow-through path 18 near the heat-receiving fluid inlet 18a or in the heat-dissipating fluid flow-through path 20 near the heat radiation fluid outlet 20b One or a plurality of spray nozzles 40 for liquid cleaning are installed.

According to the present invention, a high-efficiency heat exchanger capable of securing a sufficient heat transfer area despite its compactness and capable of easily performing internal cleaning and maintenance, and the efficient heat transfer of large-capacity exhaust gas using such a heat exchanger It is possible to provide an exhaust gas treatment device capable of decomposition (removal) treatment.

BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing which shows the outline of the exhaust gas processing apparatus of one Embodiment in this invention.
2 is an enlarged view of the main part of FIG. 1, and is a view showing an example of the heat exchanger of the present invention.
3 is an explanatory diagram schematically showing an exhaust gas treatment apparatus according to another embodiment of the present invention.
4 is an explanatory view schematically showing a heat exchanger according to another embodiment of the present invention.

EMBODIMENT OF THE INVENTION Hereinafter, one Embodiment (1st Embodiment) of this invention is demonstrated with reference to FIG.1 and FIG.2.

Fig. 1 schematically shows an exhaust gas treatment apparatus 11A in which a heat exchanger 10 of the present invention is mounted. _{This exhaust gas treatment apparatus 11A is an apparatus for removing and processing exhaust gas E containing monosilane (SiH 4} ), chlorine-based gas, PFCs (perfluoro compound), etc. discharged from a semiconductor manufacturing apparatus (not shown) As shown in this figure, in the exhaust gas treatment device 11A, the inlet scrubber 34, the reaction tower 32, and the outlet scrubber 36 are sequentially installed along the treatment flow of the exhaust gas E. It is configured by adding an exhaust fan 42 and a water tank 44 and the like.

Here, with respect to the arrow to which the symbol E in Fig. 1 is attached, the arrow of a relatively thick line indicates that before thermal decomposition, and the arrow of a relatively thin line indicates that after thermal decomposition (also in Figs. 2 and 3 to be described later). same).

The inlet scrubber 34 absorbs dust, water-soluble gas, etc. contained in the exhaust gas E discharged from the semiconductor manufacturing apparatus (not shown) with washing water and washes and removes it from the exhaust gas E, and is a straight tube type scrubber body. (34a) and the scrubber body (34a) is installed inside the exhaust gas (E) before being supplied to the reactor (32), the washing water (PW) before thermal decomposition is sprayed with a spray nozzle (34b) for cleaning this is composed Here, as the washing water before thermal decomposition (PW), water or an aqueous solution to which an alkali such as ammonia or NaOH or a chemical solution such as an acid is added according to the purpose is used.

The top of this inlet scrubber 34 is connected to a semiconductor manufacturing apparatus (not shown) through an inlet duct 46, and various exhaust gases E discharged from the semiconductor manufacturing process pass through the inlet duct 46, It is adapted to be introduced into the top of the inlet scrubber 34 .

In addition, the code|symbol 34c in FIG. 1 is a filler for promoting gas-liquid contact between the washing water PW before thermal decomposition sprayed from the spray nozzle 34b, and the exhaust gas E. As shown in FIG.

In addition, although the flow direction of the exhaust gas E and the flow direction of the pre-thermal decomposition washing water PW sprayed from the spray nozzle 34b are the same direction in FIG. 1, you may make these flow backward.

In the illustrated embodiment, the inlet scrubber 34 and the water tank 44 are provided separately, and both are connected by the flushing gas supply pipe 48 and the drain pipe 50 branching from the flushing gas supply pipe 48 . has been For this reason, the wastewater from the inlet scrubber 34 is sent to the shower water recovery tank 44a (described later) installed in the water tank 44 through the flushing gas supply pipe 48 and the drain pipe 50. In addition, the water tank side end 50a of the drain pipe 50 is water sealed by being installed at a position lower than the water surface of the shower water recovery tank 44a.

The spray nozzle 34b and the shower water recovery tank 44a are connected via a pipe 52 , and a pump 54 is attached to the middle of the pipe 52 . Then, the pre-thermal decomposition washing water PW stored in the shower water recovery tank 44a by this pump 54 is supplied to the spray nozzle 34b.

In addition, while installing the said inlet scrubber 34 upright on the shower water collection tank 44a, the inside of the inlet scrubber 34 and the inside of the water tank 44 may be made to communicate with each other directly.

The reaction tower 32 is an apparatus for thermally decomposing the exhaust gas E, and has a heat exchanger 10 and a heating means 30 .

As shown in FIG. 2, the heat exchanger 10 has a body casing 16 of a double tube structure consisting of an outer tube 12 and an inner tube 14 formed of a metal material such as stainless steel or Hastelloy (registered trademark of Haines Corporation), and, Similarly, the inner space formed between the outer tube 12 and the inner tube 14 is made of a metal material such as stainless steel or Hastelloy (registered trademark of Haines), and a hydrothermal fluid passageway 18 and a heat radiation fluid passageway 20 ) is composed of a heat transfer plate 22 partitioned by. The hydrothermal fluid flow path 18 and the heat radiation fluid flow path 20 are adjacent to each other in the axial direction of the main body casing 16 and spirally over the entire axial direction of the main body casing 16 . is formed

Here, the shape of the outer tube 12 and the inner tube 14 forming the main body casing 16 may be any shape such as a circular tube shape or a square tube shape. However, when the shape of the outer tube 12 and the inner tube 14 of the main body casing 16 is a square tube, the following effects can be exhibited. That is, turbulence is generated when the heat-receiving fluid and the heat-dissipating fluid flowing through the hydrothermal fluid flow path 18 and the heat radiation fluid flow path 20 collide with the wall surface at an approximate right angle at the corner. And by generating turbulence in this way, the heat transfer effect (heat transfer rate) is increased several times, the heat exchange efficiency of the heat exchanger as a whole can be improved, and the adhesion of dust or the like to the flow path wall surface can be suppressed. In addition, when a liquid for cleaning the inside of a heat exchanger (to be described later) is supplied to the hydrothermal fluid flow path 18 and the heat radiation fluid flow path 20 , the fluid hits the wall surface at approximately right angles at the corners and countless times will be broken Accordingly, the cleaning effect by the fluid can be further enhanced.

Further, in the heat exchanger 10 of the illustrated embodiment, the main body casing 16 is installed so that its axis faces up and down, and the lower end of the main body casing 16, more specifically, the lower end of the outer appearance 12 . A hydrothermal fluid inlet 18a connected to the hydrothermal fluid flow path 18 and a heat radiation fluid outlet 20b connected to the heat radiation fluid flow path 20 are formed on the outer peripheral surface. The downstream end of the flushing gas supply pipe 48 is connected to the hydrothermal fluid inlet 18a, and the exhaust gas E subjected to thermal decomposition in the reaction tower 32 is stored in the heat dissipation fluid outlet 20b. The cracked gas supply pipe 56 supplied to 44 is connected. In addition, if the heat-receiving fluid inlet 18a and the heat radiation fluid outlet 20b are provided at the lower end of the main body casing 16, the opening position is not limited to the above position, for example, the main body casing ( 16) may also be used.

On the other hand, on the upper end of the main body casing 16, more specifically, on the outer peripheral surface of the upper end of the exterior 12, the hydrothermal fluid outlet 18b leading to the hydrothermal fluid flow path 18 and the heat dissipation fluid leading to the heat dissipation fluid flow path 20 An inlet 20a is opened. Thus, in the heat exchanger 10 of this embodiment, it is comprised so that a heat radiation fluid and a heat receiving fluid may flow back. In addition, if the heat receiving fluid outlet 18b and the heat radiation fluid inlet 20a are also provided at the upper end of the main body casing 16, the opening position is not limited to the above position, for example, the main body casing ( 16) may be the upper surface.

Here, when looking at the arrangement of the flow path and temperature distribution of the heat exchanger 10 as a whole in this embodiment, the high temperature side is the upper part and the low temperature side is the lower part, so it is an ideal arrangement as an energy saving device with little heat radiation and high heat exchange efficiency. is made of

In addition, the upper portion of the main body casing 16 is formed of a metal material such as stainless steel or Hastelloy (registered trademark of Haines Corporation), and a head box defining a space communicating the thermal fluid outlet 18b and the heat radiation fluid inlet 20a. A metal connecting the hydrothermal fluid outlet 18b and the heat dissipation fluid inlet 20a through the inclined surfaces 26b and 26c common to the top portion 26a on the top surface of the body casing 16 while 24 is attached. Alternatively, a guide member 26 made of ceramic is mounted. Here, a spray nozzle 28 is attached to a position directly above the top portion 26a of this guide member 26 in the head box 24, and when necessary, the guide member ( The shower water SW, which is a fluid for cleaning the inside of the heat exchanger sprayed toward the top portion 26a of the 26), is guided to the inclined surfaces 26b and 26c of the guide member 26, and the hydrothermal fluid outlet 18b and It is adapted to be supplied to the heat radiation fluid inlet 20a. In addition, as shown in FIG. 2 , a slope is formed at the bottom of the head box 24 to guide the shower water SW to the heat receiving fluid outlet 18b and the heat dissipating fluid inlet 20a without omission. .

Further, in the heat exchanger 10 of the illustrated embodiment, the body casing 16 and the head box 24 are exposed. In order to further improve the heat utilization rate of the heat exchanger 10, the head box It is preferable to attach a heat insulating material to the outer surface of 24 and the outer peripheral surface of the outer surface 12 in the main body casing 16 and the inner space of the inner tube 14 . In addition, as described above, when looking at the arrangement of the flow path and the temperature distribution of the heat exchanger 10 as a whole, since the high temperature side is the upper part and the low temperature side is the lower part, since it is an ideal arrangement, at least the outer surface of the head box 24 and If a heat insulating material is pasted on the outer peripheral surface of the outer peripheral surface 12 of the main body casing 16, heat utilization efficiency can be fully improved.

The heating means 30 is a heat source for thermally decomposing the exhaust gas E. In the illustrated embodiment, as this heating means 30, ceramics such as SiC, nichrome wire, or Kanthal (Sandvik AB) inside a protective tube made of ceramics, such as alumina, or metal, such as Hastelloy (trademark of Haines Corporation) or stainless steel. A heat transfer type heater loaded with a heating resistor made of a metal wire such as a company registered trademark) wire is used. Then, the heating means 30 is placed in the vicinity of the flow path of the exhaust gas E in the head box 24 , specifically, the inside of the guide member 26 and the head box 24 facing the guide member 26 . ) is installed inside the inner wall of a plurality of

Although not shown, the electric heater serving as the heating means 30 is provided with a power supply terminal at its rear end, and a power supply device is connected to the power supply terminal through a lead wire.

In addition, if the heating means 30 can supply high-temperature heat capable of thermally decomposing the exhaust gas E, the form is not limited to the above-described electric heater, for example, a flame type burner or A non-transition type or transition type plasma torch or the like may be used. In addition, the number of the installations may be one instead of plural as described above.

In addition, regardless of the heating means 30 , when a supporting gas such as oxygen or air is required to remove the exhaust gas E, this gas is used together with the exhaust gas E at the hydrothermal fluid inlet 18a ) may be supplied into the reaction tower 32 , or may be directly supplied into the head box 24 .

The outlet scrubber 36 is for cleaning and cooling the exhaust gas thermally decomposed in the reaction tower 32 , and is a straight tube type installed upright on the upper surface of the outlet scrubber wastewater recovery tank 44b (to be described later) constituting the water tank 44 . of the scrubber main body 36a, the downward spray nozzle 36b which sprays the washing water CW from the upper side so that the flow direction of the exhaust gas E may be opposed, and the washing water CW sprayed from the spray nozzle 36b ) and a filler 36c for promoting gas-liquid contact between the exhaust gas E.

As for this outlet scrubber 36, similarly to the inlet scrubber 34 mentioned above, in the illustrated embodiment, the spray nozzle 36b and the water tank 44 (more specifically, the outlet scrubber wastewater collection tank 44b) are piped ( 60), and by a pump 62 attached to the middle of this pipe 60, the washing water CW in the outlet scrubber drainage collection tank 44b is pulled up to the spray nozzle 36b. , new chemical liquid such as fresh water is supplied to this spray nozzle 36b as necessary in addition to the washing water CW in the water tank 44 .

In addition, the code|symbol 64 in FIG. 1 is a cooling device which cools the washing water CW supplied to the spray nozzle 36b from the outlet scrubber waste_water collection|recovery tank 44b.

The exhaust fan 42 is connected to the top outlet of the outlet scrubber 36, and when the exhaust fan 42 is operated, the inside of the exhaust gas processing device 11A is always at a pressure lower than atmospheric pressure (= negative pressure). )) is maintained. Therefore, the exhaust gas E before the thermal decomposition treatment, the processed high-temperature exhaust gas E, etc. are not accidentally leaked from the exhaust gas processing apparatus 11A to the outside.

The water tank 44 is a tank for storing pre-thermal decomposition washing water (PW), shower water (SW), and washing water (CW), the inside of which is a shower water recovery tank 44a and an outlet by a partition member 66 . It is divided into the scrubber wastewater recovery tank 44b. In addition, the partition member 66 is a plate material installed upright from the bottom surface in the water tank 44, and an opening 68 is formed between the upper end and the upper surface in the water tank 48, and as will be described later, the exhaust gas treatment device ( During operation of 11A), exhaust gas E exits this opening 68 .

As described above, the shower water recovery tank 44a recovers the washing water PW before thermal decomposition sprayed from the inlet scrubber 34 and the shower water SW sprayed from the spray nozzle 28, and at the same time, the inlet scrubber With respect to 34 and the spray nozzle 28, it is a water tank for storing pre-thermal decomposition washing water (PW) and shower water (SW) supplied through the pump 54 .

In addition, the outlet scrubber drainage recovery tank 44b recovers the washing water (CW) discharged from the spray nozzle 36b of the outlet scrubber 36 and new chemical liquids such as fresh water supplied as necessary, and at the same time, the outlet scrubber ( 36) is a water tank for storing water supplied to the spray nozzle 36b, ie, washing water CW.

Here, fresh chemical liquid, such as fresh water supplied to the outlet scrubber 36, flows into the outlet scrubber drainage collection tank 44b as needed, so that the excess water does not accumulate in excess of a predetermined amount by a partition member ( 66) to overflow to the shower water recovery tank 44a. In addition, in the shower water recovery tank 44a, as described above, since water or the like overflows from the outlet scrubber drain recovery tank 44b, a drain pipe 70 is provided so that water or the like of a predetermined amount or more does not accumulate. This drain pipe 70 is a pipe for sending the water stored in the shower water recovery tank 44a to a waste water treatment device (not shown), one end of which is connected to the waste water treatment device, and the other end is for collecting shower water. It is installed at a predetermined height from the bottom surface of the jaw 44a. Therefore, the water surface position of the shower water recovery tank 44a does not become higher than the position of the other end of the drain pipe 70 .

In addition, in the exhaust gas processing apparatus 11A of the present embodiment, in other parts except for the inside of the head box 24 of the reaction tower 32, the exhaust gas E is included or the exhaust gas E is decomposed. In order to protect each part from corrosion by a corrosive component such as hydrofluoric acid, it is coated with a corrosion-resistant lining or coating with vinyl chloride resin, polyethylene resin, unsaturated polyester resin and fluororesin.

Next, when the exhaust gas E removal process is performed using the exhaust gas processing apparatus 11A configured as described above, first, an operation switch (not shown) of the exhaust gas processing apparatus 11A is turned on. Thus, the heating means 30 in the reaction tower 32 is operated, and heating in the head box 24 is started.

Next, when the temperature of the exhaust gas E flow-through region in the head box 24 reaches the thermal decomposition temperature of the component to be removed contained in the exhaust gas E, the exhaust fan 42 operates to operate the exhaust gas treatment device ( The introduction of exhaust gas E into 11A) is started. Then, the exhaust gas E passes through the inlet scrubber 34, the reactor 32, and the outlet scrubber 36 sequentially, and the component to be controlled in the exhaust gas E is removed.

According to the exhaust gas processing apparatus 11A of this embodiment, since the heat exchanger 10 is comprised as mentioned above, at the time of thermal decomposition of the exhaust gas E, the following effect|action is shown.

That is, since the hydrothermal fluid flow path 18 and the heat radiation fluid flow path 20 are adjacent in the axial direction of the body casing 16 and are spirally formed over the entire axial direction of the body casing 16, the heat transfer plate 22 ), it is possible to maximize the contact area between the contact heat-receiving fluid and the heat-dissipating fluid, that is, the heat transfer area. In addition, since the heat dissipating fluid and the heat receiving fluid in contact through the heat transfer plate 22 flow backward, the low temperature heat receiving fluid always comes into contact with the heat dissipating fluid having a higher temperature than that, thereby improving heat exchange efficiency.

In addition, in the exhaust gas treatment apparatus 11A of the present embodiment, the heat receiving fluid flow path 18 and the heat radiation fluid flow path 20 of the heat exchanger 10 have a shape in which the outer periphery of the inner pipe 14 spirally turns. Therefore, dust or the like is less likely to accumulate in the flow path, and even if dust or the like is accumulated, it can be relatively easily washed out simply by flowing an internal cleaning fluid such as cleaning water or cleaning air. In particular, in the exhaust gas treatment apparatus 11A of the present embodiment, the guide member 26 is provided on the upper end surface of the main body casing 16 of the heat exchanger 10 installed upright, and the apex ( 26a) Since the spray nozzle 28 for spraying shower water SW is mounted at a position directly above, the shower water SW for cleaning the inside of the heat exchanger is directed toward the top portion 26a of the guide member 26. Shower water SW can be automatically supplied to each of the hydrothermal fluid outlet 18b and the radiating fluid inlet 20a only by spraying and supplying. Then, the shower water SW supplied to each of the heat-receiving fluid outlet 18b and the heat-dissipating fluid inlet 20a flows down the inside of the heat exchanger 10 according to gravity, etc. Wash away the accumulated dust, etc.

In addition, said embodiment can be changed as follows.

In the exhaust gas treatment apparatus 11A described above, the case where both the inlet scrubber 34 and the outlet scrubber 36 were provided was shown, but depending on the type of the exhaust gas E to be treated, either one of these is provided. good to do

Next, the exhaust gas processing apparatus 11B of 2nd Embodiment shown in FIG. 3 is demonstrated.

A part different from the first embodiment described above mainly omits the inlet scrubber 34 and the outlet scrubber 36 before and after the reaction tower 32 , while disposing the spray nozzle 40 inside the lower end of the heat exchanger 10 . one point. In addition, since parts other than these are the same as that of the said 1st Embodiment, while attaching|subjecting the same code|symbol as 1st Embodiment about the same structure, the description of the said 1st Embodiment is referenced and description of this embodiment is replaced. In addition, with respect to each code, when each part is expressed as a high-level concept, it is indicated only with Arabic numerals without attaching an alphabetic number, and when it is necessary to distinguish each part (that is, when it is expressed as a lower-level concept), the uppercase alphabetic number is displayed in Arabic number to distinguish them.

The spray nozzle 40 is for liquid washing the exhaust gas E by spraying shower water SW, and in the hydrothermal fluid flow path 18 near the hydrothermal fluid inlet 18a in the heat exchanger 10 and A plurality of heat-dissipating fluid flow passages 20 are provided in the vicinity of the heat-dissipating fluid outlet 20b. Of these, the spray nozzle 40A installed in the hydrothermal fluid flow path 18 near the hydrothermal fluid inlet 18a is the exhaust gas E supplied from the hydrothermal fluid inlet 18a into the hydrothermal fluid flow path 18. It sprays the shower water SW in the direction opposite to a flow, and exhibits the function equivalent to the said inlet scrubber 34. On the other hand, the spray nozzle 40B installed in the heat radiation fluid flow path 20 near the thermal fluid outlet 20b is the exhaust gas E directed through the heat radiation fluid flow path 20 toward the heat radiation fluid outlet 20b. It sprays the shower water SW in the direction parallel to the flow, and exhibits the same function as the said outlet scrubber 36.

Moreover, in the exhaust gas processing apparatus 11B of this embodiment, the water tank 72 is directly connected to the hydrothermal fluid inlet 18a. The water tank 72 is a tank that recovers the spray water SW sprayed from the spray nozzle 40A as drainage W, and its internal space is connected to a semiconductor manufacturing device (not shown) through an inlet duct 46. have. On the other hand, the water tank 74 is directly connected to the heat radiation fluid outlet 20b. This water tank 74 is a tank which collect|recovers the spray water SW injected from the spray nozzle 40B as waste_water|drain W, The internal space is connected to the exhaust fan 42. As shown in FIG.

Here, in the exhaust gas processing apparatus 11B of this embodiment, fresh water is supplied to the spray nozzle 40B, and the waste water W recovered in the water tank 74 is pumped 76 to the spray nozzle 40A. It is pumped and supplied. However, the water supplied to each spray nozzle 40 is not limited to these embodiments, for example, all fresh water may be used, and all water collected in the water tank 72 and/or the water tank 74 . You may use it by scooping up the drainage (W).

According to the exhaust gas removing device 11B configured as described above, the inlet scrubber 34 and the outlet scrubber 36 before and after the reaction tower 32 can be omitted, so that the exhaust gas treating device 11B can be made compact. there will be

Further, as in the first embodiment described above, the exhaust gas treatment apparatus 11B of the second embodiment also includes the heat exchanger 10, so that efficient thermal decomposition (removal) processing of large-capacity exhaust gas is possible. Specifically, an exhaust gas treatment apparatus capable of removing 99.5% or more _{of NF 3} in the exhaust gas by using an electric heater with an output of 10 kW as the heating means 30 and heating the exhaust gas with an air volume of 400 L/min to 850° C. , the height of the square tube body casing 16 is 1000 mm, the horizontal cross-sectional shape of the outer tube 12 is a rectangle of 400 mm on one side, the horizontal cross-sectional shape of the inner tube 14 is a rectangle with one side of 200 mm, the body casing with a height of 1000 mm 16), when the heat exchanger 10 of the present invention formed by rotating the hydrothermal fluid flow path 18 and the heat radiation fluid flow path 20 spirally by 10 turns is applied, the load of the electric heater as the heating means 30 is reduced. It could be reduced by about 75%. In addition, this result not only reduces the load on the electric heater by about 75%, but also means that the cooling load of the exhaust gas (E) discharged into the atmosphere after being used as a heat radiation fluid is reduced by about 75%. . In this way, when the heat exchanger 10 of the present invention is used, thermal decomposition treatment of exhaust gas can be efficiently and economically performed.

In addition, said 2nd Embodiment can be changed as follows.

In the exhaust gas processing apparatus 11B described above, the case in which the spray nozzles 40 are provided both in the heat receiving fluid flow path 18 and in the heat radiation fluid flow path 20 is shown, but the exhaust gas E to be treated Depending on the type, you may make it provide the spray nozzle 40 in any one of these.

In the first and second embodiments described above, the form in which the heat exchanger 10 is applied to the exhaust gas removing devices 11A and 11B for removing the exhaust gas E from the semiconductor manufacturing apparatus has been described. The use of the heat exchanger 10 is not limited thereto, and may be applied to any other device as long as it is a device that requires heat exchange between fluids containing a lot of dust and the like.

Next, the heat exchanger 10 of the embodiment shown in Fig. 4 different from the heat exchanger 10 in the first and second embodiments described above will be described.

The difference between the heat exchanger 10 of this embodiment and the heat exchanger 10 of the first and second embodiments is that the heat exchanger 10 of the present embodiment is provided with a purge gas supply means 50 to be. In addition, since parts other than this are the same as each embodiment mentioned above, about the same structure, while attaching|subjecting the same code|symbol as 1st and 2nd embodiment, the description of the said 1st and 2nd embodiment is invoked, and this embodiment replace the description of

The purge gas supply means 50 injects a purge gas made of an inert nitrogen gas or the like toward particles such as dust, which are incidentally generated in the case of thermal decomposition of the exhaust gas E, etc. and accumulated in the heat exchanger 10, and these particles is a flushing device for flushing out the heat exchanger 10 downward and has an injection nozzle 50a for injecting a purge gas downward in the heat exchanger 10 . The downstream end of the purge gas supply line 50b is connected to this injection nozzle 50a. In addition, the upstream end of the purge gas supply pipe 50b is connected to a purge gas supply source such as a purge gas storage tank (not shown), and the purge gas supply line 50b is injected from the injection nozzle 50a. A control device (not shown) for controlling the amount of the purge gas and the operating time and timing of the injection nozzle 50a is attached.

Here, in the heat exchanger 10 shown in FIG. 4 , the shape of the outer tube 12 and the inner tube 14 of the main body casing 16 is a square tube, and the heat radiation fluid flow path 20 formed inside the main body casing 16 . ), while attaching the spray nozzle 50a to each corner part, from the spray nozzle 50a attached to the upper part (upper part) of the main body casing 16 toward the spray nozzle 50a attached to the lower part (lower end), each With respect to the injection nozzle 50a, it is controlled by the said control apparatus so that the purge gas may be injected sequentially, for example every 3 seconds. By doing so, it is possible to effectively flush the particles such as dust accumulated in the heat dissipation fluid flow passage 20 in the operating state without stopping the operation of the heat exchanger 10 toward the outside, and as a result, the increase in differential pressure over a long period of time can be prevented. At the same time, it is possible to use the heat exchanger 10 in a state where heat exchange efficiency is always maximized.

In addition, in the above-described embodiment, the case where the shape of the main body casing 16 is square tube, and the spray nozzles 50a are attached to each corner part of the heat radiation fluid flow path 20 was shown, but the main body casing 16 The shape of is cylindrical, and the spray nozzle 50a may be attached at a predetermined interval from the upper part to the lower part of the heat radiation fluid flow passage 20 .

In addition, in the above-described embodiment, the case where a plurality of spray nozzles 50a are attached to the heat radiation fluid flow passage 20 is shown, but the number of attachments of the spray nozzles 50a is not limited to this, for example, You may make it attach one injection nozzle 50a to the upper part of the heat radiation fluid flow path 20. As shown in FIG.

In addition, although the case where the purge gas supply means 50 is attached only to the heat radiation fluid flow path 20 is shown in the above-mentioned embodiment, this purge gas supply means 50 is not only required for the heat radiation fluid flow path 20 but also. Accordingly, it may be attached to the hydrothermal fluid flow passage 18 as well.

10: heat exchanger
11A, 11B: exhaust gas treatment device
12: Appearance
14: interior
16: body casing
18: hydrothermal fluid flow path
18a: hydrothermal fluid inlet
18b: hydrothermal fluid outlet
20: heat dissipation fluid flow path
20a: heat dissipation fluid inlet
20b: heat dissipation fluid outlet
22: heat plate
24: head box
26: no guide
26a: the top (of the guide member)
26b, 26c: inclined surface (of the guide member)
30: heating means
32: reaction tower
34: inlet scrubber
36: exit scrubber
40: spray nozzle
50: purge gas supply means
E: exhaust gas

Claims (4)

The main body casing 16 of the double tube structure consisting of the outer tube 12 and the inner tube 14 and installed so that their axes face up and down,
A hydrothermal fluid adjacent to each other in the axial direction of the main body casing 16 while forming an inner space formed between the outer tube 12 and the inner tube 14 in a spiral over the entire axial direction of the main body casing 16 . A heat exchanger comprising a heat transfer plate (22) partitioning into a flow passage (18) and a heat radiation fluid flow passage (20), comprising:
At the lower end of the main body casing 16, a hydrothermal fluid inlet 18a connected to the hydrothermal fluid flow path 18 and a heat radiation fluid outlet 20b connected to the heat dissipation fluid flow path 20 are opened, and at the same time, the main body At the upper end of the casing 16, a hydrothermal fluid outlet 18b connected to the hydrothermal fluid flow path 18 and a heat radiation fluid inlet 20a connected to the heat dissipation fluid flow path 20 are opened,
In addition, a head box 24 is attached to the upper portion of the main body casing 16 and divides a space communicating the heat-receiving fluid outlet 18b and the heat-dissipating fluid inlet 20a,
The top surface of the main body casing 16 connects the thermal fluid outlet 18b and the heat dissipation fluid inlet 20a at inclined surfaces 26b and 26c having a common top portion 26a, and the top portion 26a ), a guide member (26) for guiding the fluid applied to the hydrothermal fluid outlet (18b) and the heat dissipation fluid inlet (20a) is mounted. The method of claim 1,
A purge gas supply means 50 for spraying a purge gas toward the bottom of the internal space is installed in at least the heat radiation fluid flow path 20 among the heat receiving fluid flow path 18 and the heat radiation fluid flow path 20 , A heat exchanger, characterized in that there is. A heat exchanger (10) according to claim 1 or 2, and a heating means (30) for heating an exhaust gas (E) to be treated having passed through a hydrothermal fluid flow passage (18) of the heat exchanger (10). a reaction tower 32, and
A wet inlet scrubber 34 for liquid cleaning of the exhaust gas E to be treated introduced into the reaction tower 32, or liquid cleaning of the exhaust gas E after thermal decomposition in the reaction tower 32 Exhaust gas treatment apparatus comprising at least one of the wet outlet scrubbers (36). The heat exchanger (10) of claim 1 or 2, and heating means (30) for heating the exhaust gas (E) to be treated, which has passed through the hydrothermal fluid flow path (18) of the heat exchanger (10) An exhaust gas treatment apparatus comprising a reaction tower (32), comprising:
In the heat exchanger (10), exhaust gas in at least one in the heat-receiving fluid flow-through path 18 near the heat-receiving fluid inlet 18a or in the heat-dissipation fluid flow-through path 20 near the heat radiation fluid outlet 20b ( E) Exhaust gas treatment apparatus, characterized in that one or a plurality of spray nozzles (40) for liquid cleaning is installed.

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