WO2015181846A1 - Heat exchanger and exhaust gas treatment device using said heat exchanger - Google Patents
Heat exchanger and exhaust gas treatment device using said heat exchanger Download PDFInfo
- Publication number
- WO2015181846A1 WO2015181846A1 PCT/JP2014/002768 JP2014002768W WO2015181846A1 WO 2015181846 A1 WO2015181846 A1 WO 2015181846A1 JP 2014002768 W JP2014002768 W JP 2014002768W WO 2015181846 A1 WO2015181846 A1 WO 2015181846A1
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- WIPO (PCT)
- Prior art keywords
- heat
- exhaust gas
- heat exchanger
- receiving fluid
- fluid passage
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/08—Arrangements of devices for treating smoke or fumes of heaters
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
- F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/06—Arrangements of devices for treating smoke or fumes of coolers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
- F28D7/022—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled the conduits of two or more media in heat-exchange relationship being helically coiled, the coils having a cylindrical configuration
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J2217/00—Intercepting solids
- F23J2217/50—Intercepting solids by cleaning fluids (washers or scrubbers)
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E20/00—Combustion technologies with mitigation potential
- Y02E20/30—Technologies for a more efficient combustion or heat usage
Definitions
- the present invention mainly relates to a heat exchanger suitable for an exhaust gas thermal decomposition process and an exhaust gas treatment apparatus using the heat exchanger.
- the heat exchanger has at least two flow paths that are divided from each other by a heat transfer plate, and allows a low-temperature heat receiving fluid (gas or liquid, the same applies hereinafter) to flow through one flow path, while the other.
- the heat transfer (heat transfer) is performed between the heat-dissipating fluid and the heat-receiving fluid by passing a high-temperature heat-dissipating fluid through the channel.
- a heat exchanger is used in various industrial processes that use heat.
- a heat exchanger is provided in an exhaust gas abatement apparatus, and the abatement processing section of the exhaust gas abatement apparatus.
- the temperature of the gas discharged from the abatement processing section can be reduced, and the cooling burden of the exhaust gas can be reduced.
- the temperature of the inert gas introduced into the piping leading to the abatement processing section can be increased, generation and adhesion of solid substances due to the temperature decrease of the exhaust gas in the piping can be suppressed. . For this reason, installation of the heater in the said piping can be made unnecessary, and cost reduction can be aimed at.
- a heat exchanger used in a conventional device of this type generally has a flow path of a radiating fluid or a flow path of the radiating fluid in order to secure a contact area between the radiating fluid and the heat receiving fluid (in other words, “heat transfer area”).
- One of the flow paths of the heat receiving fluid is configured to meander, and the other is configured to distribute to a plurality of thin tubes arranged in parallel.
- a main object of the present invention is to provide a high-efficiency heat exchanger that can secure a sufficient heat transfer area in spite of being compact and can easily perform internal cleaning and maintenance. is there.
- the further subject of this invention is providing the waste gas processing apparatus which can perform the efficient thermal decomposition (detoxification) process of a large volume waste gas using such a heat exchanger.
- the heat exchanger 10 is configured as follows. That is, a double-pipe main body casing 16 composed of an outer tube 12 and an inner tube 14 and an internal space formed between the outer tube 12 and the inner tube 14 are connected to a heat receiving fluid passage 18 and a radiating fluid passage.
- the heat transfer plate 22 is divided into flow paths 20.
- the heat receiving fluid passage 18 and the radiating fluid passage 20 are adjacent to each other in the axial direction of the main casing 16 and are formed in a spiral shape over the entire axial direction of the main casing 16. Is done.
- the present invention has the following effects, for example.
- the heat receiving fluid passage 18 and the radiating fluid passage 20 are adjacent to each other in the axial direction of the main casing 16 and are formed in a spiral shape over the entire axial direction of the main casing 16. It is possible to maximize the contact area between the low-temperature side heat receiving fluid and the high-temperature side radiating fluid that are in contact with each other, that is, the heat transfer area. Further, the heat receiving fluid passage 18 and the radiating fluid passage 20 are not meandering (that is, those having a sharp corner portion where the passage is reversed), but the outer periphery of the inner tube 14 is spiral.
- the heat-receiving fluid and the heat-dissipating fluid always flow at a high speed in the substantially identical shape of the flow path without branching, the dust or the like hardly accumulates in the flow path. Even if the liquid accumulates, it can be washed out relatively easily by simply flowing an internal cleaning fluid such as cleaning water or cleaning air.
- the main body casing 16 is erected so that the axis thereof is directed in the vertical direction, and at the lower end portion of the main body casing 16, the heat receiving fluid inlet 18 a connected to the heat receiving fluid passage 18 and the radiating fluid passage 20 are provided.
- a continuous heat dissipation fluid outlet 20 b is opened, and a heat receiving fluid outlet 18 b connected to the heat receiving fluid flow path 18 and a heat dissipation fluid inlet 20 a connected to the heat dissipation fluid flow path 20 are opened at the upper end portion of the main body casing 16.
- the heat-dissipating fluid and the heat-receiving fluid that are in contact with each other via the heat transfer plate 22 are countercurrent, the heat exchange efficiency is further improved, and the apparatus can be made compact.
- the above internal cleaning fluid is simply supplied to each of the heat receiving fluid outlet 18b and the radiating fluid inlet 20a provided at the upper end portion of the main casing 16, and thereafter the internal cleaning fluid flows down according to gravity or the like. The inside of the heat exchanger 10 can be easily cleaned.
- a head box that divides a space communicating with the heat receiving fluid outlet 18b and the radiating fluid inlet 20a at the upper portion of the main body casing 16. 24, and the heat receiving fluid outlet 18b and the radiating fluid inlet 20a are connected to the upper end surface of the main casing 16 through inclined surfaces 26b and 26c having the same top portion 26a, and the fluid applied to the top portion 26a is connected to the heat receiving fluid outlet 18b.
- a guide member 26 that guides to the radiating fluid inlet 20a.
- each of the heat receiving fluid passage 18 and the heat radiating fluid passage 20 is automatically applied to each of the heat receiving fluid passage 18 and the heat radiating fluid passage 20 simply by injecting and supplying a fluid for cleaning the inside of the heat exchanger such as washing water toward the top portion 26a of the guide member 26.
- a fluid for internal cleaning it is possible to supply a fluid for internal cleaning.
- the exhaust gas treatment apparatus is an apparatus that uses the heat exchanger 10 described above.
- the exhaust gas treatment apparatus is configured as follows. That is, a reaction tower 32 comprising the heat exchanger 10 and a heating means 30 for heating the exhaust gas E to be treated that has flowed through the heat receiving fluid passage 18 of the heat exchanger 10, and a reaction tower At least one of a wet inlet scrubber 34 for washing the exhaust gas E to be treated introduced into the liquid 32 and a wet outlet scrubber 36 for washing the exhaust gas E after the thermal decomposition in the reaction tower 32 is provided.
- An exhaust gas treatment apparatus is an apparatus that uses the heat exchanger 10 described above.
- the exhaust gas treatment apparatus is configured as follows. That is, a reaction tower 32 including the heat exchanger 10 and a heating unit 30 for heating the exhaust gas E to be treated that has flowed through the heat receiving fluid passage 18 of the heat exchanger 10 is provided.
- a reaction tower 32 including the heat exchanger 10 and a heating unit 30 for heating the exhaust gas E to be treated that has flowed through the heat receiving fluid passage 18 of the heat exchanger 10 is provided.
- the heat receiving fluid passage 18 near the heat receiving fluid inlet 18a and the heat radiating fluid passage 20 near the radiating fluid outlet 20b is washed with the exhaust gas E.
- a spray nozzle 40 is provided.
- a high-efficiency heat exchanger that can secure a sufficient heat transfer area despite being compact, and that can easily perform internal cleaning and maintenance, and such a heat exchanger are provided. It is possible to provide an exhaust gas treatment apparatus that can perform efficient thermal decomposition (detoxification) treatment of large-capacity exhaust gas.
- FIG. 1 shows an outline of an exhaust gas treatment apparatus 11A equipped with a heat exchanger 10 of the present invention.
- This exhaust gas treatment apparatus 11A is an apparatus for detoxifying exhaust gas E containing monosilane (SiH 4 ), chlorine-based gas, PFCs (perfluoro compounds), etc. discharged from a semiconductor manufacturing apparatus (not shown).
- the exhaust gas treatment device 11A is configured by installing an inlet scrubber 34, a reaction tower 32, and an outlet scrubber 36 in this order along the treatment flow of the exhaust gas E, and further adding an exhaust fan 42, a water tank 44, and the like.
- the relatively thick line arrow indicates the one before pyrolysis
- the relatively thin line arrow indicates the one after pyrolysis. (The same applies to FIGS. 2 and 3 described later).
- the inlet scrubber 34 absorbs dust, water-soluble gas, and the like contained in the exhaust gas E discharged from the semiconductor manufacturing apparatus (not shown) with the cleaning water and cleans and removes it from the exhaust gas E.
- the inlet scrubber main body 34a The spray nozzle 34b is disposed inside the scrubber body 34a and sprays pre-pyrolysis cleaning water PW on the exhaust gas E before being supplied to the reaction tower 32 to clean it.
- pre-pyrolysis washing water PW water or an aqueous solution to which a chemical solution such as alkali or acid such as ammonia or NaOH is added is used depending on the purpose.
- the top portion of the inlet scrubber 34 is connected to a semiconductor manufacturing apparatus (not shown) via an inlet duct 46, and various exhaust gases E discharged in the semiconductor manufacturing process pass through the inlet duct 46 and reach the top portion of the inlet scrubber 34.
- symbol 34c in FIG. 1 is a filler for accelerating
- the inlet scrubber 34 and the water tank 44 are provided separately, and both are connected by a flush gas supply pipe 48 and a drain pipe 50 branched from the flush gas supply pipe 48. For this reason, the waste water from the inlet scrubber 34 is sent to the shower water recovery tank 44a (described later) provided in the water tank 44 through the flush gas supply pipe 48 and the drain pipe 50. Further, the water tank side end 50a of the drain pipe 50 is sealed by being disposed at a position lower than the water surface of the shower water recovery tank 44a.
- the spray nozzle 34 b and the shower water recovery tank 44 a are connected via a pipe 52, and a pump 54 is attached in the middle of the pipe 52.
- the pump 54 supplies the pre-pyrolysis cleaning water PW stored in the shower water recovery tank 44a to the spray nozzle 34b.
- the inlet scrubber 34 may be erected on the shower water recovery tank 44a, and the inside of the inlet scrubber 34 and the inside of the water tank 44 may directly communicate with each other.
- the reaction tower 32 is a device for thermally decomposing the exhaust gas E, and has a heat exchanger 10 and a heating means 30.
- the heat exchanger 10 has a double-pipe structure main body casing 16 composed of an outer tube 12 and an inner tube 14 formed of a metal material such as stainless steel or Hastelloy (registered trademark of Haynes Co., Ltd.). It is made of a metal material such as stainless steel or Hastelloy (registered trademark of Haynes), and the internal space formed between the outer tube 12 and the inner tube 14 is divided into a heat receiving fluid passage 18 and a radiating fluid passage 20. And the heat transfer plate 22 to be configured.
- the heat receiving fluid passage 18 and the radiating fluid passage 20 are adjacent to each other in the axial direction of the main casing 16 and are formed in a spiral shape over the entire axial direction of the main casing 16. Is done.
- the outer tube 12 and the inner tube 14 forming the main body casing 16 may have any shape such as a circular tube or a rectangular tube.
- the shapes of the outer tube 12 and the inner tube 14 of the main body casing 16 are rectangular, the following operations and effects can be achieved. That is, the turbulent flow is caused by the heat receiving fluid and the heat radiating fluid flowing through the heat receiving fluid flow channel 18 and the heat radiating fluid flow channel 20 abutting substantially perpendicular to the wall surface at the corner portion. And since turbulent flow occurs in this way, the heat transfer effect (heat transfer rate) increases several times, the heat exchange efficiency of the entire heat exchanger can be increased, and dust etc. adhere to the wall surface of the flow path Can be suppressed.
- the main body casing 16 is erected so that the axis thereof faces the vertical direction, and the lower end portion of the main body casing 16, more specifically, the lower end outer peripheral surface of the outer tube 12.
- a heat receiving fluid inlet 18 a connected to the heat receiving fluid passage 18 and a radiating fluid outlet 20 b connected to the radiating fluid passage 20 are opened.
- the downstream end of the flush gas supply pipe 48 is connected to the heat receiving fluid inlet 18a, and the exhaust gas E thermally decomposed in the reaction tower 32 is supplied to the water tank 44 to the radiating fluid outlet 20b.
- a cracked gas supply pipe 56 is connected.
- the opening position of the heat receiving fluid inlet 18a and the heat radiating fluid outlet 20b is not limited to the above position as long as the heat receiving fluid inlet 18a and the radiating fluid outlet 20b are provided at the lower end portion of the main body casing 16. A lower end surface may be sufficient.
- a heat receiving fluid outlet 18 b connected to the heat receiving fluid passage 18 and a radiating fluid inlet 20 a connected to the radiating fluid passage 20 will be established.
- the heat exchanger 10 of this embodiment it is comprised so that a thermal radiation fluid and a heat receiving fluid may become countercurrent.
- the opening positions are not limited to the above positions. It may be the upper end surface.
- the high temperature side is the upper part and the low temperature side is the lower part, making it ideal as an energy-saving device with low heat dissipation and high heat exchange efficiency. It has become the arrangement.
- a head box 24 that is formed of a metal material such as stainless steel or Hastelloy (registered trademark of Haynes) and that divides a space that communicates the heat receiving fluid outlet 18b and the radiating fluid inlet 20a is attached to the upper portion of the main casing 16.
- a metal or ceramic guide member 26 that connects the heat receiving fluid outlet 18b and the radiating fluid inlet 20a is mounted on the upper end surface of the main casing 16 through inclined surfaces 26b and 26c having a common top portion 26a.
- a spray nozzle 28 is attached at a position directly above the top portion 26a of the guide member 26 in the head box 24, and sprayed from the spray nozzle 28 toward the top portion 26a of the guide member 26 when necessary.
- the shower water SW which is a fluid for cleaning the heat exchanger, is guided by the inclined surfaces 26b and 26c of the guide member 26 and supplied to the heat receiving fluid outlet 18b and the radiating fluid inlet 20a. Further, as shown in FIG. 2, the bottom of the head box 24 is provided with an inclination for guiding the shower water SW and the like to the heat receiving fluid outlet 18b and the radiating fluid inlet 20a.
- the main body casing 16 and the head box 24 are exposed. However, in order to further improve the heat utilization rate of the heat exchanger 10, a head is used.
- the arrangement of the flow path and the temperature distribution of the entire heat exchanger 10 has an ideal arrangement in which the high temperature side is the upper part and the low temperature side is the lower part. If a heat insulating material is pasted on the outer surface and the upper part of the outer peripheral surface of the outer tube 12 in the main body casing 16, the heat utilization efficiency can be sufficiently improved.
- the heating means 30 is a heat source for thermally decomposing the exhaust gas E.
- the heating means 30 is made of ceramic such as alumina, or inside a protective tube made of metal such as Hastelloy (registered trademark of Haynes) or stainless steel, ceramic such as SiC, nichrome wire, or Kanthal (Sandvik AB An electric heater equipped with a heating resistor made of a metal wire such as a company registered trademark) wire is used.
- a plurality of heating means 30 are installed in the vicinity of the flow path of the exhaust gas E in the head box 24, specifically, inside the guide member 26 and inside the inner wall of the head box 24 facing the guide member 26. Yes.
- the electric heating heater as the heating means 30 is provided with a power supply terminal at the rear end thereof, and a power supply device is connected to the power supply terminal via a lead wire.
- the heating means 30 can supply high-temperature heat capable of thermally decomposing the exhaust gas E, the mode is not limited to the above-mentioned electric heating heater, for example, a flame type burner or the like There may be.
- the number of installed devices may be one instead of a plurality as described above.
- the heating means 30 when an auxiliary combustion gas such as oxygen or air is required for the removal of the exhaust gas E, the gas is introduced into the reaction tower 32 from the heat receiving fluid inlet 18 a together with the exhaust gas E. Or may be supplied directly into the head box 24.
- the outlet scrubber 36 is for cleaning and cooling the exhaust gas thermally decomposed in the reaction tower 32, and is a straight tubular scrubber erected on the upper surface of an outlet scrubber drainage recovery tank 44b (described later) constituting the water tank 44.
- the outlet scrubber 36 has a spray nozzle 36 b and a water tank 44 (more specifically, an outlet scrubber drainage recovery tank 44 b) connected via a pipe 60 in the illustrated embodiment.
- the cleaning water CW in the outlet scrubber drainage recovery tank 44b is pumped up to the spray nozzle 36b by a pump 62 attached in the middle of the pipe 60.
- new chemicals such as fresh water are supplied as necessary.
- symbol 64 in FIG. 1 is a cooling device which cools the washing water CW supplied to the spray nozzle 36b from the exit scrubber waste_water
- the exhaust fan 42 is connected to the top outlet of the outlet scrubber 36.
- the water tank 44 is a tank that stores the pre-pyrolysis cleaning water PW, the shower water SW, and the cleaning water CW, and the inside thereof is divided into a shower water recovery tank 44a and an outlet scrubber drainage recovery tank 44b by a partition member 66.
- the partition member 66 is a plate material erected from the bottom surface in the water tank 44, and an opening 68 is provided between the upper end of the partition member 66 and the top surface in the water tank 48, as will be described later.
- the exhaust gas E passes through the opening 68.
- the shower water recovery tank 44a collects the pre-pyrolysis washing water PW sprayed from the inlet scrubber 34 and the shower water SW sprayed from the spray nozzle 28, and also to the inlet scrubber 34 and spray nozzle 28.
- the outlet scrubber drainage recovery tank 44b collects new chemicals such as the washing water CW discharged from the spray nozzle 36b of the outlet scrubber 36 and fresh water supplied as needed, and the spray nozzle 36b of the outlet scrubber 36. It is a water tank which stores the water etc. which are supplied to water, ie, washing water CW.
- the drain pipe 70 is disposed so that a predetermined amount or more of water does not accumulate.
- the drain pipe 70 is a pipe for sending water or the like stored in the shower water recovery tank 44a to a waste water treatment apparatus (not shown). One end of the drain pipe 70 is connected to the waste water treatment apparatus and the other end is shower water. It is arranged at a predetermined height from the bottom surface of the collection tank 44a. Therefore, the water surface position of the shower water recovery tank 44 a is not higher than the position of the other end of the drain pipe 70.
- the portion other than the inside of the head box 24 of the reaction tower 32 is caused by a corrosive component such as hydrofluoric acid contained in the exhaust gas E or generated by decomposing the exhaust gas E.
- a corrosive component such as hydrofluoric acid contained in the exhaust gas E or generated by decomposing the exhaust gas E.
- corrosion-resistant lining and coating are applied with vinyl chloride resin, polyethylene resin, unsaturated polyester resin, and fluororesin.
- an operation switch (not shown) of the exhaust gas treatment device 11A is turned on to react.
- the heating means 30 in the tower 32 is activated and heating in the head box 24 is started.
- the exhaust fan 42 is activated, and the exhaust gas E to the exhaust gas treatment device 11A is activated.
- the exhaust gas E passes through the inlet scrubber 34, the reactor 32, and the outlet scrubber 36 in this order, and the components to be removed in the exhaust gas E are removed.
- the heat exchanger 10 is configured as described above, and therefore, the following effects are exhibited when the exhaust gas E is thermally decomposed. That is, the heat receiving fluid passage 18 and the radiating fluid passage 20 are adjacent to each other in the axial direction of the main casing 16 and are formed in a spiral shape over the entire axial direction of the main casing 16. It is possible to maximize the contact area between the heat receiving fluid and the heat radiating fluid that are in contact via the plate 22, that is, the heat transfer area.
- the low-temperature heat-receiving fluid always comes into contact with the heat-dissipating fluid having a higher temperature, thereby improving heat exchange efficiency be able to.
- the heat receiving fluid passage 18 and the radiating fluid passage 20 of the heat exchanger 10 have a shape that spirals around the outer periphery of the inner pipe 14, It is difficult for dust to accumulate in the road, and even if dust accumulates, it can be washed out relatively easily simply by flowing an internal cleaning fluid such as cleaning water or cleaning air.
- a guide member 26 is provided on the upper end surface of the main casing 16 of the upright heat exchanger 10, and shower water is provided at a position directly above the apex 26a of the guide member 26.
- the shower water SW for cleaning the heat exchanger is simply sprayed and supplied toward the top portion 26a of the guide member 26, so that the heat receiving fluid outlet 18b and the radiating fluid inlet 20a are provided.
- the shower water SW can be automatically supplied to each. Then, the shower water SW supplied to each of the heat receiving fluid outlet 18b and the radiating fluid inlet 20a flows down the inside of the heat exchanger 10 according to gravity or the like to wash away dust and the like accumulated in the heat exchanger 10.
- said embodiment can be changed as follows.
- the case where both the inlet scrubber 34 and the outlet scrubber 36 are provided has been shown, but either one of them may be provided depending on the type of exhaust gas E to be treated.
- the exhaust gas treatment apparatus 11B of the second embodiment shown in FIG. 3 will be described.
- the difference from the first embodiment described above is that the inlet scrubber 34 and the outlet scrubber 36 before and after the reaction tower 32 are omitted, and the spray nozzle 40 is disposed inside the lower side of the heat exchanger 10.
- the same components are denoted by the same reference numerals as those in the first embodiment, and the description of the first embodiment is used in the description of the first embodiment. Replace.
- each code when each part is indicated by a superordinate concept, it is indicated by only Arabic numerals without an alphabet branch number, and when it is necessary to distinguish each part (ie, when it is indicated by a subordinate concept)
- the branch numbers are distinguished by adding Arabic numerals.
- the spray nozzle 40 is for injecting the shower water SW to wash the exhaust gas E, and in the heat exchanger 10, the heat receiving fluid in the heat receiving fluid passage 18 near the heat receiving fluid inlet 18a and the heat radiating fluid in the vicinity of the heat radiating fluid outlet 20b.
- a plurality of the flow paths 20 are installed.
- the spray nozzle 40 ⁇ / b> A installed in the heat receiving fluid passage 18 near the heat receiving fluid inlet 18 a faces the flow of the exhaust gas E supplied from the heat receiving fluid inlet 18 a into the heat receiving fluid passage 18.
- the shower water SW is sprayed in the direction to be performed, and the same function as the inlet scrubber 34 is exhibited.
- the spray nozzle 40B installed in the heat dissipation fluid passage 20 near the heat dissipation fluid outlet 20b is parallel to the flow of the exhaust gas E toward the heat dissipation fluid outlet 20b in the heat dissipation fluid passage 20.
- the shower water SW is sprayed and exhibits the same function as the outlet scrubber 36.
- the water tank 72 is directly connected to the heat receiving fluid inlet 18a.
- the water tank 72 is a tank that collects the spray water SW sprayed from the spray nozzle 40 ⁇ / b> A as drainage W, and its internal space is connected to a semiconductor manufacturing apparatus (not shown) via an inlet duct 46.
- a water tank 74 is directly connected to the radiating fluid outlet 20b.
- the water tank 74 is a tank that collects the spray water SW sprayed from the spray nozzle 40 ⁇ / b> B as drainage W, and its internal space is connected to the exhaust fan 42.
- fresh water is supplied to the spray nozzle 40B, and the waste water W collected in the water tank 74 is pumped up by the pump 76 and supplied to the spray nozzle 40A.
- the water supplied to each spray nozzle 40 is not limited to these modes. For example, all fresh water may be used, or all the waste water W collected in the water tank 72 and / or the water tank 74 may be used. You may make it use it.
- the inlet scrubber 34 and the outlet scrubber 36 before and after the reaction tower 32 can be omitted, so that the exhaust gas treatment apparatus 11B can be made compact.
- the exhaust gas treatment apparatus 11B of the second embodiment also includes the heat exchanger 10, so that efficient thermal decomposition (detoxification) treatment of large-capacity exhaust gas is possible.
- the exhaust gas treatment apparatus 11B of the second embodiment also includes the heat exchanger 10, so that efficient thermal decomposition (detoxification) treatment of large-capacity exhaust gas is possible.
- the rectangular tubular body casing 16 has a height of 1000 mm
- the outer tube 12 has a horizontal cross-sectional shape of a rectangle having a side of 400 mm
- the inner tube 14 has a horizontal cross-sectional shape of a rectangle having a side of 200 mm
- the main body casing 16 has a height of 1000 mm.
- said 2nd Embodiment can be changed as follows.
- the case where the spray nozzle 40 is installed in both the heat receiving fluid passage 18 and the radiating fluid passage 20 is shown. You may make it install the spray nozzle 40 in one side.
- the above-mentioned 1st and 2nd embodiment demonstrated the form applied to the waste gas removal apparatus 11A and 11B for removing the heat exchanger 10 from the semiconductor manufacturing apparatus, the said heat exchange
- the use of the vessel 10 is not limited to this, and can be applied to any other device as long as heat exchange between fluids containing much dust and the like is required.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Treating Waste Gases (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Abstract
Provided is a heat exchanger with which a sufficient heat transfer area can be secured, and the interior of which can easily be cleaned and maintained. Also provided is an exhaust gas treatment device using this heat exchanger. This heat exchanger (10) is configured with: a main body casing (16) having a double-pipe structure comprising an outer pipe (12) and an inner pipe (14); and heat transfer plates (22) which partition the interior space formed between the outer pipe (12) and the inner pipe (14) into a heat-receiving fluid flow path (18) and a heat-radiating fluid flow path (20). In addition, the heat-receiving fluid flow path (18) and the heat-radiating fluid flow path (20) are formed so as to be adjacent to each other in the axial direction of the main body casing (16), and so as to have a helical shape across the entirety of the main body casing (16) in the axial direction.
Description
本発明は、主として排ガスの熱分解処理プロセスに好適な熱交換器と、これを用いた排ガス処理装置とに関する。
The present invention mainly relates to a heat exchanger suitable for an exhaust gas thermal decomposition process and an exhaust gas treatment apparatus using the heat exchanger.
熱交換器は、伝熱板によって互いに分割された、少なくとも2つの流路を有しており、一方の流路に低温の受熱流体(気体或いは液体、以下同じ。)を通流させると共に、他方の流路に高温の放熱流体を通流させることにより、放熱流体と受熱流体との間で熱の授受(伝熱)を行うものである。
このような熱交換器は、熱を利用する様々な産業プロセスで使用されており、例えば特許文献1には、排ガス除害装置に熱交換器を設け、該排ガス除害装置の除害処理部における燃焼又は加熱分解により生じた高温のガスと、上記の除害処理部へと通じる配管に導入する不活性ガスとの間で熱交換させる技術が開示されている。
かかる技術によれば、除害処理部から排出されるガスの温度を低下させることができ、排ガスの冷却負担を軽減することができる。また、除害処理部へと通じる配管に導入する不活性ガスの温度を上昇させることができるので、当該配管内での排ガスの温度低下に起因する固形物の生成及び付着を抑制することができる。このため、当該配管へのヒータの設置を不要とすることができ、コストダウンが図れる。 The heat exchanger has at least two flow paths that are divided from each other by a heat transfer plate, and allows a low-temperature heat receiving fluid (gas or liquid, the same applies hereinafter) to flow through one flow path, while the other. The heat transfer (heat transfer) is performed between the heat-dissipating fluid and the heat-receiving fluid by passing a high-temperature heat-dissipating fluid through the channel.
Such a heat exchanger is used in various industrial processes that use heat. For example, in Patent Document 1, a heat exchanger is provided in an exhaust gas abatement apparatus, and the abatement processing section of the exhaust gas abatement apparatus. Discloses a technology for exchanging heat between a high-temperature gas generated by combustion or thermal decomposition in and an inert gas introduced into a pipe leading to the abatement treatment section.
According to such a technique, the temperature of the gas discharged from the abatement processing section can be reduced, and the cooling burden of the exhaust gas can be reduced. Moreover, since the temperature of the inert gas introduced into the piping leading to the abatement processing section can be increased, generation and adhesion of solid substances due to the temperature decrease of the exhaust gas in the piping can be suppressed. . For this reason, installation of the heater in the said piping can be made unnecessary, and cost reduction can be aimed at.
このような熱交換器は、熱を利用する様々な産業プロセスで使用されており、例えば特許文献1には、排ガス除害装置に熱交換器を設け、該排ガス除害装置の除害処理部における燃焼又は加熱分解により生じた高温のガスと、上記の除害処理部へと通じる配管に導入する不活性ガスとの間で熱交換させる技術が開示されている。
かかる技術によれば、除害処理部から排出されるガスの温度を低下させることができ、排ガスの冷却負担を軽減することができる。また、除害処理部へと通じる配管に導入する不活性ガスの温度を上昇させることができるので、当該配管内での排ガスの温度低下に起因する固形物の生成及び付着を抑制することができる。このため、当該配管へのヒータの設置を不要とすることができ、コストダウンが図れる。 The heat exchanger has at least two flow paths that are divided from each other by a heat transfer plate, and allows a low-temperature heat receiving fluid (gas or liquid, the same applies hereinafter) to flow through one flow path, while the other. The heat transfer (heat transfer) is performed between the heat-dissipating fluid and the heat-receiving fluid by passing a high-temperature heat-dissipating fluid through the channel.
Such a heat exchanger is used in various industrial processes that use heat. For example, in Patent Document 1, a heat exchanger is provided in an exhaust gas abatement apparatus, and the abatement processing section of the exhaust gas abatement apparatus. Discloses a technology for exchanging heat between a high-temperature gas generated by combustion or thermal decomposition in and an inert gas introduced into a pipe leading to the abatement treatment section.
According to such a technique, the temperature of the gas discharged from the abatement processing section can be reduced, and the cooling burden of the exhaust gas can be reduced. Moreover, since the temperature of the inert gas introduced into the piping leading to the abatement processing section can be increased, generation and adhesion of solid substances due to the temperature decrease of the exhaust gas in the piping can be suppressed. . For this reason, installation of the heater in the said piping can be made unnecessary, and cost reduction can be aimed at.
しかしながら、上記従来の熱交換器及びこれを用いた排ガス処理装置には次のような問題がある。
すなわち、従来のこの種の装置に用いられる熱交換器は、一般的に、放熱流体と受熱流体との接触面積(換言すれば「伝熱面積」)を確保すべく、放熱流体の流路又は受熱流体の流路の一方が蛇行するように構成されると共に、他方が並列する多数の細管へと分配するように構成されている。このため、かかる流路を流れる放熱流体及び受熱流体が例えば半導体排ガスのように或る種の粉塵を含んでいる場合、上記流路のうち蛇行するように構成された一方のもののコーナー部分では、流体の流れの方向が反転する際に、当該流体に対して遠心力等が働き、当該流体中から粉塵等が分離して流路のコーナー部分に堆積する。また、上記流路のうち並列する多数の細管へと分配するように構成された他方のものでは、多数の細管へと分配される際に流速が下がるようになるため、この場合も上記と同様に粉塵等が堆積するようになる。その結果、伝熱効率が著しく低下すると共に、上記流路を流体が通流する際の圧力損失が大きくなって流量が減少又は閉塞し、真空ポンプ(或いは送風機)の負担が大きくなると言った問題が生じ得る。
このような問題が生じた場合、熱交換器(ひいては熱交換器を用いた装置)の運転を停止して内部を清掃することになるが、蛇行した流路のコーナー部分や細管内に溜まった粉塵を清掃するのは極めて困難で時間と手間が掛かる作業である。
また、上述のように、放熱流体・受熱流体間の伝熱面積を増やすため、それら流体の流路を大きく蛇行させたり、細管に分配したりすると、必然的に熱交換器が大きくなる。このように熱交換器が大きくなると表面に露出する放熱面積が大となり、実質的に熱交換効率が低下するようになると言う問題も有った。 However, the conventional heat exchanger and the exhaust gas treatment apparatus using the same have the following problems.
That is, a heat exchanger used in a conventional device of this type generally has a flow path of a radiating fluid or a flow path of the radiating fluid in order to secure a contact area between the radiating fluid and the heat receiving fluid (in other words, “heat transfer area”). One of the flow paths of the heat receiving fluid is configured to meander, and the other is configured to distribute to a plurality of thin tubes arranged in parallel. For this reason, when the heat-dissipating fluid and the heat-receiving fluid flowing through the flow path contain a certain kind of dust such as semiconductor exhaust gas, in the corner portion of one of the flow paths configured to meander, When the direction of fluid flow is reversed, centrifugal force or the like acts on the fluid, and dust or the like separates from the fluid and accumulates at the corners of the flow path. Also, in the other of the flow paths configured to distribute to a large number of thin tubes in parallel, the flow velocity decreases when distributed to a large number of thin tubes. Dust etc. will accumulate on the surface. As a result, there is a problem that the heat transfer efficiency is remarkably lowered, the pressure loss when the fluid flows through the flow path is increased, the flow rate is reduced or blocked, and the burden on the vacuum pump (or blower) is increased. Can occur.
When such a problem occurs, the operation of the heat exchanger (and hence the apparatus using the heat exchanger) is stopped and the inside is cleaned, but it collects in the corner portion of the meandering flow path or in the narrow tube. Cleaning dust is extremely difficult and time consuming.
Further, as described above, in order to increase the heat transfer area between the radiating fluid and the heat receiving fluid, if the flow paths of these fluids are greatly meandered or distributed to narrow tubes, the heat exchanger inevitably becomes large. As described above, when the heat exchanger becomes large, there is a problem that the heat radiation area exposed on the surface becomes large and the heat exchange efficiency is substantially lowered.
すなわち、従来のこの種の装置に用いられる熱交換器は、一般的に、放熱流体と受熱流体との接触面積(換言すれば「伝熱面積」)を確保すべく、放熱流体の流路又は受熱流体の流路の一方が蛇行するように構成されると共に、他方が並列する多数の細管へと分配するように構成されている。このため、かかる流路を流れる放熱流体及び受熱流体が例えば半導体排ガスのように或る種の粉塵を含んでいる場合、上記流路のうち蛇行するように構成された一方のもののコーナー部分では、流体の流れの方向が反転する際に、当該流体に対して遠心力等が働き、当該流体中から粉塵等が分離して流路のコーナー部分に堆積する。また、上記流路のうち並列する多数の細管へと分配するように構成された他方のものでは、多数の細管へと分配される際に流速が下がるようになるため、この場合も上記と同様に粉塵等が堆積するようになる。その結果、伝熱効率が著しく低下すると共に、上記流路を流体が通流する際の圧力損失が大きくなって流量が減少又は閉塞し、真空ポンプ(或いは送風機)の負担が大きくなると言った問題が生じ得る。
このような問題が生じた場合、熱交換器(ひいては熱交換器を用いた装置)の運転を停止して内部を清掃することになるが、蛇行した流路のコーナー部分や細管内に溜まった粉塵を清掃するのは極めて困難で時間と手間が掛かる作業である。
また、上述のように、放熱流体・受熱流体間の伝熱面積を増やすため、それら流体の流路を大きく蛇行させたり、細管に分配したりすると、必然的に熱交換器が大きくなる。このように熱交換器が大きくなると表面に露出する放熱面積が大となり、実質的に熱交換効率が低下するようになると言う問題も有った。 However, the conventional heat exchanger and the exhaust gas treatment apparatus using the same have the following problems.
That is, a heat exchanger used in a conventional device of this type generally has a flow path of a radiating fluid or a flow path of the radiating fluid in order to secure a contact area between the radiating fluid and the heat receiving fluid (in other words, “heat transfer area”). One of the flow paths of the heat receiving fluid is configured to meander, and the other is configured to distribute to a plurality of thin tubes arranged in parallel. For this reason, when the heat-dissipating fluid and the heat-receiving fluid flowing through the flow path contain a certain kind of dust such as semiconductor exhaust gas, in the corner portion of one of the flow paths configured to meander, When the direction of fluid flow is reversed, centrifugal force or the like acts on the fluid, and dust or the like separates from the fluid and accumulates at the corners of the flow path. Also, in the other of the flow paths configured to distribute to a large number of thin tubes in parallel, the flow velocity decreases when distributed to a large number of thin tubes. Dust etc. will accumulate on the surface. As a result, there is a problem that the heat transfer efficiency is remarkably lowered, the pressure loss when the fluid flows through the flow path is increased, the flow rate is reduced or blocked, and the burden on the vacuum pump (or blower) is increased. Can occur.
When such a problem occurs, the operation of the heat exchanger (and hence the apparatus using the heat exchanger) is stopped and the inside is cleaned, but it collects in the corner portion of the meandering flow path or in the narrow tube. Cleaning dust is extremely difficult and time consuming.
Further, as described above, in order to increase the heat transfer area between the radiating fluid and the heat receiving fluid, if the flow paths of these fluids are greatly meandered or distributed to narrow tubes, the heat exchanger inevitably becomes large. As described above, when the heat exchanger becomes large, there is a problem that the heat radiation area exposed on the surface becomes large and the heat exchange efficiency is substantially lowered.
それゆえに、本発明の主たる課題は、コンパクトであるにもかかわらず十分な伝熱面積を確保できると共に、内部の清掃やメンテナンスを容易に行なうことのできる高効率の熱交換器を提供することにある。また、本発明の更なる課題は、このような熱交換器を用い、大容量排ガスの効率的な熱分解(除害)処理が可能な排ガス処理装置を提供することである。
Therefore, a main object of the present invention is to provide a high-efficiency heat exchanger that can secure a sufficient heat transfer area in spite of being compact and can easily perform internal cleaning and maintenance. is there. Moreover, the further subject of this invention is providing the waste gas processing apparatus which can perform the efficient thermal decomposition (detoxification) process of a large volume waste gas using such a heat exchanger.
上記の目的を達成するため、本発明は、例えば、図1から図3に示すように、熱交換器10を次のように構成した。
すなわち、外管12及び内管14からなる二重管構造の本体ケーシング16と、上記外管12と上記内管14との間に形成された内部空間を受熱流体通流路18及び放熱流体通流路20に区画する伝熱板22とで構成される。そして、上記の受熱流体通流路18と上記の放熱流体通流路20とが、上記本体ケーシング16の軸方向にて隣接すると共に、上記本体ケーシング16の軸方向全体に亘って螺旋状に形成される。 In order to achieve the above object, in the present invention, for example, as shown in FIGS. 1 to 3, theheat exchanger 10 is configured as follows.
That is, a double-pipemain body casing 16 composed of an outer tube 12 and an inner tube 14 and an internal space formed between the outer tube 12 and the inner tube 14 are connected to a heat receiving fluid passage 18 and a radiating fluid passage. The heat transfer plate 22 is divided into flow paths 20. The heat receiving fluid passage 18 and the radiating fluid passage 20 are adjacent to each other in the axial direction of the main casing 16 and are formed in a spiral shape over the entire axial direction of the main casing 16. Is done.
すなわち、外管12及び内管14からなる二重管構造の本体ケーシング16と、上記外管12と上記内管14との間に形成された内部空間を受熱流体通流路18及び放熱流体通流路20に区画する伝熱板22とで構成される。そして、上記の受熱流体通流路18と上記の放熱流体通流路20とが、上記本体ケーシング16の軸方向にて隣接すると共に、上記本体ケーシング16の軸方向全体に亘って螺旋状に形成される。 In order to achieve the above object, in the present invention, for example, as shown in FIGS. 1 to 3, the
That is, a double-pipe
本発明は、例えば、次の作用を奏する。
受熱流体通流路18と放熱流体通流路20とが、本体ケーシング16の軸方向にて隣接すると共に、本体ケーシング16の軸方向全体に亘って螺旋状に形成されるので、伝熱板22を介して接触する低温側の受熱流体と高温側の放熱流体との接触面積、すなわち伝熱面積を極大化することができる。
また、受熱流体通流路18と放熱流体通流路20とが、蛇行したもの(つまり、流路が反転するような急激なコーナー部分を有するもの)ではなく、内管14の外周を螺旋状に旋回する形状であるため、そして、受熱流体及び放熱流体が、分岐のない略同一形状の流路内を常に速い速度で流れるため、流路内に前記の粉塵等が溜まり難く、また仮に粉塵等が溜まった場合でも、洗浄水や洗浄エアなどの内部洗浄流体を流すだけで比較的簡単に洗い流すことができる。 The present invention has the following effects, for example.
The heat receivingfluid passage 18 and the radiating fluid passage 20 are adjacent to each other in the axial direction of the main casing 16 and are formed in a spiral shape over the entire axial direction of the main casing 16. It is possible to maximize the contact area between the low-temperature side heat receiving fluid and the high-temperature side radiating fluid that are in contact with each other, that is, the heat transfer area.
Further, the heat receivingfluid passage 18 and the radiating fluid passage 20 are not meandering (that is, those having a sharp corner portion where the passage is reversed), but the outer periphery of the inner tube 14 is spiral. Since the heat-receiving fluid and the heat-dissipating fluid always flow at a high speed in the substantially identical shape of the flow path without branching, the dust or the like hardly accumulates in the flow path. Even if the liquid accumulates, it can be washed out relatively easily by simply flowing an internal cleaning fluid such as cleaning water or cleaning air.
受熱流体通流路18と放熱流体通流路20とが、本体ケーシング16の軸方向にて隣接すると共に、本体ケーシング16の軸方向全体に亘って螺旋状に形成されるので、伝熱板22を介して接触する低温側の受熱流体と高温側の放熱流体との接触面積、すなわち伝熱面積を極大化することができる。
また、受熱流体通流路18と放熱流体通流路20とが、蛇行したもの(つまり、流路が反転するような急激なコーナー部分を有するもの)ではなく、内管14の外周を螺旋状に旋回する形状であるため、そして、受熱流体及び放熱流体が、分岐のない略同一形状の流路内を常に速い速度で流れるため、流路内に前記の粉塵等が溜まり難く、また仮に粉塵等が溜まった場合でも、洗浄水や洗浄エアなどの内部洗浄流体を流すだけで比較的簡単に洗い流すことができる。 The present invention has the following effects, for example.
The heat receiving
Further, the heat receiving
本発明には、例えば、図1及び2に示すように、次の構成を加えることが好ましい。
すなわち、本体ケーシング16を、その軸が上下方向を向くように立設すると共に、当該本体ケーシング16の下端部に、受熱流体通流路18に連なる受熱流体入口18aと放熱流体通流路20に連なる放熱流体出口20bとを開設し、当該本体ケーシング16の上端部に、受熱流体通流路18に連なる受熱流体出口18bと放熱流体通流路20に連なる放熱流体入口20aとを開設する。
この場合、伝熱板22を介して接触する放熱流体と受熱流体とが向流になるため、熱交換効率がより一層向上し、装置をコンパクトにすることができる。また、本体ケーシング16の上端部に設けられた受熱流体出口18b及び放熱流体入口20aのそれぞれに上記の内部洗浄流体を供給するだけで、後は重力等に従って内部洗浄流体が流下して行くことにより、熱交換器10の内部を簡単に清掃することができる。 For example, as shown in FIGS. 1 and 2, it is preferable to add the following configuration to the present invention.
That is, themain body casing 16 is erected so that the axis thereof is directed in the vertical direction, and at the lower end portion of the main body casing 16, the heat receiving fluid inlet 18 a connected to the heat receiving fluid passage 18 and the radiating fluid passage 20 are provided. A continuous heat dissipation fluid outlet 20 b is opened, and a heat receiving fluid outlet 18 b connected to the heat receiving fluid flow path 18 and a heat dissipation fluid inlet 20 a connected to the heat dissipation fluid flow path 20 are opened at the upper end portion of the main body casing 16.
In this case, since the heat-dissipating fluid and the heat-receiving fluid that are in contact with each other via theheat transfer plate 22 are countercurrent, the heat exchange efficiency is further improved, and the apparatus can be made compact. In addition, the above internal cleaning fluid is simply supplied to each of the heat receiving fluid outlet 18b and the radiating fluid inlet 20a provided at the upper end portion of the main casing 16, and thereafter the internal cleaning fluid flows down according to gravity or the like. The inside of the heat exchanger 10 can be easily cleaned.
すなわち、本体ケーシング16を、その軸が上下方向を向くように立設すると共に、当該本体ケーシング16の下端部に、受熱流体通流路18に連なる受熱流体入口18aと放熱流体通流路20に連なる放熱流体出口20bとを開設し、当該本体ケーシング16の上端部に、受熱流体通流路18に連なる受熱流体出口18bと放熱流体通流路20に連なる放熱流体入口20aとを開設する。
この場合、伝熱板22を介して接触する放熱流体と受熱流体とが向流になるため、熱交換効率がより一層向上し、装置をコンパクトにすることができる。また、本体ケーシング16の上端部に設けられた受熱流体出口18b及び放熱流体入口20aのそれぞれに上記の内部洗浄流体を供給するだけで、後は重力等に従って内部洗浄流体が流下して行くことにより、熱交換器10の内部を簡単に清掃することができる。 For example, as shown in FIGS. 1 and 2, it is preferable to add the following configuration to the present invention.
That is, the
In this case, since the heat-dissipating fluid and the heat-receiving fluid that are in contact with each other via the
また、本発明には、上記各構成に加え、例えば、図1及び2に示すように、本体ケーシング16の上部に、受熱流体出口18bと放熱流体入口20aとを連通する空間を区画するヘッドボックス24を取り付けると共に、本体ケーシング16の上端面に、頂部26aが共通する傾斜面26b,26cで受熱流体出口18bと放熱流体入口20aとを連結し、頂部26aに与えられた流体を受熱流体出口18b及び放熱流体入口20aへと案内するガイド部材26を装着するのが好ましい。
この場合、ガイド部材26の頂部26aに向けて洗浄水などの熱交換器内部洗浄用の流体を噴射・供給するだけで受熱流体通流路18と放熱流体通流路20のそれぞれに対して自動的に内部洗浄用の流体を供給することができるようになる。 Further, in the present invention, in addition to the above-described configurations, for example, as shown in FIGS. 1 and 2, a head box that divides a space communicating with the heat receivingfluid outlet 18b and the radiating fluid inlet 20a at the upper portion of the main body casing 16. 24, and the heat receiving fluid outlet 18b and the radiating fluid inlet 20a are connected to the upper end surface of the main casing 16 through inclined surfaces 26b and 26c having the same top portion 26a, and the fluid applied to the top portion 26a is connected to the heat receiving fluid outlet 18b. In addition, it is preferable to mount a guide member 26 that guides to the radiating fluid inlet 20a.
In this case, it is automatically applied to each of the heat receivingfluid passage 18 and the heat radiating fluid passage 20 simply by injecting and supplying a fluid for cleaning the inside of the heat exchanger such as washing water toward the top portion 26a of the guide member 26. Thus, it is possible to supply a fluid for internal cleaning.
この場合、ガイド部材26の頂部26aに向けて洗浄水などの熱交換器内部洗浄用の流体を噴射・供給するだけで受熱流体通流路18と放熱流体通流路20のそれぞれに対して自動的に内部洗浄用の流体を供給することができるようになる。 Further, in the present invention, in addition to the above-described configurations, for example, as shown in FIGS. 1 and 2, a head box that divides a space communicating with the heat receiving
In this case, it is automatically applied to each of the heat receiving
また、第2の発明に係る排ガス処理装置は、上述した熱交換器10を用いる装置であって、例えば、図1に示すように、排ガス処理装置を次のように構成したものである。
すなわち、前記の熱交換器10と、その熱交換器10の受熱流体通流路18を通流してきた処理対象の排ガスEを加熱する加熱手段30とを具備する反応塔32、及び、反応塔32に導入する処理対象の排ガスEを液洗する湿式の入口スクラバー34又は上記反応塔32で熱分解した処理後の排ガスEを液洗する湿式の出口スクラバー36の少なくとも何れか一方を備える。 Moreover, the exhaust gas treatment apparatus according to the second invention is an apparatus that uses theheat exchanger 10 described above. For example, as shown in FIG. 1, the exhaust gas treatment apparatus is configured as follows.
That is, areaction tower 32 comprising the heat exchanger 10 and a heating means 30 for heating the exhaust gas E to be treated that has flowed through the heat receiving fluid passage 18 of the heat exchanger 10, and a reaction tower At least one of a wet inlet scrubber 34 for washing the exhaust gas E to be treated introduced into the liquid 32 and a wet outlet scrubber 36 for washing the exhaust gas E after the thermal decomposition in the reaction tower 32 is provided.
すなわち、前記の熱交換器10と、その熱交換器10の受熱流体通流路18を通流してきた処理対象の排ガスEを加熱する加熱手段30とを具備する反応塔32、及び、反応塔32に導入する処理対象の排ガスEを液洗する湿式の入口スクラバー34又は上記反応塔32で熱分解した処理後の排ガスEを液洗する湿式の出口スクラバー36の少なくとも何れか一方を備える。 Moreover, the exhaust gas treatment apparatus according to the second invention is an apparatus that uses the
That is, a
また、第3の発明に係る排ガス処理装置は、上述した熱交換器10を用いる装置であって、例えば、図3に示すように、排ガス処理装置を次のように構成したものである。
すなわち、前記の熱交換器10と、その熱交換器10の受熱流体通流路18を通流してきた処理対象の排ガスEを加熱する加熱手段30とで構成された反応塔32を具備する。上記熱交換器10における受熱流体入口18a近傍の受熱流体通流路18内又は放熱流体出口20b近傍の放熱流体通流路20内の少なくとも何れか一方に、排ガスEを液洗する1又は複数のスプレーノズル40が設けられる。 An exhaust gas treatment apparatus according to a third aspect of the invention is an apparatus that uses theheat exchanger 10 described above. For example, as shown in FIG. 3, the exhaust gas treatment apparatus is configured as follows.
That is, areaction tower 32 including the heat exchanger 10 and a heating unit 30 for heating the exhaust gas E to be treated that has flowed through the heat receiving fluid passage 18 of the heat exchanger 10 is provided. In the heat exchanger 10, at least one of the heat receiving fluid passage 18 near the heat receiving fluid inlet 18a and the heat radiating fluid passage 20 near the radiating fluid outlet 20b is washed with the exhaust gas E. A spray nozzle 40 is provided.
すなわち、前記の熱交換器10と、その熱交換器10の受熱流体通流路18を通流してきた処理対象の排ガスEを加熱する加熱手段30とで構成された反応塔32を具備する。上記熱交換器10における受熱流体入口18a近傍の受熱流体通流路18内又は放熱流体出口20b近傍の放熱流体通流路20内の少なくとも何れか一方に、排ガスEを液洗する1又は複数のスプレーノズル40が設けられる。 An exhaust gas treatment apparatus according to a third aspect of the invention is an apparatus that uses the
That is, a
本発明によれば、コンパクトであるにもかかわらず十分な伝熱面積を確保できると共に、内部の清掃やメンテナンスを容易に行うことのできる高効率の熱交換器と、このような熱交換器を用い、大容量排ガスの効率的な熱分解(除害)処理が可能な排ガス処理装置とを提供することができる。
According to the present invention, a high-efficiency heat exchanger that can secure a sufficient heat transfer area despite being compact, and that can easily perform internal cleaning and maintenance, and such a heat exchanger are provided. It is possible to provide an exhaust gas treatment apparatus that can perform efficient thermal decomposition (detoxification) treatment of large-capacity exhaust gas.
以下、本発明の一実施形態(第1実施形態)を図1及び図2によって説明する。
図1は、本発明の熱交換器10を搭載した排ガス処理装置11Aの概略を示すものである。この排ガス処理装置11Aは、図示しない半導体製造装置から排出されたモノシラン(SiH4),塩素系ガス,PFCs(パーフルオロコンパウンド)などを含む排ガスEを除害処理するための装置であり、この図が示すように、排ガス処理装置11Aは、排ガスEの処理フローに沿って、入口スクラバー34,反応塔32及び出口スクラバー36がこの順に設置され、さらに排気ファン42及び水槽44などを加えて構成される。
ここで、図1中の符号Eが付された矢印について、相対的に太い線の矢印は熱分解前のものを示しており、相対的に細い線の矢印は熱分解後のものを示している(後述する図2や図3についても同じ)。 Hereinafter, an embodiment (first embodiment) of the present invention will be described with reference to FIGS. 1 and 2.
FIG. 1 shows an outline of an exhaustgas treatment apparatus 11A equipped with a heat exchanger 10 of the present invention. This exhaust gas treatment apparatus 11A is an apparatus for detoxifying exhaust gas E containing monosilane (SiH 4 ), chlorine-based gas, PFCs (perfluoro compounds), etc. discharged from a semiconductor manufacturing apparatus (not shown). As shown, the exhaust gas treatment device 11A is configured by installing an inlet scrubber 34, a reaction tower 32, and an outlet scrubber 36 in this order along the treatment flow of the exhaust gas E, and further adding an exhaust fan 42, a water tank 44, and the like. The
Here, with respect to the arrow with the symbol E in FIG. 1, the relatively thick line arrow indicates the one before pyrolysis, and the relatively thin line arrow indicates the one after pyrolysis. (The same applies to FIGS. 2 and 3 described later).
図1は、本発明の熱交換器10を搭載した排ガス処理装置11Aの概略を示すものである。この排ガス処理装置11Aは、図示しない半導体製造装置から排出されたモノシラン(SiH4),塩素系ガス,PFCs(パーフルオロコンパウンド)などを含む排ガスEを除害処理するための装置であり、この図が示すように、排ガス処理装置11Aは、排ガスEの処理フローに沿って、入口スクラバー34,反応塔32及び出口スクラバー36がこの順に設置され、さらに排気ファン42及び水槽44などを加えて構成される。
ここで、図1中の符号Eが付された矢印について、相対的に太い線の矢印は熱分解前のものを示しており、相対的に細い線の矢印は熱分解後のものを示している(後述する図2や図3についても同じ)。 Hereinafter, an embodiment (first embodiment) of the present invention will be described with reference to FIGS. 1 and 2.
FIG. 1 shows an outline of an exhaust
Here, with respect to the arrow with the symbol E in FIG. 1, the relatively thick line arrow indicates the one before pyrolysis, and the relatively thin line arrow indicates the one after pyrolysis. (The same applies to FIGS. 2 and 3 described later).
入口スクラバー34は、図示しない半導体製造装置から排出された排ガスEに含まれる粉塵や水溶性ガスなどを洗浄水で吸収して排ガスEから洗浄除去するものであり、直管型のスクラバー本体34aと、そのスクラバー本体34a内部に配設され、反応塔32へ供給する前の排ガスEに対して、熱分解前洗浄水PWを噴射してこれを洗浄するスプレーノズル34bとで構成される。ここで、熱分解前洗浄水PWは、目的に応じて、水或いはアンモニアやNaOHなどのアルカリ又は酸等の薬液が添加された水溶液などが用いられる。
この入口スクラバー34の頂部は、入口ダクト46を介して図示しない半導体製造装置と連結されており、半導体の製造工程で排出された各種排ガスEが入口ダクト46を通り、この入口スクラバー34の頂部に導入されるようになっている。
なお、図1中の符号34cは、スプレーノズル34bから撒布された熱分解前洗浄水PWと排ガスEとの気液接触を促進させるための充填材である。
また、図1では、排ガスEの通流方向とスプレーノズル34bから撒布された熱分解前洗浄水PWの通流方向とが同一方向であるが、これらが対向流となるようにしてもよい。 Theinlet scrubber 34 absorbs dust, water-soluble gas, and the like contained in the exhaust gas E discharged from the semiconductor manufacturing apparatus (not shown) with the cleaning water and cleans and removes it from the exhaust gas E. The inlet scrubber main body 34a The spray nozzle 34b is disposed inside the scrubber body 34a and sprays pre-pyrolysis cleaning water PW on the exhaust gas E before being supplied to the reaction tower 32 to clean it. Here, as the pre-pyrolysis washing water PW, water or an aqueous solution to which a chemical solution such as alkali or acid such as ammonia or NaOH is added is used depending on the purpose.
The top portion of theinlet scrubber 34 is connected to a semiconductor manufacturing apparatus (not shown) via an inlet duct 46, and various exhaust gases E discharged in the semiconductor manufacturing process pass through the inlet duct 46 and reach the top portion of the inlet scrubber 34. It has been introduced.
In addition, the code |symbol 34c in FIG. 1 is a filler for accelerating | stimulating the gas-liquid contact with the washing | cleaning water PW before thermal decomposition distributed from the spray nozzle 34b, and the waste gas E. FIG.
In FIG. 1, the flow direction of the exhaust gas E and the flow direction of the pre-pyrolysis cleaning water PW distributed from thespray nozzle 34 b are the same direction, but they may be opposed.
この入口スクラバー34の頂部は、入口ダクト46を介して図示しない半導体製造装置と連結されており、半導体の製造工程で排出された各種排ガスEが入口ダクト46を通り、この入口スクラバー34の頂部に導入されるようになっている。
なお、図1中の符号34cは、スプレーノズル34bから撒布された熱分解前洗浄水PWと排ガスEとの気液接触を促進させるための充填材である。
また、図1では、排ガスEの通流方向とスプレーノズル34bから撒布された熱分解前洗浄水PWの通流方向とが同一方向であるが、これらが対向流となるようにしてもよい。 The
The top portion of the
In addition, the code |
In FIG. 1, the flow direction of the exhaust gas E and the flow direction of the pre-pyrolysis cleaning water PW distributed from the
図示実施例では、この入口スクラバー34と水槽44とが別個に設けられると共に、両者が、水洗ガス供給配管48及びこの水洗ガス供給配管48から分枝した排水管50で接続されている。このため、入口スクラバー34からの排水が水洗ガス供給配管48及び排水管50を介して水槽44内に設けられたシャワー水回収槽44a(後述)へと送り込まれるようになる。また、排水管50の水槽側端部50aは、シャワー水回収槽44aの水面よりも低い位置に配設されることにより水封されている。
In the illustrated embodiment, the inlet scrubber 34 and the water tank 44 are provided separately, and both are connected by a flush gas supply pipe 48 and a drain pipe 50 branched from the flush gas supply pipe 48. For this reason, the waste water from the inlet scrubber 34 is sent to the shower water recovery tank 44a (described later) provided in the water tank 44 through the flush gas supply pipe 48 and the drain pipe 50. Further, the water tank side end 50a of the drain pipe 50 is sealed by being disposed at a position lower than the water surface of the shower water recovery tank 44a.
上記のスプレーノズル34bとシャワー水回収槽44aとは、配管52を介して接続されており、この配管52の途中にポンプ54が取り付けられる。そして、このポンプ54により、シャワー水回収槽44a内に貯留した熱分解前洗浄水PWをスプレーノズル34bへと供給するようになっている。
なお、上記の入口スクラバー34をシャワー水回収槽44a上に立設すると共に、入口スクラバー34の内部と水槽44の内部とが互いに直接連通するようにしてもよい。 Thespray nozzle 34 b and the shower water recovery tank 44 a are connected via a pipe 52, and a pump 54 is attached in the middle of the pipe 52. The pump 54 supplies the pre-pyrolysis cleaning water PW stored in the shower water recovery tank 44a to the spray nozzle 34b.
Theinlet scrubber 34 may be erected on the shower water recovery tank 44a, and the inside of the inlet scrubber 34 and the inside of the water tank 44 may directly communicate with each other.
なお、上記の入口スクラバー34をシャワー水回収槽44a上に立設すると共に、入口スクラバー34の内部と水槽44の内部とが互いに直接連通するようにしてもよい。 The
The
反応塔32は、排ガスEを加熱分解するための装置であり、熱交換器10と加熱手段30とを有する。
The reaction tower 32 is a device for thermally decomposing the exhaust gas E, and has a heat exchanger 10 and a heating means 30.
熱交換器10は、図2に示すように、ステンレスやハステロイ(ヘインズ社登録商標)などの金属材料で形成された外管12及び内管14からなる二重管構造の本体ケーシング16と、同じくステンレスやハステロイ(ヘインズ社登録商標)などの金属材料からなり、上記外管12と上記内管14との間に形成された内部空間を受熱流体通流路18及び放熱流体通流路20に区画する伝熱板22とで構成される。そして、上記の受熱流体通流路18と上記の放熱流体通流路20とが、上記本体ケーシング16の軸方向にて隣接すると共に、上記本体ケーシング16の軸方向全体に亘って螺旋状に形成される。
ここで、本体ケーシング16を形成する外管12及び内管14の形状は、円管状や角管状など何れの形状であってもよい。尤も、本体ケーシング16の外管12及び内管14の形状を角管状とした場合には、次のような作用・効果を奏することができる。すなわち、受熱流体通流路18及び放熱流体通流路20を流れる受熱流体及び放熱流体がコーナー部分で壁面に対して略直角に突き当たることに因り乱流が生じる。そして、このように乱流が生じることで、伝熱効果(熱伝達率)が数倍に上がり、熱交換器全体の熱交換効率を上げることができると共に、流路壁面への粉塵等の付着を抑制することができる。加えて、受熱流体通流路18及び放熱流体通流路20に(後述する)熱交換器内部洗浄用の流体を供給した場合には、当該流体がコーナー部分で壁面に対して略直角に当たって無数に砕けるようになる。それゆえ、当該流体による洗浄効果をより一層高めることができる。 As shown in FIG. 2, theheat exchanger 10 has a double-pipe structure main body casing 16 composed of an outer tube 12 and an inner tube 14 formed of a metal material such as stainless steel or Hastelloy (registered trademark of Haynes Co., Ltd.). It is made of a metal material such as stainless steel or Hastelloy (registered trademark of Haynes), and the internal space formed between the outer tube 12 and the inner tube 14 is divided into a heat receiving fluid passage 18 and a radiating fluid passage 20. And the heat transfer plate 22 to be configured. The heat receiving fluid passage 18 and the radiating fluid passage 20 are adjacent to each other in the axial direction of the main casing 16 and are formed in a spiral shape over the entire axial direction of the main casing 16. Is done.
Here, theouter tube 12 and the inner tube 14 forming the main body casing 16 may have any shape such as a circular tube or a rectangular tube. However, when the shapes of the outer tube 12 and the inner tube 14 of the main body casing 16 are rectangular, the following operations and effects can be achieved. That is, the turbulent flow is caused by the heat receiving fluid and the heat radiating fluid flowing through the heat receiving fluid flow channel 18 and the heat radiating fluid flow channel 20 abutting substantially perpendicular to the wall surface at the corner portion. And since turbulent flow occurs in this way, the heat transfer effect (heat transfer rate) increases several times, the heat exchange efficiency of the entire heat exchanger can be increased, and dust etc. adhere to the wall surface of the flow path Can be suppressed. In addition, when a fluid for cleaning the heat exchanger (to be described later) is supplied to the heat receiving fluid passage 18 and the radiating fluid passage 20, the fluid hits the wall at the corner at a substantially right angle and countlessly. To be broken into pieces. Therefore, the cleaning effect by the fluid can be further enhanced.
ここで、本体ケーシング16を形成する外管12及び内管14の形状は、円管状や角管状など何れの形状であってもよい。尤も、本体ケーシング16の外管12及び内管14の形状を角管状とした場合には、次のような作用・効果を奏することができる。すなわち、受熱流体通流路18及び放熱流体通流路20を流れる受熱流体及び放熱流体がコーナー部分で壁面に対して略直角に突き当たることに因り乱流が生じる。そして、このように乱流が生じることで、伝熱効果(熱伝達率)が数倍に上がり、熱交換器全体の熱交換効率を上げることができると共に、流路壁面への粉塵等の付着を抑制することができる。加えて、受熱流体通流路18及び放熱流体通流路20に(後述する)熱交換器内部洗浄用の流体を供給した場合には、当該流体がコーナー部分で壁面に対して略直角に当たって無数に砕けるようになる。それゆえ、当該流体による洗浄効果をより一層高めることができる。 As shown in FIG. 2, the
Here, the
また、図示実施形態の熱交換器10において、本体ケーシング16は、その軸が上下方向を向くように立設され、当該本体ケーシング16の下端部、より具体的には外管12の下端外周面には、受熱流体通流路18に連なる受熱流体入口18aと放熱流体通流路20に連なる放熱流体出口20bとが開設される。上記の受熱流体入口18aには、水洗ガス供給配管48の下流端が接続され、上記の放熱流体出口20bには、反応塔32内にて熱分解処理された排ガスEを水槽44へと送給する分解ガス送給配管56が接続される。なお、上記の受熱流体入口18a及び放熱流体出口20bは、本体ケーシング16の下端部に設けられるものであれば、その開設位置は上記の位置に限定されるものではなく、例えば、本体ケーシング16の下端面であってもよい。
一方、当該本体ケーシング16の上端部、より具体的には外管12の上端外周面には、受熱流体通流路18に連なる受熱流体出口18bと放熱流体通流路20に連なる放熱流体入口20aとが開設される。このように、本実施形態の熱交換器10では、放熱流体と受熱流体とが向流となるように構成されている。なお、上記の受熱流体出口18b及び放熱流体入口20aも、本体ケーシング16の上端部に設けられるものであれば、その開設位置は上記の位置に限定されるものではなく、例えば、本体ケーシング16の上端面であってもよい。
ここで、本実施形態における熱交換器10全体の流路とその温度分布の配置をみれば、高温側が上部、低温側が下部となっており、放熱が少なく熱交換効率が高い省エネルギー装置として理想的な配置となっている。 Further, in theheat exchanger 10 of the illustrated embodiment, the main body casing 16 is erected so that the axis thereof faces the vertical direction, and the lower end portion of the main body casing 16, more specifically, the lower end outer peripheral surface of the outer tube 12. In this case, a heat receiving fluid inlet 18 a connected to the heat receiving fluid passage 18 and a radiating fluid outlet 20 b connected to the radiating fluid passage 20 are opened. The downstream end of the flush gas supply pipe 48 is connected to the heat receiving fluid inlet 18a, and the exhaust gas E thermally decomposed in the reaction tower 32 is supplied to the water tank 44 to the radiating fluid outlet 20b. A cracked gas supply pipe 56 is connected. The opening position of the heat receiving fluid inlet 18a and the heat radiating fluid outlet 20b is not limited to the above position as long as the heat receiving fluid inlet 18a and the radiating fluid outlet 20b are provided at the lower end portion of the main body casing 16. A lower end surface may be sufficient.
On the other hand, at the upper end portion of themain casing 16, more specifically, at the outer peripheral surface of the upper end of the outer tube 12, a heat receiving fluid outlet 18 b connected to the heat receiving fluid passage 18 and a radiating fluid inlet 20 a connected to the radiating fluid passage 20. And will be established. Thus, in the heat exchanger 10 of this embodiment, it is comprised so that a thermal radiation fluid and a heat receiving fluid may become countercurrent. If the heat receiving fluid outlet 18b and the heat radiating fluid inlet 20a are also provided at the upper end of the main casing 16, the opening positions are not limited to the above positions. It may be the upper end surface.
Here, looking at the arrangement of the flow path and the temperature distribution of theentire heat exchanger 10 in this embodiment, the high temperature side is the upper part and the low temperature side is the lower part, making it ideal as an energy-saving device with low heat dissipation and high heat exchange efficiency. It has become the arrangement.
一方、当該本体ケーシング16の上端部、より具体的には外管12の上端外周面には、受熱流体通流路18に連なる受熱流体出口18bと放熱流体通流路20に連なる放熱流体入口20aとが開設される。このように、本実施形態の熱交換器10では、放熱流体と受熱流体とが向流となるように構成されている。なお、上記の受熱流体出口18b及び放熱流体入口20aも、本体ケーシング16の上端部に設けられるものであれば、その開設位置は上記の位置に限定されるものではなく、例えば、本体ケーシング16の上端面であってもよい。
ここで、本実施形態における熱交換器10全体の流路とその温度分布の配置をみれば、高温側が上部、低温側が下部となっており、放熱が少なく熱交換効率が高い省エネルギー装置として理想的な配置となっている。 Further, in the
On the other hand, at the upper end portion of the
Here, looking at the arrangement of the flow path and the temperature distribution of the
さらに、本体ケーシング16の上部には、ステンレスやハステロイ(ヘインズ社登録商標)などの金属材料で形成され、受熱流体出口18bと放熱流体入口20aとを連通する空間を区画するヘッドボックス24が取り付けられると共に、本体ケーシング16の上端面に、頂部26aが共通する傾斜面26b,26cを介して受熱流体出口18bと放熱流体入口20aとを連結する金属或いはセラミック製のガイド部材26が装着される。ここで、ヘッドボックス24内におけるこのガイド部材26の頂部26a直上の位置にはスプレーノズル28が取り付けられており、必要な際にこのスプレーノズル28からガイド部材26の頂部26aに向けて噴射された熱交換器内部洗浄用の流体であるシャワー水SWは、上記のガイド部材26の傾斜面26b,26cに案内され、受熱流体出口18b及び放熱流体入口20aへと供給されるようになっている。また、図2に示すように、ヘッドボックス24の底部には、上記のシャワー水SW等を受熱流体出口18b及び放熱流体入口20aへともれなく案内するような傾斜が設けられている。
なお、図示実施形態の熱交換器10では、上述の本体ケーシング16とヘッドボックス24とが露出した状態となっているが、熱交換器10の熱利用率をより一層向上させるためには、ヘッドボックス24の外表面、及び、上記本体ケーシング16における外管12の外周面と内管14の内部空間とに断熱材を貼設するのが好ましい。また、上述の通り、熱交換器10全体の流路とその温度分布の配置をみれば、高温側が上部、低温側が下部と言った理想的な配置となっていることから、少なくともヘッドボックス24の外表面と本体ケーシング16における外管12の外周面上部に断熱材を貼設しておけば、熱利用効率を十分向上させることができる。 Further, ahead box 24 that is formed of a metal material such as stainless steel or Hastelloy (registered trademark of Haynes) and that divides a space that communicates the heat receiving fluid outlet 18b and the radiating fluid inlet 20a is attached to the upper portion of the main casing 16. At the same time, a metal or ceramic guide member 26 that connects the heat receiving fluid outlet 18b and the radiating fluid inlet 20a is mounted on the upper end surface of the main casing 16 through inclined surfaces 26b and 26c having a common top portion 26a. Here, a spray nozzle 28 is attached at a position directly above the top portion 26a of the guide member 26 in the head box 24, and sprayed from the spray nozzle 28 toward the top portion 26a of the guide member 26 when necessary. The shower water SW, which is a fluid for cleaning the heat exchanger, is guided by the inclined surfaces 26b and 26c of the guide member 26 and supplied to the heat receiving fluid outlet 18b and the radiating fluid inlet 20a. Further, as shown in FIG. 2, the bottom of the head box 24 is provided with an inclination for guiding the shower water SW and the like to the heat receiving fluid outlet 18b and the radiating fluid inlet 20a.
In theheat exchanger 10 of the illustrated embodiment, the main body casing 16 and the head box 24 are exposed. However, in order to further improve the heat utilization rate of the heat exchanger 10, a head is used. It is preferable to paste a heat insulating material on the outer surface of the box 24 and the outer peripheral surface of the outer tube 12 and the inner space of the inner tube 14 in the main body casing 16. Further, as described above, the arrangement of the flow path and the temperature distribution of the entire heat exchanger 10 has an ideal arrangement in which the high temperature side is the upper part and the low temperature side is the lower part. If a heat insulating material is pasted on the outer surface and the upper part of the outer peripheral surface of the outer tube 12 in the main body casing 16, the heat utilization efficiency can be sufficiently improved.
なお、図示実施形態の熱交換器10では、上述の本体ケーシング16とヘッドボックス24とが露出した状態となっているが、熱交換器10の熱利用率をより一層向上させるためには、ヘッドボックス24の外表面、及び、上記本体ケーシング16における外管12の外周面と内管14の内部空間とに断熱材を貼設するのが好ましい。また、上述の通り、熱交換器10全体の流路とその温度分布の配置をみれば、高温側が上部、低温側が下部と言った理想的な配置となっていることから、少なくともヘッドボックス24の外表面と本体ケーシング16における外管12の外周面上部に断熱材を貼設しておけば、熱利用効率を十分向上させることができる。 Further, a
In the
加熱手段30は、排ガスEを熱分解するための熱源である。図示実施態様では、この加熱手段30として、アルミナなどのセラミック製或いはハステロイ(ヘインズ社登録商標)やステンレスなどの金属製の保護管の内部に、SiCなどのセラミック或いはニクロム線やカンタル(サンドビックAB社登録商標)線などの金属線からなる発熱抵抗体を装填した電熱式のヒーターが用いられる。そして、この加熱手段30を、ヘッドボックス24内における排ガスEの流路近傍、具体的には、ガイド部材26の内部及びこのガイド部材26に対向するヘッドボックス24の内壁内部に、複数設置している。
また、図示しないが、加熱手段30たる電熱式のヒーターには、その後端部に給電端子が設けられており、この給電端子にリード線を介して電源装置が接続される。
なお、加熱手段30は、排ガスEの熱分解が可能な高温の熱を供給できるものであれば、その態様は上記の電熱式ヒーターに限定されるものではなく、例えば、火炎式のバーナーなどであってもよい。また、その設置個数も、上述のように複数ではなく1つであってもよい。
さらに、加熱手段30の如何にかかわらず、排ガスEの除害に酸素や空気などの助燃性ガス等が必要になる場合には、係るガスを排ガスEと共に受熱流体入口18aから反応塔32内へと供給するようにしてもよいし、ヘッドボックス24内に直接供給するようにしてもよい。 The heating means 30 is a heat source for thermally decomposing the exhaust gas E. In the illustrated embodiment, the heating means 30 is made of ceramic such as alumina, or inside a protective tube made of metal such as Hastelloy (registered trademark of Haynes) or stainless steel, ceramic such as SiC, nichrome wire, or Kanthal (Sandvik AB An electric heater equipped with a heating resistor made of a metal wire such as a company registered trademark) wire is used. A plurality of heating means 30 are installed in the vicinity of the flow path of the exhaust gas E in thehead box 24, specifically, inside the guide member 26 and inside the inner wall of the head box 24 facing the guide member 26. Yes.
Although not shown, the electric heating heater as the heating means 30 is provided with a power supply terminal at the rear end thereof, and a power supply device is connected to the power supply terminal via a lead wire.
As long as the heating means 30 can supply high-temperature heat capable of thermally decomposing the exhaust gas E, the mode is not limited to the above-mentioned electric heating heater, for example, a flame type burner or the like There may be. Also, the number of installed devices may be one instead of a plurality as described above.
Furthermore, regardless of the heating means 30, when an auxiliary combustion gas such as oxygen or air is required for the removal of the exhaust gas E, the gas is introduced into thereaction tower 32 from the heat receiving fluid inlet 18 a together with the exhaust gas E. Or may be supplied directly into the head box 24.
また、図示しないが、加熱手段30たる電熱式のヒーターには、その後端部に給電端子が設けられており、この給電端子にリード線を介して電源装置が接続される。
なお、加熱手段30は、排ガスEの熱分解が可能な高温の熱を供給できるものであれば、その態様は上記の電熱式ヒーターに限定されるものではなく、例えば、火炎式のバーナーなどであってもよい。また、その設置個数も、上述のように複数ではなく1つであってもよい。
さらに、加熱手段30の如何にかかわらず、排ガスEの除害に酸素や空気などの助燃性ガス等が必要になる場合には、係るガスを排ガスEと共に受熱流体入口18aから反応塔32内へと供給するようにしてもよいし、ヘッドボックス24内に直接供給するようにしてもよい。 The heating means 30 is a heat source for thermally decomposing the exhaust gas E. In the illustrated embodiment, the heating means 30 is made of ceramic such as alumina, or inside a protective tube made of metal such as Hastelloy (registered trademark of Haynes) or stainless steel, ceramic such as SiC, nichrome wire, or Kanthal (Sandvik AB An electric heater equipped with a heating resistor made of a metal wire such as a company registered trademark) wire is used. A plurality of heating means 30 are installed in the vicinity of the flow path of the exhaust gas E in the
Although not shown, the electric heating heater as the heating means 30 is provided with a power supply terminal at the rear end thereof, and a power supply device is connected to the power supply terminal via a lead wire.
As long as the heating means 30 can supply high-temperature heat capable of thermally decomposing the exhaust gas E, the mode is not limited to the above-mentioned electric heating heater, for example, a flame type burner or the like There may be. Also, the number of installed devices may be one instead of a plurality as described above.
Furthermore, regardless of the heating means 30, when an auxiliary combustion gas such as oxygen or air is required for the removal of the exhaust gas E, the gas is introduced into the
出口スクラバー36は、反応塔32で熱分解した排ガスを、洗浄及び冷却するためのものであり、水槽44を構成する出口スクラバー排水回収槽44b(後述)の上面に立設された直管状のスクラバー本体36aと、排ガスEの通流方向に対向するように上方から洗浄水CWを噴射する下向きのスプレーノズル36bと、スプレーノズル36bから撒布された洗浄水CWと排ガスEとの気液接触を促進させるための充填材36cとで構成されている。
この出口スクラバー36は、上述した入口スクラバー34と同様に、図示実施形態では、スプレーノズル36bと水槽44(より具体的には出口スクラバー排水回収槽44b)とが配管60を介して接続されており、この配管60の途中に取り付けられたポンプ62によって、出口スクラバー排水回収槽44b内の洗浄水CWをスプレーノズル36bに揚上するようになっているが、このスプレーノズル36bには、水槽44内の洗浄水CWの他に、必要に応じて新水などの新しい薬液が供給される。
なお、図1中の符号64は、出口スクラバー排水回収槽44bからスプレーノズル36bへと供給される洗浄水CWを冷却する冷却装置である。 Theoutlet scrubber 36 is for cleaning and cooling the exhaust gas thermally decomposed in the reaction tower 32, and is a straight tubular scrubber erected on the upper surface of an outlet scrubber drainage recovery tank 44b (described later) constituting the water tank 44. Facilitates the gas-liquid contact between the main body 36a, the downward spray nozzle 36b that injects the cleaning water CW from above so as to oppose the flow direction of the exhaust gas E, and the cleaning water CW distributed from the spray nozzle 36b and the exhaust gas E. It is comprised with the filler 36c for making it do.
In the illustrated embodiment, theoutlet scrubber 36 has a spray nozzle 36 b and a water tank 44 (more specifically, an outlet scrubber drainage recovery tank 44 b) connected via a pipe 60 in the illustrated embodiment. The cleaning water CW in the outlet scrubber drainage recovery tank 44b is pumped up to the spray nozzle 36b by a pump 62 attached in the middle of the pipe 60. In addition to the cleaning water CW, new chemicals such as fresh water are supplied as necessary.
In addition, the code |symbol 64 in FIG. 1 is a cooling device which cools the washing water CW supplied to the spray nozzle 36b from the exit scrubber waste_water | drain collection tank 44b.
この出口スクラバー36は、上述した入口スクラバー34と同様に、図示実施形態では、スプレーノズル36bと水槽44(より具体的には出口スクラバー排水回収槽44b)とが配管60を介して接続されており、この配管60の途中に取り付けられたポンプ62によって、出口スクラバー排水回収槽44b内の洗浄水CWをスプレーノズル36bに揚上するようになっているが、このスプレーノズル36bには、水槽44内の洗浄水CWの他に、必要に応じて新水などの新しい薬液が供給される。
なお、図1中の符号64は、出口スクラバー排水回収槽44bからスプレーノズル36bへと供給される洗浄水CWを冷却する冷却装置である。 The
In the illustrated embodiment, the
In addition, the code |
排気ファン42は、出口スクラバー36の頂部出口に接続されており、この排気ファン42が稼働することによって排ガス処理装置11Aの内部が常に大気圧よりも低い圧力(=負圧)に保たれている。このため、熱分解処理前の排ガスEや処理済みで高温の排ガスEなどが誤って排ガス処理装置11Aから外部へ漏れ出すことがない。
The exhaust fan 42 is connected to the top outlet of the outlet scrubber 36. By operating the exhaust fan 42, the interior of the exhaust gas treatment device 11A is always kept at a pressure lower than the atmospheric pressure (= negative pressure). . For this reason, the exhaust gas E before the thermal decomposition treatment or the treated high-temperature exhaust gas E does not leak out of the exhaust gas treatment apparatus 11A to the outside.
水槽44は、熱分解前洗浄水PW,シャワー水SW及び洗浄水CWを貯留するタンクであり、その内部は、仕切り部材66によってシャワー水回収槽44aと出口スクラバー排水回収槽44bとに分割されている。また、仕切り部材66は、水槽44内の底面から立設された板材であり、その上端と水槽48内の天面との間には開口68が設けられており、後述するように排ガス処理装置11Aの稼働中は、この開口68を排ガスEが通り抜けることになる。
The water tank 44 is a tank that stores the pre-pyrolysis cleaning water PW, the shower water SW, and the cleaning water CW, and the inside thereof is divided into a shower water recovery tank 44a and an outlet scrubber drainage recovery tank 44b by a partition member 66. Yes. Moreover, the partition member 66 is a plate material erected from the bottom surface in the water tank 44, and an opening 68 is provided between the upper end of the partition member 66 and the top surface in the water tank 48, as will be described later. During the operation of 11A, the exhaust gas E passes through the opening 68.
上述のように、シャワー水回収槽44aは、入口スクラバー34で噴射された熱分解前洗浄水PW及びスプレーノズル28から噴射されたシャワー水SWを回収するとともに、入口スクラバー34及びスプレーノズル28に対し、ポンプ54を介して供給する熱分解前洗浄水PW及びシャワー水SWを貯留する水槽である。
また、出口スクラバー排水回収槽44bは、出口スクラバー36のスプレーノズル36bから排出された洗浄水CW及び必要に応じて供給される新水などの新しい薬液を回収するとともに、出口スクラバー36のスプレーノズル36bに供給する水等、つまり洗浄水CWを貯留する水槽である。 As described above, the showerwater recovery tank 44a collects the pre-pyrolysis washing water PW sprayed from the inlet scrubber 34 and the shower water SW sprayed from the spray nozzle 28, and also to the inlet scrubber 34 and spray nozzle 28. , A water tank for storing pre-pyrolysis washing water PW and shower water SW supplied via a pump 54.
The outlet scrubberdrainage recovery tank 44b collects new chemicals such as the washing water CW discharged from the spray nozzle 36b of the outlet scrubber 36 and fresh water supplied as needed, and the spray nozzle 36b of the outlet scrubber 36. It is a water tank which stores the water etc. which are supplied to water, ie, washing water CW.
また、出口スクラバー排水回収槽44bは、出口スクラバー36のスプレーノズル36bから排出された洗浄水CW及び必要に応じて供給される新水などの新しい薬液を回収するとともに、出口スクラバー36のスプレーノズル36bに供給する水等、つまり洗浄水CWを貯留する水槽である。 As described above, the shower
The outlet scrubber
ここで、出口スクラバー排水回収槽44bには、必要に応じて出口スクラバー36に供給された新水などの新しい薬液が流入しているので、所定量以上の水等が溜まらないように余剰の水等は仕切り部材66を越えてシャワー水回収槽44aへオーバーフローするようになっている。また、シャワー水回収槽44aは、上述のように、水等が出口スクラバー排水回収槽44bからオーバーフローしてくるので、所定量以上の水等が溜まらないように排水管70が配設されている。この排水管70は、シャワー水回収槽44aに貯留された水等を図示しない排水処理装置へ送るための配管であり、その一方端が排水処理装置に接続されると共に、他方端は、シャワー水回収槽44aの底面から所定の高さに配設される。したがって、シャワー水回収槽44aの水面位置は、排水管70の他方端の位置よりも高くならない。
Here, since a new chemical solution such as fresh water supplied to the outlet scrubber 36 flows into the outlet scrubber drainage recovery tank 44b as necessary, excess water is prevented so that a predetermined amount or more of water does not collect. Etc. overflow the partition member 66 and overflow into the shower water recovery tank 44a. In addition, since the shower water recovery tank 44a overflows from the outlet scrubber drainage recovery tank 44b as described above, the drain pipe 70 is disposed so that a predetermined amount or more of water does not accumulate. . The drain pipe 70 is a pipe for sending water or the like stored in the shower water recovery tank 44a to a waste water treatment apparatus (not shown). One end of the drain pipe 70 is connected to the waste water treatment apparatus and the other end is shower water. It is arranged at a predetermined height from the bottom surface of the collection tank 44a. Therefore, the water surface position of the shower water recovery tank 44 a is not higher than the position of the other end of the drain pipe 70.
なお、本実施例の排ガス処理装置11Aにおける反応塔32のヘッドボックス24内を除く他の部分には、排ガスEに含まれる、或いは排ガスEを分解することによって生じるフッ酸などの腐食性成分による腐食から各部を守るため、塩化ビニル樹脂,ポリエチレン樹脂,不飽和ポリエステル樹脂及びフッ素樹脂などによる耐腐食性のライニングやコーティングが施されている。
In the exhaust gas treatment apparatus 11A of the present embodiment, the portion other than the inside of the head box 24 of the reaction tower 32 is caused by a corrosive component such as hydrofluoric acid contained in the exhaust gas E or generated by decomposing the exhaust gas E. In order to protect each part from corrosion, corrosion-resistant lining and coating are applied with vinyl chloride resin, polyethylene resin, unsaturated polyester resin, and fluororesin.
次に、以上のように構成された排ガス処理装置11Aを用いて排ガスEの除害処理を行う際には、まず始めに、排ガス処理装置11Aの運転スイッチ(図示せず)をオンにして反応塔32内の加熱手段30を作動させ、ヘッドボックス24内の加熱を開始する。
続いて、ヘッドボックス24内の排ガスE通流領域の温度が当該排ガスEに含まれる除害対象成分の熱分解温度に達すると、排気ファン42が作動し、排ガス処理装置11Aへの排ガスEの導入を開始させる。すると、排ガスEは、入口スクラバー34,反応器32及び出口スクラバー36をこの順に通過して排ガスE中の除害対象成分が除害される。 Next, when the exhaustgas treatment device 11A configured as described above is used to perform the exhaust gas E detoxification treatment, first, an operation switch (not shown) of the exhaust gas treatment device 11A is turned on to react. The heating means 30 in the tower 32 is activated and heating in the head box 24 is started.
Subsequently, when the temperature of the exhaust gas E flow area in thehead box 24 reaches the thermal decomposition temperature of the component to be removed contained in the exhaust gas E, the exhaust fan 42 is activated, and the exhaust gas E to the exhaust gas treatment device 11A is activated. Start the introduction. Then, the exhaust gas E passes through the inlet scrubber 34, the reactor 32, and the outlet scrubber 36 in this order, and the components to be removed in the exhaust gas E are removed.
続いて、ヘッドボックス24内の排ガスE通流領域の温度が当該排ガスEに含まれる除害対象成分の熱分解温度に達すると、排気ファン42が作動し、排ガス処理装置11Aへの排ガスEの導入を開始させる。すると、排ガスEは、入口スクラバー34,反応器32及び出口スクラバー36をこの順に通過して排ガスE中の除害対象成分が除害される。 Next, when the exhaust
Subsequently, when the temperature of the exhaust gas E flow area in the
本実施形態の排ガス処理装置11Aによれば、熱交換器10を上記の通り構成しているので、排ガスEの熱分解の際、以下の作用を奏する。
すなわち、受熱流体通流路18と放熱流体通流路20とが、本体ケーシング16の軸方向にて隣接すると共に、本体ケーシング16の軸方向全体に亘って螺旋状に形成されるので、伝熱板22を介して接触する受熱流体と放熱流体との接触面積、すなわち伝熱面積を極大化することができる。加えて、伝熱板22を介して接触する放熱流体と受熱流体とが向流になるため、常に低温の受熱流体はそれより高い温度の放熱流体に触れるようになり、熱交換効率を向上させることができる。 According to the exhaustgas treatment apparatus 11A of the present embodiment, the heat exchanger 10 is configured as described above, and therefore, the following effects are exhibited when the exhaust gas E is thermally decomposed.
That is, the heat receivingfluid passage 18 and the radiating fluid passage 20 are adjacent to each other in the axial direction of the main casing 16 and are formed in a spiral shape over the entire axial direction of the main casing 16. It is possible to maximize the contact area between the heat receiving fluid and the heat radiating fluid that are in contact via the plate 22, that is, the heat transfer area. In addition, since the heat-dissipating fluid and the heat-receiving fluid that are in contact with each other through the heat transfer plate 22 are counter-current, the low-temperature heat-receiving fluid always comes into contact with the heat-dissipating fluid having a higher temperature, thereby improving heat exchange efficiency be able to.
すなわち、受熱流体通流路18と放熱流体通流路20とが、本体ケーシング16の軸方向にて隣接すると共に、本体ケーシング16の軸方向全体に亘って螺旋状に形成されるので、伝熱板22を介して接触する受熱流体と放熱流体との接触面積、すなわち伝熱面積を極大化することができる。加えて、伝熱板22を介して接触する放熱流体と受熱流体とが向流になるため、常に低温の受熱流体はそれより高い温度の放熱流体に触れるようになり、熱交換効率を向上させることができる。 According to the exhaust
That is, the heat receiving
また、本実施形態の排ガス処理装置11Aでは、熱交換器10の受熱流体通流路18と放熱流体通流路20とが、内管14の外周を螺旋状に旋回する形状であるため、流路内に粉塵などが溜まり難く、また仮に粉塵などが溜まった場合でも、洗浄水や洗浄エアなどの内部洗浄流体を流すだけで比較的簡単に洗い流すことができる。とりわけ、本実施形態の排ガス処理装置11Aにおいては、立設された熱交換器10の本体ケーシング16の上端面にガイド部材26が設けられると共に、このガイド部材26の頂点26a直上の位置にシャワー水SWを噴射するスプレーノズル28が装備されているので、ガイド部材26の頂部26aに向けて熱交換器内部洗浄用のシャワー水SWを噴射・供給するだけで受熱流体出口18b及び放熱流体入口20aのそれぞれに対して自動的にシャワー水SWを供給することができる。そして、受熱流体出口18b及び放熱流体入口20aのそれぞれに供給されたシャワー水SWは、その後、重力等に従って熱交換器10の内部を流下して熱交換器10内に溜まった粉塵などを洗い流す。
Further, in the exhaust gas treatment apparatus 11A of the present embodiment, the heat receiving fluid passage 18 and the radiating fluid passage 20 of the heat exchanger 10 have a shape that spirals around the outer periphery of the inner pipe 14, It is difficult for dust to accumulate in the road, and even if dust accumulates, it can be washed out relatively easily simply by flowing an internal cleaning fluid such as cleaning water or cleaning air. In particular, in the exhaust gas treatment apparatus 11A of the present embodiment, a guide member 26 is provided on the upper end surface of the main casing 16 of the upright heat exchanger 10, and shower water is provided at a position directly above the apex 26a of the guide member 26. Since the spray nozzle 28 for injecting SW is installed, the shower water SW for cleaning the heat exchanger is simply sprayed and supplied toward the top portion 26a of the guide member 26, so that the heat receiving fluid outlet 18b and the radiating fluid inlet 20a are provided. The shower water SW can be automatically supplied to each. Then, the shower water SW supplied to each of the heat receiving fluid outlet 18b and the radiating fluid inlet 20a flows down the inside of the heat exchanger 10 according to gravity or the like to wash away dust and the like accumulated in the heat exchanger 10.
なお、上記の実施形態は、次のように変更可能である。
上述の排ガス処理装置11Aでは、入口スクラバー34と出口スクラバー36の両方を備える場合を示したが、処理する排ガスEの種類によってはこれらの何れか一方を備えるようにしてもよい。 In addition, said embodiment can be changed as follows.
In the exhaustgas treatment apparatus 11A described above, the case where both the inlet scrubber 34 and the outlet scrubber 36 are provided has been shown, but either one of them may be provided depending on the type of exhaust gas E to be treated.
上述の排ガス処理装置11Aでは、入口スクラバー34と出口スクラバー36の両方を備える場合を示したが、処理する排ガスEの種類によってはこれらの何れか一方を備えるようにしてもよい。 In addition, said embodiment can be changed as follows.
In the exhaust
次に、図3に示す第2実施形態の排ガス処理装置11Bについて説明する。
上述した第1実施形態と異なる部分は、主として、反応塔32前後の入口スクラバー34及び出口スクラバー36を省略すると共に、熱交換器10の下側内部にスプレーノズル40を配置した点である。なお、これら以外の部分は前記第1実施形態と同じであるので、同じ構成については第1実施形態と同じ符号を付すと共に、前記第1実施形態の説明を援用して本実施形態の説明に代える。また、各符号に関し、各部位を上位概念で示す場合にはアルファベットの枝番をつけずアラビア数字のみで示し、各部位を区別する必要がある場合(すなわち下位概念で示す場合)にはアルファベット大文字の枝番をアラビア数字に付して区別する。 Next, the exhaustgas treatment apparatus 11B of the second embodiment shown in FIG. 3 will be described.
The difference from the first embodiment described above is that theinlet scrubber 34 and the outlet scrubber 36 before and after the reaction tower 32 are omitted, and the spray nozzle 40 is disposed inside the lower side of the heat exchanger 10. In addition, since parts other than these are the same as those in the first embodiment, the same components are denoted by the same reference numerals as those in the first embodiment, and the description of the first embodiment is used in the description of the first embodiment. Replace. In addition, regarding each code, when each part is indicated by a superordinate concept, it is indicated by only Arabic numerals without an alphabet branch number, and when it is necessary to distinguish each part (ie, when it is indicated by a subordinate concept) The branch numbers are distinguished by adding Arabic numerals.
上述した第1実施形態と異なる部分は、主として、反応塔32前後の入口スクラバー34及び出口スクラバー36を省略すると共に、熱交換器10の下側内部にスプレーノズル40を配置した点である。なお、これら以外の部分は前記第1実施形態と同じであるので、同じ構成については第1実施形態と同じ符号を付すと共に、前記第1実施形態の説明を援用して本実施形態の説明に代える。また、各符号に関し、各部位を上位概念で示す場合にはアルファベットの枝番をつけずアラビア数字のみで示し、各部位を区別する必要がある場合(すなわち下位概念で示す場合)にはアルファベット大文字の枝番をアラビア数字に付して区別する。 Next, the exhaust
The difference from the first embodiment described above is that the
スプレーノズル40は、シャワー水SWを噴射して排ガスEを液洗するためのもので、熱交換器10における受熱流体入口18a近傍の受熱流体通流路18内及び放熱流体出口20b近傍の放熱流体通流路20内に複数設置される。このうち、受熱流体入口18a近傍の受熱流体通流路18内に設置されるスプレーノズル40Aは、受熱流体入口18aから受熱流体通流路18内へと供給される排ガスEの流れに対して対向する向きにシャワー水SWを噴射するものであり、前記の入口スクラバー34と同等の機能を発揮する。これに対し、放熱流体出口20b近傍の放熱流体通流路20内に設置されるスプレーノズル40Bは、放熱流体通流路20内を放熱流体出口20bへと向かう排ガスEの流れと並行する向きにシャワー水SWを噴射するものであり、前記の出口スクレバー36と同等の機能を発揮する。
The spray nozzle 40 is for injecting the shower water SW to wash the exhaust gas E, and in the heat exchanger 10, the heat receiving fluid in the heat receiving fluid passage 18 near the heat receiving fluid inlet 18a and the heat radiating fluid in the vicinity of the heat radiating fluid outlet 20b. A plurality of the flow paths 20 are installed. Among these, the spray nozzle 40 </ b> A installed in the heat receiving fluid passage 18 near the heat receiving fluid inlet 18 a faces the flow of the exhaust gas E supplied from the heat receiving fluid inlet 18 a into the heat receiving fluid passage 18. The shower water SW is sprayed in the direction to be performed, and the same function as the inlet scrubber 34 is exhibited. On the other hand, the spray nozzle 40B installed in the heat dissipation fluid passage 20 near the heat dissipation fluid outlet 20b is parallel to the flow of the exhaust gas E toward the heat dissipation fluid outlet 20b in the heat dissipation fluid passage 20. The shower water SW is sprayed and exhibits the same function as the outlet scrubber 36.
また、本実施形態の排ガス処理装置11Bでは、受熱流体入口18aに水槽72が直結されている。この水槽72は、スプレーノズル40Aから噴射されたスプレー水SWを排水Wとして回収するタンクであり、その内部空間は入口ダクト46を介して図示しない半導体製造装置と連結されている。一方、放熱流体出口20bには水槽74が直結されている。この水槽74は、スプレーノズル40Bから噴射されたスプレー水SWを排水Wとして回収するタンクであり、その内部空間は排気ファン42に接続されている。
ここで、本実施形態の排ガス処理装置11Bでは、スプレーノズル40Bには新水を供給し、スプレーノズル40Aには水槽74に回収された排水Wをポンプ76で汲み上げて供給している。しかしながら、各スプレーノズル40に供給する水はこれらの態様に限定されるものではなく、例えば、全て新水を用いるようにしてもよいし、全て水槽72及び/又は水槽74に回収された排水Wを汲み上げて使用するようにしてもよい。 In the exhaustgas treatment apparatus 11B of the present embodiment, the water tank 72 is directly connected to the heat receiving fluid inlet 18a. The water tank 72 is a tank that collects the spray water SW sprayed from the spray nozzle 40 </ b> A as drainage W, and its internal space is connected to a semiconductor manufacturing apparatus (not shown) via an inlet duct 46. On the other hand, a water tank 74 is directly connected to the radiating fluid outlet 20b. The water tank 74 is a tank that collects the spray water SW sprayed from the spray nozzle 40 </ b> B as drainage W, and its internal space is connected to the exhaust fan 42.
Here, in the exhaustgas treatment apparatus 11B of the present embodiment, fresh water is supplied to the spray nozzle 40B, and the waste water W collected in the water tank 74 is pumped up by the pump 76 and supplied to the spray nozzle 40A. However, the water supplied to each spray nozzle 40 is not limited to these modes. For example, all fresh water may be used, or all the waste water W collected in the water tank 72 and / or the water tank 74 may be used. You may make it use it.
ここで、本実施形態の排ガス処理装置11Bでは、スプレーノズル40Bには新水を供給し、スプレーノズル40Aには水槽74に回収された排水Wをポンプ76で汲み上げて供給している。しかしながら、各スプレーノズル40に供給する水はこれらの態様に限定されるものではなく、例えば、全て新水を用いるようにしてもよいし、全て水槽72及び/又は水槽74に回収された排水Wを汲み上げて使用するようにしてもよい。 In the exhaust
Here, in the exhaust
以上のように構成された排ガス除害装置11Bによれば、反応塔32前後の入口スクラバー34及び出口スクラバー36を省略することができるので、排ガス処理装置11Bをコンパクトにすることができるようになる。
また、前述の第1実施形態と同様に、この第2実施形態の排ガス処理装置11Bも熱交換器10を備えているので、大容量排ガスの効率的な熱分解(除害)処理が可能となる。具体的には、加熱手段30として出力10kWの電熱ヒーターを用い、風量400L/分の排ガスを850℃に加熱し、排ガス中のNF3を99.5%以上除害可能な排ガス処理装置において、角管状の本体ケーシング16の高さが1000mm,外管12の水平断面形状が1辺400mmの矩形,内管14の水平断面形状が1辺200mmの矩形,1000mm高さの本体ケーシング16に受熱流体通流路18及び放熱流体通流路20が螺旋状にそれぞれ10回転旋回して形成された本発明の熱交換器10を適用した場合、加熱手段30である電熱ヒーターの負荷を75%程度低減させることができた。また、この結果は、電熱ヒーターの負荷を75%程度低減させたのみならず、同時に、放熱流体として使用された後、大気中へと排出される排ガスEの冷却負荷を75%程度低減させていることをも意味する。このように本発明の熱交換器10を用いれば、効率的且つ経済的に排ガスの熱分解処理をすることができる。 According to the exhaustgas abatement apparatus 11B configured as described above, the inlet scrubber 34 and the outlet scrubber 36 before and after the reaction tower 32 can be omitted, so that the exhaust gas treatment apparatus 11B can be made compact. .
Further, similarly to the first embodiment described above, the exhaustgas treatment apparatus 11B of the second embodiment also includes the heat exchanger 10, so that efficient thermal decomposition (detoxification) treatment of large-capacity exhaust gas is possible. Become. Specifically, in an exhaust gas treatment apparatus that uses an electric heater with an output of 10 kW as the heating means 30, heats the exhaust gas of 400 L / min to 850 ° C., and can detoxify 99.5% or more of NF 3 in the exhaust gas. The rectangular tubular body casing 16 has a height of 1000 mm, the outer tube 12 has a horizontal cross-sectional shape of a rectangle having a side of 400 mm, the inner tube 14 has a horizontal cross-sectional shape of a rectangle having a side of 200 mm, and the main body casing 16 has a height of 1000 mm. When the heat exchanger 10 of the present invention in which the flow path 18 and the radiating fluid flow path 20 are spirally rotated 10 times respectively is applied, the load of the electric heater as the heating means 30 is reduced by about 75%. I was able to. Moreover, this result not only reduced the load of the electric heater by about 75%, but at the same time reduced the cooling load of the exhaust gas E discharged to the atmosphere after being used as a radiating fluid by about 75%. It also means that Thus, if the heat exchanger 10 of this invention is used, the thermal decomposition process of waste gas can be performed efficiently and economically.
また、前述の第1実施形態と同様に、この第2実施形態の排ガス処理装置11Bも熱交換器10を備えているので、大容量排ガスの効率的な熱分解(除害)処理が可能となる。具体的には、加熱手段30として出力10kWの電熱ヒーターを用い、風量400L/分の排ガスを850℃に加熱し、排ガス中のNF3を99.5%以上除害可能な排ガス処理装置において、角管状の本体ケーシング16の高さが1000mm,外管12の水平断面形状が1辺400mmの矩形,内管14の水平断面形状が1辺200mmの矩形,1000mm高さの本体ケーシング16に受熱流体通流路18及び放熱流体通流路20が螺旋状にそれぞれ10回転旋回して形成された本発明の熱交換器10を適用した場合、加熱手段30である電熱ヒーターの負荷を75%程度低減させることができた。また、この結果は、電熱ヒーターの負荷を75%程度低減させたのみならず、同時に、放熱流体として使用された後、大気中へと排出される排ガスEの冷却負荷を75%程度低減させていることをも意味する。このように本発明の熱交換器10を用いれば、効率的且つ経済的に排ガスの熱分解処理をすることができる。 According to the exhaust
Further, similarly to the first embodiment described above, the exhaust
なお、上記の第2実施形態は、次のように変更可能である。
上述の排ガス処理装置11Bでは、受熱流体通流路18内及び放熱流体通流路20内の両方にスプレーノズル40を設置する場合を示したが、処理する排ガスEの種類によってはこれらの何れか一方にスプレーノズル40を設置するようにしてもよい。 In addition, said 2nd Embodiment can be changed as follows.
In the above-described exhaustgas treatment apparatus 11B, the case where the spray nozzle 40 is installed in both the heat receiving fluid passage 18 and the radiating fluid passage 20 is shown. You may make it install the spray nozzle 40 in one side.
上述の排ガス処理装置11Bでは、受熱流体通流路18内及び放熱流体通流路20内の両方にスプレーノズル40を設置する場合を示したが、処理する排ガスEの種類によってはこれらの何れか一方にスプレーノズル40を設置するようにしてもよい。 In addition, said 2nd Embodiment can be changed as follows.
In the above-described exhaust
また、上述の第1及び第2実施形態では、熱交換器10を半導体製造装置からの排ガスEを除害するための排ガス除害装置11A及び11Bに適用する形態について説明したが、当該熱交換器10の用途はこれに限られず、粉塵等を多く含む流体間の熱交換が求められるような装置であれば他の如何なる装置にも適用することができる。
Moreover, although the above-mentioned 1st and 2nd embodiment demonstrated the form applied to the waste gas removal apparatus 11A and 11B for removing the heat exchanger 10 from the semiconductor manufacturing apparatus, the said heat exchange The use of the vessel 10 is not limited to this, and can be applied to any other device as long as heat exchange between fluids containing much dust and the like is required.
10…熱交換器
11A,11B…排ガス処理装置
12…外管
14…内管
16…本体ケーシング
18…受熱流体通流路
18a…受熱流体入口
18b…受熱流体出口
20…放熱流体通流路
20a…放熱流体入口
20b…放熱流体出口
22…伝熱板
24…ヘッドボックス
26…ガイド部材
26a…(ガイド部材の)頂部
26b,26c…(ガイド部材の)傾斜面
30…加熱手段
32…反応塔
34…入口スクラバー
36…出口スクラバー
40…スプレーノズル
E…排ガス DESCRIPTION OFSYMBOLS 10 ... Heat exchanger 11A, 11B ... Exhaust gas treatment apparatus 12 ... Outer pipe 14 ... Inner pipe 16 ... Main body casing 18 ... Heat receiving fluid passage 18a ... Heat receiving fluid inlet 18b ... Heat receiving fluid outlet 20 ... Radiating fluid passage 20a ... Radiant fluid inlet 20b ... radiant fluid outlet 22 ... heat transfer plate 24 ... head box 26 ... guide member 26a ... top part 26b, 26c (of guide member) inclined surface 30 (of guide member) ... heating means 32 ... reaction tower 34 ... Inlet scrubber 36 ... Outlet scrubber 40 ... Spray nozzle E ... Exhaust gas
11A,11B…排ガス処理装置
12…外管
14…内管
16…本体ケーシング
18…受熱流体通流路
18a…受熱流体入口
18b…受熱流体出口
20…放熱流体通流路
20a…放熱流体入口
20b…放熱流体出口
22…伝熱板
24…ヘッドボックス
26…ガイド部材
26a…(ガイド部材の)頂部
26b,26c…(ガイド部材の)傾斜面
30…加熱手段
32…反応塔
34…入口スクラバー
36…出口スクラバー
40…スプレーノズル
E…排ガス DESCRIPTION OF
Claims (5)
- 外管(12)及び内管(14)からなる二重管構造の本体ケーシング(16)と、
上記外管(12)と上記内管(14)との間に形成された内部空間を受熱流体通流路(18)及び放熱流体通流路(20)に区画する伝熱板(22)とで構成された熱交換器であって、
上記の受熱流体通流路(18)と上記の放熱流体通流路(20)とが、上記本体ケーシング(16)の軸方向にて隣接すると共に、上記本体ケーシング(16)の軸方向全体に亘って螺旋状に形成される、
ことを特徴とする熱交換器。 A double-pipe main body casing (16) comprising an outer pipe (12) and an inner pipe (14);
A heat transfer plate (22) that divides an internal space formed between the outer pipe (12) and the inner pipe (14) into a heat receiving fluid passage (18) and a radiating fluid passage (20); A heat exchanger composed of
The heat receiving fluid passage (18) and the radiating fluid passage (20) are adjacent to each other in the axial direction of the main casing (16), and the entire axial direction of the main casing (16). Formed in a spiral shape,
A heat exchanger characterized by that. - 請求項1の熱交換器において、
前記本体ケーシング(16)は、その軸が上下方向を向くように立設されると共に、
当該本体ケーシング(16)の下端部には、受熱流体通流路(18)に連なる受熱流体入口(18a)と放熱流体通流路(20)に連なる放熱流体出口(20b)とが開設され、
当該本体ケーシング(16)の上端部には、受熱流体通流路(18)に連なる受熱流体出口(18b)と放熱流体通流路(20)に連なる放熱流体入口(20a)とが開設される、
ことを特徴とする熱交換器。 The heat exchanger of claim 1,
The body casing (16) is erected so that its axis is directed in the vertical direction,
At the lower end of the main casing (16), a heat receiving fluid inlet (18a) connected to the heat receiving fluid passage (18) and a radiating fluid outlet (20b) connected to the radiating fluid passage (20) are opened.
A heat receiving fluid outlet (18b) connected to the heat receiving fluid passage (18) and a radiating fluid inlet (20a) connected to the radiating fluid passage (20) are opened at the upper end of the main casing (16). ,
A heat exchanger characterized by that. - 請求項2の熱交換器において、
前記本体ケーシング(16)の上部に、前記受熱流体出口(18b)と前記放熱流体入口(20a)とを連通する空間を区画するヘッドボックス(24)が取り付けられると共に、
上記本体ケーシング(16)の上端面には、頂部(26a)が共通する傾斜面(26b)(26c)で上記受熱流体出口(18b)と上記放熱流体入口(20a)とを連結し、上記頂部(26a)に与えられた流体を上記受熱流体出口(18b)及び上記放熱流体入口(20a)へと案内するガイド部材(26)が装着される、
ことを特徴とする熱交換器。 The heat exchanger according to claim 2,
A head box (24) defining a space communicating the heat receiving fluid outlet (18b) and the heat radiating fluid inlet (20a) is attached to an upper portion of the main casing (16).
The upper end surface of the main body casing (16) is connected to the heat receiving fluid outlet (18b) and the radiating fluid inlet (20a) by inclined surfaces (26b) (26c) having a common top portion (26a), and the top portion A guide member (26) for guiding the fluid applied to (26a) to the heat receiving fluid outlet (18b) and the heat radiating fluid inlet (20a) is mounted.
A heat exchanger characterized by that. - 請求項2又は3の熱交換器(10)と、その熱交換器(10)の受熱流体通流路(18)を通流してきた処理対象の排ガス(E)を加熱する加熱手段(30)とを具備する反応塔(32)、及び
上記反応塔(32)に導入する処理対象の排ガス(E)を液洗する湿式の入口スクラバー(34)又は上記反応塔(32)で熱分解した処理後の排ガス(E)を液洗する湿式の出口スクラバー(36)の少なくとも何れか一方を備える、
ことを特徴とする排ガス処理装置。 Heat exchanger (10) according to claim 2 or 3, and heating means (30) for heating the exhaust gas (E) to be treated which has flowed through the heat receiving fluid passage (18) of the heat exchanger (10) And a thermal decomposition process using a wet inlet scrubber (34) for washing the exhaust gas (E) to be treated introduced into the reaction tower (32) or the reaction tower (32). Comprising at least one of a wet outlet scrubber (36) for washing the exhaust gas (E) afterwards,
An exhaust gas treatment apparatus characterized by that. - 請求項2又は3の熱交換器(10)と、その熱交換器(10)の受熱流体通流路(18)を通流してきた処理対象の排ガス(E)を加熱する加熱手段(30)とで構成された反応塔(32)を具備する排ガス処理装置であって、
上記熱交換器(10)における前記受熱流体入口(18a)近傍の受熱流体通流路(18)内又は前記放熱流体出口(20b)近傍の放熱流体通流路(20)内の少なくとも何れか一方に、排ガス(E)を液洗する1又は複数のスプレーノズル(40)が設けられる、
ことを特徴とする排ガス処理装置。 Heat exchanger (10) according to claim 2 or 3, and heating means (30) for heating the exhaust gas (E) to be treated which has flowed through the heat receiving fluid passage (18) of the heat exchanger (10) An exhaust gas treatment apparatus comprising a reaction tower (32) composed of
In the heat exchanger (10), at least one of the heat receiving fluid passage (18) in the vicinity of the heat receiving fluid inlet (18a) and the heat dissipation fluid passage (20) in the vicinity of the heat releasing fluid outlet (20b). Are provided with one or more spray nozzles (40) for washing the exhaust gas (E).
An exhaust gas treatment apparatus characterized by that.
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PCT/JP2014/002768 WO2015181846A1 (en) | 2014-05-26 | 2014-05-26 | Heat exchanger and exhaust gas treatment device using said heat exchanger |
CN201580029176.2A CN106471325B (en) | 2014-05-26 | 2015-05-22 | Heat exchanger and the exhaust gas treatment device for utilizing the heat exchanger |
KR1020167033092A KR102262643B1 (en) | 2014-05-26 | 2015-05-22 | Heat exchanger and exhaust gas treatment device using said heat exchanger |
JP2016523134A JP6336059B2 (en) | 2014-05-26 | 2015-05-22 | Heat exchanger and exhaust gas treatment apparatus using the heat exchanger |
PCT/JP2015/002599 WO2015182094A1 (en) | 2014-05-26 | 2015-05-22 | Heat exchanger and exhaust gas treatment device using said heat exchanger |
TW104116830A TW201616078A (en) | 2014-05-26 | 2015-05-26 | Heat exchanger and exhaust gas treatment device using the same |
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JP2022006813A (en) * | 2020-06-25 | 2022-01-13 | 株式会社エーアイテック | Heat exchanger |
US11788801B2 (en) * | 2017-10-13 | 2023-10-17 | Volvo Truck Corporation | Heat exchanger and an additive manufacturing method for manufacturing a heat exchanger |
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CN108686612A (en) * | 2018-08-02 | 2018-10-23 | 汤铁 | Tubular type countercurrent flow reactor |
CN115803102A (en) * | 2020-07-07 | 2023-03-14 | 北京康肯环保设备有限公司 | Gas treatment furnace and exhaust gas treatment device using same |
KR102489504B1 (en) * | 2021-07-19 | 2023-01-17 | 한밭대학교 산학협력단 | Indoor roasting device removing smoke and smell |
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CN106471325B (en) | 2019-02-15 |
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CN106471325A (en) | 2017-03-01 |
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