KR100917908B1 - Device for treating gas in a mixed way - Google Patents

Abstract

The present invention relates to a cylindrical oxidation chamber including a hollow cylindrical heating device therein, wherein air and water are introduced into a high temperature and high humidity air through an inlet centrally arranged concentrically with the heating device, and the side surface of the oxidation chamber. The gas to be processed is introduced and heated vertically with respect to the oxidation, and the gas flows downward through the space between the outer wall of the oxidation chamber and the heating device while causing the oxidation reaction by mixing the hot and humid air and the gas. A chamber; An airflow switch connected to a lower portion of the oxidation chamber and configured to reduce the cross-sectional area of a space through which the gas flowing from the oxidation chamber passes and to accelerate and change the airflow of the gas; A cylindrical wet chamber having an empty center to collect the solids separated and separated by the speed change when the gas flow is switched in the air flow switch, and the gas to process the gas flowing through the air flow changer. A wet chamber including a nozzle ring for injecting water in all directions and a filler located below the nozzle ring, for discharging gas passing through the filler through an exhaust port, and discharging water in the lower part through a drain port; A discharge column connected to the exhaust port of the wet chamber to discharge the gas discharged from the wet chamber to the outside, and one or more fillers and injection nozzles are installed in the gas discharge path to further process the gas rising from the bottom to the top and; And a circulation tank including a circulation pump for supplying an injection nozzle of the discharge column to circulate water flowing from the discharge port of the wet chamber and the injection nozzle of the discharge column, and a discharge pump for discharging the water to the outside. It provides a mixed gas treatment apparatus. According to the mixed gas treatment device of the present invention, the gas to be treated can be efficiently oxidized by the heating device in the oxidation chamber, and the gas stream can be effectively accelerated in the air flow changer, so that the solids can be easily separated. In addition, the collection efficiency of the solids can be maximized by the nozzle ring in the wet chamber. In addition, it is possible to increase the operating efficiency of the device by circulating water in the device using a circulation tank.

Oxidation chamber, wet chamber, discharge column, circulation tank

Description

Mixed Gas Treatment System {DEVICE FOR TREATING GAS IN A MIXED WAY}

The present invention relates to a gas treatment apparatus for treating a contaminated gas. More specifically, the present invention relates to a mixed gas treating apparatus for treating a gas by an oxidation reaction and wet treating the gas.

Many of the devices used in industrial sites produce gases that contain toxic components. Gas emitted from chemical industry facilities, waste treatment facilities, manufacturing industry facilities such as semiconductors, etc. contains a variety of toxic components, and the type and amount of these toxic components are increasing with industrial development. Such exhaust gases (eg silane (SiH ₄ ), hydrogen (2H ₂ ), fluorine (F ₂ ), ammonia (NH ₃ ), sulfur hexafluoride (SF ₆ ), phosphine (2PH ₃ ), dichlorosilane (SiH ₂ O ₂ ), nitrogen trifluoride (2NF ₃ ), etc.) are usually very toxic to the environment but often not well recognized. Therefore, toxic components must be removed before these gases are released into the atmosphere to prevent environmental pollution.

There are various methods for treating and purifying a gas containing such toxic components at present and are widely known. Such known methods include wet methods such as contacting a gas to be treated with a cleaning liquid with a packed column or a spray tower, or absorbing toxic components in a scrubber to decompose it, and the gas to be treated passes through a purifying agent such as an adsorbent or an oxidizing agent or oxidizes. There is a dry method using the reaction.

When the gas is treated only by the wet method, problems such as corrosion of the device due to liquid components, difficulty in securing water and disposal of waste after use are expensive, and the maintenance cost is high. In addition, when a solid material or particles are contained in the gas, a blockage occurs in the apparatus, and there is a problem that a liquid and gas drift phenomenon often occur in the packed column. In addition, the nozzles used in the wet method are usually sprayed in one direction, so that the liquefaction range is not wide and certain parts of the wet chamber are not cleaned, causing corrosion.

In the case of the dry method, the problem associated with the use of only the wet method can be solved. However, the problem of the preliminary wet treatment requiring a complicated device still remains. For example, in the case of the dry method using the catalyst, the problem associated with the wet method is However, there is a disadvantage in that the efficiency of treating toxic components is inferior to the wet method.

In addition, in the prior art, a gas treatment apparatus using both a dry method and a wet method using an oxidation reaction is also known, but the gas to be treated is connected to the upper plate of the chamber, so that when the gas is introduced therein, laminar or drift internal air flow is formed. There is a problem that the solids accumulate in the chamber. In addition, when the heater used for the oxidation reaction is outside, the heat transmitted to the outside cannot be used, and thus, the heat efficiency of the heater is low, so that it cannot be processed in a large capacity. Attached to the heater requires frequent cleaning. In addition, the air supplied for oxidation is introduced to room temperature, and it takes a long time to reach an appropriate reaction temperature, so the efficiency of the oxidation reaction is low, and even when steam is supplied, a heater is usually arranged outside so that water vapor is supplied in the middle. There is a problem of condensation in the pipe and solids deposited at the feed end inside the chamber.

An object of the present invention is to solve the above problems.

Specifically, it is an object to maximize the treatment efficiency of the gas to be treated by using a wet method together with a dry method using an oxidation reaction.

In addition, while improving the efficiency of the oxidation reaction to minimize the problem of depositing solids.

In the wet treatment, the problem of corrosion in the wet chamber is also solved while maximizing the collection efficiency of the suspended solids.

Other objects and advantages of the present invention will be understood from the following description of the embodiments with reference to the accompanying drawings.

In order to achieve the above object and other objects, the present invention is a cylindrical oxidation chamber including a hollow cylindrical heating device therein, the air and water is introduced through the inlet arranged in the center concentric with the heating device It becomes hot and humid air, the gas to be processed is introduced and heated vertically with respect to the side surface of the oxidation chamber, and the hot and humid air and the gas are mixed to cause an oxidation reaction and the outer wall of the oxidation chamber and the heating device. An oxidation chamber through which gas flows downward through a space therebetween; An airflow switch connected to a lower portion of the oxidation chamber and configured to reduce the cross-sectional area of a space through which the gas flowing from the oxidation chamber passes and to accelerate and change the airflow of the gas; When the gas flow is switched in the air flow switch, a cylindrical wet chamber having an empty center to collect the solids separated and separated by the speed change therein, and to handle the gas flowing through the air flow switch. A wet chamber including a nozzle ring for injecting water into the gas and a filler positioned below the nozzle ring, and discharging the gas passing through the filler through the exhaust port, and discharging the water through the drain port; A discharge column connected to the exhaust port of the wet chamber to discharge the gas discharged from the wet chamber to the outside, and one or more fillers and injection nozzles are installed in the gas discharge path to further process the gas rising from the bottom to the top and; And a circulation tank including a circulation pump for supplying an injection nozzle of the discharge column to circulate water flowing from the discharge port of the wet chamber and the injection nozzle of the discharge column, and a discharge pump for discharging the water to the outside. It provides a mixed gas treatment apparatus.

By the heating apparatus in the oxidation chamber of the present invention, the gas to be treated is efficiently oxidized, the solids are easily separated by the gas changer, and the gas in the wet chamber can be efficiently processed by the nozzle ring. .

Preferably, the air flow switching unit surrounds the metal catalyst part as a conical metal catalyst located under the oxidation chamber and an inverted conical shape whose upper and lower parts are opened so that a gas flow is accelerated in a space between the metal catalyst part. And an upper wing portion and a lower wing portion surrounding a lower portion of the upper wing portion in an inverted conical shape in which an upper and a lower portion are opened to guide the gas stream toward the wet chamber.

With this structure, the gas flow is accelerated by the airflow changer whose cross-sectional area is reduced so that the solids can be easily separated and then entered into the wet chamber.

Also preferably, the lower surface of the upper wing portion includes a ring, and the upper surface of the lower wing portion includes a protrusion.

The ring prevents water from flowing out of the wet chamber and prevents solids from adhering to the passageway by the protrusions.

Also preferably, the mixed gas treatment apparatus further includes a rotating member located at the center of the wet chamber and rotated by a motor, wherein a lower portion of the lower wing is connected to the rotating member to rotate the rotating member. The lower wing may also rotate together.

Falling solids may be pulverized by rotating the rotating member. Therefore, it is easy to process solids falling into the wet chamber center.

Also, preferably, one or more of the injection nozzles in the discharge column injects water supplied by the circulation pump, and the remaining injection nozzles inject time water supplied separately from the outside.

According to the configuration of the present invention described above, the gas to be treated can be efficiently oxidized by the heating device in the oxidation chamber. In addition, the gas stream in the air flow changer can be effectively accelerated to easily separate the solids, and the collection efficiency of the solids can be maximized by the nozzle ring in the wet chamber. And, by circulating the water in the device using the circulation tank it is possible to increase the operating efficiency of the device. In addition, the gas treatment capacity is improved by using a mixture of an oxidation chamber, a wet chamber and a discharge column.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Referring to Figure 1, the overall configuration of the mixed gas treatment apparatus according to the present invention is schematically shown.

The mixed gas treatment apparatus includes an oxidation chamber for processing an inflow gas, an airflow switch for switching the air flow of the gas passing through the oxidation chamber, an oxidation chamber for processing the gas introduced by the airflow switch, and a wet chamber. And a discharge column for discharging the treated gas through the outside, and a circulation tank for circulating the water circulating in the gas treatment device and discharging the used water.

Hereinafter, the configuration and operation will be described in detail with reference to the accompanying drawings.

The oxidation chamber 10 is depicted in detail in FIG. 1, in particular in FIG. 2.

The oxidation chamber 10 is a cylindrical housing, and at least one gas inlet 11 is formed in the housing side wall 17. The switched gas inlet pipe 19 is connected to the gas inlet so that the gas to be treated enters the oxidation chamber. An inlet tube 13 through which compressed air and water flow is formed inside the housing center of the oxidation chamber. This inlet pipe 13 extends from the top of the center of the housing into the housing. Moreover, the heating apparatus 15 is formed in the state spaced apart around this inflow pipe. The heating device 15 is in the form of a hollow cylinder with a hollow central portion. Referring to FIG. 3, which is a cross-sectional view of the oxidation chamber of FIG. 2, the oxidation chamber 10 is arranged in a concentric manner in which the heating device 15 and the housing outer wall 17 are arranged radially from the inlet pipe 13 disposed at the center thereof. I can understand what it is.

As indicated by arrows B in FIGS. 1 and 2, when compressed air and water flow into the oxidation chamber through the inlet pipe 13 and reach the lower part of the housing, the direction is changed to the inlet pipe 13 and the heating device 15. Up through the passageway. At this time, the compressed air and water become hot humid air by the heating device 15. The heated hot humid air is discharged through the injection hole 14 in the upper part of the housing, and the injection speed is very fast because the volume expands rapidly about three times. Therefore, the air injected rapidly is efficiently mixed with the gas to be treated (indicated by the arrow A) flowing through the inlet 11, so that the oxidation reaction time is shortened and the treatment efficiency is improved.

Thereafter, the gas to be treated and the hot and humid air are mixed to form a gas stream and descend downward through the passage between the housing side wall 17 and the heating device 15 in the direction indicated by the arrow C. FIG.

Since the heating device 15 surrounds the inlet pipe 13 in the oxidation chamber, that is, has a cylindrical shape with a hollow central portion, and can radiate heat in all directions, the airflow flowing to the outside of the heating device 15. And the air and water rising up inside the heating device 15 can be heated at the same time, so that the heat dissipated can be utilized to the maximum.

In the oxidation chamber 10, the gas which flows in is processed by an oxidation reaction. The gas to be treated is introduced into the oxidation chamber through the inlet pipe 19, and compressed air and water are introduced through the inlet pipe 13. They are all in a state of being heated to a high temperature by a heating device, in which the gas to be treated can react with oxygen of the heated air to be converted into a safe gas, liquid, or solid. That is, hydrogen and oxygen react to produce steam or water, or silane and oxygen react to produce sand and steam or water.

In the conventional apparatus, the gas inlet is connected to the upper plate rather than the side of the chamber, and internal gas flow such as laminar flow or drift occurs when the gas is inflow, so that solids are accumulated inside the chamber and the gas flow is not smooth. The gas inlet 11 of the present invention is formed on the side wall 17 of the housing, the incoming gas is introduced in the circumferential normal direction perpendicular to the housing side wall 17 through the switched inlet pipe 19 Create a rotary vortex. Therefore, the inlet gas is rapidly mixed with the compressed air and water and evenly absorbs heat from the surface of the heating element. Therefore, according to the above-described configuration of the present invention, it is possible to prevent the solids from adhering to the wall in the oxidation chamber. Furthermore, it is also easy for the gas to be transported downward.

Meanwhile, two holes 18a and 18b may be formed at the side surface of the switched gas inlet pipe 19 connected to the gas inlet 11. Compressed air may be periodically injected through a hole 18a to shake off solids that may adhere to the oxidation chamber. In addition, the other holes 18b are formed in such a small size that they hardly affect the air flow in the oxidation chamber, and the cleaning holes can be brushed through the holes 18b. Therefore, it is possible to expect the advantage that there is no need to open the gas inlet pipe to remove the solids attached to the gas inlet as in the prior art, and as a result, does not block the flow of the incoming gas or stop the operation of the device.

In FIG. 4, the airflow changer 30 and the wet chamber 40 can be seen.

The airflow switch 30 includes a reverse conical metal catalyst 31 and two wings 33 and 35 attached to the lower end of the oxidation chamber. The upper wing part 33 has the inverted conical shape which surrounds the inverted conical metal catalyst part 31, and opened the upper and lower parts. Other reaction products, such as gases and solids, that descend from the oxidation chamber through the inverted conical metal catalyst 31 and the upper wing 33 are guided downward. In this case, since the cross-sectional area through which the gas passes has a structure that narrows down toward the lower portion, the flow rate of the gas airflow increases. The gas stream flowing down from the oxidation chamber is accelerated and has a maximum speed just before entering the passage between the lower wing and the upper wing, which will be described later, and the velocity of the gas flow when the direction of the air flow is changed to be guided between the lower wing and the upper wing. As a result, the velocity difference causes the solid by-products (solids) mixed in the air stream to separate and fall down.

The lower wing part 35 is disposed under the upper wing part 33. The lower wing part 35 also has the shape of an inverted cone with the upper and lower parts open. The lower wing 35 is equipped with a plurality of protrusions 36, so that when the gas stream flows between the lower wing and the upper wing portion, the solids attached to the passage can be removed.

Preferably, the mixed gas treatment apparatus according to the present invention may further include a rotating member 49 which may be coupled to the bottom of the lower wing 25 under the lower wing 25. This rotating member 49 can be rotated by the motor 47. The lower part of the rotating member 49 and the motor are connected by a pulley and a chain, for example, so that when the motor is driven, the rotating member 49 is rotated and the lower wing 35 coupled to the rotating member also rotates.

The wet chamber 40 includes a nozzle ring 41 and a filler 43 for spraying water in the form of a cylindrical cylinder. In particular, when the above-described rotating member 49 is present, the wet chamber 40 is in the form of a cylindrical cylinder with an empty center so that the rotating member 49 rotates at the center. The water spray nozzle ring 41 has a plurality of spray nozzles to spray water in the vertical direction in a wide range. According to the nozzle ring, since the water is injected in the vertical direction, the occurrence of the differential pressure is reduced and the suspended solids in the gas can be easily collected. The filler 43 is disposed under the nozzle ring, and the filler 43 is disposed in the cylindrical wet chamber in a circular donut shape with a hollow center. The filler 43 is configured such that the filler is filled in a circular plate having a plurality of holes so that gas and water can pass therethrough.

On the other hand, a ring 34 is formed in the lower portion of the upper wing 33, to prevent the water sprayed from the nozzle ring in the wet chamber from flowing over.

When gas is introduced into the wet chamber through the airflow switch, the water sprayed from the nozzle ring collects the suspended solids from the gas, and then the gas is processed through the filler 43. The treated gas is discharged out of the wet chamber through the exhaust port 45.

Water is contained in the lower portion of the wet chamber, and solids collected from the air flow switch 30 are dropped through the open space in the center of the wet chamber and collected above the water. In this case, when the rotating member 49 is rotated by a motor, the solid falling into a large mass is pulverized. In addition, solids deposited on the bottom may be removed by the turbulence generating nozzle 48 installed under the oxidation chamber.

A water outlet 46 is formed in the lower portion of the wet chamber to discharge the contained water toward the circulation tank 60 to be described later.

Gas that is processed in the wet chamber and exits through the exhaust port 45 flows into the lower portion of the discharge column 50. The gas introduced into the discharge column 50 rises and is finally discharged to the outside. A filler is also provided inside the discharge column 50, and a water spray nozzle is disposed above the filler. Preferably, the filler and the water jet nozzle may be installed in several layers.

As an example, as shown in Figs. 1 and 5, at the lower end of the discharge column, a filler 53 and a spray nozzle 54 for injecting water are arranged, and further, filler 55 and shisu are sprayed thereon. A spray nozzle 56 is provided. Filler and spray nozzles are not limited to two layers. If necessary, it may be composed of three or more layers. As will be described in detail below, the water sprayed from the spray nozzle 54 is the circulating water supplied from the circulation tank 60. The water supplied from the injection nozzle 56 is city water supplied separately, not circulating water. Accordingly, the gas is finally processed by the fillers 53 and 55 and the injection nozzles 54 and 56 while rising in the discharge column and then discharged to the outside through the exhaust port 57. In addition, the water sprayed from the spray nozzles 54 and 56 falls to the bottom and is collected in the circulation tank 60.

As shown in FIG. 5, water contained in the lower portion of the wet chamber is introduced into the circulation tank 60 through the circulation water collection port 65 of the circulation tank 60. In addition, as described above, water falling from the discharge column 50 is introduced into the circulation tank 60 through the time water collection port 66. The collected water is supplied to the spray nozzle 54 in the discharge column by the circulation pump 61. In addition, when the water needs to be discharged to the outside, it can be discharged to the outside by the drain pump 62.

On the other hand, the water level control sensor 67 is installed in the circulation tank 60 to check the water level in the circulation tank can maintain the appropriate water level in the tank. In addition, the liquid column system 68 can directly check the height and turbidity of the water. It is preferable that a cooler 69 is provided to supply coolant in the circulation tank.

Meanwhile, in order to easily separate the oxidation chamber of the present invention from the wet chamber, the following configuration may be considered. The crane 71 can be provided in the upper part of the cabinet 70 surrounding the whole apparatus, the pulley 73 can be attached to the oxidation chamber side, and the rail 72 can be provided in the cabinet side. When the pulley 73 of the oxidation chamber is connected to the rail 72, the vertical movement of the oxidation chamber may be easily performed. Therefore, when it is necessary to inspect the inside of the apparatus, only the oxidation chamber can be lifted up to inspect the interior simply and quickly, and also it is possible to facilitate work such as replacing parts.

Although the preferred embodiments of the present invention have been shown and described above, the present invention is not limited to the above-described embodiments, and the general knowledge in the field of the present invention without departing from the gist of the present invention as claimed in the following claims. Anyone having a variety of modifications can be made, of course, such modifications are included within the scope of the claims.

1 is a cross-sectional view showing the overall configuration of a gas treatment apparatus according to the present invention.

FIG. 2 is a cross-sectional view illustrating an oxidation chamber of FIG. 1.

3 is a cross-sectional view of the oxidation chamber of FIG.

4 is a cross-sectional view of the wet chamber of FIG. 1.

5 is a view showing the discharge column and the circulation tank of FIG.

6 is a view showing a state in which the oxidation chamber according to the present invention is separated.

[Description of Major Reference Code]

10: oxidation chamber

15: heating device

30: airflow changer

33: upper wing

35: lower wing

40: wet chamber

41: nozzle ring

50: discharge column

53: filler

54: nozzle

55: filler

56: nozzle

60: circulation tank

Claims (5)

A cylindrical oxidation chamber including a hollow cylindrical heating device therein, the air and water are introduced into the hot and humid air through the inlet disposed in the center concentric with the heating device, the air is hot and humid, perpendicular to the side of the oxidation chamber An oxidation chamber in which a gas to be treated is introduced and heated, and the gas flows downward through a space between the outer wall of the oxidation chamber and the heating device while causing the oxidation reaction by mixing the hot and humid air with the gas; An airflow switch connected to a lower portion of the oxidation chamber and configured to reduce the cross-sectional area of a space through which the gas flowing from the oxidation chamber passes and to accelerate and change the airflow of the gas; A cylindrical wet chamber having an empty center to collect the solids separated and separated by the speed change when the gas flow is switched in the air flow switch, and the gas to process the gas flowing through the air flow changer. A wet chamber including a nozzle ring for injecting water in all directions and a filler located below the nozzle ring, for discharging gas passing through the filler through an exhaust port, and discharging water in the lower part through a drain port; A discharge column connected to the exhaust port of the wet chamber to discharge the gas discharged from the wet chamber to the outside, and one or more fillers and injection nozzles are installed in the gas discharge path to further process the gas rising from the bottom to the top and; And a circulation tank including a circulation pump for supplying an injection nozzle of the discharge column to circulate water flowing from the discharge port of the wet chamber and the injection nozzle of the discharge column, and a discharge pump for discharging the water to the outside. Mixed gas treatment device. The method of claim 1, The air flow switch has a conical metal catalyst located under the oxidation chamber, and an inverted conical shape in which an upper and lower portions are opened to accelerate gas flow in a space between the metal catalyst part and an upper wing part surrounding the metal catalyst part. And a lower wing portion surrounding the lower portion of the upper wing portion in an inverted conical shape, the upper and lower portions of which are opened so as to guide the gas stream toward the wet chamber. The method of claim 2, The lower surface of the upper wing portion comprises a ring, the upper surface of the lower wing portion is a mixed gas treatment device, characterized in that it comprises a protrusion. The method according to claim 2 or 3, The mixed gas treatment apparatus further includes a rotating member located at the center of the wet chamber and rotated by a motor, and the lower wing portion is connected to the rotating member so that the lower wing portion rotates when the rotating member is rotated. Mixed gas treatment device, characterized in that rotating together. The method according to any one of claims 1 to 3, At least one of the injection nozzles in the discharge column injects water supplied by the circulation pump, and the remaining injection nozzles inject time water supplied separately from the outside.

Images