KR101579840B1 - Water soluble waste slurry recycling method and device - Google Patents
Water soluble waste slurry recycling method and device Download PDFInfo
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- KR101579840B1 KR101579840B1 KR1020140092590A KR20140092590A KR101579840B1 KR 101579840 B1 KR101579840 B1 KR 101579840B1 KR 1020140092590 A KR1020140092590 A KR 1020140092590A KR 20140092590 A KR20140092590 A KR 20140092590A KR 101579840 B1 KR101579840 B1 KR 101579840B1
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- cutting oil
- cutting
- slurry
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- 239000002002 slurry Substances 0.000 title claims abstract description 173
- 239000002699 waste material Substances 0.000 title claims abstract description 144
- 238000000034 method Methods 0.000 title claims abstract description 56
- 238000004064 recycling Methods 0.000 title claims abstract description 38
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 35
- 239000010730 cutting oil Substances 0.000 claims abstract description 108
- 238000005520 cutting process Methods 0.000 claims abstract description 82
- 239000000463 material Substances 0.000 claims abstract description 77
- 230000005484 gravity Effects 0.000 claims abstract description 45
- 238000011084 recovery Methods 0.000 claims abstract description 33
- 239000000843 powder Substances 0.000 claims abstract description 32
- 239000010419 fine particle Substances 0.000 claims abstract description 30
- 238000002156 mixing Methods 0.000 claims abstract description 16
- 230000001172 regenerating effect Effects 0.000 claims abstract description 13
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 13
- 238000010438 heat treatment Methods 0.000 claims abstract description 11
- 238000004821 distillation Methods 0.000 claims description 18
- 238000011069 regeneration method Methods 0.000 claims description 17
- 239000002826 coolant Substances 0.000 claims description 14
- 230000008929 regeneration Effects 0.000 claims description 13
- 238000000926 separation method Methods 0.000 claims description 9
- 230000001276 controlling effect Effects 0.000 claims description 5
- 238000009835 boiling Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 238000005292 vacuum distillation Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 238000005119 centrifugation Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000002245 particle Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000003763 carbonization Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
The present invention relates to a water-based waste slurry recycling method and recycling apparatus, and more particularly, to a water-based waste slurry recycling method and recycling apparatus for separating a cutting material and a cutting oil from a water-soluble waste slurry generated in a slicing process of a semiconductor wafer and a solar cell wafer to be.
In addition, the present invention provides a method for regenerating a water-based waste slurry comprising cutting material and cutting oil adsorbed by a fine particle after a slicing process, wherein a specific gravity adjusting step of adjusting the specific gravity of the waste slurry by mixing the cutting oil while heating the waste slurry to a predetermined temperature S1) and an ultrasonic cleaning step S2 for separating the fine particles adsorbed on the cutting material of the waste slurry by using ultrasonic waves and a cutting material recovery step for recovering the cutting material desorbed by the centrifugal force of 300 ~ 600G in the waste slurry (S4) for recovering the cutting oil from which fine particles have been removed by applying different centrifugal forces stepwise to the waste slurry composed of the fine powder and the cutting oil, mixing the recovered cutting material and the cutting oil to produce a reclaimed slurry (S5).
Description
The present invention relates to a water-based waste slurry recycling method and recycling apparatus, and more particularly, to a water-based waste slurry recycling method and recycling apparatus for separating a cutting material and a cutting oil from a water-soluble waste slurry generated in a slicing process of a semiconductor wafer and a solar cell wafer to be.
In general, during the process of manufacturing a solar panel or a semiconductor, the abrasive (b) shown in Fig. 1 composed of the
Accordingly, the used abrasive has to be discarded, and there is a problem that the maintenance cost of the slicing process is increased due to the high scrap rate.
Accordingly, a method for regenerating an abrasive such as Korean Patent No. 10-1029275 'Polishing slurry recycling apparatus for a polysilicon wafer cutting process' has been developed. However, due to the use of a filter, an abrasive including a cutting material has problems .
DISCLOSURE OF THE INVENTION An object of the present invention is to solve the above-mentioned problems, and it is an object of the present invention to provide an aqueous waste slurry recycling method and recycling apparatus for recycling waste slurry composed of a cutting material and cutting oil.
It is another object of the present invention to provide a water-based waste slurry recycling method and recycling apparatus for recycling waste slurry by effectively removing fine particles adsorbed on a cutting material.
In order to achieve the above object, the present invention provides a method and apparatus for reclaiming a water-based waste slurry, comprising: a water-soluble waste slurry recycle method comprising a cutting material and a cutting oil adsorbed by fine particles after a slicing process, (S1) for controlling the specific gravity of the waste slurry by mixing the cutting oil while heating, an ultrasonic cleaning step (S2) for separating the powder adsorbed on the cutting material of the waste slurry by using ultrasonic waves, (S3) for recovering the cutting material having the fine powder removed by centrifugal force, a coolant recovery step (S4) for recovering the coolant from which the fine powder is removed by applying a centrifugal force different in stepwise to the waste slurry composed of the fine powder and the cutting oil, (S5) for producing a reclaimed slurry by mixing the cutting material and the cutting oil.
Also, the specific gravity of the waste slurry is adjusted to 1.220 to 1.250 and the viscosity to be 20 to 60 cP in the specific gravity adjusting step (S1).
In the ultrasonic cleaning step S2, the fine particles adsorbed to the cutting material are separated by ultrasonic waves having a frequency of 28 to 200 kHz and an output of 1500 to 2000 W. FIG.
The waste slurry is supplied at a feed rate of 15 to 25 l / min to the cutting material collection step (S3).
The cutting oil recovery step S4 further includes a second recovery step S4b for recovering the second cutting oil by removing the fine powder by applying a centrifugal force of 1500 to 2000G.
The cutting oil recovery step S4 further includes a third recovery step S4c for recovering the third cutting oil by removing the fine powder by applying centrifugal force of 2500 to 3500G.
The coolant recovery step S4 further includes a fourth recovery step S4d for recovering the fourth cutting oil from which the fine particles have been removed by distillation through the distillation apparatus.
In addition, the cutting oil to be mixed for adjusting the specific gravity of the waste slurry in the specific gravity adjusting step (S1) is the cutting oil recovered in the cutting oil recovering step (S4).
In order to accommodate the waste slurry therein, a tank having a predetermined area, a heater for indirectly heating the waste slurry contained in the tank to a predetermined temperature, and a motor for rotating the impeller to centrifuge the waste slurry contained in the tank, And an ultrasonic generator for irradiating ultrasonic waves to the waste slurry contained in the tank, and a controller for controlling the heater, the motor, and the ultrasonic generator.
The apparatus further includes an electronic balance for detecting a bias of the tank caused by centrifugal separation of the waste slurry or a change in the weight of the tank.
The apparatus further includes a distillation device for distilling the centrifuged cutting oil to remove fine powder.
As described above, according to the water-based waste slurry recycling method and recycling apparatus of the present invention, the waste slurry composed of the cutting material and the cutting oil can be regenerated.
Further, according to the water-based waste slurry regeneration method and regenerator according to the present invention, it is possible to effectively remove the fine particles adsorbed to the cutting material and regenerate the waste slurry with high quality.
1 shows a waste slurry and a new abrasive.
2 is a flow chart showing a method of recycling a water soluble waste slurry according to the present invention.
3 is a schematic view briefly showing an embodiment of a water-based waste slurry recycling method according to the present invention.
4 is a graph showing a change in viscosity depending on the specific gravity of the waste slurry irregularly controlled in the specific gravity of the water-based waste slurry recycling method according to the present invention.
5 is a view showing a waste slurry in which fine particles adsorbed to a cutting material are separated through an ultrasonic cleaning step in the water-based waste slurry recycling method according to the present invention.
FIG. 6 is a table showing specific gravity and solid content of cutting oil recovered according to the centrifugal force applied to the waste slurry in the step of recovering the cutting oil in the water-based waste slurry recycling method according to the present invention.
7 is a view showing cutting oil recovered in a cutting oil recovery step in a water-based waste slurry recycling method according to the present invention.
8 is a view showing a regeneration slurry produced through a regeneration slurry production step in a water-based waste slurry regeneration method according to the present invention.
9 is a view showing a water-based waste slurry recycling apparatus according to the present invention.
Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
3 is a schematic view briefly showing an embodiment of the water-based waste slurry recycling method according to the present invention, and Fig. 4 is a schematic view showing a water-soluble waste slurry reclaiming method according to the present invention. Fig. FIG. 5 is a graph showing changes in viscosity depending on the specific gravity of the waste slurry during the specific gravity regeneration step in the waste slurry regeneration method. FIG. 5 is a graph showing the change in viscosity of the waste slurry, 6 is a table showing the specific gravity and solid content of the cutting oil recovered according to the centrifugal force applied to the waste slurry in the cutting oil recovery step in the water-soluble waste slurry reclamation method according to the present invention, and FIG. 7 is a view showing the cutting oil recovered in the cutting oil recovery step in the water soluble waste slurry reclamation method according to the present invention, Castle a view showing a reproduction is made of the slurry waste slurry reproducing method using a reproducing slurry preparation step, Fig. 9 is a view showing a water-soluble slurry waste reproducing apparatus according to the present invention.
FIG. 2 illustrates a water-based waste slurry recycling method according to the present invention, and is a method for manufacturing a reclaimed slurry from a water-soluble waste slurry composed of a cutting material adsorbed by fine powder and a cutting oil after a slicing process.
As shown in 101 of FIG. 2, a specific gravity adjusting step of adjusting the specific gravity of the waste slurry by mixing the cutting oil while heating to a predetermined temperature for maximizing the separation efficiency of the effective cutting material through softening of the waste slurry, (S1), an ultrasonic cleaning step (S2) of separating the fine particles adsorbed to the cutting material of the waste slurry by using ultrasonic waves, a step of removing the fine particles from the waste slurry by a predetermined centrifugal force (a phenomenon in which the adsorbed material falls from the adsorption interface) (S4) for recovering the cutting oil from which fine particles have been removed by applying different centrifugal forces to the waste slurry composed of the fine powder and the cutting oil (S4), a step of recovering the cutting oil by mixing the recovered cutting material and the cutting oil And a regenerated slurry production step (S5) for producing a regenerated slurry.
More specifically, the waste slurry to separate the fine particles adsorbed to the cutting material by using ultrasonic waves in the ultrasonic cleaning step S2 is adjusted to a specific gravity of 1.220 to 1.250 through a specific gravity adjusting step (S1) Lt; / RTI > to 60 cP.
The waste slurry used for recovering the cutting material desorbed by the predetermined centrifugal force through the centrifugal force in the cutting material recovery step (S3) may be separated from the waste slurry by the ultrasonic cleaning step (S2) Lt; / RTI >
The waste slurry composed of the fine powder and cutting oil used for recovering the cutting oil from which the fine particles have been removed in the cutting oil recovering step S4 is a waste slurry from which the cutting material is recovered in the cutting material recovering step S3.
That is, the waste slurry used in the ultrasonic cleaning step S2, the cutting material collecting step S3 and the cutting oil collecting step S4 is a waste slurry used in at least one of the previous steps S1, S2 and S3. , And the waste slurry at some stage, which will be described below, will be regarded as a waste slurry in which the previous step has been carried out, even if there is no separate marking.
In the specific gravity adjusting step S1, a new cutting oil may be used as the cutting oil to be mixed with the waste slurry. However, the previously reclaimed cutting oil is used (new cutting oil is used at the initial regeneration and regenerating oil is used at the next regeneration) And is most preferred as it best meets the objectives of the present invention with an emphasis on recycling the waste slurry.
That is, a part of the coolant recovered in the coolant recovery step S4 during the previous regeneration process (S1 to S5) is irregularly regulated in the specific gravity control step (S1) of the next (other) regeneration process Which is used to adjust the specific gravity of the waste slurry.
In the step S3 of recovering the cutting material, the main purpose is to recover the cutting material. In the course of the first recovery step S4a as the first cutting oil (waste slurry composed of the cutting material separated and the cutting oil) is separated, Or by primary centrifugation.
In addition, the cutting material and the first cutting oil (fine powder and cutting oil) are separated from each other by centrifugal force applying a centrifugal force of 300 to 600 G to the specific-weight waste slurry, thereby recovering the recycled cutting material.
In addition, the regeneration slurry is mixed with the coolant recovered in the regeneration slurry production step (S5), and is used to produce the regenerated slurry.
Also, the cutting material recovery step S3 and the cutting oil recovery step S4 may be composed of a plurality of steps S4a, S4b, S4c, and S4d as shown in 102 of FIG.
More specifically, a first recovery step (primary centrifugation, S4a), a second recovery step (secondary centrifugation, S4b) is performed depending on the magnitude of the centrifugal force applied to recover the cutting oil in the waste slurry composed of the fine powder and the cutting oil. , The third recovery stage (tertiary centrifugation, S4c), and the cutting oil is recovered by different centrifugal force.
In addition to the stepwise different centrifugal force as described above, the coolant may be recovered through a linear increase in centrifugal force.
For example, in the first recovery step (primary centrifugation, S4a) to the third recovery step (third centrifugation, S4c), centrifugal force of 300-600 G is applied in the first recovery step (S4a) A method of recovering the second cutting oil by applying a centrifugal force of 1500 to 2000 G in the second recovering step S4b and recovering the third cutting oil by applying a centrifugal force of 2500 to 3000 G in the third recovering step S4c A method having a plurality of cutting oil recovery steps for applying different centrifugal forces step by step as shown in FIG. 3B, or a method having three or more centrifugal separation steps.
As another example, a method of recovering the coolant in a form in which the centrifugal force linearly increases from the first collecting step S4a to the third collecting step S4c may be used.
That is, a method in which the centrifugal force linearly increases from the centrifugal force of 300 G to the centrifugal force of 3500 G may be used.
As described above, when the centrifugal force is linearly increased, the same centrifugal force may be applied for a predetermined time, and the centrifugal force applied from the time when the initial centrifugal force is applied to the time when the highest centrifugal force is applied is expressed as a graph of time and centrifugal force And the shape of the linear graph increases on average from the point when the initial centrifugal force is applied to the point when the highest centrifugal force is applied.
In addition, the coolant recovery step S4 may further include a fourth recovery step S4d for recovering the cutting oil using the distillation apparatus. Further, when the fourth recovery step S4d is further included, .
The distillation apparatus preferably uses a vacuum distillation system capable of maintaining the characteristics of the cutting oil, and the boiling point is lowered by using a vacuum pump so that the distillation proceeds so that the molecular structure of the water-soluble cutting oil is not destroyed.
The optimum distillation temperature may vary depending on the type of pressure or cutting oil, but it is preferably in the range of 100 to 130 캜, as carbonization occurs at a high temperature and low recovery at a low temperature.
Figs. 3 to 8 show an embodiment of the water-based waste slurry recycling method according to the present invention and the results thereof.
As shown in FIG. 3 or FIG. 4, the specific gravity adjusting step S1 adjusts the specific gravity of the waste slurry by mixing the cutting oil while heating to a predetermined temperature. The mixing of the cutting oil according to the specific gravity of the waste slurry is mixed, To 1.250 at a constant specific gravity.
In addition, the temperature for softening the waste slurry may be different, and the temperature of the waste slurry may be controlled by indirect heating or indirect cooling.
However, even if the temperature of the waste slurry is controlled, it is still necessary to adjust the specific gravity of the slurry to be 1.220 to 1.250 after mixing. Here, the viscosity of the waste slurry whose specific gravity is controlled is controlled to be 20 to 60 cP.
5 (c), the pulverized slurry having the specific gravity adjusted by mixing the temperature control and the cutting oil contains the
That is, ultrasonic waves are injected into the waste slurry to detach the
In addition, the ultrasonic wave is preferably injected into the waste slurry at a frequency of 28 to 200 kHz at an output of 1500 to 2000 W as the desorption of the fine particles is efficiently performed, but may be performed for a predetermined time with a different range of frequencies and outputs .
As described above, when the
Thus, the recovered cutting material (recycled cutting material) is mixed with the recycled cutting oil to be recovered at a predetermined ratio to prepare a reclaimed slurry.
In addition to vibration due to ultrasonic waves, bubbles are generated in cavities of the waste slurry through the specific gravity adjusting step (S1) and the ultrasonic cleaning step (S2) as described above, thereby creating a gap between the cutting material and the differential material. The bubbles penetrate into the gap, and the fine particles adsorbed to the cutting material and the cutting material are dispersed between the cutting material and the high-quality recycled cutting material and the cutting oil during the centrifugal separation.
The cutting material recovery step S3 is a step of separating the cutting material from the cutting
In addition, the regenerated slope recovered as described above is mixed with the coolant recovered in the regenerated slurry production step (S5) and used to produce the regenerated slurry.
7 (f) or 7 (e) by applying different centrifugal force stepwise to the waste slurry (e in Fig. 7) composed of the cutting
6 shows the physical properties of the cutting
As shown in the table of Fig. 6, it is preferable that a centrifugal force of 3500 G is applied rather than a centrifugal force of 1500 G, so that a higher centrifugal force is preferably applied as the physical properties are close to that of a new cutting oil.
However, it is possible to make a plurality of cutting oils having a higher quality (higher removal rate of differentials) than centrifugal separation by applying a predetermined centrifugal force once or centrifugal separation by applying centrifugal force different from the centrifugal force twice by applying the same centrifugal force twice Most preferred.
Further, in order to obtain higher-quality cutting oil, it is also possible to recover the last-centrifuged cutting oil using a distillation apparatus to further remove the cutting oil.
In addition, the cutting oil (regenerating cutting oil) recovered through the cutting oil recovering step S4 may be used in a specific gravity adjusting step S1, or may be used in a specific gravity adjusting step S1 or a cutting material recovering step To prepare a water-soluble reclaimed slurry.
However, the predetermined ratio in which the cutting oil (regenerating cutting oil) and the cutting material (regenerating cutting material) are mixed may differ depending on the use environment of the regenerating slurry.
In addition, the above-described preferred embodiments can be observed as measured through the particle size analyzer and SEM equipment shown in FIG. 8, and the cutting oil (regenerating cutting oil) recovered by applying a centrifugal force of 3000 G and the cutting material The regenerated slurry prepared by mixing the recycled slurry can be observed not only the cutting
In addition, the fine particles observed in the above (i) are mostly very fine particles in the form of fine particles. In order to completely remove the fine particles, the cutting oil (regenerating cutting oil) recovered through distillation using a distillation apparatus and the cutting material The regenerated slurry (j) thus produced shows a state similar to that of the new abrasive as shown in Fig. 8 (k) due to removal of fine particles in the form of fine particles.
As described above, the water-based waste slurry regeneration method according to the present invention is characterized by removing the fine particles more efficiently through different centrifugal forces and producing a high-quality regenerated slurry.
FIG. 9 shows a water-based waste slurry recycling apparatus according to the present invention, and is an apparatus for producing reclaimed slurry using the above-described water-based waste slurry recycling method.
To this end, the water-based waste slurry recycling apparatus includes a
An
Instead of the above hydrometer, the specific gravity can also be calculated through calculation using the amount of the waste slurry accommodated in the
When the waste slurry is received in the
When the measurement of the viscosity and the specific gravity is completed, ultrasound waves are irradiated to the waste slurry for a predetermined period of time by using the
The
In addition, the waste slurry from which the cutting material (recycled cutting material) has been recovered is centrifuged again a plurality of times to recover the cutting oil (regenerating cutting oil).
Further, when the apparatus further includes a distillation apparatus (not shown), the recovered cutting oil (regenerating cutting oil) may be distilled through a distillation apparatus (not shown) to remove finer fine particles.
Further, the recycled cutting material (recycled cutting material) and the cutting oil (regenerating cutting oil) are mixed at a predetermined ratio to produce a reclaimed slurry.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is evident that many alternatives, modifications, and variations will be apparent to those skilled in the art without departing from the scope of the present invention. The scope of the invention should therefore be construed in light of the claims set forth to cover many of such variations.
11: Coolant
12: Cutting material
13: Differential
21: tank
22: Motor
23: Impeller
24: Heater
25: Electronic scales
26:
27: Temperature sensor
28: Ultrasonic wave generator
Claims (11)
(S1) for controlling the specific gravity of the waste slurry by mixing the cutting oil while heating the waste slurry to a predetermined temperature for softening the waste slurry;
An ultrasonic cleaning step (S2) of separating the fine particles adsorbed to the cutting material of the waste slurry using ultrasonic waves;
A first recovering step (S4a) of recovering the cutting material desorbed with fine powder by applying a centrifugal force linearly increasing to the waste slurry;
A second to a third recovery step S4b for recovering the cutting oil gradually removed by applying a centrifugal force linearly increasing to the waste slurry composed of the fine powder and the cutting oil in the first recovery step S4a, , S4c);
In the third recovery step (S4c), the reduced-pressure distillation system in which the boiling point is lowered by using a vacuum pump is used to remove the fine powder by putting the recovered cutting oil into the distillation apparatus and the distillation temperature is in the range of 100 to 130 degrees centigrade A fourth counting step S4d;
(S5) for producing a reclaimed slurry by mixing the recovered cutting material and cutting oil,
In the first collecting step (S4a) to the third collecting step (S4c), centrifugal force increasing linearly from 300 G to 3500 G is applied,
The specific gravity of the waste slurry is adjusted to have a specific gravity of 1.220 to 1.250 and the viscosity is adjusted to be 20 to 60 cP even if the waste slurry is heated in the specific gravity adjusting step (S1)
Water soluble waste slurry recycling method.
And the fine powder adsorbed to the cutting material is separated by ultrasonic waves having a frequency of 28 to 200 kHz and an output of 1500 to 2000 W in the ultrasonic cleaning step (S2)
Water soluble waste slurry recycling method.
And the waste slurry is supplied at a feeding rate of 15 to 25 l / min in the first collecting step (S4a)
Water soluble waste slurry recycling method.
In the specific gravity adjusting step (S1), a new non-regenerated cutting oil is used for the initial mixing of the waste slurry for regulating the specific gravity of the waste slurry,
The specific gravity is adjusted by using the regenerating cutting oil in the fourth collecting step S4d when the gravity adjusting step S1 is performed again after the cutting oil is collected in the fourth collecting step S4d.
Water soluble waste slurry recycling method.
A heater for indirectly heating the waste slurry contained in the tank to a predetermined temperature;
A motor for rotating the impeller to centrifuge the waste slurry contained in the tank;
An ultrasonic wave generator for irradiating ultrasonic waves to the waste slurry contained in the tank;
And a controller for controlling the heater, the motor, and the ultrasonic generator,
The heater and the control unit adjust the specific gravity of the waste slurry by mixing the cutting oil while heating the waste slurry to a predetermined temperature so as to soften the waste slurry so that the specific gravity of the waste slurry is 1.220 to 1.250 Adjusted to a specific gravity, adjusted to have a viscosity of 20 to 60 cP,
The ultrasonic wave generating unit separates the fine particles adsorbed to the cutting material of the waste slurry using ultrasonic waves,
Wherein the motor and the control unit controls the cutting member to recover the cutting material desorbed by applying a linearly increasing centrifugal force to the waste slurry and apply a linearly increasing centrifugal force to the waste slurry composed of the fine powder and the cutting oil The fine particles are controlled so as to recover the gradually removed coolant,
Wherein the distillation temperature is controlled to be within a range of 100 to 130 degrees centigrade by using a vacuum distillation method in which the boiling point is lowered by using a vacuum pump in removing the fine powder by introducing the recovered cutting oil into the distillation apparatus,
Wherein centrifugal force increasing linearly from 300 G to 3500 G is applied by the motor
Water soluble waste slurry regeneration device.
Further comprising an electronic balance for detecting a bias of the tank caused by centrifugal separation of the waste slurry or a change in weight of the tank
Water soluble waste slurry regeneration device.
Characterized by further comprising a distillation device for distilling the centrifugal cutting oil to remove fine powder
Water soluble waste slurry regeneration device.
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| KR1020140092590A KR101579840B1 (en) | 2014-07-22 | 2014-07-22 | Water soluble waste slurry recycling method and device |
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| KR1020140092590A KR101579840B1 (en) | 2014-07-22 | 2014-07-22 | Water soluble waste slurry recycling method and device |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20090093085A (en) * | 2008-02-28 | 2009-09-02 | 케미시스 주식회사 | Method and apparatus for recycling used slurry |
| KR101029275B1 (en) | 2010-10-14 | 2011-04-18 | 엠씨테크주식회사 | Coolant recycling apparatus for sawing process of polysilicon wafer |
| KR101126229B1 (en) * | 2010-09-29 | 2012-03-20 | (주)솔라코리아 | System and method for recycling waste slurry from silicone wafer cutting process |
| JP2013505144A (en) * | 2009-09-17 | 2013-02-14 | リサイクル システム コーポレーション | Waste silicon slurry purification method |
| KR101339554B1 (en) * | 2013-07-01 | 2013-12-10 | 이재림 | Method and apparatus for refining available component of by-product form recovering ingot wire sawed slurry |
-
2014
- 2014-07-22 KR KR1020140092590A patent/KR101579840B1/en active IP Right Grant
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090093085A (en) * | 2008-02-28 | 2009-09-02 | 케미시스 주식회사 | Method and apparatus for recycling used slurry |
| JP2013505144A (en) * | 2009-09-17 | 2013-02-14 | リサイクル システム コーポレーション | Waste silicon slurry purification method |
| KR101126229B1 (en) * | 2010-09-29 | 2012-03-20 | (주)솔라코리아 | System and method for recycling waste slurry from silicone wafer cutting process |
| KR101029275B1 (en) | 2010-10-14 | 2011-04-18 | 엠씨테크주식회사 | Coolant recycling apparatus for sawing process of polysilicon wafer |
| KR101339554B1 (en) * | 2013-07-01 | 2013-12-10 | 이재림 | Method and apparatus for refining available component of by-product form recovering ingot wire sawed slurry |
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