JP3187465U - Slurry regenerator - Google Patents

Abstract

A slurry regenerating apparatus capable of grasping the amount of slurry in a storage tank is provided.
A slurry regenerator 10 that recycles a slurry S composed of used coolant containing chips and abrasives generated when a silicon ingot I is cut with a wire saw 51 stores the slurry S to be regenerated. And a liquid level detecting means 12L for detecting the liquid level of the slurry S stored in the storage tank 11. From the liquid level of the slurry S detected by the liquid level detection unit 12L, the amount of the slurry S in the storage tank 11 can be grasped. Therefore, during regeneration of the slurry S, it is possible to prevent the slurry S in the storage tank 11 from being depleted or overflowing from the storage tank 11.
[Selection] Figure 1

Description

  The present invention relates to a slurry regenerator that regenerates the slurry in a reusable manner by removing chips and the like from a used coolant (which is referred to as “slurry”) used when a silicon ingot is cut with a wire saw.

  A silicon wafer used for solar cells or the like is obtained by thinly cutting a silicon ingot with a wire saw. Silicon ingot cutting methods are broadly classified into fixed abrasive methods and loose abrasive methods. The fixed abrasive grain system is a system in which abrasive grains are fixed to a wire saw, and the free abrasive grain system is a system in which abrasive grains are contained in a coolant that is a coolant. In either method, the coolant is supplied to the portion where the silicon ingot is being cut with a wire saw during the cutting operation. Thereby, a cutting site is cooled and chips are discharged from the cutting site. Since the cut metal silicon flakes are attached with coolant, chips, etc., they are washed to obtain a silicon wafer.

  The used coolant used for cutting the silicon ingot is like mud, including chips and abrasive grains. Therefore, the used coolant is called slurry. The slurry is reused to reduce costs. However, if it is reused as it is, the surface of the silicon wafer is damaged, the silicon wafer is damaged, or the wire saw is deteriorated due to mixed chips and the like. Therefore, for example, chips and the like are removed from the slurry by the regeneration method disclosed in Patent Document 1, and the slurry is regenerated so that it can be reused.

  That is, the slurry regeneration method disclosed in Patent Document 1 includes a centrifugal separation step and a membrane separation step. In the centrifugation step, the slurry is centrifuged and separated into a solid content (sludge) containing chips and the like at a high concentration and a centrifuge solution containing chips and the like at a low concentration, and the solid content is removed. Is a step of mixing and circulating in the slurry. In the membrane separation process, the slurry is separated into membranes and separated into a concentrated solution containing concentrated chips and a membrane filtrate containing almost no chips, and the membrane filtrate is recovered and the concentrated solution is mixed into the slurry. And circulating the process. Then, the slurry is regenerated into a reusable coolant by mixing the centrifuge solution circulated in the centrifuge step and the membrane filtrate collected in the membrane separation step.

  In that case, as described in the paragraphs 0036 to 0039 of Patent Document 1, the slurry collected from the cutting site of the silicon ingot is stored in a storage tank, and this storage tank is transferred to a centrifugal separator and a membrane separator. The slurry is distributed and supplied, and in the centrifugal separator, the centrifugal separation process is performed while circulating the centrifugal liquid to the storage tank, and in the membrane separation apparatus, the membrane separation process is performed while circulating the concentrated liquid to the storage tank. Done.

  Thus, during the regeneration of the slurry, the slurry is led from the storage tank to the centrifuge or the membrane separator, or the centrifuge or concentrated liquid is introduced from the centrifuge or the membrane separator to the storage tank. The amount of slurry in the storage tank (this is called “storage amount”) varies from moment to moment. Therefore, if the storage amount is not grasped during the regeneration of the slurry, the slurry in the storage tank may be depleted or the slurry may overflow from the storage tank.

International Publication No. 2013/035438 Pamphlet

  The present invention addresses the above problems in a slurry regenerator that reusably recycles a slurry composed of spent coolant containing chips and abrasives generated when a silicon ingot is cut with a wire saw. An object of the present invention is to provide a slurry regenerating apparatus capable of grasping the amount of slurry.

  That is, the present invention is a slurry regenerating apparatus that recycles a slurry made of used coolant containing chips and abrasives generated when a silicon ingot is cut with a wire saw, and stores the slurry to be regenerated. A storage tank; and a liquid level detecting means for detecting the liquid level of the slurry stored in the storage tank.

  According to the present invention, since the liquid level detection means for detecting the liquid level of the slurry in the storage tank is provided, the slurry in the storage tank is determined from the liquid level of the slurry detected by the liquid level detection means. Can figure out the amount of For this reason, during the regeneration of the slurry, it is possible to prevent the slurry in the storage tank from being depleted or overflowing from the storage tank.

  In the present invention, the “abrasive grains” include, for example, abrasive grains dropped from the wire saw in the fixed abrasive system, abrasive grains contained in the coolant in the free abrasive system, and the like.

  In the present invention, the liquid level detection means includes a sensor capable of detecting a predetermined lower limit liquid level, and the slurry regeneration device supplies slurry to the storage tank when the sensor detects the lower limit liquid level. It is preferable to include a supply adjustment unit.

  According to this configuration, when the sensor detects a predetermined lower limit liquid level, the slurry is automatically supplied to the storage tank without manual intervention. Therefore, the problem that the slurry in the storage tank is exhausted is surely prevented.

  In the present invention, the “lower limit liquid level” includes, for example, a liquid level that prevents the slurry from being regenerated satisfactorily when the amount of slurry in the storage tank is less than the lower limit liquid level. More specifically, when the amount of slurry in the storage tank is less than the lower limit liquid level, the amount of slurry supplied to the centrifugal separator or the membrane separator is insufficient or interrupted. The level of the liquid is such that the discharge performance of the filter is reduced or abnormal vibration occurs, and in the case of a membrane separation device, for example, the level of the sludge that settles and accumulates inside the filtration membrane housing and closes the piping and the filtration membrane Etc. are included.

  In this invention, the said supply adjustment part sends the slurry in the said storage tank to the said storage tank via the piping which connects the storage tank which stores the slurry, the said storage tank, and the said storage tank, and the said piping And when the sensor detects the lower limit liquid level, the pump is driven to supply slurry from the storage tank to the storage tank via the pipe, and the supply amount of the slurry It is preferable to include a supply adjustment control unit that performs control to stop the supply of the slurry by stopping the pump when the amount reaches a predetermined amount.

  According to this configuration, the slurry is stably supplied from the storage tank to the storage tank by the driving of the pump via the pipe.

  In addition, when the sensor detects the lower limit liquid level, a predetermined amount of slurry is supplied to the storage tank. Therefore, the amount of slurry in the storage tank is maintained between the lower limit liquid level and the liquid level when the predetermined amount is added to the lower limit liquid level. Accordingly, since the amount of slurry stored is always within a certain range, the properties of the slurry in the storage tank (for example, solid content concentration) do not change significantly. Therefore, the slurry in the storage tank can always be regenerated stably and continuously. Moreover, since the supply of slurry is stopped when the supply amount of the slurry reaches the predetermined amount, the problem that the slurry overflows from the storage tank is reliably prevented.

  In the present invention, the liquid level detecting means includes a sensor capable of detecting a predetermined lower limit liquid level, and the slurry regenerating device notifies the fact when the sensor detects the lower limit liquid level. It is preferable to provide.

  According to this configuration, when the sensor detects a predetermined lower limit liquid level, this is notified, so that the worker who has received the notification can supply the slurry to the storage tank manually. Therefore, the problem that the slurry in the storage tank is exhausted is surely prevented.

  In the present invention, the notification unit includes an information presentation device for presenting information to the surroundings, and when the sensor detects the lower limit liquid level, the information presentation device is driven to drive the liquid in the slurry in the storage tank. It is preferable to include a notification control unit that performs control to notify the surroundings that the surface has decreased to the lower limit liquid level.

  According to this structure, it is reliably notified via the information presentation device that the liquid level of the slurry in the storage tank has decreased to the lower limit liquid level.

  In the present invention, the liquid level detecting means includes a sensor capable of detecting a predetermined lower limit liquid level and a predetermined upper limit liquid level, and the slurry regenerating apparatus is configured to apply a slurry when the sensor detects the lower limit liquid level. Is preferably provided to the storage tank, and when the sensor detects the upper limit liquid level, the storage tank is provided with a supply adjustment unit that stops the supply of the slurry to the storage tank.

  According to this configuration, when the sensor detects a predetermined lower limit liquid level, the slurry is automatically supplied to the storage tank without manual intervention. Therefore, the problem that the slurry in the storage tank is exhausted is surely prevented. Further, when the sensor detects a predetermined upper limit liquid level, the supply of the slurry is automatically stopped without human intervention. Therefore, the amount of slurry in the storage tank is maintained between the lower limit liquid level and the upper limit liquid level. Accordingly, since the amount of slurry stored is always within a certain range, the properties of the slurry in the storage tank (for example, solid content concentration) do not change significantly. Therefore, the slurry in the storage tank can always be regenerated stably and continuously. Moreover, since the supply of slurry is stopped when the sensor detects the upper limit liquid level, the problem that the slurry overflows from the storage tank can be reliably prevented.

  In the present invention, the “upper limit liquid level” includes, for example, a liquid level that causes the slurry to overflow from the storage tank when the amount of slurry in the storage tank exceeds the upper limit liquid level.

  In this invention, the said supply adjustment part sends the slurry in the said storage tank to the said storage tank via the piping which connects the storage tank which stores the slurry, the said storage tank, and the said storage tank, and the said piping And when the sensor detects the lower limit liquid level, the pump is driven to supply slurry from the storage tank to the storage tank via the pipe, and the sensor It is preferable to include a supply adjustment control unit that performs control to stop the supply of the slurry by stopping the pump when the liquid level is detected.

  According to this configuration, the slurry is stably supplied from the storage tank to the storage tank by driving the pump via the pipe, and the supply of the slurry is stably stopped by stopping the pump.

  In the present invention, the liquid level detecting means includes a sensor capable of detecting a predetermined lower limit liquid level and a predetermined upper limit liquid level, and the slurry regenerating apparatus is configured to apply a slurry when the sensor detects the lower limit liquid level. Is preferably provided to the storage tank, and when the sensor detects the upper limit liquid level, the storage tank is provided with a supply adjusting unit that notifies the fact.

  According to this configuration, when the sensor detects a predetermined lower limit liquid level, the slurry is automatically supplied to the storage tank without manual intervention. Therefore, the problem that the slurry in the storage tank is exhausted is surely prevented. Further, when the sensor detects a predetermined upper limit liquid level, this is notified, so that the worker who has received the notification can stop the supply of the slurry manually. Therefore, the amount of slurry in the storage tank is maintained between the lower limit liquid level and the upper limit liquid level. Accordingly, since the amount of slurry stored is always within a certain range, the properties of the slurry in the storage tank (for example, solid content concentration) do not change significantly. Therefore, the slurry in the storage tank can always be regenerated stably and continuously. Further, when the sensor detects the upper limit liquid level, the worker who has received the notification stops the supply of the slurry, so that the problem that the slurry overflows from the storage tank can be reliably prevented.

  In this invention, the said supply adjustment part sends the slurry in the said storage tank to the said storage tank via the piping which connects the storage tank which stores the slurry, the said storage tank, and the said storage tank, and the said piping An information presentation device that presents information to the surroundings, and when the sensor detects the lower limit liquid level, the storage tank is connected to the storage tank via the pipe by driving the pump. When the sensor detects the upper limit liquid level, the information presenting device is driven to notify the surroundings that the liquid level of the slurry in the storage tank has risen to the upper limit liquid level. And a supply adjustment control unit that performs control.

  According to this configuration, the information presentation device indicates that the slurry is stably supplied from the storage tank to the storage tank by driving the pump via the pipe, and the liquid level of the slurry in the storage tank has risen to the upper limit liquid level. Is surely notified via

  In the present invention, the liquid level detecting means is preferably a liquid level gauge.

  According to this configuration, even if the amount of the slurry in the storage tank changes from moment to moment during the regeneration of the slurry, it can be reliably grasped.

  In the present invention, it is preferable that the slurry regenerating apparatus includes a regeneration processing unit that extracts the slurry from the storage tank and regenerates the slurry.

  According to this configuration, since the slurry is led from the storage tank to the regeneration processing unit, the amount of slurry in the storage tank is reduced. However, even in that case, the amount of slurry stored can be grasped from the liquid level of the slurry detected by the liquid level detection means.

  In the present invention, the regeneration processing unit is preferably configured to return a part of the regenerated slurry to the storage tank.

  According to this configuration, since a part of the slurry is introduced from the regeneration processing unit to the storage tank, the amount of the slurry in the storage tank decreases while changing variously every moment. However, even in that case, the amount of slurry stored can be grasped from the liquid level of the slurry detected by the liquid level detection means.

  In the present invention, the regeneration processing unit centrifuges the slurry, and separates the solid into a solid content containing chips at a high concentration and a centrifuge liquid containing chips at a low concentration and circulated to a storage tank. And at least one of a membrane separation unit that separates the slurry into a membrane, concentrates and contains chips, and separates the concentrate into a storage tank and a membrane filtrate that does not contain chips. preferable.

  According to this configuration, since the slurry is led out from the storage tank to the centrifugal separator or the membrane separator, the amount of slurry in the storage tank is reduced. Moreover, since the centrifuge liquid and the concentrated liquid are introduced from the centrifugal separation unit and the membrane separation unit to the storage tank, the amount of slurry in the storage tank decreases while changing variously every moment. However, even in that case, the amount of slurry stored can be grasped from the liquid level of the slurry detected by the liquid level detection means.

  In the present invention, the term “contains chips at a high concentration” for solid content and “contains chips at a low concentration” for the centrifuge liquid means that the solid content contains chips at a higher concentration than the centrifuge liquid. Means that chips are contained at a lower concentration than the solid content.

  Further, in the present invention, the phrase “contains no chips” for the membrane filtrate is not limited to the case where the membrane filtrate contains no chips, but to the extent that the membrane filtrate may contain when regenerating the slurry into the coolant. It is also included when the membrane filtrate contains the amount of chips.

  In the present invention, the regeneration processing unit centrifuges the slurry to separate at least one of a solid content containing chips at a high concentration and a centrifugal liquid containing chips at a low concentration and circulated to a storage tank. A centrifugal separation unit, and at least one membrane separation unit for separating the slurry into a membrane, concentrating and containing chips, separating the concentrate into a storage tank and a membrane filtrate containing no chips, Preferably, one centrifugal separator and at least one membrane separator regenerate the slurry in parallel.

  According to this configuration, since the centrifugal separation step and the membrane separation step are performed in parallel, the change in the amount of slurry in the storage tank is complicated, and the width of the change is also large. However, even in that case, the amount of slurry stored can be grasped from the liquid level of the slurry detected by the liquid level detection means.

  In this invention, it is preferable that the said slurry reproduction | regeneration apparatus is equipped with the heater for heating the slurry stored by the said storage tank.

  According to this configuration, when the slurry in the storage tank is heated, the viscosity of the slurry decreases and the fluidity of the slurry increases. Therefore, the regeneration operation of the slurry is promoted.

  In this invention, it is preferable that the said slurry reproduction | regeneration apparatus is equipped with the stirring part for stirring the slurry stored in the said storage tank.

  According to this configuration, when the slurry in the storage tank is agitated, chips and the like mixed in the slurry are dispersed without being settled. Therefore, the slurry is averaged and regenerated.

  As described above, according to the present invention, a slurry regenerating apparatus capable of grasping the amount of slurry in a storage tank is provided.

1 is an overall configuration diagram of a slurry regenerator according to a first embodiment of the present invention. It is a whole block diagram of the slurry reproduction | regeneration apparatus which concerns on the 2nd Embodiment of this invention. It is a whole block diagram of the slurry reproduction | regeneration apparatus which concerns on the 3rd Embodiment of this invention. It is a whole block diagram of the slurry reproduction | regeneration apparatus which concerns on the 4th Embodiment of this invention. It is a whole block diagram of the slurry reproduction | regeneration apparatus which concerns on the 5th Embodiment of this invention.

<First Embodiment>
[Constitution]
FIG. 1 is an overall configuration diagram of a slurry regenerator 10 according to a first embodiment of the present invention. This slurry regenerator (hereinafter simply referred to as “regenerator”) 10 is composed of used coolant containing chips, abrasive grains, and the like generated when the silicon ingot I is thinly cut by the wire saw 51 at the cutting site 50 of the silicon ingot I. This is an apparatus for regenerating the slurry S so that it can be reused. In the present embodiment, the cutting method of the silicon ingot I is a fixed abrasive method. That is, hard diamond abrasive grains are fixed to the wire saw 51. Therefore, as compared with the free abrasive grain method, the slurry S contains almost no abrasive grains, and therefore a pre-process for recovering the abrasive grains from the slurry S is unnecessary in many cases.

  The coolant is a mixture of diethylene glycol or polyethylene glycol with water, a pH adjuster, a viscosity adjuster, a dispersant, a flocculant, or the like, if necessary. During the cutting operation of the silicon ingot I, the coolant is supplied to the site where the silicon ingot I is being cut by the wire saw 51, whereby the cut site is cooled and chips are discharged from the cut site. In the used coolant used for cutting the silicon ingot I, that is, the slurry S, chips generated at the time of cutting the silicon ingot I are mixed.

  The regeneration device 10 includes a storage tank 11 and a regeneration processing unit 100 as main components. The storage tank 11 stores the slurry S, which is an object to be recycled, collected from the cutting site 50 of the silicon ingot I. The regeneration processing unit 100 derives the slurry S from the storage tank 11 and performs a regeneration process. The regeneration device 10 regenerates the slurry S so that it can be reused by removing chips, abrasive grains, and the like from the slurry S in the regeneration processing unit 100.

  In FIG. 1, the slurry after being stored in the storage tank 11 is marked with a symbol S, and the slurry before being stored in the storage tank 11 is marked with a symbol So to distinguish them.

  The regeneration processing unit 100 includes a centrifugal separation device (centrifugation unit) 20 in which a centrifugal separation step is performed, and a membrane separation device (membrane separation unit) 30 in which a membrane separation step is performed. One centrifugal separator 20 and one membrane separator 30 are provided. Between the centrifugal separator 20 and the storage tank 11, a slurry outlet pipe 20a and a centrifugal liquid circulation pipe 20b are disposed. Between the membrane separator 30 and the storage tank 11, a slurry outlet pipe 30a and a concentrate circulation pipe 30b are disposed. In addition, although not shown in figure, the pump which can send a fluid is arrange | positioned to each piping 20a, 20b, 30a, 30b.

  In the present embodiment, the centrifugation step is a step of centrifuging the slurry S introduced from the storage tank 11 and introduced into the centrifugal separator 20 through the slurry outlet pipe 20a. In this step, the slurry S is separated into a solid content (sludge) S1 containing chips and the like at a higher concentration than the centrifugal liquid S2, and a centrifugal solution S2 containing chips and the like at a lower concentration than the solid content S1. . The solid content S1 is taken out from the centrifugal separator 20. The centrifuge liquid S2 is circulated from the centrifuge 20 to the storage tank 11 via the centrifuge liquid circulation pipe 20b.

  In the present embodiment, the membrane separation step is a step of membrane-separating the slurry S introduced from the storage tank 11 and introduced into the membrane separation device 30 via the slurry outlet pipe 30a. In this step, the slurry S is separated into a concentrate S3 that contains chips and the like, and a membrane filtrate S4 that contains almost no chips and the like. The concentrate S3 is circulated from the membrane separator 30 to the storage tank 11 via the concentrate circulation pipe 30b. The membrane filtrate S4 is recovered through the membrane filtrate recovery pipe 30c.

  The centrifugal separator 20 is a vertical centrifugal separator that rotates and centrifuges the slurry S derived from the storage tank 11 around a vertical axis. The centrifugal separator 20 includes a cylindrical rotating body 21 having a tapered portion on the lower end side. The rotating body 21 is rotated around the vertical axis by a motor (not shown).

  In the centrifugal separator 20, the slurry S is introduced into the rotating body 21. Chips and the like contained in the slurry S are pressed against the inner surface of the rotating body 21 by centrifugal force and separated. The separated chips and the like are solidified by stopping the introduction of the slurry S at regular intervals and pressing a scraper (scraping plate) (not shown) against the inner surface of the rotating body 21 while rotating the rotating body 21 at a low speed. It is taken out from the centrifugal separator 20 as S1. On the other hand, the component of the slurry S from which chips and the like are separated (a part of the regenerated slurry S) is returned to the storage tank 11 from the centrifugal separator 20 via the centrifugal liquid circulation pipe 20b as the centrifugal liquid S2. .

  The membrane separator 30 uses the filtration membrane 31 to membrane-separate the slurry S derived from the storage tank 11 into the concentrate S3 and the membrane filtrate S4. This membrane separation device 30 employs a bundle of hollow fiber membranes made of hydrophilic polyvinylidene fluoride as the filtration membrane 31.

  In the membrane separation device 30, the concentrate S3 is a component of the slurry S that has not passed through the filtration membrane 31 (a part of the regenerated slurry S) and contains chips and the like in a concentrated manner. The concentrate S3 is returned from the membrane separation device 30 to the storage tank 11 via the concentrate circulation pipe 30b. On the other hand, the membrane filtrate S4 is a component of the slurry S that has passed through the filtration membrane 31, and hardly contains chips or the like. The membrane filtrate S4 is taken out from the membrane separation device 30 via the membrane filtrate collection pipe 30c and collected.

  The storage tank 11 includes a sensor (liquid level detection means) 12L for detecting the liquid level of the slurry S stored in the storage tank 11, and an agitation device (for stirring the slurry S stored in the storage tank 11). (Stirring part) 13 and a heater 14 for heating the slurry S stored in the storage tank 11 are provided.

  For example, as a result of the slurry S being led from the storage tank 11 to the centrifugal separator 20 or the membrane separator 30, the sensor 12 </ b> L reduces the amount of slurry S (storage amount) in the storage tank 11, and the liquid of the slurry S This is a liquid level detection sensor that detects the level of the slurry S that has been lowered when the surface is lowered. The sensor 12L is disposed at a position where a predetermined lower limit liquid level can be detected. In this embodiment, the “lower limit liquid level” is a liquid level at which the regeneration of the slurry S cannot be satisfactorily performed when the amount of the slurry S in the storage tank 11 becomes smaller than the lower limit liquid level. Hereinafter, the sensor 12L may be referred to as a “lower limit liquid level sensor 12L” depending on the situation. FIG. 1 illustrates a state where the lower limit liquid level sensor 12L detects the lower limit liquid level.

  The stirring device 13 includes a stirring blade 13a disposed in the storage tank 11 and a motor 13c having a rotating shaft 13b to which the stirring blade 13a is connected. The motor 13c rotates the stirring blade 13a to store the stirring blade 13a. The slurry S in the tank 11 is agitated. By stirring the slurry S in the storage tank 11, chips and the like mixed in the slurry S are dispersed without being settled. Therefore, regeneration of the slurry S stored in the storage tank 11 by the centrifugal separator 20 and the membrane separator 30 is averaged.

  The heater 14 heats the slurry S in the storage tank 11 to lower the viscosity of the slurry S and increase the fluidity of the slurry S. By improving the fluidity of the slurry S, the regeneration operation of the slurry S stored in the storage tank 11 by the centrifugal separator 20 and the membrane separator 30 is promoted.

  In addition to the above configuration, the regenerator 10 according to the present embodiment includes a supply adjustment unit 40 </ b> A that supplies the slurry So to the storage tank 11. The supply adjusting unit 40 </ b> A includes a storage tank 41, a pipe 42, a pump 43, and a control panel 44.

  The storage tank 41 is for storing the slurry So to be supplied to the storage tank 11. The slurry So recovered from the cutting site 50 of the silicon ingot I is supplied to the storage tank 41. A storage pipe 52 for supplying the slurry So from the cutting site 50 to the storage tank 41 is disposed between the cutting site 50 of the silicon ingot I and the storage tank 41. The capacity of the storage tank 41 is set to a capacity 2 to 5 times the amount of coolant used in one cutting operation of the silicon ingot I. This is a capacity larger than the capacity of the storage tank 11.

  The storage tank 41 is provided with a stirring means (not shown). Examples of the agitation means include agitation with an agitating blade and a method of circulating a liquid with a pump. In addition, the storage tank 41 may be provided with a liquid level sensor.

  In addition, it replaces with the piping 52 for stockpiling, and uses the container which attaches | subjects the code | symbol X to FIG. 1, and carries the slurry So produced | generated at the cutting site 50 to the stockpiling tank 41 automatically or an operator manually. You may make it like this (refer the code | symbol Y).

  The pipe 42 connects the storage tank 41 and the storage tank 11. The slurry So is supplied from the storage tank 41 to the storage tank 11 via the pipe 42.

  The pump 43 is arranged in the pipe 42 and can send the slurry So in the storage tank 41 to the storage tank 11 through the pipe 42.

  The control panel 44 comprehensively manages various operations and various settings including the on / off of the playback apparatus 10. The control panel 44 has a built-in supply adjustment control unit 44a. As is well known, the supply adjustment control unit 44a is a microprocessor including a CPU, a ROM, a RAM, and the like. The supply adjustment control unit 44a and the lower limit liquid level sensor 12L are communicably connected, and the supply adjustment control unit 44a and the pump 43 are electrically connected. When the lower limit liquid level sensor 12L detects the liquid level of the slurry S that has been lowered, the detection signal A is transmitted from the sensor 12L to the supply adjustment control unit 44a. When the supply adjustment control unit 44 a receives this detection signal A, the supply adjustment control unit 44 a outputs a drive signal B to the pump 43 to drive the pump 43. Thereby, the slurry So in the stockpile tank 41 is supplied to the storage tank 11 via the pipe 42. The supply adjustment control unit 44 a drives the pump 43 so that the slurry So is supplied from the storage tank 41 to the storage tank 11 by a predetermined amount. The supply adjustment control unit 44a is configured to perform the control as described above.

[Operation]
Next, the operation of the playback apparatus 10 according to this embodiment will be described.

  Slurry So containing chips, abrasive grains, etc. generated when the silicon ingot I is cut thinly with the wire saw 51 at the cutting site 50 of the silicon ingot I is collected and stored from the cutting site 50 through the storage pipe 52. Supplied to.

  The storage tank 11 stores a quantity of slurry S that exceeds the lower limit liquid level that can be detected by the lower limit liquid level sensor 12L. That is, in the storage tank 11, the sensor 12L is submerged in the slurry S and is in a state where the liquid level of the slurry S is not detected.

  In this state, the slurry S is distributed and supplied from the storage tank 11 to the centrifugal separator 20 and the membrane separator 30.

  In the centrifugal separator 20, the centrifugal separation step is performed while circulating the centrifugal separation liquid S <b> 2 to the storage tank 11 and mixing with the slurry S in the storage tank 11. In the membrane separation device 30, the membrane separation step is performed while circulating the concentrate S <b> 3 to the storage tank 11 and mixing with the slurry S in the storage tank 11. That is, the centrifugal separation process in the centrifugal separator 20 and the membrane separation process in the membrane separator 30 are simultaneously performed in parallel.

  Since the centrifuge liquid S2 has chips and the like removed in the centrifuge process performed in the centrifuge 20, the solid S of the slurry S in the storage tank 11 is mixed by mixing it with the slurry S in the storage tank 11. The partial concentration decreases. On the other hand, the concentrated liquid S3 contains chips and the like which are concentrated and contained in the membrane separation step performed in the membrane separation device 30. Therefore, by mixing this with the slurry S in the storage tank 11, The solid content concentration of the slurry S increases.

  Derivation of the slurry S in the storage tank 11 to the centrifugal separator 20 and introduction of the centrifugal liquid S2 from which chips and the like are removed into the storage tank 11, that is, circulation of the centrifugal liquid S2, and slurry in the storage tank 11 The derivation of S to the membrane separation device 30 and the introduction of the concentrated liquid S3 containing concentrated chips and the like into the storage tank 11, that is, the circulation of the concentrated liquid S3, are simultaneously performed in a predetermined number of times or for a predetermined time. By being repeatedly performed, the solid content concentration of the slurry S in the storage tank 11 gradually changes, and becomes stable when the influence of the solid content concentration change due to both changes is balanced.

  Then, the circulation of the centrifugal liquid S2 in the centrifugal separation step and the circulation of the concentrated liquid S3 in the membrane separation step are repeated a predetermined number of times or for a predetermined time, and the membrane filtrate S4 is recovered, whereby the slurry S in the storage tank 11 is recovered. To reusable coolant. At that time, a new coolant is appropriately replenished to adjust the components.

  Further, the slurry S in the storage tank 11 is led to the centrifugal separator 20 and the centrifugal liquid S2 is introduced into the storage tank 11, that is, the centrifugal liquid S2 is circulated, and the slurry S in the storage tank 11 is separated from the membrane. Slurry in the storage tank 11 is derived by derivation to the device 30 and introduction of the concentrate S3 into the storage tank 11, that is, circulation of the concentrate S3, simultaneously and repeatedly for a predetermined number of times or a predetermined time. The amount of S (storage amount) gradually decreases while changing in various ways.

  Then, when the storage amount of the slurry S decreases to the lower limit liquid level, and the lower limit liquid level sensor 12L detects the liquid level of the slurry S, the detection signal A is transmitted from the sensor 12L to the supply adjustment control unit 44a. The supply adjustment control unit 44 a receives this detection signal A and outputs a drive signal B to the pump 43. As a result, a predetermined amount of the slurry So in the storage tank 41 is supplied to the storage tank 11. As a result, the amount of the slurry S in the storage tank 11 recovers to an amount obtained by adding the predetermined amount to the lower limit liquid level that can be detected by the sensor 12L.

  While the liquid surface management or the storage amount management of the slurry S is performed, the supply and distribution of the slurry S from the storage tank 11 to the centrifugal separator 20 and the membrane separator 30 and the circulation and the concentrated liquid of the centrifugal liquid S2 are performed. When the circulation of S3 is repeated, the amount of slurry S stored again decreases to the lower limit liquid level, and when the lower limit liquid level sensor 12L detects the liquid level of slurry S, the amount of stored slurry S recovers by the predetermined amount. .

  Thus, in the regenerator 10 according to the present embodiment, the amount of slurry S stored is always constant, that is, between the lower limit liquid level and the liquid level when the predetermined amount is added to the lower limit liquid level. The slurry S is constantly and continuously regenerated while suppressing the property of the slurry S in the storage tank 11 (for example, solid content concentration) from changing significantly.

[Action]
As described above, in the first embodiment of the present invention, since the sensor 12L for detecting the liquid level of the slurry S in the storage tank 11 is provided, the slurry S detected by the sensor 12L. From the liquid level, the amount of the slurry S in the storage tank 11 can be grasped. Therefore, during regeneration of the slurry S, it is possible to prevent the slurry S in the storage tank 11 from being depleted or overflowing from the storage tank 11.

  In the first embodiment, when the sensor 12L detects a predetermined lower limit liquid level, the slurry So is automatically supplied to the storage tank 11 without human intervention. Therefore, the problem that the slurry S in the storage tank 11 is exhausted is surely prevented.

  In the first embodiment, the supply adjusting unit 40A drives the pump 43 from the storage tank 41 via the pipe 42 when the sensor 12L detects the lower limit liquid level. Supply adjustment control for controlling the supply of the slurry So by stopping the pump 43 when the slurry So is supplied to the storage tank 11 and the supply amount of the slurry So reaches a predetermined amount. A portion 44a is provided.

  According to this configuration, the slurry So is stably supplied from the storage tank 41 to the storage tank 11 via the pipe 42 by driving the pump 43.

  In addition, when the sensor 12L detects the lower limit liquid level, a predetermined amount of slurry So is supplied to the storage tank 11. Therefore, the amount of the slurry S in the storage tank 11 is maintained between the lower limit liquid level and the liquid level when the predetermined amount is added to the lower limit liquid level. Therefore, the amount of slurry S stored always falls within a certain range, so that the properties of the slurry S in the storage tank 11 (for example, solid content concentration) do not change significantly. Therefore, the slurry S in the storage tank 11 can always be regenerated stably and continuously. Further, since the supply of the slurry So is stopped when the supply amount of the slurry So reaches the predetermined amount, the problem that the slurry S overflows from the storage tank 11 is also reliably prevented.

  Moreover, in this 1st Embodiment, since the slurry S is derived | led-out from the storage tank 11 to the reproduction | regeneration processing part 100, the quantity of the slurry S in the storage tank 11 reduces. However, even in that case, the amount of slurry S stored can be grasped from the liquid level of the slurry S detected by the sensor 12L.

  Moreover, in this 1st Embodiment, since a part of slurry S is introduce | transduced into the storage tank 11 from the reproduction | regeneration processing part 100, the quantity of the slurry S in the storage tank 11 reduces changing various momentarily. However, even in that case, the amount of slurry S stored can be grasped from the liquid level of the slurry S detected by the sensor 12L.

  Moreover, in this 1st Embodiment, since the slurry S is derived | led-out from the storage tank 11 to the centrifuge 20 and the membrane separator 30, the quantity of the slurry S in the storage tank 11 reduces. Further, since the centrifugal separation liquid S2 and the concentrated liquid S3 are introduced from the centrifugal separator 20 and the membrane separation apparatus 30 to the storage tank 11, the amount of the slurry S in the storage tank 11 decreases while changing variously every moment. However, even in that case, the amount of slurry S stored can be grasped from the liquid level of the slurry S detected by the sensor 12L.

  In the first embodiment, since the centrifugal separation step and the membrane separation step are performed in parallel, the change in the amount of the slurry S in the storage tank 11 is complicated, and the width of the change is large. . However, even in that case, the amount of slurry S stored can be grasped from the liquid level of the slurry S detected by the sensor 12L.

  Moreover, in this 1st Embodiment, when the slurry S in the storage tank 11 is heated, the viscosity of the slurry S falls and the fluidity | liquidity of the slurry S rises. Therefore, the regeneration operation of the slurry S is promoted.

  In the first embodiment, the slurry S in the storage tank 11 is agitated, so that chips and the like mixed in the slurry S are dispersed without being settled. Therefore, the slurry S is averaged and regenerated.

<Second Embodiment>
Next, a second embodiment of the present invention will be described with reference to FIG. Since the second embodiment is a modification of the first embodiment, only portions different from the first embodiment will be described, and description of portions that are the same as or correspond to those of the first embodiment will be omitted. In FIG. 2, the same reference numerals are given to the same or corresponding components as in FIG.

  In the second embodiment, a notification unit 40B is provided instead of the supply adjustment unit 40A. The notification unit 40B includes a control panel 44 and an information presentation device 45.

  The control panel 44 has a built-in notification control unit 44b. As is well known, the notification control unit 44b is a microprocessor including a CPU, a ROM, a RAM, and the like. The notification control unit 44b and the lower limit liquid level sensor 12L are communicably connected, and the notification control unit 44b and the information presentation device 45 are electrically connected. The information presenting device 45 presents information to the surroundings through visual and auditory senses by, for example, generating an alarm sound, notifying a warning by voice or display, blinking a lamp, or the like.

  When the lower limit liquid level sensor 12L detects the level of the slurry S that has been lowered, a detection signal C is transmitted from the sensor 12L to the notification control unit 44b. When receiving the detection signal C, the notification control unit 44b outputs a drive signal D to the information presentation device 45 to drive the information presentation device 45. As a result, the fact that the liquid level of the slurry S in the storage tank 11 has been lowered to the lower limit liquid level is presented to the surroundings through vision and hearing. The notification control unit 44b is configured to perform the above-described control.

  In the second embodiment, when the sensor 12L detects a predetermined lower limit liquid level, this is notified, so that the worker who has received the notification supplies the slurry S to the storage tank 11 manually. be able to. Therefore, the problem that the slurry S in the storage tank 11 is exhausted is surely prevented.

  Moreover, in this 2nd Embodiment, it is alert | reported reliably via the information presentation apparatus 45 that the liquid level of the slurry S in the storage tank 11 fell to the minimum liquid level.

<Third Embodiment>
Next, a third embodiment of the present invention will be described with reference to FIG. Since the third embodiment is a modification of the first embodiment, only the parts different from the first embodiment will be described, and the description of the same or corresponding parts as the first embodiment will be omitted. In FIG. 3, the same reference numerals are given to the same or corresponding components as in FIG.

  In the third embodiment, an upper limit liquid level sensor 12H is provided in the storage tank 11 in addition to the lower limit liquid level sensor 12L. The upper limit liquid level sensor 12H is disposed above the lower limit liquid level sensor 12L.

  In the upper limit liquid level sensor 12H, for example, the slurry So is supplied from the storage tank 41 to the storage tank 11, and as a result, the amount (storing amount) of the slurry S in the storage tank 11 increases, and the liquid level of the slurry S increases. It is a liquid level detection sensor that detects the level of the slurry S that has risen when it is rising. The sensor 12H is disposed at a position where a predetermined upper limit liquid level can be detected. Here, in the present embodiment, the “upper limit liquid level” is a liquid level at which the slurry S overflows from the storage tank 11 when the amount of the slurry S in the storage tank 11 exceeds the upper limit liquid level. . FIG. 3 illustrates a state where the upper limit liquid level sensor 12H does not detect the upper limit liquid level.

  The supply adjustment control unit 44a is connected to the upper limit liquid level sensor 12H so as to be communicable with the lower limit liquid level sensor 12L. When the lower limit liquid level sensor 12L detects the level of the slurry S that has been lowered, a detection signal E is transmitted from the sensor 12L to the supply adjustment control unit 44a. When the supply adjustment control unit 44 a receives the detection signal E, the supply adjustment control unit 44 a outputs a drive signal G to the pump 43 to drive the pump 43. Thereby, the slurry So in the stockpile tank 41 is supplied to the storage tank 11 via the pipe 42. Therefore, the liquid level of the slurry S in the storage tank 11 starts to rise.

  Thereafter, when the upper liquid level sensor 12H detects the rising liquid level of the slurry S, a detection signal F is transmitted from the sensor 12H to the supply adjustment control unit 44a. When the supply adjustment control unit 44 a receives this detection signal F, the supply adjustment control unit 44 a outputs a drive signal G to the pump 43 to stop the pump 43. Thereby, the supply of the slurry So to the storage tank 11 is stopped. For this reason, the liquid level of the slurry S in the storage tank 11 starts to decrease due to the regeneration processing of the slurry S by the regeneration processing unit 100. The supply adjustment control unit 44a is configured to perform the control as described above.

  In the third embodiment, when the lower limit liquid level sensor 12L detects a predetermined lower limit liquid level, the slurry So is automatically supplied to the storage tank 11 without manual intervention. Therefore, the problem that the slurry S in the storage tank 11 is exhausted is surely prevented. Further, when the upper limit liquid level sensor 12H detects a predetermined upper limit liquid level, the supply of the slurry So is automatically stopped without human intervention. Therefore, the amount of the slurry S in the storage tank 11 is maintained between the lower limit liquid level and the upper limit liquid level. Therefore, the amount of slurry S stored always falls within a certain range, so that the properties of the slurry S in the storage tank 11 (for example, solid content concentration) do not change significantly. Therefore, the slurry S in the storage tank 11 can always be regenerated stably and continuously. Further, since the supply of the slurry So is stopped when the upper limit liquid level sensor 12H detects the upper limit liquid level, the problem that the slurry S overflows from the storage tank 11 is reliably prevented.

  Further, in the third embodiment, the slurry So is stably supplied from the storage tank 41 to the storage tank 11 by driving the pump 43 through the pipe 42, and the supply of the slurry So is stopped by stopping the pump 43. Stops stably.

  In this embodiment, the lower limit liquid level sensor 12L capable of detecting the lower limit liquid level and the upper limit liquid level sensor 12H capable of detecting the upper limit liquid level are separately provided. One sensor that can also detect the liquid level may be provided.

<Fourth Embodiment>
Next, a fourth embodiment of the present invention will be described with reference to FIG. Since the fourth embodiment is a modification of the third embodiment, only parts different from the third embodiment will be described, and description of the same or corresponding parts as those of the third embodiment will be omitted. 4, the same reference numerals are given to the same or corresponding components as those in FIG.

  In the fourth embodiment, the supply adjustment unit 40 </ b> A includes an information presentation device 45 in addition to the storage tank 41, the pipe 42, the pump 43, and the control panel 44. The supply adjustment control unit 44 a is electrically connected to the information presentation device 45 in addition to the pump 43. The information presenting device 45 presents information to the surroundings through visual and auditory senses by, for example, generating an alarm sound, notifying a warning by voice or display, blinking a lamp, or the like.

  When the lower limit liquid level sensor 12L detects the liquid level of the slurry S, the detection signal H is transmitted from the sensor 12L to the supply adjustment control unit 44a. When the supply adjustment control unit 44 a receives the detection signal H, the supply adjustment control unit 44 a outputs a drive signal K to the pump 43 to drive the pump 43. Thereby, the slurry So in the stockpile tank 41 is supplied to the storage tank 11 via the pipe 42. Therefore, the liquid level of the slurry S in the storage tank 11 starts to rise.

  Thereafter, when the upper liquid level sensor 12H detects the rising liquid level of the slurry S, a detection signal J is transmitted from the sensor 12H to the supply adjustment control unit 44a. When the supply adjustment control unit 44 a receives the detection signal J, the supply adjustment control unit 44 a outputs a drive signal L to the information presentation device 45 to drive the information presentation device 45. As a result, the fact that the liquid level of the slurry S in the storage tank 11 has risen to the upper limit liquid level is presented to the surroundings through vision and hearing. The supply adjustment control unit 44a is configured to perform the control as described above.

  In the fourth embodiment, when the lower limit liquid level sensor 12L detects a predetermined lower limit liquid level, the slurry So is automatically supplied to the storage tank 11 without human intervention. Therefore, the problem that the slurry S in the storage tank 11 is exhausted is surely prevented. Further, when the upper limit liquid level sensor 12H detects a predetermined upper limit liquid level, this is notified, so that the worker who has received the notification can stop the supply of the slurry So manually. Therefore, the amount of the slurry S in the storage tank 11 is maintained between the lower limit liquid level and the upper limit liquid level. Therefore, since the amount of slurry S stored is always within a certain range, the properties of the slurry S in the storage tank 11 (for example, the solid content concentration) do not change significantly. Therefore, the slurry S in the storage tank 11 can always be regenerated stably and continuously. Further, when the upper limit liquid level sensor 12H detects the upper limit liquid level, the worker who has received the notification stops the supply of the slurry So, so that the problem that the slurry S overflows from the storage tank 11 is also reliably prevented.

  In the fourth embodiment, the slurry So is stably supplied from the storage tank 41 to the storage tank 11 by driving the pump 43 via the pipe 42, and the liquid level of the slurry S in the storage tank 11 is It is reliably notified through the information presentation device 45 that the liquid level has risen to the upper limit liquid level.

<Fifth Embodiment>
Next, a fifth embodiment of the present invention will be described with reference to FIG. Since the fifth embodiment is a modification of the first embodiment, only the parts different from the first embodiment will be described, and the description of the same or corresponding parts as those of the first embodiment will be omitted. In FIG. 5, the same or corresponding components as those in FIG.

  In the fifth embodiment, a liquid level gauge 12 is provided in the storage tank 11 as a liquid level detection means for detecting the liquid level of the slurry S stored in the storage tank 11. The liquid level gauge 12 is not particularly limited, and conventionally used ones such as a float (floating) type and a pneumatic type, a method using reflection of sound waves and radio waves, and the like can be preferably used.

  According to this configuration, even when the amount of the slurry S in the storage tank 11 changes from time to time during the regeneration of the slurry S, it can be reliably grasped.

<Other embodiments>
The cutting method of the silicon ingot I may be a free abrasive method in which abrasive particles are contained in a coolant. In that case, since the slurry S contains abrasive grains together with chips, it is preferable to perform a pre-process for recovering the abrasive grains from the slurry S.

  The regeneration processing unit 100 may include only the centrifugal separator 20 or may include only the membrane separator 30.

  Two or more centrifuges 20 and membrane separators 30 may be provided.

  Two or more centrifugal separators 20 and two or more membrane separators 30 may regenerate the slurry S in parallel.

  The centrifugal separation process in the centrifugal separator 20 and the membrane separation process in the membrane separation apparatus 30 may not be performed simultaneously in parallel. For example, the centrifugal separation step and the membrane shunt step may be sequentially performed without overlapping in time.

  The circulation of the centrifugal separation liquid S2 in the centrifugal separation process and the circulation of the concentrated liquid S3 in the membrane separation process may not be repeated. For example, the circulation of the centrifugal separation liquid S2 and the circulation of the concentrated liquid S3 may be performed only once.

  As an apparatus for removing the solid content (sludge) S1 from the slurry S, for example, a filter press may be used instead of the centrifugal separator 20.

DESCRIPTION OF SYMBOLS 10 Slurry reproduction | regeneration apparatus 11 Storage tank 12L Liquid level detection means 51 Wire saw I Silicon ingot S Slurry

Claims (16)

A slurry regenerator that recycles a slurry composed of used coolant containing chips and abrasives generated when a silicon ingot is cut with a wire saw,
A storage tank for storing the slurry to be regenerated,
Liquid level detection means for detecting the liquid level of the slurry stored in the storage tank;
A slurry regenerating apparatus. The liquid level detection means includes a sensor capable of detecting a predetermined lower limit liquid level,
The slurry regeneration apparatus according to claim 1, further comprising a supply adjustment unit that supplies slurry to the storage tank when the sensor detects the lower limit liquid level. The supply adjusting unit
A storage tank for storing slurry;
Piping connecting the storage tank and the storage tank;
A pump capable of sending the slurry in the storage tank to the storage tank via the pipe;
When the sensor detects the lower limit liquid level, by driving the pump, slurry is supplied from the storage tank to the storage tank via the pipe, and the supply amount of the slurry reaches a predetermined amount. A supply adjustment control unit that controls to stop the supply of the slurry by stopping the pump;
The slurry reproduction | regeneration apparatus of Claim 2 provided with these. The liquid level detection means includes a sensor capable of detecting a predetermined lower limit liquid level,
The slurry regeneration apparatus according to claim 1, further comprising a notifying unit for notifying when the sensor detects the lower limit liquid level. The notification unit
An information presentation device for presenting information to the surroundings;
When the sensor detects the lower limit liquid level, a notification control unit that performs control to notify the surroundings that the liquid level of the slurry in the storage tank has decreased to the lower limit liquid level by driving the information presentation device. When,
The slurry reproduction | regeneration apparatus of Claim 4 provided with these. The liquid level detection means includes a sensor capable of detecting a predetermined lower limit liquid level and a predetermined upper limit liquid level,
The slurry regenerating apparatus supplies slurry to the storage tank when the sensor detects the lower limit liquid level, and stops supplying the slurry to the storage tank when the sensor detects the upper limit liquid level. The slurry regeneration apparatus of Claim 1 provided with the supply adjustment part. The supply adjusting unit
A storage tank for storing slurry;
Piping connecting the storage tank and the storage tank;
A pump capable of sending the slurry in the storage tank to the storage tank via the pipe;
When the sensor detects the lower limit liquid level, by driving the pump, the slurry is supplied from the storage tank to the storage tank via the pipe, and when the sensor detects the upper limit liquid level, A supply adjustment control unit for controlling to stop the supply of the slurry by stopping the pump;
The slurry regeneration apparatus of Claim 6 provided with these. The liquid level detection means includes a sensor capable of detecting a predetermined lower limit liquid level and a predetermined upper limit liquid level,
The slurry regenerating apparatus includes a supply adjusting unit that supplies slurry to the storage tank when the sensor detects the lower limit liquid level, and notifies that when the sensor detects the upper limit liquid level. The slurry regenerating apparatus according to claim 1. The supply adjusting unit
A storage tank for storing slurry;
Piping connecting the storage tank and the storage tank;
A pump capable of sending the slurry in the storage tank to the storage tank via the pipe;
An information presentation device for presenting information to the surroundings;
When the sensor detects the lower limit liquid level, by driving the pump, the slurry is supplied from the storage tank to the storage tank via the pipe, and when the sensor detects the upper limit liquid level, A supply adjustment control unit that performs control to notify the surroundings that the liquid level of the slurry in the storage tank has risen to the upper limit liquid level by driving the information presentation device;
The slurry reproduction | regeneration apparatus of Claim 8 provided with these.   The slurry regeneration apparatus according to any one of claims 1 to 9, wherein the liquid level detection means is a liquid level gauge.   The slurry regeneration apparatus of any one of Claim 1 to 10 provided with the regeneration process part which derives | regenerates a slurry from the said storage tank and performs a regeneration process.   The slurry regeneration apparatus according to claim 11, wherein the regeneration processing unit is configured to return a part of the regenerated slurry to the storage tank.   The regeneration processing unit centrifuges the slurry, and separates the slurry into a solid content containing chips at a high concentration and a centrifuge liquid containing chips at a low concentration and circulated to a storage tank, and a slurry. The membrane separation unit according to claim 11, wherein the membrane separation unit includes at least one of a membrane separation unit that concentrates and contains chips and separates the concentrate into a storage tank and a membrane filtrate that does not contain chips. Slurry regeneration device. The regeneration processing unit centrifuges the slurry, and separates at least one centrifuge unit that separates the solid content containing chips at a high concentration into a centrifuge solution containing chips at a low concentration and circulated to a storage tank; and The slurry is separated into membranes, and the chips are concentrated and contained, and are provided with at least one membrane separation unit that separates the concentrated liquid circulated to the storage tank and the membrane filtrate that does not contain chips.
The slurry regeneration apparatus according to claim 11, wherein at least one centrifugal separator and at least one membrane separator regenerate the slurry in parallel.   The slurry reproduction | regeneration apparatus of any one of Claim 1 to 14 provided with the heater for heating the slurry stored in the said storage tank.   The slurry regeneration device according to any one of claims 1 to 15, further comprising a stirring unit for stirring the slurry stored in the storage tank.

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