KR101339554B1 - Method and apparatus for refining available component of by-product form recovering ingot wire sawed slurry - Google Patents

Abstract

The present invention relates to a drying type recycling process capable of increasing the recovery rate of active components, which are treated as a final waste and lost while being included in a process sludge, when a wire sawing waste slurry is recycled in a liquid method with the use of a ultrasonic wave and centrifugal separation principal and capable of selectively supplying the recycled sludge based on a market demand source with various characteristics of the active components while satisfying quality. [Reference numerals] (AA) By "Figure 2";(BB) Vibrating quarter;(CC) Sludge

Description

METHOD AND APPARATUS FOR REFINING AVAILABLE COMPONENT OF BY-PRODUCT FORM RECOVERING INGOT WIRE SAWED SLURRY}

TECHNICAL FIELD The present invention relates to intermediate or comprehensive treatment of waste, and in particular, to recover the active ingredient (abrasive material) in waste by-products generated in the production of recovery slurries for ingot cutting during the wafer manufacturing process of ingots using a wire sawing method. A method and apparatus are disclosed.

In general, as an auxiliary material for cutting used in the wire sawing process for slicing the ingot, a suspension (slurry) having a specific specific gravity is used by mixing an abrasive (SiC), coolant, etc. in an appropriate ratio. If the slurry is used for a certain time or a certain number of times for slicing the ingot, the specific gravity is increased compared to the initial suspension due to impurities (fine powder: Si, Fe) mixed in the workpiece, and the ingot cutting occurs in an abnormal state.

Used slurry, which has a high specific gravity due to the mixing of impurities, is recovered and regenerated. Mainly centrifugation removes impurities (pulverized components) from the waste slurry to make recycled slurry with initial specific gravity, so that it can be reused in the wafer production site.

However, the active ingredient (abrasive material-SiC) is used in a number of repeated centrifugal processes to remove impurities in the waste slurry in the regeneration of a wire sawing solar and semiconductor ingot cutting slurry brought into the waste organic solvent. By-product separation (process sludge, hereinafter referred to as "sludge") inevitably occurs during the first centrifugation and then repeated centrifugal processes. These sludges are generally taken out to waste final treatment companies and disposed of in landfill or incineration. .

The screw decanter used in the production of most recycled slurries and the ultrasonic application technology in the pretreatment process have been continuously improved over the years by manufacturers in Korea and overseas, and have reached the limit of separation performance with some physical characteristics. It seems to have improved.

However, advances in the technology of fabricating wafers from ingots, for example, with thinner wires, smaller grain sizes, and larger diameter ingots, make the demand for recycled slurry more demanding. In the production of recycled slurry that meets these demanding requirements, the limitation of physical separation technology using pretreatment using ultrasonic wave and centrifugal separation technology has been reached. Technology is desired.

Korean Patent No. 10-1194188 "Method and Apparatus for Recovering Active Ingredients from Waste Sludge Generated in Semiconductor and Solar Silicon Wafer Manufacturing"

Accordingly, an object of the present invention is to provide an improvement method capable of minimizing the loss of effective resources (SiC components contained in sludge) that are inevitably lost in the existing regeneration process based on the technology of centrifugation and ultrasonic waves. .

Another object of the present invention is to provide a separation and purification method and apparatus that satisfies the new quality requirements of the consumer market in addition to the use of wire sawing in consideration of the physical properties of the recovered active ingredient (abrasive material).

The present invention according to the above object, 5 to 20wt compared to the sludge in the sludge containing the cutting oil as waste by-product in the method for recovering the active ingredient in the waste by-product generated in the production process of the recycled sludge for wet ingot cutting Addition of% water to stir to obtain fluidized disintegration sludge, and injecting the disintegration sludge into rotary kiln drying / combustion furnace in which the furnace has a gradient, and heating it above the flash point of oil, Using the spiral water barrier stage formed on the inner wall to control and move the residence time of fluidized disintegrated sludge, remove the oil by drying or combustion action, and remove the oil from the drying and combustion section by the cylindrical rolling shaft provided on the inner wall of the cooling section. Transport the sludge dry while roughly grinding the sludge mass The process of swelling, granulating the sludge dry matter with a pulverizer and then pulverizing with a jet mill-type pulverizer, sieving the pulverized sludge with a pretreatment for maximizing classification efficiency, and sieving sludge Perform classification process to remove fine powder of less than 5㎛ using two classifiers and two silos and mixers, but any one of a plurality of working paths is selected under the control of the control path. It is characterized by consisting of the process of re-recovering the active ingredient by any one of the recurring classification.

In addition, as a method for reclaiming the active ingredient in the waste by-products generated in the production process of the recycled slurry for ingot cutting according to another aspect of the present invention, the same process as described above and carried out by modifying only the classification operation in the final process However, the classification process to remove the fine powder of less than 5㎛ using two classifiers and two silos to classify the pulverized sludge, but the process of recirculating the active ingredient of SiC purity 90 ~ 98wt% Characterized in that made.

The present invention can increase the recycling value by increasing the recovery rate of the effective resources lost from the waste resources according to the production process of the recycled slurry for ingot cutting, and can contribute to the creation of various demand marketability by maximizing the characteristics of the recovered effective resources.

1 and 2 is a process chart for separating and purifying the active ingredient in the waste by-products generated in the ingot cutting recycled slurry production process according to an embodiment of the present invention,
3 is a schematic partial cutaway view of a drying and combustion section in a rotary kiln drying / combustion furnace;
4 is a schematic partial cutaway view of a cooling section in a rotary kiln drying / combustion furnace;
5 is a photograph showing a state of sludge containing cutting oil,
Figure 6 is a photograph showing the sludge state after oil removal according to the present invention,
Figure 7 is a state photograph after grinding the mill mill jet mill in accordance with the present invention,
8 is a state photograph after classification according to the present invention,
9 is a graph of the particle size distribution results after crushing and classifying a jet mill type pulverizer according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In the present invention, the presently used recycled slurry production equipment is used as it is, without removing the oil by combustion or drying → grinding (assembly grinding, fine grinding) → classification → effective ingredients in the waste resources lost by introducing additional equipment of packaging By recovering the (SiC component contained in the sludge), the active ingredient can be recovered to a high enough purity of 90wt% or more to satisfy the abrasive function contained in the recycled slurry for wire sawing. At the same time, the fine powders (Fe, Si), etc., which are incidentally obtained from the classification, may be used as secondary raw materials for the use of deoxidizers consumed in large quantities in the steel industry.

As a result of the inventor's confirmation, the physical properties of the sludge produced in the general production process of recycled sludge for ingot cutting are 1.10 ~ 1.20 specific gravity excluding cutting oil oil (inorganic carbon), and Si and Fe components which are regarded as fine powder in the sludge powder are 20 ~ 30wt%, 5 ~ 10wt% SiC component is composed of the average content of 60 ~ 65wt%. In the sludge physical component, Si component is ingot cutting fine powder, Fe component is wire iron wear fine powder, and SiC component is coarse powder of abrasive.

In view of the composition ratio of the sludge, if the screening removal of Si and Fe components considered to be a fine powder of 5 µm or less and the removal of the cutting oil components contained in the sludge are performed properly according to the present invention, a significant amount of effective components (SiC components) can be obtained. It was confirmed that the purification can be at least 90wt% of the purity of the active ingredient.

The use of 90 wt% of the active ingredient SiC purity can sufficiently perform the function of the abrasive used as a recycled slurry for wire sawing.

The cutting oil contained in the sludge cannot be recycled as it decomposes at the same time as pyrolysis when heated, and in the dry SiC solids, cutting oil components that are not volatilized even at high temperatures may remain as carbides. There is a concern about contamination by carbides when using recycled slurry.

In the present invention, the cutting oil contained in the sludge is removed by a combustion method so that no carbides remain, and a grinding and classification method for purifying the active ingredient in the waste by-product sludge with high purity is performed.

Sludge reprocessing process flow according to the embodiment of the present invention, "sludge discharge → water addition → stirring → continuous and batch drying / removal of oil in the furnace / coarse grinding → fine grinding (jet mill method) → sieve → classification → storage → packaging.

1 and 2 is a process chart for separating and purifying the active ingredient in the sludge which is a waste by-product generated in the production process of the recycled sludge for ingot cutting according to an embodiment of the present invention.

Figure 1 shows the process of "sludge discharge → water addition → stirring → removal of oil in continuous and batch drying / combustion furnace → coarse grinding → fine grinding (jet mill method) → sieve powder, Figure 2 shows the process of Figure 1 Continued on, the process of "classification → storage → packaging" is shown.

Sludge, which is a waste by-product generated in the production process of reclaimed sludge for ingot cutting, is a mucus phase containing cutting oil components as shown in the photograph of FIG. 5, and water (W) and It is put together.

The sludge disintegration unit 2 agitates the sludge contained in the storage container and water (W) injected from the outside, but performs a simple stirring function and a stirring function in the three-dimensional directions of the X, Y, and Z axes as needed to aggregate the sludge. Disintegrate. The coolant component contained in the sludge occupies about 30 wt% and is very viscous and low in fluidity. Since the cutting oil component contained in the sludge is water-soluble, water is used as the water W in the present invention.

In order to improve the minimum flowability of the transfer pump 4 suitable for the piston type high viscosity fluid, to improve oil removal in the rotary kiln drying / combustion furnace 6, and to improve the pulverization after oil removal, etc. In the present invention, 5 to 20 wt% of sludge, preferably 5 to 10 wt% of water (W) is added to perform a pretreatment process for a predetermined time in the sludge crushing unit (2).

If the ratio of water (W) is less than 5wt% in the weight ratio of water (W) is less than 5wt%, the sludge is not crushed properly.When the ratio of water (W) exceeds 20wt%, the rotary kiln is dried / burned. There is a critical significance that the combustion in (6) is not performed properly.

The sludge disintegrated in the sludge disintegration unit (2) is quantitatively transferred using a disintegration sludge metering pump (4) installed on the conduit connected between the sludge disintegration unit (2) and the rotary kiln drying / combustion furnace (6). Rotary kiln drying / combustion furnace (6).

Rotary kiln drying / combustion furnace (6) according to the present invention is a cylindrical roche has a gradient of 2 ~ 3 ° is installed rotatably by the left and right rolling shaft support 40, and is connected to the drive motor 42, which is a power source is slowly connected It is a rotating structure.

The rotary kiln drying / combustion furnace 6 is equipped with a burner 30 and a blower 32 for combustion, followed by a drying and combustion section 34 including a heating inlet 34a and subsequent cooling sections. As a co-current type of operation divided by (36), a spiral water barrier stage 38 is provided on the inner wall of the cylindrical furnace body of the drying and combustion section 34.

In performing the combustion treatment according to the present invention by separating the cutting oil mixed with the abrasive SiC, the spiral water barrier stage 38 formed on the inner wall and preheated above the ignition point of the oil is made to be fluidized by the addition of water (W). Promote the role of residence time adjustment. Fluidized sludge moving along the helical barrier stage 38 by furnace body rotation removes oil by drying and combustion in the drying and combustion sections 34.

After the oil is removed, two or three cylindrical rolling shafts (39) as shown in FIG. 4 are installed in the cooling section 36 in order to favor the cooling of the dry goods. It gives the first assembly crushing function by the falling or rolling motion, and shoots the cold air by using the cooler 46 composed of a blower and a plurality of air injectors on the outer wall of the cylindrical furnace body of the cooling section 36 to cool the cooling section 36. Configure Roche to cool.

In order to prevent the drying of the rotary kiln drying / combustion furnace 6 and the building to be fixed to the inner wall of the combustion section 34, the rotary hammer 44 as shown in FIG. Install ~ 4 units. The rotary hammer 44 sequentially hits the outer surface of the furnace cylinder when the furnace is rotated, thereby preventing it from being fixed to the dry object on the inner wall of the drying and combustion section 34.

Incomplete combustion of the oil contained in the sludge, which is to be dried, may occur according to the input capacity of the dry matter, so that complete combustion of the exhaust gas is required for drying / combustion. For this purpose, the dust collecting part 47 installed in the flue of the cooling section 36 is required. The back end is provided with the flashback prevention part 48 and the exhaust fan 49. The flashback prevention part 48 is a structure in which a wire mesh is rolled into the lower conduit of the U-shaped trap to prevent unburned embers from going to the dust collecting part 47 to prevent flashback.

In the removal of the cutting oil component contained in the sludge by combustion method, the atmospheric temperature in the furnace, the residence time of the sludge injected quantitatively, the blowing conditions of the blower 32, etc. should be considered.

First, it is preferable to maintain the ambient temperature of the furnace drying and combustion section 34 at 600 ° C to 800 ° C in a steady state. The reason is that the presence of residual oil in the powdered sludge, which is incinerated by combustion, results in low purity results by residual oil in the SiC purity measurement.

SiC purity measurement is usually measured using a carbon analyzer. The relationship of "total carbon amount-inorganic carbon amount = organic carbon amount" is established, and the presence and increase of cutting oil means the presence and increase of inorganic carbon amount. Therefore, when the cutting oil is present, the purity of the active ingredient SiC (referred to as organic carbon) is also reduced.

The sludge residence time of the sludge depends on the size of the production equipment, which is usually about 6 to 7 kg / min based on the continuous drying / incineration furnace (in accordance with the present invention, the spiral water barrier stage 38 is installed in the furnace at a constant pitch interval). The present inventors confirmed that the cutting oil removal rate at the condition satisfies the quality condition. In addition, it was found that the operation of the waste gas generated from the burned product under sufficient exhaust conditions, which calculates about 10-15 vol% more than the theoretical air required for combustion, is advantageous for removing oil from the rotary kiln drying / combustion furnace (6). .

Careful attention is required because the occurrence of white smoke due to incomplete combustion is observed when injection of the burned object is performed in the initial furnace abnormality and when the burned object is injected quantitatively. As a safety device, a separate combustion chamber can be installed to suppress or eliminate white smoke (incomplete combustion).

Rotating hammers 44 provided with hinge shafts on the outer surface of the furnace cylinder in order to prevent the adherence of the dry matter inside the heating part maintained at 600 ° C. to 800 ° C. in the drying section and the combustion section 34 of the continuous injection furnace of the object. By vibrating shock is applied at a constant cycle.

The state of sludge with oil removal in continuous and batch drying / combustion furnaces such as rotary kiln drying / combustion furnace 6 is shown in the photograph of FIG. 6, and the sludge dry matter is entangled with the original small particles as shown in FIG. 6. It is discharged in the form of a large number of lumps.

After the oil is removed, the sludge dried material is conveyed through the double screw conveyor 7 and is pulverized, and is first introduced into the gear type grinder 8. The double screw conveyor 7 allows a fixed quantity supply of sludge dry matter.

In the crusher 8, the sludge dry matter is pulverized into small lumps or powders of a required size and then pulverized in a jet mill-type pulverizer 10.

In the jet mill type pulverizer 10, the pulverizing operation is performed so that the particles are in micron units in order to provide the optimum working conditions of the classification process. The jet mill pulverizer 10 is an optimal method for causing maximum dispersion effect during pulverization.

The component analysis (SEM / EDX) results of the sample of the pulverized sludge dry matter in the jet mill-type pulverizer 10 are shown in Table 1 below, and the shape of the sample is shown in the photograph of FIG. 7.

Ingredient C O Si Fe SiC
(Individual measurement) Analytical Content (wt%) 38.19 13.1 45.105 3.56 Purity 75wt%

As described above, the pulverized sludge dried material in the jet mill-type pulverizer 10 is sieved in the vibrating body branch 12. Vibrating sieve 12 is a pre-treatment for maximizing the classification efficiency in the classification process to sift the fine pulverized sludge with vibration to pick out agglomerated with moisture or the like.

After the body powder is made in the vibrating sieve 12, it is put into the classification process shown in FIG.

After performing the grinding operation using the jet mill principle, the classification (selection of fine powder and coarse powder) is continuously processed and finished with packaging, but in the present invention, the quality level may not be satisfied in a series of sorting operations (grinding-classification). In this case, the classification method is provided with a production flow path for the secondary classification operation.

In order to purify the content of the active ingredient SiC to at least 90wt%, it is effective to selectively remove 30 to 40% of fine powder. In the present invention, two classifiers 16a and 16b to remove fine powder of 5 μm or less are used. Derivatives are screened and removed in a variety of classifications, including classification of cyclic iterations.

More specifically, in the present invention, in performing the classification process, the distributor 14, two classifiers, that is, classifier A (16a) and classifier B (16b), two silos, that is, silo A (18a) And a silo B 18b, two dust collectors 20a and 20b, and a mixer 28, and selectively perform various classification operations, including blowers 22a and 22b and a collector 24.

Two open / close valves 14a and 14b and a single open / close valve 19 are provided at the discharge portion of the silo A 18a at the discharge portion of the distributor 14. Accordingly, the control section 54 controls the opening / closing valves 14a, 14b and 19 by the valve control signals BS1, BS2 and BS3, thereby setting one of the detailed work paths required by the operator.

The detailed work path of the classification work according to the present invention is divided into five paths such as the following classification process detailed work path table.

※ Detailed work path of classification process

That is, the separated sludge is classified using two classifiers 16a, 16b, two silos 18a, 18b, a mixer 28, and the like, and a plurality of operations are performed under the control of the path of the controller 54. One of the paths is selected. The detailed work paths of the classification process mentioned in the above detailed classification process path table include sieve (path 1), classification (path 2), double classification mixture (path 3), sequential classification (path 4), repetitive classification (path) Any one of 5) is to be made, it is a working path to recover the active ingredient according to the present invention.
That is, the path 1 of the detailed work path of the classification process is the path through the body powder → silo A → pavement as the working path of body powder, and the path 2 is the path through the body powder → classifier A → silo A → pavement as the working path of classification. , Path 3 is the working path of the dual classification mixing, which is the path from the sieve → dual classification in classifier A and classifier B to dual storage → mixing → packaging in silo A and silo B. Path 4 is the work path of the sequential classification, followed by sieve → classifier A → silo A → classifier B → silo B → pavement, and path 5 is the working path of the repetitive classification. Silo A → Classifier A → Silo A 'process cycle repetition → Packing.

In consideration of the sludge as the main raw material, it is equipped with a working path to allow two or more continuous classification operations in case of low content of SiC active ingredient, and a mixer for mixing low and high purity to control the content of the active ingredient ( 28) can be used at the final stage. Path 5 is a structure in which the classification cycle is repeated so that the content of the SiC active ingredient is 90% by weight or more, and the operator can directly check the front end of the mixer 28 manually to check the content of the SiC active ingredient. The sample port 26 is provided.

And the detailed working route of the route 1 to route 4 of the present invention is a variety of classification work path that can adjust the content of the active ingredient (SiC) to suit the purpose of the packaged product.

According to the present invention, when the cyclic repetition of the classification operation is carried out so that the content of the SiC active ingredient is 90% by weight or more, the component analysis content as an example of measurement is shown in Table 2 below, and the photograph after classification is shown in FIG. 8. Is the same as

Ingredient C O Si Fe SiC
(Individual measurement) Analytical Content (wt%) 56.91 9.76 33.33 No detection Purity 90 ~ 98wt%

Referring to the result of the component measurement of the sample and the graph of the particle size distribution result in FIG. 9, the normal distribution of the particle size is improved after performing the jet mill process, and the differential region of 5 μm or less through the classification operation of the circulation / repetitive structure. Impurities (Si, Fe) were also removed. It is considered that the purity of the active ingredient (SiC) is relatively improved due to the decrease in the distribution of the differential region below 5 μm.

Through the classification process according to the present invention can obtain a significant amount of the active ingredient (SiC- polishing material) in the sludge and at the same time can increase the purity of the active ingredient (SiC-grinding material) very high quality slurry can be produced.

The consumption market anticipated by the products obtained by the present invention can be used in the field of regenerated abrasive materials (liquid-slurry type and dry-powder type) and refractory materials (standard and amorphous).

In addition, fine powders (Fe, Si), which are incidentally obtained in the classification process, have a possibility of secondary value creation for use as a deoxidizer raw material consumed in large quantities in the steel industry.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments. Therefore, the scope of the present invention should not be limited by the described embodiments, but should be determined by the scope of claims and equivalents thereof.

(2)-Sludge Disintegration Unit (4)-Disintegration Sludge Dispensing Pump
(6)-Rotary Kiln Drying / Combustion Furnace (7)-Double Screw Conveyor
(8)-Grinder (10)-Jet Mill Grinding Machine
(12)-vibrating branch (14)-distributor
(16a) (16b)-Classifier (18a) (18b)-Silos
(20a) (20b)-Dust Collector (22a) (22b)-Blower
(24)-Collector (26)-Sample Port
(28)-Mixer (30)-Burner
(32)-blower (34a)-heating inlet
(34)-Drying and combustion sections (36)-Cooling sections
(38)-Spiral Clap End (39)-Rolling Shaft
(40)-rolling bearing (42)-drive motor
(44)-Rotary Hammer (46)-Cold Fan
(47)-Dust Collector (48)-Flashback
(49)-Exhaust Fan (52)-Operation Panel
(54)-Control

Claims (5)

In the method for reclaiming the active ingredient in the waste by-product generated in the production process of the recycled slurry for wet ingot cutting,
A process of obtaining flowable disintegrated sludge by adding 5 to 20 wt% of water to the sludge containing cutting oil as a waste by-product and stirring it;
Disintegrate the sludge into the rotary kiln drying / combustion furnace where the furnace has a gradient, and the residence time of the fluidized disintegration sludge is maintained by using a spiral water barrier stage formed on the inner wall of the furnace between the drying and combustion sections while heated above the ignition point of the oil. It controls and moves, removes oil by drying or combustion, and transfers and discharges the sludge dry while air-cooling while grinding the sludge mass removed from the drying and combustion section by the cylindrical rolling shaft provided on the inner wall of the cooling section. Process,
Crushing the sludge dry matter with a pulverizer and then pulverizing it with a jet mill method,
A sieving process for sieving the pulverized sludge as a pretreatment for maximizing classification efficiency;
Classified sludge is classified using two classifiers, two silos and a mixer to remove fine powder less than 5 ㎛, and any one of a plurality of working paths is selected under the control of a control path, and then mixed and classified. Method for re-recovering the active ingredient in the waste by-products generated in the production process of the recycled slurry for ingot cutting, characterized in that the process is to recover the active ingredient by any one of sequential classification, cyclic repeat classification.
The recycling sludge for ingot cutting according to claim 1, wherein the amount of waste gas generated from the waste combusted material, which is sludge injected into the rotary kiln drying / combustion furnace, is estimated to be 10-15 vol% more than the theoretical air amount required for combustion. A method for recovering active ingredients in waste by-products generated in the production process.
According to claim 1, The working path of the classification operation,
Body powder → silo A → path 1 through packaging,
Sieve → classifier A → silo A → path 2
Body fraction → double classification in classifier A and classifier B → dual storage in silo A and silo B → mixing → route 3 through packing,
Sieve → classifier A → silo A → classifier B → silo B → route 4 through packing,
After sieving, it reunites the active ingredients in the waste by-products generated in the production process of recycled slurry for ingot cutting, characterized in that it consists of a route 5 of 'classifier A → silo A → classifier A → silo A'. Way to be.
In the method for reclaiming the active ingredient in the waste by-product generated in the production process of the recycled slurry for wet ingot cutting,
A process of obtaining flowable disintegrated sludge by adding 5 to 20 wt% of water to the sludge containing cutting oil as a waste by-product and stirring it;
Disintegrate the sludge into the rotary kiln drying / combustion furnace where the furnace has a gradient, heat above the flash point of the oil, and control the residence time of the fluidized disintegration sludge using the spiral water barrier stage formed on the inner wall of the furnace between the drying and combustion sections. At the same time, the oil is removed by drying or burning, and the cylindrical rolling shaft provided on the inner wall of the cooling section pulverizes the sludge mass removed from the drying and combustion section and conveys and discharges the sludge dry matter while air cooling. ,
Pulverizing the sludge dry matter with a pulverizer and then pulverizing it with a jet mill pulverizer,
A sieving process for sieving the pulverized sludge as a pretreatment for maximizing classification efficiency;
Classified sludge is divided into two classifiers and two silos to remove the fineness of less than 5㎛, but it is a process of recirculating the active ingredient of 90 ~ 98wt% of SiC purity by making the cycle repeated classification. Method for reclaiming the active ingredient in the waste by-products generated in the production process of the recycled slurry for ingot cutting.
In the apparatus for reclaiming the active ingredient in the waste by-product generated in the production process of the recycled slurry for wet ingot cutting,
Sludge crushing part which obtains fluidized crushed sludge by adding and stirring 5-20 wt% of water to sludge containing cutting oil as waste by-product,
Disintegrate the sludge into the furnace with the gradient of the furnace, heat above the ignition point of the oil, adjust the residence time of the fluidized disintegrated sludge by using the spiral water barrier stage formed on the inner wall of the furnace between the drying and combustion zones B. Rotary kiln drying / combustion furnace which removes oil by combustion, and uses a cylindrical rolling shaft provided on the inner wall of the cooling section to pulverize the dried and removed sludge mass in the combustion section, while simultaneously transporting and discharging the sludge. ,
A crusher for pulverizing the sludge dry matter,
A jet mill type pulverizer for pulverizing the dry pulverized powder ground in the pulverizer,
Vibrating sieve which separates the finely divided sludge into vibration by pretreatment for maximizing classification efficiency,
Classified sludge is classified using two classifiers, two silos and a mixer to remove fine powder less than 5 ㎛, and any one of a plurality of working paths is selected under the control of a control path, and then mixed and classified. Device for reclaiming the active ingredient in the waste by-product generated in the production process of recycled slurry for ingot cutting, characterized in that it is composed of a classification process unit for recovering the active ingredient by sequential classification or repetitive classification. .

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