KR101557019B1 - cell type panel fixing device for sputtering - Google Patents

cell type panel fixing device for sputtering Download PDF

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Publication number
KR101557019B1
KR101557019B1 KR1020150053749A KR20150053749A KR101557019B1 KR 101557019 B1 KR101557019 B1 KR 101557019B1 KR 1020150053749 A KR1020150053749 A KR 1020150053749A KR 20150053749 A KR20150053749 A KR 20150053749A KR 101557019 B1 KR101557019 B1 KR 101557019B1
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KR
South Korea
Prior art keywords
sputtering
type panel
cell
fixing device
panel fixing
Prior art date
Application number
KR1020150053749A
Other languages
Korean (ko)
Inventor
김원중
도영호
송희수
Original Assignee
주식회사 유아이디
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Publication date
Application filed by 주식회사 유아이디 filed Critical 주식회사 유아이디
Priority to KR1020150053749A priority Critical patent/KR101557019B1/en
Application granted granted Critical
Publication of KR101557019B1 publication Critical patent/KR101557019B1/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cell-type panel fixing device for sputtering, which can prevent a thin film formed on a surface of a cell-type panel by sputtering, and is capable of supporting a plurality of cell- A front cover having a groove and having a first slit passing through the front and rear surfaces inside the edge portion of each of the seating grooves; A plurality of rear covers each supporting the plurality of cell-type panel back surfaces, the plurality of rear covers including a plurality of first magnetic bodies arranged at intervals in an edge portion; And a plurality of masks disposed between the front cover and the rear cover and having second slits corresponding to the first slits.

Description

[0001] The present invention relates to a cell type panel fixing device for sputtering,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a panel fixing apparatus, and more particularly, to a panel fixing apparatus which can prevent a thin film formed on a surface of a cell type panel from being scattered during a sputtering process by allowing a cell type panel supported by a front cover and a rear cover to closely contact with a mask To a cell type panel fixing device for sputtering.

A thin film may be formed on the surface of a panel such as a display panel or a glass panel.

At this time, the thin film on the surface of the panel is usually formed by a sputtering process through a sputtering apparatus, and a thin film is formed on the surface of the panel, thereby protecting the function and surface of the panel and improving the rigidity and characteristics of the panel.

On the other hand, in the process of forming the thin film on the surface of the panel, that is, in the sputtering process, the panel is usually transported by itself.

That is, in the conventional sputtering process, the operator carried the panel itself.

When the panel itself is conveyed in this manner, the panel may collide with a peripheral device or the like, and thus the panel is damaged.

For this reason, in this field, a sputtering panel fixing device is used in the sputtering process.

At this time, the panel fixing device for general sputtering includes a rear cover and a front cover for supporting the rear face and the front face of the panel, and the rear cover and the front cover cover a considerable part of the panel to protect the panel. The panel is prevented from being damaged by the collision.

However, in the panel fixing apparatus for general sputtering, the thin film formed on the surface of the panel spaced apart from the panel contacting the panel frequently spreads through the gap between the mask and the panel, and in particular, There is a problem that the quality of the thin film is deteriorated.

In the panel fixing device for general sputtering, since a vacuum device is used to support the front cover, it is difficult to accurately align the mask and the panel as the front cover and the mask are deformed by the vacuum suction force, In particular, when the thin film is formed in a narrow band shape, the shape of the band is not uniform and the formation quality of the thin film is deteriorated.

For this reason, in the related art, the panel supported by the front cover and the rear cover can be intimately brought into close contact with the mask, thereby attempting to develop a panel fixing device capable of preventing the thin film formed on the surface of the panel by sputtering from being blurred However, up to the present time, satisfactory results have not been obtained.

DISCLOSURE OF THE INVENTION The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a panel fixing apparatus for a general sputtering panel, wherein a mask contacting the panel is formed on the panel surface by sputtering spaced from the panel, The present invention has been made in view of the above problems, and it is an object of the present invention to provide a cell-type panel fixing device for sputtering which can solve the problem that the quality of the thin film is deteriorated.

In order to achieve the above object, the present invention provides a cell-type panel fixing apparatus for sputtering, comprising: a plurality of seating grooves for supporting a plurality of cell-type panels and each of which houses the cell-type panels; A front cover having a first slit passing through front and rear surfaces thereof; A plurality of rear covers each supporting the plurality of cell-type panel back surfaces, the plurality of rear covers including a plurality of first magnetic bodies arranged at intervals in an edge portion; And a plurality of masks disposed between the front cover and the rear cover and having second slits corresponding to the first slits.

The cell-type panel is one of a display panel and a glass panel.

The first slits are disposed adjacent to the upper side, the lower side, and both sides of each of the cell-type panels.

The front cover further includes a support piece protruding inward from the four corners of each of the seating recesses.

The supporting piece is coupled to the front cover by bolting.

The front cover further includes a protrusion member for pressing the rear cover received in each of the seating recesses.

The projecting member is rotatably formed on the inside and outside of each of the seating grooves.

The projecting member is elastically supported by a coil spring.

The seating groove is arranged to be inclined 5-10 from the horizontal state.

The front cover includes a fixed block having a plurality of second magnetic bodies on the rear side thereof.

The second magnetic body is disposed at an interval with a polarity opposite to that of any one of the first and second magnetic bodies, wherein the total quantity of one polarity is the same as the total quantity of the opposite polarities.

The second magnetic body is disposed such that the total amount of one polarity is equal to or greater than the total quantity of the first magnetic body.

The rear cover has a Teflon coating layer on a surface facing the cell-type panel.

The rear cover has a plurality of openings penetrating the front and rear surfaces.

The first magnetic body is disposed at an interval with the same polarity as any one of the first magnetic body and the other neighboring magnetic body.

The mask has a Teflon coating layer on the surface facing the cell-type panel.

In the cell type panel fixing device for sputtering according to the present invention, the rear cover is attached to the front cover by the magnetic force from the first magnetic body, whereby the mask between the rear cover and the front cover and the cell- It is possible to prevent defective thin film formation due to the space between the mask and the cell type panel.

The cell-type panel fixing device for sputtering according to the present invention is characterized in that the front cover is provided with a plurality of seating grooves each of which accommodates a plurality of cell-type panels, and the first slits provided in the respective seating grooves are disposed on the upper side, And the second slit provided on the mask corresponds to the first slit. After the mask and the cell-type panel are supported by the front cover and the rear cover, sputtering is performed on the side of the front cover, So that the formation of the strip-shaped thin film can be facilitated.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an exploded perspective view for explaining the structure of a cell-type panel fixing apparatus for sputtering according to the present invention; FIG.
2 is a schematic view for explaining the use of the panel fixing apparatus according to the present invention;
3 is a partial cross-sectional view for explaining a structure of a front cover in the present invention.
4 is a partial sectional view for explaining the structure of the rear cover in the present invention.
5 is a partial cross-sectional view for explaining the structure of a mask in the present invention.
6 is an exemplary view for explaining a mask layout in the present invention;
7 is an exemplary view for explaining thin film formation on a cell type panel in the present invention.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIGS. 1 and 2, the cell-type panel fixing apparatus A for sputtering according to the present invention includes a front cover 10, a rear cover 20, and a mask 30.

The front cover 10 includes a plurality of seating grooves 11 for supporting the front surfaces of the plurality of cell-type panels 100 and each accommodating the cell-type panels 100, And a first slit 12 passing through the front and rear surfaces.

The first slits 12 are preferably disposed adjacent to the upper side, the lower side, and both sides of each of the cell-type panels 100.

The first slit 12 is disposed adjacent to the upper side, the lower side and the both sides of each of the cell-type panels 100 so that the upper side, lower side, and both sides of each of the cell- A portion adjacent to the inside can be exposed.

As shown in FIG. 3, the front cover 10 may further include a support piece 14 protruding inward from the four corners of each of the seating grooves 11.

The front cover 14 is further provided with a support piece 14 protruding inward from the four corners of each of the mount recesses 11 so as to fit the mask 30 to the bottom of the support piece 14, The mask (30) is fixed to the groove (11).

The supporting piece 14 is preferably coupled to the front cover 10 by fastening bolts (not shown).

The support piece 14 is detached from the front cover 10 when the bolt is loosened by being coupled to the front cover 10 by the bolt fastening, The seat 30 can be easily seated.

The front cover 10 may further include a protruding member 15 for pressing the rear cover 20 received in each of the seating grooves 11.

The front cover 10 is further provided with a protruding member 15 for pressing the rear cover 20 accommodated in each of the seating grooves 11 so that the rear cover 20 So that the rear cover 20 is prevented from being separated from the seating groove 11. As shown in FIG.

Preferably, the projecting members 15 are rotatably formed on the inside and outside of the respective seating grooves 11.

When the projecting member 15 is pivotally moved inward and outward of each of the seating grooves 11 so that the projecting member 15 is rotated to the outside of the seating groove 11, The cover 20 can be easily drawn out.

The protruding member 15 is preferably elastically supported by a coil spring 15a.

The protrusion member 15 is resiliently supported by the coil spring 15a so that the bottom surface of the protrusion member 15 facing the inside of the seating groove 11 is elastically deformed by the elasticity of the coil spring 15a, The rear cover 20 can be prevented from flowing.

Meanwhile, it is preferable that the seating grooves 11 are arranged to be inclined 5-10 from the horizontal state.

The mask 30 and the cell-type panel 100, which are accommodated in the inside thereof by being inclined by 5-10 from the horizontal state, are wobbled by their own weight, and the lower end face and the one side face of the seat- The mask 30 and the cell-type panel 100 can be aligned with each other by preventing nipping in the seating groove 11 by naturally contacting the bottom surface and one side surface of the cell-type panel 11.

In this case, when the degree of inclination of the seating groove 11 is less than 5 degrees, the degree of inclination of the mask 30 and the cell-type panel 100 due to its own weight may be insufficient, The width of the seating groove 11 arranged in the lateral direction is widened to increase the size of the front cover 10 so that the seating groove 11 is in a horizontal state It is preferable to be disposed at an angle of 5 to 10 DEG from the center.

The front cover 10 preferably includes a fixing block 40 having a plurality of second magnetic bodies 41 on the rear side thereof.

The front cover 10 includes a fixing block 40 having a plurality of second magnetic bodies 41 at the rear thereof so that the front cover 10 is attracted by the magnetic force from the second magnetic body 41 So that the front cover 10 is fixed by the fixing block 40.

The fixed block 40 may be fixed to the sputtering device by a holder (not shown in the figure) or the like.

The fixed block 40 is fixed to the sputtering device by means of a holder or the like so that the front cover 10 is brought into close contact with the front surface of the fixed block 40 and the magnetic force of the second magnetic body 41 The front cover 10 is fixed to the fixed block 40 so as to prevent the front cover 10 from flowing and facilitating the operation of joining the rear cover 20 to the front cover 10 .

It is preferable that one of the second magnetic bodies 41 is disposed at an interval with a polarity opposite to that of any one of the adjacent second magnetic bodies 41. [

One of the second magnetic bodies 41 is disposed at an interval of an opposite polarity from the other of the first and second magnetic bodies 41 and 41 so as to be spaced apart from the first magnetic body 22 with the same polarity Between manpower and repulsive force works simultaneously.

It is preferable that the total number of monopolarities of the second magnetic material 41 is equal to the total number of the opposite polarities.

The total amount of one polarity of the second magnetic material 41 is equal to the total amount of the opposite polarity, so that an attractive force and a repulsive force are applied to the first magnetic material 22 with equal force.

It is preferable that the second magnetic body 41 has a total quantity of unipolarities equal to or greater than the total quantity of the first magnetic bodies 22. [

The total amount of one polarity of the second magnetic material 41 is equal to or greater than the total amount of the first magnetic material 22 so that the repulsive force of the second magnetic material 41 is applied to the attractive force of the first magnetic material 22 So that the first magnetic body 22 is prevented from being attracted to the second magnetic body 41.

The cell-type panel 100 may be one of a display panel and a glass panel.

The cell-type panel 100 is one of a display panel (not shown) and a glass panel (not shown), so that a thin film can be formed on a display panel or a glass panel by sputtering through a sputtering apparatus.

The rear cover 20 includes a plurality of first magnetic bodies 22 that support the back surface of the cell-type panel 100, respectively, and are spaced apart from each other at an edge portion.

The rear cover 20 may include a Teflon coating layer 23 on a surface facing the cell-type panel 100.

Since the rear cover 20 has the Teflon coating layer 23 on the side facing the cell-type panel 100, the Teflon-coating layer 23 mitigates the impact when the cell- The panel 100 is prevented from being damaged.

It is preferable that one of the first magnetic bodies 22 and the other one of the adjacent ones of the first magnetic bodies 22 are disposed with an interval of the same polarity.

One of the first magnetic bodies 22 and the other one of the adjacent ones of the first magnetic bodies 22 are disposed at the same polarity and spaced apart from each other so that any one of the first and second magnetic bodies 22, The attracting force and the repulsive force act simultaneously with the magnetic body 41.

Preferably, the rear cover 20 has a plurality of openings 21 passing through front and rear surfaces.

Since the rear cover 20 includes a plurality of opening openings 21 through which the front and rear faces are passed, the weight is reduced by the area of the opening openings 21 so as to be lightweight and ventilated through the opening openings 21 The cooling of the cell-type panel 100 in contact with the rear cover 20 is smooth and the deterioration is prevented.

The mask 30 is disposed between the front cover 10 and the rear cover 20 and includes a second slit 31 corresponding to the first slit 12.

As shown in FIG. 5, the mask 30 may include a Teflon coating layer 32 on a surface facing the cell-type panel 100.

Since the mask 30 has the Teflon coating layer 32 on the side facing the cell-type panel 100, the impact of the Teflon-coating layer 32 upon contact with the cell- (100) is prevented from being damaged.

The formation of the thin film 200 on the cell-type panel 100 through the cell-type panel fixing apparatus A for sputtering according to the present invention will be described in detail as follows.

In the present invention, each of the plurality of cell-type panels 100 cut from the disk panel to a predetermined size is disposed between the front cover 10 and the rear cover 20.

Accordingly, the front surface of the cell-type panel 100 is supported by the front cover 10, and the rear surface of the cell-type panel 100 is supported by the rear cover 20.

In the present invention, the mask 30 is seated in the seating groove 11 of the front cover 10 and contacts the cell-type panel 100 as shown in FIG.

The front cover 10 has a first slit 12 disposed adjacent to an upper side and a lower side of each of the cell-type panels 100, and the mask 30 has a first slit 12 And a second slit 31 corresponding to the second slit 31.

Therefore, if sputtering is performed on the side of the front cover 10 as a sputtering apparatus, the particles evaporated in the sputtering apparatus are moved to the cell-type panel 100 through the first slit 12 and the second slit 31 As shown in FIG. 7, a band-shaped thin film 200 is formed at the edge of each of the cell-type panels 100.

However, when the mask 30 and the cell-type panel 100 are twisted during the sputtering process, the formation of the thin film 200 on the edge of the cell-type panel 100 may be poor.

However, in the present invention, the mounting grooves 11 are arranged to be inclined by 5-10 from the horizontal state, and the mask 30 and the cell-type panel 100 accommodated therein are wobbled by their own weight, The one side surface is naturally brought into contact with the lower end surface and one side surface of the seating groove 11, so that it is prevented that the seating groove 11 is tilted.

Accordingly, defective formation of the thin film 200 on the edge of the cell-type panel 100 due to the deformation of the mask 30 and the cell-type panel 100 during the sputtering process is prevented.

In addition, when a clearance is generated between the mask 30 and the cell-type panel 100 during the sputtering process, the formation of the thin film 200 on the edge of the cell-type panel 100 may be poor.

However, in the present invention, as shown in FIG. 4, the rear cover 20 has the first magnetic material 22 disposed at an edge portion facing the cell-type panel 100 with an interval, Since the rear cover 20 is attached to the front cover 10 side by the magnetic force of the rear cover 20 so that the rear cover 20 and the front cover 10 are easily engaged, The mask 30 and the front cover 10 are closely contacted with each other so that the mask 30 is in close contact with the cell-type panel 100. Therefore, during the sputtering process, the gap between the mask 30 and the cell- Occurrence is prevented.

Accordingly, in the sputtering process, defects in the formation of the thin film 200 on the edge of the cell-type panel 100 due to occurrence of clearance between the mask 30 and the cell-type panel 100 are prevented.

 On the other hand, when the front cover 10 flows, the engagement of the front cover 10 and the rear cover 20 may be poor.

However, the present invention includes a fixed block 40 having a plurality of second magnetic bodies 41, and the front cover 10 is closely contacted to the fixed block 40, and the second magnetic body 41 So that the front cover 10 is prevented from flowing.

Therefore, a defective connection between the front cover 10 and the rear cover 20 due to the flow of the front cover 10 during the engagement of the front cover 10 and the rear cover 20 is prevented.

In this case, when the magnetic force from the first magnetic body 22 is applied to the front cover 10, the rear cover 20 is fixed to the front cover 10, It may be difficult to move the position.

However, in the present invention, any one of the second magnetic bodies 41 provided in the fixed block 40 is disposed at an interval with a polarity opposite to that of any other one of the adjacent second magnetic bodies 41, So that the first magnetic body 22 is prevented from being attracted to the second magnetic body 41 so that the first magnetic body 22 is prevented from being attracted to the first magnetic body 22, The rear cover 20 can be moved.

Therefore, alignment of the rear cover 20 on the front cover 10, that is, forward movement of the rear cover 20 is facilitated.

As described above, the rear cover 20 is attached to the front cover 10 by the magnetic force from the first magnetic body 22 in the cell type panel fixing device A for sputtering according to the present invention, Since the mask 30 between the cell cover 20 and the front cover 10 and the cell-type panel 100 are closely contacted with each other, the defective formation of the thin film 200 due to the separation between the mask 30 and the cell- And a plurality of seating grooves 11 in which the plurality of cell-type panels 100 are accommodated are provided in the front cover 10 and the first slits 12 provided in the respective seating grooves 11 are formed in a cell- The second slit 31 provided on the mask 30 corresponds to the first slit 12 and the front cover 10 and the rear cover 10 are disposed adjacent to the upper side and the lower side of the panel 100, After the mask 30 and the cell-type panel 100 are supported by the support member 20 by sputtering on the side of the front cover 10, Forming the strip-form film 200 on the rib can be facilitated.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, And are within the scope of protection of the present invention.

10: front cover 11: seat groove
12: first slit 14:
15: projecting member 15a: coil spring
20: rear cover 21: opening cover
22: first magnetic body 23: Teflon coating layer
30: mask 31: second slit
32: Teflon coating layer 40: Fixed block
41: second magnetic body 100: cell-type panel
200: Thin film A: Cell-type panel fixing device

Claims (16)

A front cover having a plurality of seating grooves for supporting the front surfaces of the plurality of cell-type panels, each seating groove for receiving the cell-type panels, and a first slit passing through the front and rear surfaces inside each of the seating grooves of each of the seating grooves; A plurality of rear covers each supporting a cell type back surface of the cell type panel and having a plurality of first magnetic bodies arranged at intervals in the edge portion, and a plurality of second magnetic bodies arranged between the front cover and the rear cover, And a plurality of masks having a second slit,
Wherein the seating groove of the front cover
The mask and the cell-type panel received in the inside of the seating groove are wobbled by their own weight, and the mask and one side surface of the mask and the cell-type panel are naturally contacted with the bottom surface and one side surface of the seating groove, It is arranged to be inclined 5-10 ° from the horizontal state so as to prevent the deviation in the groove
Type panel fixing device for sputtering.
The cellular phone according to claim 1,
Which is either a display panel or a glass panel
Type panel fixing device for sputtering.
2. The light emitting device according to claim 1,
The upper and lower sides of each of the cell-type panels,
Type panel fixing device for sputtering.
2. The front cover according to claim 1,
And a supporting piece projecting inward from the four corners of each of the seating grooves
Type panel fixing device for sputtering.
5. The apparatus according to claim 4,
Being coupled to the front cover by bolting
Type panel fixing device for sputtering.
2. The front cover according to claim 1,
And a projecting member for pressing the rear cover accommodated in each of the seating grooves
Type panel fixing device for sputtering.
7. The apparatus according to claim 6,
Being formed so as to be rotatable inward and outward of each of the seating grooves
Type panel fixing device for sputtering.
7. The apparatus according to claim 6,
Resiliently supported by coil springs
Type panel fixing device for sputtering.
2. The front cover according to claim 1,
And a fixed block having a plurality of second magnetic bodies on the rear side thereof
Type panel fixing device for sputtering.
10. The magnetic sensor according to claim 9,
One of which is placed at an interval of opposite polarity from that of any other adjacent to it, the total quantity of one polarity being equal to the total quantity of the opposite polarity
Type panel fixing device for sputtering.
11. The magnetic head according to claim 10,
The total number of unipolarities being equal to or greater than the total number of the first magnetic bodies
Type panel fixing device for sputtering.
delete The rear cover according to claim 1,
And a Teflon coating layer on the surface facing the cell-type panel
Type panel fixing device for sputtering.
The rear cover according to claim 1,
Having a plurality of openings penetrating the front and rear surfaces
Type panel fixing device for sputtering.
The magnetic sensor according to claim 1,
Any one of them and any other neighboring one of them is arranged at an interval of the same polarity
Type panel fixing device for sputtering.
The lithographic apparatus according to claim 1,
And a Teflon coating layer on the surface facing the cell-type panel
Type panel fixing device for sputtering.
KR1020150053749A 2015-04-16 2015-04-16 cell type panel fixing device for sputtering KR101557019B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150053749A KR101557019B1 (en) 2015-04-16 2015-04-16 cell type panel fixing device for sputtering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150053749A KR101557019B1 (en) 2015-04-16 2015-04-16 cell type panel fixing device for sputtering

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020150111800A Division KR101580587B1 (en) 2015-08-07 2015-08-07 cell type panel fixing device for sputtering

Publications (1)

Publication Number Publication Date
KR101557019B1 true KR101557019B1 (en) 2015-10-02

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Application Number Title Priority Date Filing Date
KR1020150053749A KR101557019B1 (en) 2015-04-16 2015-04-16 cell type panel fixing device for sputtering

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Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101638344B1 (en) * 2015-12-04 2016-07-11 주식회사 유아이디 negative panel fixing device and method for sputtering
CN109487228A (en) * 2018-10-18 2019-03-19 芜湖研历光电科技有限公司 A kind of solder mask frame of apparatus for plasma chemical vapor deposition

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101638344B1 (en) * 2015-12-04 2016-07-11 주식회사 유아이디 negative panel fixing device and method for sputtering
CN109487228A (en) * 2018-10-18 2019-03-19 芜湖研历光电科技有限公司 A kind of solder mask frame of apparatus for plasma chemical vapor deposition
CN109487228B (en) * 2018-10-18 2023-02-21 芜湖研历光电科技有限公司 Mask frame of plasma chemical vapor deposition equipment

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