KR101515058B1 - 미스컷 기판들 상에 성장된 평면 비극성 ｍ-면 Ⅲ 족 질화물 막들 - Google Patents

미스컷 기판들 상에 성장된 평면 비극성 ｍ-면 Ⅲ 족 질화물 막들 Download PDF

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KR101515058B1
KR101515058B1 KR1020097027548A KR20097027548A KR101515058B1 KR 101515058 B1 KR101515058 B1 KR 101515058B1 KR 1020097027548 A KR1020097027548 A KR 1020097027548A KR 20097027548 A KR20097027548 A KR 20097027548A KR 101515058 B1 KR101515058 B1 KR 101515058B1
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miscut
polar
nitride film
substrate
iii
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KR20100029783A (ko
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아사코 히라이
즈홍유안 지아
마코토 사이토
히사시 야마다
켄지 이소
스티븐 피 덴바스
슈지 나카무라
제임스 에스 스펙
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더 리전츠 오브 더 유니버시티 오브 캘리포니아
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KR1020097027548A 2007-06-15 2008-06-16 미스컷 기판들 상에 성장된 평면 비극성 ｍ-면 Ⅲ 족 질화물 막들 Active KR101515058B1 (ko)

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WO2009097611A1 (en) 2008-02-01 2009-08-06 The Regents Of The University Of California Enhancement of optical polarization of nitride light-emitting diodes by wafer off-axis cut
US8795430B2 (en) * 2009-03-02 2014-08-05 The Regents Of The University Of California Method of improving surface morphology of (Ga,Al,In,B)N thin films and devices grown on nonpolar or semipolar (Ga,Al,In,B)N substrates
JP4375497B1 (ja) 2009-03-11 2009-12-02 住友電気工業株式会社 Ｉｉｉ族窒化物半導体素子、エピタキシャル基板、及びｉｉｉ族窒化物半導体素子を作製する方法
CN102575384B (zh) * 2009-10-16 2015-10-14 日本碍子株式会社 基底基板、第13族氮化物结晶及其制法
WO2011109754A1 (en) * 2010-03-04 2011-09-09 The Regents Of The University Of California Semi-polar iii-nitride optoelectronic devices on m-plane substrates with miscuts less than +/-15 degrees in the c-direction
US20110233521A1 (en) * 2010-03-24 2011-09-29 Cree, Inc. Semiconductor with contoured structure
CN103959437B (zh) 2011-09-30 2017-08-01 圣戈班晶体及检测公司 具有特定结晶特征的iii‑v族衬底材料及其制备方法
TWI529964B (zh) 2012-12-31 2016-04-11 聖戈班晶體探測器公司 具有薄緩衝層的iii-v族基材及其製備方法
CN113013302A (zh) * 2021-02-26 2021-06-22 东莞市中麒光电技术有限公司 InGaN基红光LED芯片结构的制备方法
CN113640328B (zh) * 2021-08-12 2024-01-23 安徽长飞先进半导体有限公司 基于x射线的AlGaN层Al组分测定方法
KR102564956B1 (ko) * 2021-11-25 2023-08-08 재단법인대구경북과학기술원 사파이어 미스컷 기판을 이용한 무자기장 스핀궤도토크 스위칭 소자
CN114899258B (zh) * 2022-04-08 2024-03-12 华南理工大学 非极性AlGaN基深紫外光电探测器外延结构及其制备方法

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US20120175739A1 (en) 2012-07-12
US20140291694A1 (en) 2014-10-02
TWI604512B (zh) 2017-11-01
US9828695B2 (en) 2017-11-28
US20160230312A1 (en) 2016-08-11
TW200915394A (en) 2009-04-01
US8791000B2 (en) 2014-07-29
US20080308907A1 (en) 2008-12-18
TW201515068A (zh) 2015-04-16
US9340899B2 (en) 2016-05-17
TWI469186B (zh) 2015-01-11
US20140138679A1 (en) 2014-05-22
JP2010529943A (ja) 2010-09-02
US8691671B2 (en) 2014-04-08

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