KR101512705B1 - 홈 가공 툴 및 이것을 이용한 박막 태양 전지의 홈 가공 방법 그리고 홈 가공 장치 - Google Patents
홈 가공 툴 및 이것을 이용한 박막 태양 전지의 홈 가공 방법 그리고 홈 가공 장치 Download PDFInfo
- Publication number
- KR101512705B1 KR101512705B1 KR1020130030249A KR20130030249A KR101512705B1 KR 101512705 B1 KR101512705 B1 KR 101512705B1 KR 1020130030249 A KR1020130030249 A KR 1020130030249A KR 20130030249 A KR20130030249 A KR 20130030249A KR 101512705 B1 KR101512705 B1 KR 101512705B1
- Authority
- KR
- South Korea
- Prior art keywords
- solar cell
- thin film
- film solar
- groove processing
- groove
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 52
- 238000003672 processing method Methods 0.000 title claims description 3
- 238000003754 machining Methods 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 25
- 239000010410 layer Substances 0.000 description 16
- 238000000926 separation method Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000224 chemical solution deposition Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 239000002346 layers by function Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C3/00—Milling particular work; Special milling operations; Machines therefor
- B23C3/28—Grooving workpieces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2012-081865 | 2012-03-30 | ||
JP2012081865A JP5804999B2 (ja) | 2012-03-30 | 2012-03-30 | 溝加工ツールおよびこれを用いた薄膜太陽電池の溝加工方法ならびに溝加工装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20130111328A KR20130111328A (ko) | 2013-10-10 |
KR101512705B1 true KR101512705B1 (ko) | 2015-04-16 |
Family
ID=49368481
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020130030249A KR101512705B1 (ko) | 2012-03-30 | 2013-03-21 | 홈 가공 툴 및 이것을 이용한 박막 태양 전지의 홈 가공 방법 그리고 홈 가공 장치 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5804999B2 (ja) |
KR (1) | KR101512705B1 (ja) |
CN (1) | CN103367535B (ja) |
TW (1) | TWI498295B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104952971B (zh) * | 2014-03-28 | 2017-09-19 | 三星钻石工业股份有限公司 | 沟槽加工工具及安装有该沟槽加工工具的刻划装置 |
JP6406006B2 (ja) * | 2014-03-28 | 2018-10-17 | 三星ダイヤモンド工業株式会社 | 溝加工ツール並びにこの溝加工ツールを取り付けたスクライブ装置 |
JP6332618B2 (ja) * | 2014-04-24 | 2018-05-30 | 三星ダイヤモンド工業株式会社 | スクライブ用カッターホイール並びにスクライブ装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009119543A (ja) * | 2007-11-13 | 2009-06-04 | Toshiba Corp | 微細加工用工具、微細加工用工具の製造方法、精密デバイス、及び精密デバイスの製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4083390A (en) * | 1972-09-22 | 1978-04-11 | R.E. Ingham & Co., Limited | Grooving of sheet material |
JPH03161209A (ja) * | 1989-11-17 | 1991-07-11 | Fujitsu Ltd | テーパ孔加工方法およびその加工装置 |
JP2000315809A (ja) * | 1999-03-04 | 2000-11-14 | Matsushita Electric Ind Co Ltd | 集積型薄膜太陽電池の製造方法およびパターニング装置 |
JP2002033498A (ja) * | 2000-07-17 | 2002-01-31 | Matsushita Electric Ind Co Ltd | 集積型薄膜太陽電池の製造方法およびパターニング装置 |
SG147307A1 (en) * | 2001-11-08 | 2008-11-28 | Sharp Kk | Method and apparatus for cutting apart a glass substrate, liquid crystal panel, and apparatus for fabricating a liquid crystal panel |
JP3867230B2 (ja) * | 2002-09-26 | 2007-01-10 | 本田技研工業株式会社 | メカニカルスクライブ装置 |
KR20050115793A (ko) * | 2004-06-05 | 2005-12-08 | 주식회사 대흥케미칼 | 공작기계용 다면가공 바이트 |
JP4580325B2 (ja) * | 2005-11-14 | 2010-11-10 | 本田技研工業株式会社 | リーマ及びドリル並びに加工方法 |
JP2007245278A (ja) * | 2006-03-15 | 2007-09-27 | Mitsubishi Materials Kobe Tools Corp | エンドミル |
JP2009255189A (ja) * | 2008-04-14 | 2009-11-05 | Sodick Co Ltd | マシニングセンタの工具交換システム |
JP2010199242A (ja) * | 2009-02-24 | 2010-09-09 | Mitsuboshi Diamond Industrial Co Ltd | 集積型薄膜太陽電池の製造方法 |
JP5308892B2 (ja) * | 2009-04-01 | 2013-10-09 | 三星ダイヤモンド工業株式会社 | 集積型薄膜太陽電池の製造装置 |
JP5436007B2 (ja) * | 2009-04-06 | 2014-03-05 | 株式会社シライテック | 太陽電池パネルの製膜スクライブ装置 |
JP5295369B2 (ja) * | 2009-06-29 | 2013-09-18 | 京セラ株式会社 | 光電変換素子の製造方法 |
TWI451587B (zh) * | 2010-01-08 | 2014-09-01 | Mitsuboshi Diamond Ind Co Ltd | 薄膜太陽電池用溝加工工具 |
JP5369011B2 (ja) * | 2010-01-27 | 2013-12-18 | 三星ダイヤモンド工業株式会社 | 溝加工ツール及びこれを用いた薄膜太陽電池の溝加工方法 |
-
2012
- 2012-03-30 JP JP2012081865A patent/JP5804999B2/ja not_active Expired - Fee Related
-
2013
- 2013-03-08 TW TW102108199A patent/TWI498295B/zh active
- 2013-03-21 KR KR1020130030249A patent/KR101512705B1/ko not_active IP Right Cessation
- 2013-03-28 CN CN201310105510.0A patent/CN103367535B/zh not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009119543A (ja) * | 2007-11-13 | 2009-06-04 | Toshiba Corp | 微細加工用工具、微細加工用工具の製造方法、精密デバイス、及び精密デバイスの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN103367535A (zh) | 2013-10-23 |
JP2013211465A (ja) | 2013-10-10 |
TWI498295B (zh) | 2015-09-01 |
TW201339114A (zh) | 2013-10-01 |
CN103367535B (zh) | 2016-05-25 |
JP5804999B2 (ja) | 2015-11-04 |
KR20130111328A (ko) | 2013-10-10 |
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E701 | Decision to grant or registration of patent right | ||
LAPS | Lapse due to unpaid annual fee |