KR101507612B1 - 개선된 화학적 기계적 연마 패드, 및 그의 제조 및 사용 방법 - Google Patents

개선된 화학적 기계적 연마 패드, 및 그의 제조 및 사용 방법 Download PDF

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Publication number
KR101507612B1
KR101507612B1 KR1020080080160A KR20080080160A KR101507612B1 KR 101507612 B1 KR101507612 B1 KR 101507612B1 KR 1020080080160 A KR1020080080160 A KR 1020080080160A KR 20080080160 A KR20080080160 A KR 20080080160A KR 101507612 B1 KR101507612 B1 KR 101507612B1
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KR
South Korea
Prior art keywords
shape memory
polishing
matrix material
memory matrix
layer
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020080080160A
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English (en)
Korean (ko)
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KR20090018009A (ko
Inventor
리차드 디. 레하
라비찬드라 브이. 팔라파티
벤자민 존 비닝
Original Assignee
롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스, 인코포레이티드
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Priority claimed from US11/838,954 external-priority patent/US7458885B1/en
Application filed by 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스, 인코포레이티드 filed Critical 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스, 인코포레이티드
Publication of KR20090018009A publication Critical patent/KR20090018009A/ko
Application granted granted Critical
Publication of KR101507612B1 publication Critical patent/KR101507612B1/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C61/00—Shaping by liberation of internal stresses; Making preforms having internal stresses; Apparatus therefor
    • B29C61/06—Making preforms having internal stresses, e.g. plastic memory
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C70/00—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts
    • B29C70/58—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts comprising fillers only, e.g. particles, powder, beads, flakes, spheres
    • B29C70/66—Shaping composites, i.e. plastics material comprising reinforcements, fillers or preformed parts, e.g. inserts comprising fillers only, e.g. particles, powder, beads, flakes, spheres the filler comprising hollow constituents, e.g. syntactic foam
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Composite Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Semiconductor Integrated Circuits (AREA)
KR1020080080160A 2007-08-15 2008-08-14 개선된 화학적 기계적 연마 패드, 및 그의 제조 및 사용 방법 Expired - Fee Related KR101507612B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11/838,954 2007-08-15
US11/838,954 US7458885B1 (en) 2007-08-15 2007-08-15 Chemical mechanical polishing pad and methods of making and using same
US12/103,292 2008-04-15
US12/103,292 US8221196B2 (en) 2007-08-15 2008-04-15 Chemical mechanical polishing pad and methods of making and using same

Publications (2)

Publication Number Publication Date
KR20090018009A KR20090018009A (ko) 2009-02-19
KR101507612B1 true KR101507612B1 (ko) 2015-03-31

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080080160A Expired - Fee Related KR101507612B1 (ko) 2007-08-15 2008-08-14 개선된 화학적 기계적 연마 패드, 및 그의 제조 및 사용 방법

Country Status (5)

Country Link
US (2) US8221196B2 (https=)
EP (1) EP2025454B1 (https=)
JP (1) JP5340669B2 (https=)
KR (1) KR101507612B1 (https=)
TW (1) TWI444247B (https=)

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US9493643B2 (en) * 2011-05-06 2016-11-15 Board Of Supervisors Of Louisiana State University And Agricultural And Mechanical College Thermosetting shape memory polymers with ability to perform repeated molecular scale healing
US9406971B2 (en) 2011-07-01 2016-08-02 GM Global Technology Operations LLC Shape memory polymer containing composite materials
US20130017762A1 (en) * 2011-07-15 2013-01-17 Infineon Technologies Ag Method and Apparatus for Determining a Measure of a Thickness of a Polishing Pad of a Polishing Machine
US9421669B2 (en) * 2012-07-30 2016-08-23 Globalfoundries Singapore Pte. Ltd. Single grooved polishing pad
US9522454B2 (en) * 2012-12-17 2016-12-20 Seagate Technology Llc Method of patterning a lapping plate, and patterned lapping plates
DE102013203116A1 (de) * 2013-02-26 2014-08-28 Robert Bosch Gmbh Schleifmittelvorrichtung
WO2015050642A1 (en) * 2013-10-03 2015-04-09 Applied Materials, Inc. Cmp equipment using magnet responsive composites
US9421666B2 (en) * 2013-11-04 2016-08-23 Applied Materials, Inc. Printed chemical mechanical polishing pad having abrasives therein
KR20160147917A (ko) * 2014-05-02 2016-12-23 쓰리엠 이노베이티브 프로퍼티즈 컴파니 불연속된 구조화된 연마 용품 및 작업편의 연마 방법
JP7066608B2 (ja) * 2015-09-25 2022-05-13 シーエムシー マテリアルズ，インコーポレイティド 化学機械的研磨パッド、基板を化学機械的に研磨する方法、及び化学機械的研磨パッドを製造する方法
US20170232573A1 (en) * 2016-02-12 2017-08-17 Kabushiki Kaisha Toshiba Polishing member and semiconductor manufacturing method
US11866594B2 (en) 2017-06-27 2024-01-09 Lawrence Livermore National Security, Llc Elastomeric shape memory polymer composites
US12516216B2 (en) 2017-06-27 2026-01-06 Lawrence Livermore National Security, Llc Microballoon-facilitated tunable porosity of elastomeric shape memory polymer composites
WO2019139586A1 (en) * 2018-01-11 2019-07-18 Intel Corporation Magnetic polishing pad and platen structures for chemical mechanical polishing
US10654146B2 (en) 2018-01-23 2020-05-19 Seagate Technology Llc One or more charging members used in the manufacture of a lapping plate, and related apparatuses and methods of making
US11697183B2 (en) 2018-07-26 2023-07-11 Taiwan Semiconductor Manufacturing Co., Ltd. Fabrication of a polishing pad for chemical mechanical polishing
KR102174958B1 (ko) * 2019-03-27 2020-11-05 에스케이씨 주식회사 결함 발생을 최소화시키는 연마패드 및 이의 제조방법
JP2024509813A (ja) 2021-03-05 2024-03-05 サンーゴバン アブレイシブズ，インコーポレイティド 研磨物品及びそれを形成するための方法
WO2022187720A1 (en) * 2021-03-05 2022-09-09 Saint-Gobain Abrasives, Inc. Abrasive articles and methods for forming same
CN118591435A (zh) 2021-12-30 2024-09-03 圣戈班磨料磨具有限公司 磨料制品及其形成方法
EP4457058A4 (en) 2021-12-30 2026-01-07 Saint Gobain Abrasives Inc ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
KR102769305B1 (ko) * 2023-12-12 2025-02-14 케이피엑스케미칼 주식회사 폐연마패드 재생방법 및 이 방법으로 재생된 재생 연마패드

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EP2025460A2 (en) * 2007-08-15 2009-02-18 Rohm and Haas Electronic Materials CMP Holdings, Inc. Improved chemical mechanical polishing pad and methods of making and using same
KR20090017993A (ko) * 2007-08-15 2009-02-19 롬 앤드 하스 일렉트로닉 머티리얼스 씨엠피 홀딩스, 인코포레이티드 화학적 기계적 연마를 위한 상호침투 망상조직
US20090258573A1 (en) 2008-04-15 2009-10-15 Muldowney Gregory P Chemical Mechanical Polishing Method

Also Published As

Publication number Publication date
US20120252324A1 (en) 2012-10-04
JP5340669B2 (ja) 2013-11-13
US8221196B2 (en) 2012-07-17
EP2025454B1 (en) 2018-04-25
EP2025454A2 (en) 2009-02-18
EP2025454A3 (en) 2017-04-26
KR20090018009A (ko) 2009-02-19
US8535119B2 (en) 2013-09-17
TWI444247B (zh) 2014-07-11
TW200906555A (en) 2009-02-16
JP2009078348A (ja) 2009-04-16
US20090258575A1 (en) 2009-10-15

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