KR101434985B1 - Pre-assembly final inspection device for LCD and inspection method using the same - Google Patents

Abstract

The apparatus and method for pre-bonding a liquid crystal display according to the present invention include a color filter substrate module in a non-adhering state having a configuration before an LCD adhesion process, and a liquid crystal cell And a driving signal input unit for inputting a driving signal to the TFT array substrate module or the TFT array substrate module to be inspected, the color filter substrate module and the TFT array substrate module to be inspected, wherein the backlight unit emits light at the back surface of the TFT array substrate module to be inspected, The TFT array substrate module to be inspected between the liquid crystal sheet and the backlight unit is inserted to check whether or not the TFT array substrate module is defective while realizing almost the same as the state after the adhesion, , Reliability of substrate inspection can be enhanced, economic loss can be minimized, and productivity can be improved.

Adhesion, color filter, TFT, PDLC, defective, backlight, polarizing film

Description

TECHNICAL FIELD [0001] The present invention relates to a pre-assembly final inspection device for LCD,

1 is a sectional view showing the internal structure of a general liquid crystal display device,

FIG. 2 is a schematic view showing an inspection structure of a conventional liquid crystal display device before adherence,

FIG. 3 is a schematic cross-sectional view showing an inspection structure of a conventional liquid crystal display device after adhesion,

FIG. 4 is a diagram showing a pre-attachment inspection apparatus of a liquid crystal display according to the present invention,

5 is a configuration diagram of a test state using a pre-attachment inspection apparatus of a liquid crystal display device according to the present invention,

6 is a configuration diagram of a test state using a pre-attachment inspection apparatus of a liquid crystal display device according to another embodiment of the present invention,

7 is a detailed view showing one embodiment of a liquid crystal sheet according to the present invention,

8 is a detailed view showing another embodiment of the liquid crystal sheet according to the present invention,

FIG. 9 is a flowchart showing a pre-stick inspection method of a liquid crystal display according to the present invention.

Description of the Related Art

50: color filter substrate module 51: upper substrate

52: color filter 53: common electrode

60: TFT array substrate module 61: lower substrate

62: TFT array 63: pixel electrode

70: liquid crystal sheet 80: backlight unit

90: drive signal input section

The present invention relates to an inspection apparatus and method for a liquid crystal display (hereinafter, referred to as 'LCD'), and more particularly, to an inspection apparatus and method for a liquid crystal display The present invention relates to an apparatus and method for pre-attachment inspection of a liquid crystal display device which can be inspected beforehand.

2. Description of the Related Art In general, an LCD displays an image corresponding to a video signal on a liquid crystal substrate on which liquid crystal cells are arranged in a matrix by adjusting a light transmittance of liquid crystal cells according to a video signal. TFTs are mainly used as switching elements in an active matrix type LCD.

1 is a sectional view showing the internal structure of a general LCD.

As shown, the LCD includes a color filter substrate module 10 patterned with R, G, and B colors, a TFT array substrate module 20 patterned with elements capable of controlling electrical signals of each pixel, A liquid crystal 35 capable of controlling the passage of light with optical anisotropy between the two substrate modules 10 and 20 and a backlight unit 40 for emitting light from the back surface of the TFT array substrate module 20 ) And the like.

The color filter substrate module 10 includes a color filter 12, a common electrode 13 and an alignment film 14 sequentially formed on an upper substrate 11. The TFT array substrate module 20 includes a lower substrate The TFT array 22, the pixel electrode 23, and the alignment film 24 are sequentially formed on the substrate 21.

A spacer or a sealing material 30 is provided between the color filter substrate module 10 and the TFT array substrate module 20 to maintain a gap therebetween and the liquid crystal 35 is injected into the space.

The LCD having such a structure has a very fine lattice shape with a pitch of 80 to 300 μm or the like of the basic structure pattern, which is manufactured by the same photolithography or photo process as the semiconductor process.

At this time, various defects such as color drop, protrusion, pinhole, unevenness, disconnection, and short can occur in the color filter 12 and the TFT array 22, and when they are leaked, the color filter 12 and the TFT array 22 have a considerable influence on the yield, The TFT array substrate module 20, the cell panel, and the like are inspected for defects by various inspection methods, and subjected to processes such as correction and disposal.

The LCD inspection method includes a method of inspecting two substrate modules 10 and 20 in an unattached state and a method of inspecting the two substrate modules 10 and 20 after they are attached to each other. do.

First, the inspection of the substrate prior to the laminating is carried out by using a scan stain (Coater), a lens stain (exposure light) generated in the color filter substrate module 10 or the TFT array substrate module 20 before the two substrate modules 10, ), Electrode smear, critical dimension (CD), and column space (CS) are mainly inspected. The inspection method is performed by a method of light reflection and light transmission.

That is, in the state of the TFT array substrate module 20 in which the color filter substrate module 10 in which the color filter is constituted or the TFT film is constituted, as shown in Fig. 2, in the transmission light 1 or the reflection light 3, 20 are recognized by the image pickup element 5 and subjected to image processing. At this time, a manual inspection by the naked eye may be performed instead of the automatic inspection by the image pickup device 5. [

In particular, in the case of color spots, in the state of the color filter substrate module 10 and the TFT array substrate module 20, a special inspection is performed by examining the special illumination due to the characteristics that can not be seen with the naked eye.

However, in the case of inspecting the color filter substrate module 10 and the TFT array substrate module 20 individually, the pre-adhesion inspection method may be applied to the case where the defect of the stain etc. occurring after the two substrate modules 10, Which is difficult to accurately detect.

That is, in the conventional pre-bonding inspection method, it is possible to perform stain inspection by CD, film thickness or the like due to stain inspection, interference of reflected light, diffraction and scattering occurring in a specific process, but after bonding two substrate modules 10 and 20, It is difficult to check a pixel by pixel in the inspection. In particular, since the correlation between the two substrate modules after bonding is unknown, it is very difficult to detect the defect in advance.

3, the liquid crystal 35 is injected between the color filter substrate module 10 and the TFT array substrate module 20 and is sealed by the sealing agent 30 In this case, the inspection of the stain, liquid crystal driving state, etc. is performed. In the inspection method, the backlight unit is driven or the liquid crystal is driven to perform an auto-probe inspection. do.

That is, in a state where the two substrate modules 10 and 20 are joined together, an electric signal is applied to the TFT array substrate module 20 and the color filter substrate module 10 through the driving signal input unit 45 and the backlight unit 40, And the display state is checked in a state in which various patterns are displayed. At this time, the film thickness of the color filter substrate module 10 and the TFT array substrate module 20 affects the liquid crystal behavior and senses the difference in the final transmissivity, and distinguishes specific color spots by pixel-by-pixel liquid crystal driving .

Such an inspection method probes a probe for driving a TFT and uses a necessary inspection system such as a pattern generator for applying an appropriate pattern.

However, in the post-adhesion inspection method as described above, defects that are not seen in the state of the color filter substrate module 10 and the TFT array substrate module 20 before the two substrate modules 10 and 20 are bonded together are transferred to the liquid crystal 35 And is often detected in an auto probe inspection that is performed in a final state after being subjected to a cell process such as a polarizer 14 and a polarizer 25 attached to the TFT array substrate module 20 are viewed from the light scattered by the liquid crystal 35, errors in inspection may occur due to differences in optical characteristics between the substrate module and the substrate module before the adhesion.

The TFT array substrate module 20, the liquid crystal 35, and the like, even if only one of the substrate modules of the two substrate modules 10 and 20 is defective. It is necessary to discard the entire product, so that it is impossible to regenerate the product, resulting in an increase in economic loss and a significant decrease in productivity.

It is an object of the present invention to provide a color filter substrate module and a TFT array substrate module in which a liquid crystal sheet is inserted between an uncoated color filter substrate module and a TFT array substrate module, So that the reliability of the inspection of the substrate can be enhanced, the economic loss can be minimized, and the productivity can be improved. In addition, And an inspection apparatus and method.

In particular, it is an object of the present invention to provide an apparatus and method for pre-bonding a liquid crystal display device which can be inspected while continuously replacing the TFT array substrate module in a non-bonded state.

In order to achieve the above object, there is provided an apparatus for inspecting a pre-adhesion of a liquid crystal display according to the present invention, comprising: a color filter substrate module in a non- A backlight unit for emitting light at the back surface of the TFT array substrate module to be inspected, a driving signal input for inputting a driving signal to the color filter substrate module and the TFT array substrate module or the TFT array substrate module to be inspected And inspecting whether or not the TFT array substrate module is defective by inserting a TFT array substrate module to be inspected between the liquid crystal sheet and the backlight unit.

Here, the liquid crystal sheet may have a structure in which liquid crystal is injected between the upper protective film and the lower protective film.

In addition, the liquid crystal sheet may have a structure in which liquid crystal is directly applied to the color filter substrate module, and a protective glass for protecting the liquid crystal is provided thereon.

It is preferable that a polymer dispersed liquid crystal (PDLC) is formed on the liquid crystal sheet.

A polarizing film may be provided on the upper part of the backlight unit or a polarizing film may be provided on the color filter substrate module or the inspection equipment in front of the color filter substrate module.

Next, an apparatus for inspecting a pre-adhesion of a liquid crystal display device according to the present invention for realizing the above-mentioned problems comprises a color filter substrate module in a non-adhered state in which a color filter, a common electrode and an orientation film are formed on an upper substrate, A liquid crystal sheet provided on a side of the module on which liquid crystal is injected, and a backlight unit for emitting light from the back surface of the TFT array substrate module; A TFT array substrate module in which a TFT array, a pixel electrode, and an alignment film are formed on a lower substrate is placed between the liquid crystal sheet and the backlight unit, and a driving signal is inputted to the color filter substrate module and the TFT array substrate module, So that the array substrate module can be inspected while being replaced.

A method for inspecting a liquid crystal display device according to the present invention for realizing the above object is characterized in that a liquid crystal sheet is attached to a color filter substrate module before an LCD adhesion process and a color filter substrate module In the state that the TFT array substrate module to be inspected is inserted between the units, the two substrate modules are laminated, and then the driving signal is input to the TFT array substrate module in a state in which the backlight unit is lit, .

According to another aspect of the present invention, there is provided a method of inspecting a liquid crystal display device, comprising: attaching a liquid crystal sheet to a color filter substrate module; configuring and setting a backlight unit and a drive signal input unit; Placing a TFT array substrate module to be inspected between the liquid crystal sheet and the backlight unit; Connecting the driving circuit to the TFT array substrate module after the step, aligning the two substrate modules by laminating them, and aligning the two substrate modules by each pixel; And checking whether the TFT array substrate module is defective while changing the driving signal in a state in which the backlight unit is turned on after the step.

Here, at least one of visual inspection and image inspection using an image pickup device can be used for the defect inspection.

It is preferable to separately inspect and inspect the TFT array substrate module that has been inspected after the step of inspecting whether or not the TFT array substrate module has been inspected, and to insert another TFT array substrate module to be inspected between the liquid crystal sheet and the backlight unit Do.

Here, the entire process can be performed in a vacuum chamber to facilitate separation of the TFT array substrate module.

Alternatively, the substrate may be separated while injecting air between the two substrate modules to facilitate separation of the TFT array substrate module.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

FIG. 4 is a configuration diagram showing a pre-stick inspection apparatus of a liquid crystal display according to the present invention, and FIG. 5 is a configuration diagram of a state of inspection using a pre-stick detector of the liquid crystal display according to the present invention.

The pre-attachment inspection apparatus of the liquid crystal display according to the present invention can be applied to a liquid crystal display device in which a liquid crystal sheet 70 5, while the TFT array substrate module 60 is being exchanged between the color filter substrate module 50 and the backlight unit 80, to which the two substrate modules 50 and 60 are attached, And it is possible to inspect whether or not the TFT array substrate module 60 is defective while realizing almost the same state as the after-bonding state.

The inspection apparatus of the present invention includes a color filter substrate module 50 having a color filter, a common electrode, an alignment film, and the like formed on an upper substrate, and a liquid crystal layer And a backlight unit 80 that emits light from the rear surface of the TFT array substrate module 60 to be inspected so that the TFT array substrate module 60 to be inspected is disposed between the liquid crystal sheet 70 and the backlight unit 70. [ The TFT array substrate module 60 is inspected while a driving signal is input to the color filter substrate module 50 and the TFT array substrate module 60 through the driving signal input unit 90 while being positioned between the unit 80 .

The main constituent parts of the inspection apparatus of the present invention constituted as described above will be described in detail.

For reference, the color filter substrate module 50 and the TFT array substrate module 60 shown in the drawing are schematically shown in a simplified form, and the present invention is not limited to the structure of the drawings. It is needless to say that the present invention can be applied to any substrate module in a state in which the substrate module is manufactured up to the state immediately before the coalescence of the substrate module. Thus, the basic configuration of the two substrate modules 50 and 60 will be briefly described with reference to the drawings.

First, the color filter substrate module 50 set in the apparatus of the present invention is formed of one set of the color filter 52, the common electrode 53, and the alignment film 54 sequentially formed on the upper substrate 51 .

The color filter 52 may be formed by applying a material that transmits only light of a specific wavelength (R, G, B) by applying a white light source to the entire surface of the upper substrate 51, and then patterning the material.

The common electrode 53 is formed of a transparent conductive film to which a ground potential is supplied on an upper substrate 51 on which a color filter 52 is formed.

The alignment film 54 is formed by applying polyimide on the common electrode 53.

In FIG. 4, reference numeral 55 denotes a polarizing plate or a polarizing film attached to the upper substrate 51.

The color filter substrate module 50 having the color filter 52, the common electrode 53 and the alignment film 54 formed on the upper substrate 51 as described above is mounted on the TFT array substrate module 60 It is most preferable that all the constituent elements are completely provided on the upper substrate 51. The constituent elements of the upper substrate 51 are not necessarily limited to the constitution in which all the constituent elements are completely provided, It is possible to check whether or not the substrate module is defective.

That is, in the color filter substrate module 50, the viewer or the camera polarizing film or the polarizing plate 55 for inspection are not installed, and as shown by the hidden line of FIG. 5, the front end of the camera lens 100, The small polarizing film 110 or the polarizing plate 110 may be placed on the small polarizing plate 110. If necessary, the small polarizing plate 110 may be rotated while the amount of polarized light is adjusted.

In addition, IPS of the LCD type, that is, IPS of the PVA, may be configured such that the common electrode is not formed on the color filter substrate module 50. At this time, all the electrodes are formed on the same surface of the TFT array substrate module 60 'as shown in FIG.

4, the TFT array substrate module 60 to be inspected to the upper portion of the backlight unit 80 is turned on and off by the upper and lower conveying devices, It may be configured such that inspection can be performed in a state of being lowered as shown in FIG. 5 by the transporting equipment.

7, the liquid crystal sheet 70 is attached to the side where the color filter 52 of the color filter substrate module 50 is formed. The liquid crystal sheet 70 includes the upper protective film 71 and the lower protective film 73, And a liquid crystal sealed sheet in which a liquid crystal 75 is injected into an inner space of the liquid crystal 75. The liquid crystal 75 to be injected at this time is preferably a polymer dispersed liquid crystal (PDLC) The liquid crystal is prepared by curing UV or other method after combining liquid crystal and polymer.

The upper protective film 71 and the lower protective film 73 may be substantially transparent sheets that protect the PDLC, but the lower protective film 73 may be formed in a manner such that the TFT array substrate module 60 to be inspected It is preferable that it is made of a protective glass having sufficient rigidity.

8, the liquid crystal sheet 70 'is formed by applying a liquid crystal 75' to the surface on which the color filter 52 of the color filter substrate module 50 is placed, And a protection film or protective film 73 'for protecting the protective film 73'. The liquid crystal to be used at this time may be PDLC as described above, but it is not necessarily limited thereto, and it is also possible to use a general liquid crystal used for LCD.

The liquid crystal sheets 70 and 70 'as shown in FIGS. 7 and 8 are inserted between the color filter substrate module 50 and the TFT array substrate module 60 in the pre-attachment state, 60, and 60 to inspect the two substrate modules 50 and 60. In this embodiment,

The backlight unit 80 is a means for emitting light from the back surface of the TFT array substrate module 60 when the LCD module is constructed after the two substrate modules 50 and 60 are assembled together. It is possible to inspect whether or not the TFT array substrate module 60 is defective by using the backlight unit 80 having the same condition as that of the backlight unit assembled after bonding.

It is preferable that the backlight unit 80 is installed in a state of being supported on the base 85.

The driving signal input unit 90 is connected to the color filter substrate module 50 and the common electrode 53 of the TFT array substrate module 60 to be inspected, the TFT array 62, the pixel electrode 63, A pixel, a line, or the like generated in the TFT array substrate module 60 by applying an electric signal substantially similar to an LCD driving signal to the two substrate modules 50 and 60 to adjust the light transmittance through the liquid crystal of the liquid crystal sheet 70, And a defective and defective portion of the defect.

In the figure, reference numeral 93 denotes a connector capable of inputting a driving signal to an electrode provided in the TFT array substrate module 60 to be inspected. 4 and 5, electrodes are connected to both the color filter substrate module 50 and the TFT array substrate module 60. However, as shown in FIG. 6, only the TFT array substrate module 60 ' When the electrode is provided, a connector 93 'for transmitting a signal of the driving signal input unit 90' to the TFT array substrate module 60 'is provided.

5, the inspection apparatus of the present invention further includes, on top of the color filter substrate module 50, equipment such as an image pickup device such as a camera 100 for inspection, in addition to the above components . Of course, visual inspection without inspection equipment is also possible.

In addition, in the process of detaching the TFT array substrate module 60 inspected after performing the defect inspection in the laminated state of the color filter substrate module 50, the liquid crystal sheet 70, and the TFT array substrate module 60, The separation between the sheet 70 and the backlight unit 80 can be difficult due to the influence of the surface tension and the like. In this case, a vacuum chamber in which inspection of the substrate module can be performed in a vacuum atmosphere, A separating air injection device for blowing air or gas between the module 60 and the TFT array substrate module 60 and the backlight unit 80 to separate the TFT array substrate module 60 can be provided.

Next, the structure of the TFT array substrate module 60 to be inspected will be briefly described.

The TFT array substrate module 60 is composed of one set of a TFT array 62, a pixel electrode 63, an orientation film 64, and a polarizing film 67 sequentially formed on a lower substrate 61.

The TFT array 62 is composed of a gate electrode connected to the gate line, a source electrode connected to the data line, and a drain electrode connected to the pixel electrode through the contact hole, as a main constituent part of the LCD switching the driving of the liquid crystal cell. A gate insulating film for insulating the gate electrode from the source electrode and the drain electrode, and a semiconductor layer for forming a conduction channel between the source electrode and the drain electrode by a gate voltage supplied to the gate electrode. Since such a configuration is well-known, a detailed illustration is omitted in the drawings.

The pixel electrode 63 is formed on a protective film 65 applied to the entire surface of the lower substrate 61 and is electrically connected to the drain electrode of the TFT through a contact hole formed in the protective film 65.

The alignment layer 64 is formed on the lower substrate 61 on which the pixel electrode 63 is formed.

The TFT array substrate module 60 in which the TFT array 62, the pixel electrode 63 and the alignment film 64 are formed on the lower substrate 61 in the final state before being adhered to the color filter substrate module 50 The present invention is not limited to the configuration in which all of the components are completely installed in the lower substrate 61. Even if some configuration such as the alignment film 64 is not provided depending on the inspection conditions, . ≪ / RTI >

Hereinafter, the inspection method of the present invention using the inspection apparatus according to the present invention will be described.

FIG. 9 is a flowchart showing a pre-stick inspection method of a liquid crystal display according to the present invention.

The liquid crystal display device 70 according to the present invention is characterized in that a liquid crystal sheet 70 is attached to the color filter substrate module 50 before the LCD adhesion process and the inspection is performed between the liquid crystal sheet 70 and the backlight unit 80 The backlight unit 80 is caused to emit light while a driving signal is inputted to the two substrate modules 50 and 60 while the TFT array substrate module 60 is being positioned, .

9, a liquid crystal sheet 70 is first attached to the color filter substrate module 50, and the backlight unit 80 and the driving signal input unit 90 are constructed (S ₁ ).

Next, the TFT array substrate module 60 to be inspected is put between the liquid crystal sheet 70 and the backlight unit 80 (S ₂ ) with the component parts set as described above. The manufacturing method of the TFT array substrate module 60 to be introduced at this time is generally well-known technology, and thus a detailed description thereof will be omitted.

Next, the two board modules (50, 60) to the drive signal input connection of the drive circuit 90, and also as well as adhesion by laminating two substrates, modules 50 and 60 and arranged for each pixel (S _{3), (4} S ). As shown in FIG. 5, the two substrate modules 50 and 60 are stacked in a state in which they are completely in close contact with each other with the liquid crystal sheet 70 interposed therebetween so as to have substantially the same conditions as those after the actual LCD sticking process.

Next, in a state in which the backlight unit 80 is turned on, it is checked whether the two substrate modules 50 and 60 are defective (S ₅ ) (S ₆ ) while changing the driving signal.

At this time, the inspection method examines defects such as pixels, lines, or noises generated in the TFT array substrate module 60 by using a device such as a visual inspection or an image inspection using an image pickup device. 5, the small polarizing plate 110 may be placed in front of the lens of the inspection camera 100 or in front of the inspector. In this case, the small polarizing plate 110 may be inspected, While adjusting the amount of polarization.

As described above, the TFT array substrate module 60 can be inspected with a size of a disk substrate module capable of fabricating a plurality of cell panels, which are not cut into unit cell panels, so that the whole substrate module can be effectively inspected in a short time, Efficiency and productivity can be enhanced.

Next, the TFT array substrate module 60 having been inspected is ejected while the color filter substrate module 50 is lifted, and another TFT array substrate module to be newly inspected is placed between the liquid crystal sheet 70 and the backlight unit 80 (S ₇ ) (S ₈ ).

Here, the inspection may be difficult to separate the TFT array substrate module 60 from the liquid crystal sheet 70 and the backlight unit 80 due to the influence of surface tension and the like. In order to facilitate separation of the TFT array substrate module 60 When the inspection of the TFT array substrate module 60 is completed, the vacuum atmosphere is released to separate the TFT array substrate module.

Further, in addition to the method using a vacuum chamber, an air jetting device for separation or an air supplying device may be used to provide a space between the TFT array substrate module 60 and the liquid crystal sheet 70 or between the TFT array substrate module 60 and the backlight unit 80 The substrate may be separated while injecting air into the substrate.

In the present invention, the TFT array substrate module 60 to be inspected is replaced while the color filter substrate module 50, the liquid crystal sheet 70, the backlight unit 80, and the driving signal input unit 90 are set And the TFT array substrate module 60 can be exclusively tested. At this time, not only the unevenness of the TFT array substrate module 60 but also the operation of each TFT element can be checked.

The apparatus and method for pre-bonding a liquid crystal display according to the present invention configured and operated as described above have the following effects.

First, since the inspection of the TFT array substrate module is performed before the two substrates are bonded together, it is possible to solve the problem of disposal due to defects after the bonding process, thereby reducing the material cost and the yield, .

That is, since the TFT array substrate module is inspected before the laminating process, only the substrate having the defect is corrected or discarded, so that the entire LCD module after the laminating process is not wasted, thereby reducing the failure cost. In addition, since the determination of whether or not the LCD is defective is performed before the cementation, problems in the manufacturing process can be detected early, and defective products produced over a long period of time can be prevented until a defect is found in the final state. .

Next, the present invention has the effect of improving the inspection ability of the TFT array substrate module because the inspection is performed under the same condition as the final state. That is, by overcoming the difference between the pre-inspection and the final cell (CELL) inspection of the TFT array substrate module, the color filter substrate module, and the overkill or underkill smudge determination criteria, it is possible to detect only defects that are actually problematic without overkill or underkill problems and to detect defects that are not visible in a single substrate state as the final product state.

Next, the present invention is capable of inspecting the TFT array substrate module as a whole using a PDLC, thereby reducing inspection cost. In other words, it is possible to inspect the driving performance of the TFT element in addition to the inspection of the stain, and the inspection can be performed before cutting in units of cells, so that a large-area inspection is possible, and the inspection time of the LCD product can be drastically reduced.

In addition, auto macro functions can be implemented, array tester functions can be included, and manual macro functions can be implemented. Thus, automatic optical inspection (AOI) inspection, it is possible to drastically reduce the number of various inspection equipments, thereby reducing the investment cost of the inspection equipment and the construction and operation cost by reducing the foot print.

Claims (13)

A liquid crystal sheet attached to a side of the color filter substrate module on which liquid crystal is injected; A backlight unit facing the color filter substrate module with the liquid crystal sheet interposed therebetween and emitting light from the back surface of the TFT array substrate module to be inspected; A color filter substrate module, a TFT array substrate module to be inspected, and a drive signal input portion for inputting a drive signal to the TFT array substrate module to be inspected, The TFT array substrate module to be inspected is inserted between the liquid crystal sheet and the backlight unit, and the color filter substrate module to which the liquid crystal sheet is attached is closely contacted with the TFT array substrate module to be inspected, And to inspect whether or not the TFT array substrate module to be inspected is defective, The TFT array substrate module closely attached to the color filter substrate module to which the liquid crystal sheet is attached is separated after inspection, And a vacuum chamber for inspecting the TFT array substrate module in order to easily separate the TFT array substrate module after inspecting the TFT array substrate module in a vacuum atmosphere. The method according to claim 1, Wherein the liquid crystal sheet has a liquid crystal injected between an upper protective film and a lower protective film. The method according to claim 1, Wherein the liquid crystal sheet is directly coated with liquid crystal on the color filter substrate module, and a protective glass for protecting the liquid crystal is provided thereon. The method according to claim 1, Wherein the liquid crystal sheet comprises a polymer dispersed liquid crystal (PDLC). The method according to claim 1, And a polarizing film is provided on an upper portion of the backlight unit. The method according to any one of claims 1 to 5, Wherein the polarizing film is provided on the color filter substrate module or the inspection equipment in front of the color filter substrate module. A color filter substrate module in a non-adhered state in which a color filter, a common electrode, and an alignment film are formed on an upper substrate; A liquid crystal sheet provided on a side of the color filter substrate module on which liquid crystal is injected; And a backlight unit that emits light from the back surface of the TFT array substrate module to be inspected, A TFT array substrate module to be inspected comprising a TFT array, a pixel electrode, and an alignment film on a lower substrate is placed between the liquid crystal sheet and the backlight unit and is brought into close contact with the liquid crystal sheet, thereby realizing a state after attaching the TFT array substrate module to the TFT array substrate module The TFT array substrate module can be inspected while being interchanged while a driving signal is inputted to the color filter substrate module and the TFT array substrate module to be inspected, And a vacuum chamber for performing inspection of the TFT array substrate module in a vacuum atmosphere so as to easily separate the TFT array substrate module from the liquid crystal sheet upon replacement of the TFT array substrate module. Apparatus for pre - cementation of devices. According to an aspect of the present invention, A liquid crystal sheet was attached to the color filter substrate module before the LCD sticking process, After the TFT array substrate module to be inspected is inserted between the color filter substrate module and the backlight unit to which the liquid crystal sheet is attached, the two substrate modules are laminated and brought into close contact with each other, A driving signal is input to the TFT array substrate module in a state in which the backlight unit is illuminated to check whether the TFT array substrate module is defective, After the inspection of the TFT array substrate module, the TFT array substrate module is separated from the color filter substrate module to which the liquid crystal sheet is attached, Wherein the entire process including the inspection of the TFT array substrate module is performed inside the vacuum chamber so as to facilitate separation of the TFT array substrate module. According to an aspect of the present invention, Attaching a liquid crystal sheet to the color filter substrate module, configuring and setting the backlight unit and the driving signal input unit; Placing a TFT array substrate module to be inspected between the liquid crystal sheet and the backlight unit; Connecting the driving circuit to the TFT array substrate module after the step, and stacking the two substrate modules, aligning the two substrate modules, and aligning the TFT array substrate module and the TFT array substrate module; And checking whether the TFT array substrate module is defective while changing the driving signal in a state in which the backlight unit is turned on after the step, And inspecting the TFT array substrate module by inserting another TFT array substrate module to be inspected between the liquid crystal sheet and the backlight unit and inspecting the TFT array substrate module while changing the TFT array substrate module, Wherein the entire process is performed inside the vacuum chamber so as to facilitate separation of the TFT array substrate module. The method according to claim 8 or 9, Wherein the defect inspection is performed using at least one of a visual inspection and an image inspection using an image pickup device. delete delete delete

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