KR20070001434A - Inspection equipment of lcd and method for inspecting - Google Patents

Abstract

An apparatus and a method for inspecting an LCD(Liquid Crystal Display) are provided to reduce inspection time, inspection equipment installation cost and space by simultaneously performing MPS(Mass Production System) inspection and pattern inspection. A TFT(Thin Film Transistor) array panel(100) is mounted on a stage. An inspection apparatus having a CCD(Charge Coupled Device) camera(120a,120b) and a modulator(110) is aligned above the stage on which the TFT array panel is mounted. VIOS(Voltage Image System) inspection is performed on the TFT array panel using the modulator. The CCD camera captures an image of the portion of the TFT array panel, inspected by the modulator. The VIOS inspected by the modulator is mapped to the image captured by the CCD camera. When a defect is detected from the mapping operation, an image around the coordinates where the defect is detected is captured and stored.

Description

Inspection equipment of LCD and method for inspecting}

1 is a plan view showing an array substrate for a general liquid crystal display device

FIG. 2 is a cross-sectional view illustrating an array substrate for a liquid crystal display device taken along line II-II ′ of FIG. 1.

3a and 3b is a schematic configuration diagram showing the inspection equipment of the liquid crystal display according to the prior art

4 is a cross-sectional view illustrating the modulator configuration of FIGS. 3A and 3B.

5A and 5B are photographs showing a state in which light passing through a modulator is detected by a CCD camera

6 is a block diagram showing the inspection equipment of the liquid crystal display device according to a first embodiment of the present invention

7 is a plan view showing the inspection equipment of the liquid crystal display device according to the present invention

8A and 8B are views for explaining an inspection method using inspection equipment of the liquid crystal display according to the present invention.

9 is a flowchart illustrating a test method of a liquid crystal display according to the present invention.

FIG. 10 is an image used in the inspection of a TFT array substrate. The final image expected after the VIOS and CCD mapping process.

11 is a schematic configuration diagram showing an inspection apparatus of a liquid crystal display according to another embodiment of the present invention.

12 is a schematic diagram illustrating a test method using test equipment of a liquid crystal display according to a second exemplary embodiment of the present invention.

Explanation of symbols for the main parts of the drawings

100 TFT array substrate 110 modulator

120: CCD camera 130: AOS

140: light source

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device, and more particularly, to an inspection apparatus and an inspection method of a liquid crystal display device for shortening inspection time and increasing efficiency.

In today's information society, display elements are more important than ever as visual information transfer media. Cathode ray tubes or cathode ray tubes, which are currently mainstream, have problems with weight and volume. Many kinds of flat panel displays have been developed to overcome the limitations of the cathode ray tube.

The flat panel display device includes a liquid crystal display (LCD), a field emission display (FED), a plasma display panel (PDP) and an electro luminescence (EL). Most of these are commercially available and commercially available.

Liquid crystal display devices can meet the trend of light and short and short of electronic products and mass production is improving, and are rapidly replacing cathode ray tubes in many applications.

In particular, an active matrix type liquid crystal display device that drives a liquid crystal cell using a thin film transistor (hereinafter referred to as "TFT") has the advantages of excellent image quality and low power consumption, and secures the latest mass production technology. As a result of research and development, it is rapidly developing into larger size and higher resolution.

A manufacturing process for manufacturing an active matrix liquid crystal display device is divided into a substrate cleaning, a substrate patterning process, an alignment film forming / rubbing process, a substrate bonding / liquid crystal injection process, a mounting process, an inspection process, a repair process, and the like.

First, in the substrate cleaning process, foreign substances contaminated on the surface of the substrate of the liquid crystal display device are removed by the cleaning liquid.

In addition, the substrate patterning process is divided into the patterning of the upper substrate (color filter substrate) and the patterning of the lower substrate (TFT-array substrate). A color filter, a common electrode, a black matrix, and the like are formed on the upper substrate.

Signal lines such as data lines and gate lines are formed on the lower substrate, and TFTs are formed at intersections of the data lines and gate lines, and pixel electrodes are formed in the pixel region between the data lines and gate lines connected to the source electrodes of the TFTs. Is formed.

In addition, in the alignment film forming / rubbing process, an alignment film is applied to each of the upper substrate and the lower substrate, and the alignment film is rubbed with a rubbing cloth or the like.

In the substrate bonding / liquid crystal injection process, the upper substrate and the lower substrate are bonded using a sealant, the liquid crystal and the spacer are injected through the liquid crystal injection hole, and then the liquid crystal injection hole is sealed.

In the liquid crystal panel mounting process, a tape carrier package (hereinafter referred to as "TCP") in which integrated circuits such as a gate drive integrated circuit and a data drive integrated circuit are mounted is connected to a pad portion on a substrate. .

Such a drive integrated circuit may be directly mounted on a substrate by a chip on glass (hereinafter referred to as "COG") method in addition to the tape automated bonding method using the aforementioned TCP.

Meanwhile, the inspection process includes an electrical inspection performed after various signal wirings and pixel electrodes are formed on the lower substrate, and an electrical inspection and a visual inspection performed after the substrate bonding / liquid crystal injection process.

In particular, the electrical inspection process of the signal wiring and the pixel electrode of the lower substrate prior to the bonding of the substrate is very important in that the defect rate and disposal can be reduced, and the defective substrate in a relatively repairable state can be detected early.

In addition, the repair process restores the substrate determined to be repairable by the inspection process.

On the other hand, defective substrates that cannot be repaired in the inspection process are discarded.

FIG. 1 is a plan view illustrating a typical array substrate for a liquid crystal display device, and FIG. 2 is a cross-sectional view illustrating the array substrate for a liquid crystal display device taken along line II-II ′ of FIG. 1.

1 and 2, in an array substrate for a liquid crystal display device, a gate wiring 12 having a predetermined distance in one direction on a transparent insulating substrate 11 and a gate electrode extending from the gate wiring 12 ( 13 and a storage first electrode 14 are formed.

A gate insulating layer 15 is formed on the gate wiring 12 and the gate electrode 13, and an active layer 16 and an ohmic contact layer 17 are sequentially formed on the gate insulating layer 15. .

The source line 18 is disposed on the ohmic contact layer 17 in a direction perpendicular to the gate line 12, and the source electrode 19 and the gate electrode 13 extending from the data line 18 are formed around the ohmic contact layer 17. The drain electrode 20 facing the electrode 19 and the storage second electrode 21 overlapping with the gate wiring 12 are formed.

The data line 18, the source electrode 19, the drain electrode 20, and the storage second electrode 21 are covered with a passivation layer 22, and the passivation layer 22 is the drain electrode 20 and the storage second. Each of the electrodes 21 has a storage contact hole 23 and a drain contact hole 24.

The pixel electrode 25 is formed on the passivation layer 22 of the pixel region defined by the gate line 12 and the data line 18 intersecting. The pixel electrode 25 includes a storage contact hole 23 and The drain contact hole 24 is connected to the drain electrode 20 and the storage second electrode 21, respectively.

In the array substrate configured as described above, when a voltage is applied to the gate electrode 13 through the gate wiring 12, electrons are concentrated in the active layer 16, and a conductive channel is formed, so that the source electrode 19 and The current flows between the drain electrodes 20 such that the image signal transmitted from the data line 18 reaches the pixel electrode 25 through the source electrode 19 and the drain electrode 20.

As described above, the substrate 11 on which the transparent electrode 19 is formed is subjected to array inspection.

There are several types of array inspection equipment for performing the array inspection. Among them, an inline process tester (IPT) is an apparatus for optically inspecting an electrical defect of a pixel, and does not perform cell assembly before TFT assembly is completed. Examine the electrical properties of the TFT pixels.

Therefore, by early detection of pixel defects and line defects generated during display after assembling the liquid crystal through the array inspection as described above, it is possible to contribute to yield improvement and production cost reduction.

The defects that can be detected by such array inspection equipment are, for example, pixel defects, line breaks or line shorts.

Hereinafter, an inspection apparatus and an inspection method of a liquid crystal display according to the present invention will be described with reference to the accompanying drawings.

3A and 3B are schematic diagrams illustrating inspection apparatuses of a liquid crystal display according to the related art, and FIG. 4 is a cross-sectional view illustrating a modulator configuration of FIGS. 3A and 3B.

As shown in FIGS. 3A and 3B, the TFT array substrate 30 to be inspected, the light source 40 for generating light, and the TFT array substrate 30 are provided on the TFT array substrate 30 and are generated from the light source 40. A modulator 50 for adjusting the amount of transmitted light according to the size of the electric field, and a polarizing beam splitter prism for selectively reflecting the light from the light source 40 to be sent to the modulator 50; And a lens 70 for condensing the light from the light source 40 to the modulator 50 and condensing the light reflected from the modulator 50; And a CCD camera 80 for converting the reflected light focused through 70 into an analog video signal, and an image processor 90 for converting the analog video signal of the CCD camera 80 into a digital video signal. .

Meanwhile, the PBSP 60 selectively transmits and reflects light, and the PBSP 60 reflects linearly polarized S-waves of the light generated from the light source 40 to the modulator 50.

In addition, as shown in FIG. 4, the modulator 50 includes a polymer dispersed liquid crystal layer (hereinafter, referred to as a 'PDLC layer') injected between the substrate 51 on which the transparent electrode 51 is formed and the reflective plate 53. 54).

The PDLC layer 54 is formed of circular liquid crystal droplets by mixing the liquid crystal and the polymer and irradiating ultraviolet rays and then separating the liquid crystal from the polymer. The material of the PDLC layer 54 is an epoxy resin composed of a resin and a curing agent.

In addition, the PDLC layer 54 is driven by the voltage difference between the transparent electrode 52 formed on the substrate 51 of the modulator 50 and the pixel electrode (25 in FIG. 2) formed on the TFT array substrate 30. do.

That is, when no voltage is applied to the PDLC layer 54, liquid crystal droplets are randomly arranged to scatter incident light, and a dark image is observed in the CCD camera 80. On the other hand, when voltage is applied to the transparent electrode 52 and the pixel electrode 25, the liquid crystal molecules in the liquid crystal droplets of the PDLC layer 54 are arranged in parallel with the electric field and reflect the incident light through the reflecting plate 53. And a bright image is observed in the CCD camera 80.

Therefore, the voltage between the pixel electrode 25 formed on the TFT array substrate 30 and the transparent electrode 52 formed on the modulator 30 is varied to observe the brightness of the image seen from the CCD camera 80. do.

Therefore, when a defect such as disconnection or short circuit occurs in the TFT array substrate 30, since the brightness of the image observed through the camera is different from other regions, it is possible to easily detect the defect.

5A and 5B are photographs illustrating a state in which light passing through a modulator is detected by a CCD camera.

That is, in FIG. 5A, the voltage image system (VIOS) detects light passing through a modulator with a CCD camera. When a defect occurs, the amount of charge accumulated varies, so that light passing through the modulator 50 is changed. The amount of will be different.

Therefore, when a defect occurs, the color B is different from the surrounding pixels (black).

5B shows that the alignment optic system (AOS) is a high magnification (up to 50 ×) camera attached to the VIOS assembly for visual analysis of actual defects, which cannot be used while the equipment is in operation. Pillel observation is possible.

The inspection apparatus of the liquid crystal display device according to the related art configured as described above moves while maintaining a distance of about 10 to 20 μm from the TFT array substrate 30 to inspect the TFT array substrate 30 for defects.

That is, light generated from the light source 40 passes through the modulator 50. One side of the modulator 50 is located very close to the surface of the TFT array substrate 30 so that charge accumulation, known as voltage level, occurs.

Since the amount of deformation of the reflected light varies according to the degree of the induced electric field due to the optical characteristics of the modulator 50, the amount of deformation by the CCD camera 80 may be known.

The reflected light, which is changed in proportion to the spatial electric field E generated by auto-gapping at the lower surface of the modulator 50, is detected by the CCD camera 80 and the intensity of the light is determined by the image processor. (image processor) 90 is sent.

More specifically, the inspection method of the liquid crystal display according to the related art is to space the modulator 50 on the TFT array substrate 30 by a predetermined gap, and then maintain the gap therebetween. ) By applying a test voltage Vtest to detecting light reflected from the modulator 50 to determine whether the signal wires 11 and 18 of FIG. 1 are formed on the TFT array substrate 30.

Here, the modulator 50 has a PDLC layer 54 interposed between the transparent substrate 51 on which the transparent electrode 52 is formed and the reflecting plate 53, and auto-gapping is applied to the modulator 50. Air nozzles and vacuum nozzles are formed to maintain a predetermined distance from the TFT array substrate 30.

Therefore, after the TFT array substrate 30 is loaded below the modulator 50, the modulator 50 is lowered to perform autogap while electric inspection is started.

Here, light is irradiated from the light source 40 while the gap between the modulator 50 and the TFT array substrate 30 is maintained at a preset effective gap, and the light is irradiated to the modulator 50 by the lens 70. At the same time as the light is collected, a test voltage Vtest is applied to the transparent electrode 52.

The test data applied from the driver circuit of the jig (not shown) is applied to the data lines 18 and the test scan signal is applied to the gate lines 18.

Then, an electric field E is applied to the PDLC layer 54 between the transparent electrode 52 of the modulator 50 and the pixel electrode 25 to be inspected.

Here, the PDLC layer 54 scatters light when an electric field is not applied, and transmits light by aligning liquid crystals in the liquid crystal droplets in the direction of the effective electric field E when an effective electric field E is applied.

Therefore, when the voltage is normally applied to the pixel electrode 25 in the electrical inspection process, the liquid crystal layer of the PDLC layer 54 corresponding to the portion transmits light, and if the voltage is not applied to the pixel electrode 25, the PDLC at the portion The liquid crystal layer of layer 54 scatters light.

The light transmitted through the liquid crystal layer of the PDLC layer 54 is reflected on the reflecting plate 53 to reverse the optical path, while the light scattered in the liquid crystal layer of the PDLC layer 54 is almost extinguished and almost reflected to the reflecting plate 53. It is not incident.

The light reflected by the reflector 53 of the modulator 50 is received by the CCD camera 80 via the lens 70 and then converted into an electrical signal.

The electrically converted light receiving signal is transmitted to the image processor 90 through a signal processing circuit.

Therefore, the inspection operator monitors the image or data displayed on the image processor 90 to determine whether there is a defect, and performs a second inspection on the signal wires 11 and 18 at the point of the suspected failure.

By the way, the modulator 50 has an advantage in terms of accuracy and reliability that can be known whether the pixel unit is defective, but the equipment price is expensive.

In addition, since the inspection area is narrower than the area of the entire TFT array substrate 30, the modulator 50 is transported by a predetermined length horizontally or vertically, and then the auto-gapping process is repeated so that the inspection time is excessive. There is a problem.

However, there are the following problems in the inspection equipment and inspection method of the liquid crystal display according to the prior art as described above.

First, when an error occurs in a coordinate value evicted from the array tester when a failure occurs, it is difficult for a worker to find a defect using a CCD camera in a review repair process.

Second, there is a inconvenience that the operator must visually check through the AOS by re-examined by the array tester during the analysis of the specific defect / examination generated.

The present invention has been made in order to solve the above problems, there is no need to find a bad image separately in the repair equipment, and the inspection equipment of the liquid crystal display device to shorten the inspection time without the need to perform a failure analysis while stopping the equipment, and The purpose is to provide a test method.

The inspection apparatus of the liquid crystal display device according to the present invention for achieving the above object is composed of a TFT array substrate, a modulator for inspecting a defect of the TFT array substrate, and on one side and an upper side of the modulator to provide the TFT array substrate. It comprises a first and second CCD camera to shoot.

In addition, the inspection method of the liquid crystal display device according to the present invention for achieving the above object is the step of mounting and fixing the TFT array substrate to be inspected on the stage, CCD camera and modulator on the stage on which the TFT array substrate is mounted Arranging the inspection equipment having a device installed thereon, performing a VIOS inspection on the TFT array substrate using a modulator of the inspection equipment, photographing a region inspected by the modulator with a CCD camera of the inspection equipment, Mapping the image taken by the VIOS and the CCD camera inspected by the modulator, and mapping the area taken by the VIOS and the CCD camera inspected by the modulator to capture and store around the coordinate point when a defect is detected Characterized in that it comprises a step.

Hereinafter, an inspection apparatus and an inspection method of a liquid crystal display according to the present invention will be described in detail with reference to the accompanying drawings.

6 is a block diagram showing the inspection equipment of the liquid crystal display device according to the first embodiment of the present invention, Figure 7 is a plan view showing the inspection equipment of the liquid crystal display device according to the present invention.

That is, the MPS inspection step in the inspection equipment of the liquid crystal display device according to the first embodiment of the present invention.

In general, the inspection step of the TFT array is a pattern inspection step, a review step, an MPS inspection step, and a repair step in this order.

First, in the pattern inspection step, the xenon-lamp is irradiated to the TFT array to distinguish the normal part from the defective part by the difference in brightness of the light reflected by the pixel of the TFT. The defective part sets the coordinates of the defect and conveys information about this defect coordinate in the next step.

Subsequently, the pattern inspection step moves to a review station. At the review station, the workers directly judge the type of the defect or whether the degree of the defect is likely to be repaired based on the coordinates of the defect detected by the pattern inspector. It even checks for defects that have occurred inside.

Next, as a mass production system (MPS) inspection step, an electrical failure of a panel is checked by applying an voltage to each panel through an MPS inspector to identify an array that is actually a failure when driving the thin film transistor.

Lastly, the repair is performed in the repair process step by checking a defect that can be repaired among the defects of the thin film transistor array checked through the review step and the MPS inspector with a reflective light source. The reflective light source used in the MPS is a halogen lamp.

As shown in FIG. 6, a TFT array substrate 100, a modulator 110 for inspecting defects of the TFT array substrate 100, and one side and an upper side of the modulator 110 are configured to form the TFT array substrate. It is comprised including the 1st, 2nd CCD camera 120a, 120b which image | photographs 100.

Here, the first and second CCD cameras 120a and 120b and the modulator 110 are integrally formed.

In addition, the first CCD camera 120a formed at one side of the modulator 110 serves to photograph the TFT array substrate 100 when the modulator 110 moves left and right and is composed of a plurality of CCD cameras.

In addition, the second CCD camera 120b formed above the modulator 110 serves to photograph the TFT array substrate 100 when the modulator 110 moves up and down, and is composed of a plurality of CCD cameras. have.

The first CCD camera 120a is mounted on one side of the modulator 110, and the AOS 130 is mounted on the other side of the modulator 110 so as to visually analyze the actual defect.

As shown in FIG. 7, the areas photographed by the first and second CCD cameras 120a and 120b mounted on the upper and left sides of the modulator 110 may be inspected by the modulator 110. same.

In addition, when the first and second CCD cameras 120a and 120b differ depending on the resolution, the number of the first and second CCD cameras 120a and 120b may vary depending on the specifications.

Meanwhile, the first and second CCD cameras 120a and 120b need a plurality of light sources 140 along the periphery of the modulator 110. Therefore, the first and second CCD cameras 120a and 120b and the modulator 110 cannot operate at the same time.

That is, the light source 140 should be selectively turned on / off according to the first and second CCD cameras 120a and 120b that operate.

In addition, as described above, the modulator 110 includes a PDLC layer injected between the substrate on which the transparent electrode is installed and the reflecting plate.

The PDLC layer is formed by mixing a liquid crystal and a polymer to irradiate ultraviolet rays and then separating the liquid crystal from the polymer to form a circular liquid crystal drop. Often, the material of the PDLC layer is an epoxy resin composed of a resin and a curing agent.

In addition, the PDLC layer is driven by the voltage difference between the transparent electrode of the modulator 110 and the pixel electrode formed on the TFT array substrate 100 to be inspected. In other words, when no voltage is applied to the PDLC layer, that is, when the voltage difference applied to the transparent electrode and the pixel electrode is less than or equal to the threshold voltage Vth, the liquid crystal droplets are randomly arranged to scatter the incident light.

This is because light is scattered due to a mismatch between the refractive index of the liquid crystal droplets and the polymer refractive index. On the other hand, when the voltage difference between the transparent electrode and the pixel electrode is greater than or equal to the threshold voltage Vth, the liquid crystal molecules in the liquid crystal droplet of the PDLC layer are arranged in parallel with the electric field to transmit incident light.

The mixing ratio of the polymer is increased in the mixing ratio of the liquid crystal droplet and the polymer of the PDLC layer. As a result, the gap between the liquid crystal droplets is widened, thereby improving the detection power of the modulator. However, if the mixing ratio of the polymer is increased, the problem of increasing the driving voltage still remains.

In order to improve this, the mixing ratio of the liquid crystal droplets and the polymer is fixed constantly, and then the physical components are changed to match the characteristics of the liquid crystal droplets and the polymer, respectively.

That is, the liquid crystal droplets used in the general PDLC layer have refractive index anisotropy due to different refractive indices corresponding to the long axis and short axis of the liquid crystal, and the difference in refractive index of the liquid crystal is about Δn = 0.1.

In addition, the polymer, which is another component of the PDLC layer, is composed of an epoxy-based material, and the polymer has a refractive index of about 1.5.

At this time, since the epoxy resin has a high viscosity, it has a problem of increasing the driving voltage.

Therefore, the present invention increases the difference in refractive index of the liquid crystal to Δn = 0.2. As the difference in refractive index of the liquid crystal increases in the OFF state without applying a voltage to the modulator, the scattering degree of light increases.

As a result, the light transmittance is decreased in the OFF state, and the difference in transmittance at the time of ON / OFF becomes large. That is, the contrast of the black and white of the contrast is improved, and thus the detection power for the defect of the TFT array substrate is improved.

8A and 8B are diagrams for explaining an inspection method using inspection equipment of a liquid crystal display according to the present invention.

As shown in FIG. 8A, the TFT array substrate 100 is inspected in the form of "c" or in the form of "d" as in FIG. 8b.

That is, the modulator 110 is inspected from the left to the right, and then inspected from the right to the lower side, and then inspected from the right to the left side.

On the other hand, the inspection form can be carried out in various ways, that is, the inspection can be performed in the zigzag form of the left and right, and can be inspected in the zigzag form of the upper and lower sides or the zigzag form of the upper and lower sides.

On the other hand, when the inspection from the left to the right using the modulator 110, after performing a VIOS test on the inspection area of the modulator 110 and moves to the right.

The first CCD camera 120a configured at one side of the modulator 110 photographs the same area inspected by the modulator 110 to perform mapping with the VIOS.

At this time, the image captured by the first CCD camera 120a and the VIOS inspected by the modulator 110 are mapped to capture and store the area around the coordinate point when a defect is detected.

In addition, when the modulator 110 inspects from right to left, the first CCD camera 120a first photographs the VIOS inspection area.

The modulator 110 following the first CCD camera 120a moves to the left to perform VIOS inspection, and immediately between the image captured by the first CCD camera 120a and the VIOS region inspected by the modulator 110. We will do the mapping.

At this time, the image captured by the first CCD camera 120a and the VIOS inspected by the modulator 110 are mapped to capture and store the area around the coordinate point when a defect is detected.

On the other hand, the inspection method from the left to the right or the right to the left direction is described, but using the second CCD camera 120b configured on the upper side of the modulator 110, the upper side and the lower side or the upper side and the like also the CCD camera. You can run the test in the same way using the modulator.

9 is a flowchart illustrating a test method of a liquid crystal display according to the present invention.

As shown in Fig. 9, the TFT array substrate to be inspected is mounted on the stage and then fixed (S110).

Subsequently, the inspection apparatus in which the CCD camera and the modulator are installed is aligned on the stage on which the TFT array substrate is mounted (S120).

Subsequently, VIOS inspection is performed on the TFT array substrate using the modulator of the inspection equipment, and the image taken by the VIOS and the CCD camera inspected by the modulator is photographed by capturing a region inspected by the modulator with a CCD camera of the inspection equipment. Map (S130).

Here, the image of the portion to be inspected is first photographed by the CCD camera, and the VIOS inspection may be performed by the modulator on the portion photographed by the CCD camera through the modulator.

In addition, when the photographing area is mapped by the VIOS and the CCD camera inspected through the modulator, when a defect is detected, the surrounding of the coordinate point is captured and stored (S140).

10 is an image used in the inspection of the TFT array substrate is a final image expected after the process of mapping the VIOS and CCD.

As shown in FIG. 10, when a defect is detected, such as a portion A, during the mapping process, the data is captured and stored around the coordinate point.

FIG. 11 is a schematic diagram illustrating an inspection apparatus for a liquid crystal display according to another exemplary embodiment of the present invention.

That is, the inspection equipment of the liquid crystal display device according to another embodiment of the present invention is to perform the pattern inspection and MPS inspection at the same time.

As shown in FIG. 11, the CCD camera 120 and the modulator 110 are separated from each other, the MPS inspection of the TFT array substrate 100 is performed using the modulator 110, and the CCD camera 120 is used. Pattern inspection of the TFT array substrate 100 using < RTI ID = 0.0 >

That is, a stage 160 on which the TFT array substrate 100 is to be loaded and seated, and a probe formed on the stage 160 to be lowered and raised when the TFT array substrate 100 is loaded A frame 150, a CCD camera 120 for inspecting the pattern of the TFT array substrate 100, and a modulator 110 for inspecting the MPS of the TFT array substrate 100. have.

Here, the TFT array substrate 100 has a shorting bar formed to receive a gate signal and a data signal for a test process, and the shorting bar is cut after the test process is completed.

In addition, the stage 160 descends when the TFT array substrate 100 is loaded, and a plurality of probe frames 150 are configured to supply a signal to a shorting bar on the TFT array substrate 100.

Referring to the inspection method of the inspection equipment of the liquid crystal display device configured as described above are as follows.

That is, FIG. 12 is a schematic diagram for explaining an inspection method using inspection equipment of a liquid crystal display according to a second embodiment of the present invention.

As shown in FIG. 12, when the TFT array substrate 100 is loaded on the stage 160, the probe frame 150 installed on the stage 160 descends to form a pogo pin set part formed on the probe frame 150. Inserted into the pogo pin contact portion formed on the upper portion 160 and electrically contacted, the pattern signal of the gate signal and the data signal is supplied from the MUX (not shown) to the shorting bar of the completed TFT array substrate 100.

Subsequently, the modulator 110 performs the MPS inspection of the completed TFT array substrate 100 by irradiating light closer to the active region of the TFT array substrate 100.

For example, the TFT array substrate 100 completed by the light irradiated from the modulator 110 is normal when it emits normal light, and the TFT array substrate 100 is defective when no light is emitted from the TFT array substrate 100. Able to know.

In addition, the pattern inspection is performed by passing the TFT array substrate 100 from one side to the other side by using the CCD camera 120 separated from the modulator 110.

For example, the front surface of the TFT array substrate 110 is moved from one side to the other side using the CCD camera 120, and the operator monitors the photographed image through an external display, thereby deteriorating the pattern. Check for presence

On the other hand, the present invention described above is not limited to the above-described embodiment and the accompanying drawings, it is possible that various substitutions, modifications and changes within the scope without departing from the technical spirit of the present invention. It will be apparent to those of ordinary skill in Esau.

As described above, the inspection equipment and the inspection method of the liquid crystal display according to the present invention have the following effects.

First, there is no need to find a bad image separately in the repair equipment, and the operator can also reduce the inspection time by not having to perform a failure analysis while stopping the equipment.

Second, by configuring the modulator and CCD camera to perform MPS inspection and pattern inspection in one inspection equipment, the pattern inspection can be performed simultaneously with the MPS inspection, which not only shortens the inspection time but also reduces equipment cost and minimizes equipment installation space Can be.

Claims (10)

TFT array substrate, A modulator for inspecting a defect of the TFT array substrate; And first and second CCD cameras configured on one side and an upper side of the modulator to photograph the TFT array substrate. The inspection apparatus of claim 1, wherein the first and second CCD cameras and the modulator are integrally formed. The inspection apparatus of claim 1, wherein the first CCD camera formed at one side of the modulator is configured to photograph the TFT array substrate when the modulator moves left and right and comprises a plurality of CCD cameras. 2. The inspection apparatus of claim 1, wherein the second CCD camera formed above the modulator is configured to photograph the TFT array substrate when the modulator moves up and down, and comprises a plurality of CCD cameras. The inspection apparatus of claim 1, wherein a first CCD camera is mounted at one side of the modulator, and an AOS is mounted at the other side of the modulator to visually analyze actual defects. The inspection apparatus of claim 1, wherein the region photographed by the first and second CCD cameras mounted on the upper and left sides of the modulator is the same as the region inspected by the modulator. . 2. The inspection apparatus of claim 1, further comprising a light source for irradiating light installed at the outside of the first and second CCD cameras. 3. TFT array substrate, A stage on which the TFT array substrate is loaded and seated; A probe frame formed on the stage and configured to be lowered and raised when the TFT array substrate is loaded; A CCD camera for inspecting a pattern of the TFT array substrate; And a modulator for inspecting the MPS of the TFT array substrate. Mounting and fixing a TFT array substrate to be inspected on a stage; Aligning an inspection apparatus provided with a CCD camera and a modulator on a stage on which the TFT array substrate is mounted; Performing VIOS inspection on the TFT array substrate using a modulator of the inspection equipment; Photographing the area examined by the modulator with a CCD camera of the inspection equipment; Mapping an image taken by a VIOS and a CCD camera inspected by the modulator; And mapping the VIOS inspected by the modulator and the region photographed by the CCD camera to capture and store the area around the coordinate point when a defect is detected. Loading a TFT array substrate onto a stage; The pogo pin set part formed on the probe frame is lowered by lowering the probe frame installed on the stage to insert the pattern signal of the gate signal and the data signal from the outside to the shorting bar of the completed TFT array substrate. step; Inspecting the MPS of the TFT array substrate by irradiating light to the active region of the TFT array substrate in the modulator; And inspecting a pattern while passing the TFT array substrate from one side to the other side by using a CCD camera separated from the modulator.

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