JPH06342155A - Inspecting device and inspecting method for color filter to be used for matrix type display device - Google Patents

Abstract

PURPOSE:To lessen the loss of a production process by making it possible to surely inspect the color filters alone formed on a counter electrode substrate without leakage by transmission light in the same state as in the case of operating of the color filters as a display device. CONSTITUTION:This inspecting device is provided with a liquid crystal panel 3 which has the same pixel arrangement as the pixel arrangement of the respective filter films of the color filters to be inspected, a control circuit 5 which controls the display state of this liquid crystal panel 3, a mouse 6 which instructs the display position to this control circuit 5 and an X-, Y-, and theta-stage 1 which aligns the counter electrode substrate 7 formed with the color filters to be inspected and the liquid crystal panel 3. The inspecting device is provided with an illuminating device 2 behind the panel 3 as well.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color filter inspection device and inspection method used in a matrix type display device for inspecting a color filter formed on a counter electrode substrate of a color liquid crystal display device.

[0002]

2. Description of the Related Art A color filter of a color liquid crystal display device used for a display of a liquid crystal television receiver, a portable personal computer or a liquid crystal projection type television receiver, etc. is printed or dyed on a counter electrode substrate. Alternatively, a large number of fine filter films of RGB colors are formed by an electrodeposition method or the like. In this color filter, if there is color unevenness, color dropout, adherence of foreign matter, etc. on each filter film, the image quality is deteriorated. Therefore, it is inspected at the manufacturing stage whether these defects are present.

Defects of the color filter can be surely detected by inspecting the counter electrode substrate on which the color filter is formed on a matrix substrate and enclosing liquid crystal therein so that the color filter can operate as a display device. . However, if a defect is first discovered in the final stage of the manufacturing process in this way, the loss of the manufacturing process becomes too large. Therefore, it is desirable that the defect of the color filter is detected as reliably as possible by an inspection of a single unit before the counter electrode substrate is attached to the matrix substrate.

The color filter alone can be inspected by irradiating the counter electrode substrate with light and visually inspecting the reflected light. However, the number of pixels of a color liquid crystal display device has increased further in recent years, and since each pixel has become finer and finer, visual inspection by such reflected light causes color unevenness and color loss.
It has become difficult to reliably detect defects such as adhesion of foreign matter.

Therefore, conventionally, the transmitted light when the counter electrode substrate is irradiated with light is visually inspected, or the transmitted light is automatically inspected by using an image processing apparatus (for example, Japanese Patent Laid-Open No. 1-1999). The prior art and the invention are described in Japanese Patent No. 313743). Further, in the visual inspection, if a defect is found by the inspection of the transmitted light, an oil-based felt-tip pen or the like is used to directly mark the defect position on the counter electrode substrate for repair in a later step. I was filling in.

[0006]

However, even when the transmitted light is used as described above, it is not always possible to make a reliable inspection if it is visually inspected, and the inspection is inefficient. There was a problem that the inspection accuracy became uneven due to individual differences among the members. Even if a defect is found, it is difficult to pinpoint the position of the defect accurately by directly writing the mark on the counter electrode substrate with a felt pen, etc. There is a problem that it may occur, and the counter electrode substrate may be soiled.

Further, in the case of automatically inspecting using an image processing apparatus, a high-speed arithmetic unit for image processing, a precise XY stage, etc. are required, and the apparatus becomes expensive and large-scale. The problem arises. And in this case,
Since complicated image processing is required to perform accurate inspection, there is a problem that the development cost of the program becomes enormous.

In view of the above circumstances, the present invention provides an inspection device for a color filter used in a matrix type display device capable of surely finding a defect by visual inspection using transmitted light as in the inspection in the final step. The purpose is to provide an inspection method.

[0009]

An inspection device for a color filter formed on a counter electrode substrate of a matrix type display device of the present invention is formed in the same arrangement as a pixel of a color filter to be inspected and has at least light transmission. And opacity 2
A liquid crystal panel having a pixel whose state can be controlled, a liquid crystal panel driving device for making any pixel of the liquid crystal panel an opaque state, and a color filter to be inspected is superimposed on the liquid crystal panel for alignment. A position adjusting device for performing the above and a light source provided behind the liquid crystal panel are provided, thereby achieving the above object.

The liquid crystal panel driving device may be provided with a control unit capable of making any one or more pixels of the liquid crystal panel corresponding to a designated position in a non-transmissive state.

The color filter inspection device used in the matrix type display device of the present invention may further include an optical system device for projecting light transmitted through the liquid crystal panel and the color filter.

A method of inspecting a color filter formed on a counter electrode substrate of a matrix type display device according to the present invention is formed such that each pixel of the color filter to be inspected and each pixel of the color filter are arranged in the same manner and at least. A step of superimposing and aligning a liquid crystal panel having a pixel capable of controlling two states of light transmission and non-transmission, irradiating the color filter with light from the liquid crystal panel side, A step of detecting a defective pixel of the color filter by observing the transmitted light; and a step of making the pixel of the liquid crystal panel non-transmissive in a predetermined pattern so as to correspond to the detected defective pixel of the color filter. The step of specifying a pixel of a liquid crystal panel is included, whereby the above object is achieved.

According to another aspect of the present invention, there is provided a method for inspecting a color filter formed on a counter electrode substrate of a matrix type display device, wherein each pixel of the color filter to be inspected and each pixel of the color filter are arranged in the same arrangement. And a step of performing alignment by superimposing a liquid crystal panel having a pixel capable of controlling at least two states of light transmission and non-transmission, irradiating the color filter with light from the liquid crystal panel side, and Projecting an image of the filter on a screen, detecting a defective pixel of the color filter by observing the image of the color filter projected on the screen,
And a step of identifying the pixel of the liquid crystal panel corresponding to the detected defective pixel of the color filter by making the pixel of the liquid crystal panel in a non-transmissive state in a predetermined pattern. The purpose is achieved.

[0014]

In the inspection apparatus and inspection method of the present invention, a color filter is set in the inspection apparatus, each pixel of this color filter overlaps each pixel of the liquid crystal panel, and the light from the light source emits light from these color filters and the liquid crystal panel. The position is adjusted by the position adjusting device so that the light passes through each of the overlapping pixels. At this time, each pixel of the liquid crystal panel is
The transparent state and the non-transmissive state can be arbitrarily switched under the control of the liquid crystal panel driving device. Then, it becomes possible to inspect under the same conditions as when the color filter to be inspected is actually incorporated in the display device.
The light from the light source is controlled so as to pass through only the pixels in a specific area on the color filter, thereby reducing the number of pixels to be inspected at one time and preventing the inspector's concentration from decreasing. It is possible to assist the inspector's visual inspection by controlling so that only the pixels forming the pattern are transmitted so that defective pixels are particularly noticeable depending on the displayed pattern.

As a result, a single color filter formed on the counter electrode substrate or the like can be inspected by the transmitted light in the same state as when the matrix substrate is attached to the counter electrode substrate and operated as a display device. It will be possible to perform a leak-free and reliable inspection.

Further, according to another inspection apparatus of the present invention, it is possible to display the mark due to the non-transmissive state of the pixel at an arbitrary position of the liquid crystal panel by using a pointing device such as a mouse, so that the defect is detected. In this case, this mark can be moved to accurately specify the defect position.

As a result, when a defect is detected, the position of the defect can be indicated by a pointing device, so that the defect position is more accurate and accurate than when the mark is directly written on the counter electrode substrate. This makes it possible to identify the counter electrode substrate quickly, and there is no fear of contaminating the counter electrode substrate.

Further, according to another inspection device and inspection method of the present invention, since the light transmitted through the liquid crystal panel and the color filter is projected on the screen or the like via the optical system device,
This pattern of transmitted light can be enlarged to make the visual inspection easier to see.

As a result, the inspector can perform the inspection based on the pattern of the transmitted light enlarged and displayed on the screen or the like, so that the defect can be detected more reliably.

[0020]

Embodiments of the present invention will be described in detail below with reference to the drawings.

(First Embodiment) An explanation will be given of a device for inspecting a color filter formed on a counter electrode substrate in an active matrix type color liquid crystal display device, which is a first embodiment.

FIGS. 1 to 5 show the present embodiment. FIG. 1 is a block diagram showing the overall structure of a color filter inspection device, and FIG. 2 is a part showing the overlapping portion of a color filter and a liquid crystal panel. FIG. 3 is an enlarged vertical sectional view, FIG. 3 is an explanatory perspective view showing how light is transmitted when a pixel of a color filter is defective, and FIG. 4 is a state of light being transmitted when a pixel of a liquid crystal panel is made non-transmissive. FIG. 5 is an explanatory perspective view showing the state of light transmission in a wider range when the pixels of the liquid crystal panel of FIG. 4 are set in a non-transmissive state.

This inspection apparatus, as shown in FIG.
An illumination device 2 and a liquid crystal panel 3 are arranged on a Y, θ stage 1. The X, Y, θ stage 1 is provided with a control device (not shown) for arbitrarily moving the illuminating device 2 and the liquid crystal panel 3 above it in the X-Y axis directions on the plane, and also for adjusting the inclination angle (θ) thereof. It is a device that can be changed to. The illuminating device 2 has a lamp 2a and a reflection plate 2b therein, and irradiates the liquid crystal panel 3 with the light emitted from the lamp 2a and the light reflected by the reflection plate 2b. The light emitted by the illumination device 2 may be once diffused by the diffusion plate and then applied to the liquid crystal panel 3.

As shown in FIG. 2, the liquid crystal panel 3 has a structure in which a liquid crystal 3c is sealed between a matrix substrate 3a and a counter electrode substrate 3b. The matrix substrate 3a is a transparent substrate such as glass, and a large number of transparent pixel electrodes 3d arranged in a matrix on the surface facing the counter electrode substrate 3b.
A bus line 3e serving as a data line or a scanning line is formed between the picture element electrodes 3d. These picture element electrodes 3d
And the bus line 3e are connected via a TFT (thin film transistor) (not shown). Also,
The upper layers of the pixel electrode 3d and the bus line 3e are covered with an alignment film 3f for determining the alignment of the liquid crystal 3c.
The counter electrode substrate 3b is also a transparent substrate such as glass, and a transparent counter electrode 3g and an alignment film 3f are sequentially formed on the surface facing the matrix substrate 3a. Matrix substrate 3
Each pixel electrode 3d on a is formed in the same arrangement as the pixel of the color filter to be inspected, and each pixel constitutes each pixel of the liquid crystal panel 3. By controlling the electric field between the picture element electrode 3d and the counter electrode 3g on the counter electrode substrate 3b, the molecular orientation of the liquid crystal 3c is changed and each pixel is arbitrarily transmitted or not transmitted. Can be in a state. The liquid crystal panel 3 is not limited to the active matrix display panel described above, and a simple matrix display panel may be used.

Since the liquid crystal panel 3 serves as a reference of pixels at the time of inspection, it is necessary to use a pixel having no defect at all. Also, here, the liquid crystal 3c
A non-transmissive state is created by utilizing the light scattering of 1. However, when the liquid crystal 3c changes the polarization state of incident light, it is necessary to appropriately arrange a polarization filter on the liquid crystal panel 3.

A control circuit 5 is connected to the liquid crystal panel 3 via a drive circuit 4 as shown in FIG.
The control circuit 5 creates data for setting each pixel of the liquid crystal panel 3 in a light transmission or non-transmission state in a predetermined pattern and sends the data to the drive circuit 4. The drive circuit 4 is a circuit for sequentially sending the data sent from the control circuit 5 to each pixel by scanning. Further, a mouse 6 is connected to the control circuit 5, and it is also possible to create data such that a pixel at a position corresponding to an operation of the mouse 6 is made opaque at any time.

Above the liquid crystal panel 3, a counter electrode substrate 7 is arranged supported by a supporting member (not shown). Since this support is fixed separately from the X, Y, θ stage 1, the counter electrode substrate 7 supported by this support is
It does not interlock with the operation of the liquid crystal panel 3 by the Y, θ stage 1.

The counter electrode substrate 7 is a substrate arranged facing the matrix substrate in an active matrix type color liquid crystal display device, and a color filter to be inspected is formed on this substrate. As shown in FIG. 2, this color filter is composed of a plurality of filter films 7a formed in a matrix on the counter electrode substrate 7, and each filter film 7a constitutes each pixel. Each filter film 7a is a filter that transmits only one of RGB colors, and is formed by a printing method, a dyeing method, an electrodeposition method, or the like so that each of these colors has a predetermined arrangement. In addition,
A transparent electrode film to be a counter electrode is formed on the counter electrode substrate 7, but here it is formed so as to cover each filter film 7a after the inspection.

When using the inspection device having the above structure,
First, after the counter electrode substrate 7 to be inspected is supported by the support, the liquid crystal panel 3 is moved by the X, Y, θ stage 1.
And the counter electrode substrate 7 are aligned with each other. That is, as shown in FIG. 2, the tilt angle of the liquid crystal panel 3 is changed so that the liquid crystal panel 3 runs along the counter electrode substrate 7 in parallel at regular intervals and the liquid crystal panel 3 is moved in the XY axis directions. Then, adjustment is performed so that each pixel (pixel electrode 3d) of the liquid crystal panel 3 exactly overlaps each pixel (filter film 7a) of the color filter on the counter electrode substrate 7. Then,
Light emitted from the lamp 2a of the illuminating device 2 is reflected by the reflection plate 2b and passes through each pixel of the liquid crystal panel 3 and the counter electrode substrate 7, so that all the color filters of the counter electrode substrate 7 are not defective. The pixels should be viewed as the same square, for example. The inspector visually inspects the transmitted light to inspect the color filter.

Here, several kinds of display patterns are stored in advance in the control circuit 5, and the data of these display patterns are sequentially sent to the drive circuit 4. The drive circuit 4 sequentially sends this data to each pixel of the liquid crystal panel 3 to control only the pixels forming the display pattern to be in the non-transmissive state and the other pixels to be in the light transmissive state. Therefore,
With this display pattern, the inspection range is limited and defective pixels become particularly noticeable.
A visual inspection can be assisted to perform a reliable inspection without leakage.

When a pixel defect is found by the above visual inspection, the control circuit 5 is made to create the data of the position designated by the mouse 6. Then, an arbitrary pixel of the liquid crystal panel 3 can be made opaque at any time according to the operation of the mouse 6, so that the opaque pixel is superposed on the defective pixel of the color filter. That is, as shown in FIG. 3, when the defective pixel 11 is present in the color filter on the counter electrode substrate 7, and the corresponding pixel 12 of the liquid crystal panel 3 is in the light transmitting state, the light from the lamp 2a is transmitted to the corresponding pixel 12 and Since it passes through the defective pixel 11, the inspector
An image of this defective pixel 11 can be observed as a defective pixel image 13. Further, when the corresponding pixel 12 is made opaque as shown in FIG. 4 by operating the mouse 6,
Since the light from the lamp 2a is blocked by the corresponding pixel 12, the position of the defective pixel 11 observed by the inspector becomes an opaque image 14 having no transmitted light. Here, as shown in FIG. 5, if only one corresponding pixel on the liquid crystal panel 3 is made opaque by operating the mouse 6,
Since the corresponding pixel 12 enters the non-transmissive state through the process of moving the non-transmissive pixel, it can be easily known that the corresponding pixel 12 is overlapped with the defective pixel 11.

Therefore, the inspector can quickly and accurately indicate the position of the found defective pixel 11 by operating the mouse 6. In this way, the defective pixel 11
When the position of the defective pixel 11 is designated, the coordinate position of the defective pixel 11 can be specified based on the data created by the control circuit 5 at this time. It is recorded in a storage device or the like. As a result, it becomes possible to accurately know the defect position found by this inspection in a subsequent defect repair process or the like. In the present embodiment, the defective position is indicated by setting only the corresponding pixel 12 overlapping the defective pixel 11 in the non-transmissive state. However, the corresponding pixel 12 is set in the light transmitting state and appropriate pixels around the corresponding pixel 12 are set in the non-transmissive state. The defective pixel 11
May be instructed.

(Second Embodiment) FIG. 6 shows a second embodiment of the present invention and is a block diagram showing the overall structure of a color filter inspection apparatus. The first shown in FIG.
The same numbers are added to the constituent members having the same functions as those in the embodiment.

In the inspection apparatus of this embodiment, the reflecting mirror 8 is arranged above the counter electrode substrate 7 in the inspection apparatus of the first embodiment, and the projection lens 9 and the screen 10 are provided on the side of the reflecting mirror 8. Is arranged. The reflecting mirror 8 is a flat reflecting mirror, and is arranged so as to be inclined at an angle of 45 °. Therefore, the liquid crystal panel 3 emitted from the lighting device 2
The light transmitted upward through the counter electrode substrate 7 is reflected by the reflecting mirror 8 and goes to the projection lens 9 on the side. Further, the projection lens 9 forms an image on the counter electrode substrate 7 on the screen 10 located at a predetermined focal length by the light reflected by the reflecting mirror 8 and projects the image.
Since the reflecting mirror 8 is merely for adjusting the projection direction of the image, the reflecting mirror 8 is removed and the liquid crystal panel 3 is removed.
It is also possible to dispose the projection lens 9 and the screen 10 directly above.

Therefore, in the case of the present embodiment, the image of the transmitted light of the counter electrode substrate 7 which is directly visually observed in the case of the first embodiment is enlarged and projected on the screen 10. Therefore, the inspector can inspect the defective pixel of the color filter on a larger screen, so that the inspector can more easily perform a reliable inspection.

In the present embodiment, the operation of the mouse 6 causes the pixels on the liquid crystal panel 3 to be in a non-transmissive state in a cross cursor shape. That is, a cross-cursor-shaped pattern of ten characters is displayed by setting all pixels having the same coordinates on the X-Y axis as the pixels directly designated to the non-transmissive state. Therefore, the cross-cursor-shaped display pattern 15 appears on the screen 10 as shown in the drawing, which allows fine defective pixels to be more easily indicated.

Also in this embodiment, as shown in the first embodiment, an instruction method in which only one pixel is in an opaque state, or only an appropriate pixel around the instructed pixel is used. It is also possible to use an instruction method such that the is in an opaque state. Further, in the first embodiment, the cross cursor-shaped display pattern 15 as in this embodiment can be used.

The display device to be inspected is not limited to the active matrix type display device, and the present invention can be applied to the matrix type display device.

[0039]

As is apparent from the above description, according to the inspection device and the inspection method of the present invention, the color filter formed on the counter electrode substrate is transmitted by the transmitted light in the same state as when the color filter is operated as a display device. Since the individual inspection can be performed without fail without fail, the loss of the manufacturing process can be reduced.

Further, even when a defect is detected, the defect position can be designated by the pointing device, so that the defect position can be specified quickly and accurately.

Further, the inspector can easily and surely perform the inspection based on the pattern of the transmitted light enlarged and displayed on the screen or the like.

[Brief description of drawings]

FIG. 1 shows a first embodiment of the present invention and is a configuration diagram showing an overall configuration of a color filter inspection device.

FIG. 2 shows a first embodiment of the present invention and is a partially enlarged vertical sectional view showing a superposed portion of a color filter and a liquid crystal panel.

FIG. 3 shows the first embodiment of the present invention and is an explanatory perspective view showing how light is transmitted when a pixel of a color filter has a defect.

FIG. 4 shows the first embodiment of the present invention and is an explanatory perspective view showing how light is transmitted when the pixels of the liquid crystal panel are set in the non-transmissive state.

FIG. 5 shows the first embodiment of the present invention, and is an explanatory perspective view showing a wider range of how light is transmitted when the pixels of the liquid crystal panel are set in the non-transmissive state.

FIG. 6 illustrates a second embodiment of the present invention and is a configuration diagram illustrating an overall configuration of a color filter inspection device.

[Explanation of symbols]

 1 X, Y, θ stage 2 Illuminator 3 Liquid crystal panel 4 Drive circuit 5 Control circuit 6 Mouse 7 Counter electrode substrate 8 Reflector 9 Projection lens 10 Screen

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification number Reference number within the agency FI Technical indication location G02F 1/13 505 9119-2K (72) Inventor Shoji Hosomi 22-22 Nagaike-cho, Abeno-ku, Osaka-shi, Osaka No. 22, 22 Inventor, Tatsuya Sasaki, Nagaike-cho, Abeno-ku, Osaka-shi, Osaka Prefecture (72) No. 22-22, Nagaike-cho, Abeno-ku, Osaka-shi, Osaka (72) In-house, Sharp Corporation In-company (72) Ryu Mizokami 22-22 Nagaike-cho, Abeno-ku, Osaka-shi, Osaka Prefecture Sharp Corporation (72) In-house Motoki Iguro 22-22, Nagaike-cho, Abeno-ku, Osaka City, Osaka Prefecture

Claims (5)

[Claims] 1. An inspection device for a color filter formed on a counter electrode substrate of a matrix type display device, which is formed in the same arrangement as a pixel of a color filter to be inspected and has at least two states of light transmission and non-transmission. , A liquid crystal panel having a controllable pixel, a liquid crystal panel driving device for making any pixel of the liquid crystal panel in an opaque state, and a color filter to be inspected is superposed on the liquid crystal panel for alignment. An inspection device for a color filter used in a matrix type display device, comprising a position adjusting device for performing the adjustment, and a light source provided behind the liquid crystal panel. 2. The liquid crystal panel drive device according to claim 1, further comprising a control unit capable of setting an arbitrary one or more pixels of the liquid crystal panel corresponding to a designated position to an opaque state. Inspection device for color filters used in the matrix type display device. 3. The color filter inspection device for use in a matrix type display device according to claim 1, further comprising an optical system device for projecting light transmitted through the liquid crystal panel and the color filter. 4. A method for inspecting a color filter formed on a counter electrode substrate of a matrix type display device, wherein each pixel of the color filter to be inspected and each pixel of the color filter are arranged in the same arrangement, and at least light is formed. A step of superposing and aligning a liquid crystal panel having pixels capable of controlling two states of transmission and non-transmission, irradiating the color filter with light from the liquid crystal panel side,
Detecting defective pixels of the color filter by observing light transmitted through the color filter, and detecting defective pixels of the color filter by making pixels of the liquid crystal panel non-transmissive in a predetermined pattern And a step of specifying pixels of the liquid crystal panel corresponding to the above, and a color filter inspection device used in a matrix type display device. 5. A method for inspecting a color filter formed on a counter electrode substrate of a matrix type display device, wherein each pixel of the color filter to be inspected and each pixel of the color filter are formed in the same arrangement and at least light is used. A step of superposing and aligning a liquid crystal panel having pixels capable of controlling two states of transmission and non-transmission, irradiating the color filter with light from the liquid crystal panel side,
Projecting the image of the color filter on a screen, detecting a defective pixel of the color filter by observing the image of the color filter projected on the screen, and forming a pixel of the liquid crystal panel in a predetermined pattern. A method of inspecting a color filter used in a matrix type display device, comprising: determining a pixel of the liquid crystal panel corresponding to a detected defective pixel of the color filter by setting a transmission state.