KR101420423B1 - Evaporating apparatus of organic matter - Google Patents

Abstract

The present invention relates to an organic substance deposition apparatus, and more particularly, to an organic substance deposition apparatus which includes a sensor unit for sensing a control parameter of a vaporized material evaporated from a crucible, and a guide having a shutter for selectively opening and closing the sensor unit, The present invention provides an organic material deposition apparatus capable of depositing an organic material.

Organic material, deposition, shutter, opening and closing, sensor part

Description

TECHNICAL FIELD [0001] The present invention relates to an organic material deposition apparatus,

More particularly, the present invention relates to an organic material deposition apparatus capable of extending a replacement cycle of a sensor unit for sensing a deposition thickness and a deposition rate.

Display devices are making great progress with the development of information and communication, and are becoming a necessity for modern people. Among such display devices, an organic light emitting diode display device does not require a backlight source such as a liquid crystal display device, and thus can be lightweight and thin. In addition, the organic light emitting diode display device can be manufactured through a simple process, and thus can be cost competitive. In addition, the organic light emitting diode display device has low voltage driving, high luminous efficiency, and wide viewing angle. As a result, the organic light emitting diode display device has rapidly increased as a next generation display.

The organic light emitting diode display device basically includes an anode electrode, a cathode electrode, and an organic light emitting diode device having an organic light emitting layer sandwiched between the two electrodes. Here, in the organic light emitting diode device, holes and electrons provided in the anode and the cathode are recombined in the organic light emitting layer to form an exciton, and the exciton falls into a stable state from an unstable state, Is used. In addition, the organic light emitting diode display device may further include an organic layer capable of enhancing luminous efficiency by smoothly supplying holes and electrons to the organic light emitting layer. The organic layer may be at least one of a hole injecting layer, a hole transporting layer, a hole blocking layer, an electron transporting layer, and an electron injecting layer.

The formation of the organic light emitting layer and the organic layer includes a crucible for storing and evaporating a deposition material, for example, an organic material, a sensor portion disposed above the crucible, and a substrate mounting portion for fixing the substrate on which the deposition material is deposited, A deposition apparatus is used.

The sensor unit senses the control parameters of the deposition material, for example, the deposition thickness and the deposition rate during the deposition process of the deposition material, and provides the control unit to the user or controls the deposition conditions of the deposition apparatus. However, when the substrate is not being deposited onto the substrate, for example, when the remaining deposition material is removed from the crucible, or when the substrate is loaded, aligned and unloaded by the substrate mounting portion before or after the deposition, the deposition material is deposited on the sensor portion , The life of the sensor part can be shortened by contaminating the sensor part. Thus, since the sensor unit needs to be frequently replaced, a process for adding a cost to the sensor unit and replacing the sensor unit can be added.

Therefore, in the conventional organic material vapor deposition apparatus, an unnecessary evaporation material is deposited on the sensor unit to shorten the life of the sensor unit, and the process time is increased due to frequent replacement of the sensor unit, thereby increasing the manufacturing cost.

One object of the present invention is to provide an organic substance deposition apparatus capable of extending the replacement period of the sensor unit by preventing the unnecessary substances from being deposited on the sensor unit by providing a shutter which is selectively openable and closable in the sensor unit.

According to an aspect of the present invention, there is provided an apparatus for depositing organic materials. Wherein the organic substance deposition apparatus includes a deposition chamber, a substrate mounting portion for mounting a substrate on which a deposition material is deposited, a rotation portion facing the substrate mounting portion, a rotatable rotation portion disposed in the rotation portion, A guide having an opening corresponding to at least the crucible and a front face opposed to the crucible is exposed by the opening of the guide, and a control variable of the deposition material And a shutter unit disposed on the guide and selectively opening and closing the opening exposed from the guide.

The present invention can prevent the deterioration of the lifetime of the sensor part due to deposition of unnecessary evaporation material on the sensor part by providing a shutter part selectively openable and closable on the sensor part. Therefore, the present invention can extend the replacement period of the sensor unit, thereby saving the cost of the sensor unit and the time for replacing the sensor unit.

In addition, the present invention has a groove capable of storing evaporated evaporated material on a crucible, and optionally a cap capable of covering the crucible, thereby preventing evaporation material from accumulating in the sensor portion.

Further, the present invention can prevent the chamber from being contaminated by unnecessary deposition by the cap. In addition, the present invention can recover and regenerate the deposited material deposited on the cap, thereby preventing environmental contamination and reducing the cost of material cost.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings of an organic substance deposition apparatus. The following embodiments are provided by way of example so that those skilled in the art can fully understand the spirit of the present invention. Therefore, the present invention is not limited to the embodiments described below, but may be embodied in other forms. In the drawings, the size and thickness of an apparatus may be exaggerated for convenience. Like reference numerals designate like elements throughout the specification.

FIG. 1 is a schematic view illustrating an apparatus for depositing an organic material according to a first embodiment of the present invention, and FIG. 2 is a perspective view of the rotation unit shown in FIG.

Referring to FIGS. 1 and 2, the organic material deposition apparatus includes a deposition chamber 100. The deposition chamber 100 can be controlled to maintain its interior in a vacuum atmosphere. As a result, the organic material deposition on the substrate can be performed in a vacuum atmosphere.

A substrate mounting part 110 is disposed inside the deposition chamber 100. The substrate mounting part 110 transports or transports the substrate 115 on which the deposition material is to be deposited to the inside of the deposition chamber 100. In addition, the substrate mount 110 fixes the substrate 115 during the deposition process.

A rotatable rotation unit 120 is disposed inside the deposition chamber 100 so as to face the substrate mounting unit 110. The rotation unit 120 may be divided into at least two cells 122 by the partition 125.

And a crucible 130 for storing and evaporating the evaporation material is disposed in each cell 122 of the rotation unit 120. [ A heat source such as a hot wire (not shown) is disposed outside the crucible 130 to evaporate the deposition material stored in the crucible 130 to deposit the deposition material on the substrate 115. For example, when an organic layer made of a single material is formed on the substrate 115, the same deposition material may be stored in at least two crucibles 130, respectively. At least two or more crucibles 130 may simultaneously evaporate the deposition material on the substrate 115. The cap 135 of at least one crucible 130 of the plurality of crucibles 130 may be opened and the cap 135 of the remaining crucibles 130 may be opened 135 are closed to perform the deposition process. Thereafter, when the evaporation material of the crucible in which the cap 135 is opened is completely evaporated, the cap 135 of the other crucible 130 is opened and the evaporation process is performed again. That is, after the evaporation materials stored in the crucible 130 are completely evaporated, the evaporation material is not filled again in the crucible 130, and the deposition process is continuously performed using the evaporation material of the other crucible 130, ) Can be shortened.

Alternatively, when forming an organic light emitting layer containing different kinds of materials, for example, a host and a dopant, on the substrate 115, at least two of the at least two crucibles 130 store the host material, The dopant material can be stored. At this time, the crucibles 130 simultaneously evaporate the host material and the dopant material on the substrate 115 to form an organic light emitting layer in which a host material and a dopant material are mixed on the substrate 115.

A guide 150 is disposed on the rotation part 120 corresponding to each cell 122. The guide 150 has an opening facing at least the crucible 130. In addition, the guide 150 has a storage space for accommodating the sensor unit 160 to be described later. For example, the guide 150 may have a cylindrical shape. Here, the guide 150 is coupled to the support member 140 fixed to the rotation unit 120. Thus, the guide 150 can be fixed to the rotation part 120. [

The sensor unit 160 is housed in the storage space of the guide 150. [ The opening of the guide 150 exposes the front face of the sensor unit 160 facing the crucible. Accordingly, the sensor unit 160 can detect the control parameters of the deposition material, such as the deposition rate of the deposition material and the thickness of the thin film to be formed on the substrate 115, Sensing can be performed. Here, the sensor unit 160 may include a crystal sensor having a variable piezoelectric frequency depending on the amount of the evaporation material to be deposited.

A shutter unit 170 coupled to the guide 150 and capable of selectively opening and closing an opening exposed from the guide 150 is disposed. The shutter unit 170 can control whether the deposition material is deposited on the front surface of the sensor unit 160 exposed by the opening. When the sensor unit 160 senses the thickness of the thin film and the deposition rate, the shutter unit 170 opens the opening of the guide 150 to deposit the deposition material on the front surface of the sensor unit 160. In contrast, when the sensor unit 160 does not detect the thickness of the thin film and the deposition rate, the shutter unit 170 closes the opening of the guide 150 to prevent deposition of unnecessary evaporation material on the sensor unit 160 .

Hereinafter, various forms of the shutter portion will be described in more detail with reference to the drawings.

3A to 3D are views showing various forms of the shutter unit shown in FIG.

3A, the shutter unit 170a includes a shutter 171a and a hinge member 172a. The shutter 171a exposes the sensor unit 160 and is attached to the guide 150 facing the crucible 130 in Fig. The hinge member 172a may have a shape in which a certain portion of the shutter 171a protrudes laterally. A first hole may be formed through the hinge member 172a.

The guide 150 is provided with a fixing member 174a. The fixing member 174a may be integrally formed with the guide 150. The fixing member 174a may protrude from the guide 150. [ The hinge member 172a can be fastened to the fixing member 174a. That is, the fixing member 172a may be disposed on both sides of the hinge member 172a. Thereby, the shutter 171a can be fixed to the guide 150. [ At this time, the fixing member 174a has a second hole corresponding to the first hole of the hinge member 172a. As the hinge pin 173a is inserted into the first hole and the second hole, the hinge member 172a, The shutter 171a can be folded and folded so that the opening 190 of the guide 150 can be selectively opened and closed. Thus, it is possible to prevent unnecessary substances from being deposited on the sensor unit 160 exposed from the opening 190 of the guide 150.

The hinge member 172a and the shutter 171a are formed integrally with each other. Alternatively, the hinge member 172a may be formed integrally with the guide 150.

3B, the shutter unit 170b may include a shutter 171b and a rotating member 172b. The shutter 171b opens and closes the opening 190 of the guide 150 exposing the sensor unit. The rotary member 172b may be in the form of a protrusion in which a certain portion of the shutter 171b protrudes into the bell. The rotating member 172b may be in the form of a cylinder to facilitate rotation.

The guide 150 has a fixing member 173b disposed close to the opening 190. [ The fixing member 173b may have a through hole. At this time, as the rotary member 172b is inserted into the through hole, the shutter 171b can be rotated transversely with respect to the guide 150. [ Thereby, the shutter 171b can selectively open and close the opening 190 of the guide 150. [

Although not shown in the drawing, a nut may be further fastened to one end of the rotating member 172b to prevent the rotating member 172b inserted into the through hole from deviating.

Although the rotary member 172b is illustrated as being integrally formed with the shutter 171a in the drawings, the rotary member 172b may be a pin.

3C, the shutter unit 170c includes a shutter 171c and a rotating member 172c. The rotary member 172c is fastened to the fixing member 173c of the guide 150 to rotate the shutter 171c transversely. At this time, in order to bring the shutter close to the sensor unit 160, the guide 150 may be provided close to the sensor unit 160, and may have a transverse constant groove 155 for inserting the shutter 171c. Through the groove 155, the shutter 171c is selectively inserted into the groove 155 and discharged. Thus, the shutter 171c can prevent unnecessary substances from being deposited on the front surface of the sensor unit 160. [

As shown in FIG. 3D, the guide 150 may further include a rear opening that exposes a rear surface of the sensor unit 160. For example, the guide 150 may have a through-type configuration.

The shutter unit 170d includes a shutter 171d and a rotating member 172d. The shutter 171a may be fixed to the sensor unit 160 exposed in the rear opening of the guide. That is, the shutter 171a may close at least a part of the rear surface of the sensor unit 160. [

One side of the rotating member 172d is disposed outside the shutter 171d and the other side of the rotating member 172d can be coupled to the supporting member 140 that supports the guide 150. [

The rotating member 172d can rotate the shutter 171d and the guide 150 back and forth. That is, when an unnecessary substance is deposited on the sensor unit 160, the rear surface of the sensor unit 160 closed by the shutter 171d is guided by the shutter 171d and the guide 150 so as to face the crucible .

Although not shown in the drawing, reference numeral 180, which is not described in detail, is a cable for providing a signal sensed by the sensor unit to the control unit.

Accordingly, in the embodiment of the present invention, the sensor unit 160 includes shutter units 170a, 170b, 170c, and 170d that can be selectively opened and closed to deposit a material that should not be deposited on the sensor unit 160 And the life of the sensor unit 160 can be prolonged. In addition, the crucible 130 is rotated by the rotation unit 120 and performs a deposition process, so that a uniform thin film can be formed on the substrate 115. In addition, the sensor unit 160 rotates together with the crucible 130, and the thickness and the deposition rate of the thin film deposited by the evaporation material evaporated from each crucible 130 can be measured. When the sensor unit 160 rotates, the shutter unit 160 rotates together with the sensor unit 160. The sensor unit 160 and the shutter unit 170 can be moved in the same manner, The sensor unit 160 can be prevented from being contaminated because the sensor unit 170 is not aligned.

4A and 4B are views for explaining an organic material deposition apparatus according to a second embodiment of the present invention. FIG. 4A is a perspective view of a rotating part of an organic substance deposition apparatus according to a second embodiment of the present invention, and FIG. 4B is an enlarged view of the cap shown in FIG. 4A. And has the same configuration as the first embodiment described above except for the cap in the second embodiment. Therefore, the second embodiment will not be repeated with the first embodiment, and the same reference numerals refer to the same components.

4A and 4B, the organic material deposition apparatus includes a substrate mounting portion (110 shown in FIG. 1) disposed in a deposition chamber (100 shown in FIG. 1), a rotation portion 120, a crucible 130, A sensor unit 160, and a shutter unit 170. As shown in FIG.

The rotation unit 120 is divided into at least two cells 122 by the partition 125 and the crucible 130, the sensor unit 160 and the shutter unit 170 may be disposed in each cell 122 have.

A cap 235 is attached to each crucible 130. The cap 235 is fastened to the hinge member 240 disposed in the crucible 130 so that the crucible 130 can be selectively opened and closed. That is, when a plurality of crucibles 130, for example, first and second crucibles are provided, the first and second crucibles may store the same material. At this time, the first crucible opens the cap, and the second crucible performs the deposition process with the cap closed. Thereafter, when the evaporation material of the first crucible disappears, the second crucible performs the evaporation process again after opening the cap. Thus, it is possible to shorten the time for evaporating the deposition material to the crucible again after evaporating all of the deposition material in the deposition process.

However, in the deposition process using the second crucible, when the first crucible is opened, the evaporation material that may remain in the first crucible is evaporated to contaminate the sensor unit 150 or to form a thin film having an uneven thickness on the substrate can do. Alternatively, the inside of the deposition chamber 100 may be contaminated. Accordingly, when the second crucible is used, the first crucible is closed with the cap to primarily prevent the sensor unit 150 from being contaminated, and the secondary crucible is prevented by the shutter unit 170 disposed on the sensor unit 150 can do.

Also, the cap 235 may have a certain space so that the deposition material can be stored. For example, the cap 235 may have the shape of a cup. Accordingly, when the material evaporates on the crucible 130 closed by the cap 235 and is deposited on the cap 235, the material deposited on the cap 235 can be regenerated and used. This prevents environmental pollution and reduces the cost of material costs. In addition, the process of frequently cleaning the cap 235 may be reduced to prevent excessive deposition of the evaporation material in the cap 235, thereby forming a gap between the cap 235 and the crucible 130.

1 is a schematic view illustrating an apparatus for depositing an organic material according to a first embodiment of the present invention.

2 is a perspective view of the rotating part shown in Fig.

3A to 3D are views showing various forms of the shutter unit shown in FIG.

4A and 4B are views for explaining an organic material deposition apparatus according to a second embodiment of the present invention.

 (Description of Reference Numbers to Main Parts of the Drawings)

100: vacuum chamber 110: substrate mounting part

115: substrate 120:

130: crucible 135, 235: cap

140: support member 150: guide

160:

170, 170a, 170b, 170c, and 170d:

Claims (9)

A deposition chamber; A substrate mounting part disposed inside the deposition chamber and fixing the substrate on which the deposition material is deposited; A rotating portion facing the substrate mounting portion and capable of rotating; A crucible disposed in the rotating portion for storing and evaporating the evaporation material; A guide fixed to the rotating portion and having an opening corresponding to at least the crucible; A sensor unit which exposes a front face opposed to the crucible by an opening of the guide and senses a control parameter of the deposition material; And And a shutter unit disposed in the guide and selectively opening and closing an opening exposed from the guide, Wherein the rotary part is divided into at least one or more cells and includes a partition disposed on the rotating part, Wherein the crucible and the sensor unit are disposed in each cell. The method according to claim 1, The shutter A shutter disposed in the guide close to the opening and capable of opening and closing an opening of the guide; And And a hinge member that engages the guide and the shutter, and the shutter folds the shutter to selectively open and close the opening of the guide. The method according to claim 1, The shutter A shutter disposed in the guide close to the opening and capable of opening and closing an opening of the guide; And And a rotating member coupling the guide and the shutter, wherein the shutter rotates the shutter horizontally to selectively open and close the opening of the guide. The method according to claim 1, Wherein the guide has a groove formed in a lateral direction close to a front surface of the sensor unit, the shutter unit being inserted into the groove and being capable of opening and closing the front surface of the sensor unit; And And a rotary member disposed in the guide close to the groove for coupling the guide and the shutter, and the shutter rotating the shutter transversely of the guide for selectively opening and closing the opening of the guide The organic material evaporation device. The method according to claim 1, Wherein the shutter unit comprises: a shutter fixed to a rear surface of the sensor unit; And And a rotating member attached to an outer surface of the shutter and rotating the shutter and the guide back and forth. The method according to claim 1, And a cap capable of selectively opening and closing the crucible. The method according to claim 6, Wherein the cap has a space having a predetermined depth to store the deposited deposition material. The method according to claim 6, Wherein the cap has a cup shape. delete

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