KR101389722B1 - 고출력 펄스 레이저 어플리케이션을 위한 빔 형상 및 대칭도를 안정화시키는 디바이스 및 방법 - Google Patents

고출력 펄스 레이저 어플리케이션을 위한 빔 형상 및 대칭도를 안정화시키는 디바이스 및 방법 Download PDF

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KR101389722B1
KR101389722B1 KR1020087030013A KR20087030013A KR101389722B1 KR 101389722 B1 KR101389722 B1 KR 101389722B1 KR 1020087030013 A KR1020087030013 A KR 1020087030013A KR 20087030013 A KR20087030013 A KR 20087030013A KR 101389722 B1 KR101389722 B1 KR 101389722B1
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KR20090015962A (ko
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토마스 호프만
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사이머 엘엘씨
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0095—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with ultraviolet radiation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0061—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Lasers (AREA)
  • Recrystallisation Techniques (AREA)
KR1020087030013A 2006-06-05 2007-05-22 고출력 펄스 레이저 어플리케이션을 위한 빔 형상 및 대칭도를 안정화시키는 디바이스 및 방법 Active KR101389722B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/447,380 US7433372B2 (en) 2006-06-05 2006-06-05 Device and method to stabilize beam shape and symmetry for high energy pulsed laser applications
US11/447,380 2006-06-05
PCT/US2007/012389 WO2007145791A2 (en) 2006-06-05 2007-05-22 Device and method to stabilize beam shape and symmetry for high energy pulsed laser applications

Publications (2)

Publication Number Publication Date
KR20090015962A KR20090015962A (ko) 2009-02-12
KR101389722B1 true KR101389722B1 (ko) 2014-04-29

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KR1020087030013A Active KR101389722B1 (ko) 2006-06-05 2007-05-22 고출력 펄스 레이저 어플리케이션을 위한 빔 형상 및 대칭도를 안정화시키는 디바이스 및 방법

Country Status (6)

Country Link
US (1) US7433372B2 (enExample)
EP (1) EP2036168B1 (enExample)
JP (1) JP2009540567A (enExample)
KR (1) KR101389722B1 (enExample)
TW (1) TWI344014B (enExample)
WO (1) WO2007145791A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11282872B2 (en) 2019-04-12 2022-03-22 Samsung Display Co., Ltd. Laser apparatus and manufacturing method of display apparatus using the same

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7564888B2 (en) * 2004-05-18 2009-07-21 Cymer, Inc. High power excimer laser with a pulse stretcher
US7778302B2 (en) * 2005-11-01 2010-08-17 Cymer, Inc. Laser system
US7715459B2 (en) * 2005-11-01 2010-05-11 Cymer, Inc. Laser system
US7746913B2 (en) 2005-11-01 2010-06-29 Cymer, Inc. Laser system
EP1952493A4 (en) * 2005-11-01 2017-05-10 Cymer, LLC Laser system
US7885309B2 (en) * 2005-11-01 2011-02-08 Cymer, Inc. Laser system
US7630424B2 (en) * 2005-11-01 2009-12-08 Cymer, Inc. Laser system
US7643529B2 (en) * 2005-11-01 2010-01-05 Cymer, Inc. Laser system
US20090296755A1 (en) * 2005-11-01 2009-12-03 Cymer, Inc. Laser system
US7999915B2 (en) * 2005-11-01 2011-08-16 Cymer, Inc. Laser system
US20090296758A1 (en) * 2005-11-01 2009-12-03 Cymer, Inc. Laser system
US7920616B2 (en) * 2005-11-01 2011-04-05 Cymer, Inc. Laser system
US8803027B2 (en) * 2006-06-05 2014-08-12 Cymer, Llc Device and method to create a low divergence, high power laser beam for material processing applications
WO2012120563A1 (ja) * 2011-03-08 2012-09-13 パナソニック株式会社 薄膜トランジスタアレイ装置、有機ｅｌ表示装置、及び、薄膜トランジスタアレイ装置の製造方法
KR102369090B1 (ko) 2015-09-15 2022-03-02 삼성디스플레이 주식회사 레이저 장치

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JPH02166783A (ja) * 1988-12-21 1990-06-27 Adomon Sci Kk エキシマレーザーのホモジナイザー
US20040136417A1 (en) * 2002-05-07 2004-07-15 Webb R. Kyle Long delay and high TIS pulse stretcher
JP2005502211A (ja) 2001-08-29 2005-01-20 サイマー インコーポレイテッド ビームデリバリーを備えたレーザリソグラフィー光源
US20050259709A1 (en) 2002-05-07 2005-11-24 Cymer, Inc. Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate

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JPH01319727A (ja) * 1988-06-22 1989-12-26 Sony Corp 光学装置
JPH0990265A (ja) * 1995-09-26 1997-04-04 Asahi Optical Co Ltd 像反転光学系
JPH11283933A (ja) * 1998-01-29 1999-10-15 Toshiba Corp レ―ザ照射装置，非単結晶半導体膜の製造方法及び液晶表示装置の製造方法
JPH11312631A (ja) * 1998-04-27 1999-11-09 Nikon Corp 照明光学装置および露光装置
JP3437088B2 (ja) * 1998-06-04 2003-08-18 住友重機械工業株式会社 ビーム回転機能付ホモジナイザ装置及びこれを用いたレーザ加工装置
JP2002139697A (ja) * 2000-11-02 2002-05-17 Mitsubishi Electric Corp 複数レーザビームを用いたレーザ光学系とレーザアニーリング装置
JP2002174767A (ja) * 2000-12-08 2002-06-21 Mitsubishi Electric Corp レーザ処理用のレーザ光学系
US6693930B1 (en) * 2000-12-12 2004-02-17 Kla-Tencor Technologies Corporation Peak power and speckle contrast reduction for a single laser pulse
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JPH02166783A (ja) * 1988-12-21 1990-06-27 Adomon Sci Kk エキシマレーザーのホモジナイザー
JP2005502211A (ja) 2001-08-29 2005-01-20 サイマー インコーポレイテッド ビームデリバリーを備えたレーザリソグラフィー光源
US20040136417A1 (en) * 2002-05-07 2004-07-15 Webb R. Kyle Long delay and high TIS pulse stretcher
US20050259709A1 (en) 2002-05-07 2005-11-24 Cymer, Inc. Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11282872B2 (en) 2019-04-12 2022-03-22 Samsung Display Co., Ltd. Laser apparatus and manufacturing method of display apparatus using the same
US11961851B2 (en) 2019-04-12 2024-04-16 Samsung Display Co., Ltd. Laser apparatus and manufacturing method of display apparatus using the same

Also Published As

Publication number Publication date
TW200804869A (en) 2008-01-16
US7433372B2 (en) 2008-10-07
JP2009540567A (ja) 2009-11-19
KR20090015962A (ko) 2009-02-12
EP2036168A2 (en) 2009-03-18
EP2036168A4 (en) 2011-07-13
US20070279747A1 (en) 2007-12-06
TWI344014B (en) 2011-06-21
WO2007145791A2 (en) 2007-12-21
EP2036168B1 (en) 2019-07-03
WO2007145791A3 (en) 2008-03-13

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