KR101276489B1

KR101276489B1 - Excimer lamp

Info

Publication number: KR101276489B1
Application number: KR1020100044431A
Authority: KR
Inventors: 신이치 엔도; 노리타카 다케조에
Original assignee: 우시오덴키 가부시키가이샤
Priority date: 2009-07-14
Filing date: 2010-05-12
Publication date: 2013-06-18
Also published as: TW201103075A; JP2011023156A; CN101958223B; KR20110006590A; JP5195675B2; TWI407484B; CN101958223A

Abstract

(Problem) An excimer lamp which prevents an electrode from being damaged by a base is provided.
(Solution means) The hollow long discharge tube 2 having a rectangular cross-sectional shape in which the light emitting element is enclosed, the electrodes 3 and 4 which are provided on the outer surface of the discharge tube 2 and extended in the long direction, and the electrodes 3 and 4. In the excimer lamp (1) having a solder material (7, 8) for connecting the lead and the lead, a long end of the electrodes (3, 4) and a base (9) covering the solder material (7, 8), the base The edge 932 of (9) is an excimer lamp which abuts on the surface on which the electrode 3 on the outer surface of the discharge tube 2 is provided and has a gap 97 between the electrodes 3. .

Description

Excimer lamp {EXCIMER LAMP}

The present invention relates to an excimer lamp, and more particularly to an excimer lamp having a base.

In patent document 1, as shown in FIG. 3, the electrode 102 is provided in the outer surface of the discharge tube 101, the lead wire 103 is connected to this electrode 102, and the electrode 102 and the lead wire ( A dielectric barrier discharge lamp having a chuck 104 to surround a connection point of 103 is disclosed.

In addition, Citation Document 2 discloses an excimer lamp in which an electrode and a lead are soldered and connected by a brazing material.

Japanese Patent Publication 2005-347025 Japanese Patent Publication 2004-342369

Usually, in an excimer lamp, since the connection force by the brazing material of an electrode and a lead has weak adhesive force, it is necessary to surround the brazing material with a chuck (base) so that external stress may not be caught by the brazing material. By the way, when the brazing filler material is surrounded by the base, the base is positioned above the electrode.

For example, in the dielectric barrier discharge lamp described in Reference Document 1, the chuck 104 and the electrode 102 are spaced apart from each other in the drawing. However, when the lamp is replaced or the like, when the external stress is applied to the chuck 104, the chuck 104 may contact the electrode 102 and be scratched. Due to this scratch, (1) the line width of the electrode 102 may be thinned, and (2) the scratch may be a projection protruding outward from the outer surface of the discharge tube 101.

The excimer lamp is applied with a high voltage of 6 kV, for example. Therefore, if a high voltage is applied in the state where the electrode 102 is scratched, (1) the portion where the line width is thin increases the electrical resistance and the heat generation increases. (2) If the projection caused by the scratch is on the high voltage side electrode, corona discharge is generated from the projection, and the electrode 102 is heated by this discharge. As a result, the scratched part of the electrode 102 is heated, the metal constituting the electrode 102 evaporates, and when the electrode 102 evaporates, a disconnection occurs and power is supplied to the electrode 102. It becomes impossible.

An object of the present invention is to provide an excimer lamp in which the electrode is prevented from being damaged by the base in view of the above problems.

In order to solve the said subject, invention of Claim 1 is a rectangular cross-sectional discharge tube in which the light emitting element was enclosed, the hollow elongate discharge tube, the electrode extended in the elongate direction in the outer surface of the said discharge tube, the said electrode and a lead In an excimer lamp having a solder material for connecting the lead, an end portion in the long direction of the electrode and a base covering the solder material, the edge of the base abuts the surface on which the electrode on the outer surface of the discharge tube is provided, and It is an excimer lamp characterized by having a clearance between.

The invention according to claim 2 is a cross-sectional rectangular hollow tube in which a light emitting element is enclosed, a hollow elongated discharge tube, an electrode provided on the outer surface of the discharge tube extended in its long direction, a brazing filler material for connecting the electrode and the lead, and the electrode An excimer lamp having an elongated end portion and a base covering the brazing filler material, wherein the edge of the base abuts a surface on which the electrode of the discharge tube outer surface is provided, and a recess is provided on a portion where the electrode is provided. An excimer lamp is characterized by having a gap between the electrodes.

According to the invention of claim 1, even if there is a relative movement between the base and the electrode, the edge of the base abuts the surface on which the electrode on the outer surface of the discharge tube is provided, and also has a gap between the electrode. And the base do not contact, and the electrode is not damaged by the base. In addition, even when an external stress is applied to the base, the edge of the end of the base is provided so as to be able to contact the discharge tubes other than the electrode, so that a gap is secured between the end of the base and the electrode, and the electrode is not damaged by the base.

According to the invention of claim 2, even if the electrode moves relative to the base, since the recess is provided in the discharge tube, a gap is formed between the end of the base and the electrode, so that the electrode is not damaged by the base. Moreover, even if an external stress is applied to the base, the discharge tube is brought into contact with the edge of the end of the base at a portion other than the recess of the discharge tube, and a gap is secured between the electrode in the recess and the end of the base, so that the electrode is connected to the base. It is not damaged by.

1 is a diagram illustrating a configuration of an excimer lamp according to a first embodiment.
2 is a diagram illustrating a configuration of an excimer lamp according to a second embodiment.
3 is a partial cross-sectional view showing the configuration of an excimer lamp according to the prior art.

1st Embodiment of this invention is described with reference to FIG.

Fig.1 (a) is sectional drawing which shows the structure of the excimer lamp which concerns on this embodiment, Fig.1 (b) is AA sectional drawing of Fig.1 (a), Fig.1 (c) is BB of Fig.1 (a). It is a cross section.

As shown in these drawings, the excimer lamp 1 includes a discharge tube 2 having a longitudinal direction, a pair of electrodes 3 and 4 on the outer surface of the discharge tube 2, and an electrode 3 and 4. Leads 5 and 6 electrically connected, solders 7 and 8 for electrically connecting the electrodes 3 and 4 and leads 5 and 6, and a base 9 surrounding the solders 7 and 8; (Upper base 91, lower base 92).

More specifically, the excimer lamp 1 is provided with a discharge tube 2 having a rectangular cross-sectional shape and a hollow elongated shape in which both ends are hermetically sealed and a discharge space is formed therein. As the discharge gas, xenon gas is sealed. Here, xenon gas is the amount of encapsulation in which the pressure in normal temperature exists in the range of 10 kPa-60 kPa, for example. The discharge tube 2 is made of silica glass, for example, synthetic quartz glass, which transmits vacuum ultraviolet light well, and functions as a dielectric when the lamp is turned on. The discharge tube 2 is arranged so that the long sides 21 made of long glass plate face each other, and has a rectangular cross section by the short sides 22 connecting the long sides 21 and the long sides 21. The tube is formed. Both end surfaces 23 in the longitudinal direction are closed, and the interior of the discharge space becomes an airtight space. The discharge tube 2 has a length in the longitudinal direction of 800 to 1600 mm, for example, and has a discharge space of 320 to 640 cm ³ .

On the outer surface of the long side surfaces 21 and 21 of the discharge tube 2, a pair of lattice-shaped electrodes 3 and 4 are formed so as to extend in the long direction. That is, one electrode 3 to which a high voltage is applied is disposed on one outer surface of the long side surface 21, and the other electrode serving as a ground electrode is located on the other outer surface of the long side surface 21. (4) is arranged. As a result, the discharge tube 2 serving as the dielectric and the discharge space are interposed between the pair of electrodes 3 and 4. Such electrodes 3 and 4 are, for example, by mixing a cellulose binder with a metal powder, adding a solvent, and drawing and coating electrode materials in the form of a dough paste in a lattice shape to the discharge tube 2, or It is formed by screen printing.

The leads 5 and 6 are connected to the electrodes 3 and 4 via the brazing filler materials 7 and 8. As the material of the brazing materials 7 and 8, solder, silver solder or the like is used. Moreover, the base which fixed the upper base 91 and the lower base 92 by the fixing means 10 which consists of a bolt and a nut etc. so that the outer side of the brazing filler materials 7 and 8 may surround the brazing filler materials 7 and 8. (9) is installed. As the material of the base 9, ceramics such as steatite, which have electrical insulation properties, are used.

As shown in Fig. 1 (a), (b) and (c), the base 9 has the edges 932 and 942 formed on the outer surface of the long sides 21 and 21 of the discharge tube 2 (electrode 3). , 4) is provided, and the edge part and the brazing material of the elongate direction of an electrode are covered. In the base 9, the openings 931 and 941 are formed at end portions 93 and 94 facing the electrodes 3 and 4 to form gaps 97 and 98 outside the electrodes 3 and 4. ) And contactable edges 932, 942 in the shape of a corner disposed in the left and right directions of the sheet in FIG. 1B, for example, on discharge tubes 2 other than the electrodes 3, 4. And contact portions 9321, 9321, 9421, and 9421 provided. That is, as shown in FIG. 1 (b), the end portions 93 and 94 are formed in the rectangular abutable edges 932 and 942 and the openings 931 and 941 sandwiched between the edges 932 and 942. As a result, it is formed in a substantially U shape.

In addition, as shown in Fig. 1 (a), since the brazing filler materials 7 and 8 are surrounded by the base 9, the stress to the brazing filler materials 7 and 8 can be suppressed, and the brazing filler materials 7 and 8 are peeled off. Can prevent losing. Thereby, the electrical conduction of the electrodes 3 and 4 and the leads 5 and 6 can be performed favorably.

In addition, the excimer lamp 1 is started in the discharge space between the pair of electrodes 3, 4, and the excimer discharge can obtain desired light (vacuum ultraviolet rays) from the excimer discharge. At the time of lamp lighting, the excimer lamp 1 is heated by the discharge, and each member expands. At this time, the discharge tubes 2 and the base 9 have different materials, and because of their different thermal expansion coefficients, the electrodes 3 and 4 disposed in the discharge tube 2 move relative to the base 9. . At this time, even if there is a relative movement between the base 9 and the electrodes 3, 4, the edges 932, 942 of the base 9 are as shown in FIGS. 1A, 1B, and 3C. And the outer surface of the discharge tube 9 abut, an opening 931 is formed at the edge 932 of the end portion 93 of the base 9, and an opening is formed at the edge 942 of the end 94 of the base 9. Since 941 is provided, gaps 97 and 98 are formed between the opening 941 of the base 9 and the electrodes 3 and 4, and the electrodes 3 and 4 and the base 9 do not contact each other. As a result, the electrodes 3 and 4 can be prevented from being damaged by the base 9.

In addition, external stress may be applied to the base 9. At this time, the edges 932 and 932 of the contact portions 9321 and 9321 provided at the end portion 93 of the base 9 and the edges 942 of the contact portions 9421 and 9421 provided at the end portion 94 of the base 9. , 942 abuts on the outer surface of the discharge tube 2 other than the electrodes 3, 4, so that the gaps 97, 98 by the openings 931, 941 on the outside of the electrodes 3, 4 are formed. Secured. Therefore, even if the external stress is applied to the base 9, it is possible to prevent the electrodes 3 and 4 from being damaged by the base 9.

In addition, as shown in the present application, disconnection of the electrode is likely to occur on the side to which a high voltage is applied. For this reason, when only one electrode is high voltage at the time of lamp lighting, the opening part 931 and the edge part 93 of the base 91 of the at least one electrode side, for example, the electrode 3 side, are If the edge 932 is provided, the problem can be solved.

A second embodiment of the present invention will be described with reference to FIG.

2 (a) is a cross-sectional view showing the configuration of the excimer lamp according to the present embodiment, FIG. 2 (b) is a CC cross-sectional view of FIG. 2 (a), and FIG. 2 (c) is a part of FIG. 2 (a). Top view.

In these drawings, in the excimer lamp of the present embodiment, the end portions 95 and 96 and the gaps 26 and 27 are formed in a part of the discharge tube 2 facing the ends 95 and 96 of the base 9. The recesses 24 and 25 in which the electrodes 3 and 4 are disposed are provided through the gaps. In addition, since the other structure corresponds to the structure of the same code | symbol shown in FIG. 1, description is abbreviate | omitted.

In more detail, as shown to FIG. 2 (c), the line width is narrowed so that the electrode 3 (4) may enter into the part of the recessed part 24 (25). 2 (a) and 2 (b), the end portions 95 and 96 facing the electrodes 3 and 4 of the base 9, that is, the front portion of the base 9 have a flat plate shape. The front plate-shaped ends 95 and 96 of the base 9 are disposed opposite to the electrodes 3 and 4 disposed in the recesses 24 and 25 via the gaps 26 and 27.

At the time of lamp lighting, even if each member expands, as shown in FIG.2 (b), the recessed part 24 and 25 is provided in the discharge tube 2, and the electrode 3 and 4 in the recessed part 24 and 25 is shown. The end portions 95 and 96 of the base 9 are disposed to face the base 9 via the gaps 26 and 27 in the electrodes 3 and 4 in the recesses 24 and 25. Even if the electrodes 3 and 4 move relative to each other, the edges 952 and 962 of the base 9 and the outer surface of the discharge tube 9 abut, and the ends 95 and 96 of the base 9 are in contact with each other. Since the gaps 26 and 27 are present between the electrodes 3 and 4, the electrodes 3 and 4 can be prevented from being damaged by the base 9.

In addition, even if the external stress may be applied to the base 9, as shown in FIGS. 2A and 2B, the end portions 95 and 96 of the base 9 are recessed portions of the discharge tube 2. The edges 952 and 962 other than the 24 and 25 abut on the outer surface of the discharge tube 2, so that the gaps 26 and 27 between the electrodes 3 and 4 and the base 9 are secured. Thereby, even if the external stress is applied to the base 9, it is possible to prevent the electrodes 3 and 4 from being damaged by the base 9.

In addition, as shown in the present application, disconnection of the electrode is likely to occur on the side to which a high voltage is applied. For this reason, when only one electrode is high voltage at the time of lamp lighting, the edge part 95 of the base 9 is only in a part of the discharge tube 2 of the at least one electrode side, for example, the electrode 3 side. ), The problem can be solved by providing the concave portion 24 through which the electrode 3 is disposed, and the edge 952 at the end portion 95 of the base 9. .

1: excimer lamp 2: discharge tube
21: long side 22: short side
23: cross section 24, 25: recess
26, 27: gap 3, 4: pair of electrodes
5, 6: Lead 7, 8: Lead material
9: base 91: upper base
92: lower base 93, 94: end of base 9
931, 941: openings 932, 942, 952, 962: edge
9321 and 9421: Contact portions 95 and 96: End portions of the base 9
97, 98: gap

Claims

A rectangular cross-sectional shape in which a light emitting element is enclosed, and a hollow long discharge tube,
An electrode which extends in an elongate direction on an outer surface of the discharge tube,
A brazing material for connecting the electrode and the lead,
An excimer lamp having an end portion in a long direction of the electrode and a base covering the brazing material,
An edge of the base abuts on the discharge tubes other than the electrodes and has a gap between the electrodes and the excimer lamp.

A direct-shaped cross-sectional shape in which a light emitting element is enclosed, and a hollow long discharge tube,
An electrode which extends in an elongate direction on an outer surface of the discharge tube,
A brazing material for connecting the electrode and the lead,
An excimer lamp having an end portion in a long direction of the electrode and a base covering the brazing material,
The edge of the base is in contact with the surface on which the electrode on the outer surface of the discharge tube is provided, and an excimer lamp having a gap between the electrode by providing a recess in the portion where the electrode on the surface is provided.