CN101958223A

CN101958223A - Excimer lamp

Info

Publication number: CN101958223A
Application number: CN2010102028287A
Authority: CN
Inventors: 远藤真一; 竹添法隆
Original assignee: Ushio Denki KK
Current assignee: Ushio Denki KK
Priority date: 2009-07-14
Filing date: 2010-06-11
Publication date: 2011-01-26
Anticipated expiration: 2030-06-11
Also published as: JP2011023156A; TWI407484B; KR101276489B1; TW201103075A; CN101958223B; JP5195675B2; KR20110006590A

Abstract

The invention provides a kind of Excimer lamp that prevents that electrode from damaging because of pedestal.This Excimer lamp (1) has: enclose have light-emitting element, section is rectangular-shaped and is the discharge tube (2) of hollow lengthwise shape; The electrode of establishing along its long side direction extension in the outside of discharge tube (2) (3,4); With electrode (3,4) and the end of the long side direction of the wlding (7,8) that is connected of lead-in wire and coated electrode (3,4) and the pedestal (9) of wlding (7,8), it is characterized by: the edge (932) of pedestal (9) is connected to the face that is provided with electrode (3) of discharge tube (2) outside, and has gap (97) between the edge of this pedestal and electrode (3).

Description

Excimer lamp

Technical field

The present invention is about Excimer lamp, especially about having the Excimer lamp of pedestal.

Background technology

Disclose a kind of dielectric barrier discharge lamp in patent documentation 1, as shown in Figure 3, be provided with electrode 102 in the outside of discharge tube 101, this electrode 102 connects lead-in wire 103, and possessing in the mode of surrounding the connecting portion between electrode 102 and the lead-in wire 103 has lamp socket 104.

In addition, in citing document 2, disclose a kind of Excimer lamp, electrode is connected with wire bonds by wlding.

(prior art document)

(patent documentation)

(patent documentation 1) TOHKEMY 2005-347025 communique

(patent documentation 2) TOHKEMY 2004-342369 communique

Usually, in Excimer lamp, based on the electrode of wlding and lead-in wire be connected since engaging force a little less than, therefore must utilize lamp socket (so-called pedestal) to surround wlding, so that external stress can not put on wlding.But if surround wlding with pedestal, then pedestal can be positioned at the position of electrode top.

For example, in the dielectric barrier discharge lamp that citing document 1 is put down in writing, on diagram, lamp socket 104 is isolated with electrode 102.But, when changing lamp etc., when external stress puts on lamp socket 104, have lamp socket 104 contact electrodes 102 and the situation of damage.Because of this damage, (1) has the situation that the live width of electrode 102 attenuates, and (2) have this damage and form by the outside of discharge tube 101 situation towards the outstanding projection of foreign side.

Excimer lamp for example is applied in the high voltage up to 6kV.Therefore, as if applying high voltage under the state that damage is arranged at electrode 102, then cause: in the thinner part of live width, it is big that resistance becomes (1), and heating becomes greatly.In addition, (2), are heated because of this discharge makes electrode 102 then from this projection generation corona discharge if the projection that is caused because of damage is positioned at the high-voltage side electrode.As a result, electrode 102 has the part of damage to be heated, and the metal that constitutes electrode 102 can evaporate, if electrode 102 evaporations then can be broken, becoming to supply power to electrode 102.

Summary of the invention

Point the object of the present invention is to provide a kind of Excimer lamp that prevents that electrode from damaging because of pedestal in view of the above problems.

In order to solve above-mentioned technical task, the invention of technical scheme 1 record is a kind of Excimer lamp, and possessing has: enclose have light-emitting element, section is rectangular-shaped and is the discharge tube of hollow lengthwise shape; The electrode of establishing along its long side direction extension in the outside of this discharge tube; With this electrode and the wlding that goes between and be connected; And cover the end and the pedestal of this wlding of this electrode long side direction, it is characterized by: the edge of said base is connected to the face that is provided with above-mentioned electrode outside the above-mentioned discharge tube, and has the gap between the edge of this pedestal and this electrode.

The invention of technical scheme 2 record is a kind of Excimer lamp, and possessing has: enclose have light-emitting element, section is rectangular-shaped and is the discharge tube of hollow lengthwise shape; The electrode of establishing along its long side direction extension in the outside of this discharge tube; With this electrode and the wlding that goes between and be connected; And the end of this electrode long side direction of covering and the pedestal of this wlding, it is characterized by: the edge of said base is connected to the face that is provided with above-mentioned electrode of above-mentioned discharge tube outside, and makes to have the gap between the edge of this pedestal and this electrode by recess is set in the part that is provided with this electrode.

The invention effect

Invention according to technical scheme 1 record, even between pedestal and electrode, relatively move, because the edge of said base is connected to the face that is provided with above-mentioned electrode of above-mentioned discharge tube outside, and between the edge of this pedestal and this electrode, has the gap, therefore electrode can not contact with pedestal, and electrode can't damage because of pedestal.In addition, even pedestal is applied external stress, owing to the edge of the end of pedestal is set in the mode that can connect with the discharge tube beyond the electrode, so the end and the interelectrode gap of guaranteeing pedestal, do not have the situation that electrode damages because of pedestal.

According to the invention of technical scheme 2 record,, owing on discharge tube, be provided with recess, so between the end of pedestal and electrode, be formed with the gap, so electrode can't damage because of pedestal even the relative pedestal of electrode relatively moves.In addition, even pedestal is applied external stress, the position beyond the recess of discharge tube will with the edge butt of the end of pedestal, guaranteed the gap between the end of electrode in the recess and pedestal, do not have the situation that electrode damages because of pedestal.

Description of drawings

Fig. 1 is the figure of structure of the Excimer lamp of expression the 1st execution mode.

Fig. 2 is the figure of structure of the Excimer lamp of expression the 2nd execution mode.

Fig. 3 is the partial sectional view of structure of the Excimer lamp of expression prior art.

Symbol description

1 Excimer lamp

2 discharge tubes

3,4 pair of electrodes

5,6 lead-in wires

7,8 wldings

9 pedestals

10 Excimer lamps

21 long limit faces

22 minor face faces

23 end faces

24,25 recesses

26,27 gaps

91 top bases

92 lower base

93, the end of 94 pedestals 9

95, the end of 96 pedestals 9

97,98 gaps

101 discharge tubes

102 electrodes

103 lead-in wires

104 lamp sockets

931,941 peristomes

932,942,952,962 edges

9321,9421 abutting parts

Embodiment

With reference to Fig. 1, the 1st execution mode of the present invention is described.

Fig. 1 (a) is the cutaway view of structure of the Excimer lamp of expression present embodiment, and Fig. 1 (b) is the A-A cutaway view of Fig. 1 (a), and Fig. 1 (c) is the B-B cutaway view of Fig. 1 (a).

As shown in these figures, Excimer lamp 1 possesses has: the discharge tube 2 with long side direction; Pair of electrodes 3,4 in discharge tube 2 outsides; The lead-in wire 5,6 that is electrically connected with electrode 3,4; With electrode 3,4 and lead-in wire 5,6 wldings that are electrically connected 7,8; And the pedestal 9 (top base 91, lower base 92) of

encirclement wlding

7,8.

More detailed it, Excimer lamp 1 possess have two ends be formed with by hermetically sealing and in inside discharge space, section is rectangular-shaped and is the discharge tube 2 of hollow lengthwise shape, encloses xenon as discharge gas in the inside of discharge tube 2.At this, the enclosed volume of xenon is that the pressure under its normal temperature is become for example in the scope of 10kPa～60kPa.Discharge tube 2 is made of silica glass, for example synthetic quartz glass of transmission vacuum-ultraviolet light well, has dielectric function when the bright lamp of lamp.Discharge tube 2 disposes in the mode of being put toward each other by the long limit face 21 that glass sheet was constituted of lengthwise shape, and forming section by the minor face face 22 of growing limit face 21 and link to each other with long limit face 21 is rectangular-shaped pipe.Two sides' of long side direction end face 23 is closed, and the inside of discharge space becomes airtight space.The discharge tube 2 for example length of long side direction is 800～1600mm, has 320～640cm ³Discharge space.

On the outer surface of the long limit of discharge tube 2

face

21,21, a pair of cancellate electrode 3,4 mutually opposedly forms in the mode of extending along long side direction.That is, on a side's who grows limit face 21 outer surface, dispose the electrode 3 that is applied in a high-tension side, on the opposing party's who grows limit face 21 outer surface, dispose and bring into play the opposing party's of function electrode 4 as grounding electrode.Thus, form discharge tube 2 and the state of discharge space between pair of electrodes 3,4 of bringing into play function as dielectric.Such electrode 3,4, for example by with the electrode material clathrate describe full-filling and on discharge tube 2 or by silk screen printing, form, above-mentioned electrode material is mixed into the paste shape by cellulose-based binding agent being blended in the metal dust and adding solvent.

On electrode 3,4, be connected with lead-in wire 5,6 by wlding 7,8.As the material of

wlding

7,8, use scolding tin or silver soldering material etc.In addition, be provided with pedestal 9 in the foreign side of

wlding

7,8 in the mode of surrounding

wlding

7,8, the top base 91 of this pedestal 9 and lower base 92 are fixed by the fixed cell 10 that is made of bolts and nuts etc.As the material of pedestal 9, use has the pottery of for example steatite (steatite) of electrical insulating property and so on.

Shown in Fig. 1 (a) and (b), (c), pedestal 9 its edges 932,942 are connected to the outside (being provided with the face of electrode 3,4) of the

long limit face

21,21 of discharge tube 2, the end of the long side direction of coated electrode and wlding.In addition, in pedestal 9, with electrode 3,4 opposed

ends

93,94 on have abutting

part

9321,9321,9421,9421, this abutting part has: form the peristome 931,941 in

gap

97,98 in the foreign side of electrode 3,4, and can be connected on the discharge tube 2 beyond the electrode 3,4, for example be configured in the edge 932,942 of boots shape of the paper left and right directions of Fig. 1 (b).That is, shown in Fig. 1 (b), but

end

93,94 by pin shape butt edge 932,942 and the peristome 931,941 that is sandwiched in this edge 932,942 constitute roughly コ font.

In addition, shown in Fig. 1 (a),

wlding

7,8 is surrounded by pedestal 9, thereby can suppress the stress for

wlding

7,8, can prevent that

wlding

7,8 from peeling off.Thus, can carry out electrode 3,4 and the conductivity of lead-in wire between 5,6 well.

In addition, the Excimer lamp 1 after being powered begins the quasi-molecule discharge at the discharge space of 3,4 of pair of electrodes, can obtain desired light (vacuum ultraviolet) from this quasi-molecule discharge.During the bright lamp of lamp, Excimer lamp 1 is owing to discharge is heated, and each member can expand.At this moment, because discharge tube 2 is different with the material of pedestal 9, its thermal coefficient of expansion difference, the electrode 3,4 that therefore is provided on the discharge tube 2 can relatively move to pedestal 9.At this moment, even between pedestal 9 and electrode 3,4, relatively move, shown in Fig. 1 (a) and (b), (c), the edge 932,942 of pedestal 9 and the outside of discharge tube 2 also connect, and owing to be provided with peristome 931 at the edge 932 of the end 93 of pedestal 9, edge 942 in the end 94 of pedestal 9 is provided with peristome 941, therefore between the peristome 931,941 of pedestal 9 and electrode 3,4, be formed with

gap

97,98, electrode 3,4 can not contact with pedestal 9, therefore can prevent that electrode 3,4 from damaging because of pedestal 9.

In addition, have the situation that applies external stress at pedestal 9.At this moment, owing to be located at the outside that the edge 932,932 of abutting

part

9321,9321 of end 93 of pedestal 9 and the edge 942,942 of abutting

part

9421,9421 that is located at the end 94 of pedestal 9 are connected to the outer discharge tube 2 of electrode 3,4, therefore peristome 931,941 gaps of being caused 97,98 of guaranteeing electrode 3,4 foreign sides.Therefore, even pedestal 9 is applied external stress, can prevent that also electrode 3,4 from damaging because of pedestal 9.

In addition, shown in the technical problem that the application will solve, higher in the possibility that is applied with high-tension side generating electrodes broken string.Therefore, during the bright lamp of lamp, be under the situation of high pressure at a side electrode only, if in the end 93 of the pedestal 91 of the electrode side of one side, for example electrode 3 sides peristome 931 and edge 932 are set at least, but technical solution problem then.

With reference to Fig. 2, the 2nd execution mode of the present invention is described.

Fig. 2 (a) is the cutaway view of structure of the Excimer lamp of expression present embodiment, and Fig. 2 (b) is the c-c cutaway view of Fig. 2 (a), and Fig. 2 (c) is the partial top view of Fig. 2 (a).

In these figure, in the Excimer lamp of present embodiment, with the part of end 95, the 96 opposed discharge tubes 2 of pedestal 9 on, via

end

95,96 and

gap

26,27, the

recess

24,25 that is equipped with electrode 3,4 is set.Wherein, other structure is corresponding with the structure of same-sign shown in Figure 1, the Therefore, omited explanation.

More detailed it, shown in Fig. 2 (c), the live width of electrode 3 (4) narrows down so that it enters the part of recess 24 (25).In addition, shown in Fig. 2 (a) and (b), pedestal 9 with electrode 3,4 opposed

ends

95,96, promptly the front part of pedestal 9 is divided into tabular,

flat end

95,96, the place ahead of pedestal 9 via

gap

26,27 be configured in

recess

24,25 in electrode 3,4 dispose opposed to each other mutually.

During the bright lamp of lamp, even each member expands, shown in Fig. 2 (b), on discharge tube 2, be provided with

recess

24,25, in

recess

24,25, be equipped with electrode 3,4, via

gap

26,27

end

95,96 of pedestal 9 is disposed mutually opposed to each other with electrode 3,4 in this

recess

24,25, even thereby electrode 3,4 relative pedestals 9 relatively move, because the edge 952,962 of pedestal 9 and the outside of discharge tube 2 are connected, and between the

end

95,96 of pedestal 9 and electrode 3,4, have

gap

26,27, therefore can prevent that electrode 3,4 from damaging because of pedestal 9.

In addition, even there is pair pedestal 9 to apply the situation of external stress, shown in Fig. 2 (a) and (b), the

end

95,96 of pedestal 9 also can and the

recess

24,25 of discharge tube 2 beyond edge 952,962 connect in discharge tube 2 outsides and

guarantee gap

26,27 between electrode 3,4 and the pedestal 9.Thus, even the pedestal external stress is applied to pedestal 9, can prevent that also electrode 3,4 from damaging because of pedestal 9.

In addition, shown in the technical problem that the application will solve, higher in the possibility of the side generating electrodes broken string that applies high voltage.Therefore, during the bright lamp of lamp, when the electrode that a side is only arranged is high pressure, if only in the part of the discharge tube 2 of the electrode side of one side at least, for example electrode 3 sides, end 95 and gap 26 via pedestal 9, setting is equipped with the recess 24 of electrode 3, and in the end 95 of pedestal 9 edge 952 is set, and then can solve this technical problem of problem.

Claims

1. Excimer lamp has:

Inclosure have light-emitting element, section is rectangular-shaped and is the discharge tube of hollow lengthwise shape;

The electrode of establishing along its long side direction extension in the outside of this discharge tube;

With this electrode and the wlding that goes between and be connected; And

Cover the end of long side direction of this electrode and the pedestal of this wlding, it is characterized by:

The edge of said base is connected to the face that is provided with above-mentioned electrode of above-mentioned discharge tube outside, and has the gap between the edge of this pedestal and this electrode.

2. Excimer lamp has:

With this electrode and the wlding that goes between and be connected; And

The edge of said base is connected to the face that is provided with above-mentioned electrode of above-mentioned discharge tube outside, and by the part that is provided with this electrode at this face recess is set, thereby has the gap between the edge of this pedestal and this electrode.