JP2011023156A - Excimer lamp - Google Patents
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- JP2011023156A JP2011023156A JP2009165425A JP2009165425A JP2011023156A JP 2011023156 A JP2011023156 A JP 2011023156A JP 2009165425 A JP2009165425 A JP 2009165425A JP 2009165425 A JP2009165425 A JP 2009165425A JP 2011023156 A JP2011023156 A JP 2011023156A
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- 238000005219 brazing Methods 0.000 claims abstract description 26
- 239000000463 material Substances 0.000 claims abstract description 26
- 230000006355 external stress Effects 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
Classifications
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- Y02W90/11—
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- Vessels And Coating Films For Discharge Lamps (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Plasma & Fusion (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
- Manufacturing & Machinery (AREA)
Abstract
Description
本発明は、エキシマランプに係わり、特に、ベースを備えたエキシマランプに関する。 The present invention relates to an excimer lamp, and more particularly to an excimer lamp having a base.
特許文献１には、図３に示すように、放電管１０１の外面に電極１０２が設けられ、この電極１０２にリード線１０３を接続し、電極１０２とリード線１０３との接続箇所を取り囲むように口金１０４を備えた誘電体バリア放電ランプが開示されている。
また、引用文献２には、電極とリードとがロウ材によりロウ付けして接続されたエキシマランプが開示されている。
In Patent Document 1, as shown in FIG. 3, an electrode 102 is provided on the outer surface of the discharge tube 101, a lead wire 103 is connected to the electrode 102, and a connection portion between the electrode 102 and the lead wire 103 is surrounded. A dielectric barrier discharge lamp with a base 104 is disclosed.
Further, cited document 2 discloses an excimer lamp in which electrodes and leads are connected by brazing with a brazing material.
通常、エキシマランプにおいては、電極とリードのロウ材による接続は、接着力が弱いため、ロウ材を口金（いわゆるベース）で取り囲み、外部応力がロウ材にかからないようにする必要がある。ところが、ベースでロウ材を取り囲むと、電極上方にべースが位置してしまう。
例えば、引用文献１に記載の誘電体バリア放電ランプにおいては、図面上、口金１０４と電極１０２とは離隔している。しかし、ランプ交換等の際、外部応力が口金１０４にかかるときに、口金１０４が電極１０２に接触し、傷つけてしまうことがある。この傷によって、（１）電極１０２の線幅が細くなることがあり、（２）この傷が放電管１０１の外面から外方に突出する突起となることがある。
Usually, in an excimer lamp, since the adhesive strength of the connection between the electrode and the lead by the brazing material is weak, it is necessary to surround the brazing material with a base (so-called base) so that external stress is not applied to the brazing material. However, when the brazing material is surrounded by the base, the base is positioned above the electrode.
For example, in the dielectric barrier discharge lamp described in the cited document 1, the base 104 and the electrode 102 are separated from each other in the drawing. However, when replacing the lamp or the like, when the external stress is applied to the base 104, the base 104 may come into contact with the electrode 102 and be damaged. Due to this scratch, (1) the line width of the electrode 102 may be narrowed, and (2) the scratch may be a protrusion protruding outward from the outer surface of the discharge tube 101.
エキシマランプは、例えば、６ｋＶもの高電圧が印加される。そのため、電極１０２に傷がある状態で、高電圧が印加されると、（１）線幅が細い部分では電気抵抗が大きくなり、発熱が大きくなる。また、（２）傷による突起が高電圧側電極にあると、この突起からコロナ放電が生じ、この放電によって電極１０２が加熱されてしまう。その結果、電極１０２の傷がある部分は加熱され、電極１０２を構成する金属が蒸発してしまい、電極１０２が蒸発してしまうと、断線が生じてしまって、電極１０２への給電ができなくなってしまう。 For example, a high voltage of 6 kV is applied to the excimer lamp. Therefore, when a high voltage is applied in a state where the electrode 102 is scratched, (1) electrical resistance increases in a portion where the line width is narrow, and heat generation increases. Further, (2) if there is a protrusion due to a flaw on the high voltage side electrode, a corona discharge is generated from this protrusion, and the electrode 102 is heated by this discharge. As a result, the scratched portion of the electrode 102 is heated, the metal constituting the electrode 102 evaporates, and if the electrode 102 evaporates, a disconnection occurs and power supply to the electrode 102 becomes impossible. End up.
本発明の目的は、上記の問題点に鑑み、電極がベースによって傷つけられることを防止したエキシマランプを提供することにある。 In view of the above problems, an object of the present invention is to provide an excimer lamp that prevents an electrode from being damaged by a base.
前記の課題を解決するために、請求項１記載の発明は、発光元素が封入された断面矩形状で中空長尺状の放電管と、該放電管の外面にその長尺方向に伸びて設けられた電極と、該電極とリードとを接続するロウ材と、該電極の長尺方向の端部と該ロウ材とを覆うベースと、を備えたエキシマランプにおいて、前記ベースの縁は、前記放電管外面の前記電極が設けられた面に当接し、且つ該電極との間には隙間を有していることを特徴とするエキシマランプである。
請求項２記載の発明は、発光元素が封入された断面矩形状で中空長尺状の放電管と、該放電管の外面にその長尺方向に伸びて設けられた電極と、該電極とリードとを接続するロウ材と、該電極の長尺方向の端部と該ロウ材とを覆うベースと、を備えたエキシマランプにおいて、前記ベースの縁は、前記放電管外面の前記電極が設けられた面に当接し、且つ該電極が設けられた部分には凹部が設けられることで該電極との間には隙間を有していることを特徴とするエキシマランプである。
In order to solve the above-described problems, the invention according to claim 1 is provided with a discharge tube having a rectangular cross-section with a light emitting element enclosed therein and a hollow elongated shape, and extending on the outer surface of the discharge tube in the longitudinal direction. In the excimer lamp, the edge of the base includes the brazing material connecting the electrode and the lead, and a base covering the longitudinal end portion of the electrode and the brazing material. An excimer lamp characterized in that it is in contact with the surface of the discharge tube outer surface on which the electrode is provided and has a gap between the electrode.
According to a second aspect of the present invention, there is provided a discharge tube having a rectangular cross section in which a light emitting element is enclosed and having a long hollow shape, an electrode provided on the outer surface of the discharge tube so as to extend in the length direction, the electrode and the lead In the excimer lamp, the base is provided with the electrode on the outer surface of the discharge tube. The excimer lamp is characterized in that a gap is provided between the electrode and the electrode provided with a recess in the portion provided with the electrode.
請求項１記載の発明によれば、ベースと電極との間で相対的な移動があっても、前記ベースの縁は、前記放電管外面の前記電極が設けられた面に当接し、且つ該電極との間には隙間を有しているので、電極とベースとが接触せず、電極はベースによって傷つけられることはない。また、ベースに外部応力がかかっても、ベースの端部の縁が電極以外の放電管と当接可能に設けられているので、ベースの端部と電極間の隙間が確保され、電極がベースによって傷つけられることはない。
請求項２記載の発明によれば、ベースに対して電極が相対的に移動しても、放電管に凹部が設けられているので、ベースの端部と電極との間に隙間が形成されるので、電極はベースによって傷つけられることはない。また、ベースに外部応力がかかっても、放電管は、放電管の凹部以外の箇所でベースの端部の縁と当接されることになり、凹部内の電極とベースの端部との間は隙間が確保され、電極がベースによって傷つけられることはない。
According to the first aspect of the present invention, even if there is a relative movement between the base and the electrode, the edge of the base abuts on the surface of the outer surface of the discharge tube where the electrode is provided, and the Since there is a gap between the electrodes, the electrodes and the base do not contact each other, and the electrodes are not damaged by the base. In addition, even when external stress is applied to the base, the edge of the base is provided so that it can come into contact with the discharge tube other than the electrode, so that a gap between the base and the electrode is secured. Will not be hurt by.
According to the second aspect of the present invention, even if the electrode moves relative to the base, the discharge tube is provided with the recess, so that a gap is formed between the end of the base and the electrode. So the electrode is not damaged by the base. Even if an external stress is applied to the base, the discharge tube will come into contact with the edge of the end of the base at a location other than the recess of the discharge tube, and the gap between the electrode in the recess and the end of the base The gap is ensured and the electrode is not damaged by the base.
本発明の第１の実施形態を図１を参照して説明する。
図１（ａ）は、本実施形態に係るエキシマランプの構成を示す断面図、図１（ｂ）は、図１（ａ）のＡ−Ａ断面図、図１（ｃ）は、図１（ａ）のＢ−Ｂ断面図である。
これらの図に示すように、エキシマランプ１は、長手方向を有する放電管２と、放電管２の外面に一対の電極３、４と、電極３，４に電気的に接続されたリード５、６と、電極３、４とリード５、６とを電気的に接続するロウ材７、８と、ロウ材７、８を取り囲むベース９（上部ベース９１、下部ベース９２）とを備える。
A first embodiment of the present invention will be described with reference to FIG.
1A is a cross-sectional view showing a configuration of an excimer lamp according to the present embodiment, FIG. 1B is a cross-sectional view taken along the line AA in FIG. 1A, and FIG. It is BB sectional drawing of a).
As shown in these drawings, an excimer lamp 1 includes a discharge tube 2 having a longitudinal direction, a pair of electrodes 3 and 4 on the outer surface of the discharge tube 2, and leads 5 electrically connected to the electrodes 3 and 4, 6, brazing materials 7, 8 that electrically connect the electrodes 3, 4 and the leads 5, 6, and a base 9 (upper base 91, lower base 92) surrounding the brazing materials 7, 8.
より詳細には、エキシマランプ１は、両端が気密に封止されて内部に放電空間が形成された、断面矩形状で中空長尺状の放電管２を備えており、放電管２の内部には、放電用ガスとして、キセノンガスが封入されている。ここで、キセノンガスは、常温における圧力が、例えば、１０ｋＰａ〜６０ｋＰａの範囲内となる封入量である。放電管２は真空紫外光を良好に透過するシリカガラス、例えば、合成石英ガラスよりなり、ランプ点灯時には誘電体として機能する。放電管２は、長尺状の板ガラスよりなる長辺面２１が互いに向かい合うように配置され、長辺面２１と長辺面２１とをつなぐ短辺面２２により断面矩形状の管が形成される。長手方向の両方の端面２３は閉じられ、放電空間の内部は気密空間となる。放電管２は、例えば、長手方向の長さが８００〜１６００ｍｍであり、３２０〜６４０ｃｍ３の放電空間を有する。 More specifically, the excimer lamp 1 includes a discharge tube 2 having a rectangular cross section and a long hollow shape, both ends of which are hermetically sealed and a discharge space is formed therein. Is filled with xenon gas as a discharge gas. Here, the xenon gas is an enclosed amount in which the pressure at room temperature is within a range of 10 kPa to 60 kPa, for example. The discharge tube 2 is made of silica glass, for example, synthetic quartz glass, which transmits vacuum ultraviolet light well, and functions as a dielectric when the lamp is turned on. The discharge tube 2 is arranged so that long side surfaces 21 made of a long plate glass face each other, and a tube having a rectangular cross section is formed by a short side surface 22 connecting the long side surface 21 and the long side surface 21. . Both end faces 23 in the longitudinal direction are closed, and the inside of the discharge space becomes an airtight space. For example, the discharge tube 2 has a length in the longitudinal direction of 800 to 1600 mm and a discharge space of 320 to 640 cm 3 .
放電管２の長辺面２１、２１の外表面には、一対の格子状の電極３、４が長尺方向に伸びるように対向して形成される。つまり、長辺面２１の一方の外表面には、高電圧が印加される一方の電極３が配置され、長辺面２１の他方の外表面には、接地電極として機能する他方の電極４が配置される。これにより、一対の電極３、４間に誘電体として機能する放電管２と放電空間とが介在された状態となる。このような電極３、４は、例えば、金属粉末にセルロース系のバインダーを混合し、溶剤を加えて練りペースト状にした電極材料を放電管２に格子状に描画塗布することにより、または、スクリーン印刷することによって形成する。 On the outer surface of the long side surfaces 21, 21 of the discharge tube 2, a pair of grid-like electrodes 3, 4 are formed facing each other so as to extend in the longitudinal direction. That is, one electrode 3 to which a high voltage is applied is disposed on one outer surface of the long side surface 21, and the other electrode 4 functioning as a ground electrode is disposed on the other outer surface of the long side surface 21. Be placed. As a result, the discharge tube 2 functioning as a dielectric and the discharge space are interposed between the pair of electrodes 3 and 4. Such electrodes 3 and 4 are formed, for example, by mixing a cellulose-based binder with metal powder, adding a solvent and kneading the paste into a grid shape on the discharge tube 2, or by applying a screen. Form by printing.
電極３、４には、ロウ材７、８を介してリード５、６が接続される。ロウ材７、８の材料としては、はんだや銀ロウ等を用いる。また、ロウ材７、８の外方には、ロウ材７、８を取り囲むように上部ベース９１と下部ベース９２をボルトとナット等からなる固定手段１０によって固定されたベース９が設けられる。ベース９の材料としては、電気絶縁性を有する、例えば、ステアタイトのようなセラミックスを用いる。 Leads 5 and 6 are connected to the electrodes 3 and 4 via brazing materials 7 and 8. As a material of the brazing materials 7 and 8, solder, silver brazing, or the like is used. In addition, a base 9 is provided outside the brazing members 7, 8, so that the upper base 91 and the lower base 92 are fixed by fixing means 10 including bolts and nuts so as to surround the brazing materials 7, 8. As the material of the base 9, for example, ceramic having electrical insulating properties such as steatite is used.
ベース９は、図１（ａ）、（ｂ）、（ｃ）に示すように、その縁９３２、９４２が放電管２の長辺面２１、２１の外面（電極３、４が設けられた面）に当接し、電極の長尺方向の端部とロウ材とを覆っている。また、ベース９において、電極３、４と対向する端部９３、９４には、電極３、４の外方において隙間９７、９８を形成する開口部９３１、９４１、及び電極３、４以外の放電管２上に、例えば、図１（ｂ）の紙面左右方向に配置される脚状の当接可能な縁９３２、９４２を備えた当接部９３２１、９３２１、９４２１、９４２１を有する。つまり、端部９３、９４は、図１（ｂ）に示すように、脚状の当接可能な縁９３２、９４２と、この縁９３２、９４２に挟まれた開口部９３１、９４１によって、略コ字状に構成される。 As shown in FIGS. 1A, 1B, and 1C, the base 9 has edges 932 and 942 that are outer surfaces of the long side surfaces 21 and 21 of the discharge tube 2 (surfaces on which the electrodes 3 and 4 are provided). ) And covers the ends of the electrodes in the longitudinal direction and the brazing material. Further, in the base 9, the ends 93 and 94 facing the electrodes 3 and 4 have openings 931 and 941 that form gaps 97 and 98 outside the electrodes 3 and 4, and discharges other than the electrodes 3 and 4. On the tube 2, for example, there are contact portions 9321, 9321, 9421, 9421 provided with leg-shaped contactable edges 932, 942 arranged in the left-right direction in FIG. In other words, as shown in FIG. 1B, the end portions 93 and 94 are substantially connected by leg-shaped abuttable edges 932 and 942 and openings 931 and 941 sandwiched between the edges 932 and 942, respectively. Composed in a letter shape.
また、図１（ａ）に示すように、ロウ材７、８がベース９に取り囲まれていることによって、ロウ材７、８への応力を抑制でき、ロウ材７、８がはがれることを防止することができる。これにより、電極３、４とリード５、６との電気伝導を良好に行なうことができる。 Further, as shown in FIG. 1 (a), the brazing materials 7 and 8 are surrounded by the base 9, so that stress on the brazing materials 7 and 8 can be suppressed and the brazing materials 7 and 8 are prevented from being peeled off. can do. Thereby, electrical conduction between the electrodes 3 and 4 and the leads 5 and 6 can be performed satisfactorily.
また、給電されたエキシマランプ１は、一対の電極３、４間の放電空間でエキシマ放電が開始され、このエキシマ放電から所期の光（真空紫外線）を得ることができる。ランプ点灯時に、エキシマランプ１は放電によって加熱され、各部材が膨張する。このとき、放電管２とベース９とは材質が異なり、その熱膨張係数が異なることから、放電管２に配設された電極３、４がベース９に対して相対的に移動する。このとき、ベース９と電極３、４との間で相対的な移動があっても、図１（ａ）、（ｂ）、（ｃ）に示すように、ベース９の縁９３２、９４２と放電管９の外面とが当接し、且つ、ベース９の端部９３の縁９３２には開口部９３１が、ベース９の端部９４の縁９４２には開口部９４１が設けられるので、ベース９の開口部９４１と電極３、４との間に隙間９７，９８が形成され、電極３、４とベース９とが接触しないため、電極３、４は、ベース９によって傷つけられることを防止することができる。 Further, the excimer lamp 1 supplied with power starts excimer discharge in a discharge space between the pair of electrodes 3 and 4, and can obtain desired light (vacuum ultraviolet light) from the excimer discharge. When the lamp is lit, the excimer lamp 1 is heated by the discharge, and each member expands. At this time, since the discharge tube 2 and the base 9 are made of different materials and have different thermal expansion coefficients, the electrodes 3 and 4 disposed on the discharge tube 2 move relative to the base 9. At this time, even if there is a relative movement between the base 9 and the electrodes 3 and 4, as shown in FIGS. 1A, 1B and 1C, the edges 932 and 942 of the base 9 and the discharge Since the outer surface of the tube 9 abuts, and the opening 931 is provided at the edge 932 of the end portion 93 of the base 9 and the opening 941 is provided at the edge 942 of the end portion 94 of the base 9. Since gaps 97 and 98 are formed between the portion 941 and the electrodes 3 and 4, and the electrodes 3 and 4 and the base 9 do not contact with each other, the electrodes 3 and 4 can be prevented from being damaged by the base 9. .
また、ベース９には、外部応力がかかることがある。このとき、ベース９の端部９３に設けられた当接部９３２１、９３２１の縁９３２、９３２、及びベース９の端部９４に設けられた当接部９４２１、９４２１の縁９４２、９４２が、電極３、４外の放電管２の外面に当接されることから、電極３、４の外方における開口部９３１、９４１による隙間９７、９８が確保される。そのため、ベース９に外部応力がかかったとしても、電極３、４がベース９によって傷つけられることを防止することができる。 In addition, external stress may be applied to the base 9. At this time, the edges 932 and 932 of the contact portions 9321 and 9321 provided on the end portion 93 of the base 9 and the edges 942 and 942 of the contact portions 9421 and 9421 provided on the end portion 94 of the base 9 are electrodes. Since the electrodes 3 and 4 are in contact with the outer surface of the discharge tube 2, gaps 97 and 98 are secured by the openings 931 and 941 outside the electrodes 3 and 4. Therefore, even if an external stress is applied to the base 9, it is possible to prevent the electrodes 3 and 4 from being damaged by the base 9.
なお、本願課題で示したように、高電圧が印加される側で、電極の断線が生じる可能性が高い。このため、ランプ点灯時、一方の電極だけが高圧である場合には、少なくともその一方の電極側、例えば、電極３側のベース９１の端部９３に、開口部９３１及び縁９３２を設ければ、課題を解決することができる。 In addition, as shown in the subject of the present application, there is a high possibility that the electrode is disconnected on the side where a high voltage is applied. For this reason, when only one electrode is at a high voltage when the lamp is lit, an opening 931 and an edge 932 are provided at least on one electrode side, for example, the end 93 of the base 91 on the electrode 3 side. Can solve the problem.
本発明の第２の実施形態を図２を参照して説明する。
図２（ａ）は、本実施形態に係るエキシマランプの構成を示す断面図、図２（ｂ）は、図２（ａ）のＣ−Ｃ断面図、図２（ｃ）は、図２（ａ）の一部平面図である。
これらの図において、本実施形態のエキシマランプにおいては、ベース９の端部９５、９６と対向する放電管２の一部に、端部９５、９６と隙間２６、２７を介して電極３、４が配設される凹部２４、２５を設ける。なお、その他の構成は、図１に示した同符号の構成に対応するので、説明を省略する。
A second embodiment of the present invention will be described with reference to FIG.
2A is a cross-sectional view showing the configuration of the excimer lamp according to the present embodiment, FIG. 2B is a cross-sectional view taken along the line CC in FIG. 2A, and FIG. It is a partial top view of a).
In these drawings, in the excimer lamp of this embodiment, the electrodes 3, 4 are disposed on a part of the discharge tube 2 facing the ends 95, 96 of the base 9 via the ends 95, 96 and the gaps 26, 27. Recesses 24 and 25 are provided. The other configurations correspond to the configurations with the same reference numerals shown in FIG.
より詳細には、図２（ｃ）に示すように、電極３（４）は、凹部２４（２５）の部分に入るように線幅が狭くなっている。また、図２（ａ）、（ｂ）に示すように、ベース９の電極３、４と対向する端部９５、９６、つまりベース９の前方部分は平板状であり、ベース９の前方平板状の端部９５、９６が隙間２６、２７を介して凹部２４、２５内に配置された電極３、４と対向配置される。 More specifically, as shown in FIG. 2C, the line width of the electrode 3 (4) is narrow so as to enter the recess 24 (25). 2A and 2B, the end portions 95 and 96 of the base 9 facing the electrodes 3 and 4, that is, the front portion of the base 9 has a flat plate shape, and the base 9 has a front flat plate shape. The end portions 95 and 96 are opposed to the electrodes 3 and 4 disposed in the recesses 24 and 25 with the gaps 26 and 27 interposed therebetween.
ランプ点灯時、各部材が膨張しても、図２（ｂ）に示すように、放電管２に凹部２４、２５が設けられ、凹部２４、２５内に電極３、４が配設され、この凹部２４、２５内の電極３、４に隙間２６、２７を介してベース９の端部９５、９６が対向配置されることによって、ベース９に対して電極３、４が相対的に移動しても、ベース９の縁９５２、９６２と放電管９の外面とが当接し、且つ、ベース９の端部９５、９６と電極３、４との間には隙間２６、２７があるので、電極３、４がベース９によって傷つけられることを防止することができる。 Even when each member expands when the lamp is turned on, as shown in FIG. 2B, the discharge tube 2 is provided with recesses 24 and 25, and the recesses 24 and 25 are provided with electrodes 3 and 4, respectively. Since the end portions 95 and 96 of the base 9 are disposed opposite to the electrodes 3 and 4 in the recesses 24 and 25 through the gaps 26 and 27, the electrodes 3 and 4 move relative to the base 9. In addition, since the edges 952 and 962 of the base 9 are in contact with the outer surface of the discharge tube 9 and there are gaps 26 and 27 between the end portions 95 and 96 of the base 9 and the electrodes 3 and 4, the electrode 3 4 can be prevented from being damaged by the base 9.
また、ベース９に外部応力がかかることがあっても、図２（ａ）、（ｂ）に示すように、ベース９の端部９５、９６は、放電管２の凹部２４、２５以外の縁９５２、９６２とが放電管２外面で、当接することになり、電極３、４とベース９との隙間２６、２７が確保されることになる。これにより、ベース９に外部応力がかかったとしても、電極３、４がベース９によって傷つけられることを防止することができる。 Even if external stress may be applied to the base 9, the ends 95 and 96 of the base 9 are edges other than the recesses 24 and 25 of the discharge tube 2 as shown in FIGS. 2 (a) and 2 (b). 952 and 962 are brought into contact with the outer surface of the discharge tube 2, and the gaps 26 and 27 between the electrodes 3 and 4 and the base 9 are secured. Thereby, even if an external stress is applied to the base 9, the electrodes 3 and 4 can be prevented from being damaged by the base 9.
なお、本願課題で示したように、高電圧を印加される側で、電極の断線が生じる可能性が高い。このため、ランプ点灯時、一方の電極だけが高圧である場合には、少なくともその一方の電極側、例えば、電極３側の放電管２の一部のみに、ベース９の端部９５と隙間２６を介して電極３が配設される凹部２４を設け、且つ、ベース９の端部９５に縁９５２を設ければ、課題を解決することができる。 In addition, as shown in the subject of the present application, there is a high possibility of disconnection of the electrode on the side to which a high voltage is applied. For this reason, when only one electrode is at a high pressure when the lamp is lit, at least one electrode side, for example, only a part of the discharge tube 2 on the electrode 3 side, the end 95 of the base 9 and the gap 26 The problem can be solved by providing the recess 24 in which the electrode 3 is disposed via the edge 95 and providing the edge 952 at the end 95 of the base 9.
１ エキシマランプ
２ 放電管
２１ 長辺面
２２ 短辺面
２３ 端面
２４、２５ 凹部
２６、２７ 隙間
３、４ 一対の電極
５、６ リード
７、８ ロウ材
９ ベース
９１ 上部ベース
９２ 下部ベース
９３、９４ ベース９の端部
９３１、９４１ 開口部
９３２、９４２、９５２、９６２ 縁
９３２１、９４２１ 当接部
９５、９６ ベース９の端部
９７、９８ 隙間
DESCRIPTION OF SYMBOLS 1 Excimer lamp 2 Discharge tube 21 Long side surface 22 Short side surface 23 End surface 24, 25 Recess 26, 27 Gap 3, 4 Pair of electrodes 5, 6 Lead 7, 8 Brazing material 9 Base 91 Upper base 92 Lower base 93, 94 Base 9 ends 931, 941 Openings 932, 942, 952, 962 Edges 9321, 9421 Contact portions 95, 96 Base 97 ends 97, 98 Clearance
Claims (2)
該放電管の外面にその長尺方向に伸びて設けられた電極と、
該電極とリードとを接続するロウ材と、
該電極の長尺方向の端部と該ロウ材とを覆うベースと、
を備えたエキシマランプにおいて、
前記ベースの縁は、前記放電管外面の前記電極が設けられた面に当接し、且つ該電極との間に隙間を有している
ことを特徴とするエキシマランプ。 A discharge tube having a rectangular cross section and a long hollow shape in which a light emitting element is enclosed;
An electrode provided on the outer surface of the discharge tube so as to extend in the longitudinal direction;
A brazing material connecting the electrode and the lead;
A base covering the longitudinal end of the electrode and the brazing material;
In excimer lamps with
The excimer lamp is characterized in that an edge of the base is in contact with a surface of the outer surface of the discharge tube where the electrode is provided, and a gap is provided between the edge.
該放電管の外面にその長尺方向に伸びて設けられた電極と、
該電極とリードとを接続するロウ材と、
該電極の長尺方向の端部と該ロウ材とを覆うベースと、
を備えたエキシマランプにおいて、
前記ベースの縁は、前記放電管外面の前記電極が設けられた面に当接し、且つ該面の該電極が設けられた部分に凹部が設けられることで該電極との間に隙間を有している
ことを特徴とするエキシマランプ。
A discharge tube having a rectangular cross section and a long hollow shape in which a light emitting element is enclosed;
An electrode provided on the outer surface of the discharge tube so as to extend in the longitudinal direction;
A brazing material connecting the electrode and the lead;
A base covering the longitudinal end of the electrode and the brazing material;
In excimer lamps with
The edge of the base is in contact with the surface on which the electrode is provided on the outer surface of the discharge tube, and a recess is provided in a portion of the surface where the electrode is provided, thereby providing a gap between the electrode and the base. Excimer lamp characterized by
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| JP2009165425A JP5195675B2 (en) | 2009-07-14 | 2009-07-14 | Excimer lamp |
| TW099114042A TWI407484B (en) | 2009-07-14 | 2010-05-03 | Excimer lamp |
| KR1020100044431A KR101276489B1 (en) | 2009-07-14 | 2010-05-12 | Excimer lamp |
| CN201010202828.7A CN101958223B (en) | 2009-07-14 | 2010-06-11 | Excimer lamp |
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| JP2015011910A (en) * | 2013-07-01 | 2015-01-19 | ウシオ電機株式会社 | Excimer lamp |
| WO2020008971A1 (en) * | 2018-07-06 | 2020-01-09 | ウシオ電機株式会社 | Excimer lamp |
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| JP5287928B2 (en) * | 2011-05-17 | 2013-09-11 | ウシオ電機株式会社 | Excimer lamp |
| KR101999486B1 (en) | 2018-07-26 | 2019-07-11 | 유니램 주식회사 | Base structure of excimer lamp |
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| JP2005347025A (en) * | 2004-06-01 | 2005-12-15 | Japan Storage Battery Co Ltd | Dielectric barrier discharge lamp |
| JP2006216392A (en) * | 2005-02-04 | 2006-08-17 | Lecip Corp | Flat-surface discharge tube |
| JP2008204780A (en) * | 2007-02-20 | 2008-09-04 | Ushio Inc | Discharge lamp, manufacturing method of discharge lamp, discharge lamp unit, and backlight device |
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| JP4475001B2 (en) | 2004-05-10 | 2010-06-09 | 株式会社ジーエス・ユアサコーポレーション | Dielectric barrier discharge lamp |
| JP2006228563A (en) * | 2005-02-17 | 2006-08-31 | Ushio Inc | Excimer lamp |
| KR101401704B1 (en) * | 2007-08-09 | 2014-05-30 | 하리손 도시바 라이팅구 가부시키가이샤 | Ultraviolet light irradiation apparatus |
| JP5311271B2 (en) * | 2008-03-10 | 2013-10-09 | ウシオ電機株式会社 | Excimer lamp and method of manufacturing the excimer lamp |
| JP5146061B2 (en) * | 2008-04-10 | 2013-02-20 | ウシオ電機株式会社 | Excimer lamp and lamp unit equipped with the same |
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| JP2005347025A (en) * | 2004-06-01 | 2005-12-15 | Japan Storage Battery Co Ltd | Dielectric barrier discharge lamp |
| JP2006216392A (en) * | 2005-02-04 | 2006-08-17 | Lecip Corp | Flat-surface discharge tube |
| JP2008204780A (en) * | 2007-02-20 | 2008-09-04 | Ushio Inc | Discharge lamp, manufacturing method of discharge lamp, discharge lamp unit, and backlight device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2015011910A (en) * | 2013-07-01 | 2015-01-19 | ウシオ電機株式会社 | Excimer lamp |
| WO2020008971A1 (en) * | 2018-07-06 | 2020-01-09 | ウシオ電機株式会社 | Excimer lamp |
| JP2020009621A (en) * | 2018-07-06 | 2020-01-16 | ウシオ電機株式会社 | Excimer lamp |
| JP7029641B2 (en) | 2018-07-06 | 2022-03-04 | ウシオ電機株式会社 | Excimer lamp |
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| TWI407484B (en) | 2013-09-01 |
| KR101276489B1 (en) | 2013-06-18 |
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| CN101958223A (en) | 2011-01-26 |
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