CN101958223B

CN101958223B - Excimer lamp

Info

Publication number: CN101958223B
Application number: CN201010202828.7A
Authority: CN
Inventors: 远藤真一; 竹添法隆
Original assignee: Ushio Denki KK
Current assignee: Ushio Denki KK
Priority date: 2009-07-14
Filing date: 2010-06-11
Publication date: 2014-07-02
Anticipated expiration: 2030-06-11
Also published as: JP2011023156A; KR101276489B1; CN101958223A; TW201103075A; TWI407484B; KR20110006590A; JP5195675B2

Abstract

The invention provides an excimer lamp for preventing an electrode from being damaged caused by a substrate. The excimer lamp (1) is provided with a hollow long discharging tube (2) which has an enclosed laminating element inside and an rectangular cross section, electrodes (3, 4) which are extended along the length direction outside of the discharging tube (2), welding materials (7, 8) which are used for connecting the electrodes (3, 4) with leads, and a substrate (9) which covers the end parts along the length direction of the electrodes (3, 4) and the materials (7, 8), wherein the edge (932) of the substrate (9) is resisted against and connected to the surface of the discharging tube (2) with the electrode (3) outside and a gap (97) is arranged between the edge of the substrate and the electrode (3).

Description

Excimer lamp

Technical field

The present invention is about Excimer lamp, especially about the Excimer lamp with pedestal.

Background technology

In patent documentation 1, disclose a kind of dielectric barrier discharge lamp, as shown in Figure 3, be provided with electrode 102 in the outside of discharge tube 101, these electrode 102 connecting lead wires 103, possess and have lamp socket 104 to surround the mode of electrode 102 and the connecting portion of lead-in wire between 103.

In addition, in citing document 2, disclose a kind of Excimer lamp, by wlding, electrode is connected with wire bonds.

(prior art document)

(patent documentation)

(patent documentation 1) TOHKEMY 2005-347025 communique

(patent documentation 2) TOHKEMY 2004-342369 communique

Conventionally, in Excimer lamp, the electrode based on wlding and lead-in wire be connected due to engaging force a little less than, therefore must utilize lamp socket (so-called pedestal) to surround wlding, so that external stress can not put on wlding.But if surround wlding with pedestal, pedestal can be positioned at the position of electrode top.

For example, in the dielectric barrier discharge lamp of recording at citing document 1, in diagram, lamp socket 104 is isolated with electrode 102.But, in the time changing lamp etc., in the time that external stress puts on lamp socket 104, have lamp socket 104 contact electrodes 102 and the situation of damage.Because of this damage, (1) has the situation that the live width of electrode 102 attenuates, and (2) have this damage and form the situation towards the outstanding projection of foreign side by the outside of discharge tube 101.

Excimer lamp is applied in for example high voltage up to 6kV.Therefore, apply high voltage if having at electrode 102 under the state of damage, cause: (1), in the thinner part of live width, it is large that resistance becomes, and it is large that heating becomes.In addition, (2) are if the projection causing because of damage is positioned at high-voltage side electrode, from this projection generation corona discharge, because this electric discharge makes electrode 102 heated.As a result, electrode 102 has the part of damage heated, and the metal that forms electrode 102 can evaporate, if electrode 102 evaporates, can break, and becomes and cannot supply power to electrode 102.

Summary of the invention

Point in view of the above problems, the object of the present invention is to provide a kind of Excimer lamp that prevents that electrode from damaging because of pedestal.

In order to solve above-mentioned technical task, the invention that technical scheme 1 is recorded is a kind of Excimer lamp, possesses and has: enclose have light-emitting element, section is rectangular-shaped and is the discharge tube of hollow lengthwise shape; The electrode of establishing along its long side direction extension in the outside of this discharge tube; The wlding that this electrode is connected with lead-in wire; And cover the end of this electrode long side direction and the pedestal of this wlding, it is characterized by: the edge of said base is connected to the face that is provided with above-mentioned electrode of above-mentioned discharge tube outside, and there is gap between the edge of this pedestal and this electrode.

The invention that technical scheme 2 is recorded is a kind of Excimer lamp, possesses and has: enclose have light-emitting element, section is rectangular-shaped and is the discharge tube of hollow lengthwise shape; The electrode of establishing along its long side direction extension in the outside of this discharge tube; The wlding that this electrode is connected with lead-in wire; And cover the end of this electrode long side direction and the pedestal of this wlding, it is characterized by: the edge of said base is connected to the face that is provided with above-mentioned electrode of above-mentioned discharge tube outside, and make to there is gap between the edge of this pedestal and this electrode by recess is set in the part that is provided with this electrode.

Invention effect

The invention of recording according to technical scheme 1, even relatively move between pedestal and electrode, because the edge of said base is connected to the face that is provided with above-mentioned electrode outside above-mentioned discharge tube, and there is gap between the edge of this pedestal and this electrode, therefore electrode can not contact with pedestal, and electrode can't damage because of pedestal.In addition,, even pedestal is applied to external stress, due to the edge of the end of pedestal being set in the mode that can connect with electrode discharge tube in addition, end and the interelectrode gap of therefore guaranteeing pedestal, do not have the situation that electrode damages because of pedestal.

The invention of recording according to technical scheme 2 even if the relative pedestal of electrode relatively moves, owing to being provided with recess on discharge tube, is therefore formed with gap between the end of pedestal and electrode, and therefore electrode can't damage because of pedestal.In addition, even pedestal is applied to external stress, the position beyond the recess of discharge tube will with the edge butt of the end of pedestal, guaranteed the gap between electrode and the end of pedestal in recess, do not have the situation that electrode damages because of pedestal.

Accompanying drawing explanation

Fig. 1 is the figure that represents the structure of the Excimer lamp of the 1st execution mode.

Fig. 2 is the figure that represents the structure of the Excimer lamp of the 2nd execution mode.

Fig. 3 is the partial sectional view that represents the structure of the Excimer lamp of prior art.

Symbol description

1 Excimer lamp

2 discharge tubes

3,4 pair of electrodes

5,6 lead-in wires

7,8 wldings

9 pedestals

10 Excimer lamps

21 long limit faces

22 minor face faces

23 end faces

24,25 recesses

26,27 gaps

91 top bases

92 lower base

93, the end of 94 pedestals 9

95, the end of 96 pedestals 9

97,98 gaps

101 discharge tubes

102 electrodes

103 lead-in wires

104 lamp sockets

931,941 peristomes

932,942,952,962 edges

9321,9421 abutting parts

Embodiment

With reference to Fig. 1, the 1st execution mode of the present invention is described.

Fig. 1 (a) is the cutaway view that represents the structure of the Excimer lamp of present embodiment, and Fig. 1 (b) is the A-A cutaway view of Fig. 1 (a), and Fig. 1 (c) is the B-B cutaway view of Fig. 1 (a).

As shown in these figures, Excimer lamp 1 possesses has: the discharge tube 2 with long side direction; In the pair of electrodes 3,4 of discharge tube 2 outsides; The lead-in wire 5,6 being electrically connected with electrode 3,4; By electrode 3,4 and lead-in wire 5,6 wldings that are electrically connected 7,8; And the pedestal 9 (top base 91, lower base 92) of

encirclement wlding

7,8.

In more detail, Excimer lamp 1 possess have two ends be formed with in inside by hermetically sealing discharge space, section is rectangular-shaped and is the discharge tube 2 of hollow lengthwise shape, encloses xenon as electric discharge gas in the inside of discharge tube 2.At this, the enclosed volume of xenon is that the pressure under its normal temperature is become for example in the scope of 10kPa～60kPa.Discharge tube 2 is made up of silica glass, for example synthetic quartz glass of transmission vacuum-ultraviolet light well, has dielectric function in the time of lamp bright light.Discharge tube 2 configures in the mode of being put toward each other by the long limit face 21 that glass sheet was formed of lengthwise shape, and it is rectangular-shaped pipe that the minor face face 22 being connected by long limit face 21 and with long limit face 21 forms section.Two sides' of long side direction end face 23 is closed, and the inside of discharge space becomes airtight space.The length of for example long side direction of discharge tube 2 is 800～1600mm, has 320～640cm ³discharge space.

On the outer surface of the long limit of discharge tube 2

face

21,21, a pair of cancellate electrode 3,4 with along long side direction extend mode opposite form.That is, on a side the outer surface of growing limit face 21, dispose the electrode 3 that is applied in a high-tension side, on the opposing party's the outer surface of growing limit face 21, dispose as grounding electrode and bring into play the opposing party's of function electrode 4.Thus, be formed as bringing into play as dielectric discharge tube 2 and the state of discharge space between pair of electrodes 3,4 of function.Such electrode 3,4, for example by by electrode material clathrate describe full-filling and form on discharge tube 2 or by silk screen printing, above-mentioned electrode material is mixed into paste shape by cellulose-based binding agent being blended in metal dust and adding solvent.

On electrode 3,4, be connected with lead-in wire 5,6 by wlding 7,8.As the material of

wlding

7,8, use scolding tin or silver soldering material etc.In addition, be provided with pedestal 9 in the foreign side of

wlding

7,8 in the mode of surrounding

wlding

7,8, top base 91 and the lower base 92 of this pedestal 9 are fixed by the fixed cell 10 being made up of bolts and nuts etc.As the material of pedestal 9, use the pottery with for example steatite (steatite) of electrical insulating property and so on.

As shown in Fig. 1 (a), (b), (c), pedestal 9 its edges 932,942 are connected to the outside (being provided with the face of electrode 3,4) of the

long limit face

21,21 of discharge tube 2, the end of the long side direction of coated electrode and wlding.In addition, in pedestal 9, with the

opposed end

93,94 of electrode 3,4 on there is abutting

part

9321,9321,9421,9421, this abutting part has: form the peristome 931,941 in

gap

97,98 in the foreign side of electrode 3,4, and can be connected to the edge 932,942 of boots shape on the discharge tube 2 beyond electrode 3,4, that be for example configured in the paper left and right directions of Fig. 1 (b).,, as shown in Fig. 1 (b), the edge 932,942 that

end

93,94 can butt by pin shape and the peristome 931,941 that is sandwiched in this edge 932,942 are configured to roughly コ font.

In addition,, as shown in Fig. 1 (a), wlding 7,8 is surrounded by pedestal 9, thereby can suppress the stress for

wlding

7,8, can prevent that

wlding

7,8 from peeling off.Thus, can carry out well the conductivity between electrode 3,4 and lead-in wire 5,6.

In addition, the Excimer lamp 1 after being powered, starts quasi-molecule electric discharge at the discharge space of 3,4 of pair of electrodes, can obtain desired light (vacuum ultraviolet) from this quasi-molecule electric discharge.When lamp bright light, Excimer lamp 1 is because electric discharge is heated, and each member can expand.Now, because discharge tube 2 is different from the material of pedestal 9, its thermal coefficient of expansion difference, the electrode 3,4 being therefore disposed on discharge tube 2 can relatively move to pedestal 9.Now, even relatively move between pedestal 9 and electrode 3,4, as shown in Fig. 1 (a), (b), (c), the edge 932,942 of pedestal 9 and the outside of discharge tube 2 also connect, and because the edge 932 of the end 93 at pedestal 9 is provided with peristome 931, edge 942 in the end 94 of pedestal 9 is provided with peristome 941, therefore between the peristome 931,941 of pedestal 9 and electrode 3,4, be formed with

gap

97,98, electrode 3,4 can not contact with pedestal 9, therefore can prevent that electrode 3,4 from damaging because of pedestal 9.

In addition, have the situation that applies external stress at pedestal 9.Now, owing to being located at the edge 932,932 of abutting

part

9321,9321 of end 93 of pedestal 9 and the edge 942,942 that is located at the

abutting part

9421,9421 of the end 94 of pedestal 9 and being connected to the outside of the discharge tube 2 outside electrode 3,4, therefore guarantee the

gap

97,98 that the peristome 931,941 of electrode 3,4 foreign sides causes.Therefore,, even pedestal 9 is applied to external stress, also can prevent that electrode 3,4 from damaging because of pedestal 9.

In addition, as shown in the technical problem that the application will solve, higher in the possibility that is applied with a high-tension side generating electrodes broken string.Therefore, when lamp bright light, be high pressure at a side electrode only, if at least peristome 931 and edge 932 are set in the end 93 of the pedestal 91 of the electrode side of one side, for example electrode 3 sides, can technical solution problem.

With reference to Fig. 2, the 2nd execution mode of the present invention is described.

Fig. 2 (a) is the cutaway view that represents the structure of the Excimer lamp of present embodiment, and Fig. 2 (b) is the c-c cutaway view of Fig. 2 (a), and Fig. 2 (c) is the partial top view of Fig. 2 (a).

In these figure, in the Excimer lamp of present embodiment, with the parts of end 95, the 96 opposed discharge tubes 2 of pedestal 9 on, via

end

95,96 and

gap

26,27, the

recess

24,25 that is equipped with electrode 3,4 is set.Wherein, other structure is corresponding with the structure of the same-sign shown in Fig. 1, and description will be omitted.

In more detail,, as shown in Fig. 2 (c), the live width of electrode 3 (4) narrows to make it to enter the part of recess 24 (25).In addition, as shown in Fig. 2 (a), (b), pedestal 9 with the

opposed end

95,96 of electrode 3,4, the front part that is pedestal 9 is divided into tabular, the

flat end

95,96, front of pedestal 9 via

gap

26,27 be configured in electrode 3,4 in

recess

24,25 opposite configure.

When lamp bright light, even if each member expands, as shown in Fig. 2 (b), on discharge tube 2, be provided with

recess

24,25, in

recess

24,25, be equipped with electrode 3,4, configure opposite the electrode 3,4 in the end of pedestal 9 95,96 and this

recess

24,25 via

gap

26,27, even if thereby the relative pedestal 9 of electrode 3,4 relatively moves, due to the edge 952,962 of pedestal 9 and the outside of discharge tube 2 are connected, and there is

gap

26,27 between the

end

95,96 of pedestal 9 and electrode 3,4, therefore can prevent that electrode 3,4 from damaging because of pedestal 9.

In addition, even if there is pair pedestal 9 to apply the situation of external stress, as shown in Fig. 2 (a), (b), the

end

95,96 of pedestal 9 also can and the

recess

24,25 of discharge tube 2 beyond edge 952,962 connect and guarantee the

gap

26,27 between electrode 3,4 and pedestal 9 in discharge tube 2 outsides.Thus, even if pedestal external stress is applied to pedestal 9, also can prevent that electrode 3,4 from damaging because of pedestal 9.

In addition,, as shown in the technical problem that the application will solve, the possibility breaking in the side generating electrodes that applies high voltage is higher.Therefore, when lamp bright light, in the time only having a side electrode to be high pressure, if only in the part of the discharge tube 2 of the electrode side of one side at least, for example electrode 3 sides, via the end 95 and gap 26 of pedestal 9, setting is equipped with the recess 24 of electrode 3, and in the end 95 of pedestal 9, edge 952 is set, and can solve this technical problem of problem.

Claims

1. an Excimer lamp, has:

Inclosure have light-emitting element, section is rectangular-shaped and is the discharge tube of hollow lengthwise shape;

The electrode of establishing along its long side direction extension at the outer surface of this discharge tube;

The wlding that this electrode is connected with lead-in wire; And

The end of long side direction and the pedestal of this wlding that cover this electrode, is characterized by:

The edge of said base is connected to the outer surface of the above-mentioned discharge tube beyond above-mentioned electrode, and has gap between the edge of said base and this electrode.

2. an Excimer lamp, has:

The wlding that this electrode is connected with lead-in wire; And

Outer surface at above-mentioned discharge tube is provided with recess,

Above-mentioned electrode is located in above-mentioned recess,

The edge of said base is located at the position of above-mentioned recess, and the edge of said base is connected to the outer surface of above-mentioned electrode above-mentioned discharge tube in addition.