KR101261491B1 - 기판합착장치 및 기판합착방법 - Google Patents

기판합착장치 및 기판합착방법 Download PDF

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Publication number
KR101261491B1
KR101261491B1 KR1020110027968A KR20110027968A KR101261491B1 KR 101261491 B1 KR101261491 B1 KR 101261491B1 KR 1020110027968 A KR1020110027968 A KR 1020110027968A KR 20110027968 A KR20110027968 A KR 20110027968A KR 101261491 B1 KR101261491 B1 KR 101261491B1
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KR
South Korea
Prior art keywords
substrate
surface plate
diaphragm
speed
chamber
Prior art date
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KR1020110027968A
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English (en)
Korean (ko)
Other versions
KR20120024364A (ko
Inventor
황재석
Original Assignee
엘아이지에이디피 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 엘아이지에이디피 주식회사 filed Critical 엘아이지에이디피 주식회사
Priority to TW100126422A priority Critical patent/TWI443428B/zh
Priority to CN201110255380.XA priority patent/CN102386118B/zh
Publication of KR20120024364A publication Critical patent/KR20120024364A/ko
Application granted granted Critical
Publication of KR101261491B1 publication Critical patent/KR101261491B1/ko

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
KR1020110027968A 2010-09-02 2011-03-29 기판합착장치 및 기판합착방법 KR101261491B1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW100126422A TWI443428B (zh) 2010-09-02 2011-07-26 基板結合設備及基板結合方法
CN201110255380.XA CN102386118B (zh) 2010-09-02 2011-08-10 基板粘合装置以及基板粘合方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100085999 2010-09-02
KR20100085999 2010-09-02

Publications (2)

Publication Number Publication Date
KR20120024364A KR20120024364A (ko) 2012-03-14
KR101261491B1 true KR101261491B1 (ko) 2013-05-13

Family

ID=46131419

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110027968A KR101261491B1 (ko) 2010-09-02 2011-03-29 기판합착장치 및 기판합착방법

Country Status (2)

Country Link
KR (1) KR101261491B1 (zh)
TW (1) TWI443428B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019013507A1 (ko) * 2017-07-10 2019-01-17 고려대학교 세종산학협력단 신축성 기판 및 신축성 기판 제조방법, 신축성 기판 구조체 제조장치 및 신축성 기판 구조체 제조방법
KR20190006321A (ko) * 2017-07-10 2019-01-18 고려대학교 세종산학협력단 신축성 기판 구조체 제조장치 및 신축성 기판 구조체 제조방법

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102011878B1 (ko) * 2012-05-24 2019-08-19 엘지디스플레이 주식회사 디스플레이장치용 합착장치 및 합착기판 제조방법
US9899223B2 (en) 2013-09-25 2018-02-20 Ev Group E. Thallner Gmbh Apparatus and method for bonding substrates including changing a stoichiometry of oxide layers formed on the substrates
KR102198179B1 (ko) * 2019-05-21 2021-01-04 (주) 아이엠텍 터치 패널용 기판 진공 합착 시스템 및 그 시스템을 이용하여 터치 패널용 기판 진공 합착 방법
KR102198180B1 (ko) * 2019-05-21 2021-01-04 (주) 아이엠텍 터치 패널 합착용 고무척

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100850238B1 (ko) * 2007-09-03 2008-08-04 주식회사 에이디피엔지니어링 기판척 및 이를 가진 기판합착장치

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100850238B1 (ko) * 2007-09-03 2008-08-04 주식회사 에이디피엔지니어링 기판척 및 이를 가진 기판합착장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019013507A1 (ko) * 2017-07-10 2019-01-17 고려대학교 세종산학협력단 신축성 기판 및 신축성 기판 제조방법, 신축성 기판 구조체 제조장치 및 신축성 기판 구조체 제조방법
KR20190006321A (ko) * 2017-07-10 2019-01-18 고려대학교 세종산학협력단 신축성 기판 구조체 제조장치 및 신축성 기판 구조체 제조방법
KR101991568B1 (ko) * 2017-07-10 2019-06-20 고려대학교 세종산학협력단 신축성 기판 구조체 제조장치 및 신축성 기판 구조체 제조방법

Also Published As

Publication number Publication date
TWI443428B (zh) 2014-07-01
KR20120024364A (ko) 2012-03-14
TW201222108A (en) 2012-06-01

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