KR101261491B1 - 기판합착장치 및 기판합착방법 - Google Patents

기판합착장치 및 기판합착방법 Download PDF

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Publication number
KR101261491B1
KR101261491B1 KR1020110027968A KR20110027968A KR101261491B1 KR 101261491 B1 KR101261491 B1 KR 101261491B1 KR 1020110027968 A KR1020110027968 A KR 1020110027968A KR 20110027968 A KR20110027968 A KR 20110027968A KR 101261491 B1 KR101261491 B1 KR 101261491B1
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KR
South Korea
Prior art keywords
substrate
surface plate
diaphragm
speed
chamber
Prior art date
Application number
KR1020110027968A
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English (en)
Korean (ko)
Other versions
KR20120024364A (ko
Inventor
황재석
Original Assignee
엘아이지에이디피 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘아이지에이디피 주식회사 filed Critical 엘아이지에이디피 주식회사
Priority to TW100126422A priority Critical patent/TWI443428B/zh
Priority to CN201110255380.XA priority patent/CN102386118B/zh
Publication of KR20120024364A publication Critical patent/KR20120024364A/ko
Application granted granted Critical
Publication of KR101261491B1 publication Critical patent/KR101261491B1/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
KR1020110027968A 2010-09-02 2011-03-29 기판합착장치 및 기판합착방법 KR101261491B1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW100126422A TWI443428B (zh) 2010-09-02 2011-07-26 基板結合設備及基板結合方法
CN201110255380.XA CN102386118B (zh) 2010-09-02 2011-08-10 基板粘合装置以及基板粘合方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100085999 2010-09-02
KR20100085999 2010-09-02

Publications (2)

Publication Number Publication Date
KR20120024364A KR20120024364A (ko) 2012-03-14
KR101261491B1 true KR101261491B1 (ko) 2013-05-13

Family

ID=46131419

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110027968A KR101261491B1 (ko) 2010-09-02 2011-03-29 기판합착장치 및 기판합착방법

Country Status (2)

Country Link
KR (1) KR101261491B1 (zh)
TW (1) TWI443428B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019013507A1 (ko) * 2017-07-10 2019-01-17 고려대학교 세종산학협력단 신축성 기판 및 신축성 기판 제조방법, 신축성 기판 구조체 제조장치 및 신축성 기판 구조체 제조방법
KR20190006321A (ko) * 2017-07-10 2019-01-18 고려대학교 세종산학협력단 신축성 기판 구조체 제조장치 및 신축성 기판 구조체 제조방법

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102011878B1 (ko) * 2012-05-24 2019-08-19 엘지디스플레이 주식회사 디스플레이장치용 합착장치 및 합착기판 제조방법
US9899223B2 (en) 2013-09-25 2018-02-20 Ev Group E. Thallner Gmbh Apparatus and method for bonding substrates including changing a stoichiometry of oxide layers formed on the substrates
KR102198179B1 (ko) * 2019-05-21 2021-01-04 (주) 아이엠텍 터치 패널용 기판 진공 합착 시스템 및 그 시스템을 이용하여 터치 패널용 기판 진공 합착 방법
KR102198180B1 (ko) * 2019-05-21 2021-01-04 (주) 아이엠텍 터치 패널 합착용 고무척

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100850238B1 (ko) * 2007-09-03 2008-08-04 주식회사 에이디피엔지니어링 기판척 및 이를 가진 기판합착장치

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100850238B1 (ko) * 2007-09-03 2008-08-04 주식회사 에이디피엔지니어링 기판척 및 이를 가진 기판합착장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019013507A1 (ko) * 2017-07-10 2019-01-17 고려대학교 세종산학협력단 신축성 기판 및 신축성 기판 제조방법, 신축성 기판 구조체 제조장치 및 신축성 기판 구조체 제조방법
KR20190006321A (ko) * 2017-07-10 2019-01-18 고려대학교 세종산학협력단 신축성 기판 구조체 제조장치 및 신축성 기판 구조체 제조방법
KR101991568B1 (ko) * 2017-07-10 2019-06-20 고려대학교 세종산학협력단 신축성 기판 구조체 제조장치 및 신축성 기판 구조체 제조방법

Also Published As

Publication number Publication date
TWI443428B (zh) 2014-07-01
KR20120024364A (ko) 2012-03-14
TW201222108A (en) 2012-06-01

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