KR101254054B1 - Photosensitive resin and photosensitive resin composition comprising the same - Google Patents

Photosensitive resin and photosensitive resin composition comprising the same Download PDF

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KR101254054B1
KR101254054B1 KR1020107022039A KR20107022039A KR101254054B1 KR 101254054 B1 KR101254054 B1 KR 101254054B1 KR 1020107022039 A KR1020107022039 A KR 1020107022039A KR 20107022039 A KR20107022039 A KR 20107022039A KR 101254054 B1 KR101254054 B1 KR 101254054B1
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photosensitive resin
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신 우쓰노미야
신스케 미야우치
다이치 나가시마
나오키 야마구치
신이치 가와사키
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오사까 가스 가부시키가이샤
소켄 케미칼 앤드 엔지니어링 캄파니, 리미티드
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F283/00Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G
    • C08F283/06Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G on to polyethers, polyoxymethylenes or polyacetals
    • C08F283/065Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G on to polyethers, polyoxymethylenes or polyacetals on to unsaturated polyethers, polyoxymethylenes or polyacetals
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G63/00Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
    • C08G63/66Polyesters containing oxygen in the form of ether groups
    • C08G63/668Polyesters containing oxygen in the form of ether groups derived from polycarboxylic acids and polyhydroxy compounds
    • C08G63/676Polyesters containing oxygen in the form of ether groups derived from polycarboxylic acids and polyhydroxy compounds in which at least one of the two components contains aliphatic unsaturation
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G63/00Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
    • C08G63/91Polymers modified by chemical after-treatment
    • C08G63/914Polymers modified by chemical after-treatment derived from polycarboxylic acids and polyhydroxy compounds
    • C08G63/916Dicarboxylic acids and dihydroxy compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders

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Abstract

저비용으로 용이하게 제조할 수 있고, 가교밀도나 산가의 조정이 용이하며, 또한 고내열성, 고투명성, 고굴절율 및 저선팽창율 등의 우수한 특성을 구비한 감광성 수지를 제공하는 것을 목적으로 한다.
당해 감광성 수지는, 하기 일반식(1)로 나타내어지는 플루오렌 골격을 구비하는 화합물과 4염기산 2무수물을 반응시켜서 얻어지는 고분자 화합물에, 하기 일반식(2)로 나타내어지는 카르복시산 반응성 (메타)아크릴레이트 화합물을 부가시켜서 얻어지는 감광성 수지다.
[식 1]

Figure 112010063625210-pct00018

(식에서 고리 Z1 및 고리 Z2는 방향족탄화수소기를 나타내고, R1a 및 R1b는 수소원자 또는 치환기를 나타내고, R2a 및 R2b는 수소원자 이외의 치환기를 나타내고, R3a 및 R3b는 수소원자 또는 메틸기를 나타내고, k1 및 k2는 동일하거나 또는 서로 다른 0∼4의 정수를 나타내고, m1 및 m2는 동일하거나 또는 서로 다른 0∼3의 정수를 나타내고, n1 및 n2는 동일하거나 또는 서로 다른 0∼10의 정수를 나타내고, p1 및 p2는 동일하거나 또는 서로 다른 0∼4의 정수를 나타낸다)
[식 2]
Figure 112010063625210-pct00019

(식에서 R4는 수소원자 또는 메틸기를 나타내고, R5는 하기 일반식(5)로 나타내어지는 기를 나타낸다)
[식 5]
Figure 112010063625210-pct00020

(식에서 q, r, s는 각각 독립적으로 0∼9의 정수를 나타낸다. 단, q, r, s가 동시에 0이 되는 경우는 없다)An object of the present invention is to provide a photosensitive resin which can be easily manufactured at low cost, easy to adjust the crosslinking density and acid value, and has excellent properties such as high heat resistance, high transparency, high refractive index and low linear expansion coefficient.
The photosensitive resin is a carboxylic acid reactive (meth) acryl represented by the following general formula (2) to a high molecular compound obtained by reacting a compound having a fluorene skeleton represented by the following general formula (1) with a tetrabasic dianhydride. It is the photosensitive resin obtained by adding a rate compound.
[Formula 1]
Figure 112010063625210-pct00018

(Ring Z 1 in the formula And ring Z 2 represents an aromatic hydrocarbon group, R 1a and R 1b represent a hydrogen atom or a substituent, R 2a and R 2b represent a substituent other than a hydrogen atom, R 3a and R 3b represent a hydrogen atom or a methyl group, k1 and k2 represent the same or different integers from 0 to 4, m1 and m2 represent the same or different integers from 0 to 3, n1 and n2 represent the same or different integers from 0 to 10 , p1 and p2 represent the same or different integers from 0 to 4)
[Formula 2]
Figure 112010063625210-pct00019

(Wherein R 4 represents a hydrogen atom or a methyl group, and R 5 represents a group represented by the following general formula (5)):
[Formula 5]
Figure 112010063625210-pct00020

(Wherein q, r and s each independently represent an integer of 0 to 9, except that q, r and s do not become 0 at the same time)

Description

감광성 수지 및 이를 이용한 감광성 수지 조성물{PHOTOSENSITIVE RESIN AND PHOTOSENSITIVE RESIN COMPOSITION COMPRISING THE SAME}Photosensitive resin and photosensitive resin composition using the same {PHOTOSENSITIVE RESIN AND PHOTOSENSITIVE RESIN COMPOSITION COMPRISING THE SAME}

본 발명은, 플루오렌 골격(fluorene 骨格; fluorene skeleton)을 구비하는 감광성 수지(感光性樹脂) 및 이를 이용한 감광성 수지 조성물(感光性樹脂 組成物)에 관한 것으로서, 더 상세하게는, 다양하고 우수한 성질을 구비하고, 저비용(low-cost)으로 용이하게 제조할 수 있는 감광성 수지 및 이를 이용하는, 액정 디스플레이(liquid crystal display)나 전자부품 등에 있어서의 층간 절연막(層間 絶緣膜)이나 보호막(保護膜)(예를 들면 컬러 필터(color filter), 액정표시소자(液晶表示素子), 집적회로소자(集積回路素子), 고체촬영소자(固體撮影素子) 등에 이용되는 층간 절연막이나 보호막) 등을 조제하는 데에 유용한 감광성 수지 조성물에 관한 것이다.
The present invention relates to a photosensitive resin having a fluorene skeleton and a photosensitive resin composition using the same, and more particularly, to various and excellent properties. And a low-cost photosensitive resin and an interlayer insulating film or protective film in a liquid crystal display, an electronic component, or the like using the same. For example, to prepare a color filter, a liquid crystal display device, an integrated circuit device, an interlayer insulating film or a protective film used for a solid state imaging device, or the like. It relates to useful photosensitive resin compositions.

플루오렌 골격을 구비하는 고분자 화합물(高分子化合物)은, 고내열성, 고투명성, 고굴절율, 저선팽창율 등 우수한 물성을 가지는 것이 알려져 있다. 이 특성을 이용하여 분자 중에 라디컬 중합성(radical polymerizable)의 불포화 결합구조(비닐기(vinyl group))를 유입한 플루오렌 골격을 구비하는 고분자 화합물이, 광학용 오버코트제(光學用 overcoat agent), 하드코팅제(hard-coating agent), 반사 방지막, 안경 렌즈(lens), 광파이버(optical fiber), 광도파로(光導波路), 홀로그램(hologram) 등의 광학재료 용도로 검토가 진척되어 있다. 예를 들면 플라스틱 렌즈(plastic lens) 재료로서, 9,9-비스(4-히드록시페닐)플루오렌(9,9-bis(4-hydroxyphenyl)fluorene)에 (메타)아크릴산클로라이드(methacryl chloride)를 반응시킨 화합물, 또는 9,9-비스(4-히드록시페닐)플루오렌에 에틸렌옥시드(ethylene oxide) 또는 프로필렌옥시드(propylene oxide)를 부가시킨 뒤, (메타)아크릴산(methacrylic acid)을 반응시킨 화합물을 주성분으로 하는 공중합체가 개시되어 있다(특허문헌1).It is known that a high molecular compound having a fluorene skeleton has excellent physical properties such as high heat resistance, high transparency, high refractive index, and low linear expansion coefficient. Using this property, a polymer compound having a fluorene skeleton in which a radical polymerizable unsaturated bond structure (vinyl group) is introduced into a molecule is used as an optical overcoat agent. In recent years, studies have been made on optical materials such as hard-coating agents, anti-reflection films, spectacle lenses, optical fibers, optical waveguides, holograms, and the like. For example, as a plastic lens material, (meth) acrylic chloride is added to 9,9-bis (4-hydroxyphenyl) fluorene. Ethylene oxide or propylene oxide is added to the reacted compound or 9,9-bis (4-hydroxyphenyl) fluorene, followed by reaction of (meth) acrylic acid. The copolymer which has the compound made into the main component is disclosed (patent document 1).

그러나 이 특허문헌에 개시된 화합물은, 분자량이 낮고 구조도 유연해서 충분한 굴절율을 구비하고 있다고는 말할 수 없고, 또한 가교밀도(架橋密度)가 낮으므로 경화물 강도가 낮다고 하는 결점이 있다.However, the compound disclosed in this patent document is low in molecular weight, flexible in structure, and can not be said to have sufficient refractive index. Moreover, since the crosslinking density is low, there exists a fault that hardened | cured material strength is low.

또한 플루오렌 골격을 구비하는 고분자 화합물은, 그 내열성, 내약품성이 우수하다고 하는 특성을 이용하여 액정 컬러 필터(color filter)나 블랙 매트릭스(행렬)(black matrix), 솔더 레지스트(solder resist) 등의 소위 포토레지스트(photoresist)에도 적용되어 있다(특허문헌2 및 3).In addition, a polymer compound having a fluorene skeleton is used in the form of a liquid crystal color filter, a black matrix, a solder resist, or the like, by using properties of excellent heat resistance and chemical resistance. It is applied also to what is called photoresist (patent documents 2 and 3).

이들 기술에 의한 감광성 수지는, 높은 가교밀도를 얻을 수 있고 강도, 내열성, 내약품성이 우수한 경화물을 얻는 것이 가능지만, 그 합성에는 매우 장시간이 필요하기 때문에 비용이 높아, 널리 보급되어 있다고는 말하기 어려운 것이 실정이었다. 또한 그 제조방법으로 인하여 착색이 발생하기 때문에 투명성이 요구되는 광학부품에의 적용은 곤란하여, 플루오렌 골격의 특성을 충분하게 살리고 있다고는 말할 수 없었다.
It is said that the photosensitive resin by these techniques can obtain the high crosslinking density, and can obtain the hardened | cured material excellent in intensity | strength, heat resistance, and chemical-resistance, but since it requires very long time for the synthesis | combination, it is said that it is widely spread and widely spread. Difficult was the situation. In addition, since the coloration occurs due to the production method, application to optical parts requiring transparency is difficult, and it cannot be said that the characteristics of the fluorene skeleton are sufficiently utilized.

일본국 공개특허공보 특개평4-325508호 공보Japanese Patent Laid-Open No. 4-325508 일본국 특허 제3673321호 공보Japanese Patent No. 3673321 일본국 공개특허 특개2007-264433호 공보Japanese Patent Laid-Open No. 2007-264433

따라서 저비용으로 용이하게 제조할 수 있고, 가교밀도나 산가(酸價)의 조정이 용이함과 아울러 플루오렌 골격이 원래 구비하는 고내열성, 고투명성, 고굴절율 및 저선팽창율 등의 우수한 특성을 구비한 감광성 수지의 제공이 요구되고 있어, 본 발명은 그러한 감광성 수지 및 이를 이용한 감광성 수지 조성물을 제공하는 것을 과제로 한다.
Therefore, it is easy to manufacture at low cost, and it is easy to adjust the crosslinking density and acid value, and also has the photosensitivity which has excellent characteristics, such as the high heat resistance, high transparency, high refractive index, and low linear expansion coefficient which the fluorene frame | skeleton originally has, etc. The provision of resin is calculated | required, and this invention makes it a subject to provide such a photosensitive resin and the photosensitive resin composition using the same.

이러한 실정에 비추어 본 발명자들은 상기 과제를 해결하기 위하여 예의 연구를 거듭한 결과, 특정한 플루오렌 골격을 구비하는 화합물과 4염기산 2무수물을 반응시켜 얻어지는 고분자 화합물에, 특정한 카르복시산 반응성 (메타)아크릴레이트 화합물(carboxylic acid 反應性 methacrylate compound)을 부가시켜서 얻어지는 감광성 수지는, 저비용으로 용이하게 제조 가능하고, 고가교밀도로 높은 강도가 얻어짐과 아울러 고내열성, 고투명성, 고굴절율, 저선팽창율 등이 우수한 특성을 나타내는 것을 찾아내어, 본 발명을 완성하기에 이르렀다.In view of these circumstances, the present inventors have made intensive studies to solve the above problems, and as a result, specific carboxylic acid reactive (meth) acrylates are applied to a high molecular compound obtained by reacting a compound having a specific fluorene skeleton with tetrabasic dianhydride. A photosensitive resin obtained by adding a carboxylic acid methacrylate compound can be easily manufactured at low cost, has high strength at high crosslinking density, and has excellent heat resistance, high transparency, high refractive index, and low linear expansion coefficient. The present invention has been found to complete the present invention.

즉 본 발명은, 하기 일반식(1)로 나타내어지는 플루오렌 골격을 구비하는 화합물과 4염기산 2무수물을 반응시켜서 얻어지는 고분자 화합물에, 하기 일반식(2)로 나타내어지는 카르복시산 반응성 (메타)아크릴레이트 화합물을 부가시켜서 얻어지는 감광성 수지다.That is, this invention is the carboxylic acid reactive (meth) acryl represented by following General formula (2) to the high molecular compound obtained by making the compound which has a fluorene skeleton represented by following General formula (1), and tetrabasic dianhydride react. It is the photosensitive resin obtained by adding a rate compound.

[식 1][Formula 1]

Figure 112010063625210-pct00001

Figure 112010063625210-pct00001

(식에서 고리 Z1 및 고리 Z2는 단환식 또는 축합다환식탄화수소 고리를 나타내고, R1a 및 R1b는 수소원자 또는 치환기를 나타내고, R2a 및 R2b는 수소원자 이외의 치환기를 나타내고, R3a 및 R3b는 수소원자 또는 메틸기를 나타내고, k1 및 k2는 동일하거나 또는 서로 다른 0∼4의 정수를 나타내고, m1 및 m2는 동일하거나 또는 서로 다른 0∼3의 정수를 나타내고, n1 및 n2는 동일하거나 또는 서로 다른 0∼10의 정수를 나타내고, p1 및 p2는 동일하거나 또는 서로 다른 0∼4의 정수를 나타낸다. 단, 고리 Z1 및 고리 Z2가 단환식탄화수소 고리인 경우에 p1 및 p2는 1∼3이며, 고리 Z1 및 고리 Z2가 축합다환식탄화수소 고리인 경우에, 고리 Z1에 포함되는 p1의 합 및 고리 Z2에 포함되는 p2의 합이 각각 1이상이다)(Wherein, ring Z 1 and ring Z 2 represent a monocyclic or condensed polycyclic hydrocarbon ring, R 1a and R 1b represent a hydrogen atom or a substituent, R 2a and R 2b represent a substituent other than a hydrogen atom, and R 3a And R 3b represents a hydrogen atom or a methyl group, k1 and k2 represent the same or different integers from 0 to 4, m1 and m2 represent the same or different integers from 0 to 3, and n1 and n2 are the same Or a different integer from 0 to 10, and p1 and p2 represent the same or different integers from 0 to 4. However, when ring Z 1 and ring Z 2 are a monocyclic hydrocarbon ring, p1 and p2 are 1 to 3, and when the ring Z 1 and the ring Z 2 are condensed polycyclic hydrocarbon rings, the sum of X1 included in the ring Z 1 and the sum of X2 contained in the ring Z 2 are each one or more)

[식 2][Formula 2]

Figure 112010063625210-pct00002
Figure 112010063625210-pct00002

(식에서 R4는 수소원자 또는 메틸기를 나타내고, R5는 하기 일반식(5)로 나타내어지는 기를 나타낸다)(Wherein R 4 represents a hydrogen atom or a methyl group, and R 5 represents a group represented by the following general formula (5)):

[식 5][Equation 5]

Figure 112010063625210-pct00003
Figure 112010063625210-pct00003

(식에서 q, r, s는 각각 독립적으로 0∼9의 정수를 나타낸다. 단, q, r, s가 동시에 0이 되는 경우는 없다)(Wherein q, r and s each independently represent an integer of 0 to 9, except that q, r and s do not become 0 at the same time)

또 본 발명은, 상기 감광성 수지와, 광중합 개시제 및/또는 광증감제를 함유하는 것을 특징으로 하는 감광성 수지 조성물이다.
Moreover, this invention contains the said photosensitive resin, a photoinitiator, and / or a photosensitizer, It is the photosensitive resin composition characterized by the above-mentioned.

본 발명의 감광성 수지는, 보존 안정성이 높고 저비용으로 용이하게 제조가능하며 생산성도 우수하고 고내열성, 고투명성, 고굴절율, 저선팽창율 등의 우수한 특성을 구비하는 것이다. 또한 이 감광성 수지를 이용한 본 발명의 감광성 수지 조성물은 감도가 높고 강도 등이 우수한 경화물을 얻을 수 있다.
The photosensitive resin of the present invention has high storage stability, can be easily manufactured at low cost, has excellent productivity, and has excellent characteristics such as high heat resistance, high transparency, high refractive index, and low linear expansion coefficient. Moreover, the photosensitive resin composition of this invention using this photosensitive resin can obtain hardened | cured material which is high in sensitivity, and excellent in intensity | strength.

본 발명의 감광성 수지를 구성하는 고분자 화합물은, 하기 일반식(1)로 나타내어지는 플루오렌 골격을 구비하는 화합물 및 후술하는 4염기산 2무수물을 반응시켜서 얻어지는 것이다.The high molecular compound which comprises the photosensitive resin of this invention is obtained by making the compound which has a fluorene skeleton represented by following General formula (1), and tetrabasic dianhydride mentioned later react.

[식 1][Formula 1]

Figure 112010063625210-pct00004
Figure 112010063625210-pct00004

(식에서 고리 Z1 및 고리 Z2는 단환식 또는 축합다환식탄화수소 고리를 나타내고, R1a 및 R1b는 수소원자 또는 치환기를 나타내고, R2a 및 R2b는 수소원자 이외의 치환기를 나타내고, R3a 및 R3b는 수소원자 또는 메틸기를 나타내고, k1 및 k2는 동일하거나 또는 서로 다른 0∼4의 정수를 나타내고, m1 및 m2는 동일하거나 또는 서로 다른 0∼3의 정수를 나타내고, n1 및 n2는 동일하거나 또는 서로 다른 0∼10의 정수를 나타내고, p1 및 p2는 동일하거나 또는 서로 다른 0∼4의 정수를 나타낸다. 단, 고리 Z1 및 고리 Z2가 단환식탄화수소 고리인 경우에 p1 및 p2는 1∼3이며, 고리 Z1 및 고리 Z2가 축합다환식탄화수소 고리인 경우에, 고리 Z1에 포함되는 p1의 합 및 고리 Z2에 포함되는 p2의 합이 각각 1이상이다.)(Ring Z 1 in the formula And ring Z 2 represents a monocyclic or condensed polycyclic hydrocarbon ring, R 1a and R 1b represent a hydrogen atom or a substituent, R 2a and R 2b represent a substituent other than a hydrogen atom, and R 3a and R 3b are hydrogen An atom or a methyl group, k1 and k2 represent the same or different integers from 0 to 4, m1 and m2 represent the same or different integers from 0 to 3, and n1 and n2 represent the same or different zeros The integer of -10 is shown, p1 and p2 represent the same or different integer of 0-4. Provided that when ring Z 1 and ring Z 2 are monocyclic hydrocarbon rings, p1 and p2 are 1 to 3, and when ring Z 1 and ring Z 2 are condensed polycyclic hydrocarbon rings, p1 included in ring Z 1 And the sum of p2 included in the ring Z 2 is 1 or more, respectively.)

상기 식(1)에 있어서, 고리 Z1 및 고리 Z2로 나타내어지는 탄화수소 고리에 대응하는 탄화수소는, 단환식 또는 축합다환식의 것이고, 예를 들면 벤젠(benzene) 등의 단환식탄화수소, 축합2환식탄화수소(예를 들면 인덴(indene), 나프탈렌(naphthalene) 등의 C8- 20축합2환식탄화수소, 바람직하게는 C10 - 16축합2환식탄화수소, 축합3환식탄화수소(안트라센(anthracene), 페난트렌(phenanthrene) 등) 등의 축합2 내지 4환식탄화수소 등을 들 수 있다. 특히 높은 굴절율, 내열성이 요구되는 용도에 있어서 바람직한 탄화수소로서는, 축합다환식방향족탄화수소(나프탈렌, 안트라센 등)를 들 수 있고, 특히 나프탈렌이 바람직하다. 또한 특히 높은 용해성, 상용성 및 저용액점도가 요구되는 용도에 있어서는 벤젠이 바람직하다. 또, 고리 Z1및 고리 Z2는 각각 동일한 고리 또는 서로 다른 고리이더라도 좋고, 보통 동일한 고리이더라도 좋다.In the formula (1), the hydrocarbon corresponding to the hydrocarbon ring represented by the ring Z 1 and the ring Z 2 is monocyclic or condensed polycyclic, for example, monocyclic hydrocarbons such as benzene and condensed 2 cyclic hydrocarbon (e.g. indene (indene), naphthalene (naphthalene), etc. of C 8- 20 2 condensation polycyclic hydrocarbon, preferably a C 10 - 16 2 condensed polycyclic hydrocarbon, a condensed tricyclic hydrocarbons (anthracene (anthracene), phenanthrene and condensed 2 to 4 cyclic hydrocarbons such as (phenanthrene), etc. Condensed polycyclic aromatic hydrocarbons (naphthalene, anthracene, etc.) may be mentioned as preferred hydrocarbons particularly in applications requiring high refractive index and heat resistance. Naphthalene is particularly preferred, and benzene is particularly preferred for applications in which high solubility, compatibility and low solution viscosity are required, and ring Z 1 and ring Z 2 are the same ring or ring; May be another ring or may be the same ring.

또 상기 식(1)에 있어서, R1a 및 R1b로 나타내어지는 치환기로서는, 특별하게 한정되는 것은 아니지만, 보통 알킬기(alkyl group)다. 알킬기로서는, 메틸기(methyl group), 에틸기(ethyl group), 프로필기(propyl group), 이소프로필기(isopropyl group), 부틸기, t-부틸기 등의 C1-6알킬기(예를 들면 C1-4알킬기, 특히 메틸기) 등을 예시할 수 있다. 기R1a 및 R1b는 서로 다르게 되어 있어도 좋고 동일하더라도 좋다. 또한 k1(또는 k2)이 2이상일 경우, 동일한 벤젠고리에 있어서 기R1a(또는 R1b)는 서로 다르게 되어 있어도 좋고 동일하더라도 좋다. 또, 플루오렌 골격을 구성하는 벤젠고리에 대한 기R1a(또는 R1b)의 결합 위치(치환 위치)는 특별하게 한정되지 않는다. 바람직한 치환수k1 및 k2는 0 또는 1, 특히 0이다. 또, 치환수k1 및 k2는 서로 다르게 되어 있어도 좋지만 보통 동일하다.In the formula (1), the substituents represented by R 1a and R 1b are not particularly limited, but are usually alkyl groups. Examples of the alkyl group include C 1-6 alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group and t-butyl group (for example, C 1). -4 alkyl group, especially methyl group) etc. can be illustrated. The groups R 1a and R 1b may be different from each other or may be the same. When k1 (or k2) is 2 or more, the groups R 1a (or R 1b ) may be different or the same in the same benzene ring. In addition, the bonding position (substitution position) of group R <1a> (or R < 1b ) with respect to the benzene ring which comprises a fluorene skeleton is not specifically limited. Preferred substitutions k1 and k2 are zero or one, in particular zero. The number of substitutions k1 and k2 may be different from each other, but they are usually the same.

고리 Z1 및 고리 Z2에 치환되는 치환기R2a 및 R2b로서는, 알킬기(메틸기, 에틸기, 프로필기, 이소프로필기, 부틸기, s-부틸기, t-부틸기 등의 C1- 20알킬기, 바람직하게는 C1 - 8알킬기, 더 바람직하게는 C1 - 6알킬기 등), 시클로알킬기(cycloalkyl group)(시클로펜틸기(cyclopentyl group), 시클로헥실기(cyclohexyl group) 등의 C5- 10시클로알킬기, 바람직하게는 C5 - 8시클로알킬기, 더 바람직하게는C5 - 6시클로알킬기 등), 아릴기(aryl group)[페닐기(phenyl group), 알킬페닐기(alkylphenyl group)(메틸페닐기(methylphenyl group)(토릴기(tolyl group)), 디메틸페닐기(dimethylphenyl group)(크실릴기(xylyl group) 등) 등의 C6- 10아릴기, 바람직하게는 C6 - 8아릴기, 특히 페닐기 등), 아랄킬기(aralkyl group)(벤질기(benzyl group), 페네틸기(phenethyl) 등의 C6- 10아릴-C1 - 4알킬기 등) 등의 탄화수소기; 알콕시기(alkoxy group)(메톡시기(methoxy group) 등의 C1- 4알콕시기 등); 아실기(acyl group)(아세틸기(acetyl group) 등의 C1- 6아실기 등); 알콕시카르보닐기(alkoxycarbonyl group)(메톡시카르보닐기(methoxycarbonyl group) 등의 C1- 4알콕시카르보닐기 등); 할로겐원자(halogen atom)(불소원자(fluorine atom), 염소원자 등); 니트로기(nitro group) ; 시아노기(cyano group) 등을 들 수 있다.The substituent R 2a and R 2b is substituted on the ring Z 1 and Z 2 ring, an alkyl group (methyl group, such as an ethyl group, a propyl group, an isopropyl group, a butyl group, a s- butyl group, a t- butyl group C 1- 20 alkyl group , preferably C 1 - 8 alkyl, more preferably C 1 - 6 alkyl group such as and the like), a cycloalkyl group (cycloalkyl group), (a cyclopentyl group (cyclopentyl group), cyclohexyl group (cyclohexyl group), C 5- 10 cycloalkyl, preferably C 5 - 8 cycloalkyl group, more preferably a C 5 - 6 cycloalkyl group and the like), aryl group (aryl group) [a phenyl group (phenyl group), alkyl phenyl (alkylphenyl group), (phenyl group (methylphenyl group) (group-SAT (tolyl group)), dimethylphenyl group (dimethylphenyl group) (xylyl group (xylyl group) etc.) and the like of the C 6- 10 aryl group, preferably a C 6 - 8 aryl group, especially phenyl group) , an aralkyl group (aralkyl group) - hydrocarbon groups such as (a benzyl group (benzyl group), phenethyl group (phenethyl), C 6- 10 aryl such as 1 -C 4 alkyl group, and the like); Alkoxy group (alkoxy group) (C 1- 4 alkoxy group such as methoxy group (methoxy group), and the like); Acyl group (acyl group) (acetyl group (acetyl group), such as a C 1- 6 acyl group and the like); Alkoxycarbonyl group (alkoxycarbonyl group) (methoxy-carbonyl group (C 1- 4 alkoxycarbonyl group such as methoxycarbonyl group)); Halogen atoms (fluorine atoms, chlorine atoms, etc.); Nitro group; Cyano group etc. are mentioned.

바람직한 치환기R2a(또는 R2b)는, 알킬기(C1 - 6알킬기), 시클로알킬기(C5 - 8시클로알킬기), 아릴기(C6 - 10아릴기), 아랄킬기(C6-8아릴-C1-2알킬기)이며, 특히 C1 - 4알킬기, C1 - 4알콕시기, C6 - 8아릴기가 바람직하다. 치환기R2a(또는 R2b)는, 단독이어도 좋고 또는 2종이상 조합시켜서 벤젠고리로 치환하여도 좋다. 또한 기R2a 및 R2b는 서로 동일하거나 또는 서로 다르게 되어 있어도 좋지만, 보통 동일하다. 또한 m1(또는 m2)이 2이상일 경우, 동일한 탄화수소 고리에 있어서 R2a(또는 R2b)는 서로 다르게 되어 있어도 좋고 동일하더라도 좋다.Preferred substituents R 2a (or R 2b) is an alkyl (C 1 - 6 alkyl group), a cycloalkyl group (C 5 - 8 cycloalkyl group), aryl group (C 6 - 10 aryl group), aralkyl group (aryl C 6-8 and -C 1-2 alkyl), especially C 1 - 4 alkyl, C 1 - is preferably an 8-aryl-4 alkoxy group, C 6. The substituent R 2a (or R 2b ) may be used alone or in combination of two or more thereof to be substituted with a benzene ring. The groups R 2a and R 2b may be the same as or different from each other, but are usually the same. When m1 (or m2) is 2 or more, R 2a (or R 2b ) in the same hydrocarbon ring may be different from each other or may be the same.

치환기R2a(또는 R2b)의 치환 위치는, 특별하게 한정되어 있지 않고 히드록실기(hydroxyl group) 또는 히드록시(폴리)알킬렌옥시기(hydroxylpoly(alkyleneoxy) group)(이하, 히드록실기 함유기로 총칭하는 경우가 있다)의 치환 위치에 따라, 페놀 골격(phenol skeleton)을 구성하는 페닐기의 2∼6번째 자리(예를 들면 2번째, 5번째, 2,5-번째 자리 등)에서 치환할 수 있다.The substitution position of the substituent R 2a (or R 2b ) is not particularly limited and is a hydroxyl group or a hydroxylpoly (alkyleneoxy) group (hereinafter referred to as a hydroxyl group-containing group). Depending on the substitution position of the compound), the substitution may be carried out at the 2nd to 6th positions (for example, 2nd, 5th, 2, 5th, etc.) of the phenyl group constituting the phenol skeleton. have.

치환기R2a 및 R2b의 치환수m1 및 m2는, 히드록실기 함유기의 치환수에도 의하지만 0∼2가 바람직하고 더 바람직하게는 0∼1(특히 0)이다. 또, 치환수m1 및 m2는, 서로 다르게 되어 있어도 좋지만 보통 동일한 경우가 많다.The number of substitutions m1 and m2 of the substituents R 2a and R 2b is preferably 0 to 2, more preferably 0 to 1 (particularly 0), depending on the number of substitutions of the hydroxyl group-containing group. The number of substitutions m1 and m2 may be different from each other, but usually the same.

히드록실기 함유기의 R3a 및 R3b로 나타내어지는 치환기로서는 수소 혹은 메틸기다. 또, R3a 및 R3b는 서로 동일하여도 좋고 다르게 되어도 좋지만 보통 동일하다.Substituents represented by R 3a and R 3b of the hydroxyl group-containing group are hydrogen or a methyl group. R 3a and R 3b may be the same as or different from each other, but are usually the same.

(폴리)알킬렌옥시기의 부가수n1 및 n2는, 동일하거나 또는 서로 다르고 0∼10의 범위에서 선택할 수 있고, 바람직하게는 0∼8(예를 들면 1∼8), 더 바람직하게는 0∼6(예를 들면 1∼6), 특히 0∼4(예를 들면 1∼4)정도 이어도 좋다. 또한 n1과 n2의 합(n1+n2)은, 0∼20의 범위에서 선택할 수 있고, 바람직하게는 0∼16(예를 들면 2∼12), 더 바람직하게는 0∼12(예를 들면 2∼12), 특히 0∼8(예를 들면 2∼8)정도 이더라도 좋다. 또, n1(또는 n2)이 2이상의 경우에 (폴리)알킬렌옥시기는, 동일한 알콕시기로 구성되어 있어도 좋고 이종(異種)의 알콕시기(예를 들면 에톡시기(ethoxy group)와 프로필렌옥시기(propyleneoxy group))가 혼재하여 구성되어 있어도 좋지만, 보통 동일한 알콕시기로 구성되어 있는 경우가 많다.Addition number n1 and n2 of a (poly) alkyleneoxy group are the same or different, and can be selected in the range of 0-10, Preferably it is 0-8 (for example, 1-8), More preferably, it is 0- 6 (for example, 1 to 6), in particular, 0 to 4 (for example, 1 to 4) may be sufficient. In addition, the sum (n1 + n2) of n1 and n2 can be selected in the range of 0-20, Preferably it is 0-16 (for example, 2-12), More preferably, it is 0-12 (for example, 2) -12), especially 0-8 (for example, 2-8) may be sufficient. Moreover, when n1 (or n2) is two or more, the (poly) alkyleneoxy group may be comprised by the same alkoxy group, and a heterogeneous alkoxy group (for example, an ethoxy group and a propyleneoxy group (propyleneoxy group) Although group)) may be mixed and comprised, they are usually comprised by the same alkoxy group.

히드록실기 함유기의 치환수p1 및 p2는, 0∼4의 범위로서 1∼4가 바람직하고, 특히 1∼2가 바람직하다. 단, 고리 Z1 및 고리 Z2가 단환식탄화수소 고리인 경우에 p1 및 p2는 1∼3이며, 고리 Z1 및 고리 Z2가 축합다환식탄화수소 고리인 경우에, 고리 Z1에 포함되는 p1의 합 및 고리 Z2에 포함되는 p2의 합이 각각 1이상이다. 또한 p1과 p2의 합(p1+p2)은, 2∼8이 바람직하고, 더 바람직하게는 2∼4이다. 특히 경화물의 가교밀도가 요구되는 용도에 있어서 p1 및 p2는 2 내지 3이 바람직하다. 또, 치환수p1 및 p2는 서로 다르게 되어 있어도 좋지만, 보통 동일한 경우가 많다. 히드록실기 함유기의 치환 위치는 특별하게 한정되지 않고, p1(또는 p2)의 수에 따라 플루오렌의 9번째 자리에 치환되는 페닐기의 2∼6번째 자리로부터 선택할 수 있고, p1(또는 p2)이 2인 경우에 예를 들면 3,4-번째 자리, 3,5-번째 자리 등 이어도 좋다. 1개의 히드록실기 함유기가 보통 4번째 자리에 치환하고 있어도 좋다.As for the substitution numbers p1 and p2 of a hydroxyl-group containing group, 1-4 are preferable as a range of 0-4, and 1-2 are especially preferable. Provided that when ring Z 1 and ring Z 2 are monocyclic hydrocarbon rings, p1 and p2 are 1 to 3, and when ring Z 1 and ring Z 2 are condensed polycyclic hydrocarbon rings, p1 included in ring Z 1 And the sum of X2 contained in the ring Z 2 is 1 or more, respectively. Moreover, 2-8 are preferable and, as for the sum (p1 + p2) of p1 and p2, More preferably, it is 2-4. Especially in the use which crosslinking density of hardened | cured material is calculated | required, p1 and p2 have preferable 2-3. In addition, although the substitution numbers p1 and p2 may be different, they are usually the same. The substitution position of the hydroxyl group-containing group is not particularly limited and may be selected from the 2-6th positions of the phenyl group substituted at the 9th position of fluorene according to the number of p1 (or p2), and p1 (or p2) In the case of 2, for example, the third, fourth, third, and fifth digits may be used. One hydroxyl group containing group may replace the 4th position normally.

동일한 페놀 골격을 구성하는 복수의 히드록실기 함유기는, 동일하여도 좋고 서로 다르게 되어 있어도 좋다. 예를 들면 복수의 히드록실기 함유기가, (i)n1=0(n2=0)인 히드록실기 단독(단, p1 및 p2가 2인 경우를 제외한다)으로 구성되어 있어도 좋고, (ii)n1=0(n2=0)인 히드록실기와 n1≠0(n2≠0)인 히드록시(폴리)알콕시기(hydroxypoly(alkoxy) group)(2-히드록시에톡시기(2-hydroxyethoxy group) 등)로 구성되어 있어도 좋고, (iii)n1≠0(n2≠0)인 동일한 히드록시(폴리)알콕시기 단독으로 구성되어 있어도 좋고, (iv)n1≠0(n2≠0)인 서로 다른 히드록시(폴리)알콕시기[예를 들면 2-히드록시에톡시기와 2-(2-히드록시에톡시)에톡시기(2-(2-hydroxyethoxy) ethoxy group)]로 구성되어 있어도 좋다.The plurality of hydroxyl group-containing groups constituting the same phenol skeleton may be the same or different from each other. For example, a plurality of hydroxyl group-containing groups may be composed of a hydroxyl group alone (except when p1 and p2 are 2) in which (i) n1 = 0 (n2 = 0), and (ii) hydroxyl group with n1 = 0 (n2 = 0) and hydroxypoly (alkoxy) group with n1 ≠ 0 (n2 ≠ 0) (2-hydroxyethoxy group) Etc.), (iii) may be composed of the same hydroxy (poly) alkoxy group alone, where n1 ≠ 0 (n2 ≠ 0), and (iv) different hydroxides of n1 ≠ 0 (n2 ≠ 0). It may be comprised with a hydroxy (poly) alkoxy group (for example, 2-hydroxyethoxy group and 2- (2-hydroxyethoxy) ethoxy group (2- (2-hydroxyethoxy) ethoxy group)).

상기 일반식(1)의 플루오렌 골격을 구비하는 화합물 중에서도, 특히 높은 굴절율, 내열성이 요구되는 용도에 있어서는 하기 일반식(3)으로 나타내어지는 구조가 바람직하다.Among the compounds having the fluorene skeleton of the general formula (1), a structure represented by the following general formula (3) is particularly preferable in applications in which high refractive index and heat resistance are required.

[식 3][Equation 3]

Figure 112010063625210-pct00005
Figure 112010063625210-pct00005

(식에서 R1a 및 R1b는 수소원자 또는 치환기를 나타내고, R2a, R2b, R6a 및 R6b는 수소원자 이외의 치환기를 나타내고, R3a 및 R3b는 수소 원자 또는 메틸기를 나타내고, k1 및 k2는 동일하거나 또는 서로 다른 0∼4의 정수를 나타내고, m1, m2, m3 및 m4는 동일하거나 또는 서로 다른 0∼3의 정수를 나타내고, n1, n2, n3 및 n4는 동일하거나 또는 서로 다른 0∼10의 정수를 나타내고, p1 및 p2는 동일하거나 또는 서로 다른 1∼4의 정수를 나타내고, p3 및 p4는 동일하거나 또는 서로 다른 0∼3의 정수를 나타낸다)(Wherein R 1a and R 1b represent a hydrogen atom or a substituent, R 2a , R 2b , R 6a and R 6b represent a substituent other than a hydrogen atom, R 3a and R 3b represent a hydrogen atom or a methyl group, k1 and k2 represents the same or different integers from 0 to 4, m1, m2, m3 and m4 represent the same or different integers from 0 to 3, and n1, n2, n3 and n4 represent the same or different zeros An integer of -10, p1 and p2 represent the same or different integers of 1 to 4, p3 and p4 represent the same or different integers of 0 to 3)

R1a 및 R1b, R2a 및 R2b, R3a 및 R3b, k1 및 k2, m1 및 m2, n1 및 n2는 상기와 같다. 또한 R6a 및 R6b는 상기 R2a 및 R2b, m3 및 m4는 상기 m1 및 m2, n3 및 n4는 상기 n1 및 n2에 각각 대응하고, 같은 의미를 가진다. p1 및 p2는 상기와 같지만, 1∼4가 바람직하다. p3 및 p4는 상기 p1 및 p2와 대응하고 0∼3이 바람직하다.R 1a and R 1b , R 2a and R 2b , R 3a and R 3b , k1 and k2, m1 and m2, n1 and n2 are the same as above. In addition, R 6a and R 6b are R 2a and R 2b , m3 and m4 correspond to the m1 and m2, n3 and n4 correspond to the n1 and n2, respectively, and have the same meaning. p1 and p2 are as above-mentioned, but 1-4 are preferable. p3 and p4 correspond to said p1 and p2, and 0-3 are preferable.

구체적으로는, 9,9-비스(히드록시알콕시나프틸)플루오렌류(9,9-bis(hydroxy alkoxy naphthyl)fluorenes), 9,9-비스(히드록시폴리알콕시나프틸)플루오렌류(9,9-bis(hydroxy poly alkoxy naphthyl)fluorenes) 등의 상기 일반식(3)에 있어서 p1+p2+p3+p4가 2인 화합물; 9,9-비스(폴리히드록시알콕시나프틸)플루오렌류(9,9-bis(polyhydroxy alkoxy naphthyl)fluorenes), 9,9-비스(폴리히드록시폴리알콕시나프틸)플루오렌류(9,9-bis(polyhydroxy poly alkoxy naphthyl)fluorees) 등의 상기 일반식(3)에 있어서 p1+p2+p3+p4이 2이상인 화합물 등을 들 수 있다.Specifically, 9,9-bis (hydroxyalkoxy naphthyl) fluorenes (9,9-bis (hydroxy alkoxy naphthyl) fluorenes), 9,9-bis (hydroxypolyalkoxy naphthyl) fluorene ( Compounds in which p1 + p2 + p3 + p4 is 2 in General Formula (3) such as 9,9-bis (hydroxy poly alkoxy naphthyl) fluorenes); 9,9-bis (polyhydroxyalkoxy naphthyl) fluorenes (9,9-bis (polyhydroxy alkoxy naphthyl) fluorenes), 9,9-bis (polyhydroxypolyalkoxy naphthyl) fluorenes (9, In the said General formula (3), such as 9-bis (polyhydroxy poly alkoxy naphthyl) fluorees, the compound whose p1 + p2 + p3 + p4 is 2 or more is mentioned.

9,9-비스(히드록시알콕시나프틸)플루오렌류로서는, 예를 들면 9,9-비스(히드록시알콕시나프틸)플루오렌{예를 들면 9,9-비스[6-(2-히드록시에톡시)-2-나프틸]플루오렌(9,9-bis[6-(2-hydroxyethoxy)2-naphthyl]fluorene), 9,9-비스[6-(2-히드록시프로폭시)-2-나프틸]플루오렌(9,9-bis[6-(2-hydroxypropoxy)2- naphthyl]fluorene), 9,9-비스[5-(2-히드록시에톡시)-1-나프틸]플루오렌, 9,9-비스[5-(2-히드록시프로폭시)-1-나프틸]플루오렌 등의 9,9-비스(히드록시C2 - 4알콕시나프틸)플루오렌 등} 등을 들 수 있다.As 9, 9-bis (hydroxyalkoxy naphthyl) fluorene, for example, 9, 9-bis (hydroxyalkoxy naphthyl) fluorene {For example, 9, 9-bis [6- (2- hydride) Hydroxyethoxy) -2-naphthyl] fluorene (9,9-bis [6- (2-hydroxyethoxy) 2-naphthyl] fluorene), 9,9-bis [6- (2-hydroxypropoxy)- 2-naphthyl] fluorene (9,9-bis [6- (2-hydroxypropoxy) 2-naphthyl] fluorene), 9,9-bis [5- (2-hydroxyethoxy) -1-naphthyl] fluorene, 9,9-bis [5- (2-hydroxypropoxy) -1-naphthyl] 9,9-bis such as fluorene (hydroxy-C 2 - 4 alkoxy-naphthyl) fluorene} etc., etc. Can be mentioned.

9,9-비스(히드록시폴리알콕시나프틸)플루오렌류로서는, 예를 들면 9,9-비스(히드록시디알콕시나프틸)플루오렌[예를 들면 9,9-비스{6-[2-(2-히드록시에톡시)에톡시]-2-나프틸}플루오렌(9,9-bis{6-[2-(2-hydroxyethoxy) ethoxy]-2-naphthyl}fluorene), 9,9-비스{6-[2-(2-히드록시프로폭시)프로폭시]-2-나프틸}플루오렌(9,9-bis{6-[2-(2- hydroxypropoxy) propoxy]-2- naphthyl}fluorene), 9,9-비스{5-[2-(2-히드록시에톡시)에톡시]-1-나프틸}플루오렌, 9,9-비스{5-[2-(2-히드록시프로폭시)프로폭시]-1-나프틸}플루오렌 등의 9,9-비스(히드록시디C2 - 4알콕시나프틸)플루오렌 등] 등의 9,9-비스(히드록시디알콕시나프틸)플루오렌류(9,9-bis(hydroxy dialkoxy naphthyl)fluorenes); 이들의 화합물에 대응하고 상기 일반식(3)에 있어서 n1, n2, n3, n4가 3이상인 화합물 등을 들 수 있다.As 9, 9-bis (hydroxy polyalkoxy naphthyl) fluorene, for example, 9, 9-bis (hydroxy dialkoxy naphthyl) fluorene [for example 9, 9-bis {6- [2] -(2-hydroxyethoxy) ethoxy] -2-naphthyl} fluorene (9,9-bis {6- [2- (2-hydroxyethoxy) ethoxy] -2-naphthyl} fluorene), 9,9 -Bis {6- [2- (2-hydroxypropoxy) propoxy] -2-naphthyl} fluorene (9,9-bis {6- [2- (2-hydroxypropoxy) propoxy] -2-naphthyl } fluorene), 9,9-bis {5- [2- (2-hydroxyethoxy) ethoxy] -1-naphthyl} fluorene, 9,9-bis {5- [2- (2-hydroxy hydroxy-propoxy) propoxy] -1-naphthyl} fluorene 9,9-bis such as fluorene (hydroxydiphenyl C 2 - 4 alkoxy-naphthyl) fluorene, etc.] such as 9,9-bis (hydroxydiphenyl alkoxy Naphthyl) fluorenes (9,9-bis (hydroxy dialkoxy naphthyl) fluorenes); The compound etc. which correspond to these compounds and whose n1, n2, n3, n4 are three or more in the said General formula (3) are mentioned.

9,9-비스(폴리히드록시알콕시나프틸)플루오렌류로서는, 상기 9,9-비스(히드록시알콕시나프틸)플루오렌류에 대응하고 p1+p2+p3+p4가 2이상인 화합물, 예를 들면 9,9-비스(디 또는 트리히드록시알콕시나프틸)플루오렌(9,9-bis(di- or tri-hydroxy alkoxy naphthyl)fluorene)[예를 들면 9,9-비스[디(2-히드록시에톡시)-2-나프틸]플루오렌(9,9-bis[di(2-hydroxyethoxy) -2- naphthyl]fluorene), 9,9-비스[디(2-히드록시프로폭시)-2-나프틸]플루오렌(9,9-bis[di(2-hydroxy propoxy) -2- naphthyl]fluorene) 등의 9,9-비스(디 또는 트리 히드록시C2 - 4알콕시나프틸)플루오렌 등] 등의 9,9-비스(폴리히드록시알콕시나프틸)플루오렌을 들 수 있다.As 9,9-bis (polyhydroxyalkoxy naphthyl) fluorene, the compound corresponding to said 9,9-bis (hydroxyalkoxy naphthyl) fluorene and p1 + p2 + p3 + p4 is two or more, an example For example 9,9-bis (di or trihydroxyalkoxynaphthyl) fluorene (9,9-bis (di- or tri-hydroxy alkoxy naphthyl) fluorene) [for example 9,9-bis [di (2 -Hydroxyethoxy) -2-naphthyl] fluorene (9,9-bis [di (2-hydroxyethoxy) -2-naphthyl] fluorene), 9,9-bis [di (2-hydroxypropoxy) 2-naphthyl] fluorene 9,9-bis such as (9,9-bis [di (2 -hydroxy propoxy) -2- naphthyl] fluorene) ( di or tri-hydroxy-C 2 - 4 alkoxy-naphthyl) 9,9-bis (polyhydroxyalkoxy naphthyl) fluorene, such as fluorene].

9,9-비스(폴리히드록시폴리알콕시나프틸)플루오렌류로서는, 상기 9,9-비스(히드록시알콕시나프틸)플루오렌류에 대응하고, n1, n2, n3, n4가 2이상 또 p1+p2+p3+p4가 2이상인 화합물, 예를 들면 9,9-비스(디 또는 트리히드록시디알콕시나프틸)플루오렌[예를 들면 9,9-비스{디[2-(2-히드록시에톡시)에톡시]-2-나프틸}플루오렌(9,9-bis{di[2-(2-hydroxyethoxy) ethoxyl - 2- naphthyl}fluorene) 등의 9,9-비스(디 또는 트리히드록시디C2-4알콕시나프틸)플루오렌 등] 등의 9,9-비스(디 또는 트리히드록시디알콕시나프틸)플루오렌류; 이들의 화합물에 대응하고 상기 식(3)에 있어서 n1, n2, n3, n4가 3이상인 화합물 등을 들 수 있다.As 9, 9-bis (polyhydroxy polyalkoxy naphthyl) fluorene, it respond | corresponds to said 9, 9-bis (hydroxyalkoxy naphthyl) fluorene, n1, n2, n3, n4 are two or more, and A compound in which X1 + p2 + p3 + p4 is 2 or more, for example 9,9-bis (di or trihydroxydialkoxynaphthyl) fluorene [for example 9,9-bis {di [2- (2- 9,9-bis (di or such as hydroxyethoxy) ethoxy] -2-naphthyl} fluorene (9,9-bis {di [2- (2-hydroxyethoxy) ethoxyl-2-naphthyl} fluorene) 9,9-bis (di or trihydroxy dialkoxy naphthyl) fluorene, such as trihydroxy di C 2-4 alkoxy naphthyl) fluorene; The compound etc. which correspond to these compounds and whose n1, n2, n3, n4 are three or more in said Formula (3) are mentioned.

이들 중, 9,9-비스[6-(2-히드록시에톡시)-2-나프틸]플루오렌 등이 바람직하다.Among these, 9,9-bis [6- (2-hydroxyethoxy) -2-naphthyl] fluorene and the like are preferable.

상기 일반식(1)의 플루오렌 골격을 구비하는 화합물 중에서도, 특히 높은 용해성, 상용성 및 저용액점도가 요구되는 용도에 있어서는, 하기 일반식(4)로 나타내어지는 구조가 바람직하다.Among the compounds having the fluorene skeleton of the general formula (1), a structure represented by the following general formula (4) is particularly preferable for applications in which high solubility, compatibility, and low solution viscosity are required.

[식 4][Formula 4]

Figure 112010063625210-pct00006
Figure 112010063625210-pct00006

(식에서 R1a 및 R1b는 수소원자 또는 치환기를 나타내고, R2a, R2b, R7a 및 R7b는 수소원자 이외의 치환기를 나타내고, R3a 및 R3b는 수소 원자 또는 메틸기를 나타낸다. k1 및 k2는 동일하거나 또는 서로 다른 0∼4의 정수를 나타내고, n1 및 n2는 동일하거나 또는 서로 다른 0∼10의 정수를 나타내고, p1 및 p2는 동일하거나 또는 서로 다른 1∼3의 정수를 나타낸다.)(Wherein R 1a and R 1b represent a hydrogen atom or a substituent, R 2a , R 2b , R 7a and R 7b represent a substituent other than a hydrogen atom, and R 3a and R 3b represent a hydrogen atom or a methyl group. K1 and k2 represents the same or different integers from 0 to 4, n1 and n2 represent the same or different integers from 0 to 10, and p1 and p2 represent the same or different integers from 1 to 3).

R1a 및 R1b, R2a 및 R2b, R3a 및 R3b, k1 및 k2, m1 및 m2, n1 및 n2는 상기와 같다. 또한 R7a 및 R7b는 상기 R3a 및 R3b에 대응하고, 같은 의미를 가진다. p1 및 p2는 상기와 같지만, 1∼3이 바람직하다.R 1a and R 1b , R 2a and R 2b , R 3a and R 3b , k1 and k2, m1 and m2, n1 and n2 are the same as above. In addition, R 7a and R 7b correspond to the above R 3a and R 3b and have the same meaning. p1 and p2 are as above-mentioned, but 1-3 are preferable.

상기 식(4)로 나타내어지는 대표적인 화합물에는, 9,9-비스(히드록시알콕시페닐)플루오렌류(9,9-bis(hydroxy alkoxyphenyl)fluorene)(상기 일반식(4)에 있어서 n1=n2=1인 화합물), 9,9-비스(히드록시 폴리알콕시디알킬페닐)플루오렌류(9,9-bis(hydroxy polyalkoxy dialkyl phenyl)fluorenes)(상기 일반식(4)에 있어서 n1, n2이 각각 1이상인 화합물) 등이 포함된다.Representative compounds represented by the formula (4) include 9,9-bis (hydroxyalkoxyphenyl) fluorenes (9,9-bis (hydroxy alkoxyphenyl) fluorene) (n1 = n2 in the general formula (4). = 1), 9,9-bis (hydroxy polyalkoxy dialkyl phenyl) fluorenes (n1, n2 in the general formula (4) is 9,9-bis (hydroxy polyalkoxy dialkyl phenyl) fluorenes) Compound, each of which is one or more).

9,9-비스(히드록시알콕시페닐)플루오렌류에는, 예를 들면 9,9-비스(히드록시알콕시페닐)플루오렌류{예를 들면 9,9-비스[4-(2-히드록시에톡시)페닐]플루오렌(9,9-bis[4-(2-hydroxyethoxy) phenyl]fluorene), 9,9-비스[4-(2-히드록시프로폭시)페닐]플루오렌(9,9-bis[4-(2-hydroxy propoxy) phenyl]fluorene), 9,9-비스[4-(2-히드록시에톡시)-3-메틸페닐]플루오렌(9,9-bis[4-(2-hydroxyethoxy)-3-methylphenyl]fluorene), 9,9-비스[4-(2-히드록시프로폭시)-3-메틸페닐]플루오렌(9,9-bis[4-(2-hydroxy propoxy)-3-methylphenyl]fluorene), 9,9-비스[4-(2-히드록시에톡시)-3,5-디메틸페닐]플루오렌(9,9-bis[4-(2-hydroxyethoxy)-3,5-dimethylphenyl]fluorene), 9,9-비스[4-(2-히드록시에톡시)페녹시에탄올]플루오렌(9,9-bis[4-(2-hydroxyethoxy)phenoxyethanol]fluorene), 9,9-비스[4-(2-히드록시프로폭시)페녹시에탄올]플루오렌(9,9-bis[4-(2-hydroxy propoxy)phenoxyethanol]fluorene), 9,9-비스[4-(2-히드록시에톡시)-3-메틸페닐]플루오렌, 9,9-비스[4-(2-히드록시프로폭시)-3-메틸페닐]플루오렌, 9,9-비스[4-(2-히드록시에톡시)-2,5-디메틸페닐]플루오렌, 9,9-비스[4-(2-히드록시프로폭시)-2,5-디메틸페닐]플루오렌(9,9-bis[4-(2-hydroxy propoxy)-2,5-dimethylphenyl]fluorene), 9,9-비스[4-(2-히드록시에톡시)-3,6-디메틸페닐]플루오렌, 9,9-비스[4-(2-히드록시프로폭시)-2,6-디메틸페닐]플루오렌, 9,9-비스[4-(2-히드록시에톡시)-2,4-디메틸페닐]플루오렌, 9,9-비스[3-(2-히드록시프로폭시)-2,4-디메틸페닐]플루오렌, 9,9-비스[4-(2-히드록시에톡시)-3,4-디메틸페닐]플루오렌, 9,9-비스[2-(2-히드록시프로폭시)-3,4-디메틸페닐]플루오렌 등의 9,9-비스(히드록시알콕시알킬페닐)플루오렌(9,9-bis(hydroxy alkoxy alkyl phenyl)fluorene), 바람직하게는 9,9-비스(2-히드록시프로폭시-디C1 - 4알킬페닐)플루오렌 등의 9,9-비스(히드록시 분기 C3 - 4알콕시-디알킬페닐)플루오렌류}가 포함된다.Examples of the 9,9-bis (hydroxyalkoxyphenyl) fluorenes include 9,9-bis (hydroxyalkoxyphenyl) fluorenes {for example, 9,9-bis [4- (2-hydroxy Ethoxy) phenyl] fluorene (9,9-bis [4- (2-hydroxyethoxy) phenyl] fluorene), 9,9-bis [4- (2-hydroxypropoxy) phenyl] fluorene (9,9 -bis [4- (2-hydroxy propoxy) phenyl] fluorene), 9,9-bis [4- (2-hydroxyethoxy) -3-methylphenyl] fluorene (9,9-bis [4- (2 -hydroxyethoxy) -3-methylphenyl] fluorene), 9,9-bis [4- (2-hydroxypropoxy) -3-methylphenyl] fluorene (9,9-bis [4- (2-hydroxy propoxy)- 3-methylphenyl] fluorene), 9,9-bis [4- (2-hydroxyethoxy) -3,5-dimethylphenyl] fluorene (9,9-bis [4- (2-hydroxyethoxy) -3, 5-dimethylphenyl] fluorene), 9,9-bis [4- (2-hydroxyethoxy) phenoxyethanol] fluorene (9,9-bis [4- (2-hydroxyethoxy) phenoxyethanol] fluorene), 9, 9-bis [4- (2-hydroxypropoxy) phenoxyethanol] fluorene (9,9-bis [4- (2-hydroxy propoxy) phenoxyethanol] fluorene), 9,9-bis [4- ( 2-hydroxyethoxy) -3-methylphenyl] fluorene, 9,9-bis [4- (2-hydroxypropoxy) -3-methylphenyl] fluorene, 9,9-bis [4- (2- Hydroxyethoxy) -2,5-dimethylphenyl] fluorene, 9,9-bis [4- (2-hydroxypropoxy) -2,5-dimethylphenyl] fluorene (9,9-bis [4 -(2-hydroxy propoxy) -2,5-dimethylphenyl] fluorene), 9,9-bis [4- (2-hydroxyethoxy) -3,6-dimethylphenyl] fluorene, 9,9-bis [ 4- (2-hydroxypropoxy) -2,6-dimethylphenyl] fluorene, 9,9-bis [4- (2-hydroxyethoxy) -2,4-dimethylphenyl] fluorene, 9, 9-bis [3- (2-hydroxypropoxy) -2,4-dimethylphenyl] fluorene, 9,9-bis [4- (2-hydroxyethoxy) -3,4-dimethylphenyl] flu 9,9-bis (hydroxyalkoxyalkylphenyl) fluorene (9,9-bis, such as orene and 9,9-bis [2- (2-hydroxypropoxy) -3,4-dimethylphenyl] fluorene (hydroxy alkoxy alkyl phenyl) fluorene), preferably 9,9-bis (2-hydroxy-propoxy-di-C 1 - 4 alkylphenyl) fluorene such as 9,9 ratio It includes (hydroxy-C branch 3-dialkyl phenyl-4 alkoxy)} fluorene acids.

9,9-비스(히드록시폴리알콕시페닐)플루오렌류(9,9-bis(hydroxy polyalkoxyphenyl)fluorenes)에는, n1, n2가 2이상인 화합물, 예를 들면 9,9-비스(히드록시디알콕시페닐)플루오렌류(9,9-bis(hydroxy dialkoxyphenyl)fluorenes){예를 들면 9,9-비스[4-(2-히드록시디에톡시)페닐]플루오렌(9,9-bis[4-(2-hydroxydiethoxy) phenyl]fluorene, 9,9-비스[4-(2-히드록시디프로폭시)페닐]플루오렌(9,9-bis[4-(2-hydroxy dipropoxy) phenyl]fluorene), 9,9-비스[4-(2-히드록시디에톡시)-3-메틸페닐]플루오렌(9,9-bis[4-(2-hydroxydiethoxy)-3-methylphenyl]fluorene), 9,9-비스[4-(2-히드록시디프로폭시)-3-메틸페닐]플루오렌(9,9-bis[4-(2-hydroxy dipropoxy)-3-methylphenyl]fluorene), 9,9-비스[4-(2-히드록시디에톡시)-3,5-디메틸페닐]플루오렌(9,9-bis[4-(2-hydroxydiethoxy)-3,5-dimethylphenyl]fluorene), 9,9-비스[4-(2-히드록시디에톡시)페녹시에탄올]플루오렌(9,9-bis[4-(2-hydroxydiethoxy) phenoxyethanol]fluorene), 9,9-비스[4-(2-히드록시디프로폭시)페녹시에탄올]플루오렌(9,9-bis[4-(2-hydroxyl dipropoxy) phenoxyethanol]fluorene), 9,9-비스[4-(2-히드록시디에톡시)-3-메틸페닐]플루오렌, 9,9-비스[4-(2-히드록시디프로폭시)-3-메틸페닐]플루오렌, 9,9-비스[4-(2-히드록시디에톡시)-2,5-디메틸페닐]플루오렌, 9,9-비스[4-(2-히드록시디프로폭시)-2,5-디메틸페닐]플루오렌(9,9-bis[4-(2-hydroxyl dipropoxy)-2,5-dimethylphenyl]fluorene), 9,9-비스[4-(2-히드록시디에톡시)-3,6-디메틸페닐]플루오렌, 9,9-비스[4-(2-히드록시디프로폭시)-2,6-디메틸페닐]플루오렌, 9,9-비스[4-(2-히드록시디에톡시)-2,4-디메틸페닐]플루오렌, 9,9-비스[3-(2-히드록시디프로폭시)-2,4-디메틸페닐]플루오렌, 9,9-비스[4-(2-히드록시디에톡시)-3,4-디메틸페닐]플루오렌, 9,9-비스[2-(2-히드록시디프로폭시)-3,4-디메틸페닐]플루오렌 등의 9,9-비스(히드록시디알콕시페닐)플루오렌}가 포함된다.9,9-bis (hydroxypolyalkoxyphenyl) fluorenes include compounds in which n1 and n2 are two or more, for example, 9,9-bis (hydroxydialkoxy Phenyl) fluorenes (9,9-bis (hydroxy dialkoxyphenyl) fluorenes) {for example 9,9-bis [4- (2-hydroxydiethoxy) phenyl] fluorene (9,9-bis [4- (2-hydroxydiethoxy) phenyl] fluorene, 9,9-bis [4- (2-hydroxydipropoxy) phenyl] fluorene (9,9-bis [4- (2-hydroxy dipropoxy) phenyl] fluorene), 9,9-bis [4- (2-hydroxydiethoxy) -3-methylphenyl] fluorene (9,9-bis [4- (2-hydroxydiethoxy) -3-methylphenyl] fluorene), 9,9-bis [4- (2-hydroxydipropoxy) -3-methylphenyl] fluorene (9,9-bis [4- (2-hydroxy dipropoxy) -3-methylphenyl] fluorene), 9,9-bis [4- (2-hydroxydiethoxy) -3,5-dimethylphenyl] fluorene (9,9-bis [4- (2-hydroxydiethoxy) -3,5-dimethylphenyl] fluorene), 9,9-bis [4- (2-hydroxydiethoxy) phenoxyethanol] fluorene (9,9-bis [4- (2-hydroxydiethox y) phenoxyethanol] fluorene), 9,9-bis [4- (2-hydroxydipropoxy) phenoxyethanol] fluorene (9,9-bis [4- (2-hydroxyl dipropoxy) phenoxyethanol] fluorene), 9,9-bis [4- (2-hydroxydiethoxy) -3-methylphenyl] fluorene, 9,9-bis [4- (2-hydroxydipropoxy) -3-methylphenyl] fluorene, 9 , 9-bis [4- (2-hydroxydiethoxy) -2,5-dimethylphenyl] fluorene, 9,9-bis [4- (2-hydroxydipropoxy) -2,5-dimethylphenyl ] Fluorene (9,9-bis [4- (2-hydroxyl dipropoxy) -2,5-dimethylphenyl] fluorene), 9,9-bis [4- (2-hydroxydiethoxy) -3,6-dimethyl Phenyl] fluorene, 9,9-bis [4- (2-hydroxydipropoxy) -2,6-dimethylphenyl] fluorene, 9,9-bis [4- (2-hydroxydiethoxy)- 2,4-dimethylphenyl] fluorene, 9,9-bis [3- (2-hydroxydipropoxy) -2,4-dimethylphenyl] fluorene, 9,9-bis [4- (2-hydroxy Oxydiethoxy) -3,4-dimethylphenyl] fluorene, 9,9-bis [2- (2-hydroxydipropoxy) -3,4-dimethylphenyl] fluorene And 9,9-bis (hydroxydialkoxyphenyl) fluorene}.

이들 중, 9,9-비스(히드록시에톡시페닐)플루오렌, 9,9-비스(히드록시에톡시-3-메틸페닐)플루오렌, 9,9-비스(히드록시에톡시-3,5디메틸페닐)플루오렌, 9,9-비스(히드록시에톡시-2페녹시에탄올)플루오렌 등이 바람직하다.Among them, 9,9-bis (hydroxyethoxyphenyl) fluorene, 9,9-bis (hydroxyethoxy-3-methylphenyl) fluorene, 9,9-bis (hydroxyethoxy-3,5 Dimethylphenyl) fluorene, 9, 9-bis (hydroxyethoxy-2 phenoxy ethanol) fluorene, etc. are preferable.

본 발명의 감광성 수지를 구성하는 상기 일반식(1)로 나타내어지는 플루오렌 골격을 구비하는 화합물은, 특히 높은 굴절율과 용해성, 상용성 및 저용액점도가 요구되는 용도에 있어서는, R2a 및 R2b가 페닐기인 것이 바람직하다.Compounds having a fluorene skeleton represented by the general formula (1) constituting the photosensitive resin of the present invention are particularly preferably R 2a and R 2b in applications in which high refractive index, solubility, compatibility and low solution viscosity are required. It is preferable that is a phenyl group.

구체적으로는, 예를 들면 상기 일반식(4)로 나타내어지는 화합물에는, 9,9-비스(히드록시알콕시아릴페닐)플루오렌류(9,9-bis(hydroxy alkoxy aryl phenyl)fluorenes)(상기 일반식(4)에 있어서 n1=n2=1이며, R2a, R2b가 페닐기인 화합물), 9,9-비스(히드록시폴리알콕시아릴페닐)플루오렌류(9,9-bis(hydroxy polyalkoxy aryl phenyl)fluorenes)(상기 일반식(4)에 있어서 n1+n2가 2이상이며, R2a, R2b가 페닐기인 화합물)가 포함된다.Specifically, for example, the compound represented by the general formula (4) includes 9,9-bis (hydroxyalkoxy aryl phenyl) fluorenes (the above-mentioned). In general formula (4), n1 = n2 = 1, and R <2a> , R <2b> is a phenyl group), 9,9-bis (hydroxypolyalkoxy arylphenyl) fluorene (9,9-bis (hydroxy polyalkoxy) aryl phenyl) fluorenes (compounds in which n1 + n2 is 2 or more and R 2a and R 2b in the general formula (4) are phenyl groups).

9,9-비스(히드록시알콕시아릴페닐)플루오렌류에는, 9,9-비스[4-(2-히드록시에톡시)-3-페닐페닐]플루오렌(9,9-bis[4-(2-hydroxyethoxy)-3-phenyl phenyl]fluorene), 9,9-비스[4-(2-히드록시프로폭시)-3-페닐페닐]플루오렌(9,9-bis[4-(2-hydroxy propoxy)-3-phenyl phenyl]fluorene), 9,9-비스[4-(2-히드록시프로폭시)-3-토릴페닐]플루오렌(9,9-bis[4-(2-hydroxy propoxy)-3-tolylphenyl]fluorene) 등의 9,9-비스(히드록시알콕시아릴페닐)플루오렌, 바람직하게는 9,9-비스(2-히드록시에톡시아릴페닐)플루오렌(9,9-bis(2-hydroxyethoxy aryl phenyl)fluorene) 등이 포함된다.9,9-bis [4- (2-hydroxyethoxy) -3-phenylphenyl] fluorene (9,9-bis [4-) for 9,9-bis (hydroxyalkoxy arylphenyl) fluorenes (2-hydroxyethoxy) -3-phenyl phenyl] fluorene), 9,9-bis [4- (2-hydroxypropoxy) -3-phenylphenyl] fluorene (9,9-bis [4- (2- hydroxy propoxy) -3-phenyl phenyl] fluorene), 9,9-bis [4- (2-hydroxypropoxy) -3-torylphenyl] fluorene (9,9-bis [4- (2-hydroxy propoxy 9,9-bis (hydroxyalkoxyarylphenyl) fluorene, such as) -3-tolylphenyl] fluorene), preferably 9,9-bis (2-hydroxyethoxyarylphenyl) fluorene (9,9- bis (2-hydroxyethoxy aryl phenyl) fluorene).

9,9-비스(히드록시폴리알콕시아릴페닐)플루오렌류에는, 9,9-비스(히드록시디알콕시아릴페닐)플루오렌류(9,9-bis(hydroxy dialkoxy aryl phenyl)fluorenes){예를 들면 9,9-비스{4-[2-(2-히드록시에톡시)에톡시]-3-페닐페닐}플루오렌(9,9-bis{4-[2-(2-hydroxyethoxy)ethoxy]-3-phenyl phenyl}fluorene) 등의 9,9-비스(히드록시디알콕시아릴페닐)플루오렌, 바람직하게는 9,9-비스[2-(2-히드록시에톡시)에톡시아릴페닐]플루오렌(9,9-bis[2-(2- hydroxylethoxy) ethoxy aryl phenyl]fluorene)} 등이 포함된다.Examples of the 9,9-bis (hydroxypolyalkoxyarylphenyl) fluorene include 9,9-bis (hydroxydialkoxyarylphenyl) fluorenes (examples). For example, 9,9-bis {4- [2- (2-hydroxyethoxy) ethoxy] -3-phenylphenyl} fluorene (9,9-bis {4- [2- (2-hydroxyethoxy) ethoxy 9,9-bis (hydroxydialkoxyarylphenyl) fluorene, such as] -3-phenyl phenyl} fluorene), preferably 9,9-bis [2- (2-hydroxyethoxy) ethoxyarylphenyl ], Fluorene (9,9-bis [2- (2-hydroxyethoxy) ethoxy aryl phenyl] fluorene)}.

이들 중, 9,9-비스(히드록시에톡시아릴페닐)플루오렌 등이 바람직하다.Among these, 9, 9-bis (hydroxyethoxy arylphenyl) fluorene etc. are preferable.

상기 플루오렌 골격을 구비하는 화합물과 반응시키는 화합물로서, 4염기산 2무수물이 사용된다.As the compound to be reacted with the compound having the fluorene skeleton, tetrabasic dianhydride is used.

4염기산 2무수물로서는, 구체적으로는, 부탄테트라카르복시산 2무수물(butanetetracarboxylic dianhydride), 펜탄테트라카르복시산 2무수물(pentanetetracarboxylic dianhydride), 헥산테트라카르복시산 2무수물(hexanetetracarboxylic dianhydride), 시클로부탄테트라카르복시산 2무수물(cyclobutanetetracarboxylic dianhydride), 시클로펜탄테트라카르복시산 2무수물(cyclopentanetetracarboxylic dianhydride), 시클로헥산테트라카르복시산 2무수물(cyclohexanetetracarboxylic dianhydride), 시클로헵탄테트라카르복시산 2무수물(cycloheptanetetracarboxylic dianhydride), 노보네인테트라카르복시산 2무수물(norbornanetetracarboxylic dianhydride), 피로멜리트산 2무수물(pyromellitic acid dianhydride), 벤조페논테트라카르복시산 2무수물(benzophenonetetracarboxylic dianhydride), 비페닐테트라카르복시산 2무수물(biphenyltetracarboxylic dianhydride), 비페닐에테르테트라카르복시산 2무수물(biphenylethertetracarboxylic dianhydride), 5-(2,5-디옥소테트라히드로-3-퓨란일)-3-메틸―3-시클로헥센-1,2-디카르복시산 무수물(5-(2,5-dioxotetrahydro-3-furanyl)-3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride), 4-(2,5-디옥소테트라히드로퓨란-3-일)-1,2,3,4-테트라히드로나프탈렌-1,2-디카르복시산 무수물(4-(2,5-dioxotetrahydrofuran-3-yl)-1,2,3,4-tetrahydronaphthalene-1,2-dicarboxylic anhydride), 나프탈렌-1,4,5,8-테트라카르복시산 2무수물(naphthalene-1,4,5,8-tetracarboxylic dianhydride), 4,4'-(헥사플루오로이소프로필리덴)디프탈산 무수물(4,4'-(hexafluoroisopropylidene) diphthalic anhydride), 3,4,9,10-페릴렌테트라카르복시산 2무수물(3,4,9,10-perylenetetracarboxylic dianhydride), 3,3',4,4'-디페닐술폰테트라카르복시산 2무수물(3,3',4,4'-diphenylsulfonetetracarboxylic dianhydride) 등을 예시할 수 있고, 이들의 1종 또는 2종 이상이 사용된다. 이들 중에서도, 피로멜리트산 2무수물, 5-(2,5-디옥소테트라히드로-3-퓨란일)-3-메틸―3-시클로헥센-1,2-디카르복시산 무수물, 벤조페논테트라카르복시산 2무수물, 비페닐테트라카르복시산 2무수물이 바람직하다.Specific examples of the tetrabasic dianhydride include butanetetracarboxylic dianhydride, pentanetetracarboxylic dianhydride, hexanetetracarboxylic dianhydride, and cyclobutanetetracarboxylic dianhydride. ), Cyclopentanetetracarboxylic dianhydride, cyclohexanetetracarboxylic dianhydride, cycloheptantetracarboxylic dianhydride, norbornene tetracarboxylic dianhydride, nordianhydrane tetracarboxylic acid Anhydrous (pyromellitic acid dianhydride), benzophenonetetracarboxylic dianhydride, biphenyltetracarboxylic dianhydride, bipe Biphenylethertetracarboxylic dianhydride, 5- (2,5-dioxotetrahydro-3-furanyl) -3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride (5- (2, 5-dioxotetrahydro-3-furanyl) -3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride), 4- (2,5-dioxotetrahydrofuran-3-yl) -1,2,3,4 Tetrahydronaphthalene-1,2-dicarboxylic anhydride (4- (2,5-dioxotetrahydrofuran-3-yl) -1,2,3,4-tetrahydronaphthalene-1,2-dicarboxylic anhydride), naphthalene-1,4 , 5,8-tetracarboxylic acid dianhydride (naphthalene-1,4,5,8-tetracarboxylic dianhydride), 4,4 '-(hexafluoroisopropylidene) diphthalic anhydride (4,4'-(hexafluoroisopropylidene) diphthalic anhydride), 3,4,9,10-perylenetetracarboxylic dianhydride (3,4,9,10-perylenetetracarboxylic dianhydride), 3,3 ', 4,4'-diphenylsulfontetracarboxylic dianhydride (3, 3 ', 4,4'-diphenylsulfonetetracarboxylic dianhydride) and the like, 1 type, or 2 or more types of is used. Among them, pyromellitic dianhydride, 5- (2,5-dioxotetrahydro-3-furanyl) -3-methyl-3-cyclohexene-1,2-dicarboxylic acid anhydride, benzophenonetetracarboxylic acid dianhydride And biphenyl tetracarboxylic dianhydride are preferred.

상기 플루오렌 골격을 구비하는 화합물에, 4염기산 2무수물을 부가반응시켜서 본 발명의 감광성 수지를 구성하는 고분자 화합물을 얻는다. 이 부가반응에 있어서, 플루오렌 골격을 구비하는 화합물 1mol에 대한 4염기산 2무수물의 비율은 0.5mol∼1.5mol인 것이 바람직하고, 0.65mol∼1.25mol인 것이 더 바람직하다. 4염기산 2무수물의 비율이 0.5mol 미만 및 1.5mol을 넘을 경우에 충분한 분자량이 얻어지지 않는 경우가 있다.The high molecular compound which comprises the photosensitive resin of this invention is obtained by addition-reacting tetrabasic dianhydride to the compound which has the said fluorene skeleton. In this addition reaction, the ratio of the tetrabasic acid dianhydride to 1 mol of the compound having a fluorene skeleton is preferably 0.5 mol to 1.5 mol, and more preferably 0.65 mol to 1.25 mol. When the ratio of tetrabasic dianhydride is less than 0.5 mol and more than 1.5 mol, sufficient molecular weight may not be obtained.

플루오렌 골격을 구비하는 화합물과 4염기산 2무수물의 부가반응에 촉매를 사용하더라도 좋다. 사용하는 촉매는 반응을 촉진시키는 것이라면 특별히 제한은 없지만, 일례로서 피리딘(pyridine), 퀴놀린(quinoline), 이미다졸(imidazole), N,N-디메틸시클로헥실아민(N,N-dimethylcyclohexylamine), 트리에틸아민(triethylamine), N-메틸몰포린(N-methylmorpholine), N-에틸몰포린(N-ethylmorpholine), 트리에틸렌디아민(triethylenediamine), N,N-디메틸아닐린(N,N-dimethylaniline), N,N-디메틸벤질아민(N,N-dimethylbenzylamine), 트리스(N,N-디메틸아미노메틸)페놀(tris(N,N-dimethylaminomethyl)phenol), 4-디메틸아미노피리딘(4-dimethylaminopyridine), 1,8-디아자비시클로[5,4,0]-7-운데센(1,8-diazabicyclo[5,4,0]-7-undecene), 1,5-디아자비시클로[4,3,0]노넨-5(1,5-diazabicyclo[4,3,0]-5-nonene) 등의 아민류(amines), 테트라메틸암모늄클로라이드(tetramethyl ammonium chloride), 테트라메틸암모늄브로마이드(tetramethyl ammonium bromide), 트리메틸벤질암모늄클로라이드(trimethyl benzyl ammonium chloride), 테트라메틸암모늄히드록시드(tetramethyl ammonium hydroxyde) 등의 제4급 암모늄 화합물(quaternary ammonium compound), 트리부틸포스핀(tributylphosphine), 트리페닐포스핀(triphenylphosphine) 등 및 그들의 혼합물을 들 수 있다. 또한 사용하는 촉매의 양에도 특별히 제한은 없지만, 플루오렌 골격을 구비하는 화합물 및 4염기산 2무수물의 합계 100질량부에 대하여 0.1∼2.0질량부의 범위가 바람직하다. 촉매의 양이 2.0질량부보다 지나치게 많으면 감광성 수지의 전기 특성이나 보존 안정성에 악영향이 생기는 경우가 있다.You may use a catalyst for addition reaction of the compound which has a fluorene skeleton, and tetrabasic dianhydride. The catalyst to be used is not particularly limited as long as it promotes the reaction. For example, pyridine, quinoline, imidazole, N, N-dimethylcyclohexylamine, and triethyl Amine (triethylamine), N-methylmorpholine, N-ethylmorpholine, N-ethylmorpholine, triethylenediamine, N, N-dimethylaniline, N, N-N-dimethylbenzylamine, tris (N, N-dimethylaminomethyl) phenol, 4-dimethylaminopyridine, 1,8 Diazabicyclo [5,4,0] -7-undecene (1,8-diazabicyclo [5,4,0] -7-undecene), 1,5-diazabicyclo [4,3,0] nonene Amines such as -5 (1,5-diazabicyclo [4,3,0] -5-nonene), tetramethyl ammonium chloride, tetramethyl ammonium bromide, trimethyl Quaternary ammonium compounds such as trimethyl benzyl ammonium chloride, tetramethyl ammonium hydroxyde, tributylphosphine, triphenylphosphine, etc. And mixtures thereof. Moreover, although there is no restriction | limiting in particular also in the quantity of the catalyst to be used, The range of 0.1-2.0 mass parts is preferable with respect to a total of 100 mass parts of a compound which has a fluorene skeleton and tetrabasic dianhydride. When the amount of the catalyst is too large than 2.0 parts by mass, adverse effects may occur on the electrical properties and storage stability of the photosensitive resin.

또 부가반응에 있어서는, 반응 원료의 용해, 점도 저감 등의 목적으로 용제를 사용하여도 좋다. 용제의 종류는 반응을 저해하지 않는 것이라면 특별히 제한은 없지만, 일례로서는, 에틸렌글리콜디에틸에테르(ethylene glycol diethyl ether), 디에틸렌글리콜디메틸에테르(diethylene glycol dimethyl ether) 등의 글리콜에테르류(glycol ethers), 에틸렌글리콜모노에틸에테르아세테이트(ethylene glycol monoethyl ether acetate), 디에틸렌글리콜모노에틸에테르아세테이트(diethylene glycol monoethyl ether acetate), 디에틸렌글리콜모노부틸에테르아세테이트(diethylene glycol monobutyl ether acetate) 등의 글리콜에테르아세테이트류(glycol ether acetates), 디프로필렌글리콜모노에틸에테르(dipropylene glycol monoethyl ether), 프로필렌글리콜디메틸에테르(propylene glycol dimethyl ether), 디프로필렌글리콜디메틸에테르(dipropylene glycol dimethyl ether), 프로필렌글리콜디에틸에테르(propylene glycol diethyl ether), 디프로필렌글리콜디에틸에테르(dipropylene glycol diethyl ether) 등의 프로필렌글리콜에테르류(propylene glycol ethers), 프로필렌글리콜모노메틸에테르아세테이트(propylene glycol monomethyl ether acetate), 프로필렌글리콜모노에틸에테르아세테이트(propylene glycol monoethyl ether acetate), 디프로필렌글리콜모노메틸에테르아세테이트(dipropylene glycol monomethyl ether acetate), 디프로필렌글리콜모노에틸에테르아세테이트(dipropylene glycol monoethyl ether acetate) 등의 프로필렌글리콜에테르아세테이트류(propylene glycol ether acetates), 아세톤(acetone), 메틸에틸케톤(methyl ethyl ketone), 메틸이소부틸케톤(methyl isobutyl ketone), 시클로헥사논(cyclohexanone) 등의 케톤류(ketones), 아세트산에틸(ethyl acetate), 아세트산부틸(butyl acetate) 등의 아세트산에스테르류(ester acetate), 디메틸술폭시드(dimethylsulfoxide), N-메틸피롤리돈(N-methylpyrrolidone), 디메틸포름아미드(dimethylformamide), 디메틸아세트아미드(dimethylacetamide) 및 그들의 혼합물을 들 수 있다.In addition, in addition reaction, you may use a solvent for the purpose of melt | dissolution of a reaction raw material, viscosity reduction, etc. The type of solvent is not particularly limited as long as it does not inhibit the reaction. Examples of the solvent include glycol ethers such as ethylene glycol diethyl ether and diethylene glycol dimethyl ether. Glycol ether acetates such as ethylene glycol monoethyl ether acetate, diethylene glycol monoethyl ether acetate, and diethylene glycol monobutyl ether acetate (glycol ether acetates), dipropylene glycol monoethyl ether, propylene glycol dimethyl ether, dipropylene glycol dimethyl ether, propylene glycol diethyl ether diethyl ether), Propylene glycol ethers such as propylene glycol diethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate , Propylene glycol ether acetates, acetone, methyl, such as dipropylene glycol monomethyl ether acetate and dipropylene glycol monoethyl ether acetate Acetate esters, such as ketones, such as ethyl ethyl ketone, methyl isobutyl ketone, and cyclohexanone, ethyl acetate, and butyl acetate ( ester acetate), dimethylsulfoxide, N-methylpyrrolidone, dimethylformamide, dimethylacetamide, and mixtures thereof.

사용하는 용제의 양에도 특별히 제한은 없지만, 플루오렌 골격을 구비하는 화합물 및 4염기산 2무수물의 합계의 합계100질량부에 대하여, 25∼150질량부의 범위가 바람직하다. 25질량부 미만에서는 점도가 충분히 저감되지 않는 경우가 있다. 한편 150질량부를 넘을 경우, 반응물의 농도가 지나치게 떨어져 반응속도가 저하되는 경우가 있다.Although there is no restriction | limiting in particular also in the quantity of the solvent to be used, The range of 25-150 mass parts is preferable with respect to a total of 100 mass parts of the sum total of the compound which has a fluorene skeleton and tetrabasic dianhydride. If it is less than 25 mass parts, a viscosity may not fully reduce. On the other hand, when it exceeds 150 parts by mass, the concentration of the reactant may be excessively lowered so that the reaction rate may decrease.

플루오렌 골격을 구비하는 화합물 및 4염기산 2무수물에 필요에 따라 용제나 촉매를 첨가하여 부가반응시키지만, 반응에 대해서는 가열하는 것이 바람직하고, 가열에 의하여 원료가 용해되고 반응속도도 가속화된다. 가열온도는, 플루오렌 골격을 구비하는 화합물 및 4염기산 2무수물의 종류나 사용하는 장치에 따라 적당하게 설정할 수 있지만, 대체로 60∼220℃의 범위가 바람직하다. 더 바람직하게는 90∼160℃의 범위다. 반응온도가 60℃보다 낮으면 반응 종료까지 시간이 걸릴 수 있다. 한편 반응온도가 220℃보다 높으면, 착색 등의 부반응(副反應)이 발생하거나, 산 무수물이 폐환(閉環)하는 평형에 의하여 반응률이 저하되는 경우가 있다.Although a solvent or a catalyst is added to the compound having a fluorene skeleton and tetrabasic dianhydride as necessary for addition reaction, it is preferable to heat the reaction, and the raw material is dissolved by heating and the reaction rate is accelerated. The heating temperature can be appropriately set depending on the kind of the compound having a fluorene skeleton, tetrabasic dianhydride and the apparatus to be used, but the range of 60 to 220 ° C is generally preferable. More preferably, it is the range of 90-160 degreeC. If the reaction temperature is lower than 60 ℃ may take a long time to complete the reaction. On the other hand, when reaction temperature is higher than 220 degreeC, side reactions, such as coloring, may generate | occur | produce, or reaction rate may fall by equilibrium which an acid anhydride ring-closes.

이상과 같이 하여 얻어지는 고분자 화합물에, 하기 일반식(2)로 나타내어지는 카르복시산반응성 (메타)아크릴레이트 화합물을 부가시킴으로써 본 발명의 감광성 수지가 얻어진다.The photosensitive resin of this invention is obtained by adding the carboxylic acid reactive (meth) acrylate compound represented by following General formula (2) to the high molecular compound obtained as mentioned above.

[식 2][Formula 2]

Figure 112010063625210-pct00007
Figure 112010063625210-pct00007

(식에서 R4는 수소원자 또는 메틸기를 나타내고, R5는 하기 일반식(5)로 나타내어지는 기를 나타낸다) (Wherein R 4 represents a hydrogen atom or a methyl group, and R 5 represents a group represented by the following general formula (5)):

[식 5][Equation 5]

Figure 112010063625210-pct00008
Figure 112010063625210-pct00008

(식에서 q, r, s는 각각 독립적으로 0∼9의 정수를 나타낸다. 단, q, r, s가 동시에 0이 되는 경우는 없다)(Wherein q, r and s each independently represent an integer of 0 to 9, except that q, r and s do not become 0 at the same time)

상기 일반식(2)로 나타내어지는 카르복시산 반응성 (메타)아크릴레이트로서는, 구체적으로는, 2-히드록시에틸(메타)아크릴레이트글리시딜에테르(2-hydroxyethyl methacrylate glycidylether), 2-히드록시프로필(메타)아크릴레이트글리시딜에테르(2-hydroxypropyl methacrylate glycidyl ether), 3-히드록시프로필(메타)아크릴레이트글리시딜에테르, 4-히드록시부틸(메타)아크릴레이트글리시딜에테르(4-hydroxybutyl methacrylate glycidyl ether), 폴리에틸렌글리콜-폴리프로필렌글리콜(메타)아크릴레이트글리시딜에테르(polyethylene glycol-polypropylene glycol methacrylate glycidylether)를 들 수 있다.Specifically as carboxylic acid reactive (meth) acrylate represented by the said General formula (2), 2-hydroxyethyl (meth) acrylate glycidyl ether and 2-hydroxypropyl ( 2-hydroxypropyl methacrylate glycidyl ether, 3-hydroxypropyl (meth) acrylate glycidyl ether, 4-hydroxybutyl (meth) acrylate glycidyl ether (4-hydroxybutyl methacrylate glycidyl ether), polyethylene glycol-polypropylene glycol (meth) acrylate glycidyl ether (polyethylene glycol-polypropylene glycol methacrylate glycidylether).

이러한 카르복시산 반응성 (메타)아크릴레이트 화합물을 상기 고분자 화합물에 부가반응시킨다. 본 발명의 감광성 수지에 있어서 카르복시산 반응성 (메타)아크릴레이트 화합물의 비율은, 용도에 따라서도 다르기 때문에 일률적으로는 말할 수 없지만, 광경화성 코팅제(coating agent)나 광학재료에 사용할 경우, 감광성 수지의 산가(酸價)가 0이 될 때까지 부가시키더라도 좋다. 한편 알칼리 현상성(alkali developability) 용도에 적용하는 경우에는, 수지 고형분의 산가가 30∼150mgKOH/g의 범위에 있도록 조정하는 것이 바람직하다. 산가가 30mgKOH/g보다 지나치게 낮으면 현상 속도가 저하하여 필요한 패턴(pattern)이 얻어지지 않게 되는 경우가 있다. 한편 150mgKOH/g보다 산가가 높은 경우에는, 현상 과잉이 되어서 패턴이 박리하기 쉬워져 전기 특성 등도 저하하는 경우가 있다. 또 본 명세서에 있어서, 수지 고형분의 산가는 JIS-K0070에 의거하는 측정치이다.This carboxylic acid reactive (meth) acrylate compound is added to the polymer compound. Although the ratio of the carboxylic acid reactive (meth) acrylate compound in the photosensitive resin of this invention differs according to a use, it cannot say uniformly, but when used for a photocurable coating agent or an optical material, the acid value of the photosensitive resin You may add until (iii) becomes zero. On the other hand, when applying to alkali developability use, it is preferable to adjust so that the acid value of resin solid content may be in the range of 30-150 mggOH / g. When the acid value is too low than 30 mggOH / g, the developing speed may decrease, and a required pattern may not be obtained. On the other hand, when an acid value is higher than 150 mggOH / g, it may become overdevelopment, and a pattern will peel easily, and electrical characteristics etc. may fall. In addition, in this specification, the acid value of resin solid content is a measured value based on JIS-K0070.

상기 고분자 화합물과 카르복시산 반응성 (메타)아크릴레이트 화합물의 반응에 있어서는, 반응 촉진의 목적으로 촉매를 사용하더라도 좋다. 촉매의 종류는, 카르복시산 반응성 (메타)아크릴레이트 화합물의 종류에 따라 다르기 때문에 일률적으로는 말할 수 없지만, 일례로서, 피리딘, 퀴놀린, 이미다졸, N,N-디메틸시클로헥실아민, 트리에틸아민, N-메틸몰포린, N-에틸몰포린, 트리에틸렌디아민, N,N-디메틸아닐린, N,N-디메틸벤질아민, 트리스(N,N-디메틸아미노메틸)페놀, 4-디메틸아미노피리딘, 1,8-디아자비시클로[5,4,0]-7-운데센, 1,5-디아자비시클로[4,3,0]노넨-5 등의 아민류, 테트라메틸암모늄클로라이드, 테트라메틸암모늄브로마이드, 트리메틸벤질암모늄클로라이드, 테트라메틸암모늄히드록시드 등의 제4급 암모늄 화합물, 트리부틸포스핀, 트리페닐포스핀 등 및 그들의 혼합물을 들 수 있다.In reaction of the said high molecular compound and a carboxylic acid reactive (meth) acrylate compound, you may use a catalyst for the purpose of reaction promotion. Since the kind of catalyst differs according to the kind of carboxylic acid reactive (meth) acrylate compound, it cannot be said uniformly, but as an example, pyridine, quinoline, imidazole, N, N- dimethylcyclohexylamine, triethylamine, N Methyl morpholine, N-ethyl morpholine, triethylenediamine, N, N-dimethylaniline, N, N-dimethylbenzylamine, tris (N, N-dimethylaminomethyl) phenol, 4-dimethylaminopyridine, 1, Amines such as 8-diazabicyclo [5,4,0] -7-undecene and 1,5-diazabicyclo [4,3,0] nonene-5, tetramethylammonium chloride, tetramethylammonium bromide, trimethyl Quaternary ammonium compounds such as benzyl ammonium chloride and tetramethylammonium hydroxide, tributylphosphine, triphenylphosphine and the like and mixtures thereof.

또한 사용하는 촉매의 양에도 특별히 제한은 없지만, 상기 플루오렌 골격을 구비하는 화합물 100질량부에 대하여 0.1∼2.0질량부의 범위가 바람직하다. 촉매의 양이 지나치게 많으면 감광성 수지의 전기 특성이나 보존 안정성에 악영향을 미치는 경우가 있다.Although there is no restriction | limiting in particular also in the quantity of the catalyst to be used, The range of 0.1-2.0 mass parts is preferable with respect to 100 mass parts of compounds which have the said fluorene skeleton. When the amount of the catalyst is too large, it may adversely affect the electrical characteristics and storage stability of the photosensitive resin.

또한 카르복시산 반응성 (메타)아크릴레이트 화합물을 반응시킬 때에는, 중합금지제(重合禁止劑)를 가하는 것이 바람직하다. 불포화결합의 반응을 억제하는 것이면 중합금지제의 종류에 특별히 제한은 없지만, 일례로서, 히드로퀴논(hydroquinone), 히드로퀴논모노메틸에테르(hydroquinone monomethyl ether), t-부틸히드로퀴논(t-butylhydroquinone), t-부틸카테콜(t-butylcatechol), N-메틸-N-니트로소아닐린(N-methyl-N-nitrosoaniline) 또는 N-니트로소페닐히드록실아민·암모늄염(ammonium salt of N-nitrosophenyl hydroxylamine)(와코쥰야쿠고교가부시키가이샤 제품 : Q-1300), N-니트로소페닐히드록실아민·알루미늄염(와코쥰야쿠고교가부시키가이샤 제품 : Q-1301), 2,2,6,6-테트라메틸피페리딘-1-옥실(2,2,6,6-tetramethylpiperidine-1-oxyl), 4-히드록시-2,2,6,6-테트라메틸피페리딘-1-옥실(4-hydroxy-2,2,6,6-tetramethylpiperidine-1-oxyl) 등을 들 수 있다. 특히, N-니트로소페닐히드록실아민·알루미늄염, 4-히드록시-2,2,6,6-테트라메틸피페리딘-1-옥실이 바람직하다. 중합금지제의 양은, 그 종류 및 반응 조건에 의하여 다르기 때문에 일률적으로는 말할 수 없지만, 감광성 수지 전체에 대하여 5∼2000ppm의 범위가 바람직하다. 이 범위보다 적으면 제조중에 불포화결합이 반응하여 겔화(gelation)가 일어날 경우가 있고, 이 범위보다 많으면 감도가 저하하는 경우가 있기 때문에 바람직하지 못하다.Moreover, when making a carboxylic acid reactive (meth) acrylate compound react, it is preferable to add a polymerization inhibitor. There is no restriction | limiting in particular in the kind of polymerization inhibitor as long as it suppresses reaction of an unsaturated bond, For example, hydroquinone, hydroquinone monomethyl ether, t-butylhydroquinone, t-butyl T-butylcatechol, N-methyl-N-nitrosoaniline or N-nitrosophenylhydroxylamine (ammonium salt of N-nitrosophenyl hydroxylamine) High School Co., Ltd. product: Q-1300), N-nitrosophenyl hydroxylamine aluminum salt (Wakkoyaku Kogyo Co., Ltd. product: Q-1301), 2,2,6,6-tetramethylpi Ferridine-1-oxyl (2,2,6,6-tetramethylpiperidine-1-oxyl), 4-hydroxy-2,2,6,6-tetramethylpiperidine-1-oxyl (4-hydroxy-2 , 2,6,6-tetramethylpiperidine-1-oxyl) and the like. In particular, N-nitrosophenyl hydroxylamine aluminum salt and 4-hydroxy-2,2,6,6- tetramethyl piperidine-1-oxyl are preferable. Although the quantity of a polymerization inhibitor differs according to the kind and reaction conditions, although it cannot speak uniformly, the range of 5-2000 mm is preferable with respect to the whole photosensitive resin. If less than this range, unsaturation may react during manufacture and gelation may occur, and if more than this range, sensitivity may fall and it is unpreferable.

카르복시산 반응성 (메타)아크릴레이트 화합물을 부가할 때에는, 반응속도의 향상을 목적으로 하여 가열하는 것이 바람직하다. 가열온도는 카르복시산 반응성 (메타)아크릴레이트 화합물의 종류나 장치에 따라 적당하게 설정할 수 있지만, 대체로 60∼150℃의 범위가 바람직하다. 반응온도가 60℃보다 낮으면, 반응 종료까지 시간이 걸릴 수 있다. 한편 반응온도가 150℃보다 높으면, 착색 등의 부반응이 발생하거나 불포화결합이 반응하여 겔화가 일어나는 경우가 있다.When adding a carboxylic acid reactive (meth) acrylate compound, it is preferable to heat for the purpose of the improvement of reaction rate. Although heating temperature can be set suitably according to the kind and apparatus of a carboxylic acid reactive (meth) acrylate compound, the range of 60-150 degreeC is generally preferable. If the reaction temperature is lower than 60 ° C, it may take a long time to complete the reaction. On the other hand, when reaction temperature is higher than 150 degreeC, side reactions, such as coloring, may occur, or an unsaturated bond may react and gelatinization may occur.

이렇게 하여 얻어진 본 발명의 감광성 수지의 분자량은 특별하게 한정되는 것은 아니지만, 도포막강도, 조막성(造膜性) 혹은 현상성의 관점에서 1,000∼200,000이 바람직하고, 2,500∼50,000이 더 바람직하다. 또한 본 명세서에 있어서 감광성 수지의 분자량은, 실시예에 기재된 조건의 GPC에 의한 스티렌(styrene) 환산 중량 평균 분자량이다.Although the molecular weight of the photosensitive resin of this invention obtained in this way is not specifically limited, From a viewpoint of coating film strength, film forming property, or developability, 1,000-200,000 are preferable and 2,500-50,000 are more preferable. In addition, in this specification, the molecular weight of photosensitive resin is a styrene conversion weight average molecular weight by GP of the conditions described in the Example.

본 발명의 감광성 수지 조성물은, 상기 감광성 수지와 광중합 개시제 및/또는 광증감제를 필수성분으로서 함유하는 것이다. 이 광중합 개시제 및/또는 광증감제는, 용제에 용해되거나 또는 분산된 상태로 혼합시키거나, 또는 감광성 수지에 대하여 화학적으로 결합시켜도 좋다.The photosensitive resin composition of this invention contains the said photosensitive resin, a photoinitiator, and / or a photosensitizer as an essential component. This photoinitiator and / or photosensitizer may be mixed in the state dissolved or dispersed in the solvent, or may be chemically bonded to the photosensitive resin.

본 발명에 사용되는 광중합 개시제 및/또는 광증감제로서는, 특히 제한되나 것은 아니지만, 예를 들면 벤조페논(benzophenone), 4-히드록시벤조페논(4-hydroxybenzophenone), 비스-N,N-디메틸아미노벤조페논(bis-N,N-dimethylamino benzophenone), 비스-N,N-디에틸아미노벤조페논(bis-N,N-diethylamino benzophenone), 4-메톡시-4′-디메틸아미노벤조페논(4 - methoxy-4'-dimethylamino benzophenone) 등의 벤조페논류, 티옥산톤(thioxanthone), 2,4-디에틸티옥산톤(2,4-diethylthioxanthone), 이소프로필티옥산톤(isopropylthioxanthone), 클로로티옥산톤(chlorothioxanthone), 이소프로폭시클로로티옥산톤(isopropoxychlorothioxanthone) 등의 티옥산톤류, 에틸안트라퀴논(ethylanthraquinone), 벤즈안트라퀴논(benzanthraquinone), 아미노안트라퀴논(aminoanthraquinone), 클로로안트라퀴논(chloroanthraquinone), 안트라퀴논-2-술폰산염(anthraquinone-2-sulfonate), 안트라퀴논-2,6-디술폰산염(anthraquinone-2,6-disulfonate) 등의 안트라퀴논류(anthraquinones), 아세토페논류(acetophenones), 벤조인메틸에테르(benzoin methyl ether), 벤조인에틸에테르(benzoin ethyl ether), 벤조인페닐에테르(benzoin phenyl ether) 등의 벤조인에테르류(benzoin ethers), 2,4,6-트리할로메틸트리아진류(2,4,6-trihalomethyl triazines), 1-히드록시시클로헥실페닐케톤(1-hydroxycyclohexylphenylketone), 2-(o-클로로페닐)-4,5-디페닐이미다졸이중체(2-(o-chlorophenyl)-4,5-diphenylimidazole dimer), 2-(o-클로로페닐)-4,5-디(m-메톡시페닐)이미다졸이중체(2-(o-chlorophenyl)-4,5-di(m-methoxyphenyl) imidazole dimmer), 2-(o-플루오로페닐)-4,5-디페닐이미다졸이중체(2-(o-fluorophenyl)-4,5-diphenylimidazole dimer), 2-(o-메톡시페닐)-4,5-디페닐이미다졸이중체(2-(o-methoxyphenyl)-4,5-diphenylimidazole dimer), 2-(p-메톡시페닐)-4,5-디페닐이미다졸이중체, 2,4-디(p-메톡시페닐)-5-페닐이미다졸이중체(2,4-di(p-methoxyphenyl)-5-phenylimidazole dimer), 2-(2,4-디메톡시페닐)-4,5-디페닐이미다졸이중체(2-(2,4-dimethoxyphenyl)-4,5-diphenylimidazole dimmer) 등의 2,4,5-트리아릴이미다졸이중체류(2,4,5-triarylimidazole dimer), 벤질디메틸케탈(benzyl dimethyl ketal), 2-벤질-2-디메틸아미노-1-(4-몰포리노페닐)-부탄-1-온(2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)-butan-1-one), 2-메틸-1-[4-(메틸티오)페닐]-2-몰포리노-1-프로판온(2-methyl-1-[4-(methylthio)phenyl]-2-morpholino-1-propanone), 2-히드록시-2-메틸-1-페닐-프로판-1-온(2-hydroxy-2-methyl-1-phenyl-propan-1-one), 1-[4-(2-히드록시에톡시)-페닐]-2-히드록시-2-메틸-1-프로판-1-온(1-[4-(2-hydroxyethoxy)-phenyl]-2-hydroxy-2-methyl-1-propane-1-one), 1,2-옥탄디온(1,2-octanedione), 1-[4-(페닐티오)-,2-(O-벤조일옥심)](1-[4-(phenylthio)-,2-(o-benzoyloxime)]), 페난트렌퀴논(phenanthrenequinone), 9,10-페난트렌키논(9,10-phenanthrenequinone), 메틸벤조인(methylbenzoin), 에틸벤조인(ethylbenzoin) 등 벤조인류(benzoins), 9-페닐아크리딘(9-phenylacridine), 1,7-비스(9,9′-아크리디닐)헵탄(1,7-bis(9,9′-acridinyl)heptane) 등, 아크리딘 유도체(acridine derivative), 비스아실포스핀옥시드((bis)acylphosphine oxide)를 들 수 있고, 이들의 1종 또는 2종 이상을 사용할 수 있다.As a photoinitiator and / or a photosensitizer used for this invention, although it does not restrict | limit especially, For example, benzophenone, 4-hydroxybenzophenone, bis-N, N-dimethylamino Bis-N, N-dimethylamino benzophenone, bis-N, N-diethylamino benzophenone, 4-methoxy-4'-dimethylaminobenzophenone Benzophenones such as methoxy-4'-dimethylamino benzophenone, thioxanthone, 2,4-diethylthioxanthone, isopropylthioxanthone and chlorothiooxane Thioxanthones such as chlorothioxanthone and isopropoxychlorothioxanthone, ethylanthraquinone, benzanthraquinone, aminoanthraquinone, chloroanthraquinone and chloroanthraquinone Quinone-2-sulfonate (ant anthraquinones such as hraquinone-2-sulfonate, anthraquinone-2,6-disulfonate, anthraquinones, acetophenones, and benzoin methyl ether ), Benzoin ethers such as benzoin ethyl ether and benzoin phenyl ether, 2,4,6-trihalomethyltriazines (2,4,6) -trihalomethyl triazines), 1-hydroxycyclohexylphenylketone, 2- (o-chlorophenyl) -4,5-diphenylimidazole duplex (2- (o-chlorophenyl) -4, 5-diphenylimidazole dimer), 2- (o-chlorophenyl) -4,5-di (m-methoxyphenyl) imidazoledimer (2- (o-chlorophenyl) -4,5-di (m-methoxyphenyl) imidazole dimmer), 2- (o-fluorophenyl) -4,5-diphenylimidazole dimer (2- (o-fluorophenyl) -4,5-diphenylimidazole dimer), 2- (o-methoxyphenyl ) -4,5-diphenylimidazole dimer (2- (o-methoxyphenyl) -4,5-diphenylimidazole dimer), 2- (p-methoxyphenyl) -4, 5-diphenylimidazole dimer, 2,4-di (p-methoxyphenyl) -5-phenylimidazole dimer, 2,4-di (p-methoxyphenyl) -5-phenylimidazole dimer, 2 2,4,5-triaryl such as-(2,4-dimethoxyphenyl) -4,5-diphenylimidazole dimer (2- (2,4-dimethoxyphenyl) -4,5-diphenylimidazole dimmer) Imidazole dimers (2,4,5-triarylimidazole dimer), benzyl dimethyl ketal, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one ( 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one), 2-methyl-1- [4- (methylthio) phenyl] -2-morpholino-1-propanone (2 -methyl-1- [4- (methylthio) phenyl] -2-morpholino-1-propanone), 2-hydroxy-2-methyl-1-phenyl-propan-1-one (2-hydroxy-2-methyl- 1-phenyl-propan-1-one), 1- [4- (2-hydroxyethoxy) -phenyl] -2-hydroxy-2-methyl-1-propan-1-one (1- [4- (2-hydroxyethoxy) -phenyl] -2-hydroxy-2-methyl-1-propane-1-one), 1,2-octanedione (1,2-octanedione), 1- [4- (phenylthio)- , 2- (O-benzoyloxime)] (1- [4- (phenylthio)-, 2- (o-benz oyloxime)]), phenanthrenequinone, 9,10-phenanthrenequinone, 9,10-phenanthrenequinone, methylbenzoin, ethylbenzoin and other benzoins, 9-phenyl Acridine derivatives such as acridine (9-phenylacridine), 1,7-bis (9,9′-acridinyl) heptane (1,7-bis (9,9′-acridinyl) heptane) ) And bisacylphosphine oxide ((bis) acylphosphine oxide), and one or two or more thereof can be used.

본 발명의 감광성 수지에는 촉진제를 더 첨가할 수도 있다. 촉진제의 예로서, p-디메틸아미노안식향산에틸(p-dimethylamino ethyl), p-디메틸아미노안식향산이소아밀(p-dimethylamino isoamyl), N,N-디메틸에탄올아민(N,N-dimethylethanolamine), N-메틸디에탄올아민(N-methyldiethanolamine), 트리에탄올아민(triethanolamine) 등을 들 수 있다.An accelerator may be further added to the photosensitive resin of the present invention. Examples of accelerators include p-dimethylamino ethyl, p-dimethylamino isoamyl, N, N-dimethylethanolamine, and N-. Methyl diethanolamine (N-methyldiethanolamine), triethanolamine, etc. are mentioned.

본 발명의 감광성 수지 조성물에는, 분자 중에 1개 이상의 불포화기를 가지는 중합성 모노머(polymerizable monomer)(이하, 간단하게 「중합성 모노머」라고 하는 경우가 있다)를 더 사용할 수 있고, 이에 따라 감도, 내약품성, 내열성 및 기계적 강도를 향상시킬 수 있다. 또한 유동 특성 조절 등의 목적으로 중합성 모노머를 첨가할 수도 있다. 이 중합성 모노머로서는, 분자 내에 불포화 결합을 1개 이상 가지는 것이면 특별히 제한 없이 사용할 수 있고, 적용하는 용도, 목적에 따라 적절한 것을 선택하면 좋다. 예를 들면 폴리에틸렌글리콜디(메타)아크릴레이트(polyethylene glycol di(meth)acrylate)(에틸렌기의 수가 2∼14인 것), 트리메틸올프로판디(메타)아크릴레이트(trimethylolpropane di(meth)acrylate), 트리메틸올프로판트리(메타)아크릴레이트(trimethylolpropane tri(meth)acrylate), 트리메틸올프로판에톡시트리(메타)아크릴레이트(trimethylolpropane ethoxy tri(meth)acrylate), 트리메틸올프로판프로폭시트리(메타)아크릴레이트(trimethylolpropane propoxy trimethacrylate), 테트라메틸올메탄트리(메타)아크릴레이트(tetramethylolmethane tri(meth)acrylate), 테트라메틸올메탄테트라(메타)아크릴레이트(tetramethylolmethane tetra(meth)acrylate), 폴리프로필렌글리콜디(메타)아크릴레이트(polypropylene glycol di(meth)acrylate)(프로필렌기(propylene group)의 수가 2∼14인 것), 디펜타에리스리톨펜타(메타)아크릴레이트(dipentaerythritol penta(meth)acrylate), 디펜타에리스리톨헥사(메타)아크릴레이트(dipentaerythritol hexa(meth)acrylate), 비스페놀A폴리옥시에틸렌디(메타)아크릴레이트(bisphenol A polyoxyethylene di(meth)acrylate), 비스페놀A디옥시에틸렌디(메타)아크릴레이트(bisphenol A dioxyethylene di(meth)acrylate), 비스페놀A트리옥시에틸렌디(메타)아크릴레이트(bisphenol A trioxyethylene di(meth)acrylate), 비스페놀A데카옥시에틸렌디(메타)아크릴레이트(bisphenol A decaoxyethylene di(meth)acrylate), 다가 카르복시산(multivalent carboxylic acid)(무수프탈산(phthalic anhydride) 등)과 수산기 및 에틸렌성 불포화기(ethylenically unsaturated group)를 구비하는 화합물(β-히드록시에틸(메타)아크릴레이트(ß-hydroxyethyl (meth)acrylate) 등)과의 에스테르화물(esterified compound), (메타)아크릴산메틸에스테르(methacrylic acid methyl ester), (메타)아크릴산에틸에스테르(methacrylic acid ethyl ester), (메타)아크릴산부틸에스테르(methacrylic acid butyl ester), (메타)아크릴산2-에틸헥실에스테르(methacrylic acid 2-ethylhexyl ester) 등의 (메타)아크릴산알킬에스테르(methacrylic acid alkyl ester), 에틸렌글리콜디글리시딜에테르(ethylene glycol diglycidyl ether), 디에틸렌글리콜디글리시딜에테르(diethylene glycol diglycidyl ether), 트리에틸렌글리콜디글리시딜에테르(triethylene glycol diglycidyl ether), 테트라에틸렌글리콜디글리시딜에테르(tetraethylene glycol diglycidyl ether), 폴리에틸렌글리콜디글리시딜에테르(polyethylene glycol diglycidyl ether), 프로필렌글리콜디글리시딜에테르(propylene glycol diglycidyl ether), 디프로필렌글리콜디글리시딜에테르(dipropylene glycol diglycidyl ether), 트리프로필렌글리콜디글리시딜에테르(tripropylene glycol diglycidyl ether), 테트라프로필렌글리콜디글리시딜에테르(tetrapropylene glycol diglycidyl ether), 폴리프로필렌글리콜디글리시딜에테르(polypropylene glycol diglycidyl ether), 소르비톨트리글리시딜에테르(sorbitol triglycidyl ether), 글리세린트리글리시딜에테르(glycerin triglycidyl ether) 등의 에폭시 화합물(epoxy compound)의 (메타)아크릴산 부가물, 말레인산(maleic acid) 등의 불포화유기산 및 그들의 무수물, N-메틸아크릴아미드(N-methylacrylamide), N-에틸아크릴아미드(N-ethylacrylamide), N-이소프로필아크릴아미드(N-isopropylacrylamide), N-메틸올아크릴아미드(N-methylolacrylamide), N-메틸메타크릴아미드(N-methylmethacrylamide), N-에틸메타크릴아미드(N-ethylmethacrylamide), N-이소프로필메타크릴아미드(N-isopropylmethacrylamide), N-메틸올메타크릴아미드(N-methylolmethacrylamide), N,N-디메틸아크릴아미드(N,N-dimethylacrylamide), N,N-디에틸아크릴아미드(N,N-diethylacrylamide), N,N-디메틸메타크릴아미드(N,N-dimethylmethacrylamide), N,N-디에틸메타크릴아미드(N,N-diethylmethacrylamide) 등의 아크릴아미드류(acrylamides), 스티렌, 히드록시스티렌(hydroxystyrene) 등의 스티렌류, N-비닐피롤리돈(N-vinylpyrrolidone), N-비닐포름아미드(N-vinyl formamide), N-비닐아세트아미드(N-vinyl acetamide), N-비닐이미다졸(N-vinyl imidazole) 등을 예시할 수 있고, 이들의 1종 또는 2종 이상을 사용할 수 있다.In the photosensitive resin composition of the present invention, a polymerizable monomer having one or more unsaturated groups in a molecule (hereinafter may be simply referred to as a "polymerizable monomer") can be further used. It can improve chemical resistance, heat resistance and mechanical strength. Moreover, a polymerizable monomer can also be added for the purpose of adjusting a flow characteristic. As this polymerizable monomer, as long as it has one or more unsaturated bonds in a molecule | numerator, it can use without a restriction | limiting especially, What is necessary is just to select a suitable thing according to the use and the objective to apply. For example, polyethylene glycol di (meth) acrylate (the number of ethylene groups is 2-14), trimethylolpropanedi (meth) acrylate (trimethylolpropane di (meth) acrylate), Trimethylolpropane tri (meth) acrylate, trimethylolpropane ethoxy tri (meth) acrylate, trimethylolpropane propoxytrimethyl (meth) acrylate (trimethylolpropane propoxy trimethacrylate), tetramethylolmethane tri (meth) acrylate, tetramethylolmethane tetra (meth) acrylate, polypropylene glycol di (meth) Acrylate (polypropylene glycol di (meth) acrylate) (the number of propylene groups is 2-14), dipentaerythritol penta (meth) acrylate (dipentaeryth ritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, bisphenol A polyoxyethylene di (meth) acrylate, bisphenol A Bisphenol A trioxyethylene di (meth) acrylate, bisphenol A trioxyethylene di (meth) acrylate, bisphenol A deoxyoxy di (meth) acrylate Compounds having a hydroxyl group and an ethylenically unsaturated group, such as acrylate (bisphenol A decaoxyethylene di (meth) acrylate), multivalent carboxylic acid (phthalic anhydride, etc.) Esterified compounds with hydroxyethyl (meth) acrylate (ß-hydroxyethyl (meth) acrylate, etc.), (meth) acrylic acid methyl ester, and (meth) acrylic acid (Meth) acrylic acid alkyl esters such as ester (methacrylic acid ethyl ester), (meth) acrylic acid butyl ester, and (meth) acrylic acid 2-ethylhexyl ester ester, ethylene glycol diglycidyl ether, diethylene glycol diglycidyl ether, triethylene glycol diglycidyl ether, tetraethylene glycol Diglycidyl ether (tetraethylene glycol diglycidyl ether), polyethylene glycol diglycidyl ether (propylene glycol diglycidyl ether), dipropylene glycol diglycidyl ether (dipropylene glycol diglycidyl ether, tripropylene glycol diglycidyl ether, tetrapropylene Tetrapropylene glycol diglycidyl ether, polypropylene glycol diglycidyl ether, sorbitol triglycidyl ether, glycerin triglycidyl ether, etc. (Meth) acrylic acid adducts of epoxy compounds, unsaturated organic acids such as maleic acid and their anhydrides, N-methylacrylamide, N-ethylacrylamide, N-isopropylacrylamide, N-methylolacrylamide, N-methylmethacrylamide, N-ethylmethacrylamide, N- N-isopropylmethacrylamide, N-methylolmethacrylamide, N, N-dimethylacrylamide, N, N-diethyl arc Acrylamides such as amide (N, N-diethylacrylamide), N, N-dimethylmethacrylamide, N, N-diethylmethacrylamide, Styrenes such as styrene and hydroxystyrene, N-vinylpyrrolidone, N-vinyl formamide, N-vinyl acetamide, N -N-vinyl imidazole etc. can be illustrated, and 1 type, or 2 or more types of these can be used.

본 발명의 감광성 수지 조성물에는, 디자인성(design性), 시인성(視認性) 및 포토레지스트의 헐레이션 방지(antihalation) 등의 목적으로 착색제를 첨가할 수도 있다. 첨가하는 착색제의 종류는, 착색의 목적에 따라 적절하게 선택할 수 있고, 예를 들면 프탈로시아닌계 염료(phthalocyanine dyes), 안트라퀴논계 염료(anthraquinone dyes), 아조계 염료(azo dyes), 인디고계 염료(indigo dyes), 쿠마린계 염료(coumarin dyes), 트리페닐메탄계 염료(triphenylmethane dyes), 프탈로시아닌계 안료, 안트라퀴논계 안료, 아조계 안료, 퀴나크리돈계 안료(quinacridone pigments), 쿠마린(coumarin)계 안료, 트리페닐메탄계 안료 등을 예시할 수 있고, 이들의 1종 또는 2종 이상을 사용할 수 있다.A coloring agent can also be added to the photosensitive resin composition of this invention for the purpose of designability, visibility, antihalation of a photoresist, etc. The kind of coloring agent to be added can be appropriately selected according to the purpose of coloring, for example, phthalocyanine dyes, anthraquinone dyes, azo dyes, indigo dyes ( indigo dyes, coumarin dyes, triphenylmethane dyes, phthalocyanine pigments, anthraquinone pigments, azo pigments, quinacridone pigments, coumarin pigments , Triphenylmethane pigments, and the like, and one or two or more thereof can be used.

본 발명의 감광성 수지 조성물은, 용액 또는 필러(filler) 등을 혼합한 페이스트(paste)의 형태로 할 수 있고, 이를 위해서 용제를 함유하는 것도 가능하다. 사용되는 용제의 종류에 특별히 제한은 없지만, 일례로서, 물, 에틸렌글리콜(ethylene glycol), 디에틸렌글리콜(diethylene glycol), 트리에틸렌글리콜(triethylene glycol), 테트라에틸렌글리콜(tetraethylene glycol) 등의 에틸렌글리콜류, 에틸렌글리콜모노메틸에테르(ethylene glycol monomethyl ether), 디에틸렌글리콜모노메틸에테르(diethylene glycol monomethyl ether), 에틸렌글리콜디에틸에테르, 디에틸렌글리콜디메틸에테르 등의 글리콜에테르류, 에틸렌글리콜모노에틸에테르아세테이트, 디에틸렌글리콜모노에틸에테르아세테이트, 디에틸렌글리콜모노부틸에테르아세테이트 등의 글리콜에테르아세테이트류, 프로필렌글리콜(propylene glycol), 디프로필렌글리콜(dipropylene glycol), 트리프로필렌글리콜(tripropylene glycol) 등의 프로필렌글리콜류, 프로필렌글리콜모노메틸에테르(propylene glycol monomethyl ether), 프로필렌글리콜모노에틸에테르(propylene glycol monoethyl ether), 디프로필렌글리콜모노메틸에테르(dipropylene glycol monomethyl ether), 디프로필렌글리콜모노에틸에테르, 프로필렌글리콜디메틸에테르, 디프로필렌글리콜디메틸에테르, 프로필렌글리콜디에틸에테르, 디프로필렌글리콜디에틸에테르 등의 프로필렌글리콜에테르류, 프로필렌글리콜모노메틸에테르아세테이트, 프로필렌글리콜모노에틸에테르아세테이트, 디프로필렌글리콜모노메틸에테르아세테이트, 디프로필렌글리콜모노에틸에테르아세테이트 등의 프로필렌글리콜에테르아세테이트류, 아세톤, 메틸에틸케톤, 메틸이소부틸케톤, 시클로헥사논 등의 케톤류, 유산메틸(methyl lactate), 유산에틸 등의 유산에스테르류, 아세트산에틸, 아세트산부틸 등의 아세트산에스테르류, 디메틸술폭시드, N-메틸피롤리돈, 디메틸포름아미드, 디메틸아세트아미드 및 그들의 혼합물을 들 수 있다.The photosensitive resin composition of this invention can be made into the form of the paste which mixed the solution, the filler, etc., and can also contain a solvent for this. Although there is no restriction | limiting in particular in the kind of solvent used, As an example, Ethylene glycol, such as water, ethylene glycol, diethylene glycol, triethylene glycol, tetraethylene glycol, etc. Glycol ethers such as ethylene glycol monomethyl ether, diethylene glycol monomethyl ether, ethylene glycol diethyl ether and diethylene glycol dimethyl ether, and ethylene glycol monoethyl ether acetate Glycol ether acetates such as diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, propylene glycols such as propylene glycol, dipropylene glycol and tripropylene glycol , Propylene Glycol Monome Ether (propylene glycol monomethyl ether), propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, propylene glycol dimethyl ether, dipropylene glycol dimethyl ether Propylene glycol ethers such as propylene glycol diethyl ether and dipropylene glycol diethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, dipropylene glycol monomethyl ether acetate, dipropylene glycol monoethyl ether acetate, and the like. Propylene glycol ether acetates, ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, lactic acid esters such as methyl lactate, ethyl lactate, ethyl acetate, butyl acetate Of acetic acid esters, dimethyl sulfoxide, N- methylpyrrolidone can be given money, dimethylformamide, dimethylacetamide, and mixtures thereof.

본 발명의 감광성 수지 조성물에는, 중합금지제, 가소제(可塑劑), 소포제(消泡劑), 커플링제(coupling agent) 등 종래 공지의 성분을 필요에 따라 더 배합할 수 있다.In the photosensitive resin composition of this invention, conventionally well-known components, such as a polymerization inhibitor, a plasticizer, an antifoamer, and a coupling agent, can be further mix | blended as needed.

본 발명의 감광성 수지 조성물은, 상기 필수성분 및 필요에 따라 용제나 그 이외의 임의성분을 통상의 방법에 따라서 혼합함으로써 얻을 수 있다.The photosensitive resin composition of this invention can be obtained by mixing a solvent and other arbitrary components according to the conventional method as the said essential component and if necessary.

이상과 같이 하여 얻어진 본 발명의 감광성 수지 조성물을 포토레지스트로서 사용하는 경우에는, 용액 또는 페이스트로서 기판상에 도포된다. 도포방법은 특별히 제한되지 않지만, 스크린 인쇄(screen printing), 커튼 코트(curtain coating), 블레이드 코트(blade coating), 스핀 코트(spin coating), 스프레이 코트(spray coating), 딥 코트(dip coating), 슬릿 코트(slit coating) 등이 적용된다. 도포된 용액 또는 페이스트는, 소정의 마스크(mask)를 사이에 두고 UV 혹은 전자선에 의하여 노광이 이루어진다. 용제를 사용하여 도포하는 경우에 건조공정을 경유하여도 좋다. 노광한 도포막을 습식(濕式)으로 현상함으로써 패턴을 형성할 수 있다. 현상 방법은, 스프레이식(spray method), 패들식(paddle method), 침지식(浸漬式) 등 어느 것이나 가능하지만, 잔사(殘渣)가 적은 스프레이식이 바람직하다. 필요에 따라 초음파 등을 조사할 수도 있다. 현상액으로는 약알칼리성수(alkalescent water)를 사용하는 것이 바람직하다. 현상성 보조의 목적으로 유기용제, 계면활성제, 소포제 등을 첨가할 수도 있다.When using the photosensitive resin composition of this invention obtained as mentioned above as a photoresist, it is apply | coated on a board | substrate as a solution or a paste. The coating method is not particularly limited, but screen printing, curtain coating, blade coating, spin coating, spray coating, dip coating, Slit coating or the like is applied. The applied solution or paste is exposed to light by an electron beam or an electron beam with a predetermined mask therebetween. When apply | coating using a solvent, you may go through a drying process. A pattern can be formed by developing the exposed coating film in a wet manner. The developing method can be any of spray method, paddle method, immersion method, etc., but a spray method with less residue is preferable. Ultrasonic waves etc. can also be irradiated as needed. As the developing solution, it is preferable to use alkaline water. An organic solvent, a surfactant, an antifoaming agent, etc. may be added for the purpose of developing assistance.

(실시예)(Example)

이하, 본 발명을 실시예에 의하여 상세하게 설명하지만, 본 발명은 이들에 의하여 한정되는 것은 아니다.Hereinafter, although an Example demonstrates this invention in detail, this invention is not limited by these.

실시예1Example 1

교반기와 냉각관을 구비한 1000ml의 플라스크(flask)에, 피로멜리트산 2무수물(다이세루사(Daicel Chemical Industries., Ltd) 제품 : PMDA) 64g, 9,9-비스[4-(2-히드록시에톡시)페닐]플루오렌(오사카가스케미칼사(Osaka Gas Chemicals Co., Ltd) 제품 : BPEF) 136g, 프로필렌글리콜모노메틸에테르아세테이트 134g을 넣고, 질소기류 하에서 저으면서 155℃의 오일 배스에서 4시간 가열하였다. 계속하여 120℃까지 냉각한 후, 4-디메틸아미노피리딘 1g, 4-히드록시-2,2,6,6-테트라메틸피페리딘-1-옥실(ADEKA사 제품 : 아데가스타브LA-7RD(ADK STAB LA-7RD)) 0.04g, 4-히드록시부틸아크릴레이트글리시딜에테르(4-hydroxybutyl acrylate glycidyl ether)(니혼카세이사 제품 : 4HBAGE) 106g을 c첨가하고, 120℃로 4시간 저었다. 다음에 실온까지 냉각하고 불휘발분이 50질량%가 되도록 프로필렌글리콜모노메틸에테르아세테이트를 첨가하여, 담황색 투명 점조성(粘稠性)의 감광성 수지(A1)용액을 얻었다.Into a 1000 ml flask equipped with a stirrer and a cooling tube, 64 g of pyromellitic dianhydride (manufactured by Daicel Chemical Industries., Ltd .: PDMA), 9,9-bis [4- (2-hydric) Oxyethoxy) phenyl] fluorene (Osaka Gas Chemicals Co., Ltd.): 136 g of JPPE, 134 g of propylene glycol monomethyl ether acetate are added, and the mixture is stirred under a nitrogen stream for 4 hours in an oil bath at 155 ° C. Heated. Subsequently, after cooling to 120 degreeC, 1-g of 4-dimethylamino pyridine, 4-hydroxy-2,2,6,6- tetramethyl piperidine-1-oxyl (made by ADEGA Corporation: ADEGASLA LA-7RD ( ADK STAB LA-7RD)) 0.04g, 106g of 4-hydroxybutyl acrylate glycidyl ether (product made from Nihon Kasei Co., Ltd .: 4HWAHAE) were added c, and it stirred at 120 degreeC for 4 hours. . Next, it cooled to room temperature and propylene glycol monomethyl ether acetate was added so that a non volatile matter might be 50 mass%, and the pale yellow transparent viscous photosensitive resin (A1) solution was obtained.

얻어진 수지용액에 대해서, 점도, GPC에 의한 스티렌 환산 중량 평균 분자량 및 고형분 산가를 측정한 바, 점도 2900mPaㆍs/25℃, GPC에 의한 스티렌 환산 중량 평균 분자량 12,523, 고형분 산가 2.2mgKOH/g이었다. 또, 점도측정에는 동기산업주식회사 제품 BM형 점도계를 사용하였다. 또한 GPC의 측정은 칼럼(column)에 토소주식회사(Tosoh Corporation) 제품 TSKgel G7000HXL, TSKgel GMHXL 2개, TSKgel G2500HXL을 사용하여, THF용리액(溶離液; eluent) 40℃, 0.5ml/min 유속으로 측정하였다. 산가는, JIS-K0070에 기재된 중화 적정법에 준거하여 측정하였다.About the obtained resin solution, the viscosity, the styrene conversion weight average molecular weight by WPC, and solid content acid value were measured, and the viscosity was 2900 mPas / 25 degreeC, the styrene conversion weight average molecular weight by BPC is 12,523, and solid content acid value 2.2 mg gOH / g. In addition, the viscosity type | mold VMS type | mold manufactured by KK was used for the viscosity measurement. In addition, the measurement of GPC was carried out by THF eluent 40 degreeC and 0.5 ml / mI flow rate using the TOSGELEL G7000HVL and TSGELGEL G2500HBL made by Tosoh Corporation, and TGGELG2500HLL on the column. . The acid value was measured in accordance with the neutralization titration method described in JIS-K0070.

실시예2Example 2

교반기와 냉각관을 구비한 1000ml의 플라스크(flask)에, 비페닐테트라카르복시산 2무수물(우부흥산사(宇部興産社) 제품 : BPDA) 72g, 9,9-비스[4-(2-히드록시에톡시)페닐]플루오렌(오사카가스케미칼사 제품:BPEF) 128g, 4-디메틸아미노피리딘 1g, 프로필렌글리콜모노메틸에테르아세테이트 134g을 넣고, 질소기류 하에서 저으면서 155℃의 오일 배스에서 4시간 가열하였다. 계속하여 120℃까지 냉각한 후, 4-히드록시-2,2,6,6-테트라메틸피페리딘-1-옥실(ADEKA사 제품 : 아데가스타브LA-7RD) 0.04g, 4-히드록시부틸아크릴레이트글리시딜에테르(니혼카세이사 제품 : 4HBAGE) 84g을 첨가하고, 120℃로 4시간 저었다. 다음에 실온까지 냉각하고 불휘발분이 50질량%가 되도록 프로필렌글리콜모노메틸에테르아세테이트를 첨가하여, 담황색 투명 점조성의 감광성 수지(A2)용액을 얻었다. 얻어진 수지용액에 대해서, 점도, GPC에 의한 스티렌 환산 중량 평균 분자량 및 고형분 산가를 측정한 바, 점도 4200mPaㆍs/25℃, GPC에 의한 스티렌 환산 중량 평균 분자량 7,243, 고형분 산가 2.5mgKOH/g이었다.Into a 1000 ml flask equipped with a stirrer and a cooling tube, 72 g of biphenyl tetracarboxylic dianhydride (manufactured by Ubuheungsan Co., Ltd .: JPDA), 9,9-bis [4- (2-hydroxy) 128 g of methoxy) phenyl] fluorene (made by Osaka Chemical Co., Ltd .: PEPF), 1 g of 4-dimethylaminopyridine, and 134 g of propylene glycol monomethyl ether acetate were added, and it heated in 155 degreeC oil bath for 4 hours, stirring under nitrogen stream. Subsequently, after cooling to 120 degreeC, 4-hydroxy-2,2,6,6- tetramethyl piperidine- 1-oxyl (made by ADEGA: Adegas Tab LA-7RD) 0.04g, 4-hydroxy 84 g of butyl acrylate glycidyl ether (manufactured by Nihon Kasei Co., Ltd .: 4HWAA) were added, and the mixture was stirred at 120 ° C for 4 hours. Next, it cooled to room temperature and propylene glycol monomethyl ether acetate was added so that a non volatile matter might be 50 mass%, and the pale yellow transparent viscous photosensitive resin (A2) solution was obtained. About the obtained resin solution, the viscosity, the styrene conversion weight average molecular weight by XPC, and solid content acid value were measured, and it was 4200 mPas / 25 degreeC and styrene conversion weight average molecular weight 7,243 by BPC, and solid content acid value 2.5 mg gOH / g.

비교예1Comparative Example 1

일본국 공개특허공보 특개평4-325508호 공보에 기재된 합성예1에 따라 감광성 수지(A3)를 얻었다.Photosensitive resin (A3) was obtained according to the synthesis example 1 of Unexamined-Japanese-Patent No. 4-325508.

실시예1∼2 및 비교예1의 감광성 수지를 이용하고, 표1의 조성으로 감광성 조성물을 작성하였다. 이 감광성 조성물을 1.1mm 두께의 소다 라임 글라스 기판(soda-lime glass plate)에 바 코터(bar coater)로 건조막 두께 6μm가 되도록 도포하고, 80℃의 온풍건조기로 10분간 건조시킨 후에 실온까지 냉각시켰다. 계속하여 초고압 수은등(超高壓 水銀燈) UV조사기로 적산 광량 300mJ/cm2의 자외선을 조사하였다. 이 경화 도포막에 대해서 JIS-K5400을 따라 연필경도 및 크로스컷 테이프 필 시험(crosscut tape peel test)을 실시하고, 도포막의 강도를 평가하였다.
Using the photosensitive resin of Examples 1-2 and the comparative example 1, the photosensitive composition was created with the composition of Table 1. The photosensitive composition was applied on a 1.1 mm thick soda-lime glass plate with a bar coater to have a dry film thickness of 6 μm, dried for 10 minutes with a warm air dryer at 80 ° C., and then cooled to room temperature. I was. Subsequently, ultraviolet rays with an integrated light quantity of 300 mPa / cm 2 were irradiated with an ultra-high pressure mercury lamp irradiator. About this cured coating film, the pencil hardness and the crosscut tape peel test were implemented along with JIS-K5400, and the strength of the coating film was evaluated.

Figure 112010063625210-pct00009
Figure 112010063625210-pct00009

비교예1의 감광성 수지를 이용한 감광성 조성물은 저분자량 때문에 도포막 형성능력이 약하고, 다른 수지성분을 첨가하지 않으면 평가할 수 없었다. 실시예1∼2의 감광성 수지를 이용한 감광성 조성물은, 평활한 막이 얻어지고 경도, 밀착성 모두 양호하였다.The photosensitive composition using the photosensitive resin of the comparative example 1 was weak in coating film formation ability because of low molecular weight, and it could not be evaluated unless another resin component was added. As for the photosensitive composition using the photosensitive resin of Examples 1-2, the smooth film | membrane was obtained and both hardness and adhesiveness were favorable.

실시예7Example 7

교반기와 냉각관을 구비한 1000ml의 플라스크에, 피로멜리트산 2무수물(다이세루사 제품 : PMDA) 76g, 9,9-비스[4-(2-히드록시에톡시)페닐]플루오렌(오사카가스케미칼사 제품: BPEF) 124g, 프로필렌글리콜모노메틸에테르아세테이트 134g을 넣고, 질소기류 하에서 저으면서 155℃의 오일 배스에서 4시간 가열하였다. 계속하여 120℃까지 냉각한 후에, 4-디메틸아미노피리딘 1g, 4-히드록시-2,2,6,6-테트라메틸피페리딘-1-옥실(ADEKA사 제품 : 아데카스타브LA-7RD) 0.04g, 4-히드록시부틸아크릴레이트글리시딜에테르(니혼카세이사 제품 : 4HBAGE) 106g을 첨가하고, 120℃에서 2시간 저었다. 다음에 실온까지 냉각하고 불휘발분이 50질량%이 되도록 프로필렌글리콜모노메틸에테르아세테이트를 첨가하여, 담황색 투명 점조성의 감광성 수지(A4)용액을 얻었다.Into a 1000 ml flask equipped with a stirrer and a cooling tube, 76 g of pyromellitic dianhydride (manufactured by Daicera Co., Ltd .: PMDA), 9,9-bis [4- (2-hydroxyethoxy) phenyl] fluorene (Osaka Gas 124 g of PFPE) and 134 g of propylene glycol monomethyl ether acetate were added, and it heated in 155 degreeC oil bath for 4 hours, stirring under nitrogen stream. Subsequently, after cooling to 120 degreeC, 1-g of 4-dimethylamino pyridine, 4-hydroxy-2,2,6,6- tetramethyl piperidine-1-oxyl (made by ADEVA: AdecastabLA-7RD) 0.04 g and 4-hydroxybutyl acrylate glycidyl ether (manufactured by Nihon Kasei Co., Ltd .: 4HBAE) were added and stirred at 120 ° C for 2 hours. Next, to room temperature, propylene glycol monomethyl ether acetate was added so that a non volatile matter might be 50 mass%, and the pale yellow transparent viscous photosensitive resin (A4) solution was obtained.

얻어진 수지용액에 대하여 점도, GPC에 의한 스티렌 환산 중량 평균 분자량 및 고형분 산가를 측정한 바, 점도 4800mPaㆍs/25℃, GPC에 의한 스티렌 환산 중량 평균 분자량 23,169, 고형분 산가 75.2mgKOH/g이었다.About the obtained resin solution, the viscosity, the styrene conversion weight average molecular weight by WPC, and solid content acid value were measured, and the viscosity was 4800 mPas / 25 degreeC, the styrene conversion weight average molecular weight 23,169 by WPC and solid content acid value 75.2 mggOHH / g.

실시예8Example 8

교반기와 냉각관을 구비한 1000ml의 플라스크에, 비페닐테트라카르복시산 2무수물(우부흥산사 제품 : BPDA) 90g, 9,9-비스[4-(2-히드록시에톡시)페닐]플루오렌(오사카가스케미칼사 제:BPEF) 110g, 프로필렌글리콜모노메틸에테르아세테이트 134g, 4-디메틸아미노피리딘 1g을 넣고, 질소기류 하에서 저으면서 155℃의 오일 배스에서 4시간 가열하였다. 계속하여 120℃까지 냉각한 후에, 4-히드록시-2,2,6,6-테트라메틸피페리딘-1-옥실(ADEKA사 제품 : 아데카스타브LA-7RD) 0.04g, 4-히드록시부틸아크릴레이트글리시딜에테르(니혼카세이사 제품 : 4HBAGE) 80g을 첨가하고, 120℃에서 2시간 저었다. 다음에 실온까지 냉각하고 불휘발분이 50질량%이 되도록 프로필렌글리콜모노메틸에테르아세테이트를 첨가하여, 담황색 투명 점조성의 감광성 수지(A5)용액을 얻었다.Into a 1000 ml flask equipped with a stirrer and a cooling tube, 90 g of biphenyltetracarboxylic acid dianhydride (manufactured by Ubo Chemical Co., Ltd .: JPDA), 9,9-bis [4- (2-hydroxyethoxy) phenyl] fluorene (Osaka 110 g of Chemical Chemicals Co., Ltd. (PP), 134 g of propylene glycol monomethyl ether acetate, and 1 g of 4-dimethylaminopyridine were added, and it heated in 155 degreeC oil bath for 4 hours, stirring under nitrogen stream. Subsequently, after cooling to 120 degreeC, 4-hydroxy-2,2,6,6- tetramethyl piperidine- 1-oxyl (made by ADEGA: Adecastabr-7-7D) 0.04g, 4-hydroxy 80 g of butyl acrylate glycidyl ether (manufactured by Nippon Kasei Co., Ltd .: 4HBAE) was added, and the mixture was stirred at 120 ° C for 2 hours. Next, it cooled to room temperature and propylene glycol monomethyl ether acetate was added so that a non volatile matter might be 50 mass%, and the pale yellow transparent viscous photosensitive resin (A5) solution was obtained.

얻어진 수지용액에 대해서, 점도, GPC에 의한 스티렌 환산 중량 평균 분자량 및 고형분 산가를 측정한 바, 점도 6600mPaㆍs/25℃, GPC에 의한 스티렌 환산 중량 평균 분자량 18,230, 고형분 산가 71.6mgKOH/g이었다.About the obtained resin solution, when the viscosity, the styrene conversion weight average molecular weight by WPC, and solid content acid value were measured, the viscosity was 6600 mPas / 25 degreeC, the styrene conversion weight average molecular weight by BPC is 18,230, and solid content acid value 71.6 mggOHH / g.

비교예4Comparative Example 4

에폭시당량(weight per epoxide equivalent) 257의 비스페놀플루오렌형 에폭시 수지(bisphenol fluorene type epoxy resin)(오사카가스케미칼사 제품 : BPFG)를 사용하고, 일본국 특허 제3813244호 공보에 기재된 합성예1 및 실시예1에 따라 감광성 수지(A6)를 얻었다. 합성에는 20시간 이상이 필요하고, 본 발명의 실시예1∼4와 비교하여 생산성은 현저하게 낮았다.Synthesis Example 1 and the practice described in Japanese Patent No. 3813244, using a bisphenol fluorene type epoxy resin (product of Osaka Chemical Co., Ltd .: PFF) having a weight per epoxide equivalent of 257 Photosensitive resin (A6) was obtained in accordance with Example 1. Synthesis required 20 hours or more, and productivity was remarkably low compared with Examples 1-4 of this invention.

비교예5Comparative Example 5

에폭시당량 257의 비스페놀플루오렌형 에폭시 수지(오사카가스케미칼사 제품 : BPFG)를 사용하고, 일본국 특허 제3813244호 공보에 기재된 합성예1 및 실시예2에 따라 감광성 수지(A7)를 얻었다. 합성에는 21시간 이상이 필요했고 본 발명의 실시예7 및 실시예8과 비교하여 생산성은 현저하게 낮았다.The photosensitive resin (A7) was obtained according to the synthesis example 1 and Example 2 of Unexamined-Japanese-Patent No. 3813244 using bisphenol fluorene type | mold epoxy resin (made by Osaka Chemical Co., Ltd .: PFF) of epoxy equivalent 257. The synthesis required more than 21 hours and the productivity was significantly lower compared to Examples 7 and 8 of the present invention.

비교예6Comparative Example 6

실시예8의 4-히드록시부틸아크릴레이트글리시딜에테르 80g을 글리시딜메타크릴레이트(glycidyl methacrylate)(미쓰비시레이온사(Mitsubishi Rayon Co., Ltd.) 제품 : GMA) 60g으로 변경한 것 외에는 같은 반응을 시켜 감광성 수지용액(A8)을 얻었다. 얻어진 수지용액에 대하여, 점도, GPC에 의한 스티렌 환산 중량 평균 분자량 및 고형분 산가를 측정한 바, 점도 12,400mPaㆍs/25℃, GPC에 의한 스티렌 환산 중량 평균 분자량 16,100, 고형분 산가 74.2mgKOH/g이었다.80 g of 4-hydroxybutyl acrylate glycidyl ether of Example 8 was changed to 60 g of glycidyl methacrylate (Mitsubishi Rayon Co., Ltd. product: XMA). The same reaction was performed and the photosensitive resin solution (A8) was obtained. About the obtained resin solution, the viscosity, the styrene conversion weight average molecular weight by PCC, and solid content acid value were measured, and the viscosity was 12,400 mPas / 25 degreeC, the styrene conversion weight average molecular weight by BPC is 16,100, and solid content acid value 74.2 mggOHH / g. .

시험예1Test Example 1

실시예7∼8 및 비교예4∼5의 감광성 수지에 대해서, 제조 직후와 실온 보존 1개월 후의 GPC에 의한 폴리스티렌(polystyrene) 환산 중량 평균 분자량을 측정하고, 그 변화율을 조사하였다. 결과를 표2에 나타낸다.About the photosensitive resin of Examples 7-8 and Comparative Examples 4-5, the polystyrene conversion weight average molecular weight by PPC immediately after manufacture and 1 month after room temperature storage was measured, and the change rate was investigated. The results are shown in Table 2. Indicates.

Figure 112010063625210-pct00010
Figure 112010063625210-pct00010

실시예7∼8의 감광성 수지는 거의 변화가 보이지 않지만, 비교예2∼3의 감광성 수지는 25%정도의 분자량 증가가 보여, 보존 안정성이 뒤떨어지는 것이었다.The photosensitive resins of Examples 7 to 8 show little change, but the photosensitive resins of Comparative Examples 2 to 3 exhibited an increase in molecular weight of about 25%, resulting in inferior storage stability.

실시예9∼12 및 비교예7∼12Examples 9-12 and Comparative Examples 7-12

실시예7∼8 및 비교예4∼6의 감광성 수지를 이용하고, 하기 표3의 배합으로 감광성 조성물을 작성하였다. 이 감광성 조성물을, 1.1mm 두께의 소다 라임 글라스 기판에 스핀 코터(spin coater)로 건조막 두께 3μm가 되도록 도포하고 100도의 핫플레이트(hot plate)에서 90초 건조시킨 후에, 실온까지 냉각하였다. 계속하여 초고압 수은등 노광기로 자외선 조도 15mW/cm2(365nm), 적산 광량 20mJ/cm2로, UGRA-OFFSET-TEST KAIL1982를 마스크로 하여 소프트 콘택트 노광(soft contact exposure)을 한 후에, 25℃의 1% 탄산나트륨수에 90초간 침지 현상 하여 패턴을 형성하고, 남은 스텝 단수(step段數)로 감도를 마이크로 라인(Microline)으로 해상도를 평가하였다. 결과를 표3에 함께 나타낸다.Using the photosensitive resin of Examples 7-8 and Comparative Examples 4-6, the photosensitive composition was created by the combination of following Table 3. The photosensitive composition was applied to a 1.1 mm thick soda lime glass substrate with a spin coater to have a dry film thickness of 3 μm, dried for 90 seconds on a 100 degree hot plate, and then cooled to room temperature. Subsequently after the UV light intensity 15mW / cm 2 (365nm), cumulative dose 20mJ / cm 2 to super-high pressure mercury lamp exposure machine, and a UGRA-OFFSET-TEST KAIL1982 as a mask soft contact exposure (soft contact exposure), the 25 ℃ 1 The pattern was formed by immersion for 90 seconds in% sodium carbonate water, and the sensitivity was evaluated by the microline with the remaining number of steps. The results are shown in Table 3 together.

Figure 112010063625210-pct00011
Figure 112010063625210-pct00011

비교예4~6의 감광성수지(A6~A8)를 사용한 감광성 조성물에 비하여, 실시예7∼8(A4∼A5)의 감광성 수지를 이용한 감광성 조성물은, 감도가 높고 양호한 레지스트(resist) 특성을 나타냈다.Compared with the photosensitive compositions using the photosensitive resins (A6 to A8) of Comparative Examples 4 to 6, the photosensitive compositions using the photosensitive resins of Examples 7 to 8 (A4 to A5) exhibited high sensitivity and good resist characteristics. .

실시예13Example 13

교반기와 냉각관을 구비한 1000ml의 플라스크에, 3,3'-4,4'비페닐테트라카르복시산 무수물(우부흥산 제품:BPDA) 71.8g, 9,9-비스[4-(2-히드록시에톡시)3페닐페닐]플루오렌(오사카가스케미칼사 제품:BOPPEF) 109.7g, 프로필렌글리콜모노메틸에테르아세테이트 128g, 4-디메틸아미노피리딘 0.25g을 넣고, 저으면서 120℃의 맨틀 히터(mantle heater)에서 4시간 가열하였다. 계속하여 p-메톡시페놀(p-methoxyphenol)(도쿄카세이 제품) 0.1g, 히드록시에틸아크릴레이트(hydroxyethyl acrylate)(도쿄카세이 제품) 13.7g을 넣고, 120℃로 4시간 가열하였다. 또한 4-히드록시부틸아크릴레이트글리시딜에테르(니혼카세이사 제품 : 4HBAGE) 34.68g을 첨가하고 저으면서 120℃로 4시간 가열하여, 담황색 투명 점조성의 감광성 수지(A9)용액을 얻었다.Into a 1000 ml flask equipped with a stirrer and a cooling tube, 71.8 g of 3,3'-4,4 'biphenyltetracarboxylic anhydride (manufactured by UBU), 9,9-bis [4- (2-hydroxy) 109.7 g of methoxy) 3phenylphenyl] fluorene (manufactured by OSAKA Chemical Co., Ltd.), 128 g of propylene glycol monomethyl ether acetate, and 0.25 g of 4-dimethylaminopyridine were added, followed by stirring in a mantle heater at 120 ° C. Heated for hours. Subsequently, 0.1 g of p-methoxyphenol (manufactured by Tokyo Kasei) and 13.7 g of hydroxyethyl acrylate (manufactured by Tokyo Kasei) were added thereto, followed by heating at 120 ° C. for 4 hours. Further, 34.68 g of 4-hydroxybutyl acrylate glycidyl ether (manufactured by Nihon Kasei Co., Ltd .: 4HWAHAE) was added thereto, and the mixture was heated at 120 ° C for 4 hours while stirring to obtain a pale yellow transparent viscous photosensitive resin (A9) solution.

얻어진 수지용액에 대하여, 점도, GPC에 의한 스티렌 환산 중량 평균 분자량, 고형분 및 고형분 산가를 측정한 바, 점도 187100mPaㆍs/25℃, GPC에 의한 스티렌 환산 중량 평균 분자량 4,170, 고형분 66.8%, 고형분 산가 85.4mgKOH/g이었다.About the obtained resin solution, viscosity, the styrene conversion weight average molecular weight by solid state, solid content, and solid content acid value were measured, and the viscosity 187100 mPas / 25 degreeC, styrene conversion weight average molecular weight 4,170 by solid content, 66.8% of solid content acid value, solid content acid value were measured. 85.4 mg gOH / g.

실시예14Example 14

교반기와 냉각관을 구비한 1000ml의 플라스크에, 3,3'-4,4'비페닐테트라카르복시산 무수물(우부흥산 제품 : BPDA) 61.22g, 9,9-비스[6-(2-히드록시에톡시)나프틸]플루오렌(오사카가스케미칼사 제품 : BNFEO) 95.89g, 프로필렌글리콜모노메틸에테르아세테이트 125g, 4-디메틸아미노피리딘 0.25g을 넣고, 저으면서 120℃의 맨틀 히터에서 4시간 가열하였다. 계속하여 p-메톡시페놀(도쿄카세이 제품) 0.1g, 히드록시에틸아크릴레이트(도쿄카세이 제품) 13.3g을 넣고, 120℃로 4시간 가열하였다. 또 4-히드록시부틸아크릴레이트글리시딜에테르(니혼카세이사 제품 : 4HBAGE) 56g을 첨가하고, 120℃로 4시간 저으면서 가열하여 담황색 투명 점조성의 감광성 수지(A10)용액을 얻었다.In a 1000 ml flask equipped with a stirrer and a cooling tube, 61.22 g of 3,3'-4,4 'biphenyltetracarboxylic anhydride (manufactured by UBH): 9,9-bis [6- (2-hydroxye 95.89 g of methoxy) naphthyl] fluorene (the Osaka Chemical Co., Ltd. make: NOFEO), 125 g of propylene glycol monomethyl ether acetates, and 0.25 g of 4-dimethylaminopyridine were added, and it heated at 120 degreeC mantle heater for 4 hours. Subsequently, 0.1 g of p-methoxyphenol (manufactured by Tokyo Kasei) and 13.3 g of hydroxyethyl acrylate (manufactured by Tokyo Kasei) were added thereto, and the mixture was heated to 120 ° C. for 4 hours. In addition, 56 g of 4-hydroxybutyl acrylate glycidyl ether (manufactured by Nihon Kasei Co., Ltd .: 4HBAE) was added thereto, and the mixture was heated with stirring at 120 ° C for 4 hours to obtain a pale yellow transparent viscous photosensitive resin (A10) solution.

얻어진 수지용액에 대하여, 점도, GPC에 의한 스티렌 환산 중량 평균 분자량, 고형분 및 고형분 산가를 측정한 바, 점도 586700mPaㆍs/25℃, GPC에 의한 스티렌 환산 중량 평균 분자량 9,250, 고형분 59.0%, 고형분 산가 60.4mgKOH/g이었다.The viscosity and styrene conversion weight average molecular weight, solid content, and solid acid value of the obtained resin solution were measured, and the viscosity was 586700 mPas / 25 ° C, styrene conversion weight average molecular weight 9,250, solid content 59.0%, and solid content acid value of BPC. 60.4 mggOH / g.

실시예15∼16Examples 15-16

실시예13의 감광성 수지를 이용해 표4의 배합으로 감광성 조성물을 작성하였다. 이 감광성 조성물을, 실시예 9∼12와 동일한 평가를 하였다.The photosensitive composition was created by the combination of Table 4 using the photosensitive resin of Example 13. This photosensitive composition was evaluated similar to Examples 9-12.

Figure 112010063625210-pct00012
Figure 112010063625210-pct00012

어느 감광성 조성물도 감도가 높고 양호한 레지스트 특성을 나타냈다.
Both photosensitive compositions were highly sensitive and exhibited good resist characteristics.

본 발명의 감광성 수지는, 저비용으로 용이하게 제조 가능하고 가교밀도나 산가의 조정이 용이하며, 또 고내열성, 고투명성, 고굴절율 및 저선팽창율 등의 우수한 특성을 구비한 것이다. 따라서 이 감광성 수지를 이용한 수지 조성물은, 액정 디스플레이나 전자부품 등에 있어서의 층간 절연막이나 보호막(예를 들면 컬러 필터, 액정표시소자, 집적회로소자, 고체촬영소자 등에 이용되는 층간 절연막이나 보호막) 등을 조제할 때에 유용하다.The photosensitive resin of the present invention can be easily manufactured at low cost, easy to adjust the crosslinking density and acid value, and has excellent properties such as high heat resistance, high transparency, high refractive index and low linear expansion coefficient. Therefore, the resin composition using this photosensitive resin is used for interlayer insulating films and protective films (e.g., interlayer insulating films and protective films used for color filters, liquid crystal display devices, integrated circuit devices, solid-state imaging devices, etc.) in liquid crystal displays and electronic components. It is useful when preparing.

Claims (14)

하기 일반식(1)로 나타내어지는 플루오렌 골격(fluorene 骨格; fluorene skeleton)을 구비하는 화합물(化合物)과 4염기산 2무수물(4鹽基酸2無水物)을 반응시켜서 얻어지는 고분자 화합물(高分子化合物)에, 하기 일반식(2)로 나타내어지는 카르복시산 반응성 (메타)아크릴레이트 화합물(carboxylic acid 反應性 methacrylate compound)을 부가(付加)시켜서 얻어지는 것을 특징으로 하는 감광성 수지(感光性樹脂).
[식 1]
Figure 112012099849804-pct00022

(식에서 고리 Z1 및 고리 Z2는 단환식(單環式) 또는 축합다환식(縮合多環式) 탄화수소 고리(炭化水素環)를 나타내고, R1a 및 R1b는 수소원자(水素原子) 또는 알킬기(alkyl group)를 나타내고, R2a 및 R2b탄화수소기, 알콕시기(alkoxy group), 아실기(acyl group), 알콕시카르보닐기(alkoxycarbonyl group), 할로겐 원자(halogen atom), 니트로기(nitro group) 또는 시아노기(cyano group)로부터 선택되는 치환기를 나타내고, R3a 및 R3b는 수소원자 또는 메틸기(methyl group)를 나타내고, k1 및 k2는 동일하거나 또는 서로 다른 0∼4의 정수를 나타내고, m1 및 m2는 동일하거나 또는 서로 다른 0∼3의 정수를 나타내고, n1 및 n2는 동일하거나 또는 서로 다른 0∼10의 정수를 나타내고, p1 및 p2는 동일하거나 또는 서로 다른 0∼4의 정수를 나타낸다. 단, 고리 Z1 및 고리 Z2가 단환식탄화수소 고리인 경우에 p1 및 p2는 1∼3이며, 고리 Z1 및 고리 Z2가 축합다환식탄화수소 고리인 경우에 고리 Z1에 포함되는 p1의 합 및 고리 Z2에 포함되는 p2의 합이 각각 1이상이다)

[식 2]
Figure 112012099849804-pct00023

(식에서 R4는 수소원자 또는 메틸기를 나타내고, R5는 하기 일반식(5)로 나타내어지는 기를 나타낸다)

[식 5]
Figure 112012099849804-pct00024

(식에서 q, r, s는 각각 독립적으로 0∼9의 정수를 나타낸다. 단, q, r, s가 동시에 0이 되는 경우는 없다)
A polymer compound obtained by reacting a compound having a fluorene skeleton represented by the following general formula (1) with a tetrabasic dianhydride (4). A photosensitive resin obtained by adding a carboxylic acid reactive (meth) acrylate compound (carboxylic acid anti methacrylate compound) represented by following General formula (2) to a compound.
[Formula 1]
Figure 112012099849804-pct00022

(Wherein, ring Z 1 and ring Z 2 represent a monocyclic or condensed polycyclic hydrocarbon ring, and R 1a and R 1b represent a hydrogen atom or An alkyl group , and R 2a and R 2b represent a hydrocarbon group, an alkoxy group, an acyl group, an alkoxycarbonyl group, a halogen atom, and a nitro group ) Or a substituent selected from a cyano group , R 3a and R 3b represent a hydrogen atom or a methyl group, k1 and k2 represent the same or different integers from 0 to 4, m1 And m2 represents the same or different integers from 0 to 3, n1 and n2 represent the same or different integers from 0 to 10, and p1 and p2 represent the same or different integers from 0 to 4; However, the ring Z 1 and the ring Z 2 is a monocyclic hydrocarbon ring If the p1 and p2 is 1 to 3, and the ring Z 1 and Z 2 ring is condensed is at least 1, the sum of each sum and p1 p2 included in the ring Z 2 contained in the ring Z 1 when the cyclic hydrocarbon ring to be)

[Formula 2]
Figure 112012099849804-pct00023

(Wherein R 4 represents a hydrogen atom or a methyl group, and R 5 represents a group represented by the following general formula (5)):

[Formula 5]
Figure 112012099849804-pct00024

(Wherein q, r and s each independently represent an integer of 0 to 9, except that q, r and s do not become 0 at the same time)
제1항에 있어서,
상기 일반식(1)로 나타내어지는 플루오렌 골격을 구비하는 화합물이, 하기 일반식(3)으로 나타내어지는 것을 특징으로 하는 감광성 수지.
[식 3]
Figure 112012099849804-pct00025

(식에서 R1a 및 R1b는 수소원자 또는 알킬기를 나타내고, R2a, R2b, R6a 및 R6b탄화수소기, 알콕시기, 아실기, 알콕시카르보닐기, 할로겐 원자, 니트로기 또는 시아노기로부터 선택되는 치환기를 나타내고, R3a 및 R3b는 수소 원자 또는 메틸기를 나타내고, k1 및 k2는 동일하거나 또는 서로 다른 0∼4의 정수를 나타내고, m1, m2, m3 및 m4는 동일하거나 또는 서로 다른 0∼3의 정수를 나타내고, n1, n2, n3 및 n4는 동일하거나 또는 서로 다른 0∼10의 정수를 나타내고, p1 및 p2는 동일하거나 또는 서로 다른 1∼4의 정수를 나타내고, p3 및 p4는 동일하거나 또는 서로 다른 0∼3의 정수를 나타낸다)
The method of claim 1,
The compound which has a fluorene skeleton represented by the said General formula (1) is represented by following General formula (3), Photosensitive resin characterized by the above-mentioned.
[Equation 3]
Figure 112012099849804-pct00025

Wherein R 1a and R 1b represent a hydrogen atom or an alkyl group , and R 2a , R 2b , R 6a and R 6b are selected from a hydrocarbon group, an alkoxy group, an acyl group, an alkoxycarbonyl group, a halogen atom, a nitro group or a cyano group A substituent, R 3a and R 3b represent a hydrogen atom or a methyl group, k 1 and k 2 represent the same or different integers from 0 to 4, and m 1, m 2, m 3 and m 4 are the same or different from 0 to 3 N1, n2, n3 and n4 represent the same or different integers from 0 to 10, p1 and p2 represent the same or different integers from 1 to 4, and p3 and p4 are the same or Different integers from 0 to 3)
제1항에 있어서,
상기 일반식(1)로 나타내어지는 플루오렌 골격을 구비하는 화합물이, 하기 일반식(4)로 나타내어지는 것을 특징으로 하는 감광성 수지.
[식 4]
Figure 112012099849804-pct00026

(식에서 R1a 및 R1b는 수소원자 또는 알킬기를 나타내고, R2a, R2b, R7a 및 R7b탄화수소기, 알콕시기, 아실기, 알콕시카르보닐기, 할로겐 원자, 니트로기 또는 시아노기로부터 선택되는 치환기를 나타내고, R3a 및 R3b는 수소 원자 또는 메틸기를 나타낸다. k1 및 k2는 동일하거나 또는 서로 다른 0∼4의 정수를 나타내고, n1 및 n2는 동일하거나 또는 서로 다른 0∼10의 정수를 나타내고, p1 및 p2는 동일하거나 또는 서로 다른 1∼3의 정수를 나타낸다)
The method of claim 1,
The compound which has a fluorene skeleton represented by the said General formula (1) is represented by following General formula (4), Photosensitive resin characterized by the above-mentioned.
[Formula 4]
Figure 112012099849804-pct00026

Wherein R 1a and R 1b represent a hydrogen atom or an alkyl group , and R 2a , R 2b , R 7a and R 7b are selected from a hydrocarbon group, an alkoxy group, an acyl group, an alkoxycarbonyl group, a halogen atom, a nitro group or a cyano group A substituent, R 3a and R 3b represent a hydrogen atom or a methyl group, k1 and k2 represent the same or different integers from 0 to 4, n1 and n2 represent the same or different integers from 0 to 10; , p1 and p2 represent the same or different integers of 1 to 3)
제1항 내지 제3항 중의 어느 한 항에 있어서,
상기 일반식의 R2a 및 R2b이 페닐기(phenyl group)인 것을 특징으로 하는 감광성 수지.
4. The method according to any one of claims 1 to 3,
R 2a and R 2b of the general formula is a phenyl group (photosensitive resin), characterized in that.
제1항 내지 제3항 중의 어느 한 항에 있어서,
산가(酸價)가 30∼150mgKOH/g인 것을 특징으로 하는 감광성 수지.
The method according to any one of claims 1 to 3 ,
The acid value is 30-150 mggOH / g, The photosensitive resin characterized by the above-mentioned.
제4항에 있어서,
산가(酸價)가 30∼150mgKOH/g인 것을 특징으로 하는 감광성 수지.
5. The method of claim 4 ,
The acid value is 30-150 mggOH / g, The photosensitive resin characterized by the above-mentioned.
제1항 내지 제3항 중의 어느 한 항의 감광성 수지와, 광중합 개시제(光重合開始劑) 및/또는 광증감제(光增感劑)를 함유하는 것을 특징으로 하는 감광성 수지 조성물.
The photosensitive resin of any one of Claims 1-3 and a photoinitiator and / or a photosensitizer are included, The photosensitive resin composition characterized by the above-mentioned.
제4항의 감광성 수지와, 광중합 개시제(光重合開始劑) 및/또는 광증감제(光增感劑)를 함유하는 것을 특징으로 하는 감광성 수지 조성물.
The photosensitive resin of Claim 4, a photoinitiator, and / or a photosensitizer are included, The photosensitive resin composition characterized by the above-mentioned.
제5항의 감광성 수지와, 광중합 개시제(光重合開始劑) 및/또는 광증감제(光增感劑)를 함유하는 것을 특징으로 하는 감광성 수지 조성물.
The photosensitive resin of Claim 5, a photoinitiator, and / or a photosensitizer are included, The photosensitive resin composition characterized by the above-mentioned.
제6항의 감광성 수지와, 광중합 개시제(光重合開始劑) 및/또는 광증감제(光增感劑)를 함유하는 것을 특징으로 하는 감광성 수지 조성물.
The photosensitive resin of Claim 6 and a photoinitiator and / or a photosensitizer are included, The photosensitive resin composition characterized by the above-mentioned.
제7항에 있어서,
분자 중에 1개 이상의 불포화기(不飽和基)를 가지는 중합성 모노머(重合性 monomer)를 더 함유하는 것을 특징으로 하는 감광성 수지 조성물.
8. The method of claim 7 ,
The photosensitive resin composition containing the polymerizable monomer which has one or more unsaturated groups in a molecule | numerator further.
제8항에 있어서,
분자 중에 1개 이상의 불포화기(不飽和基)를 가지는 중합성 모노머(重合性 monomer)를 더 함유하는 것을 특징으로 하는 감광성 수지 조성물.
9. The method of claim 8 ,
The photosensitive resin composition containing the polymerizable monomer which has one or more unsaturated groups in a molecule | numerator further.
제9항에 있어서,
분자 중에 1개 이상의 불포화기(不飽和基)를 가지는 중합성 모노머(重合性 monomer)를 더 함유하는 것을 특징으로 하는 감광성 수지 조성물.
10. The method of claim 9 ,
The photosensitive resin composition containing the polymerizable monomer which has one or more unsaturated groups in a molecule | numerator further.
제10항에 있어서,
분자 중에 1개 이상의 불포화기(不飽和基)를 가지는 중합성 모노머(重合性 monomer)를 더 함유하는 것을 특징으로 하는 감광성 수지 조성물.
The method of claim 10 ,
The photosensitive resin composition containing the polymerizable monomer which has one or more unsaturated groups in a molecule | numerator further.
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