TW201003310A - Photosensitive resin and photosensitive resin composition comprising the same - Google Patents
Photosensitive resin and photosensitive resin composition comprising the same Download PDFInfo
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- TW201003310A TW201003310A TW98109756A TW98109756A TW201003310A TW 201003310 A TW201003310 A TW 201003310A TW 98109756 A TW98109756 A TW 98109756A TW 98109756 A TW98109756 A TW 98109756A TW 201003310 A TW201003310 A TW 201003310A
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F283/00—Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G
- C08F283/06—Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G on to polyethers, polyoxymethylenes or polyacetals
- C08F283/065—Macromolecular compounds obtained by polymerising monomers on to polymers provided for in subclass C08G on to polyethers, polyoxymethylenes or polyacetals on to unsaturated polyethers, polyoxymethylenes or polyacetals
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G63/00—Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
- C08G63/66—Polyesters containing oxygen in the form of ether groups
- C08G63/668—Polyesters containing oxygen in the form of ether groups derived from polycarboxylic acids and polyhydroxy compounds
- C08G63/676—Polyesters containing oxygen in the form of ether groups derived from polycarboxylic acids and polyhydroxy compounds in which at least one of the two components contains aliphatic unsaturation
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G63/00—Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
- C08G63/91—Polymers modified by chemical after-treatment
- C08G63/914—Polymers modified by chemical after-treatment derived from polycarboxylic acids and polyhydroxy compounds
- C08G63/916—Dicarboxylic acids and dihydroxy compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
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- Spectroscopy & Molecular Physics (AREA)
- General Chemical & Material Sciences (AREA)
- Materials For Photolithography (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Polyesters Or Polycarbonates (AREA)
- Macromonomer-Based Addition Polymer (AREA)
Abstract
Description
201003310 六、發明說明: 【發明所屬之技術領域】 本發明係關於一種具有芴骨架之感光性樹脂及使用此 之感光性樹脂組成物,更詳而言之,係有關一種感光性樹 脂組成物,其係具有各種之優異性質,可以低成本容易地 製造之感光性樹脂及利用此之用以調製液晶顯示器或電子 零件等的層間絕緣膜或保護膜(例如彩色濾光片、液晶顯 示元件、積體電路元件、固體攝影元件等所使用之層間絕 緣膜或保護膜)等。 【先前技術】 具有芴骨架之高分子化合物係已知具有高耐熱性、高 透明性、高折射率、低線膨脹率等優異之物性。利用此特 性,於分子中導入自由基聚合性之不飽和鍵構造(乙烯基) 的具有芴骨架之高分子化合物,於光學用被覆劑、硬塗劑 、抗反射膜、眼鏡透鏡、光纖、光導波管、全像術等之光 學材料用途已進行硏究。例如塑膠透鏡材料係已揭示一種 於9,9-雙(4-羥基苯基)芴上使氯化(甲基)丙烯酸反應之化 合物、或於9,9-雙(4-羥基苯基)芴上加成環氧乙烷或環氧 丙烷後,使(甲基)丙烯酸反應之化合物作爲主成分之共聚 物(專利文獻1)。 但,於此專利文獻所揭示之化合物中係分子量低,構 造亦柔軟,難謂具有充分的折射率,且交聯密度低,故有 所謂硬化物強度低之缺點。 -5- 201003310 又,具有芴骨架之高分子化合物係利用其耐熱性、耐 藥品物優之特性,亦適用於液晶彩色濾光片或黑色矩陣、 阻焊劑等之所謂光阻劑(專利文獻2及3 )。 依此等之技術所得到的感光性樹脂係可得到高的交聯 密度,可得到強度、耐熱性、耐藥品性優異之硬化物,但 因於其合成需要非常長時間,故成本高,難謂廣泛普及爲 目前之情況。又,起因於其製造方法而產生著色,故很難 適用於要求透明性之光學零件,難謂充分活用芴骨架之特 性。 (專利文獻1)特開平4-3 2 5 5 0 8公報 (專利文獻2)特許3 673 3 2 1公報 (專利文獻3)特開2007-264433公報 【發明內容】 (發明之揭示) (發明欲解決之課題) 因此,尋求提供一種感光性樹脂,其係可容易地以低 成本製造,容易調整交聯密度或酸價,同時芴骨架本來具 有之具備高耐熱性、高透明性、高折射率及低線膨脹率等 優異之特性者,本發明之課題在於提供一種如此之感光性 樹脂及利用此之感光性樹脂組成物。 (用以解決課題之手段) 有鑑於如此之實情,本發明人等係爲解決上述課題, -6- 201003310 累積專心硏究之結果,發現於特定之具有芴骨架的化合物 與四元酸二酐反應所得到之高分子化合物上,加成特定之 羧酸反應性(甲基)丙烯酸酯化合物所得到之感光性樹脂, 係可以低成本容易地製造,可以高交聯密度得到高的強度 ,同時並顯示高耐熱性、高透明性、高折射率、低線膨脹 率等之優異的特性,終完成本發明。 亦即,本發明之感光性樹脂’其係於以下述通式(丨)所 示之具有芴骨架的化合物、與四元酸二酐反應所得到的高 分子化合物上,加成以下述通式(2)所示之羧酸反應性(甲 基)丙烯酸酯化合物所得到者; 【化6】[Technical Field] The present invention relates to a photosensitive resin having an anthracene skeleton and a photosensitive resin composition using the same, and more particularly, to a photosensitive resin composition, It is a photosensitive resin which can be easily manufactured at low cost, and an interlayer insulating film or a protective film (for example, a color filter, a liquid crystal display element, or a product) for modulating a liquid crystal display or an electronic component or the like. An interlayer insulating film or a protective film used for a bulk circuit element, a solid state imaging device, or the like). [Prior Art] A polymer compound having an anthracene skeleton is known to have excellent physical properties such as high heat resistance, high transparency, high refractive index, and low linear expansion ratio. By using this property, a polymer compound having an anthracene skeleton having a radical polymerizable unsaturated bond structure (vinyl group) introduced into a molecule is used as an optical coating agent, a hard coating agent, an antireflection film, a spectacle lens, an optical fiber, and a light guide. The use of optical materials such as wave tubes and holograms has been studied. For example, plastic lens materials have disclosed a compound which reacts chlorinated (meth)acrylic acid on 9,9-bis(4-hydroxyphenyl)fluorene or 9,9-bis(4-hydroxyphenyl)fluorene. A copolymer obtained by adding a compound reacted with (meth)acrylic acid as a main component after addition of ethylene oxide or propylene oxide (Patent Document 1). However, the compound disclosed in this patent document has a low molecular weight and a soft structure, and it is difficult to provide a sufficient refractive index and a low crosslinking density, so that the strength of the cured product is low. -5-201003310 The polymer compound having a ruthenium skeleton is also suitable for use as a so-called photoresist for liquid crystal color filters, black matrices, solder resists, etc., because of its excellent heat resistance and chemical resistance (Patent Document 2) And 3). The photosensitive resin obtained by such a technique can obtain a high crosslinking density, and can obtain a cured product excellent in strength, heat resistance, and chemical resistance. However, since it takes a long time to synthesize it, the cost is high and it is difficult. It is said that it is widely used as the current situation. Further, since the coloring is caused by the manufacturing method, it is difficult to apply it to an optical component requiring transparency, and it is difficult to fully utilize the characteristics of the skeleton. (Patent Document 1) Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. 2007-264433 (Patent Document 3) (Invention) (Invention) Problem to be Solved Therefore, it is sought to provide a photosensitive resin which can be easily produced at low cost, and it is easy to adjust the crosslinking density or the acid value, and the skeleton has high heat resistance, high transparency, and high refractive index. An object of the present invention is to provide such a photosensitive resin and a photosensitive resin composition using the same, which are excellent in characteristics such as a low linear expansion ratio. (Means for Solving the Problem) In view of the facts, the inventors of the present invention have solved the above-mentioned problems, and the results of the intensive investigation of -6-201003310 have been found in specific compounds having an anthracene skeleton and tetrabasic acid dianhydride. The photosensitive resin obtained by adding a specific carboxylic acid-reactive (meth) acrylate compound to the polymer compound obtained by the reaction can be easily produced at a low cost, and can have high strength at a high crosslinking density. The present invention has been completed by exhibiting excellent characteristics such as high heat resistance, high transparency, high refractive index, and low linear expansion ratio. In other words, the photosensitive resin of the present invention is a compound obtained by reacting a compound having an anthracene skeleton represented by the following formula (丨) with a tetrabasic acid dianhydride, and is added to the following formula. (2) A carboxylic acid-reactive (meth) acrylate compound as shown; (Chemical 6)
(式中’環Z1及環Z2表示單環式或縮合多環式烴環,Rh 及Rlb表示氫原子或取代基,尺23及R2b表示氫原子以外之 取代基,1133及R3b表示氫原子或甲基,kl及k2表示同一 或相異之〇~4的整數,ml及m2表示同—或相異之〇〜3的 整數’ nl及n2表示同一或相異之〇〜1〇的整數,pi及p2 表不同一或相異之0〜4的整數,但,環z1及環Z2爲單環 式烴環時’ pi及P2爲1〜3 ’環Z1及環Z2爲縮合多環式 烴環時,含於環Z1之p 1的和及含於環Z2之p2的和分別 201003310 爲1以上) (式中 之基) C化7】(wherein ring Z1 and ring Z2 represent a monocyclic or condensed polycyclic hydrocarbon ring, Rh and Rlb represent a hydrogen atom or a substituent, and feet 23 and R2b represent a substituent other than a hydrogen atom, and 1133 and R3b represent a hydrogen atom or Methyl, kl and k2 represent integers of the same or different 〇~4, and ml and m2 represent the same-or different 整数~3 integers 'nl and n2 represent integers of the same or different 〇~1〇, Pi and p2 are different from each other or from 0 to 4 integers. However, when ring z1 and ring Z2 are monocyclic hydrocarbon rings, 'pi and P2 are 1 to 3'. Ring Z1 and ring Z2 are condensed polycyclic hydrocarbons. In the ring, the sum of p 1 contained in the ring Z1 and the sum p2 contained in the ring Z2 are 1 or more of 201003310 respectively (base in the formula) C 7]
⑵ R5表示以下述通式(5)所示 【化8】 -C2H4〇j~^C3H6〇- C4H8i ⑸ (式中,q、r、s分別獨立地表示〇〜9之整數,但,q、r、s 不同時爲0)。 本發明之感光性樹脂,其特徵在於:含有上述感光性 樹脂、與光聚合起始劑及/或光增感劑。 [發明之效果] 本發明之感光性樹脂係保存安定性高,可以低成本容 易地製造,生產性亦優,具有高耐熱性、高透明性、高折 射率及低線膨脹率等優異之特性者。又,使用此感光性_ 脂之本發明的感光性樹脂組成物係可得到感度高且強g胃 優之硬化物。 -8- 201003310 [用以實施本發明之最佳形態] 構成本發明之感光性樹脂之高分子化合物,其係使以 下述通式(1)所示之具有芴骨架的化合物及後述之四元酸二 酐反應所得到者。 【化9】(2) R5 is represented by the following general formula (5): -C2H4〇j~^C3H6〇-C4H8i (5) (wherein q, r, and s independently represent integers of 〇~9, respectively, q, r, s are not 0) at the same time. The photosensitive resin of the present invention contains the photosensitive resin, a photopolymerization initiator, and/or a photosensitizer. [Effects of the Invention] The photosensitive resin of the present invention has high storage stability, can be easily produced at low cost, and has excellent productivity, and has excellent properties such as high heat resistance, high transparency, high refractive index, and low linear expansion ratio. By. Further, the photosensitive resin composition of the present invention using the photosensitive resin can obtain a cured product having high sensitivity and strong g-stomach. -8-201003310 [Best Mode for Carrying Out the Invention] The polymer compound constituting the photosensitive resin of the present invention is a compound having an anthracene skeleton represented by the following formula (1) and a quaternary compound described later. The acid dianhydride reaction is obtained. 【化9】
(式中,環Z1及環Z2表示單環式或縮合多環式烴環,Rla 及尺115表示氫原子或取代基,1123及R2b表示氫原子以外之 取代基,R3a及R3b表示氫原子或甲基,kl及k2表示同一 或相異之0〜4的整數’ ml及m2表示同一或相異之〇〜3的 整數,nl及n2表示同一或相異之〇〜10的整數,pi及p2 表不同一或相異之0〜4的整數’但,環z1及環Z2爲單環 式烴環時’ pi及p2爲1~3’環Z1及環Z2爲縮合多環式 烴環時,含於環Z1之p丨的和及含於環z2之p2的和分別 爲1以上) 在上述式(1)中’對應於以環Z1及環Z2所示之烴環的 烴’爲單環式或縮合多環式者’可舉例如苯等之單環式烴 、縮合二環式烴(例如茚、萘等之cs〜u縮合二環式烴,宜 爲C^-!6縮合二環式烴)、縮合三環式烴(蒽、菲等)等之縮 合2乃至4環式烴等。尤其在要求高的折射率、耐熱性之 -9- 201003310 用途中較佳的烴’可舉例如縮合多環式芳香族烴(萘、意 等),尤宜爲萘。又’尤其要求高的溶解性、相溶性及低 溶液黏度之用途中宜爲苯。又’環Z1及環Z2分別爲同一 或相異之環,一般’亦可爲相同之環。 又,在上述式(1)中,以Rla及Rlb所示之取代基’並 無特別限定’但一般爲院基。院基可例不甲基、乙基、丙 基、異丙基、丁基、第三丁基等之Cl-6烷基(C丨-4烷基’ 尤其甲基)等。基1113及Rlb亦可互異,亦可爲相同。又’ kl(或k2)爲2以上時,基Rla(或Rlb)在同一的苯環中’可 爲相異,亦可爲相同。又,對於構成芴骨架之苯環的基 Rla(或Rlb)之結合位置(取代位置)並無特別限制定。較佳 之取代數kl及k2或0或1,尤其爲0。又,取代數kl及 k2可爲相異,但一般爲同一。 取代成環Z1及環Z2之取代基R2a及R2b可舉例如烷 基(甲基、乙基、丙基、異丙基、丁基、第二丁基、第三 丁基等之Cbn烷基,宜爲Cl_8烷基、更宜爲Cl-6烷基等) 、環院基(環戊基、環己基等之c5_1C)環烷基、宜爲C5.8環 院基、更宜爲c5.6環烷基等)、芳基(苯基、烷基苯基(甲 基苯基(甲苯基)、二甲基苯基(二甲苯基)等)等之 Cm芳 基、宜爲C6.9芳基、尤宜苯基等)、芳烷基(苯甲基、苯乙 基等之C6_1()芳基_Cl4烷基等)等之烴基;烷氧基(甲氧基 等之C!-4烷氧基等);醯基(乙醯基等之Cl_6醯基等);烷 氧基親基(甲氧基羰基等之C14烷氧基羰基等);鹵原子( 氣原子、氯原子等);硝基;氰基等。 -10- 201003310 較佳之取代基R2a(或R2»)係烷基(Ci.6烷基)、環烷基 (C5-8環烷基)、芳基(C6-1G芳基)、芳烷基(c6-8_Ci_2烷基) ,尤其,宜爲Cm烷基、Cl·4烷氧基、C6_8芳基。取代基 R2a(或R2b)可單獨或組合2種以上而取代成苯環。又,基 R2a及R2b亦可互相相同或相異,但一般爲同—。又,ml( 或m2)爲2以上時’基R2a(或R2b)在同一的烴環中,可爲 相異,亦可爲同一。 又’取代基R2a(或R2b)之取代位置並無特別限定,而 依照經基或經基(聚)院撐基氧基(以下,有時總稱爲含有經 基之基)的取代位置’可於構成酚骨架之苯基的2〜6位(例 如,2位、5位、2,5 -位等)取代。 取代基R2a及R2b之取代數ml及m2係亦依含有羥基 之基的取代數’但宜爲0〜2 ’更宜爲0〜1(尤其0)。又,取 代數ml及m2亦可爲相異,但一般常爲相同。 以含有羥基之基的1133及R3b所示的取代基爲氫或甲 基。又,R3a及R3b可互相同一亦可相異,但—般爲同— 〇 (聚)院撐基氧基的加成數nl及n2係同一或相異,可 從0〜10之範圍選擇,宜爲0〜8(例如1〜8),更宜爲〇〜6(例 如1〜6),尤宜爲〇~4(例如1〜4)左右。又,nl與n2之和 (nl+n2),可從0〜20之範圍選擇,宜爲〇〜16(例如2M2), 更宜爲0〜12(例如2〜12)’尤宜爲〇~8(例如2〜8)左右。又 ,nl (或n2)爲2以上時’(聚)烷撐基氧基係亦可以同一之 烷氧基所構成,亦可異種的烷氧基(例如乙氧基與環氧丙 -11 - 201003310 烷基)混在一起而構成,但一般常以同一之院氧基所構成 0 含有羥基之基的取代數pi及P2爲0〜4之範圍’宜爲 1~4,尤宜爲1~2。但,環Z1及環Z2爲單環式烴環時,Pi 及?2爲1~3,環Z1及環Z2爲縮合多環式烴時’含於環 Z1之p 1的和及含於環Z2之p2的和分別爲1以上。又’ pi與ρ2之和(pl+p2)宜爲2〜8’更宜爲2〜4。尤其硬化物 之交聯密度要求之用途中Pi及P2宜爲2乃至3°又’取 代數pl及p2亦可爲相異’但一般常爲同一。含有經基之 基之取代位置並無特別限定’而依照pl(或P2)之數目,可 從芴之9位取代的苯基之2〜6位選擇’ Pi (或P2)爲2時’ 例如亦可爲3,4 -位、3,5-位等。一個之含有羥基之基一般 亦可於4位取代。 又,構成同一之酚骨架的複數含有羥基之基係可爲同 一,亦可爲相異。例如,複數之含有經基之基係(i)可以 nl=0(n2 = 0)之羥基單獨(但,pl及P2爲2時除外)構成, (ii)亦可以nl = 0(n2 = 0)之羥基與nl # 〇(n2尹0)之羥基(聚) 烷氧基(2-羥基乙氧基等)構成’(⑴)可以nl矣〇(n2夫0)之 同一的羥基(聚)烷氧基單獨構成’(iv)亦可以nl#0(n2# 0)之相異的羥基(聚)烷氧基[例如’ 2-羥基乙氧基與2-(2-羥基乙氧基)乙氧基]構成。 在上述通式(1)之具有芴骨架的化合物中’要求特別高 的折射率、耐熱性之用途中,宜爲以下述通式(3)所示之構 造者。 -12- 201003310 【化1 0】(wherein, ring Z1 and ring Z2 represent a monocyclic or condensed polycyclic hydrocarbon ring, Rla and ruler 115 represent a hydrogen atom or a substituent, 1123 and R2b represent a substituent other than a hydrogen atom, and R3a and R3b represent a hydrogen atom or Methyl, kl and k2 represent the same or different integers of 0 to 4 'ml and m2 represent integers of the same or different 〇~3, nl and n2 represent integers of the same or different 〇~10, pi and P2 is a different or different integer of 0 to 4'. However, when ring z1 and ring Z2 are monocyclic hydrocarbon rings, 'pi and p2 are 1 to 3' ring Z1 and ring Z2 is a condensed polycyclic hydrocarbon ring. The sum of p丨 contained in the ring Z1 and the sum p2 contained in the ring z2 are respectively 1 or more) In the above formula (1), 'the hydrocarbon corresponding to the hydrocarbon ring represented by the ring Z1 and the ring Z2' is a single The cyclic or condensed polycyclic type may be, for example, a monocyclic hydrocarbon such as benzene or a condensed bicyclic hydrocarbon (for example, a cs~u condensed bicyclic hydrocarbon such as anthracene or naphthalene, preferably a C^-!6 condensation II) A condensation 2 or a 4-ring hydrocarbon such as a cyclic hydrocarbon or a condensed tricyclic hydrocarbon (fluorene, phenanthrene or the like). Particularly preferred hydrocarbons for use in applications requiring high refractive index and heat resistance -9-201003310 include, for example, condensed polycyclic aromatic hydrocarbons (naphthalene, and the like), and particularly preferably naphthalene. Further, it is preferable to use benzene in applications where high solubility, compatibility, and low solution viscosity are required. Further, the ring Z1 and the ring Z2 are the same or different rings, and generally may be the same ring. Further, in the above formula (1), the substituents represented by Rla and Rlb are not particularly limited, but are generally a hospital base. The group may be a Cl-6 alkyl group (C丨-4 alkyl group, especially methyl group) such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group or a tert-butyl group. The bases 1113 and Rlb may also be different or may be the same. Further, when k1 (or k2) is 2 or more, the radicals Rla (or Rlb) may be different in the same benzene ring, or may be the same. Further, the bonding position (substitution position) of the group Rla (or Rbb) constituting the benzene ring of the anthracene skeleton is not particularly limited. Preferably, the substitution numbers kl and k2 or 0 or 1, especially 0. Further, the substitution numbers kl and k2 may be different, but are generally the same. The substituents R2a and R2b substituted with the ring Z1 and the ring Z2 may, for example, be a Cbn alkyl group such as an alkyl group (methyl group, ethyl group, propyl group, isopropyl group, butyl group, second butyl group or tert-butyl group). Preferably, it is a Cl_8 alkyl group, more preferably a Cl-6 alkyl group, etc., a cycloalkyl group (cyclopentyl group, cyclohexyl group or the like, c5_1C) cycloalkyl group, preferably a C5.8 ring courtyard group, more preferably c5.6. a Cm aryl group such as a cycloalkyl group or the like, an aryl group (phenyl group, alkylphenyl group (methylphenyl (tolyl), dimethylphenyl (xylyl), etc.), preferably C6.9 aryl a hydrocarbon group such as a aryl group (such as a C6_1()aryl-Cl4 alkyl group such as a benzyl group or a phenethyl group; or an alkoxy group (such as a methoxy group; Alkoxy group, etc.; fluorenyl group (such as a sulfonyl group or the like); an alkoxy group (such as a C14 alkoxycarbonyl group such as a methoxycarbonyl group); a halogen atom (a gas atom, a chlorine atom, etc.) Nitro; cyano group. -10-201003310 Preferred substituents R2a (or R2») are alkyl (Ci.6 alkyl), cycloalkyl (C5-8 cycloalkyl), aryl (C6-1G aryl), aralkyl (c6-8_Ci_2 alkyl), in particular, is preferably Cm alkyl, Cl. 4 alkoxy, C6_8 aryl. The substituent R2a (or R2b) may be substituted with two or more kinds alone or in combination of a benzene ring. Further, the radicals R2a and R2b may be the same or different from each other, but are generally the same. Further, when ml (or m2) is 2 or more, the base R2a (or R2b) may be different or may be the same in the same hydrocarbon ring. Further, the position of substitution of the substituent R2a (or R2b) is not particularly limited, and may be in accordance with a substitution position of a thiol group or a thiol group (hereinafter, collectively referred to as a group having a radical group). It is substituted at positions 2 to 6 (for example, 2-position, 5-position, 2, 5-position, etc.) of the phenyl group constituting the phenol skeleton. The number of substitutions ml and m2 of the substituents R2a and R2b are also preferably 0 to 2 (especially 0) depending on the number of substitutions of the hydroxyl group-containing group. Also, algebras ml and m2 may be different, but are generally the same. The substituent represented by 1133 and R3b having a hydroxyl group is hydrogen or a methyl group. Moreover, R3a and R3b may be the same or different from each other, but generally the same - the number of additions of 〇 (poly) siloxanes nl and n2 are the same or different, and may be selected from the range of 0 to 10, preferably It is 0 to 8 (for example, 1 to 8), more preferably 〇~6 (for example, 1 to 6), and particularly preferably 〇~4 (for example, 1 to 4). Moreover, the sum of nl and n2 (nl+n2) can be selected from the range of 0 to 20, preferably 〇~16 (for example, 2M2), more preferably 0~12 (for example, 2~12), especially 〇~ 8 (for example, 2 to 8) or so. Further, when nl (or n2) is 2 or more, the '(poly)alkyleneoxy group may be composed of the same alkoxy group, or a different alkoxy group (for example, ethoxy group and epoxidized propen-11). 201003310 Alkyl) is a mixture of the same, but generally consists of the same oxy group. The number of substitutions pi and P2 of the hydroxyl group are in the range of 0 to 4, preferably 1 to 4, and particularly preferably 1 to 2. . However, when ring Z1 and ring Z2 are monocyclic hydrocarbon rings, Pi and ? 2 is 1 to 3, and when ring Z1 and ring Z2 are condensed polycyclic hydrocarbons, the sum of p 1 contained in ring Z1 and p2 contained in ring Z2 are 1 or more, respectively. Further, the sum of pi and ρ2 (pl + p2) is preferably 2 to 8', more preferably 2 to 4. In particular, in the use of the crosslink density of the cured product, Pi and P2 are preferably 2 or 3° and the algebras pl and p2 may be different but generally the same. The position of substitution containing a radical group is not particularly limited, and according to the number of pl (or P2), when 'Pi (or P2) is 2 from the 2 to 6 positions of the phenyl group substituted at the 9-position of the oxime, for example, It can also be 3, 4 - bit, 3, 5 - bit, etc. A group containing a hydroxyl group can also be substituted at the 4-position. Further, the plurality of hydroxyl group-containing groups constituting the same phenol skeleton may be the same or different. For example, a complex group containing a radical group (i) may have a hydroxyl group of nl=0 (n2 = 0) alone (except when pl and P2 are 2), and (ii) nl = 0 (n2 = 0). The hydroxyl group of nl # 〇(n2 尹0) hydroxy (poly) alkoxy (2-hydroxyethoxy group, etc.) constitutes '(1)) hydroxy (poly) which can be the same as nl矣〇(n2fu0) The alkoxy group alone constitutes '(iv) may also be a different hydroxy (poly)alkoxy group of nl#0(n2# 0) [eg '2-hydroxyethoxy group and 2-(2-hydroxyethoxy group) Ethoxylated]. In the use of the compound having an anthracene skeleton of the above formula (1), which is required to have a particularly high refractive index and heat resistance, it is preferred to be a structure represented by the following formula (3). -12- 201003310 【化1 0】
(式中,Rla及Rlb表示氫原子或取代基,R2a、R2b R6b表示氫原子以外之取代基,R3a及R3b表示氫H 基,kl及k2表示同一或相異之〇〜4的整數’ m m3及m4表示同一或相異之〇〜3的整數,nl、n2 n4表示同一或相異之〇〜i〇的整數,pi及p2表另 相異之1〜4的整數,P3及P4表示同一或相異之( 數)。 尺13及 Rlb、1123及 R2b、1132及 R3b、kl 及 k2 m2、nl及n2係與前述相同。又,1163及R6b係雙 述R2a及R2b、m3及m4係對應於前述ml及m2、 係對應於前述nl及n2,具有相同的意義。Pi及 前述相同,但宜爲1〜4。p3及P4係與前述P1及 ’宜爲0〜3。 具體上,可舉例如9,9 -雙(羥基院氧基萘基 9,9 -雙(羥基聚烷氧基萘基)芴類等之前述通 ?1+卩2 + ?3+?4爲2之化合物;9,9-雙(聚羥基烷氧 荀類、9,9-雙(聚羥基聚烷氧基萘基)芴類等之前述 、R6a 及 民子或甲 1、m2、 丨、n3及 民同一或 >〜3的整 、ml及 Ϊ應於前 n3 及 n4 p2係與 p2對應 )芴類、 式(3)中 基萘基) 通式(3) -13- 201003310 中pl+p2 + p3+p4爲2之化合物等。 9,9 -雙(羥基烷氧基萘基)芴類方面,可舉例如9,9 -雙( 羥基烷氧基萘基)芴[例如9,9-雙[6-(2-羥基乙氧基)-2-萘基 ]芴、9,9-雙[6-(2-羥基丙氧基)-2-萘基]芴、9,9-雙[5-(2-羥 基乙氧基)-卜萘基]芴、9,9-雙[5-(2-羥基丙氧基)-1-萘基] 芴等之9,9-雙(羥基C2_4烷氧基萘基)芴等]等。 9,9_雙(羥基聚烷氧基萘基)芴類方面,可舉例如9,9-雙(羥基二烷氧基萘基)芴[例如9,9·雙[6-(2-(2-羥基乙氧基 )乙氧基)-2-萘基]芴、9,9-雙[6-(2-(2-羥基丙氧基)丙氧基)-2-萘基]芴、9,9-雙[5-(2-(2-羥基乙氧基)乙氧基)-1_萘基]芴 、9,9-雙[5-(2-(2-羥基丙氧基)丙氧基)-1_萘基]芴等之9,9_ 雙(羥基C2-4烷氧基萘基)芴等]等之9,9-雙(羥基二烷氧基 察基)勿類,ίέί應於此寺之化合物’在目II述通式(3 )中,η 1 、η2、η3、η4爲3以上之化合物等。 9,9-雙(聚羥基烷氧基萘基)芴類方面,可舉例如對應 於前述9,9-雙(羥基烷氧基萘基)芴類,1)1+1)243+?4爲2 以上之化合物,可舉例如9,9 --雙(二或三羥基烷氧基萘 基)芴[例如9,9-雙[二(2-羥基乙氧基)-2-萘基]芴、9,9-雙[ 二(2-羥基丙氧基)-2-萘基]芴等之9,9-雙(二或三羥基C2_4 烷氧基萘基)芴等]等之9,9-雙(聚羥基烷氧基萘基)芴。 9,9-雙(聚羥基聚烷氧基萘基)芴類方面,可舉例如對 應於前述9,9-雙(羥基烷氧基萘基)芴類,111、112、113、114 爲2以上且pl+p2 + p3+p4爲2以上之化合物,可舉例如 9,9 -雙(二或三羥基二烷氧基萘基)芴[例如 9,9-雙[二[2- -14- 201003310 (2-經基乙氧基)乙氧基]-2-萘基]苟等之9,9-雙(二或三經基 二C2_4烷氧基萘基)芴等]等之9,9-(二或三羥基二烷氧基萘 基)芴類;對應於此等之化合物,在前述式(化3)中,ni、 n2、n3、n4爲3以上之化合物等。 此等之中’宜爲9,9-雙[6-(2-羥基乙氧基)-2-萘基]芴 等。 在上述通式(1)之具有芴骨架的化合物中,要求特別高 的溶解性、相溶性及低溶液黏度之用途中,宜爲以下述通 式(4)所示之構造者。 【化1 1】(wherein Rla and Rlb represent a hydrogen atom or a substituent, R2a, R2b R6b represent a substituent other than a hydrogen atom, R3a and R3b represent a hydrogen H group, and kl and k2 represent the same or different integers of 〇~4' m M3 and m4 represent integers of the same or different 〇~3, nl, n2 n4 represent integers of the same or different 〇~i〇, pi and p2 are different from each other by an integer of 1 to 4, and P3 and P4 represent The same or different (number). Rule 13 and Rlb, 1123 and R2b, 1132 and R3b, kl and k2 m2, nl and n2 are the same as above. Further, 1163 and R6b are double R2a and R2b, m3 and m4. Corresponding to the above ml and m2, corresponding to the above nl and n2, have the same meaning. Pi is the same as above, but preferably is 1 to 4. The p3 and P4 systems and the above P1 and 'are preferably 0 to 3. For example, 9,9-bis(hydroxyl-oxynaphthyl 9,9-bis(hydroxypolyalkoxynaphthyl) anthracene or the like can be used as the above-mentioned 1+卩2 + ?3+?4 is 2 a compound; 9,9-bis (polyhydroxy alkoxypurine, 9,9-bis(polyhydroxy polyalkoxynaphthyl) anthracene, etc., R6a and Minzi or A1, m2, 丨, n3 and the people The same or >~3 of the whole, ml and Ϊ should be before N3 and n4 p2 correspond to p2) anthracene, phenylnaphthyl in formula (3), and pl+p2 + p3+p4 are compounds of 2, etc. 9,9 - double (in the formula (3) -13- 201003310 The hydroxyalkoxynaphthyl) oxime may, for example, be 9,9-bis(hydroxyalkoxynaphthyl)anthracene [e.g., 9,9-bis[6-(2-hydroxyethoxy)-2-naphthalene] ,芴,9,9-bis[6-(2-hydroxypropoxy)-2-naphthyl]anthracene, 9,9-bis[5-(2-hydroxyethoxy)-buphthyl]anthracene, 9 9,9-bis[5-(2-hydroxypropoxy)-1-naphthyl]anthracene, etc. 9,9-bis(hydroxy C2_4alkoxynaphthyl)anthracene, etc. 9,9_bis(hydroxyl The polyalkoxynaphthyl) oxime may, for example, be 9,9-bis(hydroxydialkoxynaphthyl)anthracene [e.g., 9,9 bis[6-(2-(2-hydroxyethoxy))] Ethoxy)-2-naphthyl]anthracene, 9,9-bis[6-(2-(2-hydroxypropoxy)propoxy)-2-naphthyl]anthracene, 9,9-bis[5 -(2-(2-hydroxyethoxy)ethoxy)-1_naphthyl]anthracene, 9,9-bis[5-(2-(2-hydroxypropoxy)propoxy)-1_ 9,9-bis(hydroxydialkyloxychalyl), such as naphthyl]anthracene, etc., 9,9-bis(hydroxydialkoxy-based), ίέί 'In the general term II In the case of (3), η 1 , η 2 , η 3 , and η 4 are compounds of 3 or more. Examples of the 9,9-bis (polyhydroxyalkoxynaphthyl) anthracene include, for example, the aforementioned 9,9-bis ( a hydroxyalkoxynaphthyl)anthracene, 1)1+1)243+?4 is a compound of 2 or more, and examples thereof include 9,9-bis(di or trihydroxyalkoxynaphthyl)anthracene [for example, 9 9,9-bis[bis(2-hydroxyethoxy)-2-naphthyl]anthracene, 9,9-bis[bis(2-hydroxypropoxy)-2-naphthyl]anthracene 9,9- 9,9-bis(polyhydroxyalkoxynaphthyl)anthracene such as bis(di or trihydroxy C2_4 alkoxynaphthyl) anthracene or the like. Examples of the 9,9-bis(polyhydroxy polyalkoxynaphthyl) anthracene include, for example, the above-mentioned 9,9-bis(hydroxyalkoxynaphthalenyl) anthracene, and 111, 112, 113, and 114 are 2 The above compound in which pl+p2 + p3+p4 is 2 or more may, for example, be 9,9-bis(di or trihydroxydialkoxynaphthyl)anthracene [e.g., 9,9-bis[di[2- -14] - 201003310 9,2-bis(di- or tri-based di-C2_4 alkoxynaphthyl) anthracene, etc., of 2-(transethylethoxy)ethoxy]-2-naphthyl]anthracene, etc. In the above formula (Chemical Formula 3), ni, n2, n3, and n4 are compounds of 3 or more, etc., in the above formula (Chemical Formula 3). Among these, '9,9-bis[6-(2-hydroxyethoxy)-2-naphthyl]anthracene or the like is preferable. Among the compounds having an anthracene skeleton of the above formula (1), those having a particularly high solubility, compatibility, and low solution viscosity are preferably those having the structure shown by the following formula (4). [1 1]
(式中,Rla及Rlb表示氫原子或取代基,R2a、R2b、R7a及 R7b表示氫原子以外之取代基’ R3a及R3b表示氫原子或甲 基,kl及k2表示同一或相異之〇〜4的整數,nl及n2表 示同一或相異之〇~1〇的整數’ P1及P2表示同一或相異之 1 ~3的整數)。 1113及 Rlb、112!1及 R2b、R3a& R3b、kl 及 k2、ml 及 m2、nl及n2係與前述相同。又’ R7a及R7b係對應於前 述R3a及R3b,具有相同的意義。Pi及P2係與前述相同, 宜爲1~3。 -15- 201003310 以代表性的前述式(4)所示之化合物係含有9,9 -雙(羥 基烷氧基苯基)芴類(在前述通式(4)中nl=n2 = l之化合物) 、9,9 -雙(羥基聚烷氧基二烷基苯基)芴類(在前述通式(4) 中nl、n2分別爲1以上之化合物)等。 9.9- 雙(羥基烷氧基苯基)芴類中例如9,9-雙(經基院氧 基苯基)芴類{例如,9,9-雙[4-(2-羥基乙氧基)苯基]荀、 9.9- 雙[4-(2-羥基丙氧基)苯基]芴、9,9-雙[4_(2_羥基乙氧 基)-3 -甲基苯基]芴、9,9-雙[4-(2 -羥基丙氧基)_3_甲基苯基 ]芴、9,9-雙[4-(2-羥基乙氧基)-3,5-二甲基苯基]窃、9,9_雙 [4-(2-羥基乙氧基)苯氧基乙烷]芴、9,9-雙[4_(2_經基丙氧 基)苯氧基乙烷]芴、9,9-雙[4-(2-羥基乙氧基)_3_甲基苯基] 芴、9,9-雙[4-(2-羥基丙氧基)-3-甲基苯基]芴、9,9·雙[4-(2 -羥基乙氧基)-2,5 -二甲基苯基]芴、9,9 -雙[4·(2·羥基丙 氧基)-2,5-二甲基苯基]芴、9,9-雙[4-(2-羥基乙氧基)_3,6-二甲基苯基]芴、9,9-雙[4-(2-羥基丙氧基)-2,6-二甲基苯基 ]芴、9,9-雙[4-(2-羥基乙氧基)-2,4-二甲基苯基]荀、9,9·雙 [3-(2-羥基丙氧基)-2,4-二甲基苯基]芴、9,9-雙[4-(2-經基 乙氧基)-3,4-二甲基苯基]芴、9,9 -雙[2-(2•羥基丙氧基)_ 3,4-二甲基苯基]芴等之9,9 -雙(羥基烷氧基烷基苯基)荀、 較佳係含有9,9-雙(2_羥基丙氧基-二(^_4烷基苯基)荀等之 9.9- 雙(羥基分枝(:3-4烷氧基-二烷基苯基)芴類}° 9.9- 雙(羥基聚烷氧基苯基)芴類中係η 1、n2爲2以上 之化合物例如9,9_雙(羥基二烷氧基苯基)芴類{例如’ 9,9_ 雙[4-(2-羥基二乙氧基)苯基]芴、9,9 -雙[4-(2 -經基二丙氧 -16- 201003310 基)苯基]芴、9,9-雙[4-(2-羥基二乙氧基)-3-甲基苯基]芴、 9.9- 雙[4-(2-羥基二丙氧基)-3-甲基苯基]芴、9,9-雙[4-(2-羥基二乙氧基)-3,5-二甲基苯基]芴、9,9-雙[4-(2-羥基二乙 氧基)苯氧基乙醇]芴、9,9-雙[4-(2-羥基二丙氧基)苯氧基 乙醇]芴、9,9-雙[4-(2-羥基二乙氧基)-3-甲基苯基]芴、 9.9- 雙[4-(2-羥基二丙氧基)-3-甲基苯基]芴、9,9-雙[4-(2-羥基二乙氧基)-2,5-二甲基苯基]芴、9,9-雙[4-(2-羥基二丙 氧基)-2,5-二甲基苯基]芴、9,9-雙[4-(2-羥基二乙氧基)-3,6-二甲基苯基]芴、9,9-雙[4-(2-羥基二丙氧基)-2,6-二甲 基苯基]芴、9,9-雙[4-(2-羥基二乙氧基)-2,4-二甲基苯基] 芴、9,9-雙[3-(2-羥基二丙氧基)-2,4-二甲基苯基]芴、9,9-雙[4-(2-羥基二乙氧基)-3,4-二甲基苯基]芴、9,9-雙[2-(2-羥基二丙氧基)-3,4-二甲基苯基]芴等之9,9-雙(羥基二烷氧 基苯基)芴}。 此等之中宜爲9,9-雙(羥基乙氧基苯基)芴' 9,9-雙(羥 基乙氧基-3-甲基苯基)芴、9,9-雙(羥基乙氧基-3,5-二甲基 苯基)芴、9,9_雙(羥基乙氧基-2-苯氧基乙醇)芴等。 構成本發明之感光性樹脂的以前述通式(1)所示之具有 芴骨架的化合物,要求特別高的折射率、溶解性、相溶性 及低溶液黏度之用途中,宜R2a及R2b爲苯基。 具體上,例如在以前述通式(4)所示之化合物中包含 9,9-雙(羥基烷氧基芳基苯基)芴類(在前述通式(4)中 nl=n2 = l,R2a、R2b爲苯基之化合物)、9,9-雙(羥基聚烷氧 基芳基苯基)芴類(在前述通式(4)中nl+n2爲2以上,R2a -17- 201003310 、R2b爲苯基之化合物)。 9,9-雙(羥基烷氧基芳基苯基)芴類係含有9,9-雙[4-(2-羥基乙氧基)-3-苯基苯基]芴、9-雙[4-(2-羥基丙氧基)-3-苯 基苯基]芴、9,9-雙[4-(2-羥基丙氧基)-3-甲苯基苯基]芴等 之9,9-雙(羥基烷氧基芳基苯基)芴、較佳係含有9,9-雙(2--羥基乙氧基芳基苯基)芴]等。 9,9-雙(羥基聚烷氧基芳基苯基)芴類係含有9,9 -雙( 羥基二烷氧基芳基苯基)芴類[例如9,9-雙{4-[2-(2-羥基乙 氧基)乙氧基]-3-苯基苯基}芴等之9,9-雙(羥基二烷氧基芳 基苯基)芴、較佳係含有9,9-雙[2-(2-羥基乙氧基)乙氧基芳 基苯基]芴]等。 此等之中宜爲9,9-雙(羥基乙氧基芳基苯基)芴等。 就與上述具有芴骨架之化合物反應的化合物而言,可 使用四元酸二酐。 四元酸二酐具體上係可例示丁烷四羧酸二酐、戊院四 羧酸二酐、己烷四羧酸二酐、環丁烷四羧酸二酐、環戊烷 四羧酸二酐、環己烷四羧酸二酐、環庚烷四羧酸二酐、降 冰片烷四羧酸二酐、均苯四甲酸二酐、二苯甲酮四羧酸二 酐、聯苯基四羧酸二酐、聯苯基醚四羧酸二酐、5_(2,5_二 氧四氫-3 -呋喃基)-3 -甲基-3 -環己烯-1,2 -二羧酸酐、4-(2,5 -二氧四氫呋喃-3-基)-1,2,3,4-四氫萘-1,2-二羧酸酐、 萘-1,4,5,8-四羧酸二酐、4,4,-(六氟異亞丙基)二酞酸酐、 3,4,9,10-茈四羧酸二酐、3,3’-4,4’-二苯基颯四羧酸二酐等 ’可使用此等之1種或2種以上。此等之中宜爲均苯四甲 -18- 201003310 酸二酐、5-(2,5-二氧四氫-3-呋喃基)-3-甲基-3-環己烯- 1,2-二羧酸酐、二苯甲酮四羧酸二酐、聯苯基四羧酸二酐 〇 可得到於上述具有芴骨架之化合物上使四元酸二酐加 成反應而構成本發明之感光性樹脂的高分子化合物。在此 加成反應中之四元酸二酐對具有芴骨架之化合物1莫耳之 比率宜爲0.5莫耳〜1.5莫耳,更宜爲〇·65莫耳〜1·25莫耳 。四元酸二酐之比例未達0.5莫耳及超過1.5莫耳時,有 時無法得到充分的分子量。 當具有芴骨架之化合物與四元酸二酐之加成反應時亦 可用觸媒。所使用之觸媒只要爲可促進反應即可,無特別 限制,但就一例而言係可舉例如吡啶、喹啉、咪唑、Ν,Ν-二甲基環己基胺、三乙胺、Ν-甲基嗎啉、Ν-乙基嗎啉、三 乙二胺、Ν,Ν-二甲基苯胺、Ν,Ν-二甲基苯甲基胺、三 (Ν,Ν-二甲基胺基甲基)酚、4-二甲基胺基吡啶、1,8-二偶 氮雙環[5.4.0]-7-十一碳烯、1,5-二偶氮雙環[4.3.0]壬烯_5 等之胺類、氯化四甲基銨、溴化四甲基銨、氯化三甲基苯 甲基銨、氫氧化四甲基銨等之第4級銨化合物、三丁基磷 、三苯基磷等及其等之混合物。又,所使用之觸媒的量亦 無特別限定,但相對於具有芴骨架之化合物及四元酸二酐 之合計100質量份宜爲0.1~2.0質量份的範圍。若觸媒之 量超過2.0質量份,有時對感光性樹脂之電特性或保存安 定性出現不良影響。 又,加成反應時係就反應原料之溶解 '黏度降低等之 -19- 201003310 目的,亦可使用溶劑。溶劑之種類只要不阻礙反應即可, 無特別限制,但就一例而言係可舉例如乙二醇二乙基酸、 二乙二醇二甲基醚等之甘醇醚類、乙二醇單乙基醚乙酸醋 、二乙二醇單乙基醚乙酸酯、二乙二醇單丁基醚乙酸酯等 之甘醇醚乙酸酯類、二丙二醇單乙基醚、丙二醇二甲基魅 、二丙二醇二甲基醚、丙二醇二乙基醚、二丙二醇二乙基 醚等之丙二醇醚類、丙二醇單甲基醚乙酸酯、丙二醇單乙 基醚乙酸酯、二丙二醇單甲基醚乙酸酯、二丙二醇單乙基 醚乙酸酯等之丙二醇醚乙酸酯類、丙酮、甲乙酮、甲基異 丁基酮、環己酮等之酮類、醋酸乙酯、醋酸丁酯等之醋酸 酯類、二甲基亞楓、N-甲基吡略烷酮、二甲基甲醯胺、二 甲基乙醯胺、及其等之混合物。 所使用之溶劑的量亦無特別限制,但相對於具有芴骨 架之化合物與四元酸二酐之合計100質量份,宜爲25〜150 質量份的範圍。未達25質量份有時黏度被充份降低。另 外,超過150質量份時,反應物之濃度太低,有時反應速 度降低。 於具有荀骨架之化合物與四元酸二酐中依需要,添加 溶劑或觸媒而加成反應,但當反應時宜進行加熱,藉加熱 而原料溶解,反應速度亦被加速。加熱溫度係可依具有芴 骨架之化合物與四元酸二酐之種類或使用之裝置而適當設 定,但大槪宜爲60~220 °C之範圍。更佳係90〜160°C之範 圍。若反應溫度低於60°C,有時至反應終了止耗費時間。 另外,若反應溫度高於220 °C,產生著色等之副反應,或 -20- 201003310 酸酐進行閉環等之平衡,有時反應率會降低。 於如以上做法所得到之高分子化合物上使以下述通式 (2 )所示之羧酸反應性(甲基)丙烯酸酯化合物而得到 本發明之感光性樹脂。 (式中 之基) 【化1 2】 R4(wherein Rla and Rlb represent a hydrogen atom or a substituent, and R2a, R2b, R7a and R7b represent a substituent other than a hydrogen atom; R3a and R3b represent a hydrogen atom or a methyl group, and kl and k2 represent the same or different 〇~ An integer of 4, nl and n2 represent the same or different 〇~1〇 integer 'P1 and P2 represent the same or different integers from 1 to 3). 1113 and Rlb, 112!1 and R2b, R3a& R3b, kl and k2, ml and m2, nl and n2 are the same as described above. Further, R7a and R7b have the same meanings as those of R3a and R3b described above. The Pi and P2 systems are the same as described above, and are preferably 1 to 3. -15- 201003310 The compound represented by the above formula (4) contains a 9,9-bis(hydroxyalkoxyphenyl)anthracene (in the above formula (4), a compound of nl=n2 = l And 9,9-bis(hydroxypolyalkoxydialkylphenyl)anthracene (a compound in which n1 and n2 are each 1 or more in the above formula (4)). 9.9-bis(hydroxyalkoxyphenyl)anthracene, for example, 9,9-bis(base oxyphenyl)anthracene {e.g., 9,9-bis[4-(2-hydroxyethoxy) Phenyl]anthracene, 9.9-bis[4-(2-hydroxypropoxy)phenyl]anthracene, 9,9-bis[4_(2-hydroxyethoxy)-3-methylphenyl]anthracene, 9 ,9-bis[4-(2-hydroxypropoxy)_3_methylphenyl]anthracene, 9,9-bis[4-(2-hydroxyethoxy)-3,5-dimethylphenyl ,9,9-bis[4-(2-hydroxyethoxy)phenoxyethane]anthracene, 9,9-bis[4_(2-pyridylpropoxy)phenoxyethane]芴9,9-bis[4-(2-hydroxyethoxy)_3_methylphenyl]indole, 9,9-bis[4-(2-hydroxypropoxy)-3-methylphenyl]芴, 9,9·bis[4-(2-hydroxyethoxy)-2,5-dimethylphenyl]anthracene, 9,9-bis[4·(2·hydroxypropyloxy)-2, 5-dimethylphenyl]anthracene, 9,9-bis[4-(2-hydroxyethoxy)-3,6-dimethylphenyl]anthracene, 9,9-bis[4-(2-hydroxyl Propyl)-2,6-dimethylphenyl]anthracene, 9,9-bis[4-(2-hydroxyethoxy)-2,4-dimethylphenyl]anthracene, 9,9· Bis[3-(2-hydroxypropoxy)-2,4-dimethylphenyl]anthracene, 9,9-bis[4-(2-carbylethoxy)-3,4-dimethyl Phenyl]anthracene, 9,9-double [ 9,9-bis(hydroxyalkoxyalkylphenyl)anthracene of 2-(2.hydroxypropoxy)- 3,4-dimethylphenyl]anthracene, preferably contains 9,9-double 9.9-bis (hydroxyl branch (: 3-4 alkoxy-dialkylphenyl) oxime) of 2-hydroxypropyloxy-bis(^_4-alkylphenyl)anthracene etc. 9.9- double ( In the hydroxypolyalkoxyphenyl) oxime, a compound in which η 1 and n 2 are 2 or more, for example, 9,9-bis(hydroxydialkoxyphenyl)anthracene {e.g. 9, 9, 9 bis [4-(2) -hydroxydiethoxy)phenyl]anthracene, 9,9-bis[4-(2-diaminodipropoxy-16-201003310-yl)phenyl]anthracene, 9,9-bis[4-(2- Hydroxydiethoxy)-3-methylphenyl]anthracene, 9.9-bis[4-(2-hydroxydipropoxy)-3-methylphenyl]anthracene, 9,9-bis[4-( 2-hydroxydiethoxy)-3,5-dimethylphenyl]anthracene, 9,9-bis[4-(2-hydroxydiethoxy)phenoxyethanol]anthracene, 9,9-double [4-(2-Hydroxydipropoxy)phenoxyethanol]indole, 9,9-bis[4-(2-hydroxydiethoxy)-3-methylphenyl]anthracene, 9.9-double [ 4-(2-hydroxydipropoxy)-3-methylphenyl]anthracene, 9,9-bis[4-(2-hydroxydiethoxy)-2,5-dimethylphenyl]anthracene 9,9-bis[4-(2-hydroxydipropoxy) -2,5-Dimethylphenyl]anthracene, 9,9-bis[4-(2-hydroxydiethoxy)-3,6-dimethylphenyl]anthracene, 9,9-double [ 4-(2-hydroxydipropoxy)-2,6-dimethylphenyl]anthracene, 9,9-bis[4-(2-hydroxydiethoxy)-2,4-dimethylbenzene ], 9,9-bis[3-(2-hydroxydipropoxy)-2,4-dimethylphenyl]anthracene, 9,9-bis[4-(2-hydroxydiethoxyl) , 9,9-double of -3,4-dimethylphenyl]anthracene, 9,9-bis[2-(2-hydroxydipropoxy)-3,4-dimethylphenyl]anthracene (Hydroxydialkoxyphenyl) fluorene}. Among these, 9,9-bis(hydroxyethoxyphenyl)anthracene 9,9-bis(hydroxyethoxy-3-methylphenyl)anthracene, 9,9-bis(hydroxyethoxyl) Alkyl-3,5-dimethylphenyl)anthracene, 9,9-bis(hydroxyethoxy-2-phenoxyethanol)anthracene or the like. In the use of the compound having an anthracene skeleton represented by the above formula (1) which constitutes the photosensitive resin of the present invention, it is preferable to use R2a and R2b as a benzene in a particularly high refractive index, solubility, compatibility, and low solution viscosity. base. Specifically, for example, a 9,9-bis(hydroxyalkoxyarylphenyl)anthracene is contained in the compound represented by the above formula (4) (in the above formula (4), nl=n2 = l, R2a, R2b are compounds of phenyl), 9,9-bis(hydroxypolyalkoxyarylphenyl)anthracene (in the above formula (4), nl+n2 is 2 or more, R2a-17-201003310, R2b is a compound of phenyl). 9,9-bis(hydroxyalkoxyarylphenyl)indoles contain 9,9-bis[4-(2-hydroxyethoxy)-3-phenylphenyl]anthracene, 9-bis[4 9,9-(2-hydroxypropoxy)-3-phenylphenyl]anthracene, 9,9-bis[4-(2-hydroxypropoxy)-3-methylphenyl]anthracene Bis(hydroxyalkoxyarylphenyl)anthracene, preferably contains 9,9-bis(2-hydroxyethoxyphenylphenyl)anthracene or the like. 9,9-bis(hydroxypolyalkoxyarylphenyl)indoles contain 9,9-bis(hydroxydialkoxyarylphenyl)anthracenes [eg 9,9-double {4-[2 9,9-bis(hydroxydialkoxyarylphenyl)anthracene, such as -(2-hydroxyethoxy)ethoxy]-3-phenylphenyl}anthracene, preferably contains 9,9- Bis[2-(2-hydroxyethoxy)ethoxyarylphenyl]anthracene]. Among these, it is preferably 9,9-bis(hydroxyethoxyarylphenyl)anthracene or the like. For the compound which reacts with the above compound having an anthracene skeleton, a tetrabasic acid dianhydride can be used. Specific examples of the tetrabasic acid dianhydride include butane tetracarboxylic dianhydride, pentylene tetracarboxylic dianhydride, hexane tetracarboxylic dianhydride, cyclobutane tetracarboxylic dianhydride, and cyclopentane tetracarboxylic acid II. Anhydride, cyclohexane tetracarboxylic dianhydride, cycloheptane tetracarboxylic dianhydride, norbornane tetracarboxylic dianhydride, pyromellitic dianhydride, benzophenone tetracarboxylic dianhydride, biphenyl tetra Carboxylic dianhydride, biphenyl ether tetracarboxylic dianhydride, 5-(2,5-dioxotetrahydro-3-furanyl)-3-methyl-3-cyclohexene-1,2-dicarboxylic anhydride 4-(2,5-dioxotetrahydrofuran-3-yl)-1,2,3,4-tetrahydronaphthalene-1,2-dicarboxylic anhydride, naphthalene-1,4,5,8-tetracarboxylic acid Dihydride, 4,4,-(hexafluoroisopropylidene)diphthalic anhydride, 3,4,9,10-decanetetracarboxylic dianhydride, 3,3'-4,4'-diphenylfluorene One or two or more of these may be used as the carboxylic acid dianhydride or the like. Among these, it is preferably pyromelliyl-18-201003310 acid dianhydride, 5-(2,5-dioxotetrahydro-3-furanyl)-3-methyl-3-cyclohexene-1,2 - a dicarboxylic acid anhydride, a benzophenone tetracarboxylic dianhydride, a biphenyl tetracarboxylic dianhydride hydrazine, can be obtained by adding a tetrabasic acid dianhydride to the above compound having an anthracene skeleton to form the photosensitivity of the present invention. A polymer compound of a resin. The ratio of the tetrabasic acid dianhydride in the addition reaction to the compound 1 molar having an anthracene skeleton is preferably from 0.5 mol to 1.5 mol, more preferably from 65 mol to 1.25 mol. When the ratio of the tetrabasic acid dianhydride is less than 0.5 mol and exceeds 1.5 mol, sometimes a sufficient molecular weight cannot be obtained. A catalyst may also be used when the compound having an anthracene skeleton is reacted with a tetrabasic acid dianhydride. The catalyst to be used is not particularly limited as long as it can promote the reaction, and examples thereof include pyridine, quinoline, imidazole, indole, indole-dimethylcyclohexylamine, triethylamine, and anthracene. Methylmorpholine, Ν-ethylmorpholine, triethylenediamine, hydrazine, hydrazine-dimethylaniline, hydrazine, hydrazine-dimethylbenzylamine, tris(Ν,Ν-dimethylaminocarbamate Phenol, 4-dimethylaminopyridine, 1,8-diazobicyclo[5.4.0]-7-undecene, 1,5-diazobicyclo[4.3.0]nonene Grade 4 ammonium compound, tributylphosphine, three a mixture of phenylphosphine and the like and the like. In addition, the amount of the catalyst to be used is not particularly limited, but is preferably in the range of 0.1 to 2.0 parts by mass based on 100 parts by mass of the total of the compound having an anthracene skeleton and the tetrabasic acid dianhydride. If the amount of the catalyst exceeds 2.0 parts by mass, the electrical properties or storage stability of the photosensitive resin may be adversely affected. Further, in the case of the addition reaction, the dissolution of the reaction material is carried out, and the viscosity is lowered, etc. -19-201003310, and a solvent can also be used. The type of the solvent is not particularly limited as long as it does not inhibit the reaction, and examples thereof include glycol ethers such as ethylene glycol diethyl acid and diethylene glycol dimethyl ether, and ethylene glycol singles. Glycol ether acetate such as ethyl ether acetate vinegar, diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, dipropylene glycol monoethyl ether, propylene glycol dimethyl charm , propylene glycol ethers such as dipropylene glycol dimethyl ether, propylene glycol diethyl ether, dipropylene glycol diethyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, dipropylene glycol monomethyl ether Acetate, propylene glycol ether acetate such as dipropylene glycol monoethyl ether acetate, ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, acetic acid, butyl acetate, etc. a mixture of esters, dimethyl sulfoxide, N-methylpyrrolidone, dimethylformamide, dimethylacetamide, and the like. The amount of the solvent to be used is not particularly limited, but is preferably in the range of 25 to 150 parts by mass based on 100 parts by mass of the total of the compound having a skeleton and the tetrabasic acid dianhydride. When the amount is less than 25 parts by mass, the viscosity is sufficiently lowered. Further, when it exceeds 150 parts by mass, the concentration of the reactant is too low, and sometimes the reaction rate is lowered. In the case of a compound having an anthracene skeleton and a tetrabasic acid dianhydride, a solvent or a catalyst is added to carry out an addition reaction, but when the reaction is carried out, heating is carried out, and the raw material is dissolved by heating, and the reaction rate is also accelerated. The heating temperature may be appropriately set depending on the type of the ruthenium skeleton compound and the tetrabasic acid dianhydride or the apparatus used, but it is preferably in the range of 60 to 220 °C. More preferably, it is in the range of 90 to 160 °C. If the reaction temperature is lower than 60 ° C, it sometimes takes time until the end of the reaction. Further, when the reaction temperature is higher than 220 °C, a side reaction such as coloring occurs, or the acid anhydride is subjected to a ring closure or the like in an equilibrium of -20-201003310, and the reaction rate may be lowered. The carboxylic acid-reactive (meth) acrylate compound represented by the following formula (2) is obtained from the polymer compound obtained by the above method to obtain the photosensitive resin of the present invention. (base in the formula) [Chemical 1 2] R4
(2) R5表示以下述通式(5)所示 【化1 3】(2) R5 is represented by the following formula (5) [Chemical Formula 1]
C2H4〇f- /q 〇3^β〇C2H4〇f- /q 〇3^β〇
-c4h8o-^— (5) (式中,q、r、s分別獨立地表示0~9之整數,但,q、r、s 不同時爲〇)。 以前述通式(2)所示之羧酸反應性(甲基)丙烯酸 酯具體上係可舉例如2-羥基乙基(甲基)丙烯酸酯縮水甘油 基醚、2 -羥基丙基(甲基)丙烯酸酯縮水甘油基醚、3 -羥基 丙基(甲基)丙烯酸酯縮水甘油基醚、4-羥基丁基(甲基)丙 烯酸酯縮水甘油基醚、聚乙二醇-聚丙二醇(甲基)丙烯酸酯 縮水甘油基醚等。 使如此之羧酸反應性(甲基)丙烯酸酯化合物對上述高 -21 - 201003310 分子化合物加成反應。本發明之感光性樹脂中的殘酸反應 性(甲基)丙烯酸酯化合物之比例係亦依用途而異,很難一 槪而言’使用於光硬化性塗佈劑或光學材料時,亦可感光 性樹脂之酸價加成至〇止。另外,適用於鹼顯像性之用途 時,宜樹脂固形分之酸價在於30〜150 mgKOH/g的$@圍進 行調整。若酸價低於3 0 Κ Ο H / g ’有時顯像速度降低而無法 得到必須的圖型。另外,酸價高於150 mgKOH/g時,有 時成爲顯像過剩而圖型易剝離,電氣特性等亦降低。又, 在本發明中,樹脂固形分之酸價爲依據JI S - K 0 0 7 0之測定 値。 在上述高分子化合物與羧酸反應性(甲基)丙烯酸酯化 合物之反應中係就促進反應之目的,亦可使用觸媒。觸媒 之種類係依羧酸反應性(甲基)丙烯酸酯化合物之種類而異 ,故很難一槪而言,就一例而言係可舉例如吡啶、喹啉、 咪唑、Ν,Ν -二甲基環己基胺、三乙胺、N -甲基嗎啉、N -乙 基嗎啉 '三乙二胺、Ν,Ν -二甲基苯胺、Ν,Ν_二甲基苯甲基 胺、三(Ν,Ν-二甲基胺基甲基)酚、4-二甲基胺基吡啶、 1,8-二偶氮雙環[5·4_0]-7·十一碳烯、丨,5-二偶氮雙環 [4.3.0]壬稀-5等之胺類、氯化四甲基銨、溴化四甲基錢、 氯化三甲基苯甲基銨、氫氧化四甲基銨等之第4級銨化合 物、三丁基磷、三苯基磷等及其等之混合物。 又,所使用之觸媒的量亦無特別限定,但相對於前述 具有芴骨架之化合物100質量份宜爲0.1〜2.0質量份的範 圍。若觸媒之量太多’有時對感光性樹脂之電特性或保存 -22- 201003310 安定性出現不良影響。 又,使羧酸反應性(甲基)丙烯酸酯化合物反應時,係 宜加入聚合抑制劑。若爲抑制不飽和鍵之反應者,聚合抑 制劑之種類並無特別限制,但就一例而言可舉例如氫醌、 氫醌單甲基醚、第三丁基氫醌、第三丁基兒茶酚、N—甲 基-N-亞硝基苯胺或N-亞硝基苯基羥基胺/銨鹽(和光純藥 工業股份公司製:Q-1300) 、N-亞硝基苯基羥基胺/鋁鹽 (和光純藥工業股份公司製:Q-1301) 、2,2,6,6 -四甲基 六氫吡啶-1-氧、4 -羥基-2,2,6,6 -四甲基六氫吡啶-1-氧等。 尤宜N-亞硝基苯基羥基胺/鋁鹽、4-羥基-2,2,6,6-四甲基六 氫吡啶-1 -氧。聚合抑制劑之量係依其種類及反應條件而異 ,故很難一槪而言,但相對於感光性樹脂全體宜爲 5~2000Ppm之範圍。若少於此範圍,有時於製造中不飽和 鍵會反應,產生凝膠化,若多於此範圍,有時感度降低, 故不佳。 加成羧酸反應性(甲基)丙烯酸酯化合物時係宜以反應 速度之提昇爲目的而進行加熱。加熱溫度係可依羧酸反應 性(甲基)丙烯酸酯化合物之種類或裝置而適當設定,但宜 大約爲60~150°C之範圍。若反應溫度低於60°C,有時至 反應終了止耗費時間。另外,若反應溫度高於150 °C,產 生著色等之副反應,或不飽合鍵進行反應而引起凝膠化。 如此做法所得到之本發明的感光性樹脂的分子量並無 特別限定,但從塗膜強度、塗膜性或顯像性之觀點,宜爲 1000-200000,更宜爲 2500〜50000。又,在本說明書中感 -23- 201003310 光性樹脂之分子量係以實施例所記載之條件的GPC所得 到的苯乙烯換算重量平均分子量。 本發明之感光性樹脂係含有上述感光性樹脂、光聚合 起始劑及/或光增感劑作爲必須成分者。此光聚合起始劑 及/或光增感劑係以溶解或分散於溶劑之狀態進行混合, 或,亦可對於感光性樹脂化學結合。 本發明所使用之光聚合起始劑及/或光增感劑係無特 別限制’但可舉例如二苯甲酮、4 ·羥基二苯甲酮、雙-N,N-二甲基胺基二苯甲酮、雙_N,N-二乙基胺基二苯甲酮 、4 -甲氧基-4’-二甲基胺基二苯甲酮等之二苯甲酮類、硫 雜蒽酮、2,4-二乙基硫雜蒽酮、異丙基硫雜蒽酮、氯硫雜 蒽酮、異丙氧基氯硫雜蒽嗣等之硫雜蒽酮類、乙基蒽醌、 苯並蒽醌、胺基蒽醌、氯蒽醌、蒽醌-2 -硫酸鹽、蒽醌-2,6 -二磺酸鹽等之蒽醌類、乙醯苯類、苯偶因甲基醚、苯 偶因乙基醚、苯偶因苯基醚等之苯偶因醚類、2,4,6 -三鹵 甲基三嗪類、1-羥基環己基苯基酮、2-(鄰-氯苯基)-4,5-二苯基咪唑偶體、2-(鄰·氯苯基)-4,5-二(間-甲氧基苯 基)咪唑偶體、2-(鄰-氟苯基)-4,5-二苯基咪唑偶體、2-(鄰-甲氧基苯基)-4,5-二苯基咪唑偶體、2-(對-甲氧基 苯基)-4,5-二苯基咪唑偶體、2,4-二(對-甲氧基苯基)-5-苯基咪唑偶體、2- (2,4-二甲氧基苯基)-4,5-二苯基咪 唑偶體等之2,4,5-三芳基咪唑偶體類、苯甲基二甲基縮酮 、2-苯甲基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁烷-i_酮 、2-甲基- l-[4-(甲基硫)苯基]-2-嗎啉-1-丙酮、2-羥基- -24- 201003310 2 -甲基-1-苯基-丙烷-1-酮、l-[4-(2 -羥基乙氧基)-苯基]_ 2-羥基-2-甲基-1-丙烷-1-酮、1,2-辛二酮、^[4-(苯基硫 )-、2-(鄰-苯甲醯基肟)]、菲醌、9,1〇-菲醌、甲基苯偶 因、乙基苯偶因等苯偶因類、9 -苯基吖嗪、ι,7 -雙(9,9,-吖嗪基)庚烷等、吖嗪衍生物、雙醯基磷氧化物,亦可使 用此等之1種或2種以上。 於本發明之感光性樹脂中係亦可進一步添加促進劑。 促進劑之例,可舉例如對-二甲基胺基安息香酸乙酯、對-二甲基胺基安息香酸異戊酯、N,N-二甲基乙醇胺、Ν·甲基 二乙醇胺、三乙醇胺等。 於本發明之感光性樹脂組成物中係可進一步使用於分 子中具有1個以上之不飽和基的聚合性單體(以下,有時 僅稱「聚合性單體」)’藉此’可提升感度、耐藥品性、 耐熱性及機械強度。又,就流動特性調節等之目的亦可添 加聚合性單體。此聚合性單體若爲於分子內具有不飽合鍵 1個以上者’無特別限制而可使用,只要依適用之用途、 目的而選擇適當者即可。例如聚乙二醇二(甲基)丙嫌酸酯 (乙烯基之數目爲2〜14者)、三羥甲基丙烷二(甲基)丙 烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基丙烷 乙氧基二(甲基)丙燃酸醋 '三經甲基丙院丙氧基三(甲基) 丙烯酸酯、四羥甲基甲烷三(甲基)丙烯酸酯、四羥甲基甲 烷四(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯(丙稀 基之數目爲2~14者)、二季戊四醇五(甲基)丙烯酸酯、 二季戊四醇六(甲基)丙烯酸酯、雙酚A聚氧乙烯二(甲基) -25- 201003310 丙烯酸酯、雙酚A二氧乙烯二(甲基)丙烯酸酯、雙酚A三 氧乙烯二(甲基)丙烯酸酯、雙酚A十氧乙烯二(甲基)丙烯 酸酯、多元羧酸(酞酸酐等)與羥基及具有乙烯性不飽和 基之化合物(/3-羥基乙基(甲基)丙烯酸酯等)之酯化物、 (甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁 酯、(甲基)丙烯酸2 -乙基己基酯等之(甲基)丙烯酸烷酯、 乙二醇二縮水甘油基醚、二乙二醇二縮水甘油基醚、三乙 二醇二縮水甘油基醚、四乙二醇二縮水甘油基醚、聚乙二 醇二縮水甘油基醚、丙二醇二縮水甘油基醚、二丙二醇二 縮水甘油基醚、三丙二醇二縮水甘油基醚、四丙二醇二縮 水甘油基醚、聚丙二醇二縮水甘油基醚、山梨糖醇三縮水 甘油基醚、甘油三縮水甘油基醚等之環氧基化合物的(甲 基)丙烯酸加成物、馬來酸等之不飽和有機酸及其等之酸 酐、N -甲基丙烯醯胺、N -乙基丙烯醯胺、N -異丙基丙烯醯 胺、N -羥甲基丙烯醯胺、N -甲基甲基丙烯醯胺、N -乙基甲 基丙烯醯胺、N-異丙基甲基丙烯醯胺、…羥甲基甲基丙烯 醯胺、N,N-二甲基丙烯醯胺、ν,Ν-二乙基丙烯醯胺、N,N_ 二甲基甲基丙烯醯胺、Ν,Ν-二乙基甲基丙烯醯胺等之丙烯 醯胺類、苯乙烯、羥基苯乙烯等的苯乙烯類' Ν_乙烯基吡 咯烷酮、Ν -乙烯基甲醯胺、N-乙烯基乙醯胺、N—乙烯基咪 唑等’可使用此等之1種或2種以上。 本發明之感光性樹脂組成物中係就設計性、辨認性、 及光阻劑等之防止光暈等之目的亦可添加著色劑。所添加 之著色劑的種類係可依著色之目的而適當選擇,可舉例如 -26- 201003310 酞菁系染料、蒽醌系染料、偶氮系染料、靛藍系染料、香 豆素系染料、三苯基甲烷系染料、酞菁系顏料系染料、蒽 醌系顏料系染料、偶氮系顏料、喹吖啶酮(Quinacridone) 系顏料、香豆素系顏料、三苯基甲院系顏料等,可使用此 等之1種或2種以上。 本發明之感光性樹脂組成物係可形成混合有溶液或塡 充劑之糊劑的型態,因此,亦可含有溶劑。所使用之溶劑 的種類並無特別限制,但就一例而言可舉例如水、乙二醇 、二乙二醇、三乙二醇 '四乙二醇等之乙二醇類、乙二醇 單甲基醚、二乙二醇單甲基醚、乙二醇二乙基醚、二乙二 醇二甲基醚等之甘醇醚類、乙二醇單乙基醚乙酸酯、二乙 二醇單乙基醚乙酸酯、二乙二醇單丁基醚乙酸酯等之甘醇 醚乙酸酯類、丙二醇、二丙二醇、三丙二醇等之丙二醇類 、丙二醇單甲基醚、丙二醇單乙基醚、二丙二醇單甲基醚 、二丙二醇單乙基醚、丙二醇二甲基醚、二丙二醇二甲基 醚、丙二醇二乙基醚、二丙二醇二乙基醚等之丙二醇醚類 、丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯、二丙 二醇單甲基醚乙酸酯、二丙二醇單乙基醚乙酸酯等之丙二 醇醚乙酸酯類、丙酮、甲乙酮、甲基異丁基酮、環己酮等 之酮類、乳酸甲酯、乳酸乙酯等之乳酸酯類、醋酸乙酯、 醋酸丁酯等之醋酸酯類、二甲基亞颯、N—甲基吡咯烷酮、 二甲基甲醯胺、二甲基乙醯胺、及其等之混合物。 本發明之感光性樹脂組成物中係可進一步依需要調配 聚合抑制劑、可塑劑、消泡劑、偶合劑等以往公知之成分 -27- 201003310 本發明之感光性樹脂組成物係可藉由依常用方法而混 合上述必須成分及依需要之溶劑或其他之任意成分。 使如以上做法所得到之本發明的感光性樹脂組成物用 爲光阻劑時’係以溶液或糊劑而被塗佈於基板上。塗佈方 法並無特別限制’但可適用網版印刷、簾塗、刮塗、旋塗 、噴塗、浸塗、模縫塗佈等。所塗佈之溶液或糊劑係介由 特定之掩罩’以UV或電子束進行曝光。使用溶劑而塗佈 時’亦可經由乾燥步驟。使所曝光之塗膜以濕式進行顯像 ’俾可形成圖型。顯像方法係噴塗式、槳式、浸漬式等任 一者均可’但宜爲殘渣很少之噴塗式。亦可依需要而照射 超音波等。顯像液宜使用弱鹼性水。就顯像性補助之目的 亦可添加有機溶劑、界面活性劑、消泡劑等。 【實施方式】 [實施例] 以下’依實施例而詳細地說明本發明,但本發明係不 受此等而任何限定。 實施例1 於具備攪拌機與冷卻管之1 000 ml的燒瓶中,置入均 苯四甲酸二酐(Daicel公司製品:PMDA ) 64 g、9,9-雙 [4- ( 2-羥基乙氧基)苯基]芴(大阪瓦斯化學公司製: BPEF ) 136 g、丙二醇單甲基醚乙酸酯I34g,在氮氣流下 -28- 201003310-c4h8o-^— (5) (where q, r, and s independently represent integers from 0 to 9, respectively, but q, r, and s are not equal to each other). The carboxylic acid-reactive (meth) acrylate represented by the above formula (2) may specifically be, for example, 2-hydroxyethyl (meth) acrylate glycidyl ether or 2-hydroxypropyl (methyl) Acrylate glycidyl ether, 3-hydroxypropyl (meth) acrylate glycidyl ether, 4-hydroxybutyl (meth) acrylate glycidyl ether, polyethylene glycol-polypropylene glycol (methyl ) Acrylate glycidyl ether and the like. The carboxylic acid-reactive (meth) acrylate compound is subjected to an addition reaction of the above-mentioned high -21 - 201003310 molecular compound. The ratio of the residual acid-reactive (meth) acrylate compound in the photosensitive resin of the present invention varies depending on the application, and it is difficult to use it in the case of a photocurable coating agent or an optical material. The acid value of the photosensitive resin is added to the limit. Further, when it is suitable for use in alkali development, the acid value of the resin solid content is adjusted to be in the range of 30 to 150 mgKOH/g. If the acid value is lower than 30 Κ Ο H / g ', the development speed may be lowered and the necessary pattern may not be obtained. Further, when the acid value is higher than 150 mgKOH/g, the image is sometimes excessively developed, the pattern is easily peeled off, and electrical characteristics are also lowered. Further, in the present invention, the acid value of the resin solid content is measured in accordance with JIS-K 0 0 7 0. In the reaction between the above polymer compound and a carboxylic acid-reactive (meth) acrylate compound, a catalyst may be used for the purpose of promoting the reaction. The type of the catalyst varies depending on the type of the carboxylic acid reactive (meth) acrylate compound, so that it is difficult to cite, for example, pyridine, quinoline, imidazole, hydrazine, hydrazine Methylcyclohexylamine, triethylamine, N-methylmorpholine, N-ethylmorpholine 'triethylenediamine, hydrazine, hydrazine-dimethylaniline, hydrazine, hydrazine-dimethylbenzylamine, Tris(Ν,Ν-dimethylaminomethyl)phenol, 4-dimethylaminopyridine, 1,8-diazobicyclo[5·4_0]-7·undecene, anthracene, 5- Amines such as diazobiscyclo[4.3.0]oxime-5, tetramethylammonium chloride, tetramethylammonium bromide, trimethylbenzylammonium chloride, tetramethylammonium hydroxide, etc. A fourth-order ammonium compound, tributylphosphine, triphenylphosphine, etc., and the like. Further, the amount of the catalyst to be used is not particularly limited, but is preferably in the range of 0.1 to 2.0 parts by mass based on 100 parts by mass of the compound having an anthracene skeleton. If the amount of the catalyst is too large, it may adversely affect the electrical properties of the photosensitive resin or the preservation of -22-201003310. Further, when a carboxylic acid reactive (meth) acrylate compound is reacted, a polymerization inhibitor is preferably added. The type of the polymerization inhibitor is not particularly limited as long as it is a reaction for suppressing the unsaturated bond, but examples thereof include hydroquinone, hydroquinone monomethyl ether, t-butylhydroquinone, and t-butyl group. Tea, N-methyl-N-nitrosoaniline or N-nitrosophenylhydroxylamine/ammonium salt (made by Wako Pure Chemical Industries, Ltd.: Q-1300), N-nitrosophenylhydroxylamine /Aluminium salt (made by Wako Pure Chemical Industries Co., Ltd.: Q-1301), 2,2,6,6-tetramethylhexahydropyridin-1-oxygen, 4-hydroxy-2,2,6,6-tetra Hexahydropyridin-1-oxygen and the like. Particularly preferred is N-nitrosophenylhydroxylamine/aluminum salt, 4-hydroxy-2,2,6,6-tetramethylhexahydropyridine-1-oxo. The amount of the polymerization inhibitor varies depending on the type and the reaction conditions, so that it is difficult to be used in the same manner, but it is preferably in the range of 5 to 2000 Ppm with respect to the entire photosensitive resin. If it is less than this range, the unsaturated bond may react during production to cause gelation, and if it is more than this range, the sensitivity may be lowered, which is not preferable. When a carboxylic acid-reactive (meth) acrylate compound is added, it is preferred to heat it for the purpose of improving the reaction rate. The heating temperature can be appropriately set depending on the type or device of the carboxylic acid reactive (meth) acrylate compound, but it is preferably in the range of about 60 to 150 °C. If the reaction temperature is lower than 60 ° C, it sometimes takes time until the end of the reaction. Further, when the reaction temperature is higher than 150 °C, a side reaction such as coloring or the like is caused, or a reaction is caused by a non-saturated bond to cause gelation. The molecular weight of the photosensitive resin of the present invention obtained in this manner is not particularly limited, but is preferably from 1,000 to 200,000, more preferably from 2,500 to 50,000, from the viewpoints of coating film strength, coating property, and development. Further, in the present specification, the molecular weight of the optical resin of -23-201003310 is a styrene-equivalent weight average molecular weight obtained by GPC under the conditions described in the examples. The photosensitive resin of the present invention contains the above-mentioned photosensitive resin, photopolymerization initiator and/or photosensitizer as essential components. The photopolymerization initiator and/or the photosensitizer are mixed in a state of being dissolved or dispersed in a solvent, or may be chemically bonded to a photosensitive resin. The photopolymerization initiator and/or photosensitizer used in the present invention are not particularly limited, but may, for example, be benzophenone, 4 hydroxybenzophenone, or bis-N,N-dimethylamino group. Benzophenone, bis-N,N-diethylaminobenzophenone, 4-methoxy-4'-dimethylaminobenzophenone, etc. a thioxanthone such as a ketone, 2,4-diethylthianone, isopropyl thioxanthone, chlorothiazinone or isopropoxychlorothiazide, ethyl hydrazine, Benzoquinones, amidoxime, chloranil, hydrazine-2-sulfate, guanidene-2,6-disulfonate, oxime, acetophenone methyl ether a benzoin ether such as benzoin ethyl ether or benzoin phenyl ether, 2,4,6-trihalomethyltriazine, 1-hydroxycyclohexyl phenyl ketone, 2-(o- Chlorophenyl)-4,5-diphenylimidazolium, 2-(o-chlorophenyl)-4,5-di(m-methoxyphenyl)imidazole, 2-(o-fluoro Phenyl)-4,5-diphenylimidazolium, 2-(o-methoxyphenyl)-4,5-diphenylimidazolium, 2-(p-methoxyphenyl)- 4,5-diphenylimidazolium, 2,4-di(p-methoxy) 2,4,5-triarylimidazolium, such as phenyl)-5-phenylimidazolium, 2-(2,4-dimethoxyphenyl)-4,5-diphenylimidazolium , benzyl dimethyl ketal, 2-benzyl-2- dimethylamino-1-(4-morpholinylphenyl)-butane-i-ketone, 2-methyl- 1-[4-(Methylthio)phenyl]-2-morpholin-1-propanone, 2-hydroxy--24-201003310 2-methyl-1-phenyl-propan-1-one, l-[ 4-(2-hydroxyethoxy)-phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 1,2-octanedione, ^[4-(phenylthio)- , 2-(o-benzylidene fluorenyl)], phenanthrenequinone, 9,1 fluorene, phenanthrene, ethyl benzoin, etc. Benzene, 9-phenylpyridazine, ι In the case of 7-bis(9,9,-pyridazinyl)heptane, etc., a pyridazine derivative or a bis-indenylphosphine oxide, one type or two or more types may be used. Further, an accelerator may be added to the photosensitive resin of the present invention. Examples of the accelerator include ethyl p-dimethylamino benzoate, isoamyl p-dimethylamino benzoate, N, N-dimethylethanolamine, hydrazine methyl diethanolamine, and the like. Ethanolamine and the like. In the photosensitive resin composition of the present invention, a polymerizable monomer having one or more unsaturated groups in the molecule (hereinafter, simply referred to as "polymerizable monomer") can be further used. Sensitivity, chemical resistance, heat resistance and mechanical strength. Further, a polymerizable monomer may be added for the purpose of adjusting the flow characteristics and the like. When the polymerizable monomer has one or more unsaturated bonds in the molecule, it can be used without particular limitation, and may be appropriately selected according to the intended use and purpose. For example, polyethylene glycol di(methyl)propionic acid ester (the number of vinyl groups is 2 to 14), trimethylolpropane di(meth)acrylate, trimethylolpropane tri(meth)acrylic acid Ester, trimethylolpropane ethoxy di(methyl)propanic acid vinegar's trimethyl methacrylate propoxy tri(meth) acrylate, tetramethylol methane tri(meth) acrylate, Tetramethylol methane tetra(meth) acrylate, polypropylene glycol di(meth) acrylate (the number of propylene groups is 2 to 14), dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa Acrylate, bisphenol A polyoxyethylene di(methyl)-25- 201003310 acrylate, bisphenol A dioxyethylene di(meth) acrylate, bisphenol A trioxyethylene di(meth) acrylate , bisphenol A decaoxyethylene di (meth) acrylate, polycarboxylic acid (phthalic anhydride, etc.) and a hydroxyl group and a compound having an ethylenically unsaturated group (/3-hydroxyethyl (meth) acrylate, etc.) Esterified product, methyl (meth)acrylate, ethyl (meth)acrylate, (meth)acrylic acid An alkyl (meth)acrylate such as an ester or 2-ethylhexyl (meth)acrylate, ethylene glycol diglycidyl ether, diethylene glycol diglycidyl ether, or triethylene glycol diglycidyl group Ether, tetraethylene glycol diglycidyl ether, polyethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, dipropylene glycol diglycidyl ether, tripropylene glycol diglycidyl ether, tetrapropylene glycol diglycidyl A (meth)acrylic acid addition product of an epoxy compound such as a group ether, a polypropylene glycol diglycidyl ether, a sorbitol triglycidyl ether or a glycerol triglycidyl ether, or an unsaturated organic compound such as maleic acid Acids and their anhydrides, N-methyl acrylamide, N-ethyl acrylamide, N-isopropyl acrylamide, N-methylol acrylamide, N-methyl methacrylamide , N-ethylmethacrylamide, N-isopropylmethacrylamide, hydroxymethylmethacrylamide, N,N-dimethylpropenamide, ν,Ν-diethyl Propylene oxime such as acrylamide, N,N-dimethyl methacrylamide, hydrazine, hydrazine-diethyl methacrylamide A styrene type such as styrene or hydroxystyrene, Ν-vinylpyrrolidone, Ν-vinylformamide, N-vinylacetamide, N-vinylimidazole, etc. can be used. Or two or more. In the photosensitive resin composition of the present invention, a coloring agent may be added for the purpose of preventing halo or the like in terms of design, visibility, and photoresist. The type of the coloring agent to be added may be appropriately selected depending on the purpose of coloring, and examples thereof include -26-201003310 phthalocyanine dyes, anthraquinone dyes, azo dyes, indigo dyes, coumarin dyes, and the like. a phenylmethane dye, a phthalocyanine pigment dye, an anthraquinone pigment dye, an azo pigment, a quinacridone pigment, a coumarin pigment, a triphenylmethine pigment, and the like. One or two or more of these may be used. The photosensitive resin composition of the present invention can form a paste in which a solution or a chelating agent is mixed, and therefore may contain a solvent. The type of the solvent to be used is not particularly limited, and examples thereof include ethylene glycol, ethylene glycol, diethylene glycol, triethylene glycol, tetraethylene glycol, and the like. Glycol ethers such as ether, diethylene glycol monomethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, ethylene glycol monoethyl ether acetate, diethylene glycol Glycol ether acetate such as monoethyl ether acetate or diethylene glycol monobutyl ether acetate; propylene glycol such as propylene glycol, dipropylene glycol or tripropylene glycol; propylene glycol monomethyl ether; propylene glycol monoethyl Ethylene glycol, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, propylene glycol dimethyl ether, dipropylene glycol dimethyl ether, propylene glycol diethyl ether, dipropylene glycol diethyl ether, propylene glycol ether, propylene glycol monomethyl Propylene glycol ether acetates such as phenyl ether acetate, propylene glycol monoethyl ether acetate, dipropylene glycol monomethyl ether acetate, dipropylene glycol monoethyl ether acetate, acetone, methyl ethyl ketone, methyl isobutyl Ketones such as ketones and cyclohexanone, lactates such as methyl lactate and ethyl lactate, and ethyl acetate , Butyl acetate, acetates, etc., dimethyl sulfoxide Sa, N- methylpyrrolidone, dimethylformamide, dimethylacetamide, etc. and mixtures thereof. In the photosensitive resin composition of the present invention, a conventionally known component such as a polymerization inhibitor, a plasticizer, an antifoaming agent, or a coupling agent can be further added as needed. -27-201003310 The photosensitive resin composition of the present invention can be used as usual The above-mentioned essential components and optional solvents or other optional components are mixed by the method. When the photosensitive resin composition of the present invention obtained as described above is used as a photoresist, it is applied onto a substrate by a solution or a paste. The coating method is not particularly limited, but screen printing, curtain coating, blade coating, spin coating, spray coating, dip coating, die coating, and the like can be applied. The applied solution or paste is exposed to UV or electron beam via a specific mask'. It can also be passed through a drying step when coated with a solvent. The exposed coating film is developed in a wet manner to form a pattern. The development method may be any of a spray type, a paddle type, a dipping type, etc., but it is preferably a spray type with few residues. Ultrasonic waves, etc. can also be irradiated as needed. It is advisable to use weakly alkaline water for the developer. An organic solvent, a surfactant, an antifoaming agent, or the like may be added for the purpose of the developmental subsidy. [Embodiment] [Examples] Hereinafter, the present invention will be described in detail by way of examples, but the present invention is not limited thereto. Example 1 In a 1 000 ml flask equipped with a stirrer and a cooling tube, pyromellitic dianhydride (product of Daicel: PMDA) 64 g, 9,9-bis[4-(2-hydroxyethoxy) was placed. )phenyl]anthracene (manufactured by Osaka Gas Chemical Co., Ltd.: BPEF) 136 g, propylene glycol monomethyl ether acetate I34g, under a nitrogen stream -28- 201003310
一邊攪拌一邊在155 °C之油浴中加熱4小時。繼而,冷卻 至120°C後,加入4-二甲基胺基吡啶1 g、4-羥基-2,2,6,6-四 甲基六 氫吡啶 -:!-氧 ( ADEKA 7 RD ) 0.04 g、4-羥丁基丙烯酸酯縮水甘油基醚(日本化 成公司製品:4HBAGE ) 106 g,以120°C持續攪拌4小時 。然後,冷卻至室溫,以不揮發成分成爲50質量%之方式 ,加入丙二醇單甲基醚乙酸酯而得到淡黃色透明黏稠性之 感光性樹脂(A1 )溶液。 有關所得到之樹脂溶液,測定黏度、GPC之苯乙烯換 算重量平均分子量及固形分酸價後,爲黏度2900 mP^S/25°C 、以GPC所得到之苯乙烯換算重量平均分子量1 2523,固 形分酸價爲2.2 mgKOH/g。又,於黏度測定係使用東機產 業股份公司製BM型黏度計。又,GPC的測定係於管柱使 用 Tosoh 股份公司製 TSKgel G7000HXL,TSKgel GMHXL 2 根,TSKgel G25 00HXL,以 THF 溶離液 40°C,以 0-5 ml/分鐘流速測定。酸價係依據JIS-K0070之中和滴定法而 測定。 實施例 2 於具備攪拌機與冷卻管之1 000 ml的燒瓶中’置入聯 苯基四羧酸二酐(宇部興產公司製品:BPDA) 72 g、9,9-雙[4- ( 2-羥基乙氧基)苯基]芴(大阪瓦斯化學公司製: BPEF ) 128 g、4 -二甲基胺基吡啶lg、丙二醇單甲基醚乙 酸酯134g,在氮氣流下一邊攪拌一邊在155 °C之油浴中加 -29- 201003310It was heated in an oil bath at 155 ° C for 4 hours while stirring. Then, after cooling to 120 ° C, 1 g of 4-dimethylaminopyridine, 4-hydroxy-2,2,6,6-tetramethylhexahydropyridine-:!-oxygen (ADEKA 7 RD ) 0.04 was added. g, 4-hydroxybutyl acrylate glycidyl ether (manufactured by Nippon Kasei Co., Ltd.: 4HBAGE) 106 g, and stirring was continued at 120 ° C for 4 hours. Then, the mixture was cooled to room temperature, and propylene glycol monomethyl ether acetate was added so as to have a nonvolatile content of 50% by mass to obtain a pale yellow transparent viscous photosensitive resin (A1) solution. The obtained resin solution was measured for viscosity, GPC styrene-equivalent weight average molecular weight, and solid acid value, and the viscosity was 2,900 mP^S/25 ° C, and the weight average molecular weight of styrene in terms of GPC was 1,2523. The solid acid value was 2.2 mgKOH/g. Further, a BM type viscometer manufactured by Toki Sangyo Co., Ltd. was used for the viscosity measurement. Further, the measurement of GPC was carried out by using TSKgel G7000HXL, TSKgel GMHXL 2, TSKgel G25 00HXL manufactured by Tosoh Co., Ltd. in a column, and measured at a flow rate of 0-5 ml/min in a THF solution at 40 °C. The acid value was measured in accordance with JIS-K0070 and titration. Example 2 Phenyltetracarboxylic dianhydride (product of Ube Industries, Ltd.: BPDA) was placed in a 1 000 ml flask equipped with a stirrer and a cooling tube. 72 g, 9, 9-bis [4- ( 2- Hydroxyethoxy)phenyl]indole (manufactured by Osaka Gas Chemical Co., Ltd.: BPEF) 128 g, 4-dimethylaminopyridine lg, propylene glycol monomethyl ether acetate 134 g, stirred at 155 ° under a nitrogen stream C in the oil bath plus -29- 201003310
熱4小時。繼而,冷卻至120°C後,加入4-羥基-2,2,6,6-四甲基六氫吡啶-1-氧(ADEKA公司製:Adekastab LA-7RD )0.04 g、4-羥丁基丙烯酸酯縮水甘油基醚(日本化成公 司製品:4 Η B A G E ) 8 4 g,以1 2 0 °C攪拌4小時。然後,冷 卻至室溫,以不揮發成分成爲5 0質量%之方式,加入丙二 醇單甲基醚乙酸酯而得到淡黃色透明黏稠性之感光性樹脂 (A2 )溶液。有關所得到之樹脂溶液,測定黏度、GPC之 苯乙烯換算重量平均分子量及固形分酸價後,爲黏度 4200mPa_s/25°C、以GPC所得到之苯乙烯換算重量平均分 子量7243,固形分酸價爲2.5 mgKOH/g。 比較例1 依據特開平9-3 2 5 00 8號公報記載之合成例1,得到感 光性樹脂(A 3 )。 使用實施例1 ~2及比較例1之感光性樹脂,以表1之 組成製作感光性組成物。此感光性組成物於1 .1 mm厚之鈉 玻璃基板以條棒塗佈機塗佈成乾燥膜厚6 μιη,以8 0 °C之溫 風乾燥機乾燥1 〇分鐘後,冷卻至室溫。繼而,以超高壓 水銀燈UV照射機,照射積算光量300 mJ/cm2之紫外線。 對於此硬化塗膜,依據JIS-K5400,實施鉛筆硬度及百格 剝離試驗,評估塗膜之強度。 -30- 201003310 [表l] 實施例3 實施例4 比較例2 實施例5 實施例6 比較例3 感光性樹脂A1 2.00 2.00 感光性樹脂A2 2.00 2.00 感光性樹脂A3 1.00 1.00 光聚合啓始劑w 0.05 0.05 0.05 0.05 0.05 0.05 DPHA*2 0.50 0.50 0.50 PGMEA*3 1.45 1.45 2.45 2.62 2.62 3.62 鉛筆硬度 4H 4H 5H 5H 3H 百格剝離 100/100 100/100 未成爲膜 100/100 100/100 50/100 特記事項 斑紋/孔眼 ※ 1 Irgacurel84(Ciba Specialty Chemicala 公司製) ※2 二季戊四醇六丙烯酸酯(日本化藥公司製) ※3 丙二醇單甲基醚乙酸酯 使用比較例1之感光性樹脂的感光性組成物係因爲低 分子量,塗膜形成能力弱,若不施加其他之樹脂成分’無 法評估。使用實施例1 ~2之感光性樹脂的感光性組成物係 可得到平滑的膜,硬度、密著性均良好。 實施例7 於具備攪拌機與冷卻管之1000 ml的燒瓶中,置入均 苯四甲酸二酐(Daicel公司製品:PMDA ) 76 g、9,9-雙 [4- (2 -羥基乙氧基)苯基]芴(大阪瓦斯化學公司製·· BPEF ) 124 g、丙二醇單甲基醚乙酸酯134g’在氮氣流下 一邊攪拌一邊在1 5 51之油浴中加熱4小時。繼而’冷卻 -31 - 201003310 至1 20°c後’加入4-二甲基胺基吡啶1 g、4-羥基-2,2 四甲基六氫吡啶-1-氧(ADEKA公司製:Adekastab 7RD ) 0·04 g、4-羥丁基丙烯酸酯縮水甘油基醚(日 成公司製品:4HBAGE ) 106g,以120°C攪拌2小時 後,冷卻至室溫,以不揮發成分成爲50重量%之方式 入丙二醇單甲基醚乙酸酯而得到淡黃色透明黏稠性之 性樹脂(A4)溶液。 有關所得到之樹脂溶液,測定黏度、G P C之苯乙 算重量平均分子量及固形分酸價後,爲黏度4800mPa °C、以GPC所得到之苯乙烯換算重量平均分子量231 固形分酸價爲75.2 mgKOH/g。 實施例8 於具備攪拌機與冷卻管之1000 ml的燒瓶中,置 苯基四羧酸二酐(宇部興產公司製品:BPDA ) 90g、 雙[4- ( 2-羥基乙氧基)苯基]芴(大阪瓦斯化學公司 BPEF ) 1 1 〇g '丙二醇單甲基醚乙酸酯 134g、4 -二甲 基吡啶1 g,在氮氣流下一邊攪拌一邊在1 5 5 t之油浴 熱4小時。繼而,冷卻至1 2 0 °C後,加入4 -羥基-2,2 四甲基六氫吡啶-1-氧(ADEKA公司製:Adekastab 7RD ) 0.04 g、4-羥丁基丙烯酸酯縮水甘油基醚(日 成公司製品:4 H B A G E ) 8 0 g,以1 2 0 °C攪拌2小時。 ,冷卻至室溫,以不揮發成分成爲50質量%之方式, 丙二醇單甲基醚乙酸酯而得到淡黃色透明黏稠性之感 ,6,6-L A- 本化 。然 ,加 感光 烯換 •s/25 69, 入聯 9,9- 製: 基胺 中加 ,6,6- LA- 本化 然後 加入 光性 -32- 201003310 樹脂(A 5 )溶液。 有關所得到之樹脂溶液,測定黏度、G P C之苯乙烯換 算重量平均分子量及固形分酸價後,爲黏度66〇〇mPa.s/25t 、以GPC所得到之苯乙烯換算重量平均分子量1823〇,固 形分酸價爲71.6mgK〇H/g。 比較例 4 使用環氧基當量257之雙酚芴型環氧樹脂(大阪瓦斯 化學公司製:BPFG) 110g’依據特許第3813244號公報 記載之合成例1及實施例1,得到感光性樹脂(A6 )。於 合成係需要2 0小時以上,相較於本發明之實施例丨〜4而 生產性係明顯降低者。 比較例 5 使用環氧基當量257之雙酚芴型環氧樹脂(大阪瓦斯 化學公司製·_ BPFG) 110g’依據特許第3813244號公報 記載之合成例1及實施例2,得到感光性樹脂(a 7 )。於 合成係需要2 1小時以上,相較於本發明之實施例7及實 施例8而生產性係明顯降低者。 比較例6 除將實施例8之4-羥基丁基丙烯酸酯縮水甘油基醚 8〇g變更成縮水甘油基甲基丙烯酸酯(三菱Rayon公司製品 :G Μ A) 6 0 g以外,其餘係同樣地進行反應,得到感光性樹 -33- 201003310 脂溶液(A8)。有關所得到之樹脂溶液,測定黏度、GPC之 苯乙烯換算重量平均分子量及固形分酸價後,爲黏度 1 2400mPa,s/25°C、以GPC所得到之苯乙烯換算重量平均 分子量16100,固形分酸價爲74.2 mgKOH/g。 試驗例1 有關實施例7~8及比較例4-5之感光性樹脂,測定製 造後與室溫保存1個月後的GPC所得到之聚苯乙烯換算 重量平均分子量,硏究其變化率。結果表示於表2中。 [表 2]_ 以GPC所得到之苯乙烯換算重量平均分子量 製造後 1個月後 變化率 實施例7 23169 23681 102.2% 實施例8 18230 18558 101.8% 比較例4 5840 7180 122.9% 比較例5 6340 7930 125.1% 實施例7~8之感光性樹脂係幾乎看不到變化,但,比 較例2〜3之感光性樹脂係可看到25%左右的分子量增加’ 爲保存安定性差者。 實施例9〜1 2及比較例7〜1 2Heat for 4 hours. Then, after cooling to 120 ° C, 4-hydroxy-2,2,6,6-tetramethylhexahydropyridine-1-oxo (Adekastab LA-7RD, manufactured by Adeka Co., Ltd.) was added to 0.04 g, 4-hydroxybutyl group. Acrylate glycidyl ether (product of Nippon Kasei Co., Ltd.: 4 Η BAGE) 8 4 g, and stirred at 120 ° C for 4 hours. Then, the mixture was cooled to room temperature, and propylene glycol monomethyl ether acetate was added so as to have a nonvolatile content of 50% by mass to obtain a pale yellow transparent viscous photosensitive resin (A2) solution. The obtained resin solution was measured for viscosity, GPC styrene-equivalent weight average molecular weight, and solid acid value, and the viscosity was 4200 mPa_s/25 ° C, and the weight average molecular weight obtained by GPC was 7243, and the solid acid value was determined. It is 2.5 mgKOH/g. Comparative Example 1 A photosensitive resin (A 3 ) was obtained in accordance with Synthesis Example 1 described in JP-A-9-3 2 00 8 . Using the photosensitive resins of Examples 1 and 2 and Comparative Example 1, a photosensitive composition was produced in the composition shown in Table 1. The photosensitive composition was coated on a 1.1 mm thick soda glass substrate by a bar coater to a dry film thickness of 6 μm, dried in a 80 ° C warm air dryer for 1 minute, and then cooled to room temperature. . Then, an ultraviolet light having an integrated light amount of 300 mJ/cm2 was irradiated with an ultrahigh pressure mercury lamp UV irradiator. For this hardened coating film, the pencil hardness and the hundred-bar peeling test were carried out in accordance with JIS-K5400, and the strength of the coating film was evaluated. -30-201003310 [Table 1] Example 3 Example 4 Comparative Example 2 Example 5 Example 6 Comparative Example 3 Photosensitive resin A1 2.00 2.00 Photosensitive resin A2 2.00 2.00 Photosensitive resin A3 1.00 1.00 Photopolymerization initiator w 0.05 0.05 0.05 0.05 0.05 0.05 DPHA*2 0.50 0.50 0.50 PGMEA*3 1.45 1.45 2.45 2.62 2.62 3.62 Pencil hardness 4H 4H 5H 5H 3H 100 peel 100/100 100/100 Not film 100/100 100/100 50/100 Special note Matte/eyelet* 1 Irgacurel 84 (manufactured by Ciba Specialty Chemicals Co., Ltd.) *2 Dipentaerythritol hexaacrylate (manufactured by Nippon Kayaku Co., Ltd.) *3 Photosensitive composition of the photosensitive resin of Comparative Example 1 using propylene glycol monomethyl ether acetate Since the system has a low molecular weight and a weak film forming ability, it cannot be evaluated unless other resin components are applied. Using the photosensitive composition of the photosensitive resin of Examples 1 and 2, a smooth film was obtained, and both hardness and adhesion were good. Example 7 In a 1000 ml flask equipped with a stirrer and a cooling tube, pyromellitic dianhydride (product of Daicel Co., Ltd.: PMDA) 76 g, 9,9-bis[4-(2-hydroxyethoxy) was placed. Phenyl]anthracene (manufactured by Osaka Gas Chemical Co., Ltd., BPEF) 124 g, propylene glycol monomethyl ether acetate 134 g' was heated in an oil bath of 1 5 51 for 4 hours while stirring under a nitrogen stream. Then, after cooling-31 - 201003310 to 1 20 °c, 1 g of 4-dimethylaminopyridine was added, and 4-hydroxy-2,2 tetramethylhexahydropyridine-1-oxo (made by Adeka: Adekastab 7RD) 0·04 g, 4-hydroxybutyl acrylate glycidyl ether (product of Nisshin Co., Ltd.: 4HBAGE) 106g, stirred at 120 ° C for 2 hours, then cooled to room temperature, 50% by weight of non-volatile components A solution of a light yellow transparent viscous resin (A4) was obtained by adding propylene glycol monomethyl ether acetate. The obtained resin solution was measured for viscosity, GPC benzene, weight average molecular weight, and solid acid value, and the viscosity was 4,800 mPa ° C, and the weight average molecular weight of styrene converted by GPC was 231. The solid acid value was 75.2 mgKOH. /g. Example 8 In a 1000 ml flask equipped with a stirrer and a cooling tube, phenyltetracarboxylic dianhydride (product of Ube Industries Co., Ltd.: BPDA) 90 g, bis[4-(2-hydroxyethoxy)phenyl]芴(Osaka Gas Chemical Co., Ltd. BPEF) 1 1 〇g '134g of propylene glycol monomethyl ether acetate and 1 g of 4-dimethylpyridine were heated in an oil bath of 155 t for 4 hours while stirring under a nitrogen stream. Then, after cooling to 120 ° C, 4-hydroxy-2,2 tetramethylhexahydropyridine-1-oxo (Adekastab 7RD, manufactured by ADEKA) was added, 0.04 g, 4-hydroxybutyl acrylate glycidyl group. Ether (product of Nisshin Co., Ltd.: 4 HBAGE) 80 g, stirred at 120 ° C for 2 hours. After cooling to room temperature, propylene glycol monomethyl ether acetate was obtained so that the nonvolatile content was 50% by mass, and a yellowish transparent viscous feeling was obtained, and 6,6-L A- was normalized. However, the addition of sensitizers to s/25 69, incorporation 9,9- system: amide addition, 6,6- LA- localization and then adding photo-32-201003310 resin (A 5 ) solution. The obtained resin solution was measured for viscosity, GPC styrene-equivalent weight average molecular weight, and solid acid value, and the viscosity was 66 〇〇mPa.s/25t, and the weight average molecular weight obtained by GPC was 1,823 〇. The solid acid value was 71.6 mg K 〇 H / g. Comparative Example 4 A bisphenol quinone type epoxy resin (BPFG, manufactured by Osaka Gas Chemical Co., Ltd.) of 110 g of epoxy group equivalent: 257 was used. According to Synthesis Example 1 and Example 1 described in Japanese Patent No. 3813244, a photosensitive resin (A6) was obtained. ). It takes more than 20 hours to synthesize the system, and the productivity is significantly lower than that of the embodiment 丨~4 of the present invention. Comparative Example 5 A bisphenol quinone type epoxy resin (manufactured by Osaka Gas Chemical Co., Ltd., _ BPFG) having an epoxy group equivalent of 257 was used. According to Synthesis Example 1 and Example 2 described in Japanese Patent No. 3813244, a photosensitive resin was obtained. a 7). The synthesis system requires more than 21 hours, and the productivity is significantly lower than that of the embodiment 7 and the embodiment 8 of the present invention. Comparative Example 6 The same procedure was carried out except that 8 〇g of 4-hydroxybutyl acrylate glycidyl ether of Example 8 was changed to glycidyl methacrylate (manufactured by Mitsubishi Rayon Co., Ltd.: G Μ A) of 60 g. The reaction was carried out to obtain a photosensitive tree-33-201003310 fat solution (A8). The obtained resin solution was measured for viscosity, GPC styrene-equivalent weight average molecular weight, and solid acid value, and was a viscosity of 12400 mPa, s/25 ° C, and a weight average molecular weight of 16100 obtained by GPC. The acid value was 74.2 mgKOH/g. Test Example 1 The photosensitive resins of Examples 7 to 8 and Comparative Examples 4 to 5 were measured for the polystyrene-equivalent weight average molecular weight obtained by GPC after storage for one month after the production and at room temperature, and the rate of change was examined. The results are shown in Table 2. [Table 2]_ styrene-converted weight average molecular weight obtained by GPC Change rate after one month after manufacture Example 7 23169 23681 102.2% Example 8 18230 18558 101.8% Comparative Example 4 5840 7180 122.9% Comparative Example 5 6340 7930 125.1% The photosensitive resin of Examples 7 to 8 showed almost no change. However, in the photosensitive resin of Comparative Examples 2 to 3, an increase in molecular weight of about 25% was observed, which was poor in storage stability. Examples 9 to 12 and Comparative Examples 7 to 1 2
使用實施例7〜8及比較例4〜6之感光性樹脂,以下述 表3之調配製作感光性組成物。此感光性組成物於1 .1 m m 厚之鈉玻璃基板以旋塗機塗佈成乾燥膜厚3 μιη,以1 00 °C -34- 201003310 之加熱板乾燥90秒後,冷卻至室溫。繼而,以超高壓水 銀燈曝光機’以紫外線照射1 5 mW/cm2 ( 3 6 5 nm )、積算 光量 20mJ/cm2,以 U GR A - Ο F F S E T - TE S T KAIL 1 982 作爲 掩罩之軟接觸曝光後,於25 °C之1 %碳酸鈉水浸漬顯像90 秒’形成圖型’以殘留之步驟階數評估感度,以微細線評 估解析度。結果一倂表示於表3中。 [表3] 實施 例9 實施 例10 實施 例11 實施 例12 比較 例7 比較 例8 比較 例9 比較 例10 比較 例11 比較 例12 (A戚分 A4 2.00 2.00 A5 2.00 2.00 A6 2.00 2.00 A7 2.00 2.00 A8 2.00 2.00 光聚合起始劑μ 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 DPHA*2 0.50 0.50 0.50 0.50 0.50 PGMEA^3 1.70 2.99 1.70 2.99 1.70 2.99 1.70 2.99 1.70 2.99 步驟感度 5 7 5 11 脫落 0 3 4 1 3 解析度 [μιη] 線條 4 4 4 4 25 6 6 6 6 線距 8 8 6 6 12 8 8 8 8 ※ 4 Irgacure OXE-01(Ciba Specialty Chemical 公司製) 相較於使用比較例4〜6之感光性樹脂(A6〜A8)的感光 性組成物,使用實施例7〜8(A4〜A5)之感光性樹脂的感光 性組成物係感度高,顯示良好的光阻特性。 -35- 201003310 實施例1 3 於具備攪拌機與冷卻管之1000 ml的燒瓶中,置入 3,3’-4,4’-聯苯基四羧酸酐(宇部興產公司製:BPDA) 71.8g、9,9-雙[4-(2-羥基乙氧基)3苯基苯基]芴(大阪 瓦斯化學公司製:BOPPEF ) 109.7 g、丙二醇單甲基醚乙 酸酯128g、4-二甲基胺基吡啶0.25g,一邊攪拌一邊以 120°C之電熱包加熱4小時。繼而,加入對-甲氧基酚(東京 化成製)0.1 g、羥基乙基丙烯酸酯(東京化成製)13.7g,以 1 20 °C加熱4小時。進一步,加入4-羥丁基丙烯酸酯縮水 甘油基醚(日本化成公司製品:4HBAGE) 34_68g’以120 °C加熱攪拌4小時,得到淡黃色透明黏稠性之感光性樹脂 (A 9 )溶液。 有關所得到之樹脂溶液,測定黏度、GPC之苯乙烯換 算重量平均分子量、固形分及固形分酸價後’爲黏度 1 87 1 00mPa.s/25〇C、以GPC所得到之苯乙烯換算重量平均 分子量4170、固形分66.8%、固形分酸價爲85.4mgKOH/g 實施例1 4 於具備攪拌機與冷卻管之1000 ml的燒瓶中’置入 3,3,-4,4,-聯苯基四羧酸酐(宇部興產公司製:]31>£)八) 61.22g、9,9-雙[6- (2-羥基乙氧基)萘基]芴(大阪瓦斯化 學公司製:BNFEO ) 95.89 g、丙二醇單甲基酸乙酸醋 125g、4 -二甲基胺基吡啶0_25§’ 一邊攪拌一邊以120°C之 -36- 201003310 電熱包加熱4小時。繼而,加入對-甲氧基酚(東京化成製 )〇.1 g、羥基乙基丙烯酸酯(東京化成製)13.3g,以120T: 加熱4小時。進—步,加入4_羥丁基丙烯酸酯縮水甘油基 醚(日本化成公司製品:4HBAGE ) 56g,以1 2 0。(:加熱攪 拌4小時,得到淡黃色透明黏稠性之感光性樹脂(A 1 〇 ) 溶液。 有關所得到之樹脂溶液,測定黏度、GPC之苯乙烯換 算重量平均分子量、固形分及固形分酸價後,爲黏度 5 86700mPa.s/25°C、以GPC所得到之苯乙烯換算重量平均 分子量925 0、固形分59.0%、固形分酸價爲60.4mgKOH/g 實施例15〜16 使用實施例1 3之感光性樹脂’以表4之調配製作成 感光性組成物。使此感光性組成物進行與實施例9〜1 2同 樣之評估。 [表4] 實施例15 實施例16 (A)成分 A9 1.50 1.50 光聚合起始劑μ 0.05 0.05 DPHA*2 0.50 PGMEA*3 2.20 3.49 步驟感度 7 10 解析度 [μηι] 線條 4 4 線距 6 6 -37- 201003310 任一者之感光性組成物係感度亦高,顯示良好的光阻 特性。 [產業上之利用可能性] 本發明之感光性樹脂係可以低成本容易地製造,容易 調整交聯密度或酸價,具備高耐熱性、高透明性、高折射 率及低線膨脹率等優異之特性者。因此,使用此感光性樹 脂之樹脂組成物係可用於調製在液晶顯示器或電子零件等 的層間絕緣膜或保護膜(例如彩色濾光片、液晶顯示元件 、積體電路元件、固體攝影元件等所使用之層間絕緣膜或 保護膜)等。 -38-Using the photosensitive resins of Examples 7 to 8 and Comparative Examples 4 to 6, a photosensitive composition was prepared by the following Table 3. The photosensitive composition was applied to a dry glass film having a thickness of 3 μm on a spinner of a 1.1 m m thick glass substrate, dried on a hot plate at 100 ° C -34 to 201003310 for 90 seconds, and then cooled to room temperature. Then, with an ultra-high pressure mercury lamp exposure machine, ultraviolet light is irradiated with 15 mW/cm2 (3 6 5 nm), the integrated light amount is 20 mJ/cm2, and U GR A - Ο FFSET - TE ST KAIL 1 982 is used as a mask for soft contact exposure. Thereafter, the image was immersed in 1% sodium carbonate water at 25 ° C for 90 seconds to form a pattern, and the sensitivity was evaluated by the order of the remaining steps, and the resolution was evaluated by a fine line. The results are shown in Table 3. [Table 3] Example 9 Example 10 Example 11 Example 12 Comparative Example 7 Comparative Example 8 Comparative Example 9 Comparative Example 10 Comparative Example 11 Comparative Example 12 (A 戚 A4 2.00 2.00 A5 2.00 2.00 A6 2.00 2.00 A7 2.00 2.00 A8 2.00 2.00 Photopolymerization initiator μ 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05 DPHA*2 0.50 0.50 0.50 0.50 0.50 PGMEA^3 1.70 2.99 1.70 2.99 1.70 2.99 1.70 2.99 1.70 2.99 Step sensitivity 5 7 5 11 shedding 0 3 4 1 3 Resolution [μιη] Line 4 4 4 4 25 6 6 6 6 Line spacing 8 8 6 6 12 8 8 8 8 * 4 Irgacure OXE-01 (manufactured by Ciba Specialty Chemical Co., Ltd.) Compared with Comparative Examples 4 to 6 In the photosensitive composition of the photosensitive resin (A6 to A8), the photosensitive composition using the photosensitive resin of Examples 7 to 8 (A4 to A5) has high sensitivity and exhibits excellent photoresist characteristics. -35 - 201003310 Example 1 3 In a 1000 ml flask equipped with a stirrer and a cooling tube, 3,3'-4,4'-biphenyltetracarboxylic anhydride (manufactured by Ube Industries, Ltd.: BPDA) was placed. 71.8 g, 9, 9 -double [4-(2-hydroxyethoxy) ) 3 phenylphenyl] fluorene (obtained by Osaka Gas Chemical Co., Ltd.: BOPPEF) 109.7 g, propylene glycol monomethyl ether acetate 128 g, 4-dimethylaminopyridine 0.25 g, and electric heating at 120 ° C while stirring The package was heated for 4 hours. Then, 0.1 g of p-methoxyphenol (manufactured by Tokyo Chemical Industry Co., Ltd.) and 13.7 g of hydroxyethyl acrylate (manufactured by Tokyo Chemical Industry Co., Ltd.) were added, and the mixture was heated at 1200 ° C for 4 hours. Further, 4-hydroxyl was added. Butyl acrylate glycidyl ether (manufactured by Nippon Kasei Co., Ltd.: 4HBAGE) 34_68g' was heated and stirred at 120 ° C for 4 hours to obtain a pale yellow transparent viscous photosensitive resin (A 9 ) solution. The viscosity, GPC styrene-converted weight average molecular weight, solid content and solid acid value were determined as 'viscosity 1 87 1 00 mPa.s/25 〇C, styrene equivalent weight average molecular weight 4170 obtained by GPC, solid fraction 66.8 %, solid acid value of 85.4 mgKOH / g Example 14 4 Place 3,3,-4,4,-biphenyltetracarboxylic anhydride in a 1000 ml flask equipped with a stirrer and a cooling tube (Ube Industries Company system:]31>£)eight) 61.22g, 9,9-bis[6-(2-hydroxyl Oxy)naphthyl]anthracene (BNFEO, manufactured by Osaka Gas Chemical Co., Ltd.) 95.89 g, propylene glycol monomethyl acetate vinegar 125 g, 4-dimethylaminopyridine pyridine 0_25§' while stirring, at 120 ° C -36- 201003310 The electric heating bag is heated for 4 hours. Then, 13.3 g of p-methoxyphenol (manufactured by Tokyo Chemical Industry Co., Ltd.) and hydroxyethyl acrylate (manufactured by Tokyo Chemical Industry Co., Ltd.) were added, and the mixture was heated at 120 T: for 4 hours. Further, 4 g of hydroxybutyl acrylate glycidyl ether (manufactured by Nippon Kasei Co., Ltd.: 4HBAGE) was added to 56 g to 1,200. (: Heating and stirring for 4 hours to obtain a pale yellow transparent viscous photosensitive resin (A 1 〇) solution. For the obtained resin solution, the viscosity, GPC styrene-converted weight average molecular weight, solid content, and solid acid value were measured. Thereafter, the viscosity was 5 86700 mPa·s / 25 ° C, the weight average molecular weight of styrene in terms of GPC was 925 0, the solid content was 59.0%, and the solid acid value was 60.4 mg KOH / g. Examples 15 to 16 Using Example 1 The photosensitive resin of 3 was prepared into a photosensitive composition by the formulation of Table 4. The photosensitive composition was evaluated in the same manner as in Examples 9 to 12. [Table 4] Example 15 Example 16 (A) Ingredients A9 1.50 1.50 Photopolymerization initiator μ 0.05 0.05 DPHA*2 0.50 PGMEA*3 2.20 3.49 Step sensitivity 7 10 Resolution [μηι] Line 4 4 Line spacing 6 6 -37- 201003310 Photosensitive composition sensitivity of either It is also high and exhibits good photoresist characteristics. [Industrial Applicability] The photosensitive resin of the present invention can be easily produced at low cost, and it is easy to adjust the crosslinking density or the acid value, and has high heat resistance and high transparency. High refractive index and The resin composition using the photosensitive resin can be used for preparing an interlayer insulating film or a protective film (for example, a color filter or a liquid crystal display element) such as a liquid crystal display or an electronic component. Interlayer insulating film or protective film used for integrated circuit components, solid-state imaging devices, etc. -38-
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