KR101232947B1 - Illumination system for automatic optical inspection and assembly of it and camera system - Google Patents

Abstract

The present invention relates to an illumination system used for an automatic optical inspection for irradiating an object to be inspected, comprising a first light source, a second light source, a third light source, a first optical member and at least one second optical member. It is configured by. The second optical member is formed at an optical output end of the first light source, the second light source, or the third light source, so that light emitted from the optical output end illuminates the inspection object. The light output ends of the first light source and the second light source are symmetrically disposed to face the surface of the inspection object. In addition, the first optical member is disposed to face the symmetry plane, and is mounted so that the light rays emitted from the third light source face the surface of the inspection object.

Description

ILLUMINATION SYSTEM FOR AUTOMATIC OPTICAL INSPECTION AND ASSEMBLY OF IT AND CAMERA SYSTEM}

The present invention relates to an illumination system used for automatic optical inspection and an assembly structure of the illumination system and the image generation system, and more particularly to a light source system for illuminating the surface of the object to be inspected.

Automated optical inspection (AOI) is an essential step in the manufacture of liquid crystal display screens, chips and circuit boards in semiconductor localization circuits, which can reduce the manufacturing costs by diagnosing and improving product quality during the production process. Automatic optical inspection achieves its function by balancing two important indicators: inspection speed and inspection sensitivity. As production technology has advanced, manufacturing speeds have increased, board sizes have been increased, and the size of printed drawings has been reduced, correspondingly increasing the demand for speed and sensitivity of automatic optical inspection.

In general, the light intensity required to obtain iconography of an object or sample surface is inversely proportional to pixel size and inspection speed. Therefore, if you want to perform high-speed, high-resolution optical inspection for the LCD or chip, you must use a highly efficient illumination optical system. The size of the light source can be increased to match the required pixel size or the numerical aperture (NA) of the image lens, but this results in a lower depth of field, which can affect the precision of the system. In addition, the lens diameter is limited because a large area of the sample must be inspected with a large field of view. When scanning the sample surface using a CCD linear shooting sensor. In general, it is illuminated by a linear optical fiber or a linear LED light arranged in a matrix form, it is effective to perform a low-resolution inspection of the image smaller than 10um with this type of illumination method and inspection device. However, if the high resolution inspection of the image larger than 10um is to be performed, the above-described lighting technology is very low efficiency.

1 is an explanatory diagram of a lighting and image generating system disclosed in the Republic of China Patent No. 389833. The illumination and image generation system 10 includes a first illuminator 111, a second illuminator 112, a first light reflector 121, a second light reflector 122, a planar refraction lens 13, and an optical member ( 14), an image generator (15) is configured. In order for the first illuminator 111 and the second illuminator 112 to concentrate the light on the surface of the object to be irradiated, the light beam is concentrated on one axis using linear illumination. The second light reflector 122 is formed by forming a long groove 1211 in the middle of the first light reflector 121 so that two sets of illuminators can replace three sets of illuminators. Reflected light passes through the long groove to reach the surface of the inspection object (80). Reflected light on the surface of the inspection object 80 also passes through the long groove 1211 and is refracted through the optical member 14 to be input into the image generator 15 to generate an image.

In the above-described prior art, the light beams can be concentrated on one axis only by using an arc-shaped light reflector or a refractor, and this type of lighting system requires a relatively large space to accommodate a complicated light path. In addition, a plurality of light reflectors, refractive lenses, and long grooves have difficulty in precisely controlling the refraction and reflection directions only when aiming at a precise angle.

SUMMARY OF THE INVENTION An object of the present invention is to provide an illumination system used for automatic optical inspection and an assembly structure of the illumination system and an image generation system, wherein a light emitting diode is a light source and is equipped with an optical member capable of collecting light rays. The total length is reduced and the space required to mount the lighting system is effectively reduced.

In order to achieve the above object, the illumination system used in the automatic optical inspection provided by the present invention illuminates the object to be inspected, the first light source, the second light source, the third light source, the first optical member and the discontinuous focusing ( It comprises at least three or more second optical members having a curved surface. Each of the second optical members is formed at an optical output end of the first light source, the second light source, and the third light source to concentrate light rays emitted from the light output end. The light output ends of the first light source and the second light source are symmetrically disposed to face the surface of the inspection object. In addition, the first optical member is disposed to face the symmetry plane, and is mounted so that the light rays emitted from the third light source face the surface of the inspection object.

The second optical member according to an embodiment of the present invention includes at least one Fresnel lens.

The first optical member according to the embodiment of the present invention uses a spectroscopic lens.

An assembly structure of an illumination system and an image generating system provided by the present invention illuminates an object to be inspected and generates an image of the object to be inspected, and includes a first light source, a second light source, a third light source, a first optical member, and a discontinuity. And at least three or more second optical members having a condensing curve and an image generating system. Each of the second optical members is formed at an optical output end of the first light source, the second light source, and the third light source to concentrate light rays emitted from the light output end. The light output ends of the first light source and the second light source are symmetrically disposed to face the surface of the inspection object. In addition, the first optical member is disposed to face the symmetry plane, and is mounted so that the light rays emitted from the third light source face the surface of the inspection object. Rays reflected from the surface of the inspection object are input into the image generation system to generate an image.

The foregoing is a brief description of the technical features and advantages of the present invention, the following detailed description of the technical features and advantages of the present invention to be disclosed in the claims to enable a more detailed understanding of the present invention. Those skilled in the art will appreciate that the concepts and embodiments disclosed below are merely examples and that various modifications and equivalent other embodiments are possible without departing from the spirit and scope of the present invention. Those skilled in the art will also appreciate that the following description does not depart from the spirit and scope of the invention as set forth in the claims.

1 is an explanatory diagram of a lighting and image generating system disclosed in the Republic of China Patent No. 389833.
2 is an explanatory diagram of an illumination system used for an automatic optical inspection according to a first embodiment of the present invention.
3 is an explanatory view of the combination of the illumination system and the image generation system of the present invention.
4 is a cross-sectional explanatory view of a second optical member according to a first embodiment of the present invention.

2 is an explanatory diagram of an illumination system 20 used for the automatic optical inspection according to the first embodiment of the present invention. The illumination system illuminates the object to be inspected 80, and includes a first light source 21, a second light source 22, a third light source 23, a first optical member 24 and at least three second or more. It is configured to include an optical member (25). Each of the second optical members 25 is formed at an optical output end of the first light source 21, the second light source 22, and the third light source 23, so that light emitted from the optical output end is directly or indirectly. The surface of the object to be inspected 80 is illuminated on one axis. The light output terminals of the first light source 21 and the second light source 22 are symmetrically disposed to face the surface of the inspection object. In addition, the first light source 21, the second light source 22 and the third light source 23 is to be a linear LED light source or an optical fiber linear light source. The first optical member 24 is disposed to face the symmetry plane, and the light rays emitted from the third light source 23 face the surface of the object to be inspected. Alternatively, the first optical member 24 forms 45 degrees with the surface of the object to be inspected 80, and the first optical member 24 is positioned on the top of the surface of the object to be inspected 80. Through this, the first light source 21, the second light source 22 and the third light source 23 is irradiated to the surface of the object 80 to be uniformly distributed in each direction, so that it is concentrated in one place Improve the brightness of the generated image.

3 is an explanatory view of the combination of the illumination system and the image generation system of the present invention. An image generator (30), such as a CCD linear imager, is mounted to the first optical member 24. The first optical member 24 receives the reflected light after irradiating the surface of the object to be inspected 80. . The first optical member 24 may be a spectroscopic lens (splitting lens), through the illumination system 20 of the present invention, the image generating sensor 30 can ensure an excellent image production quality In addition, the space required for assembling the illumination system 20 and the image generator 30 may be reduced.

The first optical member 24 is a spectroscopic lens, and the light beams output by the third light source 23 are refracted while passing through the first optical member 24 to irradiate the surface of the object to be inspected 80. do. In addition, the light beam is reflected toward the first optical member 24 vertically from the surface of the object to be inspected 80, and the reflected light passes through the first optical member 24. ) Will be input inside to create an image.

4 is an explanatory cross-sectional view of a second optical member according to a first embodiment of the present invention. The second optical member 25 includes two Fresnel Lenses 41. One surface of the Fresnel lens has a sawtooth discontinuous curved structure, and the other surface is formed into a flat surface. The two Fresnel lenses 41 are discontinuously coupled to each other to form the second optical member 25. That is, two Fresnel lenses are combined to complete the second optical member 25 in a unitary molding method. In general, the second optical member 25 is formed by combining a single long linear lens or a lens. The second optical member 25 is installed at the output end of the linear LED light source to concentrate the light beam on the inspection object 80.

Compared with the conventional spherical lens, the Fresnel lens divides the surface of the lens into a number of concentric patterns (i.e., a pre-ring ring) to achieve the same optical effect, while saving material. Since the design of the Fresnel lens can greatly reduce the thickness (and weight, volume) of the lens, the present invention can greatly reduce the space required for combining the illumination system and the image generation system.

The above embodiments are merely exemplary embodiments for explaining the technical features of the present invention, and are not used to limit the protection scope of the present invention described in the claims. Therefore, those skilled in the art can make various modifications and other equivalent embodiments without departing from the spirit and scope of the present invention, and thus the protection scope of the present invention is defined in the technical scope of the appended claims. Should be decided by

* Prior Art "
DESCRIPTION OF SYMBOLS 10 Image generation system 13 Planar refraction lens 14 Optical member
15: image generator 111: first illuminator 112: second illuminator
121: first reflector 122: second reflector 1211: long groove
Inventive
20 lighting system 21 first light source 22 second light source
23: third light source 24: first optical member
25: second optical member 30: image generating sensor
41: Fresnel lens 80: the object to be inspected

Claims (16)

A first light source;
A second light source, comprising: a second light source in which light output ends of the first light source and the second light source are symmetrically directed to a surface of an object to be inspected;
A third light source;
A first optical member positioned on a top of the object to be inspected and mounted so that a light beam emitted from the third light source faces the surface of the object to be inspected; And
And at least three or more second optical members formed at the light output ends of the first light source, the second light source, and the third light source and having a discontinuous condensing curved surface for concentrating light rays emitted from the light output end. But
And said second optical member comprises two Fresnel lenses, said two Fresnel lenses having discontinuous curves coupled to each other. The illumination system of claim 1, wherein the first optical member is disposed to face a plane of symmetry between the first and second light sources. delete delete The illumination system of claim 1, wherein the first light source, the second light source, and the third light source are LED linear light sources or optical fiber linear light sources. The illumination system of claim 1, wherein the first optical member is a spectroscopic lens. A first light source;
A second light source, comprising: a second light source in which light output ends of the first light source and the second light source are symmetrically directed to a surface of an object to be inspected;
A third light source;
A first optical member positioned on a top of the object to be inspected and mounted so that a light beam emitted from the third light source faces the surface of the object to be inspected;
At least three or more second optical members formed at light output ends of the first light source, the second light source, and the third light source and having a discontinuous condensing curved surface for concentrating light rays emitted from the light output end; And
And an image generation system configured to generate an image by receiving light reflected from the surface of the inspection object.
The second optical member includes two Fresnel lenses, and the two Fresnel lenses have an assembly structure of an illumination system and an image generating system used in an automatic optical inspection, in which discontinuous curved surfaces are coupled to each other. . The assembly structure according to claim 7, wherein the first optical member is disposed to face a plane of symmetry between the first light source and the second light source. delete delete The assembly structure according to claim 7, wherein the first light source, the second light source, and the third light source are LED linear light sources or optical fiber straight light sources. The assembly structure according to claim 7, wherein said first optical member is a spectroscopic lens. 8. The assembly structure according to claim 7, wherein the image generation system comprises a CCD linear imager. The illumination system and image generation system according to claim 7, wherein the image generation system receives light rays reflected from the surface of the inspection object, and first passes the light rays through the first optical member. Assembly structure. A first light source;
A second light source, comprising: a second light source in which light output ends of the first light source and the second light source are symmetrically directed to a surface of an object to be inspected;
A third light source;
A first optical member positioned on a top of the object to be inspected and mounted so that a light beam emitted from the third light source faces the surface of the object to be inspected; And
It includes at least one second optical member formed in the light output terminal of the first light source, the second light source or the third light source, and arranged to correspond to the light output terminal of each light source so as to focus the output light rays,
And said second optical member comprises two Fresnel lenses, said two Fresnel lenses having discontinuous curves coupled to each other. A first light source;
A second light source, comprising: a second light source in which light output ends of the first light source and the second light source are symmetrically directed to a surface of an object to be inspected;
A third light source;
A first optical member positioned on a top of the object to be inspected and mounted so that a light beam emitted from the third light source faces the surface of the object to be inspected; And
Is formed at the light output end of the first light source, the second light source and the third light source, comprising at least three second optical member for concentrating the light emitted from the light output end,
Wherein said second optical member comprises at least one two Fresnel lenses, said two Fresnel lenses having discontinuous curves coupled to each other.

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