TWI484164B - Optical re - inspection system and its detection method - Google Patents

Optical re - inspection system and its detection method Download PDF

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TWI484164B
TWI484164B TW101116831A TW101116831A TWI484164B TW I484164 B TWI484164 B TW I484164B TW 101116831 A TW101116831 A TW 101116831A TW 101116831 A TW101116831 A TW 101116831A TW I484164 B TWI484164 B TW I484164B
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module
light source
light
tested
control
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TW201346250A (en
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Guang Shiah Wang
Shih Chang Chiu
Yen Te Lu
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Machvision Inc
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光學複檢系統及其檢測方法Optical re-inspection system and detection method thereof
本發明係關於一種光學複檢系統及其檢測方法,尤指一種用於輔助進行電子基板複檢之光學複檢系統及其檢測方法。The invention relates to an optical re-inspection system and a detection method thereof, in particular to an optical re-inspection system for assisting in re-inspection of an electronic substrate and a detection method thereof.
電子工業中,電子元件的微型化趨勢使得無法再藉由作業人員直接以目視的方式來辨識電子元件的缺陷,進而利用自動光學檢測系統(Automatic Optical Inspection,AOI)在產線上對待測物(例如印刷電路板、晶圓或顯示面板等電子基板)進行檢測,以檢測出各該待測物的缺陷,一般而言,因為各該待測物的品質直接關係到各該待測物進行後續組裝後是否能正常運作,因此對該待測物進行品質檢測為產線上相當的重要環節。In the electronics industry, the trend toward miniaturization of electronic components makes it impossible to visually identify defects in electronic components by the operator, and to use the Automatic Optical Inspection (AOI) to measure objects on the production line (for example, An electronic substrate such as a printed circuit board, a wafer, or a display panel is detected to detect defects of each of the objects to be tested. Generally, since the quality of each of the objects to be tested is directly related to each of the objects to be tested for subsequent assembly After the normal operation, the quality inspection of the object to be tested is a very important part of the production line.
其中,該自動光學檢測系統在完成該待測物的檢測後,會將該待測物上所檢測出具有缺陷的位置之相關檢測結果傳送到一複檢站,再藉由該複檢站的複檢裝置的鏡頭可移至該缺陷的位置作放大倍率的拍攝,同時將拍攝資料顯示在螢幕上以人工複判的方式確認該檢測結果是否為真實的缺陷或僅為該自動光學檢測系統的誤判,或對缺陷進一步進行篩選的步驟,篩出具有超過檢驗規範的缺陷之待測物,反之留下以繼續進行後續作業。Wherein, after the automatic optical detection system completes the detection of the object to be tested, the relevant detection result of the position detected on the object to be tested is transmitted to a rechecking station, and then by the rechecking station The lens of the rechecking device can be moved to the position of the defect for magnification shooting, and the shooting data is displayed on the screen to confirm whether the detection result is a real defect or only the automatic optical detecting system by manual reconsideration. Misjudgment, or the step of further screening the defect, screening out the test object with defects exceeding the inspection specification, and otherwise leaving to continue the subsequent operation.
其中,該缺陷可能為凹下或凸起,而實務上因為待測物的使用需求不同,導致對於凹下與凸起的缺陷可能具有不同的檢驗規範,例如對於凸起之缺陷尺寸的容忍度可能比對凹下之缺陷尺寸的容忍度高,因此必須確實判斷該缺陷事實上是凹下或凸起。然而,目前的複檢裝置皆為單一固定鏡頭和單一固定光源,使得拍攝出的影像資料僅為平面影像而無立體感,使得複檢站的作業人員在無法由螢幕判讀得知該缺陷為凸起或凹下的情形下,往往以較嚴厲的檢驗規範來進行篩選,造成過度檢驗的狀況,而把原本在檢驗容忍度內的待測物篩出,導致成本的提高。Wherein, the defect may be concave or convex, and in practice, because the use requirements of the object to be tested are different, the defect may have different inspection specifications for the concave and convex defects, for example, tolerance of the defect size of the protrusion. It may be more tolerant than the size of the defect in the recess, so it must be determined that the defect is actually concave or convex. However, the current re-inspection devices are a single fixed lens and a single fixed light source, so that the captured image data is only a planar image without a stereoscopic effect, so that the operator of the re-examination station cannot know that the defect is convex by the screen interpretation. In the case of ups and downs, screening is often performed with stricter inspection specifications, resulting in an over-inspection condition, and the object to be tested originally in the inspection tolerance is screened out, resulting in an increase in cost.
因此,本發明係提供一種光學複檢系統及其檢測方法,以輔助作業人員精確判斷待測物的表面特性,進而符合檢驗需求。Therefore, the present invention provides an optical re-inspection system and a detection method thereof to assist an operator in accurately determining the surface characteristics of the object to be tested, thereby meeting the inspection requirements.
本發明之一目的在於提供一種光學複檢系統及其檢測方法,可供輔助作業人員精確判斷待測物的表面特性,達成符合檢驗需求的功效。An object of the present invention is to provide an optical re-inspection system and a detection method thereof, which can be used for an auxiliary worker to accurately judge the surface characteristics of the object to be tested and achieve the effect of meeting the inspection requirements.
為達上述目的及其他目的,本發明提供一種光學複檢系統,係用於供輔助檢測待測物表面的缺陷,其包含工作平台、光源模組、影像擷取模組、控制模組及顯示模組。其中,該工作平台具有承載區用以承載該待測物;該光源模組設於該工作平台上方並對應該承載區,該光源模組用於發出第一光線照射該待測物,用以使該第一光線入射該待測物表面而反射出第二光線;該影像擷取模組,設於該工作平台上方並對應該承載區,該影像擷取模組用以擷取該第二光線並產生影像資料;該控制模組,係電連接該光源模組與該影像擷取模組,或進一步電連接該工作平台,該控制模組用於產生控制訊號以控制該工作平台、該光源裝置與該影像擷取模組之至少其一者的作動,以改變該第二光線;以及該顯示模組,係電連接該控制模組,該顯示模組用於顯示該控制訊號及該影像資料。。To achieve the above and other objects, the present invention provides an optical re-inspection system for assisting in detecting defects on the surface of an object to be tested, including a working platform, a light source module, an image capturing module, a control module, and a display. Module. The working platform has a carrying area for carrying the object to be tested; the light source module is disposed above the working platform and corresponds to the carrying area, and the light source module is configured to emit a first light to illuminate the object to be tested, The first light is incident on the surface of the object to be tested to reflect the second light; the image capturing module is disposed above the working platform and is corresponding to the carrying area, and the image capturing module is configured to capture the second light The light is generated by the light source module and the image capturing module, or is further electrically connected to the working platform, the control module is configured to generate a control signal to control the working platform, Actuating at least one of the light source device and the image capturing module to change the second light; and the display module is electrically connected to the control module, wherein the display module is configured to display the control signal and the video material. .
藉此,本發明之一種光學複檢系統及其檢測方法,係藉由動態地改變待測物反射之第二光線,並藉由影像擷取模組擷取該第二光線以產生影像資料,並於顯示模組動態地顯示該影像資料,以輔助作業人員精確判斷待測物的表面特性,達成符合檢驗需求的功效。Therefore, an optical re-inspection system and a detecting method thereof according to the present invention generate a video data by dynamically changing a second light reflected by the object to be tested, and capturing the second light by the image capturing module. The image data is dynamically displayed on the display module to assist the operator in accurately determining the surface characteristics of the object to be tested, and achieving the effect of meeting the inspection requirements.
為充分瞭解本發明之目的、特徵及功效,茲藉由下述具體之實施例,並配合所附之圖式,對本發明做一詳細說明,說明如後:請參照第1圖,係為本發明一具體實施例之光學複檢系統的功能方塊圖。於第1圖中,光學複檢系統10,係用於輔助複檢站之作業人員,以檢測一待測物表面的缺陷特性,該光學複檢系統10包含一工作平台12、一光源模組14、一影像擷取模組16、一控制模組18及一顯示模組20。其中,該待測物係可為例如印刷電路板、晶圓或顯示面板等電子基板。In order to fully understand the object, features and advantages of the present invention, the present invention will be described in detail by the following specific embodiments and the accompanying drawings, which are illustrated as follows: A functional block diagram of an optical retest system of a particular embodiment of the invention. In the first embodiment, the optical re-inspection system 10 is used to assist the operator of the re-examination station to detect the defect characteristics of the surface of the object to be tested. The optical re-inspection system 10 includes a working platform 12 and a light source module. 14. An image capture module 16, a control module 18, and a display module 20. The object to be tested may be an electronic substrate such as a printed circuit board, a wafer, or a display panel.
該工作平台12具有一承載區用以承載該待測物。The working platform 12 has a carrying area for carrying the object to be tested.
該光源模組14,設於該工作平台12上方並對應該承載區,該光源模組14用於發出一第一光線照射該待測物,用以使該第一光線入射該待測物表面而反射出一第二光線。The light source module 14 is disposed above the working platform 12 and corresponding to the carrying area. The light source module 14 is configured to emit a first light to illuminate the object to be tested, so that the first light is incident on the surface of the object to be tested. And a second light is reflected.
該影像擷取模組16,設於該工作平台12上方並對應該承載區,該影像擷取模組16用以擷取該第二光線,並產生一影像資料,其中該影像擷取模組16係可為連續地擷取該第二光線,並產生連續的影像資訊。The image capturing module 16 is disposed above the working platform 12 and is corresponding to the carrying area. The image capturing module 16 is configured to capture the second light and generate an image data, wherein the image capturing module The 16 Series can continuously capture the second light and produce continuous image information.
該控制模組18,係電連接該光源模組14與該影像擷取模組16,或進一步電連接該工作平台12,該控制模組14用於產生控制訊號以控制該工作平台12、該光源裝置14與該影像擷取模組16之至少其一者的作動,以改變該第二光線,使該第二光線發生動態的變化。The control module 18 is electrically connected to the light source module 14 and the image capturing module 16, or is further electrically connected to the working platform 12, the control module 14 is configured to generate a control signal to control the working platform 12, the Actuation of at least one of the light source device 14 and the image capturing module 16 to change the second light to cause a dynamic change of the second light.
該顯示模組20,係電連接該控制模組18,該顯示模組20用於顯示該控制訊號及由該控制模組18所接收之影像資料的動態變化,使一作業人員可經由觀看該顯示模組20所顯示的影像資料,輔助判讀該缺陷為凹下或凸起。The display module 20 is electrically connected to the control module 18, and the display module 20 is configured to display the control signal and the dynamic change of the image data received by the control module 18, so that an operator can view the The image data displayed by the module 20 is displayed to assist in interpreting the defect as a concave or convex.
一併參照第2圖,係為本發明一具體實施例之光學複檢系統的示意圖。於第2圖中,該光學複檢系統10包含該工作平台12、該光源模組14、該影像擷取模組16、該控制模組18及該顯示模組20。其中,該工作平台12係水平或傾斜特定角度放置以乘載待測物1,即該待測物1位於該承載區122;該影像擷取模組16係包含一面型感光元件162與一影像處理單元164,該面型感光元件162係設置於該承載區122的正上方以擷取該第二光線,該影像處理單元164係根據所擷取之第二光線,以產生該影像資訊;該控制模組18包含一輸入介面182,例如可為一滑鼠,用以接受作業人員的控制,使該控制模組18可輸出該控制訊號以控制該工作平台12、該光源裝置14與該影像擷取模組16之至少其一者的作動。Referring to Figure 2, there is shown a schematic diagram of an optical re-inspection system in accordance with an embodiment of the present invention. In the second embodiment, the optical re-examination system 10 includes the working platform 12, the light source module 14, the image capturing module 16, the control module 18, and the display module 20. The working platform 12 is placed horizontally or obliquely at a specific angle to carry the object 1 to be tested, that is, the object to be tested 1 is located in the carrying area 122; the image capturing module 16 includes a side-type photosensitive element 162 and an image. The processing unit 164 is disposed directly above the carrying area 122 to capture the second light. The image processing unit 164 is configured to generate the image information according to the captured second light; The control module 18 includes an input interface 182, which can be, for example, a mouse for receiving control from the operator, so that the control module 18 can output the control signal to control the working platform 12, the light source device 14 and the image. The actuation of at least one of the modules 16 is captured.
於本實施例中,該控制模組18係電連接該光學模組14與該影像擷取模組16,且該光源模組14係包含可調亮度之複數個光源產生器,且各該光源產生器係以不同之入射方向照射該待測物1。其中,該光源產生器的數量可為三組,於此,以一第一光源產生器142、一第二光源產生器144、一第三光源產生器146作為區分以進一步說明。該第一光源產生器142係可為一環形光源,圍繞設置於該面型感光元件162之周圍,而正向照射於該待測物1,該第二光源產生器144與該第三光源產生器146係相對應地設置於該面型感光元件162的兩側,進而側向照射於該待測物1。In the embodiment, the control module 18 is electrically connected to the optical module 14 and the image capturing module 16, and the light source module 14 includes a plurality of light source generators with adjustable brightness, and each of the light sources The generator illuminates the object to be tested 1 in different incident directions. The number of the light source generators may be three groups. Here, a first light source generator 142, a second light source generator 144, and a third light source generator 146 are used for further description. The first light source generator 142 can be an annular light source disposed around the surface-type photosensitive element 162 and positively illuminating the object to be tested 1, and the second light source generator 144 and the third light source are generated. The 146 is correspondingly disposed on both sides of the surface-type photosensitive element 162, and is laterally irradiated to the object 1 to be tested.
其中,該控制訊號所控制的作動係可為藉由執行一程式以動態地調整該等光源產生器各自發出相對應之不同亮度的光線。該控制訊號並可令該影像擷取模組16同步且動態地擷取影像,進而輸出該影像資料至該顯示模組20,其中該影像資料及該控制訊號係相對應地同時顯示在該顯示模組20。於本實施例中,作業人員可動態地滑動該滑鼠,使該控制模組18輸出該控制訊號,同時動態地控制該第一光源產生器142、該第二光源產生器144、該第三光源產生器146產生相對應之光源亮度變化,即當滑鼠控制該顯示模組20之螢幕上的游標(圖未示)往一方向動態地移動,位於與該方向同向之光源產生器之亮度將動態地增強,而與該方向相反之另一方向的光源產生器之亮度將動態地減弱,以第2圖為例,當該游標的位置位於該螢幕中央時(係對應於該待測物的中央),該第一光源產生器142、該第二光源產生器144、該第三光源產生器146為預設之光源亮度,當該游標經該作業人員控制而往該螢幕之左側動態地移動,此時該光源模組14中位於左側之第二光源產生器144的亮度逐漸變強,而位於右側的第三光源產生器146的亮度逐漸變弱,位於中間的第一光源產生器142的亮度則介於該第二光源產生器144的亮度與該第三光源產生器146的亮度之間,藉此該第一光線係動態地改變,進而使得該待測物反射之第二光線亦產生動態地變化。The actuation mechanism controlled by the control signal may be configured to dynamically adjust the light of the different brightness of the light source generators by performing a program. The control signal can be synchronized and dynamically captured by the image capture module 16 to output the image data to the display module 20, wherein the image data and the control signal are simultaneously displayed on the display. Module 20. In this embodiment, the operator can dynamically slide the mouse to cause the control module 18 to output the control signal, while dynamically controlling the first light source generator 142, the second light source generator 144, and the third The light source generator 146 generates a corresponding change in the brightness of the light source, that is, when the mouse controls the cursor (not shown) on the screen of the display module 20 to dynamically move in a direction, the light source generator is located in the same direction as the direction. The brightness will be dynamically enhanced, and the brightness of the light source generator in the other direction opposite to the direction will be dynamically weakened, as exemplified in Fig. 2, when the position of the cursor is at the center of the screen (corresponding to the test to be tested) The first light source generator 142, the second light source generator 144, and the third light source generator 146 are preset light source brightnesses, and the cursor is dynamically moved to the left side of the screen when the cursor is controlled by the operator. When the ground is moved, the brightness of the second light source generator 144 on the left side of the light source module 14 gradually becomes stronger, and the brightness of the third light source generator 146 located on the right side gradually becomes weaker, and the first light source generator located in the middle 142 The degree is between the brightness of the second light source generator 144 and the brightness of the third light source generator 146, whereby the first light system is dynamically changed, so that the second light reflected by the object to be tested is also generated. Change dynamically.
具體而言,當該游標的位置往該螢幕之左側動態地移動,在該滑鼠動態移動的同時,若該缺陷係為凹下,則在該待測物1上方左側光源亮度逐漸增強時,該缺陷之凹下範圍內的右側表面則會逐漸變亮,同時該缺陷之凹下範圍內的左側表面會逐漸變暗,反之,當該游標的位置往該螢幕之右側動態地移動,該等光源產生器的作動及該缺陷之凹下範圍的光影變化係與上述相反;若該缺陷係為凸起,則應可理解的是,該缺陷之凸起範圍表面的光影變化與上述該缺陷為凹下時之表面的光影變化相反。其中此處的光影變化係為該缺陷所反射之第二光線的變化所造成的視覺效果,本發明透過該影像擷取模組擷取該第二光線以產生動態變化的影像資料,並經由該顯示模組顯示動態變化的影像資料,讓該作業人員直接藉由持續觀測且控制在該螢幕上的游標位置,即可同時由該螢幕持續且對應地觀測到該缺陷表面的光影變化,而得知該缺陷的整體外觀,以精確判斷該缺陷係為凹下或凸起,避免過度檢驗的問題。Specifically, when the position of the cursor moves to the left side of the screen dynamically, if the defect is concave under the dynamic movement of the mouse, when the brightness of the left side light source is gradually increased above the object 1 to be tested, The right side surface of the defect in the concave range will gradually become brighter, and the left side surface in the concave range of the defect will gradually become darker. Conversely, when the position of the cursor moves to the right side of the screen dynamically, such The operation of the light source generator and the change of the light and shadow of the concave range of the defect are opposite to the above; if the defect is a protrusion, it should be understood that the light and shadow change of the surface of the convex range of the defect and the defect are The light and shadow of the surface when recessed are reversed. The light and shadow change here is a visual effect caused by the change of the second light reflected by the defect, and the image capture module captures the second light to generate dynamically changing image data, and The display module displays the dynamically changing image data, so that the operator can continuously and correspondingly observe the light and shadow changes of the defect surface by continuously observing and controlling the cursor position on the screen. Knowing the overall appearance of the defect, it is possible to accurately judge whether the defect is concave or convex and avoid excessive inspection.
再者,該光源模組之光源產生器的數量及設置位置不限於本實施例及圖式,亦可為兩個的態樣,例如僅設置該第一光源產生器142及該第三光源產生器146,或僅設置該第二光源產生器144及該第三光源產生器146,只要該等光源產生器係分別以不同之入射方向照射該承載區,而可藉由該控制模組的調整進而動態地改變該第二光線,即屬本發明之範疇。Furthermore, the number and arrangement positions of the light source generators of the light source module are not limited to the embodiment and the drawings, and may also be two aspects, for example, only the first light source generator 142 and the third light source are provided. 146, or only the second light source generator 144 and the third light source generator 146, as long as the light source generators respectively illuminate the carrying area in different incident directions, and can be adjusted by the control module Further changing the second light dynamically is within the scope of the invention.
於其他實施例中,該工作平台12可更包含一第一伺服馬達,該控制模組18係可電連接該工作平台12,以控制該第一伺服馬達,使該工作平台12動態地進行平移、翻轉或晃動,來帶動放置於該工作平台12的待測物,以動態地改變該第二光線,於此可僅需一個光源產生器即可達成本發明之功效。In other embodiments, the work platform 12 can further include a first servo motor, and the control module 18 can electrically connect the work platform 12 to control the first servo motor to dynamically translate the work platform 12 And flipping or shaking to drive the object to be tested placed on the working platform 12 to dynamically change the second light, wherein only one light source generator is needed to achieve the effect of the present invention.
於其他實施例中,該影像擷取模組16可更包含一第二伺服馬達,該控制模組18係可電連接該影像擷取模組16,以控制該第二伺服馬達,使該影像擷取模組16的拍攝位置和拍攝角度進行動態地改變,以動態地改變由該影像擷取模組16所接收的第二光線,於此可僅需一個光源產生器亦可達成本發明之功效。In other embodiments, the image capturing module 16 further includes a second servo motor, and the control module 18 is electrically connected to the image capturing module 16 to control the second servo motor to enable the image. The shooting position and the shooting angle of the capture module 16 are dynamically changed to dynamically change the second light received by the image capturing module 16 , and only one light source generator may be needed to achieve the present invention. efficacy.
於其他實施例中,該光源模組14可更包含一第三伺服馬達,該控制模組18係可電連接該光源模組14,以控制該第三伺服馬達,藉由動態地改變該光源模組14的照射位置來改變該第一光線的入射方向,以動態地改變該第二光線,於此可僅需一個光源產生器亦可達成本發明之功效。In other embodiments, the light source module 14 further includes a third servo motor, and the control module 18 is electrically connected to the light source module 14 to control the third servo motor by dynamically changing the light source. The illumination position of the module 14 changes the incident direction of the first light to dynamically change the second light, and only one light source generator can be used to achieve the effect of the present invention.
請參照第3圖,係為本發明一具體實施例之光學複檢系統之檢測方法的步驟流程圖。於第3圖中,該光學複檢系統之檢測方法,用於輔助複檢站之作業人員,以進一步對待測物表面之缺陷進行檢測。Please refer to FIG. 3, which is a flow chart of steps of a method for detecting an optical re-inspection system according to an embodiment of the present invention. In Fig. 3, the detection method of the optical re-inspection system is used to assist the operator of the re-inspection station to further detect defects on the surface of the object to be tested.
其中,該檢測方法係起始於步驟S31,提供工作平台、光源模組、影像擷取模組、控制模組及顯示模組,該顯示模組係電連接該控制模組。The detecting method is started in step S31, and provides a working platform, a light source module, an image capturing module, a control module and a display module, and the display module is electrically connected to the control module.
接著步驟S32,令該光源模組發出第一光線照射該待測物,使該第一光線入射該待測物表面而反射出第二光線。Next, in step S32, the light source module emits a first light to illuminate the object to be tested, so that the first light is incident on the surface of the object to be tested to reflect the second light.
又接著步驟S33,令該控制模組產生控制訊號以動態地控制該工作平台、該光源模組與該影像擷取模組之至少其一者的作動,進而動態地改變該第二光線,該影像擷取模組擷取該第二光線而產生影像資料,該顯示模組動態地顯示該影像資料及該控制訊號。Step S33, the control module generates a control signal to dynamically control the operation of at least one of the working platform, the light source module and the image capturing module, thereby dynamically changing the second light. The image capturing module captures the second light to generate image data, and the display module dynamically displays the image data and the control signal.
藉此,經由該顯示模組的動態地顯示該影像資料,讓該作業人員可觀測到該缺陷的整體外觀樣貌,進一步精確地判斷出該缺陷的特性,以避免習知過度檢驗的問題。Thereby, the image data is dynamically displayed through the display module, so that the worker can observe the overall appearance of the defect, and further accurately determine the characteristics of the defect to avoid the problem of conventional over-inspection.
綜上所述,本發明之一種光學複檢系統及其檢測方法,係藉由動態地改變待測物反射之第二光線,並藉由影像擷取模組擷取該第二光線以產生影像資料,並於顯示模組動態地顯示該影像資料,以輔助作業人員精確判斷待測物的表面特性,達成符合檢驗需求的功效。In summary, an optical re-inspection system and a detection method thereof according to the present invention dynamically change a second light reflected by the object to be tested, and the second light is captured by the image capturing module to generate an image. The data is dynamically displayed on the display module to assist the operator in accurately determining the surface characteristics of the object to be tested and achieving the effect of meeting the inspection requirements.
本發明在上文中已以較佳實施例揭露,然熟習本項技術者應理解的是,該實施例僅用於描繪本發明,而不應解讀為限制本發明之範圍,舉凡與該實施例等效之變化與置換,均應設為涵蓋於本發明之範疇內。因此,本發明之保護範圍當以申請專利範圍所界定者為準。The present invention has been disclosed in the above preferred embodiments, and it should be understood by those skilled in the art that the present invention is not intended to limit the scope of the present invention. Equivalent variations and permutations are intended to be encompassed within the scope of the invention. Therefore, the scope of protection of the present invention is defined by the scope of the patent application.
10...光學複檢系統10. . . Optical recheck system
12...工作平台12. . . Work platform
122...承載區122. . . Carrying area
14...光源模組14. . . Light source module
142...第一光源產生器142. . . First light source generator
144...第二光源產生器144. . . Second light source generator
146...第三光源產生器146. . . Third light source generator
16...影像擷取模組16. . . Image capture module
162...面型感光元件162. . . Face type photosensitive element
164...影像處理單元164. . . Image processing unit
18...控制模組18. . . Control module
182...輸入介面182. . . Input interface
20...顯示模組20. . . Display module
S31、S32、S33...步驟S31, S32, S33. . . step
第1圖為本發明一具體實施例之光學複檢系統的功能方塊圖。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a functional block diagram of an optical re-inspection system in accordance with an embodiment of the present invention.
第2圖為本發明一具體實施例之光學複檢系統的示意圖。2 is a schematic view of an optical re-inspection system according to an embodiment of the present invention.
第3圖為本發明一具體實施例之光學複檢系統之檢測方法的步驟流程圖。3 is a flow chart showing the steps of a method for detecting an optical re-inspection system according to an embodiment of the present invention.
10...光學複檢系統10. . . Optical recheck system
12...工作平台12. . . Work platform
14...光源模組14. . . Light source module
16...影像擷取模組16. . . Image capture module
18...控制模組18. . . Control module
20...顯示模組20. . . Display module

Claims (7)

  1. 一種光學複檢系統,係用於供輔助檢測待測物表面的缺陷,其包含:工作平台,具有承載區用以承載該待測物;光源模組,設於該工作平台上方並對應該承載區,該光源模組用於發出第一光線照射該待測物,用以使該第一光線入射該待測物表面而反射出第二光線;影像擷取模組,設於該工作平台上方並對應該承載區,該影像擷取模組用以擷取該第二光線並產生影像資料;控制模組,係電連接該光源模組與該影像擷取模組,或進一步電連接該工作平台,該控制模組用於產生控制訊號以控制該工作平台、該光源裝置與該影像擷取模組之至少其一者的作動,以改變該第二光線;以及顯示模組,係電連接該控制模組,該顯示模組用於顯示該控制訊號及該影像資料,其中,該控制模組係電連接該光源模組,且該光源模組係包含可調亮度之複數個光源產生器,且各該光源產生器係以不同之入射方向照射該承載區,該控制模組則係用以根據一外部操作使該顯示模組對應顯示一游標於該影像資料上,該控制模組更用以回應該游標於該影像資料上的位置動態調整該光源裝置之該等光源產生器的個別亮度。 An optical re-inspection system for assisting in detecting defects on a surface of an object to be tested, comprising: a working platform having a carrying area for carrying the object to be tested; and a light source module disposed above the working platform and correspondingly carrying The light source module is configured to emit a first light to illuminate the object to be tested, so that the first light is incident on the surface of the object to be tested to reflect the second light; and the image capturing module is disposed above the working platform. And the image capturing module is configured to capture the second light and generate image data; the control module electrically connects the light source module and the image capturing module, or further electrically connects the work The control module is configured to generate a control signal to control operation of at least one of the working platform, the light source device and the image capturing module to change the second light; and the display module is electrically connected The control module is configured to display the control signal and the image data, wherein the control module is electrically connected to the light source module, and the light source module comprises a plurality of light source generators with adjustable brightness , Each of the light source generators illuminates the load bearing area in a different incident direction, and the control module is configured to display a cursor on the image data corresponding to the display module according to an external operation, and the control module is further used for The position of the cursor on the image data is dynamically adjusted to adjust the individual brightness of the light source generators of the light source device.
  2. 如申請專利範圍第1項所述之光學複檢系統,其中該控 制模組包含一輸入介面。 An optical re-inspection system as described in claim 1, wherein the control The module contains an input interface.
  3. 如申請專利範圍第1項所述之光學複檢系統,其中該影像擷取模組係包含面型感光元件。 The optical re-inspection system of claim 1, wherein the image capturing module comprises a surface-type photosensitive element.
  4. 如申請專利範圍第1項所述之光學複檢系統,其中該待測物係為電子基板等。 The optical re-inspection system of claim 1, wherein the object to be tested is an electronic substrate or the like.
  5. 一種光學複檢系統之檢測方法,用於對待測物表面之缺陷進行檢測,其包含:提供工作平台、光源模組、影像擷取模組、控制模組及顯示模組,該顯示模組係電連接該控制模組;令該光源模組發出第一光線照射該待測物,使該第一光線入射該待測物表面而反射出第二光線;以及令該控制模組產生控制訊號以動態地控制該工作平台、該光源模組與該影像擷取模組之至少其一者的作動,進而動態地改變該第二光線,該影像擷取模組擷取該第二光線而產生影像資料,該顯示模組動態地顯示該控制訊號及該影像資料,其中,該控制模組係控制該光源模組的作動,且該光源模組係包含可調亮度之複數個光源產生器,且各該光源產生器係以不同之入射方向照射該承載區,該控制模組並用以根據一外部操作使該顯示模組對應顯示一游標於該影像資料上,該控制模組更用以回應該游標於該影像資料上的位置動態調整該光源裝置之該等光源產生器各自發出相對應之不同亮度的光線。 An optical re-inspection system for detecting a defect on a surface of a test object, comprising: providing a working platform, a light source module, an image capturing module, a control module, and a display module, wherein the display module is Electrically connecting the control module; causing the light source module to emit a first light to illuminate the object to be tested, causing the first light to enter the surface of the object to be tested to reflect the second light; and causing the control module to generate a control signal Dynamically controlling at least one of the working platform, the light source module, and the image capturing module to dynamically change the second light, the image capturing module capturing the second light to generate an image The display module dynamically displays the control signal and the image data, wherein the control module controls the operation of the light source module, and the light source module comprises a plurality of light source generators with adjustable brightness, and Each of the light source generators illuminates the load bearing area in a different incident direction, and the control module is configured to display a cursor on the image data corresponding to the display module according to an external operation, the control mode Dynamically adjusting further configured to return the cursor to be image data on the position of such light source generator emits the light source apparatus of each of the different brightness corresponding to the light.
  6. 如申請專利範圍第5項所述之檢測方法,其中該影 像擷取模組係包含面型感光元件。 The detection method described in claim 5, wherein the image The capture module is a surface-type photosensitive element.
  7. 如申請專利範圍第5項所述之檢測方法,其中該待測物係為電子基板等。 The detection method according to claim 5, wherein the object to be tested is an electronic substrate or the like.
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