TWI484164B - Optical re - inspection system and its detection method - Google Patents

Description

Optical re-inspection system and detection method thereof

The invention relates to an optical re-inspection system and a detection method thereof, in particular to an optical re-inspection system for assisting in re-inspection of an electronic substrate and a detection method thereof.

In the electronics industry, the trend toward miniaturization of electronic components makes it impossible to visually identify defects in electronic components by the operator, and to use the Automatic Optical Inspection (AOI) to measure objects on the production line (for example, An electronic substrate such as a printed circuit board, a wafer, or a display panel is detected to detect defects of each of the objects to be tested. Generally, since the quality of each of the objects to be tested is directly related to each of the objects to be tested for subsequent assembly After the normal operation, the quality inspection of the object to be tested is a very important part of the production line.

Wherein, after the automatic optical detection system completes the detection of the object to be tested, the relevant detection result of the position detected on the object to be tested is transmitted to a rechecking station, and then by the rechecking station The lens of the rechecking device can be moved to the position of the defect for magnification shooting, and the shooting data is displayed on the screen to confirm whether the detection result is a real defect or only the automatic optical detecting system by manual reconsideration. Misjudgment, or the step of further screening the defect, screening out the test object with defects exceeding the inspection specification, and otherwise leaving to continue the subsequent operation.

Wherein, the defect may be concave or convex, and in practice, because the use requirements of the object to be tested are different, the defect may have different inspection specifications for the concave and convex defects, for example, tolerance of the defect size of the protrusion. It may be more tolerant than the size of the defect in the recess, so it must be determined that the defect is actually concave or convex. However, the current re-inspection devices are a single fixed lens and a single fixed light source, so that the captured image data is only a planar image without a stereoscopic effect, so that the operator of the re-examination station cannot know that the defect is convex by the screen interpretation. In the case of ups and downs, screening is often performed with stricter inspection specifications, resulting in an over-inspection condition, and the object to be tested originally in the inspection tolerance is screened out, resulting in an increase in cost.

Therefore, the present invention provides an optical re-inspection system and a detection method thereof to assist an operator in accurately determining the surface characteristics of the object to be tested, thereby meeting the inspection requirements.

An object of the present invention is to provide an optical re-inspection system and a detection method thereof, which can be used for an auxiliary worker to accurately judge the surface characteristics of the object to be tested and achieve the effect of meeting the inspection requirements.

To achieve the above and other objects, the present invention provides an optical re-inspection system for assisting in detecting defects on the surface of an object to be tested, including a working platform, a light source module, an image capturing module, a control module, and a display. Module. The working platform has a carrying area for carrying the object to be tested; the light source module is disposed above the working platform and corresponds to the carrying area, and the light source module is configured to emit a first light to illuminate the object to be tested, The first light is incident on the surface of the object to be tested to reflect the second light; the image capturing module is disposed above the working platform and is corresponding to the carrying area, and the image capturing module is configured to capture the second light The light is generated by the light source module and the image capturing module, or is further electrically connected to the working platform, the control module is configured to generate a control signal to control the working platform, Actuating at least one of the light source device and the image capturing module to change the second light; and the display module is electrically connected to the control module, wherein the display module is configured to display the control signal and the video material. .

Therefore, an optical re-inspection system and a detecting method thereof according to the present invention generate a video data by dynamically changing a second light reflected by the object to be tested, and capturing the second light by the image capturing module. The image data is dynamically displayed on the display module to assist the operator in accurately determining the surface characteristics of the object to be tested, and achieving the effect of meeting the inspection requirements.

In order to fully understand the object, features and advantages of the present invention, the present invention will be described in detail by the following specific embodiments and the accompanying drawings, which are illustrated as follows: A functional block diagram of an optical retest system of a particular embodiment of the invention. In the first embodiment, the optical re-inspection system 10 is used to assist the operator of the re-examination station to detect the defect characteristics of the surface of the object to be tested. The optical re-inspection system 10 includes a working platform 12 and a light source module. 14. An image capture module 16, a control module 18, and a display module 20. The object to be tested may be an electronic substrate such as a printed circuit board, a wafer, or a display panel.

The working platform 12 has a carrying area for carrying the object to be tested.

The light source module 14 is disposed above the working platform 12 and corresponding to the carrying area. The light source module 14 is configured to emit a first light to illuminate the object to be tested, so that the first light is incident on the surface of the object to be tested. And a second light is reflected.

The image capturing module 16 is disposed above the working platform 12 and is corresponding to the carrying area. The image capturing module 16 is configured to capture the second light and generate an image data, wherein the image capturing module The 16 Series can continuously capture the second light and produce continuous image information.

The control module 18 is electrically connected to the light source module 14 and the image capturing module 16, or is further electrically connected to the working platform 12, the control module 14 is configured to generate a control signal to control the working platform 12, the Actuation of at least one of the light source device 14 and the image capturing module 16 to change the second light to cause a dynamic change of the second light.

The display module 20 is electrically connected to the control module 18, and the display module 20 is configured to display the control signal and the dynamic change of the image data received by the control module 18, so that an operator can view the The image data displayed by the module 20 is displayed to assist in interpreting the defect as a concave or convex.

Referring to Figure 2, there is shown a schematic diagram of an optical re-inspection system in accordance with an embodiment of the present invention. In the second embodiment, the optical re-examination system 10 includes the working platform 12, the light source module 14, the image capturing module 16, the control module 18, and the display module 20. The working platform 12 is placed horizontally or obliquely at a specific angle to carry the object 1 to be tested, that is, the object to be tested 1 is located in the carrying area 122; the image capturing module 16 includes a side-type photosensitive element 162 and an image. The processing unit 164 is disposed directly above the carrying area 122 to capture the second light. The image processing unit 164 is configured to generate the image information according to the captured second light; The control module 18 includes an input interface 182, which can be, for example, a mouse for receiving control from the operator, so that the control module 18 can output the control signal to control the working platform 12, the light source device 14 and the image. The actuation of at least one of the modules 16 is captured.

In the embodiment, the control module 18 is electrically connected to the optical module 14 and the image capturing module 16, and the light source module 14 includes a plurality of light source generators with adjustable brightness, and each of the light sources The generator illuminates the object to be tested 1 in different incident directions. The number of the light source generators may be three groups. Here, a first light source generator 142, a second light source generator 144, and a third light source generator 146 are used for further description. The first light source generator 142 can be an annular light source disposed around the surface-type photosensitive element 162 and positively illuminating the object to be tested 1, and the second light source generator 144 and the third light source are generated. The 146 is correspondingly disposed on both sides of the surface-type photosensitive element 162, and is laterally irradiated to the object 1 to be tested.

The actuation mechanism controlled by the control signal may be configured to dynamically adjust the light of the different brightness of the light source generators by performing a program. The control signal can be synchronized and dynamically captured by the image capture module 16 to output the image data to the display module 20, wherein the image data and the control signal are simultaneously displayed on the display. Module 20. In this embodiment, the operator can dynamically slide the mouse to cause the control module 18 to output the control signal, while dynamically controlling the first light source generator 142, the second light source generator 144, and the third The light source generator 146 generates a corresponding change in the brightness of the light source, that is, when the mouse controls the cursor (not shown) on the screen of the display module 20 to dynamically move in a direction, the light source generator is located in the same direction as the direction. The brightness will be dynamically enhanced, and the brightness of the light source generator in the other direction opposite to the direction will be dynamically weakened, as exemplified in Fig. 2, when the position of the cursor is at the center of the screen (corresponding to the test to be tested) The first light source generator 142, the second light source generator 144, and the third light source generator 146 are preset light source brightnesses, and the cursor is dynamically moved to the left side of the screen when the cursor is controlled by the operator. When the ground is moved, the brightness of the second light source generator 144 on the left side of the light source module 14 gradually becomes stronger, and the brightness of the third light source generator 146 located on the right side gradually becomes weaker, and the first light source generator located in the middle 142 The degree is between the brightness of the second light source generator 144 and the brightness of the third light source generator 146, whereby the first light system is dynamically changed, so that the second light reflected by the object to be tested is also generated. Change dynamically.

Specifically, when the position of the cursor moves to the left side of the screen dynamically, if the defect is concave under the dynamic movement of the mouse, when the brightness of the left side light source is gradually increased above the object 1 to be tested, The right side surface of the defect in the concave range will gradually become brighter, and the left side surface in the concave range of the defect will gradually become darker. Conversely, when the position of the cursor moves to the right side of the screen dynamically, such The operation of the light source generator and the change of the light and shadow of the concave range of the defect are opposite to the above; if the defect is a protrusion, it should be understood that the light and shadow change of the surface of the convex range of the defect and the defect are The light and shadow of the surface when recessed are reversed. The light and shadow change here is a visual effect caused by the change of the second light reflected by the defect, and the image capture module captures the second light to generate dynamically changing image data, and The display module displays the dynamically changing image data, so that the operator can continuously and correspondingly observe the light and shadow changes of the defect surface by continuously observing and controlling the cursor position on the screen. Knowing the overall appearance of the defect, it is possible to accurately judge whether the defect is concave or convex and avoid excessive inspection.

Furthermore, the number and arrangement positions of the light source generators of the light source module are not limited to the embodiment and the drawings, and may also be two aspects, for example, only the first light source generator 142 and the third light source are provided. 146, or only the second light source generator 144 and the third light source generator 146, as long as the light source generators respectively illuminate the carrying area in different incident directions, and can be adjusted by the control module Further changing the second light dynamically is within the scope of the invention.

In other embodiments, the work platform 12 can further include a first servo motor, and the control module 18 can electrically connect the work platform 12 to control the first servo motor to dynamically translate the work platform 12 And flipping or shaking to drive the object to be tested placed on the working platform 12 to dynamically change the second light, wherein only one light source generator is needed to achieve the effect of the present invention.

In other embodiments, the image capturing module 16 further includes a second servo motor, and the control module 18 is electrically connected to the image capturing module 16 to control the second servo motor to enable the image. The shooting position and the shooting angle of the capture module 16 are dynamically changed to dynamically change the second light received by the image capturing module 16 , and only one light source generator may be needed to achieve the present invention. efficacy.

In other embodiments, the light source module 14 further includes a third servo motor, and the control module 18 is electrically connected to the light source module 14 to control the third servo motor by dynamically changing the light source. The illumination position of the module 14 changes the incident direction of the first light to dynamically change the second light, and only one light source generator can be used to achieve the effect of the present invention.

Please refer to FIG. 3, which is a flow chart of steps of a method for detecting an optical re-inspection system according to an embodiment of the present invention. In Fig. 3, the detection method of the optical re-inspection system is used to assist the operator of the re-inspection station to further detect defects on the surface of the object to be tested.

The detecting method is started in step S31, and provides a working platform, a light source module, an image capturing module, a control module and a display module, and the display module is electrically connected to the control module.

Next, in step S32, the light source module emits a first light to illuminate the object to be tested, so that the first light is incident on the surface of the object to be tested to reflect the second light.

Step S33, the control module generates a control signal to dynamically control the operation of at least one of the working platform, the light source module and the image capturing module, thereby dynamically changing the second light. The image capturing module captures the second light to generate image data, and the display module dynamically displays the image data and the control signal.

Thereby, the image data is dynamically displayed through the display module, so that the worker can observe the overall appearance of the defect, and further accurately determine the characteristics of the defect to avoid the problem of conventional over-inspection.

In summary, an optical re-inspection system and a detection method thereof according to the present invention dynamically change a second light reflected by the object to be tested, and the second light is captured by the image capturing module to generate an image. The data is dynamically displayed on the display module to assist the operator in accurately determining the surface characteristics of the object to be tested and achieving the effect of meeting the inspection requirements.

The present invention has been disclosed in the above preferred embodiments, and it should be understood by those skilled in the art that the present invention is not intended to limit the scope of the present invention. Equivalent variations and permutations are intended to be encompassed within the scope of the invention. Therefore, the scope of protection of the present invention is defined by the scope of the patent application.

10. . . Optical recheck system

12. . . Work platform

122. . . Carrying area

14. . . Light source module

142. . . First light source generator

144. . . Second light source generator

146. . . Third light source generator

16. . . Image capture module

162. . . Face type photosensitive element

164. . . Image processing unit

18. . . Control module

182. . . Input interface

20. . . Display module

S31, S32, S33. . . step

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a functional block diagram of an optical re-inspection system in accordance with an embodiment of the present invention.

2 is a schematic view of an optical re-inspection system according to an embodiment of the present invention.

3 is a flow chart showing the steps of a method for detecting an optical re-inspection system according to an embodiment of the present invention.

10. . . Optical recheck system

12. . . Work platform

14. . . Light source module

16. . . Image capture module

18. . . Control module

20. . . Display module

Claims (7)

An optical re-inspection system for assisting in detecting defects on a surface of an object to be tested, comprising: a working platform having a carrying area for carrying the object to be tested; and a light source module disposed above the working platform and correspondingly carrying The light source module is configured to emit a first light to illuminate the object to be tested, so that the first light is incident on the surface of the object to be tested to reflect the second light; and the image capturing module is disposed above the working platform. And the image capturing module is configured to capture the second light and generate image data; the control module electrically connects the light source module and the image capturing module, or further electrically connects the work The control module is configured to generate a control signal to control operation of at least one of the working platform, the light source device and the image capturing module to change the second light; and the display module is electrically connected The control module is configured to display the control signal and the image data, wherein the control module is electrically connected to the light source module, and the light source module comprises a plurality of light source generators with adjustable brightness , Each of the light source generators illuminates the load bearing area in a different incident direction, and the control module is configured to display a cursor on the image data corresponding to the display module according to an external operation, and the control module is further used for The position of the cursor on the image data is dynamically adjusted to adjust the individual brightness of the light source generators of the light source device. An optical re-inspection system as described in claim 1, wherein the control The module contains an input interface. The optical re-inspection system of claim 1, wherein the image capturing module comprises a surface-type photosensitive element. The optical re-inspection system of claim 1, wherein the object to be tested is an electronic substrate or the like. An optical re-inspection system for detecting a defect on a surface of a test object, comprising: providing a working platform, a light source module, an image capturing module, a control module, and a display module, wherein the display module is Electrically connecting the control module; causing the light source module to emit a first light to illuminate the object to be tested, causing the first light to enter the surface of the object to be tested to reflect the second light; and causing the control module to generate a control signal Dynamically controlling at least one of the working platform, the light source module, and the image capturing module to dynamically change the second light, the image capturing module capturing the second light to generate an image The display module dynamically displays the control signal and the image data, wherein the control module controls the operation of the light source module, and the light source module comprises a plurality of light source generators with adjustable brightness, and Each of the light source generators illuminates the load bearing area in a different incident direction, and the control module is configured to display a cursor on the image data corresponding to the display module according to an external operation, the control mode Dynamically adjusting further configured to return the cursor to be image data on the position of such light source generator emits the light source apparatus of each of the different brightness corresponding to the light. The detection method described in claim 5, wherein the image The capture module is a surface-type photosensitive element. The detection method according to claim 5, wherein the object to be tested is an electronic substrate or the like.