KR101158961B1 - 자외선 조사 처리 장치 - Google Patents

자외선 조사 처리 장치 Download PDF

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Publication number
KR101158961B1
KR101158961B1 KR1020080086778A KR20080086778A KR101158961B1 KR 101158961 B1 KR101158961 B1 KR 101158961B1 KR 1020080086778 A KR1020080086778 A KR 1020080086778A KR 20080086778 A KR20080086778 A KR 20080086778A KR 101158961 B1 KR101158961 B1 KR 101158961B1
Authority
KR
South Korea
Prior art keywords
discharge
electrode
high voltage
processing apparatus
ultraviolet irradiation
Prior art date
Application number
KR1020080086778A
Other languages
English (en)
Korean (ko)
Other versions
KR20090046681A (ko
Inventor
신이치 엔도
겐지 야마모리
도시유키 오카모토
Original Assignee
우시오덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 우시오덴키 가부시키가이샤 filed Critical 우시오덴키 가부시키가이샤
Publication of KR20090046681A publication Critical patent/KR20090046681A/ko
Application granted granted Critical
Publication of KR101158961B1 publication Critical patent/KR101158961B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/245—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps
    • H01J9/247—Manufacture or joining of vessels, leading-in conductors or bases specially adapted for gas discharge tubes or lamps specially adapted for gas-discharge lamps

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
KR1020080086778A 2007-11-06 2008-09-03 자외선 조사 처리 장치 KR101158961B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007288462A JP4957967B2 (ja) 2007-11-06 2007-11-06 紫外線照射処理装置
JPJP-P-2007-00288462 2007-11-06

Publications (2)

Publication Number Publication Date
KR20090046681A KR20090046681A (ko) 2009-05-11
KR101158961B1 true KR101158961B1 (ko) 2012-07-03

Family

ID=40646305

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080086778A KR101158961B1 (ko) 2007-11-06 2008-09-03 자외선 조사 처리 장치

Country Status (4)

Country Link
JP (1) JP4957967B2 (zh)
KR (1) KR101158961B1 (zh)
CN (1) CN101431000B (zh)
TW (1) TWI416584B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5554034B2 (ja) * 2009-08-26 2014-07-23 リンテック株式会社 光照射装置及び光照射方法
JP2014049280A (ja) * 2012-08-31 2014-03-17 Ushio Inc エキシマランプ
CN105810554A (zh) * 2016-05-17 2016-07-27 福州市台江区振斌高效电磁聚能科技研究所 平板无级灯
JP7327932B2 (ja) * 2018-12-14 2023-08-16 ウシオ電機株式会社 紫外線照射装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000260396A (ja) * 1999-03-05 2000-09-22 Quark Systems Co Ltd エキシマランプ、エキシマ照射装置および有機化合物の分解方法
JP2005322632A (ja) 2004-04-07 2005-11-17 Japan Storage Battery Co Ltd 誘電体バリア放電ランプ及び紫外線照射装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5148803B2 (ja) * 2003-05-21 2013-02-20 株式会社Ｇｓユアサ 無声放電ランプ
JP2005222905A (ja) * 2004-02-09 2005-08-18 Japan Storage Battery Co Ltd エキシマランプ
JP5293986B2 (ja) * 2005-07-29 2013-09-18 株式会社Ｇｓユアサ 紫外線ランプおよび紫外線照射装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000260396A (ja) * 1999-03-05 2000-09-22 Quark Systems Co Ltd エキシマランプ、エキシマ照射装置および有機化合物の分解方法
JP2005322632A (ja) 2004-04-07 2005-11-17 Japan Storage Battery Co Ltd 誘電体バリア放電ランプ及び紫外線照射装置

Also Published As

Publication number Publication date
JP4957967B2 (ja) 2012-06-20
CN101431000B (zh) 2012-01-04
KR20090046681A (ko) 2009-05-11
TWI416584B (zh) 2013-11-21
TW200921751A (en) 2009-05-16
CN101431000A (zh) 2009-05-13
JP2009117161A (ja) 2009-05-28

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