KR101157507B1 - 패터닝 디바이스를 조명하는 조명 시스템 및 조명 시스템을 제조하는 방법 - Google Patents

패터닝 디바이스를 조명하는 조명 시스템 및 조명 시스템을 제조하는 방법 Download PDF

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Publication number
KR101157507B1
KR101157507B1 KR1020097022941A KR20097022941A KR101157507B1 KR 101157507 B1 KR101157507 B1 KR 101157507B1 KR 1020097022941 A KR1020097022941 A KR 1020097022941A KR 20097022941 A KR20097022941 A KR 20097022941A KR 101157507 B1 KR101157507 B1 KR 101157507B1
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KR
South Korea
Prior art keywords
intermediate focus
radiation
optical system
patterning device
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KR1020097022941A
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English (en)
Korean (ko)
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KR20100009563A (ko
Inventor
얀 베르나르트 플레첼무스 반 슈트
헨드리쿠스 요한네스 마리아 마이예르
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에이에스엠엘 네델란즈 비.브이.
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Publication of KR20100009563A publication Critical patent/KR20100009563A/ko
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70033—Production of exposure light, i.e. light sources by plasma extreme ultraviolet [EUV] sources
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G03F7/70175—Lamphouse reflector arrangements or collector mirrors, i.e. collecting light from solid angle upstream of the light source
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020097022941A 2007-04-03 2008-04-03 패터닝 디바이스를 조명하는 조명 시스템 및 조명 시스템을 제조하는 방법 KR101157507B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/730,751 US7889321B2 (en) 2007-04-03 2007-04-03 Illumination system for illuminating a patterning device and method for manufacturing an illumination system
US11/730,751 2007-04-03
PCT/NL2008/050184 WO2008120989A1 (en) 2007-04-03 2008-04-03 Illumination system for illuminating a patterning device and method for manufacturing an illumination system

Publications (2)

Publication Number Publication Date
KR20100009563A KR20100009563A (ko) 2010-01-27
KR101157507B1 true KR101157507B1 (ko) 2012-06-20

Family

ID=39462596

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020097022941A KR101157507B1 (ko) 2007-04-03 2008-04-03 패터닝 디바이스를 조명하는 조명 시스템 및 조명 시스템을 제조하는 방법

Country Status (7)

Country Link
US (1) US7889321B2 (ja)
EP (1) EP2132601A1 (ja)
JP (1) JP2010524231A (ja)
KR (1) KR101157507B1 (ja)
CN (1) CN101681115A (ja)
TW (1) TW200846844A (ja)
WO (1) WO2008120989A1 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008014832A1 (de) * 2007-04-19 2008-10-23 Carl Zeiss Smt Ag Projektionsbelichtungsanlage für die Mikrolithographie
KR101656534B1 (ko) * 2008-03-20 2016-09-09 칼 짜이스 에스엠티 게엠베하 마이크로리소그래피용 투영 대물렌즈
WO2010099807A1 (de) 2009-03-06 2010-09-10 Carl Zeiss Smt Ag Beleuchtungsoptik sowie optische systeme für die mikrolithographie
KR101105410B1 (ko) * 2009-08-20 2012-01-17 주식회사 디엠에스 임프린트 장치
NL2006625A (en) 2010-05-26 2011-11-29 Asml Netherlands Bv Illumination system and lithographic apparatus.
JP6371869B2 (ja) * 2014-06-23 2018-08-08 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置を修正する方法
WO2016045901A1 (en) 2014-09-22 2016-03-31 Asml Netherlands B.V. Process window identifier
DE102015012053A1 (de) * 2015-09-14 2017-03-16 M+W Group GmbH Fertigungsanlage zur Herstellung von integrierten Schaltkreisen aus Halbleiter-Wafern sowie Waffelelement für eine Fertigungsanlage

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10229044A (ja) * 1996-12-13 1998-08-25 Nikon Corp 露光装置および該露光装置を用いた半導体デバイスの製造方法
JP2006134974A (ja) 2004-11-04 2006-05-25 Canon Inc 露光装置、判定方法及びデバイス製造方法
US20070069160A1 (en) * 2005-09-27 2007-03-29 Asml Netherlands B.V. Ex-situ removal of deposition on an optical element

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10138313A1 (de) 2001-01-23 2002-07-25 Zeiss Carl Kollektor für Beleuchtugnssysteme mit einer Wellenlänge < 193 nm
US6195201B1 (en) 1999-01-27 2001-02-27 Svg Lithography Systems, Inc. Reflective fly's eye condenser for EUV lithography
EP1248288A1 (en) * 1999-12-16 2002-10-09 Nikon Corporation Exposure method and exposure apparatus
JP3495992B2 (ja) 2001-01-26 2004-02-09 キヤノン株式会社 補正装置、露光装置、デバイス製造方法及びデバイス
US7170587B2 (en) * 2002-03-18 2007-01-30 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP4298336B2 (ja) * 2002-04-26 2009-07-15 キヤノン株式会社 露光装置、光源装置及びデバイス製造方法
JP2007088061A (ja) * 2005-09-20 2007-04-05 Canon Inc 露光装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10229044A (ja) * 1996-12-13 1998-08-25 Nikon Corp 露光装置および該露光装置を用いた半導体デバイスの製造方法
JP2006134974A (ja) 2004-11-04 2006-05-25 Canon Inc 露光装置、判定方法及びデバイス製造方法
US20070069160A1 (en) * 2005-09-27 2007-03-29 Asml Netherlands B.V. Ex-situ removal of deposition on an optical element

Also Published As

Publication number Publication date
WO2008120989A1 (en) 2008-10-09
US20080246940A1 (en) 2008-10-09
JP2010524231A (ja) 2010-07-15
TW200846844A (en) 2008-12-01
US7889321B2 (en) 2011-02-15
KR20100009563A (ko) 2010-01-27
CN101681115A (zh) 2010-03-24
EP2132601A1 (en) 2009-12-16

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