KR101152771B1 - Up and down transfer apparatus of semiconductor unit for test handler - Google Patents

Abstract

PURPOSE: An up-and-down transfer apparatus of a semi-conductor unit for a test handler is provided to stably control the gaps between multiple air cylinders without shaking and to improve pick-up efficiency of a semi-conductor unit. CONSTITUTION: An up-and-down transfer apparatus of a semi-conductor unit for a test handler comprises a first cylinder unit, a second cylinder unit(30), multiple link members(40a), pickup members, a solenoid valve, a vacuum ejector(70), and multiple gap control bodies(80a). The first cylinder unit is composed of multiple first air cylinders(21). The second cylinder unit is composed of multiple second air cylinders(31) continuously arranged on one side of the first cylinder unit. The link members control the gap between the first and second cylinder units. The pickup members are installed on the bottom ends of the first and second air cylinders. The solenoid valve moves up and down the pickup members. The vacuum ejector adsorbs or separates the pickup member to/from a semi-conductor unit. The gap control bodies control the gaps between the first and second air cylinders by controlling the link members.

Description

Up and Down Transfer Apparatus of Semiconductor Unit for Test Handler}

The present invention can be used to adjust the intervals of the plurality of air cylinders by vacuum suction and transfer the semiconductor member to the interval of the semiconductor member, but stable operation without shaking by sharing the air cylinder in front and rear of the transfer apparatus A semiconductor member pickup up-down transfer apparatus for this test handler is possible.

In general, the completed semiconductor package is subjected to a test process for inspecting a defective state. The test apparatus for performing the test process includes a test handler which is a device for transferring and supplying a semiconductor package.

The test handler transfers the package to be tested to the testing part of the test apparatus and removes the package from the test.

Such a test handler is a pneumatic device having a plurality of pickers having a vacuum nozzle for adsorbing a plurality of semiconductor packages.

However, in the conventional test handler, since the solenoid valve to control the pneumatic direction to be sucked and the ejector for sucking the semiconductor member corresponding to the transfer object are integrally formed on the upper end of the suction part, the test handler device It acted as a large factor to increase the unit cost of, and because the solenoid valve is provided in the ejector together, there was a disadvantage that it is difficult to adjust the spacing between a plurality of ejectors for adsorption.

In order to solve this problem, the present applicant (Application No. 10-2011-0009665 (2011.01.31)), the prior application 'the semiconductor member up-down transfer device for the test handler', but in the case of such a transfer device As the pitch of the plurality of air cylinders are simultaneously controlled by a single pitch stopper, the shaking of the device during the pitch control is severe and a stable semiconductor member pick-up process is not achieved, resulting in a decrease in durability.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to divide a plurality of air cylinders installed to pick up a semiconductor member into two groups of first and second cylinder portions to adjust the spacing. The plurality of air cylinders of each of the first and second cylinder parts may be adjusted to each other by the respective spacing adjusters to allow stable spacing control without shaking, but according to various spacings of the user's desired air cylinder parts. Not only is it possible to precisely adjust the spacing, but also to provide a semiconductor member pickup up-down transfer apparatus for a test handler in which the spacing of a plurality of first and second cylinder portions is individually adjustable.

Other objects and advantages of the invention will be described below and will be appreciated by the embodiments of the invention. Furthermore, the objects and advantages of the present invention can be realized by means and combinations indicated in the claims.

The present invention is a semiconductor member pickup up-down transfer apparatus for a test handler which repeats an operation of vacuum suctioning and moving a semiconductor member as a means to solve the above problems. A first cylinder portion 20 formed of one air cylinder 21; A second cylinder part (30) comprising a plurality of second air cylinders (31) continuously arranged on one side of the first cylinder part (20) in the housing (10); A plurality of link members (40a, 40b) such that the distance between each of the plurality of first air cylinders (21) and the second air cylinders (31) is equally narrowed or opened; Pick-up members (50) which are installed on the lower end of each of the plurality of first and second air cylinders (21, 31) to be raised and lowered; A solenoid valve (60) installed in the housing (10) for raising and lowering the pickup member (50) by controlling the direction of pneumatic pressure flowing into the plurality of first and second air cylinders (21, 31); A vacuum ejector 70 installed in the housing 10 to allow the pickup member 50 to be adsorbed and separated from the semiconductor member; The front and rear surfaces of the housing 10 are respectively provided to operate the link members 40a and 40b in the left and right directions so that a plurality of first air cylinders 21 or a plurality of second air cylinders 31 are provided. A plurality of spacing adjusters 80a and 80b which are simultaneously moved in one direction and are mutually changed at predetermined equal spacings; Characterized in that consists of.

As described above, the present invention has an effect capable of stable gap control without shaking when adjusting the distance between the plurality of air cylinders.

In addition, the present invention has the effect that the stable spacing can be adjusted not only to increase the durability, but also to increase the pickup efficiency of the semiconductor member.

In addition, the present invention has the effect that the interval can be adjusted differently by dividing a plurality of air cylinders into two groups.

In addition, the present invention has the effect that the user can precisely adjust the interval between the desired air cylinders through the sliding operation of the gap adjusting body.

In addition, the present invention has an effect that can be controlled by up / down (up / down) a plurality of air cylinders individually.

1 is a front view of an embodiment showing an up-down transfer device according to the present invention.
Figure 2 is a rear view of one embodiment showing an up-down transport apparatus according to the present invention.
Figure 3 is an operation of one embodiment showing the up, down operation of the pickup member according to the present invention.
Figure 4 is an operation of one embodiment showing the use of a protruding piece formed on one side of the spacer according to the present invention.
FIG. 5 is an operation diagram of one embodiment illustrating the use of a protruding piece formed on the other side of the spacing adjuster by rotating the spacing adjuster of FIG. 4 by 180 degrees.
Figure 6 is a front view of an embodiment showing the interval control of the first cylinder portion according to the present invention.
Figure 7 is a rear view of an embodiment showing the spacing of the second cylinder portion located in the rear of Figure 6;
8 and 9 is an operation of an embodiment showing the interval adjustment operation of the first and second cylinders shown in Figs.
Figure 10 is a plan view of one embodiment showing an LM guide according to the present invention.

Before describing in detail several embodiments of the invention, it will be appreciated that the application is not limited to the details of construction and arrangement of components set forth in the following detailed description or illustrated in the drawings. The invention may be embodied and carried out in other embodiments and carried out in various ways. It should also be noted that the device or element orientation (e.g., "front,""back,""up,""down,""top,""bottom, Expressions and predicates used herein for terms such as "left,"" right, "" lateral, " and the like are used merely to simplify the description of the present invention, Or that the element has to have a particular orientation.

The present invention has the following features to achieve the above object.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Prior to this, terms and words used in the present specification and claims should not be construed as limited to ordinary or dictionary terms, and the inventor should appropriately interpret the concepts of the terms appropriately It should be interpreted in accordance with the meaning and concept consistent with the technical idea of the present invention based on the principle that it can be defined.

Therefore, the embodiments described in the specification and the drawings shown in the drawings are only the most preferred embodiment of the present invention and do not represent all of the technical idea of the present invention, various modifications that can be replaced at the time of the present application It should be understood that there may be equivalents and variations.

Accordingly, an embodiment of the present invention is a semiconductor member pickup up-down transfer apparatus for a test handler which repeats an operation of vacuum suction and movement of a semiconductor member, wherein a plurality of first air cylinders 21 arranged in the housing 10 are continuously arranged. A first cylinder portion 20 formed of a); A second cylinder part (30) comprising a plurality of second air cylinders (31) continuously arranged on one side of the first cylinder part (20) in the housing (10); A plurality of link members (40a, 40b) such that the distance between each of the plurality of first air cylinders (21) and the second air cylinders (31) is equally narrowed or opened; Pick-up members (50) which are installed on the lower end of each of the plurality of first and second air cylinders (21, 31) to be raised and lowered; A solenoid valve (60) installed in the housing (10) for raising and lowering the pickup member (50) by controlling the direction of pneumatic pressure flowing into the plurality of first and second air cylinders (21, 31); A vacuum ejector 70 installed in the housing 10 to allow the pickup member 50 to be adsorbed and separated from the semiconductor member; The front and rear surfaces of the housing 10 are respectively provided to operate the link members 40a and 40b in the left and right directions so that a plurality of first air cylinders 21 or a plurality of second air cylinders 31 are provided. A plurality of spacing adjusters 80a and 80b which are simultaneously moved in one direction and are mutually changed at predetermined equal spacings; Characterized in that consists of.

In addition, one end of each of the plurality of link members 40a and 40b is fixedly installed at the front and rear surfaces of the housing 10 in the housing 10, and a plurality of coupling points 42 of the link members 40a and 40b are provided. The first air cylinder 21 or the second air cylinder 31 is connected to each other, so that the space between the first air cylinder 21 and the space between the second air cylinder 31 are a plurality of link members 40a. , 40b) are individually adjusted to be narrowed or widened.

In addition, the spacing adjuster (80a, 80b) is the control cylinder portion 81 is fixed to the outside of the housing 10; A control piston 82 which is moved left and right by the control cylinder 81 and whose one end is connected to the other ends of the link members 40a and 40b; Fixing body 84 is fixed to the outer stop of the housing 10; A spacing control plate 86 installed on the fixing body 84 in a longitudinal direction so as to be slidable and detachable from the fixing body 84; Characterized in that consists of.

In addition, a plurality of fixing holes 85 which are spaced apart in the longitudinal direction in the fixing body 84; A pinhole (87) perforated in the gap adjusting plate (86) to communicate with the fixing hole (85), such that the gap adjusting plate (86) is fixed to the fixing hole (85) by a fixing member; It is characterized in that the provided.

In addition, the gap adjusting body (80a, 80b) is a protrusion (89) for protruding a plurality of protruding pieces 88 of different protrusion lengths on both sides of the gap adjusting plate 86 in the form of a step; A counterpart (83) corresponding to the protrusion (89) at one end of the adjustment piston (82) and protruding to be in contact; It is characterized in that the provided.

In addition, the gap adjusting plate 86 is used so that a plurality of protruding pieces 88 formed on one side of the gap adjusting plate 86 corresponds to the corresponding piece 83 protruding from the control piston 82, or the gap adjusting plate By rotating the 86 to the fixing body 84 by rotating 180 degrees, a plurality of protruding pieces 88 formed on the other side is used so as to correspond to the corresponding pieces 83.

In addition, in accordance with the distance between the first air cylinder 21 or the second air cylinder 31 desired by the user, the gap adjusting plate 86 is slid up and down to move one of the plurality of protruding pieces 88 to the corresponding piece ( 83 and the plurality of first air cylinders 21 or a plurality of agents by moving the adjustment piston portion 82 left and right so that the corresponding piece 83 is in close contact with the protruding piece 88. It is characterized in that the two air cylinders 31 are arranged at the same interval while moving at the same time.

Hereinafter, a semiconductor member pickup up-down transfer apparatus for a test handler according to a preferred embodiment of the present invention will be described in detail with reference to FIGS. 1 to 10.

The semiconductor member pickup up-down transfer apparatus 100 for a test handler according to the present invention includes a housing 10, a first cylinder portion 20, a second cylinder portion 30, link members 40a and 40b, and a pickup member 50. ), The vacuum ejector 70, the gap adjuster (80a, 80b).

The housing 10 is a place where a plurality of air cylinders S (a plurality of first and second air cylinders 21 and 31) to be described later are continuously arranged in the longitudinal direction.

The LM guide 11 is installed at the front and rear of the inside of the housing 10 so that a plurality of air cylinders S to be described later are moved left and right in the longitudinal direction in the housing 10. To serve to guide the movement of a plurality of air cylinder (S). That is, when the plurality of air cylinders S moves left and right inside the housing 10, the front and rear surfaces of the air cylinders S are provided in the plurality of LM guides 11 installed in the front and rear surfaces of the housing 10, respectively. It is installed to be movable, and serves as a track to move the plurality of air cylinders S to the left and right in the housing 10 along the LM guide 11, the plurality of air cylinders (S) , Smoothly sliding toward the longitudinal direction of the housing 10 to be moved in the horizontal direction.

Of course, a plurality of such a pair of LM guides 11 may be used to guide each of the upper and lower portions of the air cylinder S in the moving direction, according to an embodiment of the user. In addition, the housing 10 has such a rectangular tube shape, but before, after, left, right, upper, lower surface is to have a locally open form.

The first cylinder portion 20 is installed in the housing 10 described above together with the second cylinder portion 30 to be described later, the first cylinder portion 20 is composed of a plurality of first air cylinder 21 The plurality of first air cylinders 21 are arranged to be spaced apart at equal intervals from each other. In addition, each of the plurality of first air cylinders 21 is installed vertically downward.

The first cylinder part 20 has an embodiment in which a total of four are installed toward the inner center of the housing 10 from the left side of the inside of the housing 10. The first cylinder ①, the second cylinder ②, the third cylinder ③, and the fourth cylinder ④ from the air cylinder S located in the left side of the housing 10 among the air cylinders 21. It is called. (In the present invention, a total of eight air cylinders S are provided by using four air cylinders S as the first cylinder part 20 and four air cylinders S as the second cylinder part 30 to be described later. However, the number of such air cylinders (S) may be variously changed according to the user's embodiment.)

In addition, the plurality of first air cylinders 21 constituting the first cylinder part 20 are connected to each of a plurality of solenoid valves 60 and a plurality of connection lines (eg, connection hoses), and the housing 10. The vacuum ejector 70, which will be described later, installed at the top of the) is also connected to the connection line. Since the plurality of air cylinders S may be operated individually, various embodiments may exist, such as using a plurality of air cylinders S at the same time or using only a portion of them according to a user's embodiment. The same applies to the plurality of second air cylinders 31 of the second cylinder unit 30 to be described later.

The second cylinder part 30 is composed of a plurality of second air cylinders 31, and is continuously arranged on one side of the first cylinder part 20 described above inside the housing 10.

The plurality of second air cylinders 31 are also continuously arranged at equal intervals, that is, the first air cylinder 21 and the second air cylinder 31 are continuously arranged so that the housing 10 It has a form arranged in.

The second cylinder unit 30 has an embodiment in which a total of four units are installed from the inner right side of the housing 10 toward the inner center of the housing 10. The fifth cylinder (⑤), the sixth cylinder (⑥), and the seventh air cylinder S, from the air cylinder S adjacent to the fourth cylinder ④ to the right side inside the housing 10, are sequentially The cylinder (7) and the eighth cylinder (8) are called.

The link members 40a and 40b are installed at the front and rear surfaces of the housing 10, respectively, and a plurality of the link members 40a and 40b are used. By shifting by two pitches apart, the plurality of link lines 41 are straightened in a longitudinal direction so that the coupling points 42 between the plurality of link lines 41 are equally open or a plurality of link lines ( 41) By pressing both ends, the bent portion 43 is folded so that the coupling points 42 between the plurality of link lines 41 are equally narrowed.

One link member 40a of the plurality of link members 40a and 40b is connected to a plurality of first air cylinders 21 constituting the first cylinder part 20 at the front of the housing 10, respectively. Of course, the plurality of coupling points 42 formed on the link member 40a (the number of coupling points 42 should be the same as the number of the plurality of first air cylinders 21 to be coupled. Since four air cylinders 21 are configured, four coupling points 42 of the link member 40a are also formed, thereby fixing the plurality of first air cylinders 21 to the front stop portions, respectively. When the link member 40a is opened, the plurality of first air cylinders 21 are also opened at the same interval, and the distance between the link members 40a is narrowed, and the plurality of first air cylinders 21 are also the same. The gap is narrowed. At this time, one end of the link member 40a (more specifically, one end of one of the link lines 41 of the plurality of link lines 41) is fixed to the outer peripheral surface of the housing 10 between the fourth and fifth cylinders ④ and ⑤. Be sure to

In addition, the remaining link members 40b of the plurality of link members 40a and 40b are respectively connected to the plurality of second air cylinders 31 constituting the second cylinder part 30 on the rear surface of the housing 10. By fixing a plurality of coupling points 42 formed on the link member 40b to the rear end portions of the plurality of second air cylinders 31, respectively, when the link member 40b is opened, the plurality of second air cylinders 31 are opened. ) Is also made at the same interval, the gap of the link member 40b is narrowed, and the plurality of second air cylinder 31 is also narrowed at the same interval. At this time, one end of the link member 40b (more specifically, one end of one of the link lines 41 of the plurality of link lines 41) is fixed to the outer peripheral surface of the housing 10 between the fourth and fifth cylinders ④ and ⑤. Be sure to

That is, one link member 40a of the plurality of link members 40a and 40b is coupled to the first, second, third and fourth cylinders ①, ②, ③ and ④ at the front of the housing 10 and the rest The link member 40b is coupled to the fifth, sixth, seventh and eighth cylinders ⑤, ⑥, ⑦, ⑧ at the rear surface of the housing 10.

The pickup member 50 is installed at the lower ends of the plurality of air cylinders S (a plurality of first and second air cylinders 21 and 31) described above so as to be able to lift and lower, respectively, such a pickup member 50. ) Is in the form of descending or rising to the piston operation in the lower portion of the air cylinder (S), the lifting and lowering operation of such a pickup member 50 is made according to the pneumatic direction control by the solenoid valve 60 or the like.

The pickup member 50 operates as a piston and moves up and down from the lower end of the main body under the control of the solenoid valve 60 and the lifting body 51 from the main body of the air cylinder S. It extends in the longitudinal direction of the 51, a predetermined length protrudes from the lower end of the elevating body (51) is made of a picker (Picker, 52) inside the vacuum state by the vacuum ejector 70 to be described later.

The vacuum ejector 70 is installed on the upper part of the housing 10, and is connected to a plurality of air cylinders S arranged in a plurality of arrays and spaced apart from each other in the housing 10, and connected by a connection line to the picker 52. It makes the inside vacuum.

That is, when transferring the transfer object (ex: semiconductor member, C), the pickup member 50 is lowered toward the transfer object, and when lowering, the vacuum ejector 70 makes the interior of the picker 52 into a vacuum state. , The transport object is to be sucked into the picker 52 by vacuum suction.

Then, when the semiconductor member pickup up-down transfer apparatus for the test handler of the present invention is transferred to a desired transfer position by the user, the operation of the vacuum ejector 70 is stopped to release the vacuum state inside the picker 52, thereby transferring the object. Is to be separated from the picker 52 and placed in the transport position.

The solenoid valve 60 is connected to a plurality of first air cylinders 21 constituting the first cylinder portion 20 and a plurality of second air cylinders 31 constituting the second cylinder portion 30, respectively. As installed, of course, the number of the air cylinder (S) and the number of the solenoid valve 60 should also be the same. The solenoid valve 60 is installed on the upper portion of the housing 10, but the installation position may be changed in various ways according to the user.

That is, the solenoid valve 60 is connected to each of the plurality of air cylinders S (a plurality of first air cylinders 21 and a plurality of second air cylinders 31) by one connection line. In other words, each of the plurality of connection lines connected to each air cylinder S is connected to the solenoid valve 60 to control the direction (pneumatic direction) of the air flowing into the air cylinder S, Of course, it is natural that the device must be provided separately.) During normal operation (when not transferring the transfer object), the pick-up member 50 is lifted up to operate in contact with the lower end of the air cylinder (S) main body, and during operation ( In the case of transferring the conveying object), the pick-up member 50 is controlled in the pneumatic direction so that the pick-up member 50 is lowered, so that the pick-up member 50 is in contact with the conveying object located at the bottom of the air cylinder S, and at this moment, the vacuum ejector ( 70) is operated so that the conveying object is sucked by the vacuum suction through the picker 52 to be adsorbed to the picker 52.

That is, since the plurality of solenoid valves 60 are connected to the plurality of air cylinders S, respectively, the plurality of air cylinders S may be individually operated.

The spacing adjusters 80a and 80b may have the same spacing D between the plurality of first air cylinders 21 or the spacing D between the plurality of second air cylinders 31 in the same direction. To be arranged, a plurality of them are used, one of which is installed at the front of the housing 10 and the other of which is installed and operated at the rear of the housing 10.

When explaining the reason for the above-described spacing adjuster (80a, 80b), the plurality of air cylinders (S) in accordance with the mutual arrangement interval of the transfer object to be transferred, the plurality of air cylinders (S) also the same spacing This is because the pick-up member 50 must be raised and lowered while maintaining (D) to simultaneously transport a plurality of transfer objects.

The gap adjusting body (80a, 80b) for this is composed of a control cylinder portion 81, the adjustment piston portion 82, the fixed body 84, the gap adjusting plate 86.

First, for convenience of description, the spacing adjuster 80a for maintaining the spacing D between the plurality of first air cylinders 21 among the spacing adjusters 80a and 80b will be described.

The adjustment cylinder portion 81 is horizontally fixed to the front surface of the housing 10 (more specifically, the front of the second cylinder portion 30), and the adjustment piston portion 82 is partially installed inside the adjustment cylinder. Although one end is connected to the other end of the link member 40a (one end of the link member 40a is fixed to the outer circumferential surface of the housing 10 as described above), through the adjustment cylinder. When the control piston portion 82 is discharged or embedded in the left and right directions, the link member 40a is also compressed or tensioned in the same direction as the control piston portion 82 moves, and thus the link member 40a is The distance between the plurality of fixed first air cylinders 21 (first, second, third, fourth cylinders (1, 2, 3, 4)) can also be adjusted in the same way. In addition, one end of the control piston portion 82 connected to the other end of the link member 40a (in which case, the other end of the link member 40a is also connected to the first cylinder ①). The counterpart 83 is formed to protrude toward the front surface, and the counterpart 83 is to be brought into contact with the protrusion 89 formed on the gap adjusting plate 86 to be described later. This will be explained in detail.

The fixing body 84 is fixed to the outer end of the housing 10 (more specifically, the front center portion), and a plurality of fixing holes 85 are formed at equal intervals in the longitudinal direction toward the longitudinal direction (vertical direction). Make sure

The gap adjusting plate 86 is detachably installed to be slid up and down in the vertical length direction of the fixing body 84 while having a form surrounding the fixing body 84 described above, and the fixing body 84 In the center of the drill hole to form a single pin hole 87 that can communicate with the plurality of fixing holes (85) described above.

That is, the gap adjusting plate 86 is moved up and down at the front of the fixing body 84, and after positioning the pinhole 87 to correspond to one of the plurality of fixing holes 85, various fixing members (ex: Pins, etc.) to fix the position of the gap adjusting plate 86 while penetrating and fixing the pin hole 87 to the fixing hole 85 selected by the user.

Such, the gap adjusting plate 86 is to form a protrusion (89) on both sides, the protrusion (89) is in contact with the corresponding piece 83 protruding to the above-described control cylinder (81), the protrusion Reference numeral 89 denotes that a plurality of protrusions 88 having different protrusion lengths from each other protrude in the form of a plurality of steps on each side of the gap adjusting plate 86. That is, the protruding length of each of the protruding pieces 88 on both sides of the gap adjusting plate 86 constituting the protruding portion 89 corresponds to a distance between the plurality of air cylinders S (a plurality of first air cylinders 21). After the user selects the protruding piece 88 protruding to the same length as the interval of the desired air cylinder (S) of the plurality of protruding pieces 88 (same as the separation distance between the plurality of transfer objects to be transferred) ( Of course, each of the protrusions 88 has a numerical value of the protruding length or the interval between the pitches.) The thus selected protrusions 88 may be opposed to the counterparts 83 of the adjustment cylinder portion 81. After adjusting the position by sliding the gap adjusting plate 86 up and down so as to adjust the position, the gap adjusting plate 86 is fixed to the fixing body 84 by the fixing means. Thereafter, when the adjusting piston portion 82 is pulled through the adjusting cylinder portion 81 so that the corresponding piece 83 protruding from the adjusting piston portion 82 comes into contact with the protrusion 89 selected by the user, The first air cylinders 21 are to maintain the distance (D) desired by the user, and then by operating the plurality of first air cylinders 21 to transfer the object after vacuum suction.

(In the case of the gap adjusting plate 86 fixed to the fixed body 84, if one side is installed to face the counterpart 83, as shown in Figure 4 or 8, the gap adjusting plate 86 Since only a plurality of protruding pieces 88 formed on one side thereof can be used to correspond to the corresponding pieces 83, the user can lengthen one of the other protruding pieces 88 protruding from the other side of the gap adjusting plate 86. 5 or 9, after removing the fixing member penetrated and fixed from the pin hole 87 to the fixing hole 85 selected by the user, the gap adjusting plate 86 is rotated 180 °. By rotating (180 degrees) and fixing the fixing body 84, all of the plurality of protruding pieces 88 formed on both sides of the gap adjusting plate 86 can be individually used to the desired length of the user. Fixing body which rises and falls of the said spacing control plate 86 Both sides of the 84 may also play the same role as the protruding piece 88, and the corresponding piece 83 is not connected to the fixed body 84 without being fastened to the fixed body 84. In the present invention, four protrusion pieces 88 are formed on one side and two protrusion pieces 88 on the other side, and up to one side of the fixing body 84 is used. By doing so, it is possible to select a total of seven different separation distances (a distance between a plurality of air cylinders, or a distance between a plurality of conveying objects), but this varies the number of protrusions of the protrusions 88 according to the user's embodiment It is also possible to vary the separation distance that can be selected by making the adjustment, so that the same applies to the remaining gap adjuster 80b to be described later.)

In addition to the above-described one of the plurality of gap adjusting body (80a, 80b), the remaining gap adjusting body (80b) is also the same configuration as described above, a plurality of second air in the rear of the housing (10) The difference is that the interval between the cylinders 31 is maintained. That is, the distance between the plurality of first air cylinders 21 is adjusted in front of the housing 10 of one of the space adjusting bodies 80a and 80b, and the remaining space adjusting bodies 80b. Is to adjust the spacing of the plurality of second air cylinders 31 at the rear of the housing 10, the plurality of space between the first air cylinder 21 and the second air cylinder 21 due to the plurality of spacing adjusters (80a, 80b). (31) The distance can be adjusted separately.

The adjustment cylinder portion 81 of the remaining gap adjuster 80b is horizontally fixed to the rear surface of the housing 10 (more specifically, the rear surface of the first cylinder portion 20), and the adjustment piston portion 82 is As a part is built in the control cylinder 81, one end is connected to the other end of another link member 40b (link member 40b which is connected to a plurality of second air cylinders 31). (One end of the link member 40b is fixed to the outer circumferential surface of the housing 10 as described above.), And discharges the adjustment piston portion 82 in the left and right directions through the adjustment cylinder portion 81. Alternatively, when the inside is inserted, a plurality of second air cylinders 31 (3) to which the link member 40b is fixed while the link member 40b is also compressed or stretched in the same direction as the control piston 82 moves. 5, 6, 7, 8 cylinders (⑤, ⑥, ⑦, ⑧)) Which will be jeoldoel. In addition, one end of the control piston portion 82 connected to the other end of the link member 40b (in which case, the other end of the link member 40b is also connected to the eighth cylinder ⑧). The counterpart 83 is formed to protrude toward the front surface, and the counterpart 83 is to be brought into contact with the protrusion 89 formed on the gap adjusting plate 86 to be described later. This will be explained in detail.

The fixing body 84 is fixed to the outer end of the housing 10 (more specifically, the rear center portion), and a plurality of fixing holes 85 are formed at the same interval toward the longitudinal direction (vertical direction) to be spaced apart at equal intervals. Make sure

The gap adjusting plate 86 is detachably installed to be slid up and down in the vertical length direction of the fixing body 84 while having a form surrounding the fixing body 84 described above, and the fixing body 84 In the center of the drill hole to form a single pin hole 87 that can communicate with the plurality of fixing holes (85) described above.

That is, the gap adjusting plate 86 is lifted up and down at the rear of the fixing body 84, and after positioning the pinhole 87 to correspond to one of the plurality of fixing holes 85, various fixing members (ex: Pins, etc.) to fix the position of the gap adjusting plate 86 while penetrating and fixing the pin hole 87 to the fixing hole 85 selected by the user.

Such, the gap adjusting plate 86 is to form a protrusion (89) on both sides, the protrusion (89) is in contact with the corresponding piece 83 protruding to the above-described control cylinder (81), the protrusion Numeral (89) is a plurality of protrusions 88 different from each other protruding length is formed to protrude in the form of a plurality of steps on both sides of the gap control plate 86. (The gap control plate 86 is formed by rotating the 180 degrees to both sides All of the protruding pieces 89 may be used.) That is, the protruding length of each protruding piece 88 constituting the protruding portion 89 is a plurality of air cylinders S (a plurality of second air cylinders 31). Corresponding to the distance between each other, the user is projected projections 88 of the same length as the interval of the desired air cylinder (S) of the plurality of projections 88 (same distance between the plurality of transfer objects to be transferred). ) And (of course, each projection 88 The interval between the lengths or pitches to be discharged is indicated numerically.) The gap adjusting plate 86 is moved up and down so that the selected projecting piece 88 can be opposed to the corresponding piece 83 of the adjusting cylinder part 81. After adjusting the position by sliding adjustment, the gap adjusting plate 86 is fixed to the fixing body 84 by the fixing means. Thereafter, when the adjusting piston portion 82 is pulled through the adjusting cylinder portion 81 so that the corresponding piece 83 protruding from the adjusting piston portion 82 comes into contact with the protrusion 89 selected by the user, The second air cylinder 31 is to maintain the desired interval between each other, and then by operating a plurality of second air cylinder 31 is to transfer the transfer object after vacuum suction.

In addition, in the case of the adjustment cylinder part 81 with which the above-mentioned plurality of space adjusting bodies 80a and 80b are provided, a separate solenoid valve is provided so that the control piston part 82 can move left and right, or In addition to the existing two solenoid valve 60 for operating the plurality of air cylinders (S) described above it can be used in the control cylinder portion 81 in the plurality of interval adjusters (80a, 80b).

In addition, a limit stopper may be installed at an inner lower end of the housing 10, and the limit stopper may be installed to move forward and backward at a position in contact with a portion of the pickup member 50 which is lowered, and the pickup member 50 may be moved. ) To control the position so as not to fall beyond the predetermined depth. In the present invention, such a limit stopper is composed of a plurality of limit stoppers are used as a single piece, the plurality of limit stoppers are laminated to each other, but are formed so as to have a step shape without being stacked in agreement with each other. For convenience of description, the limit stopper is referred to as a plurality of limit stoppers referred to as a first limit stopper and a second limit stopper, and the second limit stopper is integrally installed on the upper end of the first limit stopper, but the ends are not coincident with each other. The second limit stopper is fixed by pushing a predetermined length in the longitudinal direction from the upper surface of the first limit stopper. Thus, the first limit stopper can intercept the pickup member 50 which is lowered more deeply than the second limit stopper. Accordingly, the user can move the limit stopper before and after, and according to the depth at which the pickup member 50 is lowered, it can be selectively used alternately without replacing the limit stopper so as to be used in accordance with the dropping depth of the pickup member 50. (In the past, the two limit switches are stored in the state of using a variety of tools to replace the two-stage limit stopper of the present invention, compared to the conventional limit switch is easier to maintain and no waste of replacement time. In addition, each of the air cylinders is formed in the opening portion of the lower portion of the housing 10 (the portion of the air cylinder S is lowered and opened at the lower portion of the housing 10 in order to be adsorbed with the transfer object). Hall sensor may be installed to detect whether the picker 52 of S) is lowered.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It is to be understood that various changes and modifications may be made without departing from the scope of the appended claims.

10: Housing 11: LM Guide
20: first cylinder 21: first air cylinder
30: second cylinder 31: second air cylinder
40a, 40b: link member 50: pickup member
51: lifting body 52: picker
60: solenoid valve 70: vacuum ejector
80a, 80b: Spacing regulator 81: Adjustment cylinder part
82: adjustment piston 83: counterpart
84: fixed body 85: fixed hole
86: spacing control plate 87: pinhole
88: protrusion 89: protrusion
C: transfer object S: air cylinder

Claims (7)

In the semiconductor member pickup up-down transfer apparatus for a test handler which repeats the operation | movement which vacuum-injects and moves a semiconductor member,
A first cylinder part 20 including a plurality of first air cylinders 21 arranged in series in the housing 10;
A second cylinder part (30) comprising a plurality of second air cylinders (31) continuously arranged on one side of the first cylinder part (20) in the housing (10);
A plurality of link members (40a, 40b) such that the distance between each of the plurality of first air cylinders (21) and the second air cylinders (31) is equally narrowed or opened;
Pick-up members (50) which are installed on the lower end of each of the plurality of first and second air cylinders (21, 31) to be raised and lowered;
A solenoid valve (60) installed in the housing (10) for raising and lowering the pickup member (50) by controlling the direction of pneumatic pressure flowing into the plurality of first and second air cylinders (21, 31);
A vacuum ejector 70 installed in the housing 10 to allow the pickup member 50 to be adsorbed and separated from the semiconductor member;
The front and rear surfaces of the housing 10 are respectively provided to operate the link members 40a and 40b in the left and right directions so that a plurality of first air cylinders 21 or a plurality of second air cylinders 31 are provided. A plurality of spacing adjusters 80a and 80b which are simultaneously moved in one direction and are mutually changed at predetermined equal spacings;
The semiconductor member pickup up-down feeder for a test handler, characterized in that consisting of.
The method of claim 1,
The plurality of link members 40a and 40b
One end is fixedly installed at the front and rear of the housing 10 in the housing 10, and a plurality of coupling points 42 of the link members 40a and 40b are formed in the first air cylinder 21 or the second air cylinder. And so as to be connected to (31) so that the space between the first air cylinder 21 and the space between the second air cylinder 31 are individually narrowed or widened by the plurality of link members 40a and 40b, respectively. The semiconductor member pickup up-down feeder for the test handler, characterized in that the.
The method of claim 1,
The gap adjusting body (80a, 80b) is
An adjustment cylinder part 81 fixed to the outside of the housing 10;
A control piston 82 which is moved left and right by the control cylinder 81 and whose one end is connected to the other ends of the link members 40a and 40b;
Fixing body 84 is fixed to the outer stop of the housing 10;
A spacing control plate 86 installed on the fixing body 84 in a longitudinal direction so as to be slidable and detachable from the fixing body 84;
The semiconductor member pickup up-down feeder for a test handler, characterized in that consisting of.
The method of claim 3,
A plurality of fixing holes 85 which are spaced in the longitudinal direction in the fixing body 84;
A pinhole (87) perforated in the gap adjusting plate (86) to communicate with the fixing hole (85), such that the gap adjusting plate (86) is fixed to the fixing hole (85) by a fixing member;
The semiconductor member pickup up-down transfer device for a test handler, characterized in that the provided.
The method of claim 3,
The gap adjusting body (80a, 80b) is
Protrusions (89) protruding a plurality of protrusions (88) having different protrusion lengths from both sides of the gap adjusting plate (86) in the form of a plurality of steps;
A counterpart (83) corresponding to the protrusion (89) at one end of the adjustment piston (82) and protruding to be in contact; The semiconductor member pickup up-down transfer device for a test handler, characterized in that the provided.
The method of claim 3,
The gap adjusting plate 86 is
A plurality of protruding pieces 88 formed on one side of the gap adjusting plate 86 is used to correspond to the corresponding piece 83 protruding from the control piston 82,
By rotating the gap control plate 86 by 180 degrees to fasten the fixed body 84, a plurality of protruding pieces 88 formed on the other side is used to correspond to the counterpart 83. Member pickup up-down feeder.
6. The method of claim 5,
According to the distance between the first air cylinder 21 or the second air cylinder 31 desired by the user, the gap adjusting plate 86 is slid up and down to move one of the plurality of protruding pieces 88 to the corresponding piece 83. After positioning so as to face, the control piston portion 82 is moved left and right so that the corresponding piece 83 is in close contact with the protruding piece 88, the plurality of first air cylinder 21 or the plurality of second air A semiconductor member pickup up-down feeder for a test handler, characterized in that the cylinders 31 are moved at the same time while being moved at the same time.

Images