KR101142947B1 - 간섭계 - Google Patents

간섭계 Download PDF

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Publication number
KR101142947B1
KR101142947B1 KR1020090041024A KR20090041024A KR101142947B1 KR 101142947 B1 KR101142947 B1 KR 101142947B1 KR 1020090041024 A KR1020090041024 A KR 1020090041024A KR 20090041024 A KR20090041024 A KR 20090041024A KR 101142947 B1 KR101142947 B1 KR 101142947B1
Authority
KR
South Korea
Prior art keywords
light
mirror
measurement
optical system
reference mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020090041024A
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English (en)
Korean (ko)
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KR20090118852A (ko
Inventor
시게키 가토
Original Assignee
캐논 가부시끼가이샤
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Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20090118852A publication Critical patent/KR20090118852A/ko
Application granted granted Critical
Publication of KR101142947B1 publication Critical patent/KR101142947B1/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02018—Multipass interferometers, e.g. double-pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02059—Reducing effect of parasitic reflections, e.g. cyclic errors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020090041024A 2008-05-13 2009-05-12 간섭계 Expired - Fee Related KR101142947B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2008-125655 2008-05-13
JP2008125655A JP5305732B2 (ja) 2008-05-13 2008-05-13 干渉計

Publications (2)

Publication Number Publication Date
KR20090118852A KR20090118852A (ko) 2009-11-18
KR101142947B1 true KR101142947B1 (ko) 2012-05-08

Family

ID=40910765

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020090041024A Expired - Fee Related KR101142947B1 (ko) 2008-05-13 2009-05-12 간섭계

Country Status (4)

Country Link
US (2) US8384910B2 (https=)
EP (1) EP2120005B1 (https=)
JP (1) JP5305732B2 (https=)
KR (1) KR101142947B1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5629455B2 (ja) * 2009-12-14 2014-11-19 キヤノン株式会社 干渉計
JP5743408B2 (ja) * 2010-02-02 2015-07-01 キヤノン株式会社 回転体位置測定方法
DK2634551T3 (da) * 2010-10-28 2021-07-12 Foss Analytical As Interferometer og apparat til fourier-transformations spektroskopisk analyse
KR101929906B1 (ko) * 2010-12-28 2018-12-18 엘지디스플레이 주식회사 노광장치 및 노광장치의 정렬 방법
CN102706282B (zh) * 2012-06-25 2014-08-20 无锡迈福光学科技有限公司 一种激光干涉测距仪
RU2623651C1 (ru) * 2016-03-28 2017-06-28 Лев Семенович Кольнер Способ получения фазового изображения
FR3054679B1 (fr) * 2016-07-26 2018-09-07 Centre Nat Rech Scient Systemes et procedes d'imagerie interferentielle plein champ
KR101916038B1 (ko) 2016-10-07 2018-11-08 무진기공주식회사 광 간섭계를 이용한 정밀 변형량 발생 및 측정장치
CN112857207B (zh) * 2021-03-09 2022-12-16 哈尔滨工业大学 基于阵列式探测器的单光束三自由度零差激光干涉仪

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4660978A (en) 1984-12-19 1987-04-28 Hughes Aircraft Company Direct slope measurement shearing interferometer
JPH0886608A (ja) * 1993-12-27 1996-04-02 Nikon Corp 干渉計
US20030197870A1 (en) 2002-04-18 2003-10-23 Bagwell Kerry D. Compact beam re-tracing optics to eliminate beam walk-off in an interferometer
KR20040001099A (ko) * 2002-06-27 2004-01-07 한국과학기술원 이종모드 헬륨-네온 레이저와 슈퍼 헤테로다인위상측정법을 이용한 헤테로다인 레이저 간섭계

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61128104A (ja) * 1984-11-27 1986-06-16 Ricoh Co Ltd 縞走査シアリング干渉計
JP3042933B2 (ja) * 1992-05-13 2000-05-22 富士写真光機株式会社 干渉縞ノイズ防止機構付撮像装置
JPH11125503A (ja) * 1997-10-22 1999-05-11 Nikon Corp ヘテロダイン干渉計
US6778280B2 (en) 2001-07-06 2004-08-17 Zygo Corporation Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components
US6762845B2 (en) * 2001-08-23 2004-07-13 Zygo Corporation Multiple-pass interferometry
JP2005117051A (ja) * 2003-10-09 2005-04-28 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
US7379190B2 (en) * 2004-01-05 2008-05-27 Zygo Corporation Stage alignment in lithography tools
EP1751491B1 (en) 2004-05-11 2014-11-05 Renishaw plc Polarising interferometer with removal or separation of error beam caused by leakage of polarised light
JP4514209B2 (ja) * 2004-10-15 2010-07-28 キヤノン株式会社 位置検出装置及び方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4660978A (en) 1984-12-19 1987-04-28 Hughes Aircraft Company Direct slope measurement shearing interferometer
JPH0886608A (ja) * 1993-12-27 1996-04-02 Nikon Corp 干渉計
US20030197870A1 (en) 2002-04-18 2003-10-23 Bagwell Kerry D. Compact beam re-tracing optics to eliminate beam walk-off in an interferometer
KR20040001099A (ko) * 2002-06-27 2004-01-07 한국과학기술원 이종모드 헬륨-네온 레이저와 슈퍼 헤테로다인위상측정법을 이용한 헤테로다인 레이저 간섭계

Also Published As

Publication number Publication date
JP5305732B2 (ja) 2013-10-02
KR20090118852A (ko) 2009-11-18
EP2120005A1 (en) 2009-11-18
US20120327424A1 (en) 2012-12-27
JP2009276114A (ja) 2009-11-26
US8582112B2 (en) 2013-11-12
EP2120005B1 (en) 2012-11-14
US20090284750A1 (en) 2009-11-19
US8384910B2 (en) 2013-02-26

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