KR101125669B1 - Connector For Test Device - Google Patents

Abstract

The present invention includes a plurality of contact members 1120 having a guide inclined portion 1121 and made of an insulating material, and a plurality of guide members 1120 made of an insulating material, and an inclined portion 129 facing the guide inclined portion 1121. 120); In the test apparatus for testing a semiconductor component, when the contact member 120 is pressed, the inclined portion 129 of the contact member 120 is slid along the guide inclined portion 1121 so that the component of the component perpendicular to the pressing direction is moved. It relates to the test device connector 100 in which displacement occurs in the contact member 120; The connector on one side can be made into a flat type instead of the connection between the female and male connectors, and even if foreign matter is attached to the contact member or the pattern surface due to slippage in the contact part, it is removed during the contacting process. It is easy to manufacture because it is not provided with a pin, and even when damage occurs to any one of the contact members, it is possible to replace and use only the damaged contact member.

Connector, test, semiconductor

Description

Connector for test device

The present invention relates to a connector for a test apparatus, and more particularly, to a connector for a test apparatus that has a simple structure and is not affected by electrical contact even when a slip occurs in the contact portion and foreign matter is placed on the contact portion.

The semiconductor device is a fab process that forms an electrical circuit including conductive structures on a silicon wafer, which is generally used as a semiconductor wafer, and a test device is used to inspect the electrical characteristics of the semiconductor components formed in the fab process. An electrical die sorting (EDS) process and a package assembly process for encapsulating and individualizing the semiconductor parts with an epoxy resin are manufactured.

The semiconductor test apparatus for testing a semiconductor component such as a packaged IC or a wafer (hereinafter referred to as a 'semiconductor component') includes a test board contacting a socket board on which a device under test (DUT) is mounted and a socket board on which a DUT is mounted. Equipped with a test head. 1 illustrates an example of a test apparatus for testing electrical characteristics of semiconductor components, and includes a test head 11 and a socket board on which semiconductor components 17 are accommodated, in which a test board for generating a test signal pattern as an electrical signal is accommodated. 15 and a coaxial cable 14 electrically connecting the performance board 13 and the socket board 15 to each other. In FIG. 1, reference numeral 13 denotes a performance board connected to the socket board 15 through a coaxial cable 14, 16 denotes a socket provided on the socket board 15, and 20 denotes the test head. A head socket coupled to the test board housed in (11), 30 shows a connector 30 coupled to the performance board (13).

2 is a cross-sectional view illustrating the coupling relationship between the connector 30 and the head socket 20. As shown in FIG. 2, the head socket 20 is a male connector, and the connector 30 is a female type. As a connector, during test, the head socket 20 is inserted into the connector 30 to form a mechanical contact so that the performance board 13 and the test board 12 accommodated in the test head are electrically connected. The head socket 20 may be coupled to the test board 12 using a screw, and the contact pins 21 of the head socket 20 may be electrically connected to terminals not shown in the pattern of the test board 12. Is connected.

The connector 30 includes a housing 31 which provides a space 35 into which the plug 22 of the head socket 20 is inserted / drawn, and a connector pin 32 spaced apart from the plug 22 by a predetermined distance. And a pressing member 33 for pressing the connector pin 32 to intermittently contact the contact pin 21 provided in the plug 22 and a driving member 34 for selectively driving the pressing member 33. . The connector 30 is provided in the test apparatus and used as a connector for transmitting a test signal of a semiconductor component. The plug 22 of the head socket 20 is inserted / drawn into the space 35 inside the housing 31 of the connector 30. In this case, a plurality of contact pins 21 are provided at both sides of the plug 22 protruding from the head socket 20 at predetermined intervals. Guide grooves 24 are formed at both sides of the plug 22 so that the contact pins 21 are spaced at predetermined intervals, and one end of the contact pin 21 is inserted into the guide groove 24.

A coupling member 32c is provided below the housing 31, and one end of the connector pin 32 of the connector 30 is fixed to the coupling member 32c. The other end of the connector pin 32 fixed to the coupling member 32c is spaced apart from the contact pin 21 by a predetermined interval. The connector pin 32 of the connector 30 includes a fixing portion 32d, a contact portion 32b, a pressing portion 32a and a connecting portion 32e. The fixing part 32d of the connector pin 32 is a part fixed by the coupling member 32c of the housing 31. The contact portion 32b is a portion which contacts the contact pin 21 on the plug 22. The pressing portion 32a is a portion pressed by the pressing member 33 between the fixed portion 32d and the contact portion 32b. The connection part 32e is electrically connected to the performance board 13 through which the test signal is input and output by being exposed to the outside of the housing 31. The pressing member 33 is disposed in the housing 31 to press the connector pin 32 to intermittently contact the connector pin 32 with the contact pin 21. The contact portion 32a of the connector pin 32 comes into contact with the contact pin 21 by the pressing member 33.

The pressing member 33 includes a first pressing part 33a and a second pressing part 33b. The first pressing part 33a is spaced apart from the plug 22 to primarily press the connector pin 32. In addition, the first pressing part 33a contacts and presses the connector pin 32 at a point away from the contact point where the connector pin 32 is in contact with the contact pin 21. The second pressing part 33b pressurizes the connector pin 32 primarily pressed away from the plug 22. The detailed description of the driving member 34, the insertion groove 36 and the driving protrusion 37 shown in FIG. 2 is the same as described in the contents of Korean Patent No. 0902376, and the detailed description is omitted.

Since the connector 30 and the head socket 20 according to the related art form a male and a male structure, the connector 30 is complicated and has a connector pin 32 that elastically deforms, thereby providing a plurality of contact pins for uniform contact. 32) is not easy to manufacture, and since the connector pin 32 is inserted and fixed to the coupling member 32c, if any one of the connector pins 32 is damaged during handling, it is not easy to replace and must be tested. There was a problem in that the head socket 20 should be connected to the board 12.

The present invention has been proposed in order to solve the above problems, even if there is a sliding contact in the contact portion by the pressurization does not deteriorate even in the presence of foreign matter, the structure is simple and easy to manufacture a test device connector It aims to provide.

In order to achieve the above object, the present invention includes a plurality of guide members having a guide inclined portion and made of an insulating material, and a plurality of contact members made of a conductive material having an inclined portion facing the guide inclined portion; It is provided in the test apparatus and provides a connector for a test apparatus in which the inclined portion of the contact member slides along the guide inclined portion when the contact member is pressed, so that displacement of the component in the vertical direction with respect to the pressing direction occurs in the contact member.

The present invention also provides a test apparatus in which the contact member includes first and second contact parts on both sides, and a sliding part is generated in a pressing direction at one contact part and a sliding part is generated in a direction perpendicular to the pressing direction at another contact part. Provides a connector for

In addition, the present invention forms a hollow portion in which the first board is inserted into the inner side wall portion extending in the longitudinal direction, and a concave first groove having an upward opening component is formed and both sides are connected to the side wall portion and the length A body member comprising at least one partition wall portion spaced apart in a direction, and at least one guide member connected to the partition wall and positioned at a hollow portion; Located in the first groove is provided in parallel with the side wall portion and further comprises a support member made of an elastic body; Each of the contact members is inserted between the support member and the guide member, is located in the hollow portion and is separated from each other by the side wall portion, the guide member has a guide inclined portion inclined with respect to the pressing direction and the contact member in the inclined direction of the guide inclined portion The inclined portion is inclined to provide a test device connector facing the guide inclined portion and the inclined portion.

In addition, the present invention provides a connector for a test device, one end of the contact member protrudes to the top of the side wall portion through the hollow portion.

In addition, the guide inclined portion is formed to be closer to the side wall portion toward the downward direction, the contact member is formed in the first concave concave in the direction toward the side wall portion and the inclined portion is formed in the direction toward the guide member Provided is a connector for a test apparatus in which a support member contacts a first recess.

The present invention may further include a support member formed in the partition wall to be concave toward the contact member, the support member being disposed in parallel with the side wall part in the second groove; The contact member provides a connector for a test device in contact with the support member located in the second recess.

In addition, the contact member is a connector for a test apparatus having a first contact portion formed to the side of the support member positioned in the second groove, and a second contact portion formed to the upper portion of the support member located in the first groove. To provide.

According to the connector 100 for a test apparatus according to the present invention, the connection between the female and male connectors can be made on one side of the connector, and the printed circuit board can be directly contacted and connected between the contact member and the terminal. Even if foreign matter adheres to the surface of the contact member or the terminal due to the sliding caused by the pressure generated by the contact portion is removed during the pressing process, the electrical contact state is maintained well, it is easy to manufacture because it does not have a pin to elastically deform It can be, even if damage occurs in any one of the contact member has an effect that can easily replace the damaged contact member.

Hereinafter, a connector for a test apparatus according to a preferred embodiment of the present invention will be described in detail with reference to the drawings.

3 and 4 are perspective views for explaining the connection structure of the test device connector according to an embodiment of the present invention, Figure 5 is an exploded perspective view for explaining the connector for the test device shown in FIG. 6 is a side view of the connector for a test apparatus shown in FIG. 3, and FIG. 7 is an enlarged view of a portion A of FIG. 5, and FIG. 8 is a cross-sectional view taken along the line AA of FIG. 6, together with the first board. 9 is a cross-sectional view taken along the line BB of FIG. 6, together with the first board, FIG. 10 is a cross-sectional view taken along the line AA of FIG. 6, FIG. 11 is a cross-sectional view taken along the line BB of FIG. Is a cross-sectional view for explaining the operation of the connector for a test device according to the invention, Figure 13 is an enlarged view of the contact member provided in the connector for a test device according to the invention, Figure 14 is a test according to the invention chapter Shows enlarged a guide member provided in the connector.

Hereinafter, the horizontal direction of FIG. 4 will be described in the longitudinal direction, the vertical direction of FIG. 4 will be in the vertical direction, and the direction perpendicular to the ground in FIG. 4 will be described in the lateral direction. The performance board 13 is described as a first board, and the test board 12 is described as a second board.

However, the first board may be a performance board 13, a test board 12, or a second board may be a test board 12 or a performance board 13, depending on the direction in which the above connection is made. Another printed circuit board may be electrically connected to the test board 12 or the performance board 13 to contact the contact member 120 when pressed.

8 to 14, the test apparatus connector 100 according to the embodiment of the present invention includes a guide member 1120 and a plurality of guide members 1120 made of an insulating material and the guide inclined portion. It comprises a plurality of contact members 120 made of a conductive material having an inclined portion 129 facing the 1112. In the test apparatus as illustrated in FIG. 1, for example, the first board 13 and the first board 13 may be pressed against each other by pressing the second board 12 and the first board 13 toward each other. When the second board 12 is electrically connected, the terminal 12a of the second board 12 contacts the contact member 120 to press the contact member 120. When the contact member 120 is pressed, the inclined portion 129 of the contact member 120 slides along the guide inclined portion 1121 so that displacement of the component in the vertical direction with respect to the pressing direction (horizontal direction in FIG. 12) is achieved. It occurs in the contact member 120, and thus, a sliding occurs between the contact member 120 and the terminal 12a of the second board 12.

The contact member 120 is in contact with the first board 13 to the lower side, the displacement is also generated in the pressing direction by the pressure by the second board 12, the contact member 120 and the first board 13 Sliding occurs in the pressing direction between the terminals (13a) of.

As shown in FIGS. 3 to 11, the connector 100 for a test apparatus according to an exemplary embodiment of the present invention includes a body member 110 made of an insulating material such as a synthetic resin, and an elastic body such as silicone rubber. The support member 130 provided in the 110, and one side is configured to include a contact member 120 is supported in contact with the support member 130, a part of which protrudes to the top of the body member (110). The contact member 120 is made of a conductive material, it is also possible to coat the surface of the metal with a small electric resistance, such as silver to improve the electrical conductivity. In FIG. 3 to FIG. 5, reference numeral 14 illustrates a coaxial cable that may be connected to the first board 13.

The main body member 110 forms a hollow portion 1103 into which the first board 13 is inserted inward, and has a side wall portion 1101 extending in the longitudinal direction, and a concave first recess having an upward opening component. One or more partition walls 1113 are formed and both sides are connected to the side wall portion 1101 and are spaced apart in the longitudinal direction, and one or more partition walls 1113 are connected to the partition wall portions 1113 to be positioned in the hollow portion 1103. It is composed of one or more guide member 1120. The body member 110 has end portions 1106 spaced apart from each other in the longitudinal direction and facing each other, and both ends of the side wall portion 1101 are connected to the end portions 1106. The hollow part 1103 is surrounded by the end part 1106 and the side wall part 1101 and forms a passage penetrated in the vertical direction.

The partition part 1113 extends laterally between the side wall parts 1101, and the guide member 1120 is provided between the end part 1106 and the partition part 1113 and the partition part 1113 and the partition part ( 1113 is provided extending in the longitudinal direction. The partition portion 1113 divides the hollow portion 1103 in the longitudinal direction. As shown in FIG. 9, the partition wall portion 1113 is formed with a concave first recess 1115a having a component that is open upward, and is spaced downward from the first recess 1115a to contact the contact member ( The second groove 1115b is formed to be concave toward the 120.

The support member 130 is positioned in the first recess 1115a and is provided in parallel with the side wall portion 1101, and another supporting member is parallel to the side wall portion 1101 in the second recess 1115b. 130 is provided. The support member 130 may have a length in the longitudinal direction and a cross section may be circular or polygonal. The support member 130 may be a hollow body such as a pipe, or may be a solid body such as a rod. The support member 130 extends from one end portion 1106 to the other end portion 1106. The portion located between the partition wall portion 1113 of the support member 130 and the portion located between the end portion 1106 and the partition wall portion 1113 may contact the side wall portion 1101, and the side wall portion ( It is also possible to form a gap between the 1101.

The body member 110 may include an extension part 1102 extending in a longitudinal direction on an outer side of the end part 1106 on both sides, and the coupling part 1104 penetrated in the vertical direction in the extension part 1102. Is formed. The extension part 1102 extends in a direction opposite to the side wall part 1101 about the end part 1106. The extension 1102 may be used as a means for firmly fixing the first board 13 by using the coupling member 140.

The coupling member 140 is made of an insulating material such as a synthetic resin, and has a seating portion 141 which is formed concave laterally, and the seating portion 141 has one or more first coupling holes penetrating in a lateral direction ( 143 is formed. In addition, the second coupling hole 145 is formed in the upper concave downward.

Protruding portions 13c protruding in the longitudinal direction on both sides of the first board 13 are formed, and through holes 13b are formed in the protruding portions 13c in the lateral direction. The first board 13 is inserted into the hollow part 1103 from the bottom of the body member 110, and the coupling member 140 is positioned below the extension part 1102. At this time, the protrusion 13c is to be seated on the seating portion 141 of the coupling member 140. As described above, in the state in which the main body member 110, the first board 13, and the coupling member 140 are positioned, the fixing bolt 155 is inserted into the coupling hole 1104 to the second coupling hole 145. 2), the coupling member 140 is firmly coupled to both sides of the main body member 110, and the through hole 13b and the first coupling hole 143 are fixed to the bolt 151 and the fixing nut 153. The coupling member 140 and the first board 13 are coupled to each other. As described above, the body member 110 and the first board 13 may be firmly coupled to each other through the coupling member 140.

As shown by a dotted line in FIG. 6, an installation hole 1119 penetrating laterally is formed in the side wall part 1101, and the through hole 13b of the installation hole 1119 and the first board 13 is fixed. It is also possible to couple the first board 13 directly to the body member 110 by fastening with the bolt 151 and the fixing nut 153.

The contact member 120 is inserted into the hollow portion 1103 between the partition portion 1113 and between the end portion 1106 and the partition portion 1113. The contact member 120 is located between the support member 130 and the guide member 1120 in the lateral direction, in contact with the support member 130 on one side, and in contact with the guide member 1120 on the other side.

As shown in FIG. 13, the contact member 120 has a plate shape, and the first concave first recess 121 and the second recess 123 contacting the support member 130 in a direction toward the side wall portion 1101. Is formed. The support member 130 contacts the first concave portion 121 and the second concave portion 123. The lower portion of the second recess 123 in contact with the support member 130 provided in the second recess 1115b protrudes toward the support member 130 to prevent the support member 130 from falling downward. The lateral protrusion 126 may be provided. The contact member 120 includes a first contact portion 127 formed laterally of the support member 130 positioned in the second recess 1115b and an upper portion of the support member 130 positioned in the first recess 1115a. The second contact portion 125 is formed. The first contact portion 127 is protruded in a direction opposite to the support member 130 in the lateral direction so that the first contact portion 127 of the contact member 120 neighboring in the lateral direction face each other. The first contact portion 127 is in contact with the first board 13, and the second contact portion 125 is in contact with the second board 12. The outer surface is rounded. The contact member 120 has an inclined portion 129 formed in the direction toward the guide member 1120, and has a first flat portion 122 above the inclined portion 129. The inclined portion 129 is formed to be inclined laterally as shown in FIG. The first flat portion 122 has a vertical surface. The second flat portion 124 is a surface perpendicular to the lower portion of the inclined portion 129. A gap is formed between the contact member 120 and the partition wall portion 1113 in the longitudinal direction.

The second contact portion 125 protrudes upward of the body member 110 through the hollow portion 1103. Partition walls 1113 are positioned between the contact members 120 in the longitudinal direction, and the contact members 120 adjacent to each other in the longitudinal direction are separated from each other by the partition walls 1113. The guide member 1120 is positioned between the contact members 120 in the lateral direction, and the contact members 120 which are laterally neighbored by the guide member 1120 are isolated from each other.

10 and 14, the guide member 1120 includes a guide inclined portion 1121 inclined with respect to the pressing direction. The guide inclination portion 1121 is provided on both sides of the inner inner material 1120, and is formed to be closer to the side wall portion 1101 toward the lower direction. That is, the lateral width of the guide member 1120 increases in the downward direction. The inclined portion 129 of the contact member 120 is formed in the inclined direction of the guide inclined portion 1121. The lower portion of the guide inclined portion 1121 includes a protruding surface portion 1123 formed of a vertical surface. A lower portion of the protruding surface portion 1123 may have a surface inclined in a direction opposite to the guide slope portion 1121.

10, 13 and 14, when the contact member 120 is inserted between the support member 130 and the guide member 1120, the first flat portion 122 of the contact member 120 is Located in the upper portion of the guide inclined portion 1121, the inclined portion 129 of the contact member 120 faces the guide inclined portion 1121, the second flat portion 124 of the contact member 120 is a protruding surface portion ( 1123). The inclined portion 129 and the guide inclined portion 1121 of the contact member 120 may face each other in contact with each other, and the second flat portion 124 and the protruding surface portion 1123 of the contact member 120 may also face each other. They may be in contact with each other.

As shown in FIGS. 10, 11, 13, and 14, the support member 130 is positioned in the first recess 1115a of the partition 1111, and the support member 130 and the guide member 1120 are positioned. Insert the contact member 120 therebetween. The support member 130 positioned in the first recess 1115a contacts the first recess 121 of the contact member 120. The inclined portion 129 of the contact member 120 faces the guide inclined portion 1121 of the guide member 1120, and the second flat portion 124 of the contact member 120 protrudes from the guide member 1120. Facing face portion 1123. The inclined portion 129 of the contact member 120 and the guide inclined portion 1121 of the guide member 1120 may face each other in contact with each other, and guide the second flat portion 124 of the contact member 120. The protruding surface portions 1123 of the member 1120 may also face each other in contact with each other. The contact members 120 are oriented in the lateral direction with the guide member 1120 interposed therebetween, so that the first contact portions 127 provided in the contact members 120 protrude toward each other. The second contact portion 125 protrudes upward of the body member 110 through the hollow portion 1103.

Another support member 130 is inserted between the second concave portion 123 of the contact member 120 and the second recess 1115b of the partition portion 1113. The second recess 1115b is spaced apart from the lower side of the first recess 1115a, and the second recess 123 is formed spaced below the first recess 121 to form the second recess 1115b. ) Face each other.

After the contact member 120 and the support member 130 are positioned on the main body member 110 as described above, the first board 13 is moved from the lower portion to the hollow portion 1103 as shown in FIGS. 8 and 9. The terminal 13a provided in the first board 13 is brought into contact with the first contact portion 127 of the contact member 120. At this time, the lower portion of the contact member 120 is pressed toward the support member 130 in the lateral direction. The support member 130 is compressed and deformed by the insertion of the first board 13, but FIG. 8 illustrates a state in which the contact member 120 and the support member 130 overlap for convenience, and the contact member 120. ) And the support member 130 is omitted.

The first board 13 is inserted into the hollow portion 1103, and as shown in FIGS. 3 to 5, through the coupling member 140 or directly to the connector 100.

1 and 12, the second board 12 is positioned above the connector 100 for testing in the test apparatus, so that the terminal 12a of the second board 12 is connected to the contact member ( After contact with the second contact portion 125 of 120, it is pressed downward. The contact member 120 is moved downward by the downward pressure, the inclined portion 129 of the contact member 120 slides along the guide inclined portion 1121 of the guide member 1120, and the contact member ( 120 is moved in the vertical direction with respect to the pressing direction.

Accordingly, in the contact portion formed between the first contact portion 127 of the contact member 120 and the terminal 13a of the first board 13, a sliding occurs in the pressing direction, and the second contact portion of the contact member 120 ( In the contact portion formed between the 125 and the terminal 12a of the second board 12, sliding occurs in a direction perpendicular to the pressing direction. And when the pressing force is released, it is returned to the original position by the restoring force of the support member 130.

Detailed description of the structure for supporting or guiding the connector 100 or the second board 12 during the pressing is omitted.

Although the present invention has been described above with reference to the drawings, the scope of the present invention is not limited thereto, and the scope obvious to those skilled in the art to which the present invention belongs should be interpreted as belonging to the rights of the present invention.

1 illustrates an example of a semiconductor test apparatus.

2 is a cross-sectional view showing a connector according to the prior art provided in the semiconductor test apparatus.

3 and 4 are perspective views illustrating a connection structure of a connector for a test device according to an embodiment of the present invention.

FIG. 5 is an exploded perspective view illustrating the connector for a test apparatus illustrated in FIG. 3.

FIG. 6 is a side view of the connector for a test device shown in FIG. 3. FIG.

FIG. 7 is an enlarged view of a portion A of FIG. 5.

FIG. 8 is a cross-sectional view taken along the line A-A of FIG. 6 and shown with the first board.

FIG. 9 is a cross-sectional view taken along the line B-B of FIG. 6 and shown with the first board.

10 is a cross-sectional view taken along the line A-A of FIG.

FIG. 11 is a cross-sectional view taken along line B-B of FIG. 6.

12 is a cross-sectional view for explaining the operation of the connector for a test apparatus according to the present invention.

13 is an enlarged view of a contact member provided in the connector for a test apparatus according to the present invention.

14 is an enlarged view of a guide member provided in the connector for a test apparatus according to the present invention.

Claims (7)

A plurality of guide members 1120 having a guide inclined portion 1121 and made of an insulating material, and a plurality of contact members 120 made of a conductive material and having a inclined portion 129 facing the guide inclined portion 1121. including; In the test apparatus, when the contact member 120 is pressed, the inclined portion 129 of the contact member 120 slides along the guide inclined portion 1121 so that the displacement of the component in the vertical direction with respect to the pressing direction is changed. 120), The contact member 120 includes first and second contact portions 127 and 125 on both sides, and a sliding occurs in the pressing direction at one contact part, and a sliding occurs in a direction perpendicular to the pressing direction at the other contact part. Connector for test device 100, characterized in that. delete The concave first recess having a sidewall portion 1101 extending in the longitudinal direction and forming a hollow portion 1103 into which the first board 13 is inserted inward, and a component opening upwardly. One or more partition walls 1113a are formed and both sides are connected to the side wall portion 1101 and are spaced apart in the longitudinal direction, and one is connected to the partition walls 1113 and positioned at the hollow portion 1103. A main body member 110 formed of the above guide member 1120; Located in the first groove (1115a) and provided in parallel with the side wall portion (1101) and further comprises a support member (130) made of an elastic body; Each of the contact members 120 is inserted between the support member 130 and the guide member 1120, is located in the hollow part 1103, and is separated from each other by the side wall part 1101, and the guide member 1120 is in the pressing direction. And a guide inclination portion 1121 formed to be inclined with respect to the contact member 120, and having an inclined portion 129 inclined in the inclination direction of the guide inclination portion 1121, and inclined with the guide inclination portion 1121. The unit 129 is a connector for a test device, characterized in that facing each other. The connector (100) of claim 3, wherein one end of the contact member (120) protrudes to the top of the side wall portion (1101) through the hollow portion (1103). The method of claim 3, wherein the guide inclined portion 1121 is formed to be closer to the side wall portion 1101 as the downward direction, the contact member 120 is concave in a direction toward the side wall portion 1101 first concave Connector 121 for a test apparatus, characterized in that the inclination portion 129 is formed in the direction toward the guide member 1120 is formed and the support member 130 is in contact with the first recess 121. 100. 4. The second recess 1115b is further formed in the partition 1111 so as to be concave toward the contact member 120, and is located in the second recess 1115b and the side wall part 1101. It further includes a support member 130 provided side by side; The contact member 120 is a connector for a test device, characterized in that the contact with the support member 130 is located in the second groove (1115b). The method of claim 6, wherein the contact member 120 is a first contact portion 127 formed to the side of the support member 130 located in the second groove 1115b and the support located in the first groove 1115a And a second contact portion (125) formed on top of the member (130).

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