KR101123271B1 - 대면적 고온 기체분리막의 제조 방법 - Google Patents
대면적 고온 기체분리막의 제조 방법 Download PDFInfo
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- KR101123271B1 KR101123271B1 KR1020090077288A KR20090077288A KR101123271B1 KR 101123271 B1 KR101123271 B1 KR 101123271B1 KR 1020090077288 A KR1020090077288 A KR 1020090077288A KR 20090077288 A KR20090077288 A KR 20090077288A KR 101123271 B1 KR101123271 B1 KR 101123271B1
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- silicon carbide
- separation membrane
- gas separation
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- 239000012528 membrane Substances 0.000 title claims abstract description 51
- 238000000926 separation method Methods 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 title claims description 37
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 71
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 70
- 239000011148 porous material Substances 0.000 claims abstract description 47
- 239000002243 precursor Substances 0.000 claims abstract description 27
- 238000000576 coating method Methods 0.000 claims abstract description 24
- 239000011248 coating agent Substances 0.000 claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 claims abstract description 21
- 239000007788 liquid Substances 0.000 claims abstract description 7
- 239000007789 gas Substances 0.000 claims description 51
- 239000000919 ceramic Substances 0.000 claims description 23
- 230000008569 process Effects 0.000 claims description 13
- 239000010410 layer Substances 0.000 claims description 10
- 229920006389 polyphenyl polymer Polymers 0.000 claims description 10
- 239000003960 organic solvent Substances 0.000 claims description 9
- 238000009826 distribution Methods 0.000 claims description 8
- 239000003795 chemical substances by application Substances 0.000 claims description 7
- 238000005470 impregnation Methods 0.000 claims description 7
- 238000004528 spin coating Methods 0.000 claims description 7
- 239000012298 atmosphere Substances 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 238000005452 bending Methods 0.000 claims description 4
- 229910001593 boehmite Inorganic materials 0.000 claims description 4
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 4
- 239000002356 single layer Substances 0.000 claims description 4
- 239000007921 spray Substances 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 125000003118 aryl group Chemical group 0.000 claims 1
- 229920000673 poly(carbodihydridosilane) Polymers 0.000 claims 1
- 239000012700 ceramic precursor Substances 0.000 abstract description 16
- 239000001257 hydrogen Substances 0.000 description 39
- 229910052739 hydrogen Inorganic materials 0.000 description 39
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 28
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 27
- 238000010438 heat treatment Methods 0.000 description 15
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 14
- 229910052757 nitrogen Inorganic materials 0.000 description 14
- 150000002431 hydrogen Chemical class 0.000 description 12
- 230000035699 permeability Effects 0.000 description 8
- 239000001569 carbon dioxide Substances 0.000 description 7
- 229910002092 carbon dioxide Inorganic materials 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000001723 curing Methods 0.000 description 5
- 238000005245 sintering Methods 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 3
- 229910021536 Zeolite Inorganic materials 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920003257 polycarbosilane Polymers 0.000 description 3
- 229920005597 polymer membrane Polymers 0.000 description 3
- 239000010457 zeolite Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical compound [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 description 2
- CFQGDIWRTHFZMQ-UHFFFAOYSA-N argon helium Chemical compound [He].[Ar] CFQGDIWRTHFZMQ-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 235000013312 flour Nutrition 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- XAQHXGSHRMHVMU-UHFFFAOYSA-N [S].[S] Chemical compound [S].[S] XAQHXGSHRMHVMU-UHFFFAOYSA-N 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000003889 chemical engineering Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010612 desalination reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000005431 greenhouse gas Substances 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000005055 methyl trichlorosilane Substances 0.000 description 1
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- -1 polyphenylene Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0076—Pretreatment of inorganic membrane material prior to membrane formation, e.g. coating of metal powder
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/0083—Thermal after-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/0088—Physical treatment with compounds, e.g. swelling, coating or impregnation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/10—Supported membranes; Membrane supports
- B01D69/108—Inorganic support material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/12—Composite membranes; Ultra-thin membranes
- B01D69/1213—Laminated layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/0215—Silicon carbide; Silicon nitride; Silicon oxycarbide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/024—Oxides
- B01D71/027—Silicium oxide
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/08—Specific temperatures applied
- B01D2323/081—Heating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/15—Use of additives
- B01D2323/18—Pore-control agents or pore formers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
- B01D2325/021—Pore shapes
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Organic Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
Description
Claims (8)
- a) 분포되어 형성되는 기공의 크기를 조절하기 위해 기공제어제 또는 기공형성제를 이용하여 복수개의 채널이 다공성 분리벽으로 분리된 지지체를 형성하는 단계;b) 상기 지지체에 액상의 실리콘카아바이드 전구체를 코팅하고 경화시키는 단계; 및c) 상기 코팅된 지지체를 열처리하는 단계를 포함하는 것을 특징으로 하는 세라믹 기체분리막 제조 방법.
- 제 1 항에 있어서,상기 a) 단계는,상기 복수개의 채널을 서로 평행하게 형성시키되, 입구 채널과 출구 채널을 분리시켜 원통형 허니컴 형태의 실리콘카아바이드 지지체를 형성시키는 단계를 포함하는 것을 특징으로 하는 세라믹 기체분리막 제조 방법.
- 제 1 항에 있어서,상기 a) 단계는,상기 복수개의 채널을 서로 평행하게 형성시키되, 입구 채널과 출구 채널을 분리시켜 원통형 허니컴 형태의 코디얼라이트 지지체를 형성시키는 단계 및상기 코디얼라이트 지지체를 보헤마이트 졸 용액에 함침하여 γ-알루미나의 중간층을 형성하는 단계를 포함하는 것을 특징으로 하는 세라믹 기체분리막 제조 방법.
- 제 1 항에 있어서,상기 a) 단계는,평판의 실리콘카아바이드 시트 위에 서로 평행한 복수개의 굴곡을 형성시킨 실리콘카아바이드 시트를 위치시켜 단층의 시트를 준비하는 단계; 및서로 굴곡 방향이 교차되도록 상기 단층의 시트를 순차적으로 적층시켜 적층형 실리콘카아바이드 지지체를 형성하는 단계를 포함하는 것을 특징으로 하는 세라믹 기체분리막 제조 방법.
- 제 1 항 내지 제 4 항 중 어느 한 항에 있어서,상기 b) 단계는,실리콘카아바드 전구체를 유기용매에 녹인 후 함침, 스프레이 또는 스핀 코팅 방식 중 어느 하나의 방식으로 코팅하는 것을 특징으로 하는 세라믹 기체분리막 제조 방법.
- 제 5 항에 있어서,상기 실리콘카아바드 전구체는, 폴리페닐카보실란, 아릴하이드리도 폴리카보실란 또는 알킬하이드리도폴리페닐카보실란 중 선택된 어느 하나인 것을 특징으로 하는 세라믹 기체분리막 제조 방법.
- 제 6 항에 있어서,상기 실리콘카아바드 전구체의 분자량은 1000 내지 3000인 것을 특징으로 하는 세라믹 기체분리막 제조 방법.
- 제 1 항 내지 제 4 항 중 어느 한 항에 있어서,상기 b) 단계는,200℃ 내지 300℃의 경화온도로 공기 중에서 불용화 공정을 실시하며,상기 c) 단계는,불활성 가스 분위기 또는 진공 분위기에서 열처리의 온도를 800℃ 내지 1300℃로 유무기전환 공정을 실시하는 것을 특징으로 하는 세라믹 기체분리막 제조 방법.
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KR1020090077288A KR101123271B1 (ko) | 2009-08-20 | 2009-08-20 | 대면적 고온 기체분리막의 제조 방법 |
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KR1020090077288A KR101123271B1 (ko) | 2009-08-20 | 2009-08-20 | 대면적 고온 기체분리막의 제조 방법 |
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KR20110019653A KR20110019653A (ko) | 2011-02-28 |
KR101123271B1 true KR101123271B1 (ko) | 2012-03-20 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190064746A (ko) | 2017-12-01 | 2019-06-11 | 한국생산기술연구원 | 막접촉기 표면 개질을 위한 코팅방법 |
KR20200068518A (ko) | 2018-12-05 | 2020-06-15 | 한국생산기술연구원 | 표면 개질된 co2 흡수 막접촉기용 멤브레인 및 그 코팅방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003267719A (ja) * | 2002-03-15 | 2003-09-25 | Nippon Steel Corp | 多孔体、多孔体膜を有する基体およびこれらの製造方法 |
JP2006249208A (ja) * | 2005-03-10 | 2006-09-21 | Nitto Denko Corp | 多孔質膜の製造方法 |
JP2007022823A (ja) * | 2005-07-13 | 2007-02-01 | National Institute Of Advanced Industrial & Technology | 炭化珪素系多孔質成形体の製造方法 |
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- 2009-08-20 KR KR1020090077288A patent/KR101123271B1/ko active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003267719A (ja) * | 2002-03-15 | 2003-09-25 | Nippon Steel Corp | 多孔体、多孔体膜を有する基体およびこれらの製造方法 |
JP2006249208A (ja) * | 2005-03-10 | 2006-09-21 | Nitto Denko Corp | 多孔質膜の製造方法 |
JP2007022823A (ja) * | 2005-07-13 | 2007-02-01 | National Institute Of Advanced Industrial & Technology | 炭化珪素系多孔質成形体の製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190064746A (ko) | 2017-12-01 | 2019-06-11 | 한국생산기술연구원 | 막접촉기 표면 개질을 위한 코팅방법 |
KR20200068518A (ko) | 2018-12-05 | 2020-06-15 | 한국생산기술연구원 | 표면 개질된 co2 흡수 막접촉기용 멤브레인 및 그 코팅방법 |
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KR20110019653A (ko) | 2011-02-28 |
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