KR101074633B1 - The water cooling dry vacuum pump which has two phase screw type - Google Patents

Abstract

The present invention relates to a water-cooled dry vacuum pump having a two-stage screw, wherein the main and driven screw rotors are integrally mounted by processing one or two stage screws with different thread lead lengths on a pair of main shafts and driven shafts. Wow; A front cover body including an oil chamber and a single bearing for preventing leakage of the cooling water inlet and gas, and a timing gear fastened to the safety shaft and the flange joint; A front frame composed of a water jacket of the discharge port and a mechanical seal and a double bearing for preventing leakage of gas; Cooling water circulation spaces are formed on both sides of the inlet and the cooling water discharge ports on the upper part of the body, and on the left side, a guide plate is mounted to prevent shaking during operation or installation of the main and longitudinal axes, and an oil chamber and A main body to which the lip seal and the roller bearing are mounted; It is mounted to the right end of the main body is configured to include a grease cover for sealing the interior of the main body.
Accordingly, the present invention is capable of high speed rotation by applying the two-stage screw rotor of the above configuration in consideration of the efficiency of the pump, the length and the weight of the screw rotor, enabling higher vacuum under the same power, and at the same time saving power. By preventing the deterioration of the seal and the bearing by the flow of the cooling water of the above configuration, it is effective to increase the durability of the product by preventing deformation of the component due to the temperature difference.

Description

 The water cooling dry vacuum pump which has two phase screw type}

The present invention relates to a dry vacuum pump, and more particularly, to optimize the shape and number of screw blades and integrate with the shaft to cool the high vacuum efficiency and discharge port in a water-cooled manner. It relates to a vacuum pump.

In general, a vacuum pump is a device that removes gas molecules in an airtight container, and inhales and compresses gas at a low pressure below atmospheric pressure to release it to the atmosphere to increase the degree of vacuum in the container. These vacuum pumps are largely classified into a mechanical vacuum pump and a diffusion / ion pump, which are represented by dry and wet types, respectively. Unlike diffusion type ion pumps that use oil or mercury to achieve high vacuum, mechanical vacuum pumps have a relatively low vacuum but dry type that does not use oil. As it shows stable vacuum level, it is widely used in various industrial fields because it has the advantage of easy operation and low cost for maintenance.

The background technology of the present invention is disclosed in Republic of Korea Patent Publication No. 10-0152174 (1998.06.25).

Figure 4 shows the screw vacuum pump of the Republic of Korea Patent Publication No. 10-0152174 (1998.06.25), a multi-stage screw for arranging a plurality of screws in series on a pair of main shaft and driven shaft In processing, the multi-stage screw thread lead length is machined separately so that its end faces come into contact with the main shaft and the driven shaft. The multi-stage screw has a screw lead length of pump suction. It has a structure characterized in that it is assembled in decreasing order from the side to the discharge side.

In addition, the cover body is coupled to both sides of the pump main body, and the discharge port 54 is positioned between the cover body and the main body of one side. A through hole is formed in the main body of the pump to communicate with the discharge port 54 is located, the gas passing through the through hole is formed in the rear end of the through hole through the discharge space located at the lower end of the discharge port 54 It is discharged to the outside through the discharge port 54.

However, the screw vacuum pump of the prior art has a main, driven rotary shaft 43, 44 and a plurality of first, second, third, third, and third stage screws 45, 46, 47 in constructing a plurality of screw rotors. And (48), (49, 50) after processing separately, so that the screw of the plurality of stages is fixed to the rotating shaft (43), 44 by the fixing means 55, such as a key or pin member, main, coarse screw rotor At high speed rotation of (41) and (42), there is a problem that can not be increased by a certain speed due to the problem of durability.

In addition, it can be seen that the first, second, and third stage screws have three kinds of lengths, and each stage consists of two screw threads each consisting of six screw threads. Thereby, there is an effect of increasing the efficiency of the pump, but there is a problem that the increase in the movement path of the gas and the increase in the use power due to the increase in the length and weight of the screw rotor.

 In general, a screw vacuum pump discharges high-temperature gas, and there is a temperature difference in which the temperature of the discharge gas at the discharge port is the highest and the temperature drops to the discharge port, thereby deforming the entire casing and the internal components of the vacuum pump. This occurs and there is a problem that this deformation is a major cause of the durability degradation of the pump.

KR 10-0152174 1998. 06. 25. Drawing 2

In order to solve the above problems, the present invention adopts a screw type dry vacuum pump structure that changes the screw lead to the basic single stage pump configuration, and has two stage screws and each stage screw has an equilateral screw lead length. Each end is composed of two screws and three screws, so it is possible to realize a high compression force and high vacuum while saving power by reducing the length and weight in an optimal combination. To improve the speed of rotation

Two-stage screw that installs a water jacket by installing a partition on the discharge port, forms a cooling water circulation space in the main body, and then configures the cooling water to flow sequentially to prevent deformation of the product due to temperature difference starting from the discharge port. It is an object to provide a water-cooled dry vacuum pump having a.

In order to achieve the object, main and driven screw rotors are formed by integrally processing the 1,2-stage screws on the pair of main shaft and the driven shaft by varying the screw lead length; Two coolant inlets for cooling the pump are mounted at the lower end, and the oil seal and single bearing are installed to prevent the leakage of gas at the part where the safety shaft passes through. The power lock pin is located at the left end of the main and driven shafts. A front cover body having a timing gear which is fastened after being fixed and fastened to a safety shaft by a flange joint; A discharge port partition wall is formed to form a water jacket on the inner wall surface of the discharge port through which the discharged air escapes, and a mechanical seal and a double bearing are installed at a site where the main and driven shafts are inserted and fastened. A shear frame composed of; The inlet for intake of air is mounted on the upper part, and a cooling water circulation space and a cooling water discharge port, which are spaces for circulating the cooling water, are formed, and on the left side where the main and driven shafts are inserted and fastened, the operation of the main and driven shafts is performed. A guide plate is mounted to prevent shaking, and an oil seal and a lip seal are installed at the right end to which the main and driven shafts are fastened, and a roller bearing is installed to smoothly rotate the main and driven shafts. ; It is mounted to the right end of the main body is configured to include a grease cover for sealing the interior of the main body.

As described above, the present invention makes it possible to compress and move the air flowing from the suction unit, but considering the number and the length and weight of the screw rotor blades, which are variables of performance and power consumption, in consideration of the vacuum efficiency, respectively, The 1st stage screw consisting of two blades and the 2nd stage screw consisting of three blades has a thread lead length of 2, and the screw lead lengths of the 1st and 2nd stages are different from each other on the axis of rotation of the screw rotor. Optimized screw that realizes higher vacuum efficiency at the same power consumption by integrating a single-stage screw with lead length and integrally machining and mounting a two-stage screw with longer thread lead length on the discharge side. Reduced vane combinations and gas flow paths, and screw and shaft are integral, making screw rotors more durable The high-speed rotation of the vacuum pump provides high vacuum efficiency and high power consumption, and a partition is installed in the discharge section to install a water jacket, allowing the coolant to flow along the body in order to achieve a bearing and In addition to preventing the deterioration of the seal, there is an effect of preventing the deformation of the product components due to the temperature difference of the discharge portion and the suction portion to increase the durability.

1 is a cross-sectional view of a water-cooled dry vacuum pump having a two-stage screw according to a preferred embodiment of the present invention.
2 is a longitudinal sectional view of a water-cooled dry vacuum pump with a two-stage screw according to FIG.
3 is a side view of a screw rotor with a two-stage screw of the invention according to FIG. 1;
4 is a cross-sectional view of a dry vacuum pump according to the prior art.

1 is a cross-sectional view of a water-cooled dry vacuum pump having a two-stage screw according to a preferred embodiment of the present invention, Figure 2 is a longitudinal sectional view of a water-cooled dry vacuum pump having a two-stage screw according to Figure 1, Figure 3 4 is a side view of the integrated screw rotor, and FIG. 4 is a cross sectional view of a dry vacuum pump according to the prior art.

Hereinafter, the components will be described with reference to the drawings.

As shown in FIG. 1, a water-cooled dry vacuum pump having a two-stage screw according to an embodiment of the present invention includes a main body 50 and a shear cover in which main and driven screw rotors 10 and 20 are installed. It consists of the front frame 40 in which the water jacket 43 is installed between the sieves 30, and the grease cover body 60 which seals the rear end part of the main body 50.

Here, first, the main, driven screw rotor (10), 20, as shown in Figures 1 and 3, the main, driven shaft (11), (21) and the first stage screw (12), ( 22, the second stage screw 13, 23 and the safety shaft 15 for connecting the main shaft 21 and the drive motor. The main, driven shafts 11 and 21 and the screws are integrally machined. The first and second stage screws 12, 13, and 22 and 23 are machined with different thread lead lengths, and their outer diameters (D) and rib diameters (d) are the same in each stage. The number of threads of the first stage screws 12 and 22 is two and the number of threads of the second stage screws 13 and 23 is three. The thread lead length L ₁ and L ₂ are respectively differently machined for the _first and second stage screws 12, 22, and 13 and 23, and the thread lead length L ₁ is larger to the pump inlet 51, L _2. After the furnace is formed to be located at the pump discharge port 41 side, the teeth of the main and driven screw rotors 10 and 20 are engaged to be tightly accommodated in the integrated casing of the pump main body 50.

As shown in FIGS. 1 and 2, the front cover 30 has a coolant inlet 31 on the outer surface of the lower end of the front cover 30 to cool the discharged air and the pump. Two of them are mounted, one mounted at the bottom and the other mounted at the bottom of the position where the timing gear 34 is located. The coolant inlet 31 formed on the outer surface is connected to the screw tap to be connected to the coolant pipe. In addition, the safety shaft (15) connecting the main shaft (11) and the drive motor of the main screw rotor (10) is passed through the fastening is fixed to the power lock pin (35) at one end of the main shaft (11). The timing gear 34 and one side end of the safety shaft 15 are coupled to the flange 16. In addition, the timing gear 34 is fastened to the main shaft 11 in the same manner as the main shaft 11 at one end of the driven screw rotor through which the driven shaft 21 passes. It is installed to mesh with). In addition, an oil chamber 32 and a single bearing 33 are provided at a portion of the front cover body 30 through which the safety shaft 15 passes toward the driving motor to prevent gas leakage and to smoothly rotate the shafts. Is fastened.

As shown in FIG. 1 and FIG. 2, the front end frame 40 has a discharge port 41 serving as a passage through which gas is discharged, formed on the right side of the pump as shown in FIG. 1. In order to prevent deterioration of the pump due to the exhaust gas of the water jacket 43 is formed on the inner wall partitioned by the discharge partition wall 42. The water jacket 43 is connected so that the coolant injected from the coolant inlet 31 flows. In addition, the shear frame 40, the main, driven shaft 11, 21 is passed through and fastened to a double bearing 45 is fixed to the bearing fixing pin 44 for smooth rotation operation of the shaft The mechanical chamber 46 is fastened to prevent the leakage of gas.

As shown in FIGS. 1 and 2, the main body 50 includes coolant circulation spaces 52a, 52b, and 52c that allow the coolant to flow from the coolant inlet 31. As shown in FIG. 1, the cooling water discharge port 53 passing through the upper surface of the pump is formed at one side of the final cooling water circulation space 52c. In addition, as shown in FIG. 2, an inlet 51 through which gas is sucked is formed in the upper center of the right end portion of the main body 50. And the guide plate 54 to assist in the installation and operation of the main, driven screw rotor 10, 20 is received and mounted inside the main body 50 is connected to the front frame 40, respectively Roller bearings (57) and gas for smooth rotational operation on the other end portion of the body (50) to which the main and driven shafts (11) and (21) are inserted and fixed are mounted on both sides of the main and driven shafts. In order to prevent leakage of the oil chamber 55 and the lip seal 56 is mounted.

1 and 2, the grease cover 60 is mounted as a cover for sealing on the outer surface of the right end of the main body 50. As shown in FIG.

Hereinafter, the operation of the present invention configured as described above with reference to the drawings.

First, when the motor is driven, the main shaft 11 is rotated, and the driven shaft 21 engaged with each other by each timing gear 34 is rotated together, a pair of main, driven screw rotor (10), (20) Will rotate. When the screw rotors 10 and 20 are engaged with each other, the gas is sucked through the pump inlet 51 and pushed by the first stage screws 12 and 22 having two equilateral pitches. It is further compressed while passing through the second stage screws 13 and 23 having three equilateral pitches, which are smaller in volume, and then discharged through the discharge port 41. At this time, in view of the efficiency of gas compression, the more the blades of the screw rotor 10, 20, the more advantageous, but if so, the weight of the screw rotor is increased, the power used is increased and the movement path of the gas sucked into the pump Is increased, so that the foreign matter contained in the gas becomes more likely to be submerged in the pump. Therefore, two screw blades having an equilateral pitch and another equilateral pitch as described above are considered in consideration of the combination of screw blades compared to the compression efficiency. By constructing a screw rotor having three screw blades, a high compression and high vacuum are realized under the same power consumption conditions.

On the other hand, the gas discharged after being compressed as described above, as shown in Figure 1, first through the guide plate 54, the space on the side of the driven screw rotor 20 of the front end frame 40 To the discharge port 41 again in the space. At this time, the air, which has become high temperature and high pressure by the rotation operation of the screw rotors, is cooled by the water jacket 43 formed by the discharge port partition wall 42 on the inner wall surface of the discharge port 41.

The exhaust gas of the high temperature and high pressure discharged as described above is different in the degree of deterioration of each component of the pump according to the difference in temperature according to each part of the pump. More specifically, the discharged gas is the lowest temperature when the gas is sucked into the suction port 51 of the main body 50 and due to compression and rotational movement while passing through the main, driven screw rotors 10, 20 Increasingly high temperature and high pressure when passing through the last shear frame 50 to the discharge port 41 is the highest temperature. The components of the pump which are in contact when the gas of high temperature and high pressure move are deteriorated differentially by gas moving parts, and thus the deformation easily occurs due to the advantage, and ultimately, the pump is the biggest obstacle to the durability of the pump.

That is, in the present invention, the coolant is injected from the coolant inlet 31 of the front cover body 30 and firstly passes through the water jacket of the outlet 41 of the front end frame 40 to both sides of the main body 50. After the formed coolant circulation spaces 52a, 52b, and 52c flow in turn, the coolant circulation spaces 52c, 52b, and 52c exit to the coolant outlet 53 formed at one side of the coolant circulation space 52c, so that the temperature of the coolant is the lowest. When passing through the hottest portion of the pump and the next temperature portion to flow in order to correct the deterioration caused by the unbalanced temperature difference of the pump by the high temperature and high pressure gas.

Although the present invention has been shown and described with respect to specific embodiments thereof, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined by the appended claims. Anyone who can afford it will know.

10: main screw rotor 11: main shaft
12: 1st stage screw 13: 2nd stage screw
14 flank 15 safety axis
16: flange 20: driven screw rotor
21: driven shaft 22: single screw
23: two-stage screw 24: flank
30: front cover body 31: cooling water inlet
32: oil seal 33: single bearing
34: Timing Gear 35: Power Lock Pin
40: shear frame 41: discharge port
42: discharge partition 43: water jacket
44: bearing fixing pin 45: double bearing
46: mechanical chamber 50: the body
51: suction port 52a, 52b, 52c: cooling water circulation space
53: cooling water discharge port 54: guide plate
55; Oil Seal 56: Lip Seal
57: roller bearing 60: grease cover body
D: outer diameter d: rib diameter
L ₁ , L ₂ : Thread Lead Length

Claims (6)

In a water-cooled dry vacuum pump with a two-stage screw,
A main screw rotor (10) formed on the main shaft (11) by forming one or two-stage screws (12) and (13) integrally processed with different thread lead lengths;
A driven screw rotor 20 in which the first and second stages 22 and 23 of the driven shaft 21 are integrally machined with different thread lead lengths, respectively;
Two coolant inlets 31 for cooling the pump are mounted at the lower end, and the safety shaft 15 passes through and is fastened to the oil chamber 32 and the single bearing 33 for preventing the leakage of gas. At the left end of the main and driven shafts 11 and 21, the timing gear 34 is fixed to the safety lock pin 35 and is coupled to the safety shaft 15 by the flange 16. A front cover body 30;
Discharge port partition 42 is mounted to form a water jacket 43 on the inner wall surface of the discharge port 41 through which the discharged air escapes, and the main, driven shafts 11 and 21 are inserted into and fastened. A front frame 40 mounted to a site and configured of a mechanical chamber 46 and a double bearing 44 for preventing leakage of gas;
Cooling water circulation spaces 52a, 52b, 52c and cooling water discharge ports 53, which are spaces mounted on the upper portion and in which the cooling water is circulated, are formed on the upper portion of the main and driven shafts. 11), 21 is inserted and mounted on the left side, the guide plate 54 is mounted to prevent shaking during operation or installation of the main, driven shaft (11), 21 and the main, longitudinal shaft (11) ), (21) is fastened to the oil chamber 55 and the lip seal 56 to prevent the leakage of gas is mounted on the right end and also the roller bearing for smooth rotation of the main, driven shaft (11), (21) A main body 50 on which the 51 is mounted; And
Water-cooled dry vacuum pump having a two-stage screw, characterized in that it is mounted to the right end of the main body 50 comprises a grease cover body (60) for internal sealing of the main body (50). The method of claim 1,
The main screw rotor 10 is
The first stage screw 12 having two blades having the same thread lead length on the main shaft 11 and the second stage screw 13 having three blades having the same thread lead length are each end The thread lead length of the liver is otherwise integrally machined, and the first screw 12 having a relatively long thread lead length is formed on the gas inlet side, and the second screw 13 having a relatively short thread lead length is discharged. Two-stage characterized in that it comprises a main screw rotor 10 is formed on the side and is fixed to fit the flanks 14, 24 of each of the screws formed on the primary, driven screw rotor to contact Water-cooled dry vacuum pump with screw. The method of claim 1,
The driven screw rotor 20 is
The first stage screw 22 having two blades having the same thread lead length on the driven shaft 21 and the second stage screw 23 having three blades having the same thread lead length are each end. The thread lead length of the liver is otherwise integrally processed, and the first screw 22 having a relatively long thread lead length is formed on the gas inlet side, and the two screw 23 having a relatively short screw lead length is discharged. Water-cooled dry vacuum provided with a two-stage screw, characterized in that it comprises a driven screw rotor 20 is formed on the side and fitted to be fixed so that the flanks of the respective screws formed in the main, driven screw rotor to contact Pump. The method of claim 1,
The front cover 30 is
Cooling water injection holes 31 through which the coolant is injected are formed at the lower portion of the front cover 30, respectively, on the outer wall of the lower and lower positions where the timing gear 34 is mounted and connected to the external cooling water pipes. A thread tab is mounted on the surface of the 31 and an oil chamber 32 for preventing leakage of gas is mounted on the outer wall surface at the left end portion through which the safety shaft 15 is fastened to be connected to an external motor. A single bearing 33 is mounted to a portion of the shaft cover 15 that is in contact with the passing portion of the front cover body 30 and is fixed to the end of the main shaft 11 by a power lock pin 35 and then a timing gear. (34) is fastened and the flange 16 formed on the right side of the safety shaft (15) is a water-cooled dry vacuum pump having a two-stage screw, characterized in that the structure is fastened to the timing gear 34 and the flange connection F. The method of claim 1,
The shear frame 40 is
The movement path of the external cooling water flowing from the cooling water inlet 31 in the front cover body 30 is formed at the inner wall side of the discharge port 41 of the front frame 40 and is isolated by the discharge partition wall 42. The mechanical seal is connected to the inside of the jacket 43 and leads to the main body 50, and the left end of each part to which the main, driven shafts 11 and 21 are inserted and fastened to prevent leakage of gas. (46) is fastened and the right end is a water-cooled dry type with a two-stage screw, characterized in that consisting of a double bearing 45 is fixed to the bearing fixing pin (44) on the outer wall of the front cover body (30) Vacuum pump. The method of claim 1,
The main body 50 is
The movement path of the coolant flowing from the front end frame 40 is sequentially connected to the coolant circulation spaces 52a and 52b located at both sides of the main body 50, and finally at the rightmost end of the main body 50. A cooling water outlet 53 is formed on the outer wall of the upper main body 50 of the cooling water circulation space 52c and the cooling water discharge port 53 is formed on the outer wall of the cooling water circulation space 52c, and the pair of main and driven screw rotors 10, 20 is fitted so that each of the screw flanks 14, 24 are in contact with each other and is fixed to the inner space of the main body 50 without any gap, and the main and driven screw rotors 10, 20 are inserted and fixed. A guide plate 54 is mounted at the left end of the main body 50, and the oil chamber 55 and the lip seal 56 are sequentially mounted on the main end, the driven shafts 11 and 21, and the main body at the right end to prevent gas leakage. 50 is fastened to the contact position and smooth rotation of the main, driven shaft (11, 21) A water-cooled two-stage dry vacuum pump comprising a screw, characterized in that the roller bearing 51 is constituted is attached to the side position of the lip seal (56).

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