JP2618825B2 - Intercoolerless air-cooled 4-stage roots vacuum pump - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air-cooling method which is mainly used for drying a water or hydrocarbon-based cleaning liquid remaining in the product after cleaning the product with a water or hydrocarbon-based cleaning liquid substituted with liquefied CFC gas. The present invention provides an intercooler-less air-cooled four-stage roots-type vacuum pump which has a very high compression efficiency and which can be driven by a single motor.

[0002]

2. Description of the Related Art Japanese Unexamined Patent Publication (Kokai) No. 63-29089 discloses a two-stage blower which is parallel to the left and right, but does not suggest that a four-stage blower is used. Roots type air-cooled multi-stage vacuum pumps, which are conventional types, are of a dry type, and their demand has increased in recent years. However, the ultimate vacuum is 10 Torr ~
At 1 × 10 ^-2 Torr, a long intercooler is required between each stage chamber, which increases costs, enlarges the shape, and complicates piping. There are drawbacks, such as troubles in the rotation lock tend to occur.

[0003]

SUMMARY OF THE INVENTION Except for the above-mentioned drawbacks, the present invention provides an outer shell body, a housing mounting piece assembled before and after the main body, and inner surfaces assembled on the left and right sides of the outer shell body and the housing mounting piece. Strict compression ratio of the conventional three-stage vacuum pump even if it is a four-stage type, due to the provision of a rotor and a rotor shaft which are two-stage parallel to the left and right inside a pump shell component constituted by an arc-shaped cap The compression ratio is reduced to a level comparable to that of the prior art, so that it is not necessary to provide an intercooler required for each stage. Development is a research theme, and it is the purpose.

[0004]

SUMMARY OF THE INVENTION The present invention has been made to meet the above-mentioned object, and has an outer shell main body, housing mounting pieces assembled before and after the main body, and left and right sides of the outer shell main body and the housing mounting piece. A front and rear stage first compression chamber and a rear third stage compression chamber are assembled or integrally formed with the housing mounting piece inside the pump shell component constituted by the assembled inner surface arc-shaped cap. Of the first stage compression chamber and the third stage compression chamber of the third stage, the second stage compression chamber of the front part and the fourth stage compression chamber of the rear part are provided so as to match the other housing of the front and rear. The respective roots-type rotors and the first rotor shaft of each rotor are inserted into the stage compression chambers, and the respective roots-type rotors and the second rotors of the respective rotors are inserted into the second-stage compression chamber and the fourth-stage compression chamber. Insert the rotor shaft, and position the first and second rotor shafts. A first pulley and a second pulley, which can be linked by a single motor, and an air cooling fan for each shaft are provided on the outside protruding from the housing at each rear portion of the outer shell components. The two-stage compression chamber communicates with a passage between the first-stage and second-stage compression chambers in the pump shell component, and the discharge port of the second-stage compression chamber and the suction port of the third-stage compression chamber are connected to the outer shell of the pump. A second stage formed in the component,
The third stage compression chamber is communicated by a passage between the third stage compression chambers, and the third stage compression chamber and the fourth stage compression chamber are communicated by a passage between the third stage and fourth stage compression chambers in the outer shell component of the pump. Intercoolerless air-cooled four-stage roots vacuum pump.

[0005]

According to the present invention, the first outer stage compression chamber 7 and the third rear stage compression chamber 9 and the second front stage compression chamber are provided inside the pump shell component 1 having the structure described in the embodiment. The chamber 8 and the rear fourth-stage compression chamber 10 are provided in parallel, and the first-stage compression chamber 7 and the third
The roots-type rotors 11 and 13 and the first rotor shafts 14 of the rotors are inserted into the stage compression chamber 9, and the outside protruding from the housing 5 at the rear of the first rotor shaft 14, the second stage compression chamber 8 and the second The roots type rotors 12 and 15 and their second rotor shafts 16 are inserted into the four-stage compression chamber 10, and the second rotor shafts 16
The first pulley 17 and the second pulley 1 driven by one motor M are connected to the outside protruding from the rear housing 5.
8 and the first rotor shaft 14 and the second rotor shaft 16
With the configuration driven by two motors, it is possible to easily satisfy the necessity of equalizing the change in horsepower required for the operation from the low vacuum range to the high vacuum range to the severe patch operation. The load on the rotor shaft 14 side is large, and the load on the second rotor shaft 16 is large in a high vacuum region, which can be easily averaged. Further, in the present invention, the first-stage compression chamber 7 and the second-stage compression chamber 8 are communicated by the passage 21, and the discharge port side 8b of the second-stage compression chamber 8 and the suction side 9a of the third-stage compression chamber 9 are communicated with each other. The third stage compression chamber 9 and the fourth stage compression chamber 10 are communicated by a passage 23 to realize four-stage compression. It is also the first proposal of the present invention that the passages 21 to 23 are formed inside the pump shell component 1 to eliminate piping.
The cooling fan 1 is attached to the first rotor shaft 14 and the second rotor shaft 16.
Along with the air-cooling method for cooling the pump outer casing component 1 by means of 9, 20, it is possible to produce a very advantageous effect of an intercooler-less air-cooling vacuum pump. Even if the intercooler is not used, the discharge gas discharged from the discharge port of the fourth-stage compression chamber 10 can be cooled by the intercooler, the temperature difference can be reduced, and the gas can be discharged into the atmosphere.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The accompanying drawings show one embodiment of the present invention.
FIG. 1 is a plan view of a required portion of FIG. 2, FIG. 2 is a front view of a section taken along the line AA of FIG. 1, and FIG. 3 is a side view of a section taken along the line 1B-B of FIG. FIG. 4 is a perspective view of an outer shell main body, and FIG. 5 is a perspective view of an example of a roots type rotor and a rotor shaft.

Reference numeral 1 designates an integrally cast outer shell body 2, housing mounting pieces 3 and 3a assembled to the front and rear of the outer shell body 2, and inner surfaces assembled to the left and right of the outer shell body 2 and the housing mounting pieces 3 and 3a. A pump outer component comprising a semicircular cap 4, 4a, wherein a front first-stage compression chamber 7 and a rear third-stage compression chamber 9 separated by a partition 6 inside the element 1. Of the housings 5, 5a, 5 ', 5a' assembled to the housing mounting pieces 3, 3a are aligned with the housings 5, 5a on the right side in FIG. 1 and are further separated by a partition wall 6a. A second-stage compression chamber 8 and a rear-stage fourth-stage compression chamber 10 are provided so as to match the left housings 5 ', 5a'. The first-stage compression chamber 7 and the third-stage compression chamber 9 are provided with a roots-type rotor 11, a roots-type rotor 13, and a first rotor of each rotor.
The rotor shaft 14 is inserted, and the roots-type rotor 12 and the roots-type rotor 15 are provided in the second-stage compression chamber 8 and the fourth-stage compression chamber 10, respectively.
While inserting the second rotor shaft 16 of each roots type rotor, the first rotor shaft 13 and the rear portion of the pump shell component 1 protruding from the housing 5a, and the rear portion of the second rotor shaft 16 protruding from the housing 5a ', A first pulley 17 and a second pulley 18 that can be linked by one motor M, and air cooling fans 19 and 20 for each shaft 13 and 16 are provided.

The first-stage compression chamber 7 and the second-stage compression chamber 8 communicate with each other through a passage 21 between the left and right first-stage and second-stage compression chambers in the outer casing component 1 of the pump. Discharge port 8b
And the suction port 9a of the third-stage compression chamber 9 are communicated with each other by the passage 22 between the left and right second-stage and third-stage compression chambers in the outer shell component 1.
The third-stage compression chamber 9 and the fourth-stage compression chamber 10 are separated from each other by the outer shell component 1
The third and fourth stages communicate with each other through a passage 23 between the compression chambers.

Each of the first, second, third, and fourth stage compression chambers 7 to 10 is a cocoon type. In this embodiment, a roots type rotor uses a pair of three-lobe type rotors as shown in FIG. The rear portions of the first rotor shaft 14 and the second rotor shaft 16 are rotatably supported by the housings 5 and 5 ′ and project from the motor pulley provided on the output shaft of the motor M installed on the installation plate 31 on the upper surface of the outer shell body 2. The V-belts 32 and 33 are hung on the first pulley 17 and the second pulley 18 to drive the first rotor shaft 14 and the second rotor shaft 16. Cooling fins 34 are formed on the outer surface of the pump shell component 1 including the outer shell body 2, and are cooled by being exposed to cooling air from the cooling fans 19 and 20. Inside the front housing 5a, the upper and lower first rotor shafts 14, 1
The timing gears 35 fixed to 4 are fixed and meshed in the lubricating oil. Timing gears 36, 36 fixed above and below the second rotor shafts 16, 16 in the housing 5a '
Is the same. An atmosphere communication port R is provided on the peripheral wall that communicates with the discharge port of the casing of the fourth compression chamber 10, which is the final compression chamber.

The first-stage compression chamber 7, the second-stage compression chamber 8, the third-stage compression chamber 9, and the fourth-stage compression chamber 10 include roots-type rotors 11, 1
The object of the multi-stage vacuum pump of increasing the compression ratio by 2, 13, 14 is to achieve, by changing the axial speed of the first rotor shaft and the second rotor shaft, and changing the volume of each stage compression chamber. The change in the shaft speed can be achieved by, for example, a relative change in the diameter of the first pulley 17 and the diameter of the second pulley. Each stage compression chamber and each stage roots-type rotor in FIG. 1 are merely schematic diagrams relating to the location of the present embodiment. In short, the volume of each stage compression chamber and the shape of each stage roots-type rotor are determined by the design, and the roots-type rotor 11, the roots-type rotor 12, and the roots-type rotor 13 are designed for the convenience of the design.
And the roots type rotor 15 may be of the same type .

As described above, the present invention provides a parallel configuration of the first-stage compression chamber 7, the third-stage compression chamber 9, the second-stage compression chamber 8, and the fourth-stage compression chamber 10 as well as the roots. Type rotor 1
1, 13 and their rotor shafts 14 inserted into the first-stage compression chamber 7 and the third-stage compression chamber 9, and the roots-type rotors 12, 15 and their second-stage compression chambers 8 of the second rotor shaft 16; Insertion into the four-stage compression chamber 10, the first rotor shaft 14, the second rotor shaft 1
6, each of the first pulley 17 and the second pulley 18 which can be driven by one motor M of each external projection, and the passage 2 formed inside the pump outer component 1 without using piping.
First, second, and third compression chambers 7 and 8 are provided by 1, 22, and 23.
Communication between the discharge port 8b of the compression chamber 8 and the suction port 9a of the third compression chamber 9, and the third compression chamber 9 and the fourth compression chamber 10
A new type of intercoolerless, air-cooled, four-stage roots vacuum pump is provided that creates communication and, in combination with air cooling of the pump shell element 1 by the cooling fans 19, 20 of the first and second rotor shafts 14, 16, Has an effect that can be.

[Brief description of the drawings]

 The accompanying drawings illustrate one embodiment of the present invention,

FIG. 1 is a plan view of a required part of FIG. 2;

FIG. 2 is a front view cut along the line AA of FIG. 1;

FIG. 3 is a side view cut along a line BB in FIG. 1;
Pulleys omitted

FIG. 4 is a perspective view of an outer shell body.

FIG. 5 is a perspective view of a roots type rotor and a rotor shaft.

[Explanation of symbols]

1 → Pump shell component 2 → Outer shell body 3, 3a → Housing mounting piece 4, 4a → Cap 5, 5a · 5 ′, 5a ′ → Housing 6, 6a ・ 6 ′, 6a ′ → Partition 7 → First stage Compression chamber 8
→ 2nd stage compression chamber 8b → discharge port 9 → 3rd stage compression chamber 9a → suction port 10
→ Fourth stage compression chambers 11, 13 → Roots rotor 14 → First rotor shaft 12, 15 → Roots rotor 16 → Second rotor shaft M
→ motor 17 → first pulley 18 → second pulley 19,20 → cooling fan 21 → passage 22 → passage 23 → passage 31 → installation plates 32, 33 → V-belt 34 → cooling fins 35, 36 → timing gear

Claims (1)

(57) [Claims] Claim: What is claimed is: 1. A pump shell component comprising an outer shell main body, housing mounting pieces assembled before and after the main body, and inner surface arc-shaped caps assembled on the left and right sides of the outer shell main body and the housing mounting piece. A first stage compression chamber at the front and a third stage compression chamber at the rear are assembled to the housing mounting piece or provided so as to match one of the front and rear housings integrally formed therein. A compression chamber and a rear fourth stage compression chamber are provided so as to match the other front and rear housings, and a roots type rotor and a rotor of each rotor are provided in the first stage compression chamber and the third stage compression chamber. The first rotor shaft is inserted, the roots-type rotors and the second rotor shafts of the rotors are inserted into the second-stage compression chamber and the fourth-stage compression chamber, and the pumps of the first rotor shaft and the second rotor shaft are inserted. External projecting from each rear housing of shell components A first pulley and a second pulley that can be interlocked by one motor, and a cooling fan for each shaft, and the first-stage compression chamber and the second-stage compression chamber are provided in a first-stage pump outer component. , Through the passage between the second-stage compression chambers,
The discharge port of the second-stage compression chamber and the suction port of the third-stage compression chamber communicate with each other through a passage between the second-stage and third-stage compression chambers formed in the outer shell component of the pump. An intercooler-less air-cooled four-stage roots-type vacuum pump, characterized in that the fourth-stage compression chamber communicates with a passage between the third-stage and fourth-stage compression chambers inside the pump shell component.