CN106762651A - A kind of nitrogen-sealed dry screw vacuum pump - Google Patents
A kind of nitrogen-sealed dry screw vacuum pump Download PDFInfo
- Publication number
- CN106762651A CN106762651A CN201611189600.2A CN201611189600A CN106762651A CN 106762651 A CN106762651 A CN 106762651A CN 201611189600 A CN201611189600 A CN 201611189600A CN 106762651 A CN106762651 A CN 106762651A
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- CN
- China
- Prior art keywords
- nitrogen
- screw rod
- vacuum pump
- screw
- driven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/084—Toothed wheels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
- F04C27/009—Shaft sealings specially adapted for pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
- F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/06—Silencing
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
A kind of nitrogen-sealed dry screw vacuum pump of the present invention, the molded line in vavuum pump driving screw rod and driven screw is single head uniform pitch stepped tooth；Motor is provided with the fuel tank installed on the drive end bearing bracket, the driving screw rod is driven with the rotating shaft of motor by shaft coupling through one end of front-end bearing pedestal and is connected, and shaft coupling is located in fuel tank, lippacking is provided between the driving screw rod and driven screw and rear bearing block, double seal is provided between the driving screw rod and driven screw and front-end bearing pedestal, the double seal is mechanical sealing member and nitrogen gas seal equipment, the nitrogen gas seal equipment is by front-end bearing pedestal, the nitrogen chamber that mechanical sealing member is constituted with the end of driving screw rod or driven screw, and the nitrogen chamber is connected with source nitrogen.A kind of nitrogen-sealed dry screw vacuum pump of the present invention, good sealing effect and pumping efficiency is high.
Description
Technical field
The present invention relates to a kind of vavuum pump, more particularly, to a kind of dry screw vacuum pump of utilization nitrogen sealing structure,
Belong to vacuum pump technology field.
Background technology
At the beginning of dry screw vacuum pump is last century 90, with America and Europe enterprise in film, integrated circuit, semicon industry
The ideal vacuum equipment grown up to the active demand of oil-free high-vacuum apparatus.Because dry screw vacuum pump has vacuum
High, pumping performance stabilization, pumping scope are wide, simple and compact for structure, non-maintaining, do not contact without friction, without useless between suction element
Gas, without discharging of waste liquid the features such as, therefore dry screw vacuum pump is a kind of preferable energy saving environmental protection product, has obtained each row each
Industry being widely recognized as and uses.
A pair of screw rods of dry screw vacuum pump can not mutually be contacted, and the end face of the inner chamber and the pump housing of screw rod and the pump housing all must
Certain gap must be kept.The starting of domestic dry screw vacuum pump than later, the product of neither one comparative maturity so far, mainly
Be embodied in poor reliability, the defect such as temperature rise is big, noise is high, oil leak, at present the country screw vacuum pump popularity rate less than 10%, and
And domestic screw vacuum pump relies primarily on import, and the price of import screw vacuum pump is very expensive.Determine dry type screw vacuum
The key of pump reliability has two principal elements, one be screw pump dynamic sealing, another is the molded line of screw rotor, many
Relevant unit is all attempting that a kind of pumping efficiency of research is high, vacuum is high, temperature rise is low, simple structure, easy to process, performance are steady
The fixed, screw molded lines of good reliability.
The content of the invention
It is an object of the invention to overcome above-mentioned deficiency, there is provided a kind of good sealing effect and pumping efficiency nitrogen-sealed high
Dry screw vacuum pump.
The object of the present invention is achieved like this：
A kind of nitrogen-sealed dry screw vacuum pump, the nitrogen-sealed dry screw vacuum pump includes the pump housing, the pump housing
Rear and front end be separately installed with drive end bearing bracket and rear end cap, be separately installed with the drive end bearing bracket and rear end cap front-end bearing pedestal and after
Bearing block, is worn in the pump housing and is connected to driving screw rod and driven screw, and the two ends of the driving screw rod and driven screw are worn respectively
It is inserted in the bearing holder (housing, cover) in front-end bearing pedestal and rear bearing block after crossing drive end bearing bracket and rear end cap；
Molded line in the driving screw rod and driven screw is single head uniform pitch stepped tooth；
Motor is provided with the fuel tank installed on the drive end bearing bracket, the driving screw rod is through one end of front-end bearing pedestal by connection
The rotating shaft of axle device and motor drives and is connected, and shaft coupling is in fuel tank, the driving screw rod and driven screw and rear bearing
Lippacking is provided between seat, double seal is provided between the driving screw rod and driven screw and front-end bearing pedestal,
The double seal is mechanical sealing member and nitrogen gas seal equipment, and the nitrogen gas seal equipment is close by front-end bearing pedestal, machinery
The nitrogen chamber that the end of sealing and driving screw rod or driven screw is constituted, and the nitrogen chamber is connected with source nitrogen.
The internal-and external diameter of a kind of nitrogen-sealed dry screw vacuum pump of the present invention, the driving screw rod and driven screw is equal.
A kind of nitrogen-sealed dry screw vacuum pump of the present invention, the internal diameter of the driving screw rod and the external diameter of driven screw it
Than being 1：2.5.
A kind of nitrogen-sealed dry screw vacuum pump of the present invention, the single head uniform pitch in the driving screw rod and driven screw
Stepped tooth it is oppositely oriented.
The external diameter of a kind of nitrogen-sealed dry screw vacuum pump of the present invention, driving screw rod and driven screw is from air entry
Become larger to exhaust outlet.
A kind of nitrogen-sealed dry screw vacuum pump of the present invention, single head uniform pitch ladder in the driving screw rod and driven screw
Shape tooth is provided with five circles.
A kind of nitrogen-sealed dry screw vacuum pump of the present invention, is connected with a silencer on the exhaust outlet of the pump housing.
A kind of nitrogen-sealed dry screw vacuum pump of the present invention, is provided with cooling jacket, the rear end cap on the pump housing
With cooling water cavity is provided with drive end bearing bracket.
Compared with prior art, the beneficial effects of the invention are as follows：
The present invention uses single head uniform pitch trapezoidal tooth screw molded lines of rotor, and this profile processing is simple, low cost, general numerical control lathe
Bed or CNC milling machine can be achieved with the processing of high-precision screw rotor, and the manufacturing cost of such screw vacuum pump can drop significantly
It is low, active demand of the more users to screw vacuum pump can be met；
It is advantageous in that present invention introduces nitrogen-sealed：It is with low cost（Nitrogen produces low cost）, pollution-free, good reliability
（Nitrogen belongs to inert gas in any condition all without burning, blast）And pollution will not also be produced to air；Dry type spiral shell
Bar vavuum pump use nitrogen-sealed can with the lubricating oil in the fuel tank of completely isolated vavuum pump enter the pump housing suction muffler in, not only
Pumped gas is avoided to be polluted by the oil, while pollution of the pumped gas to vacuum pump lubricating oilses can also be avoided；Using nitrogen-sealed
Another benefit be available with low temperature nitrogen and take away the frictional heat of seal, the service life of seal is prolonged significantly
It is long.
Brief description of the drawings
Fig. 1 is a kind of elevational cross-sectional view of nitrogen-sealed dry screw vacuum pump of the invention.
Fig. 2 is a kind of vertical view cutaway drawing of nitrogen-sealed dry screw vacuum pump of the invention.
Fig. 3 is a kind of side view cutaway drawing of nitrogen-sealed dry screw vacuum pump of the invention.
Wherein：
The pump housing 1, rear end cap 2, rear bearing block 3, rear bearing gland 4, lippacking 5, driving screw rod 6, driven screw 7, front end
Lid 8, double seal 9, front-end bearing pedestal 10, travelling gear 11, fuel tank 12, shaft coupling 13, motor 14, silencer 15；
Air entry 1.1, exhaust outlet 1.2.
Specific embodiment
Referring to Fig. 1 ~ 3, a kind of nitrogen-sealed dry screw vacuum pump of the present invention, the nitrogen-sealed dry type screw rod
Vavuum pump includes the pump housing 1, and the rear and front end of the pump housing 1 is separately installed with drive end bearing bracket 8 and rear end cap 2, the He of the drive end bearing bracket 8
It is separately installed with to be worn in front-end bearing pedestal 10 and rear bearing block 3, the pump housing 1 on rear end cap 2 and is connected to driving screw rod 6 and driven screw
7, the two ends of the driving screw rod 6 and driven screw 7 are inserted in the He of front-end bearing pedestal 10 after being each passed through drive end bearing bracket 8 and rear end cap 2
In bearing holder (housing, cover) in rear bearing block 3；
Motor 14 is provided with the fuel tank 12 installed on the drive end bearing bracket 8, the driving screw rod 6 passes through the one of front-end bearing pedestal 10
End is driven with the rotating shaft of motor 14 by shaft coupling 13 and is connected, and shaft coupling 13 is located in fuel tank 12, the He of the driving screw rod 6
Lippacking 5, the driving screw rod 6 and driven screw 7 and front-end bearing pedestal are provided between driven screw 7 and rear bearing block 3
Double seal 9 is provided between 10, the double seal 9 is mechanical sealing member and nitrogen gas seal equipment, and the nitrogen is close
Seal apparatus are the nitrogen chamber being made up of the end of front-end bearing pedestal 10, mechanical sealing member and driving screw rod 6 or driven screw 7, and
The nitrogen chamber is connected with source nitrogen；
Molded line in the driving screw rod 6 and driven screw 7 is single head uniform pitch stepped tooth；
Further, driving screw rod 6 is equal with the internal-and external diameter of driven screw 7, and internal diameter and the driven screw 7 of driving screw rod 6
The ratio between external diameter is 1：2.5；Meanwhile, single head uniform pitch stepped tooth in driving screw rod 6 and driven screw 7 it is oppositely oriented and main
The external diameter of dynamic screw rod 6 and driven screw 7 is from air entry 1.1 and is become larger to exhaust outlet 1.2；
Further, single head uniform pitch stepped tooth is provided with five circles on the driving screw rod 6 and driven screw 7；
Further, it is connected with a silencer 15 on the exhaust outlet 1.2 of the pump housing 1；
Further, cooling jacket is provided with the pump housing 1, cooling water is provided with the rear end cap 2 and drive end bearing bracket 8
Chamber, is cooled down for water pump body；
In addition：It should be noted that above-mentioned specific embodiment is only a prioritization scheme of this patent, those skilled in the art
Any change or improvement that member is done according to above-mentioned design, within the protection domain of this patent.
Claims (8)
1. a kind of nitrogen-sealed dry screw vacuum pump, the nitrogen-sealed dry screw vacuum pump includes the pump housing（1）, it is described
The pump housing（1）Rear and front end be separately installed with drive end bearing bracket（8）And rear end cap（2）, the drive end bearing bracket（8）And rear end cap（2）Upper point
Front-end bearing pedestal is not installed（10）And rear bearing block（3）, the pump housing（1）Inside wear and be connected to driving screw rod（6）And driven screw
（7）, the driving screw rod（6）And driven screw（7）Two ends be each passed through drive end bearing bracket（8）And rear end cap（2）After be inserted in before
Bearing block（10）And rear bearing block（3）In interior bearing holder (housing, cover)；It is characterized in that：
The driving screw rod（6）And driven screw（7）On molded line be single head uniform pitch stepped tooth；The drive end bearing bracket（8）Upper peace
The fuel tank of dress（12）On be provided with motor（14）, the driving screw rod（6）Through front-end bearing pedestal（10）One end pass through shaft coupling
Device（13）With motor（14）Rotating shaft drive and be connected, and shaft coupling（13）Positioned at fuel tank（12）It is interior, the driving screw rod（6）With
Driven screw（7）With rear bearing block（3）Between be provided with lippacking（5）, the driving screw rod（6）And driven screw（7）
With front-end bearing pedestal（10）Between be provided with double seal（9）, the double seal（9）It is mechanical sealing member and nitrogen-sealed
Device, the nitrogen gas seal equipment is by front-end bearing pedestal（10）, mechanical sealing member and driving screw rod（6）Or driven screw（7）'s
The nitrogen chamber that end is constituted, and the nitrogen chamber is connected with source nitrogen.
2. as claimed in claim 1 a kind of nitrogen-sealed dry screw vacuum pump, it is characterised in that：The driving screw rod（6）With
Driven screw（7）Internal-and external diameter it is equal.
3. as claimed in claim 2 a kind of nitrogen-sealed dry screw vacuum pump, it is characterised in that：The driving screw rod（6）'s
Internal diameter and driven screw（7）The ratio between external diameter be 1：2.5.
4. as claimed in claim 1 a kind of nitrogen-sealed dry screw vacuum pump, it is characterised in that：The driving screw rod（6）With
Driven screw（7）On single head uniform pitch stepped tooth it is oppositely oriented.
5. as claimed in claim 1 a kind of nitrogen-sealed dry screw vacuum pump, it is characterised in that：Driving screw rod（6）With it is driven
Screw rod（7）External diameter be from air entry（1.1）To exhaust outlet（1.2）Become larger.
6. as claimed in claim 1 a kind of nitrogen-sealed dry screw vacuum pump, it is characterised in that：The driving screw rod（6）With
Driven screw（7）Upper single head uniform pitch stepped tooth is provided with five circles.
7. as claimed in claim 1 a kind of nitrogen-sealed dry screw vacuum pump, it is characterised in that：The pump housing（1）Exhaust
Mouthful（1.2）On be connected with a silencer（15）.
8. as claimed in claim 1 a kind of nitrogen-sealed dry screw vacuum pump, it is characterised in that：The pump housing（1）Upper setting
There are cooling jacket, the rear end cap（2）And drive end bearing bracket（8）On be provided with cooling water cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611189600.2A CN106762651A (en) | 2016-12-21 | 2016-12-21 | A kind of nitrogen-sealed dry screw vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611189600.2A CN106762651A (en) | 2016-12-21 | 2016-12-21 | A kind of nitrogen-sealed dry screw vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106762651A true CN106762651A (en) | 2017-05-31 |
Family
ID=58896589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611189600.2A Pending CN106762651A (en) | 2016-12-21 | 2016-12-21 | A kind of nitrogen-sealed dry screw vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106762651A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110486276A (en) * | 2019-08-21 | 2019-11-22 | 浙江方远力鑫真空设备有限公司 | A kind of double cooling screw vacuum pumps |
| CN110939572A (en) * | 2019-11-26 | 2020-03-31 | 福斯流体控制（苏州）有限公司 | Control method of dry-type screw vacuum pump |
| CN111356840A (en) * | 2018-04-23 | 2020-06-30 | 株式会社爱发科 | Pump device |
| WO2021119879A1 (en) * | 2019-12-15 | 2021-06-24 | 江苏亚太工业泵科技发展有限公司 | Screw vacuum pump having internal nitrogen gas seal provided at gas discharge side |
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| CN206360892U (en) * | 2016-12-21 | 2017-07-28 | 江阴华西节能技术有限公司 | A kind of nitrogen-sealed dry screw vacuum pump |
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2016
- 2016-12-21 CN CN201611189600.2A patent/CN106762651A/en active Pending
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111356840A (en) * | 2018-04-23 | 2020-06-30 | 株式会社爱发科 | Pump device |
| CN111356840B (en) * | 2018-04-23 | 2021-05-25 | 株式会社爱发科 | Pump device |
| CN110486276A (en) * | 2019-08-21 | 2019-11-22 | 浙江方远力鑫真空设备有限公司 | A kind of double cooling screw vacuum pumps |
| CN110939572A (en) * | 2019-11-26 | 2020-03-31 | 福斯流体控制（苏州）有限公司 | Control method of dry-type screw vacuum pump |
| WO2021119879A1 (en) * | 2019-12-15 | 2021-06-24 | 江苏亚太工业泵科技发展有限公司 | Screw vacuum pump having internal nitrogen gas seal provided at gas discharge side |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170531 |
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| RJ01 | Rejection of invention patent application after publication |